Miniature test object carrier
By designing a miniature test object carrier and utilizing the cooperation of a pusher and an elastic element, multi-directional limiting and vacuum hole adsorption are provided, solving the problems of material dropping and inaccurate positioning when the probe is detached from the miniature test object carrier, and realizing more stable electrical connection and beam testing.
Patent Information
- Application Number
- CN202111683719.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2021-12-31
- Publication Date
- 2025-11-21
- Estimated Expiration
- 2041-12-31
AI Technical Summary
In existing technologies, miniature test objects are prone to falling off when the probe detaches, and the positioning is also inaccurate.
The device employs a miniature test object carrier design, which includes a carrier body, a pusher, and an elastic element. The pusher moves between a limited position and a released position, and the elastic restoring force is used to position the miniature test object. The limiting element and the top provide multi-directional limiting, and the vacuum hole assists in adsorption.
It effectively solves the problem of micro-test objects falling off as they detach from the probe, improves positioning accuracy, and ensures the stability of the probe's electrical connection and the smooth progress of beam testing.
Smart Images

Figure CN116412853B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a vehicle, and more particularly to a miniature test object vehicle. Background Technology
[0002] Micro-components (such as edge-emitting laser diodes) undergo testing during manufacturing. The testing environment may be high or low temperature, and there may be multiple micro-components under test. The testing may include electrical testing, energy testing, optical testing, etc.
[0003] Please see Figure 1 , Figure 1 This is a perspective view of a prior art miniature test object carrier. As shown, a miniature test object carrier PA1 has a plurality of support grooves PAT1 for supporting a plurality of miniature test objects U1, U2, and electrically connecting the miniature test objects U1, U2 to a plurality of probes to generate a plurality of laser beams. The miniature test objects U1, U2 can be edge-emitting laser (EEL) diodes. Therefore, probes are inserted into the miniature test objects U1, U2 from above, and laser beams are generated from both sides of the miniature test objects U1, U2, as shown in the figure. Figure 9 .
[0004] However, in the existing technology, the micro-test carrier PA1 only uses suction to adsorb micro-test objects U1 and U2 through the vacuum hole PAH1. When the probe detaches from the micro-test objects U1 and U2, the probe is prone to temporarily sticking to the micro-test objects U1 and U2, causing the micro-test objects U1 and U2 to move and detach from the micro-test carrier PA1 or even fall off, resulting in material spillage. In addition, because the micro-test objects U1 and U2 are very small, relying solely on suction adsorption also has the problem of inaccurate positioning. Therefore, there is room for improvement in the existing technology. Summary of the Invention
[0005] In view of the problems existing in the prior art, which rely solely on suction to adsorb micro-samples, such as material loss upon probe detachment, inaccurate positioning, and various other related issues, a primary objective of this invention is to provide a micro-sample carrier to solve at least one of the problems in the prior art.
[0006] To address the problems of the prior art, the present invention provides a miniature test object carrier for carrying a plurality of miniature test objects and electrically connecting the miniature test objects to a plurality of probes to generate a plurality of light beams. The miniature test object carrier includes a carrier body, a pusher, and an elastic element. The carrier body includes a plurality of bearing platforms arranged alternately along an extending direction, each bearing platform carrying each miniature test object. The pusher is disposed on the carrier body and is operatively movable from a limiting position along the extending direction to a releasing position, and includes a pusher body and a plurality of limiting members. The pusher body extends along the extending direction. The limiting members extend from the pusher body along a limiting direction substantially perpendicular to the extending direction, each limiting member corresponding to each bearing platform and located in a gap between adjacent bearing platforms, and having a protrusion extending away from the extending direction to confine each miniature test object to each bearing platform at the limiting position. An elastic element is disposed between the carrier body and the pusher, and is used to reset the pusher to the limit position by means of elastic restoring force after the pusher is operatively pushed to the release position for the micro test object to be placed, thereby limiting the micro test object by means of the limiter.
[0007] Based on the aforementioned necessary technical means, an auxiliary technical means derived from the present invention is that each support platform in the miniature test object carrier further includes a support portion and a top surface. The support portion has a support surface for supporting each miniature test object. The top surface connects to the support portion and forms a top surface with the support portion, the top surface being used to abut against each miniature test object.
[0008] Based on the aforementioned necessary technical means, an auxiliary technical means derived from the present invention is that each carrier platform in the miniature test object carrier further includes a set of carrier limiting parts, which are disposed on the carrier surface of the carrier part and separated from the top, in order to assist in limiting each miniature test object.
[0009] Based on the aforementioned necessary technical means, an auxiliary technical means derived from the present invention is that each carrier platform in the miniature test object carrier further includes a set of carrier limiting parts, which are disposed on the carrier surface of the carrier and connected to the abutting surface of the abutting top, in order to assist in limiting each miniature test object.
[0010] Based on the aforementioned necessary technical means, an auxiliary technical means derived from the present invention is that each limiting member in the miniature test object carrier further includes an extension portion, which extends from the pushing body along the limiting direction and connects to the protruding portion.
[0011] Based on the aforementioned necessary technical means, an auxiliary technical means derived from the present invention is to provide a top groove for the protrusion in the micro test object carrier, each top groove being used to avoid interference when one of the probes is electrically connected to each micro test object.
[0012] Based on the aforementioned necessary technical means, an auxiliary technical means derived from the present invention is to provide a side groove on the protrusion of the micro test object carrier, each side groove being used to avoid the light beam emitted by each micro test object after it conducts electricity through the probe.
[0013] Based on the aforementioned necessary technical means, an auxiliary technical means derived from the present invention is to make the extension portion in the micro test object carrier have an extension limiting surface, and each extension limiting surface abuts and limits each micro test object when the pusher is reset to the limiting position.
[0014] Based on the aforementioned necessary technical means, an auxiliary technical means derived from the present invention is to make the protruding part in the micro test object carrier have a protruding limiting slope, and each protruding limiting slope abuts and limits each micro test object when the pusher is reset to the limiting position.
[0015] Based on the aforementioned necessary technical means, an auxiliary technical means derived from the present invention is to provide a vacuum hole in each support platform of the micro test object carrier, and to use suction to assist in adsorbing each micro test object through the vacuum hole.
[0016] As described above, this invention utilizes a carrier body, a pusher, and an elastic element to carry a plurality of miniature test objects (DUTs), and electrically connects the DUTs to a plurality of probes to generate a plurality of light beams. Compared to existing technologies, this invention utilizes a pusher that is operably moved between a limiting position and a releasing position. In the releasing position, the carrier body can accommodate and support the miniature DUTs, and the elastic restoring force of the elastic element returns the pusher to the limiting position. This effectively limits the miniature DUTs carried by the carrier platform, solving the problem of DUTs falling off with the probes in existing technologies. Furthermore, this invention uses a top surface to provide limiting in another direction for the miniature DUTs. Additionally, this invention uses a supporting limiting part to provide limiting in yet another direction for the miniature DUTs. Therefore, this invention provides limiting in two or more directions while simultaneously improving the positioning accuracy of the miniature DUTs. Furthermore, this invention can also incorporate a vacuum hole, as in existing technologies, to simultaneously use suction to adsorb the miniature DUTs for auxiliary positioning and limiting.
[0017] To provide a better understanding of the above and other aspects of the present invention, specific embodiments are described below in conjunction with the accompanying drawings, but these are not intended to limit the scope of the invention. Attached Figure Description
[0018] Figure 1 To display a three-dimensional view of a prior art miniature test object carrier;
[0019] Figure 2To show a perspective view of the miniature test object carrier provided in the first embodiment of the present invention;
[0020] Figure 3 To display Figure 2 A-A cross-section;
[0021] Figure 4 This is a schematic diagram illustrating the process of carrying a micro-sample in the first embodiment of the present invention;
[0022] Figure 5 This is a schematic diagram showing the first embodiment of the present invention carrying a miniature test object;
[0023] Figure 6 This is a schematic diagram illustrating the limitation of a miniature test object according to the first embodiment of the present invention;
[0024] Figure 7 To display Figure 6 B-B cross-section;
[0025] Figure 8 To display Figure 6 Side view;
[0026] Figure 9 A schematic diagram illustrating the laser beam generated when a miniature object under test is electrically connected to a probe;
[0027] Figure 10 This is a schematic diagram illustrating the process of the miniature test object carrier providing the second embodiment of the present invention carrying a miniature test object;
[0028] Figure 11 A schematic diagram illustrating the limiting of a micro-test object according to the second embodiment of the present invention; and
[0029] Figure 12 To display Figure 11 Side view.
[0030] In the attached figures, the following labels are used:
[0031] PA1: Miniature Test Object Carrier
[0032] PAT1: Bearing Groove
[0033] PAH1: Vacuum port
[0034] 1,1a: Miniature test object carrier
[0035] 11,11a: Vehicle body
[0036] 111, 111a: Support platform
[0037] 1111: Bearing section
[0038] 1112,1112a: Reaching the top
[0039] 1113, 1113a: Bearing limiting part
[0040] 12,12a: Pushing component
[0041] 121: Promoting the Main Body
[0042] 122, 122a: Limiting components
[0043] 1221, 1221a: Protrusion
[0044] 1222, 1222a: Extension
[0045] 13: Elastic element
[0046] A1, A1a: Bearing surface
[0047] A2, A2a: Top surface
[0048] A3: Extended limiting surface
[0049] A3a: Protruding limiting slope
[0050] D1: Extension direction
[0051] D2: Limiting direction
[0052] D3: Reset Direction
[0053] D4: First Direction
[0054] H1: Vacuum port
[0055] L1, L2: Laser beams
[0056] P1, P2: Probes
[0057] SP: Gap
[0058] T1: Top Recess
[0059] T2: Side groove
[0060] U1, U2: Miniature test objects Detailed Implementation
[0061] The specific embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description and the claims. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.
[0062] Please refer to the following: Figures 2 to 5 ,in, Figure 2To show a perspective view of the miniature test object carrier provided in the first embodiment of the present invention; Figure 3 To display Figure 2 A-A cross-section; Figure 4 To illustrate the process of carrying a micro-sample under test in the first embodiment of the present invention; and, Figure 5 This diagram illustrates a first embodiment of the invention carrying a miniature test object. As shown, a miniature test object carrier 1 carries a plurality of miniature test objects U1 and U2 (illustrated and labeled in the figure), and includes a carrier body 11, a pusher 12, and an elastic element 13. The following description uses miniature test object U1 as an example, but the same implementation can also be applied to miniature test object U2. Generally, "miniature" is defined as having a size of 3 mm or less. In practice, the side length of the miniature test object U1 can even be as small as 0.05 mm.
[0063] like Figure 2 As shown, the carrier body 11 includes a plurality of carrier platforms 111 (one is schematically shown in the attached diagram) arranged alternately along an extending direction D1. Each carrier platform 111 is used to carry one of the aforementioned miniature test objects U1. Figure 4 As shown in the figure, in this embodiment, the support platform 111 includes a support portion 1111, a top abutment 1112, and a set of support limiting portions 1113. The support portion 1111 has a support surface A1, which is used to support the corresponding miniature test object U1. The top abutment 1112 is connected to the support portion 1111 and forms a top abutment surface A2 with the support portion 1111. Referring to the figure, because the top abutment 1112 is higher than the support portion 1111, the area of the top abutment 1112 adjacent to the support portion 1111 and not covered by the support portion 1111 will form the top abutment surface A2. The top abutment surface A2 is used to abut the corresponding miniature test object U1. The support limiting portions 1113 are disposed on the support surface A1 and connected to the top abutment surface A2.
[0064] like Figure 3 and Figure 4 As shown, the pusher 12 is disposed on the carrier body 11 and includes a pusher body 121 and a plurality of limiting members 122. When a user (not shown) pushes the pusher 12 in the extending direction D1, causing the pusher 12 to move from a limiting position to a releasing position along the extending direction D1, the miniature test object U1 can be placed on the support platform 111.
[0065] The push body 121 extends along the extension direction D1 and can move relative to the carrier body 11. The limiting member 122 extends from the push body 121 along a limiting direction D2, wherein the limiting direction D2 is substantially perpendicular to the extension direction D1. Figure 3 and Figure 4As shown, each limiting member 122 corresponds to a support platform 111 and is located in a gap SP next to the support platform 111. The structural shape can be seen in the attached drawings. The limiting member 122 includes a protrusion 1221 and an extension 1222. The extension 1222 extends from the limiting direction D2 of the pushing body 121. In this embodiment, the extension 1222 has an extending limiting surface A3. The protrusion 1221 connects to the extension 1222 and extends away from the extending direction D1, and has a top groove T1 and a side groove T2. Figures 3 to 5 It can be seen that when the pusher 12 is in the released position, each limiter 122 will separate from the corresponding support platform 111, thereby making room for the micro test object U1 to be placed on the support platform 111.
[0066] After the miniature test object U1 is placed on the support stage 111, the support limiting part 1113 will limit the movement of the miniature test object U1 in one direction. From the perspective of the attached figure and the coordinate system, the support limiting part 1113 will restrict the movement of the miniature test object U1 in a first direction D4. The first direction D4 will substantially extend perpendicularly to the direction D1 and the limiting direction D2.
[0067] An elastic element 13 is disposed between the carrier body 11 and the pusher 12, and the pusher 12 is pushed by an elastic restoring force. In practice, the elastic element 13 is a spring. When the user pushes the pusher 12 along the extension direction D1, the pusher 12 will move along the extension direction D1 and compress the elastic element 13.
[0068] The vehicle body 11 can be a one-piece structure or a multi-piece structure. The attached drawing shows a multi-piece (two-piece) schematic diagram, that is, the two parts of the vehicle body 11 respectively fix the pusher 12 and the elastic element 13 in the middle.
[0069] Next, please refer to the following: Figures 3 to 9 ,in, Figure 6 This is a schematic diagram illustrating the limitation of a miniature test object according to the first embodiment of the present invention; Figure 7 To display Figure 6 B-B cross-section; Figure 8 To display Figure 6 The side view; and, Figure 9 A schematic diagram illustrating the laser beam generated when a miniature object under test is electrically connected to a probe. (Example) Figure 5 and Figure 6 As shown, when the support platform 111 carries the miniature test object U1 and the user stops applying force to the pusher 12, the elastic element 13 will use the elastic restoring force to push the pusher 12 along a reset direction D3, so that the pusher 12 is reset to the limit position.
[0070] At this time, each limiting member 122 will be adjacent to the corresponding support platform 111 to limit the corresponding miniature test object U1 to the corresponding support platform 111.
[0071] like Figure 4 and Figure 5 As shown, the limiting member 122 and the abutting surface A2 of the abutting top 1112 limit the amount of movement of the micro-test object U1 in the extending direction D1. For a more detailed explanation, see... Figure 4 and Figure 7 As shown, the abutting surface A2 of the top 1112 and the extending limiting surface A3 of the extension 1222 abut against the micro-test object U1 from both sides, thereby limiting the amount of movement of the micro-test object U1 in the extending direction D1. Figure 8 As shown, the protrusion 1221 of the limiting member 122 is located above the micro test object U1, thereby limiting the amount of movement of the micro test object U1 in the limiting direction D2.
[0072] like Figure 9 As shown, the user can then use multiple probes, practically two probes P1 and P2, to electrically contact the miniature test object U1 from top to bottom, and after conduction, cause the miniature test object U1 to generate multiple laser beams L1 and L2. In this embodiment, the miniature test object U1 is an edge-emitting laser (EEL) diode, therefore, the miniature test object U1 will generate laser beams L1 and L2 at its edge. Because the two probes P1 and P2 are electrically connected to the miniature test object U1 from top to bottom, and the protrusion 1221 needs to limit the upward movement of the miniature test object U1, the top groove T1 of the protrusion 1221 is used to avoid one of the two probes P1 and P2, in this case, probe P1. Therefore, the protrusion 1221 can not only allow the probe P1 coming from above to pass through, but also limit the movement of the miniature test object U1 in the limiting direction D2 (upward). In addition, the side groove T2 provided in the protrusion 1221 is used to avoid the laser beams L1 and L2 generated by the micro test object U1, so as to avoid blocking the laser beams L1 and L2 and affecting subsequent testing operations.
[0073] In practice, probes P1 and P2 make electrical contact with the pad on the miniature test object U1. Therefore, the hardness of probes P1 and P2 is greater than that of the pad. Upon completion of the test, probes P1 and P2 detach from the miniature test object U1 upwards along the limiting direction D2. At this point, due to temporary adhesion, probes P1 and P2 can easily pull the miniature test object U1 upwards along the limiting direction D2, causing it to detach from the bearing surface A1. The protrusion 1221 then abuts against and restricts the upward movement of the miniature test object U1, thus causing it to return to the bearing surface A1. This solves the problem of material loss in existing technologies.
[0074] In addition, such as Figure 7 As shown, each stage 111 will still have a vacuum hole H1, and the suction force is used through the vacuum hole H1 to assist in the adsorption of each micro-sample U1. Figure 9 As shown, the micro-test U1 is illustrated here using a side-emitting laser diode as an example, which will produce laser beams L1 and L2 with high energy, single color and the same characteristics. However, it is not limited to this. The micro-test U1 can also be other micro-components, and produce other beams with lower energy, more colors and different characteristics.
[0075] Finally, please refer to the following: Figures 10 to 12 ,in, Figure 10 This is a schematic diagram illustrating the process of the miniature test object carrier providing the second embodiment of the present invention carrying a miniature test object; Figure 11 A schematic diagram illustrating the limiting of a micro-test object according to the second embodiment of the present invention; and, Figure 12 To display Figure 11 A side view. (e.g.) Figure 10 As shown, a miniature test object carrier 1a is used to carry a plurality of miniature test objects U1 and U2 (both are shown and labeled in the accompanying drawings), and includes a carrier body 11a, a pusher 12a, and an elastic element (refer to the elastic element 13 of the first embodiment). The following description uses miniature test object U1 as an example, but the same implementation can also be applied to miniature test object U2. Figure 10 and Figure 11 As shown, this embodiment is largely the same as the first embodiment, except for the carrier body 11a and the pusher 12a. The user also pushes the pusher 12a, and when the pusher 12a is in the released position, the micro-test object U1 is placed on the carrier body 11a.
[0076] like Figure 10 As shown, the carrier body 11a includes a plurality of support platforms 111a (one is shown in the attached diagram). Each support platform 111a is used to support a corresponding miniature test object U1. In this embodiment, the support platform 111a includes a support portion 1111, a top abutment 1112a, and a set of support limiting portions 1113a. The support portion 1111 also has a support surface A1a. The top abutment 1112a is connected to the support portion 1111 and forms a top abutment surface A2a with the support portion 1111. The top abutment surface A2a here is connected to the support portion 1111. Figure 4 The only difference between the abutting surface A2 and the bearing surface A2 is their shape; their functions are the same. In this embodiment, the bearing limiting part 1113a is disposed on the bearing surface A1a and is separate from the abutting surface A2a.
[0077] like Figure 10 and Figure 11As shown, the pusher 12a is disposed on the carrier body 11a and includes a pusher body (the same as the pusher body 121 in the first embodiment; since this embodiment does not have a cross-sectional view, please refer to [reference needed]). Figure 7 The device comprises a pushing body 121 and a plurality of limiting members 122a. Each limiting member 122a includes a protruding portion 1221a and an extension portion 1222a. The protruding portion 1221a has a protruding limiting inclined surface A3a. The protruding portion 1221a connects to the extension portion 1222a and extends outwards in the opposite direction to the extending direction D1. Figure 11 and Figure 12 It can be seen that, in the limiting position, the protruding part 1221a uses the protruding limiting inclined surface A3a to abut against the corner of the miniature test object U1, and at the same time, it works in conjunction with the bearing part 1111, the top abutment 1112a, and the bearing limiting part 1113a to limit the miniature test object U1. (Comparison) Figure 12 and Figure 8 It is evident that the limiting member 122a in this embodiment is relatively short, and it is limited by abutting against the corner of the miniature test object U1. Therefore, the limiting member 122a in this embodiment does not affect the probes P1 and P2 (marked as follows). Figure 9 Electrical contact with the miniature test object U1 will not block the laser beams L1 and L2 (indicated in) generated by the miniature test object U1. Figure 9 Therefore, no clearance groove is needed.
[0078] Compared to the limiting member 122 in the first embodiment, the limiting member 122a in this embodiment is more regular. For example... Figure 11 and Figure 12 As shown, the extension 1222a can be considered as a cuboid, while the protrusion 1221a is a trapezoid with a longitudinal cross-section (as shown in the figure). Figure 12 As shown), the cross-section is quadrilateral (as shown). Figure 11 The three-dimensional structure shown in the figure.
[0079] In addition, see the following: Figure 10 This embodiment is the same as the first embodiment. Each stage 111a has a vacuum hole H1 to assist in the adsorption of the micro analyte U1. Since the structure of each stage 111a is the same, and in order to make the labeling clear, it is marked on the vacuum hole H1 corresponding to the micro analyte U2.
[0080] In summary, this invention utilizes a carrier body, a pusher, and an elastic element to carry a plurality of miniature test objects (DUTs), and electrically connects the DUTs to a plurality of probes to generate a plurality of laser beams. Compared to existing technologies, this invention utilizes the pusher, which is operably moved between a limited position and a released position. In the released position, the carrier body can accommodate and support the miniature DUTs, and the elastic restoring force of the elastic element returns the pusher to the limited position. This effectively limits the miniature DUTs carried by the carrier platform, thus solving the problem of DUTs falling off with the probes in existing technologies. Furthermore, this invention uses a top surface to provide another direction of limitation for the miniature DUTs. Additionally, this invention uses a supporting limiting part to provide yet another direction of limitation for the miniature DUTs. Therefore, this invention provides limitation in two or more directions while simultaneously improving the positioning accuracy of the miniature DUTs. Furthermore, this invention can also incorporate a vacuum hole, as in existing technologies, to simultaneously use suction to adsorb the miniature DUTs for auxiliary positioning and limitation.
[0081] In summary, although the present invention has been disclosed above with reference to embodiments, it is not intended to limit the invention. Those skilled in the art to which this invention pertains can make various corresponding changes and modifications based on the present invention without departing from its spirit and essence; however, all such corresponding changes and modifications should fall within the protection scope of the appended claims.
Claims
1. A miniature test object carrier for carrying a plurality of miniature test objects and electrically connecting the miniature test objects to a plurality of probes to generate a plurality of light beams, characterized in that, This miniature test object carrier includes: A carrier body includes a plurality of carrier platforms arranged alternately along an extension direction, each carrier platform being used to carry each of the miniature test objects; A pusher, disposed on the vehicle body, operably movable from a limiting position along the extending direction to a released position, and comprising: One pushes the body, extending it along the direction of extension; and A plurality of limiting members extend from the push body along a limiting direction substantially perpendicular to the extension direction. Each limiting member corresponds to each of the support platforms and is located in a gap between adjacent support platforms, and has a protruding portion protruding away from the extension direction for limiting each of the micro-test objects to each support platform at the limiting position. as well as An elastic element is disposed between the carrier body and the pusher, and is used to reset the pusher to the limiting position by elastic restoring force after the pusher is operatively pushed to the releasing position for the micro test objects to be placed, thereby limiting the micro test objects by the limiting elements.
2. The miniature test object carrier as described in claim 1, characterized in that, Each of these platforms also includes: A carrier portion having a carrier surface for supporting each of the miniature test objects; and One part is attached to the top, connecting to the support part and forming a top surface with the support part, which is used to abut against each of the miniature test objects.
3. The miniature test object carrier as described in claim 2, characterized in that, Each of the support platforms also includes a set of support limiting parts, which are disposed on the support surface of the support platform and separated from the top, to assist in limiting each of the miniature test objects.
4. The miniature test object carrier as described in claim 2, characterized in that, Each of the support platforms also includes a set of support limiting parts, which are disposed on the support surface of the support platform and connected to the abutment surface of the abutment top, to assist in limiting each of the miniature test objects.
5. The miniature test object carrier as described in claim 1, characterized in that, Each of the limiting members also includes an extension that extends from the pushing body along the limiting direction and connects to the protrusion.
6. The miniature test object carrier as described in claim 5, characterized in that, The protrusion has a top groove, each of which is used to avoid one of the probes when it is electrically connected to each of the miniature test objects.
7. The miniature test object carrier as described in claim 6, characterized in that, The protrusion has a side groove, each side groove being used to avoid the beams emitted by each of the miniature test objects after they are conductive by the probes.
8. The miniature test object carrier as described in claim 7, characterized in that, The extension has an extension limiting surface, each of which abuts against and limits each of the micro-test objects when the pusher is reset to the limiting position.
9. The miniature test object carrier as described in claim 5, characterized in that, The protrusion has a protrusion limiting slope, and each of the protrusion limiting slopes abuts against and limits each of the miniature test objects when the pusher is reset to the limiting position.
10. The miniature test object carrier as described in claim 1, characterized in that, Each of the support stages has a vacuum hole, and each support stage uses suction to help adsorb each micro-analyte through the vacuum hole.
Citation Information
Patent Citations
Micro device under test carrier
TWI774628B