A variable-curvature complex-curved-surface part adaptive multi-field assisted chemical mechanical polishing device and method

Abstract

The application provides a variable-curvature complex curved surface part adaptive multi-field assisted chemical mechanical polishing device and polishing method. The application comprises a rack, a shell, a polishing belt driving module, a pneumatic clamping suction disc module, a liquid collecting module, an ultrasonic loading module, an atomized liquid spraying module, an ultraviolet light irradiation module, an electric control module and a control panel. Based on the chemical mechanical polishing principle, the application improves the mechanical removal efficiency of the abrasive in the chemical mechanical polishing liquid through ultrasonic vibration, and catalyzes the chemical mechanical polishing liquid through ultraviolet light to generate oxidative active free radicals therein to improve the chemical corrosion rate between the polishing liquid and the workpiece, so as to realize efficient and low-damage ultra-precision polishing of the part. The equipment disclosed by the application can realize efficient and low-damage chemical mechanical polishing of the variable-curvature complex curved surface part by adjusting appropriate parameters, and the machining process is closed, and no dust, noise, harmful gas and other pollution is generated, which is friendly to the environment and harmless to the human body.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of machining equipment, in particular, especially relates to a variable curvature complex curved surface part adaptive multi-field assisted chemical mechanical polishing device and method. BACKGROUND

[0002] The variable curvature complex curved surface part such as optical lens, automobile part connecting piece, tea cup cover and the like is often used in daily life and scientific research, and the surface quality of the part often has a great influence on the use performance. Polishing as the last machining process of the part plays a decisive role in the surface quality. However, for the complex curved surface part, the polishing is still mainly relied on manual grinding or special equipment polishing at present, and there are problems such as high labor intensity and low machining efficiency. In addition, due to the hard and brittle characteristics of the part material, the machining quality is difficult to be guaranteed. The chemical mechanical polishing as a sub-nanometer precision polishing process is often used for global planarization machining of various hard and brittle materials. However, the chemical mechanical polishing is often used for planar polishing, and there is little report on the chemical mechanical polishing equipment for curved surface. Therefore, it is of great significance to develop a curved surface chemical mechanical polishing equipment for the variable curvature complex curved surface part, so as to improve the machining efficiency and reduce the labor intensity of workers while ensuring the machining quality, which is of great significance to the machining industry of optical lens, automobile part connecting piece, tea cup cover and the like. SUMMARY

[0003] In order to solve the above problems existing in the prior art, the present application provides a variable curvature complex curved surface part adaptive multi-field assisted chemical mechanical polishing device and method, and the technical scheme adopted by the present application is as follows:

[0004] The technical means adopted by the present application are as follows:

[0005] A variable curvature complex curved surface part adaptive multi-field assisted chemical mechanical polishing device, comprising a rack, a shell, a polishing belt driving module, a pneumatic clamping suction cup module, a liquid collecting module, an ultrasonic loading module, an atomized liquid spraying module, an ultraviolet light irradiation module, an electric control module and a control panel; the polishing belt driving module, the pneumatic clamping suction cup module, the liquid collecting module, the ultrasonic loading module, the atomized liquid spraying module, the ultraviolet light irradiation module and the electric control module are arranged on the rack inside the shell; the control panel is arranged on the side wall of the shell; the shell is used to ensure the sealing of the inside of the device under working conditions; the polishing belt driving module is used to drive the polishing belt to rotate to realize the machining movement of the polishing belt and the workpiece to be machined; the pneumatic clamping suction cup module is used for clamping and moving the variable curvature complex curved surface part; the liquid collecting module is used to collect and discharge the machining waste liquid; the ultrasonic loading module is used to apply mechanical load with different frequency ultrasonic vibration between the polishing belt and the workpiece to be machined; the atomized liquid spraying module is used to atomize the chemical mechanical polishing liquid and apply it to the surface of the workpiece to be machined; the ultraviolet light irradiation module is used to apply ultraviolet light irradiation to the workpiece to be machined and the atomized polishing liquid; the electric control system and the control panel are used to control the start and stop and movement of each module, including the control of the workpiece clamping and movement, the polishing belt speed, the loading pressure, the ultrasonic vibration frequency, the ultraviolet light intensity and the polishing liquid flow rate during the polishing process.

[0006] Further, the rack comprises a foot, a bottom plate, a vertical plate, a rear rib plate, and is provided with module assembly bosses, connecting holes and liquid discharge holes, each module can be carried in one body, the shell comprises a top cover, a rear plate, a side plate, a front slotted baffle and an inner side wall connecting plate, which can maintain the sealing of the device under machining conditions, the rear plate can be opened around the pin shaft connected with the side plate to observe the internal conditions and add polishing liquid to the liquid tank, the control panel and control buttons on the side plate can be used to monitor and adjust the machining parameters in real time.

[0007] Further, the polishing belt driving module comprises a speed reduction motor, a bearing sleeve, a cylindrical roller bearing, a tensioning wheel shaft and a sanding leather polishing belt, the motor is driven by a motor driver in the electric control module, the rotary motion of the motor output shaft is converted into the rotary motion of the sanding leather polishing belt through a shaft coupling, a bearing, a bearing sleeve and a tensioning wheel shaft, and the main machining motion between the sanding leather polishing belt and the workpiece is realized.

[0008] Further, the pneumatic clamping suction cup module and the liquid collecting module comprise a lead screw guide rail, a sliding block, a liquid collecting tank, a vacuum suction cup, a suction cup adapter, a suction cup air pipe and a liquid discharge pipe, and a small air pump integrated in the electric control module, the vacuum suction cup is connected to the sliding block through the liquid collecting tank, and is connected to the air pipe and the small air pump through the adapter, the lateral displacement of the workpiece can be realized through the lead screw guide rail, the liquid collecting tank and the vacuum suction cup move synchronously to realize real-time collection of the polishing liquid, and the liquid discharge pipe is connected to the bottom of the liquid collecting tank to discharge the waste liquid.

[0009] Further, the ultrasonic loading module includes a cylinder mounting frame, a direct-acting cylinder, an ultrasonic vibration device, a roller connecting frame, a flexible roller and a pressure sensor. The ultrasonic vibration device is composed of an ultrasonic generator integrated in the electric control module and an external ultrasonic vibrator. The cylinder mounting frame is connected to the vertical plate of the frame by bolts, and the other end is connected to the direct-acting cylinder. The direct-acting cylinder is driven by a small air pump integrated in the electric control module, and the output end of the direct-acting cylinder is connected to the ultrasonic vibrator. The ultrasonic vibrator is connected to the flexible roller through the roller connecting frame. The pressure sensor is placed inside the flexible roller. During processing, the output end of the cylinder pushes the flexible roller to press down on the polishing belt through the control button, so that the interaction force between the polishing belt and the workpiece is generated. The flexible roller deforms elastically under pressure to adapt to the shape of the workpiece and achieve uniform loading on the curved surface. The pressure sensor can transmit real-time pressure data back to the electric control device, and display the pressure information on the control panel. The pressure information can be used to adjust the pressure, and the ultrasonic vibration can be started through the control button. The ultrasonic cavitation effect drives the abrasive to enhance its mechanical removal effect in processing, thereby improving the processing efficiency.

[0010] Further, the atomized liquid spraying module includes a liquid tank, a tank cover, a small liquid pump, an adapter, a liquid pipe and an atomized nozzle. The liquid tank is placed on the bottom plate of the frame and positioned by the groove in the bottom plate. The small liquid pump is inserted into the liquid tank and fixed to the liquid tank by flanges and bolts. The atomized nozzle is connected to the liquid pipe and connected to the liquid pump through the hole in the vertical plate of the frame. The liquid pump is controlled by the electric control device. The polishing liquid can be sprayed on the workpiece through the atomized nozzle during processing by controlling the button.

[0011] Further, the ultraviolet light irradiation module includes an ultraviolet light generating device, a lamp tube and an ultraviolet light head. The ultraviolet light generating device is connected to the rear of the vertical plate of the frame by bolts and controlled by the electric control device. The lamp tube is inserted into the front processing position through the hole in the side plate of the frame. The ultraviolet light head connected to the lamp tube is aligned with the processing position. The ultraviolet light irradiation on the workpiece and the atomized polishing liquid can be started by the control button during processing, and the intensity of the ultraviolet light can be adjusted to change the number and rate of hydroxyl radicals generated to achieve the best processing speed and surface quality.

[0012] Further, the electric control module is installed on the upper end of the rear side of the vertical plate of the frame and fixed by bolts. The electric control system integrates the motor drive module, the ultrasonic generator and the small air pump, and can control the start and stop and movement of each module. According to the different materials and shapes of the workpiece, the different components of the polishing liquid and the different processing stages, the polishing process of the workpiece clamping and moving, the polishing belt speed, the loading pressure, the ultrasonic vibration frequency, the ultraviolet light intensity and the polishing liquid flow rate are adjusted to achieve the appropriate processing rate and surface quality.

[0013] The application further discloses a process method of the variable-curvature complex curved surface part adaptive multi-field assisted chemical mechanical polishing device.

[0014] Step 1, open the rear plate of the shell, open the liquid tank cover, add the prepared chemical mechanical polishing liquid to the liquid tank to 2 / 3-3 / 4 volume, and close the liquid tank cover and the rear plate of the shell.

[0015] Step 2, place the workpiece to be processed on the vacuum chuck, start the chuck air suction through the control button to fix the workpiece, and control the lead screw guide rail slider to move the workpiece to the appropriate position.

[0016] Step 3, drive the motor to rotate the polishing belt through the control button, and adjust the polishing belt speed to about 80-120 r / min according to the value displayed on the control panel.

[0017] Step 4, start the spraying device through the control button, adjust to a smaller initial flow rate of 6-10 ml / min, start the ultraviolet light irradiation device, and adjust to a smaller initial ultraviolet light intensity of 80-120 mW / cm 2 .

[0018] Step 5, control the direct-acting cylinder to lower the flexible roller through the control button, adjust the pressure to an appropriate size according to the real-time pressure observed on the control panel, adjust the ultrasonic vibration frequency, polishing belt speed, polishing liquid flow rate and light intensity to appropriate values according to different workpieces to be processed, set the timing to close according to the required processing time, and after the processing time is reached, each module is automatically closed, the workpiece to be processed is taken out, and the polishing is completed.

[0019] Compared with the prior art, the application has the following advantages:

[0020] 1. The application provides a variable-curvature complex curved surface part adaptive multi-field assisted chemical mechanical polishing device, which has strong universality and replaces traditional manual grinding and polishing, and improves the polishing efficiency and polishing quality of the variable-curvature complex curved surface part.

[0021] 2. The present application is based on the principle of chemical mechanical polishing, the mechanical removal efficiency of abrasive in chemical mechanical polishing solution is improved by ultrasonic vibration, and the chemical corrosion rate between the polishing solution and the workpiece is improved by generating oxidative active radicals in the chemical mechanical polishing solution through ultraviolet light catalysis, so as to realize efficient and low-damage ultra-precision polishing of parts. The equipment described in the present application couples ultrasonic vibration and ultraviolet light catalysis on the basis of the principle of chemical mechanical polishing, improves the mechanical removal and chemical corrosion of chemical mechanical polishing by the action of two energy fields, and improves the long polishing time, poor universality and difficult to guarantee the processing efficiency of the traditional polishing by using a flexible self-adaptive load. According to the equipment described in the present application, the efficient and low-damage chemical mechanical polishing of parts with variable curvature and complex curved surface can be realized by adjusting appropriate parameters, and the processing process is closed, and there is no dust, noise, harmful gas and other pollution, which is friendly to the environment and harmless to human body. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0023] Figure 1 It is a three-dimensional assembly schematic diagram of the device in the embodiment of the present application.

[0024] Figure 2 It is a schematic diagram of the rack and the shell module in the embodiment of the present application.

[0025] Figure 3 It is a schematic diagram of the polishing belt driving module in the embodiment of the present application.

[0026] Figure 4 It is a schematic diagram of the pneumatic clamping chuck module and the liquid collecting module in the embodiment of the present application.

[0027] Figure 5 It is a schematic diagram of the ultrasonic loading module in the embodiment of the present application.

[0028] Figure 6 It is a schematic diagram of the atomized liquid spraying module in the embodiment of the present application.

[0029] Figure 7 It is a schematic diagram of the ultraviolet light irradiation module in the embodiment of the present application.

[0030] Figure 8 It is a schematic diagram of the original surface and roughness measurement of the polished workpiece in the embodiment of the present application.

[0031] Figure 9The surface and roughness measurement diagram of the polished workpiece after polishing in the embodiment of the present application.

[0032] In the figure: 1, frame; 2, shell; 3, polishing belt driving module; 4, pneumatic clamping chuck module; 5, liquid collecting module; 6, ultrasonic loading module; 7, atomized liquid spraying module; 8, ultraviolet light irradiation module; 9, electric control module; 10, control panel; 11, workpiece to be processed; 201, foot; 202, bottom plate; 203, vertical plate; 204, rear rib plate; 205, assembly boss of each module; 206, connecting hole; 207, liquid discharge hole; 208, top plate; 209, rear plate; 210, side plate; 211, front slotted baffle; 212, inner wall connecting plate; 213, pin shaft; 301, speed reducer motor; 302, shaft coupling; 303, bearing sleeve; 304, cylindrical roller bearing; 305, tensioning wheel shaft; 306, sanding leather polishing belt; 401, screw guide rail; 402, sliding block; 501, liquid collecting tank; 403, vacuum chuck; 404, adapter; 405, air pipe; 502, liquid discharge pipe; 601, air cylinder mounting bracket; 602, direct-acting air cylinder; 603, I-shaped ultrasonic vibrator; 604, roller connecting bracket; 605, flexible roller; 606, pressure sensor; 701, liquid tank; 702, tank cover; 703, small liquid pump; 704, flange; 705, adapter; 706, liquid pipe; 707, atomized nozzle; 801, ultraviolet light generating device; 802, lamp tube; 803, ultraviolet light head. DETAILED DESCRIPTION

[0033] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The technical solutions in the embodiments of the present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0034] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below in combination with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The description of the at least one exemplary embodiment is actually only illustrative, but not as any limitation on the present application and its application or use. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0035] It is to be understood that the terms so far as the grammar used herein is concerned are to be interpreted in their dictionary meanings and are not to be interpreted in the context of legal terms. It is also to be understood that the terminology and the layout of the present subject specification are only intended to explain the exemplary embodiments of the present subject application and the same is not to be interpreted in limiting the scope of the present subject application. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the present subject application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising", when used in this specification, specify the presence of stated features, steps, operations, elements, components, and / or groups thereof, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or groups thereof.

[0036] The relative arrangement of parts and steps, numerical expressions, and numerical values set forth in the examples are not intended to limit the scope of the application unless otherwise specifically stated. It is also to be understood that the specific dimensions shown in the drawings are not to scale and that the dimensions of the various parts are not to be construed as limiting. Techniques, methods, and apparatus known to those of ordinary skill are not discussed in detail but can be employed to advantage in accordance with the present subject application. In all examples shown and discussed herein, any specific numerical value should be interpreted as merely an example and not a limitation. Other examples of the exemplary embodiments can have different values. It is to be noted that like numbers and letters refer to like elements throughout the several views of the drawings and that, as such, detailed descriptions of these elements are not necessary in each figure when these elements have been discussed fully in one or more figures and elements thereof. It is to be further noted that the section headings used in the description are for organizational purposes only and are not meant to be used as limiting construction.

[0037] In the description of the present application, it is to be understood that the orientation or positional relationships indicated by terms such as "front", "back", "upper", "lower", "left", "right", "horizontal", "vertical", "top", "bottom", and the like are based on the orientation or positional relationships shown in the drawings, and are merely intended to facilitate the description of the present application and simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore should not be construed as limiting the scope of protection of the present application. The orientation terms "inner", "outer" refer to the inner and outer relative to the outline of the components themselves.

[0038] For ease of description, spatial relative terms such as "above," "over," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation besides the orientation of the device as described in the figures. For example, if the device in the figures is inverted, a device described as "above" or "above" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0039] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.

[0040] like Figure 1 As shown in the figure, this invention discloses an adaptive multi-field assisted chemical mechanical polishing device for complex curved surface parts with variable curvature. The device includes a frame 1, a housing 2, a polishing belt drive module 3, a pneumatic clamping suction cup module 4, a liquid collection module 5, an ultrasonic loading module 6, an atomizing liquid spraying module 7, an ultraviolet light irradiation module 8, an electrical control module 9, and a control panel 10. The polishing belt drive module 3, the pneumatic clamping suction cup module 4, the liquid collection module 5, the ultrasonic loading module 6, the atomizing liquid spraying module 7, the ultraviolet light irradiation module 8, and the electrical control module 9 are disposed inside the frame 1 and the housing 2; the control panel 10 is located on the side wall of the housing 2; the housing 2 is used to ensure the processing equipment under working conditions. The internal enclosure is provided; the polishing belt drive module 3 is used to drive the polishing belt to rotate so that it can move with the workpiece to be processed; the pneumatic clamping suction cup module 4 is used for clamping and moving complex curved surface parts with variable curvature; the liquid collection module 5 is used to collect and discharge processing waste liquid; the ultrasonic loading module 6 is used to apply mechanical load with ultrasonic vibration of different frequencies; the atomizing spray module 7 is used to atomize chemical mechanical polishing liquid and apply it to the surface of the workpiece to be processed; the ultraviolet light irradiation module 8 is used to apply ultraviolet light irradiation to the workpiece and the atomized polishing liquid; the electrical control module 9 and the control panel 10 are used to integrate and control the start, stop and movement of each module.

[0041] like Figure 2As shown, in the embodiment, the rack 1 comprises a foot 201, a bottom plate 202, a vertical plate 203, a rear rib plate 204, and is provided with each module assembly boss 205, a connecting hole 206 and a drainage hole 207, so that each module can be carried in one body. The four corners of the bottom of the bottom plate 202 are provided with feet 201, the vertical plate 203 is vertically installed on the bottom plate 202, the rear rib plate 204 is used to support the vertical plate 203, the shell 2 comprises a top plate 208, a rear plate 209, a side plate 210, a front slotted baffle 211 and an inner side wall connecting plate 212, and the top plate 208, the rear plate 209, the side plate 210 and the front slotted baffle 211 are installed to form a shell. In the embodiment, the polishing belt 306 is triangular in design, the bottom of the triangle is a polishing point in contact with the workpiece to be processed, so the vertical plate 203 is provided with a triangular part matching it, and the main structure of the top plate 208 matches the vertical plate. The shell 2 can maintain the airtightness of the device under processing, and the rear plate 209 can be opened around the pin shaft 213 connected with the side plate 210 to observe the internal condition and add polishing liquid. The groove part of the front slotted baffle is used to maintain a semi-closed state under working condition, which is convenient for real-time observation of the polishing process and adjustment of the position of the workpiece.

[0042] As shown in the figure, Figure 3 In the embodiment, the polishing belt driving module 3 comprises a speed reducer motor 301, a shaft coupling 302, a bearing sleeve 303, a cylindrical roller bearing 304, a tensioning wheel shaft 305, and a sanding leather polishing belt 306. The speed reducer motor 301 is driven by the motor driver integrated in the electric control module 9. The rotary motion of the output shaft of the motor 301 is converted into the rotary motion of the sanding leather polishing belt 305 through the bearing 303, the bearing sleeve 302 and the tensioning wheel shaft 304, so as to realize the main processing motion between the sanding leather polishing belt 305 and the workpiece.

[0043] As shown in the figure, Figure 4 In the embodiment, the pneumatic clamping chuck module 4 and the liquid collecting module 5 comprise a lead screw guide rail 401, a sliding block 402, a liquid collecting groove 501, a vacuum chuck 403, an adapter 404, an air pipe 405 and a drainage pipe 502. The vacuum chuck 403 is connected to the sliding block 402 through the liquid collecting groove 501, and is connected to the small air pump integrated in the electric control module 9 through the adapter 404 and the air pipe 405. The vacuum chuck 403 can realize the transverse displacement of the workpiece through the sliding block 402 and the lead screw guide rail 401. The liquid collecting groove 501 moves synchronously with the vacuum chuck 403 to realize real-time collection of polishing liquid. The drainage pipe 502 is connected to the bottom of the liquid collecting groove 501 to discharge waste liquid.

[0044] As shown in the figure, Figure 5As shown, in this embodiment, the ultrasonic loading module 6 includes a cylinder mounting bracket 601, a direct-acting cylinder 602, an I-shaped ultrasonic transducer 603, a roller connecting bracket 604, a flexible roller 605, and a pressure sensor 606. The I-shaped ultrasonic transducer 603 is driven by an ultrasonic generator integrated into the electronic control module 9. The cylinder mounting bracket 601 is connected to the frame upright plate 203, and the other end is connected to the direct-acting cylinder 602. The output end of the direct-acting cylinder 602 is connected to the I-shaped ultrasonic transducer 603. The I-shaped ultrasonic transducer 603 is connected to the flexible roller 605 through the roller connecting bracket 604. The pressure sensor 606 is placed inside the flexible roller 605. During processing, the output end of the direct-acting cylinder 602 is pushed by the control button to press the flexible roller 605 down onto the frosted leather polishing belt 306, so that the polishing belt 306 and the workpiece generate an interaction force. The flexible roller 605 undergoes elastic deformation when pressed to adapt to the shape of the workpiece and achieve uniform loading on the curved surface. The pressure sensor 606 can transmit real-time pressure data back to the electronic control module 9, and feed the pressure information back to the electronic control module 9 for pressure control. It can also activate ultrasonic vibration to improve the mechanical interaction between the abrasive grains and the workpiece through cavitation effect, thereby improving processing efficiency and surface quality.

[0045] like Figure 6 As shown, in this embodiment, the atomizing spray module 7 includes a liquid tank 701, a tank cover 702, a small pump 703, a flange 704, an adapter 705, a liquid pipe 706, and an atomizing nozzle 707. The liquid tank 701 is placed on the machine frame base plate 202 and positioned by a groove in the base plate 202. The tank cover 702 is provided on it. The pump 703's pumping end extends into the liquid tank 701 and is fixed to the liquid tank 701 by the flange 704. The atomizing nozzle 707 is connected to the liquid pipe 706 and passes through the adapter 705 through the hole in the machine frame upright plate 203 to connect to the pump 703. The pump 703 is controlled by the electronic control module 9, and the polishing liquid can be sprayed onto the workpiece through the atomizing nozzle 707 during processing via a button on the control panel 10.

[0046] like Figure 7 As shown, in this embodiment, the ultraviolet irradiation module 8 includes an ultraviolet light generating device 801, a lamp tube 802, and an ultraviolet light lamp head 803. The ultraviolet light generating device 801 is connected to the rear of the frame plate 203 and is controlled by the electronic control module 9. The lamp tube 802 is inserted into the front processing position through the opening on the frame plate 203. The ultraviolet light lamp head 803 connected to the lamp tube 802 is aligned with the processing position. During processing, the button on the control panel 9 is turned on to irradiate the workpiece and the atomized polishing liquid with ultraviolet light. The intensity of the ultraviolet light can be adjusted to change the number and rate of hydroxyl radical generation in order to achieve the best processing speed and surface quality.

[0047] The process method of the present invention is as follows:

[0048] Step 1, open the back plate 210, open the liquid tank cover 703, add the prepared chemical mechanical polishing liquid to 2 / 3-3 / 4 volume of the liquid tank 702, and close the liquid tank cover 703 and the back plate 210.

[0049] Step 2, place the workpiece to be processed on the vacuum chuck 404, start the chuck air suction to fix the workpiece by controlling the corresponding button on the control panel 10, and control the lead screw guide rail 402 to move the slider 501 and the workpiece to the appropriate position.

[0050] Step 3, drive the reduction motor 302 to rotate the polishing belt 401 by the corresponding button on the control panel 10, and adjust the polishing belt 401 speed to about 100 r / min according to the value displayed on the control panel 10.

[0051] Step 4, turn on the spray device 7 by the corresponding button on the control panel 10, adjust to a small flow rate below 10 ml / min; turn on the ultraviolet light irradiation device 9, adjust to a small ultraviolet light intensity of 100 mW / cm 2 .

[0052] Step 5, control the direct-acting cylinder 603 to lower the flexible roller 606 by the corresponding button on the control panel 10, adjust the pressure to the appropriate size according to the real-time pressure observed on the control panel 10, adjust the ultrasonic vibration frequency, polishing belt speed, polishing liquid flow rate and light intensity to appropriate values according to different workpieces to be processed, set the timing to close according to the required processing time by the corresponding button on the control panel 10, and after the processing time is reached, each module is automatically closed, the workpiece to be processed is taken out, and the polishing is completed.

[0053] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A variable-curvature complex-curved-part adaptive multi-field assisted chemical mechanical polishing device, characterized in that, The polishing device comprises a frame, a shell, a polishing belt driving module, a pneumatic clamping chuck module, a liquid collecting module, an ultrasonic loading module, an atomized liquid spraying module, an ultraviolet light irradiation module, an electric control module and a control panel. The polishing belt driving module, the pneumatic clamping chuck module, the liquid collecting module, the ultrasonic loading module, the atomized liquid spraying module, the ultraviolet light irradiation module and the electric control module are arranged on the frame in the shell. The control panel is arranged on the side wall of the shell. The shell comprises a top cover, a rear plate, a side plate, a front plate with a groove and an inner side wall connecting plate, which can keep the device closed during processing, the rear plate can be opened around the pin shaft connected with the side plate to observe the internal condition and add polishing liquid to the liquid tank, the groove of the front plate with a groove is used to keep the device semi-closed during operation to facilitate real-time observation of the polishing process and adjustment of the workpiece position, and the shell is used to ensure the sealing of the device during operation. The polishing belt driving module is used to drive the polishing belt to rotate to realize the main processing motion between the polishing belt and the workpiece; the polishing belt driving module comprises a speed reducer motor, a bearing sleeve, a cylindrical roller bearing, a tensioning wheel shaft and a sanding leather polishing belt, the motor is driven by the motor driver in the electric control module, the rotary motion of the motor output shaft is converted into the rotary motion of the sanding leather polishing belt through the shaft coupling, bearing, bearing sleeve and tensioning wheel shaft, and the main processing motion between the sanding leather polishing belt and the workpiece is realized. The pneumatic clamping chuck module is used for clamping and moving the complex curved surface parts with variable curvature. The liquid collecting module is used to collect and discharge the waste liquid. The ultrasonic loading module is used to apply mechanical load with different frequency ultrasonic vibration between the polishing belt and the workpiece; the ultrasonic loading module comprises a pneumatic cylinder mounting bracket, a direct-acting pneumatic cylinder, an ultrasonic vibration device, a roller connecting bracket, a flexible roller and a pressure sensor, the ultrasonic vibration device is composed of an ultrasonic generator integrated in the electric control module and an external work-type ultrasonic vibrator; the pneumatic cylinder mounting bracket is connected to the vertical plate of the frame by bolts, and the other end is connected to the direct-acting pneumatic cylinder, the direct-acting pneumatic cylinder is driven by a small air pump integrated in the electric control module, and the output end of the direct-acting pneumatic cylinder is connected to the work-type ultrasonic vibrator, the work-type ultrasonic vibrator is connected to the flexible roller through the roller connecting bracket, and the pressure sensor is arranged in the flexible roller; during processing, the output end of the pneumatic cylinder pushes the flexible roller to press on the polishing belt through the control button, so that the interaction force between the polishing belt and the workpiece is generated, the flexible roller deforms elastically under pressure to adapt to the shape of the workpiece and realize uniform loading of the curved surface, and the pressure sensor is used to transmit real-time pressure data back to the electric control module, display the pressure information on the control panel, and adjust the pressure according to the displayed pressure information. The atomization spray module is used for atomizing chemical mechanical polishing liquid and applying to the surface of the workpiece to be processed; the atomization spray module comprises a liquid tank, a tank cover, a small liquid pump, an adapter, a liquid pipe and an atomization spray head; the liquid tank is arranged on the bottom plate of the rack and is positioned by the groove of the bottom plate; the small liquid pump is arranged in the liquid tank and is fixed to the liquid tank by flanges and bolts; the atomization spray head is connected to the liquid pipe and is connected to the small liquid pump through the hole of the vertical plate of the rack; the small liquid pump is controlled by the electric control module; the polishing liquid is sprayed on the workpiece through the atomization nozzle by the control button during processing; The ultraviolet light irradiation module is used for applying ultraviolet light irradiation to the workpiece being processed and the atomized polishing liquid; The electric control module and the control panel are used for integrated control of the start and stop and movement of each module, including the control of the clamping and movement of the workpiece during polishing, the polishing belt speed, the load pressure, the ultrasonic vibration frequency, the ultraviolet light intensity and the polishing liquid flow rate; The electric control module is installed on the upper end of the rear side of the vertical plate of the rack and is fixed by bolts; the electric device lines are integrated in the electric control module; the electric control module is integrated with a motor drive module, an ultrasonic generator and a small air pump; the start and stop and movement of each module can be controlled; the clamping and movement of the workpiece during polishing, the polishing belt speed, the load pressure, the ultrasonic vibration frequency, the ultraviolet light intensity and the polishing liquid flow rate can be adjusted according to the different materials and shapes of the workpiece, the different components of the polishing liquid and different processing stages, so as to achieve the appropriate processing rate and surface quality.

2. The adaptive multi-field-assisted chemical mechanical polishing apparatus for variable-curvature complex-curve parts of claim 1, wherein, The rack comprises a foot, a bottom plate, a vertical plate, a rear rib plate and is provided with module assembly bosses, connection holes and drainage holes; each module can be carried in one body; the processing parameters can be monitored and adjusted in real time through the control panel and control buttons on the side plate.

3. The adaptive multi-field-assisted-chemical-mechanical-polishing device of complex variable-curved-surface parts of claim 1, wherein, The pneumatic clamping suction cup module and the liquid collecting module comprise a lead screw guide rail, a sliding block, a liquid collecting tank, a vacuum suction cup, a suction cup adapter, a suction cup air pipe and a drainage pipe, and a small air pump integrated in the electric control module; the vacuum suction cup is connected to the sliding block through the liquid collecting tank and is connected to the air pipe and the small air pump through the adapter; the transverse displacement of the workpiece can be realized through the lead screw guide rail; the liquid collecting tank and the vacuum suction cup move synchronously to realize real-time collection of the polishing liquid; the drainage pipe is connected to the bottom of the liquid collecting tank to drain the waste liquid.

4. The adaptive multi-field-assisted-chemical-mechanical-polishing device of complex variable-curved-surface parts of claim 1, wherein, The ultraviolet light irradiation module comprises an ultraviolet light generating device, a lamp tube and an ultraviolet light lamp head; the ultraviolet light generating device is connected to the rear part of the vertical plate of the rack by bolts and is controlled by the electric control module; the lamp tube is arranged in the front end processing position through the hole in the side plate of the rack; the ultraviolet light lamp head connected to the lamp tube is aligned with the processing position; the ultraviolet light irradiation to the workpiece being processed and the atomized polishing liquid is started by the control button during processing; the ultraviolet light intensity can be adjusted to change the number and rate of hydroxyl radical generation to achieve the best processing speed and the best surface quality.

5. A process for using the apparatus for adaptive multi-field assisted chemical mechanical polishing of complex curved surface parts with variable curvature according to any one of claims 1 to 4, characterized in that, The method comprises the following steps: Step 1: open the rear plate of the shell, open the tank cover, add the prepared chemical mechanical polishing liquid to the liquid tank to 2 / 3~3 / 4 of the volume, and close the tank cover and the rear plate of the shell; Step 2: place the workpiece to be processed on the vacuum suction cup, start the suction cup air suction to fix the workpiece by the control button, and control the sliding block of the lead screw guide rail to move the workpiece to the appropriate position; Step 3, drive the motor to rotate the polishing belt through the control button, and adjust the rotation speed of the polishing belt to a lower initial speed of about 80-120 r / min according to the value displayed on the control panel; Step 4. Turn on the spray device by the control button, adjust to a small initial flow rate of 6-10 ml / min; turn on the UV irradiation device, adjust to a small initial UV light intensity of 80-120 mW / cm 2 Step 4. Turn on the spray device by the control button, adjust to a small initial flow rate of 6-10 ml / min; turn on the UV irradiation device, adjust to a small initial UV light intensity of 80-120 mW / cm Step 5, control the direct-acting cylinder to lower the flexible roller through the control button, adjust the pressure to an appropriate size according to the real-time pressure observed on the control panel, adjust the ultrasonic vibration frequency, polishing belt speed, polishing liquid flow rate and light intensity to appropriate values according to different machined workpieces, set the timing to turn off according to the required processing time, and after the processing time is reached, each module is automatically turned off, the machined workpiece is taken out, and the polishing is completed.

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