Chip tilt detection method, system, computer and readable storage medium

Abstract

The application provides a chip tilt detection method, system, computer and readable storage medium, the method comprises: pre-calibration is carried out to camera, and the detection image is collected through camera;According to the theoretical chip arrangement period and the theoretical chip size parameter, a plurality of theoretical chip positions on the detection image are calculated;The actual gray value corresponding to a plurality of theoretical chip positions is detected respectively, and whether the actual gray value is within the preset gray threshold is judged;If yes, it is judged that the current theoretical chip position exists actual chip, and the chip region and the non-chip region of the current theoretical chip position are identified;The average gray value corresponding to the chip region is calculated, and the average gray value is input into the tilt angle algorithm to calculate the tilt angle of the chip in the chip region.Through the above-mentioned mode, the time of chip detection can be greatly shortened, and the detection efficiency of the chip tilt angle is greatly improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a chip tilt detection method, system, computer, and readable storage medium. Background Technology

[0002] With the development of the times and the advancement of technology, electronic devices such as mobile phones and computers have become ubiquitous in people's daily lives, greatly facilitating their lives. Among these devices, electronic components such as image sensor chips and processor chips are important components used to analyze and process data.

[0003] Existing image sensor chips require performance testing in a testing tray before leaving the factory. Only after passing this test can they proceed with final processing to ensure quality. When several image sensor chips are placed in the testing tray simultaneously, the tilt angle of each chip needs to be measured to ensure accuracy. However, most current technologies only allow for individual chip testing to determine the tilt angle of each chip, resulting in lengthy testing times and significantly reduced efficiency, hindering large-scale chip production. Summary of the Invention

[0004] Based on this, the purpose of the present invention is to provide a chip tilt detection method, system, computer, and readable storage medium to solve the problem that most existing technologies can only use the method of detecting a single chip individually to complete the detection of the tilt angle of each image sensing chip, resulting in a long detection time and thus greatly reducing the detection efficiency.

[0005] The first aspect of this invention provides a chip tilt detection method, the method comprising:

[0006] The camera is pre-calibrated, and the sample disk to be tested is moved into the detection area of ​​the calibrated camera. The surface of the sample disk to be tested is imaged by the camera to acquire the corresponding detection image.

[0007] The positions of several theoretical chips on the detected image are calculated based on the theoretical chip arrangement cycle and theoretical chip size parameters.

[0008] The actual grayscale values ​​corresponding to several theoretical chip positions are detected respectively, and it is determined whether the actual grayscale values ​​are within a preset grayscale threshold.

[0009] If it is determined that the actual gray value of the theoretical chip location is within the preset gray value threshold, then it is determined that there is an actual chip at the current theoretical chip location, and the chip area and non-chip area at the current theoretical chip location are identified.

[0010] The average grayscale value corresponding to the chip area is calculated, and the average grayscale value is input into the tilt angle algorithm to calculate the tilt angle of the chip in the chip area.

[0011] The beneficial effects of this invention are as follows: First, the camera is pre-calibrated, and the sample disk to be tested is moved to the detection area of ​​the calibrated camera. The surface of the sample disk to be tested is imaged by the camera to acquire the corresponding detection image. Further, several theoretical chip positions on the detection image are calculated based on the theoretical chip arrangement period and theoretical chip size parameters. Further still, the actual gray values ​​corresponding to several theoretical chip positions are detected respectively, and it is determined whether the actual gray values ​​are within a preset gray threshold. Based on this, if it is determined that the actual gray value of a theoretical chip position is within the preset gray threshold, it is determined that there is an actual chip at the current theoretical chip position, and the chip area and non-chip area at the current theoretical chip position are identified. Finally, it is only necessary to calculate the average gray value corresponding to the chip area and input the average gray value into the tilt angle algorithm to calculate the tilt angle of the chip in the chip area. The above method allows multiple chips to be stored in the sample tray at the same time, and the tilt angle of each chip in the current test image can be detected by taking only one test image. This greatly shortens the chip test time and significantly improves the efficiency of chip tilt angle detection, which is beneficial for the large-scale production of chips.

[0012] Preferably, the step of pre-calibrating the camera includes:

[0013] The calibration disk is moved into the detection area of ​​the camera, and images are taken of several calibration pieces with different tilt angles in the calibration disk to obtain the corresponding calibration images.

[0014] Based on the principle of image grayscale distribution, the standard coordinate values ​​corresponding to each calibration piece are extracted from the calibration image, and the standard grayscale values ​​corresponding to the tilt angle of each calibration piece surface are obtained.

[0015] At least two sets of the standard coordinate values ​​and the standard grayscale values ​​are randomly selected, and the tilt angle algorithm is trained based on the standard coordinate values ​​and the standard grayscale values ​​to complete the pre-calibration of the camera.

[0016] Preferably, the preset grayscale threshold includes a first extreme value and a second extreme value, the first extreme value being smaller than the second extreme value, and the step of determining that an actual chip exists at the current theoretical chip location and identifying the chip region and non-chip region at the current theoretical chip location includes:

[0017] Determine whether each actual gray value is greater than the first extreme value and less than the second extreme value;

[0018] If it is determined that there is an actual gray value that is greater than the first extreme value and less than the second extreme value, then it is determined that there is a corresponding actual chip at the current theoretical chip position, and the actual chip is set as the corresponding point element, and each point element is highlighted on the detection image.

[0019] Integrate several of the aforementioned point elements to generate a corresponding point set, and set the target region where the point set exists as the chip region;

[0020] If it is determined that there is an actual gray value that is not between the first extreme value and the second extreme value, then the current actual gray value is removed, and the area outside the target area is set as the non-chip area.

[0021] Preferably, the step of calculating the average grayscale value corresponding to the chip region includes:

[0022] When the chip region is obtained, the chip region is divided into several sub-regions, and each sub-region contains a target chip with a tilt angle.

[0023] The average gray value corresponding to each of the sub-regions is calculated one by one based on a preset gray-scale algorithm, and a mapping relationship between each average gray value and each target chip is established one by one. The mapping relationship is unique.

[0024] Preferably, the step of calculating the positions of several theoretical chips on the detection image based on the theoretical chip arrangement period and theoretical chip size parameters includes:

[0025] When the detection image is acquired, it is standardized to generate a corresponding standard detection image.

[0026] Based on the theoretical chip arrangement cycle and theoretical chip size parameters, a corresponding theoretical chip arrangement template is generated, and the similarity between the theoretical chip arrangement template and the standard detection image is calculated.

[0027] Determine whether the similarity is greater than a preset threshold;

[0028] If the similarity is determined to be greater than the preset threshold, then several theoretical chip positions are extracted from the standard detection image according to the theoretical chip layout template.

[0029] Preferably, the step of extracting several theoretical chip positions from the standard detection image based on the theoretical chip layout template includes:

[0030] Based on the grayscale value of the standard detection image, the theoretical chip layout template is correspondingly overlapped on the standard detection image, and based on a preset mapping algorithm, several theoretical chip positions in the theoretical chip layout template are correspondingly mapped to the standard detection image.

[0031] Preferably, the expression for the tilt angle algorithm is:

[0032] Y = 3kγ·μ + sβ 2 +eω 2

[0033] Where Y represents the tilt angle of the chip surface, k, s, and e all represent percentages, γ represents the image intensity, μ represents the average gray value, β represents the chip offset, and ω represents the aperture of the camera.

[0034] A second aspect of this invention provides a chip tilt detection system, the system comprising:

[0035] The calibration module is used to pre-calibrate the camera, move the sample disk to be tested into the detection area of ​​the calibrated camera, and image the surface of the sample disk to be tested through the camera to acquire the corresponding detection image;

[0036] The first calculation module is used to calculate the positions of several theoretical chips on the detection image based on the theoretical chip arrangement period and the theoretical chip size parameters.

[0037] The judgment module is used to detect the actual gray values ​​corresponding to several theoretical chip positions respectively, and to determine whether the actual gray values ​​are within a preset gray value threshold.

[0038] The processing module is used to determine that there is an actual chip at the current theoretical chip location if the actual gray value of the theoretical chip location is found to be within the preset gray value threshold, and to identify the chip area and non-chip area at the current theoretical chip location.

[0039] The second calculation module is used to calculate the average gray value corresponding to the chip area, and input the average gray value into the tilt angle algorithm to calculate the tilt angle of the chip in the chip area.

[0040] In the aforementioned chip tilt detection system, the calibration module is specifically used for:

[0041] The calibration disk is moved into the detection area of ​​the camera, and images are taken of several calibration pieces with different tilt angles in the calibration disk to obtain the corresponding calibration images.

[0042] Based on the principle of image grayscale distribution, the standard coordinate values ​​corresponding to each calibration piece are extracted from the calibration image, and the standard grayscale values ​​corresponding to the tilt angle of each calibration piece surface are obtained.

[0043] At least two sets of the standard coordinate values ​​and the standard grayscale values ​​are randomly selected, and the tilt angle algorithm is trained based on the standard coordinate values ​​and the standard grayscale values ​​to complete the pre-calibration of the camera.

[0044] In the aforementioned chip tilt detection system, the preset grayscale threshold includes a first extreme value and a second extreme value, wherein the first extreme value is smaller than the second extreme value, and the processing module is specifically used for:

[0045] Determine whether each actual gray value is greater than the first extreme value and less than the second extreme value;

[0046] If it is determined that there is an actual gray value that is greater than the first extreme value and less than the second extreme value, then it is determined that there is a corresponding actual chip at the current theoretical chip position, and the actual chip is set as the corresponding point element, and each point element is highlighted on the detection image.

[0047] Integrate several of the aforementioned point elements to generate a corresponding point set, and set the target region where the point set exists as the chip region;

[0048] If it is determined that there is an actual gray value that is not between the first extreme value and the second extreme value, then the current actual gray value is removed, and the area outside the target area is set as the non-chip area.

[0049] In the aforementioned chip tilt detection system, the second calculation module is specifically used for:

[0050] When the chip region is obtained, the chip region is divided into several sub-regions, and each sub-region contains a target chip with a tilt angle.

[0051] The average gray value corresponding to each of the sub-regions is calculated one by one based on a preset gray-scale algorithm, and a mapping relationship between each average gray value and each target chip is established one by one. The mapping relationship is unique.

[0052] In the aforementioned chip tilt detection system, the first calculation module is specifically used for:

[0053] When the detection image is acquired, it is standardized to generate a corresponding standard detection image.

[0054] Based on the theoretical chip arrangement cycle and theoretical chip size parameters, a corresponding theoretical chip arrangement template is generated, and the similarity between the theoretical chip arrangement template and the standard detection image is calculated.

[0055] Determine whether the similarity is greater than a preset threshold;

[0056] If the similarity is determined to be greater than the preset threshold, then several theoretical chip positions are extracted from the standard detection image according to the theoretical chip layout template.

[0057] In the aforementioned chip tilt detection system, the first calculation module is further specifically used for:

[0058] Based on the grayscale value of the standard detection image, the theoretical chip layout template is correspondingly overlapped on the standard detection image, and based on a preset mapping algorithm, several theoretical chip positions in the theoretical chip layout template are correspondingly mapped to the standard detection image.

[0059] In the aforementioned chip tilt detection system, the expression for the tilt angle algorithm is:

[0060] Y = 3kγ·μ + sβ 2 +eω 2

[0061] Where Y represents the tilt angle of the chip surface, k, s, and e all represent percentages, γ represents the image intensity, μ represents the average gray value, β represents the chip offset, and ω represents the aperture of the camera.

[0062] A third aspect of the present invention provides a computer, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the chip tilt detection method as described above.

[0063] A fourth aspect of the present invention provides a readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the chip tilt detection method as described above.

[0064] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0065] Figure 1 A flowchart of the chip tilt detection method provided in the first embodiment of the present invention;

[0066] Figure 2This is a schematic diagram of the calibration disk in the chip tilt detection method provided in the first embodiment of the present invention from a first perspective.

[0067] Figure 3 This is a schematic diagram of the calibration disk in the chip tilt detection method provided in the first embodiment of the present invention from a second perspective.

[0068] Figure 4 This is a schematic diagram of the detection image in the chip tilt detection method provided in the first embodiment of the present invention;

[0069] Figure 5 This is a structural block diagram of the chip tilt detection system provided in the sixth embodiment of the present invention.

[0070] The following detailed description, in conjunction with the accompanying drawings, will further illustrate the present invention. Detailed Implementation

[0071] To facilitate understanding of the present invention, a more complete description will be given below with reference to the accompanying drawings. Several embodiments of the invention are illustrated in the drawings. However, the invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

[0072] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0073] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0074] Existing image sensor chips require performance testing in a testing tray before leaving the factory. Only after passing this test can they proceed with final processing to ensure quality. When several image sensor chips are placed in the testing tray simultaneously, the tilt angle of each chip needs to be measured to ensure accuracy. However, most current technologies only allow for individual chip testing to determine the tilt angle of each chip, resulting in lengthy testing times and significantly reduced efficiency, hindering large-scale chip production.

[0075] Please see Figure 1 The image shows a chip tilt detection method provided in the first embodiment of the present invention. The chip tilt detection method provided in this embodiment can store multiple chips to be tested in the sample tray at the same time, and can detect the tilt angle of each chip in the current detection image by taking a single detection image. This greatly shortens the chip detection time and significantly improves the detection efficiency of chip tilt angle, which is beneficial to the large-scale production of chips.

[0076] Specifically, the chip tilt detection method provided in this embodiment includes the following steps:

[0077] Step S10: Pre-calibrate the camera, move the sample disk to be tested into the detection area of ​​the calibrated camera, and image the surface of the sample disk to be tested through the camera to acquire the corresponding detection image.

[0078] Specifically, in this embodiment, it should first be noted that the chip tilt detection method provided in this embodiment is specifically used to detect the tilt angle of the chip surface in real time, thereby enabling real-time control of chip production quality and ensuring chip production yield.

[0079] In addition, it should be noted that the chip tilt detection method provided in this embodiment is specifically applied in a chip detection device. Specifically, the chip detection device includes a camera, a stage, and a slide rail set on the stage. The slide rail can move both the sample plate to be tested and the calibration plate into the shooting area of ​​the camera, so that the camera can capture the corresponding detection image.

[0080] Therefore, it should be noted that in this step, the camera needs to be pre-calibrated first to improve the subsequent detection accuracy. Furthermore, after the camera calibration is completed, this embodiment will move the pre-set sample disk to be tested to the detection area of ​​the calibrated camera. On this basis, the camera will image the surface of the sample disk to be tested, thereby acquiring the corresponding detection image. It should be noted that the sample disk to be tested provided in this embodiment contains several chips to be tested.

[0081] Step S20: Calculate the positions of several theoretical chips on the detection image based on the theoretical chip arrangement cycle and theoretical chip size parameters;

[0082] Furthermore, in this embodiment, it should be noted that this step will retrieve the pre-set theoretical chip arrangement period and theoretical chip size parameters from the pre-set database, and immediately calculate the positions of several theoretical chips on the real-time acquired detection image based on the theoretical chip arrangement period and theoretical chip size parameters.

[0083] Step S30: Detect the actual grayscale values ​​corresponding to several theoretical chip positions respectively, and determine whether the actual grayscale values ​​are within a preset grayscale threshold.

[0084] Furthermore, in this step, it should be noted that after obtaining the required theoretical chip positions through the above steps, this step will further detect the actual grayscale values ​​corresponding to the current theoretical chip positions respectively, and at the same time, determine in real time whether the obtained actual grayscale values ​​are within the above preset threshold.

[0085] It should be noted that in the above detection images, each theoretical chip position will generate a corresponding actual gray value, and the actual gray value generated will be different depending on the tilt angle of the chip surface.

[0086] Step S40: If it is determined that the actual gray value of the theoretical chip location is within the preset gray value threshold, then it is determined that there is an actual chip at the current theoretical chip location, and the chip area and non-chip area at the current theoretical chip location are identified.

[0087] Specifically, in this step, it should be noted that if this step determines in real time that at least one of the theoretical chip locations has an actual gray value within the preset gray value threshold, it can prove that there is a corresponding actual chip in the current theoretical chip location. On this basis, it is necessary to further identify the chip area and non-chip area in the current theoretical chip location.

[0088] Step S50: Calculate the average gray value corresponding to the chip area, and input the average gray value into the tilt angle algorithm to calculate the tilt angle of the chip in the chip area.

[0089] Finally, it should be noted in this step that after obtaining the required chip area through the above steps, this step will perform secondary processing on the real-time detected chip area, that is, further calculate the average gray value corresponding to the current chip area. At the same time, the real-time calculated average gray value is input into the pre-set tilt angle algorithm, so as to finally calculate the tilt angle of the chip in the current chip area through the tilt angle algorithm.

[0090] In use, the camera is first pre-calibrated, and the sample disk to be tested is moved into the detection area of ​​the calibrated camera. The surface of the sample disk is then imaged by the camera to acquire the corresponding detection image. Further, several theoretical chip positions on the detection image are calculated based on the theoretical chip arrangement period and theoretical chip size parameters. Even further, the actual grayscale values ​​corresponding to several theoretical chip positions are detected, and it is determined whether the actual grayscale values ​​are within a preset grayscale threshold. Based on this, if the actual grayscale value of a theoretical chip position is found to be within the preset grayscale threshold, it is determined that an actual chip exists at the current theoretical chip position, and the chip area and non-chip area at the current theoretical chip position are identified. Finally, only the average grayscale value corresponding to the chip area needs to be calculated, and the average grayscale value is input into the tilt angle algorithm to calculate the tilt angle of the chip in the chip area. The above method allows multiple chips to be stored in the sample tray at the same time, and the tilt angle of each chip in the current test image can be detected by taking only one test image. This greatly shortens the chip test time and significantly improves the efficiency of chip tilt angle detection, which is beneficial for the large-scale production of chips.

[0091] It should be noted that the above implementation process is only to illustrate the feasibility of this application, but it does not mean that the chip tilt detection method of this application has only the above-mentioned unique implementation process. On the contrary, as long as the chip tilt detection method of this application can be implemented, it can be included in the feasible implementation scheme of this application.

[0092] In summary, the chip tilt detection method provided by the above embodiments of the present invention can simultaneously store multiple chips to be tested in the sample tray, and can detect the tilt angle of each chip in the current detection image by taking only one detection image, thereby greatly shortening the chip detection time and significantly improving the detection efficiency of chip tilt angle, which is beneficial to the large-scale production of chips.

[0093] The second embodiment of the present invention also provides a chip tilt detection method. The chip tilt detection method provided in this embodiment differs from the chip tilt detection method provided in the first embodiment above in that:

[0094] Specifically, in this embodiment, it should be noted that the above-mentioned pre-calibration steps for the camera include:

[0095] The calibration disk is moved into the detection area of ​​the camera, and images are taken of several calibration pieces with different tilt angles in the calibration disk to obtain the corresponding calibration images.

[0096] Based on the principle of image grayscale distribution, the standard coordinate values ​​corresponding to each calibration piece are extracted from the calibration image, and the standard grayscale values ​​corresponding to the tilt angle of each calibration piece surface are obtained.

[0097] At least two sets of the standard coordinate values ​​and the standard grayscale values ​​are randomly selected, and the tilt angle algorithm is trained based on the standard coordinate values ​​and the standard grayscale values ​​to complete the pre-calibration of the camera.

[0098] Specifically, in this embodiment, such as Figure 2 and Figure 3 As shown, it should be noted that in order to effectively improve detection accuracy, this embodiment requires pre-calibration of the camera before formal testing. Based on this, this embodiment first moves a pre-set calibration disk to the detection area of ​​the current camera. The calibration disk contains several calibration pieces, i.e., chips used for calibration. Furthermore, the current camera performs corresponding optical imaging on the several calibration pieces with different tilt angles stored in the current calibration disk, thereby obtaining a calibration image corresponding to the current calibration disk.

[0099] Furthermore, this embodiment will further extract the standard coordinate values ​​corresponding to each calibration piece based on the image grayscale distribution principle in the pre-set database and the calibration image. At the same time, the standard grayscale values ​​corresponding to the tilt angle of each calibration piece surface will be obtained. That is, this embodiment will extract the labeled coordinate values ​​and standard grayscale values ​​corresponding to each calibration piece.

[0100] Based on this, this embodiment will further randomly select at least two sets of required standard coordinate values ​​and standard gray values ​​from the current set of standard coordinate values ​​and standard gray values, and further perform standardized training on the above tilt angle algorithm based on the selected standard coordinate values ​​and standard gray values, so as to finally complete the pre-calibration of the above camera.

[0101] It should be noted that the method provided in the second embodiment of the present invention has the same implementation principle and some technical effects as the first embodiment. For the sake of brevity, any parts not mentioned in this embodiment can be referred to the corresponding content provided in the first embodiment.

[0102] In summary, the chip tilt detection method provided by the above embodiments of the present invention can simultaneously store multiple chips to be tested in the sample tray, and can detect the tilt angle of each chip in the current detection image by taking only one detection image, thereby greatly shortening the chip detection time and significantly improving the detection efficiency of chip tilt angle, which is beneficial to the large-scale production of chips.

[0103] The third embodiment of the present invention also provides a chip tilt detection method. The chip tilt detection method provided in this embodiment differs from the chip tilt detection method provided in the first embodiment above in that:

[0104] Furthermore, in this embodiment, it should be noted that the aforementioned preset grayscale threshold includes a first extreme value and a second extreme value, the first extreme value being smaller than the second extreme value. The steps of determining that an actual chip exists at the current theoretical chip location and identifying the chip region and non-chip region at the current theoretical chip location include:

[0105] Determine whether each actual gray value is greater than the first extreme value and less than the second extreme value;

[0106] If it is determined that there is an actual gray value that is greater than the first extreme value and less than the second extreme value, then it is determined that there is a corresponding actual chip at the current theoretical chip position, and the actual chip is set as the corresponding point element, and each point element is highlighted on the detection image.

[0107] Integrate several of the aforementioned point elements to generate a corresponding point set, and set the target region where the point set exists as the chip region;

[0108] If it is determined that there is an actual gray value that is not between the first extreme value and the second extreme value, then the current actual gray value is removed, and the area outside the target area is set as the non-chip area.

[0109] Furthermore, in this embodiment, it should be noted that after obtaining the first and second extreme values, this embodiment will determine one by one whether the several actual grayscale values ​​obtained in real time are greater than the current first extreme value and less than the current second extreme value. Specifically, if so, it can accurately determine whether the required actual chip exists in the theoretical chip location corresponding to the current actual grayscale value, and further set the current actual chip as the corresponding point element. At the same time, in this embodiment, as... Figure 4As shown, this embodiment further highlights each point element in the current detection image to facilitate subsequent processing. Based on this, this embodiment further integrates several current point elements, that is, it delineates several current point elements in the current detection image in real time and generates a corresponding point set. Furthermore, this embodiment ultimately sets the target region corresponding to the current point set as the aforementioned chip region.

[0110] If not, it means that there is no actual chip in the theoretical chip position corresponding to the current actual gray value, and the current actual gray value is removed accordingly.

[0111] It should be noted that the method provided in the third embodiment of the present invention has the same implementation principle and some technical effects as the first embodiment. For the sake of brevity, any parts not mentioned in this embodiment can be referred to the corresponding content provided in the first embodiment.

[0112] In summary, the chip tilt detection method provided by the above embodiments of the present invention can simultaneously store multiple chips to be tested in the sample tray, and can detect the tilt angle of each chip in the current detection image by taking only one detection image, thereby greatly shortening the chip detection time and significantly improving the detection efficiency of chip tilt angle, which is beneficial to the large-scale production of chips.

[0113] The fourth embodiment of the present invention also provides a chip tilt detection method. The chip tilt detection method provided in this embodiment differs from the chip tilt detection method provided in the first embodiment above in that:

[0114] Additionally, in this embodiment, it should be noted that the step of calculating the average grayscale value corresponding to the chip region includes:

[0115] When the chip region is obtained, the chip region is divided into several sub-regions, and each sub-region contains a target chip with a tilt angle.

[0116] The average gray value corresponding to each of the sub-regions is calculated one by one based on a preset gray-scale algorithm, and a mapping relationship between each average gray value and each target chip is established one by one. The mapping relationship is unique.

[0117] Furthermore, in this embodiment, it should also be noted that after obtaining the chip region, this embodiment can divide the current chip region into several corresponding sub-regions in real time. Each sub-region contains a target chip with a tilt angle, that is, chips with a tilt angle are classified into one type of chip.

[0118] Based on this, this embodiment will call a preset grayscale algorithm and calculate the average grayscale value corresponding to each sub-region one by one through the preset grayscale algorithm. On this basis, a mapping relationship between each average grayscale value and each target chip will be established, and the mapping relationship will be unique.

[0119] It should be noted that the method provided in the fourth embodiment of the present invention has the same implementation principle and some technical effects as the first embodiment. For the sake of brevity, any parts not mentioned in this embodiment can be referred to the corresponding content provided in the first embodiment.

[0120] In summary, the chip tilt detection method provided by the above embodiments of the present invention can simultaneously store multiple chips to be tested in the sample tray, and can detect the tilt angle of each chip in the current detection image by taking only one detection image, thereby greatly shortening the chip detection time and significantly improving the detection efficiency of chip tilt angle, which is beneficial to the large-scale production of chips.

[0121] The fifth embodiment of the present invention also provides a chip tilt detection method. The chip tilt detection method provided in this embodiment differs from the chip tilt detection method provided in the first embodiment above in that:

[0122] In addition, in this embodiment, it should be noted that the steps of calculating the positions of several theoretical chips on the detection image based on the theoretical chip arrangement period and theoretical chip size parameters include:

[0123] When the detection image is acquired, it is standardized to generate a corresponding standard detection image.

[0124] Based on the theoretical chip arrangement cycle and theoretical chip size parameters, a corresponding theoretical chip arrangement template is generated, and the similarity between the theoretical chip arrangement template and the standard detection image is calculated.

[0125] Determine whether the similarity is greater than a preset threshold;

[0126] If the similarity is determined to be greater than the preset threshold, then several theoretical chip positions are extracted from the standard detection image according to the theoretical chip layout template.

[0127] Specifically, in this embodiment, it should be noted that in order to accurately identify the positions of several theoretical chips in the current detection image, when the required detection image is obtained, this embodiment will immediately perform standardization processing on the current detection image, that is, crop the size of the current detection image, and perform filtering and noise reduction processing on the current detection image in sequence, so as to finally obtain the required standard detection image.

[0128] Based on this, a corresponding theoretical chip layout template is generated according to the theoretical chip layout cycle and theoretical chip size parameters. At the same time, the similarity between the current theoretical chip layout template and the current standard detection image is calculated.

[0129] Furthermore, it is determined in real time whether the calculated similarity is greater than a preset threshold. Preferably, in this embodiment, the preset threshold can be set to 90%. Specifically, if so, the required position of the drag bar theoretical chip can be quickly extracted from the current standard detection image using the theoretical chip layout template; otherwise, a new detection image is captured.

[0130] In this embodiment, it should be noted that the step of extracting several theoretical chip positions from the standard detection image based on the theoretical chip layout template includes:

[0131] Based on the grayscale value of the standard detection image, the theoretical chip layout template is correspondingly overlapped on the standard detection image, and based on a preset mapping algorithm, several theoretical chip positions in the theoretical chip layout template are correspondingly mapped to the standard detection image.

[0132] Furthermore, in this embodiment, it should be noted that this embodiment only needs to overlap the above-mentioned theoretical chip layout template on the above-mentioned standard detection image, and then further refer to the grayscale value of the above-mentioned standard detection image and call the preset mapping algorithm in the database to map the positions of several theoretical chips in the current theoretical chip layout template to the current standard detection image.

[0133] Furthermore, in this embodiment, it should be noted that the expression for the above tilt angle algorithm is:

[0134] Y = 3kγ·μ + sβ 2 +eω 2

[0135] Where Y represents the tilt angle of the chip surface, k, s, and e all represent percentages, γ represents the image intensity, μ represents the average gray value, β represents the chip offset, and ω represents the aperture of the camera.

[0136] It should be noted that the method provided in the fifth embodiment of the present invention has the same implementation principle and some technical effects as the first embodiment. For the sake of brevity, any parts not mentioned in this embodiment can be referred to the corresponding content provided in the first embodiment.

[0137] In summary, the chip tilt detection method provided by the above embodiments of the present invention can simultaneously store multiple chips to be tested in the sample tray, and can detect the tilt angle of each chip in the current detection image by taking only one detection image, thereby greatly shortening the chip detection time and significantly improving the detection efficiency of chip tilt angle, which is beneficial to the large-scale production of chips.

[0138] Please see Figure 5 The figure shows a chip tilt detection system provided in the sixth embodiment of the present invention, the system comprising:

[0139] The calibration module 12 is used to pre-calibrate the camera, move the sample disk to be tested into the detection area of ​​the calibrated camera, and image the surface of the sample disk to be tested through the camera to acquire the corresponding detection image.

[0140] The first calculation module 22 is used to calculate the positions of several theoretical chips on the detection image based on the theoretical chip arrangement cycle and the theoretical chip size parameters.

[0141] The judgment module 32 is used to detect the actual gray values ​​corresponding to several theoretical chip positions respectively, and to determine whether the actual gray values ​​are within a preset gray value threshold.

[0142] Processing module 42 is used to determine that there is an actual chip at the current theoretical chip location if the actual gray value of the theoretical chip location is found to be within the preset gray value threshold, and to identify the chip area and non-chip area at the current theoretical chip location.

[0143] The second calculation module 52 is used to calculate the average gray value corresponding to the chip area and input the average gray value into the tilt angle algorithm to calculate the tilt angle of the chip in the chip area.

[0144] In the aforementioned chip tilt detection system, the calibration module 12 is specifically used for:

[0145] The calibration disk is moved into the detection area of ​​the camera, and images are taken of several calibration pieces with different tilt angles in the calibration disk to obtain the corresponding calibration images.

[0146] Based on the principle of image grayscale distribution, the standard coordinate values ​​corresponding to each calibration piece are extracted from the calibration image, and the standard grayscale values ​​corresponding to the tilt angle of each calibration piece surface are obtained.

[0147] At least two sets of the standard coordinate values ​​and the standard grayscale values ​​are randomly selected, and the tilt angle algorithm is trained based on the standard coordinate values ​​and the standard grayscale values ​​to complete the pre-calibration of the camera.

[0148] In the aforementioned chip tilt detection system, the preset grayscale threshold includes a first extreme value and a second extreme value, wherein the first extreme value is smaller than the second extreme value, and the processing module 42 is specifically used for:

[0149] Determine whether each actual gray value is greater than the first extreme value and less than the second extreme value;

[0150] If it is determined that there is an actual gray value that is greater than the first extreme value and less than the second extreme value, then it is determined that there is a corresponding actual chip at the current theoretical chip position, and the actual chip is set as the corresponding point element, and each point element is highlighted on the detection image.

[0151] Integrate several of the aforementioned point elements to generate a corresponding point set, and set the target region where the point set exists as the chip region;

[0152] If it is determined that there is an actual gray value that is not between the first extreme value and the second extreme value, then the current actual gray value is removed, and the area outside the target area is set as the non-chip area.

[0153] In the aforementioned chip tilt detection system, the second calculation module 52 is specifically used for:

[0154] When the chip region is obtained, the chip region is divided into several sub-regions, and each sub-region contains a target chip with a tilt angle.

[0155] The average gray value corresponding to each of the sub-regions is calculated one by one based on a preset gray-scale algorithm, and a mapping relationship between each average gray value and each target chip is established one by one. The mapping relationship is unique.

[0156] In the aforementioned chip tilt detection system, the first calculation module 22 is specifically used for:

[0157] When the detection image is acquired, it is standardized to generate a corresponding standard detection image.

[0158] Based on the theoretical chip arrangement cycle and theoretical chip size parameters, a corresponding theoretical chip arrangement template is generated, and the similarity between the theoretical chip arrangement template and the standard detection image is calculated.

[0159] Determine whether the similarity is greater than a preset threshold;

[0160] If the similarity is determined to be greater than the preset threshold, then several theoretical chip positions are extracted from the standard detection image according to the theoretical chip layout template.

[0161] In the aforementioned chip tilt detection system, the first calculation module 22 is further specifically used for:

[0162] Based on the grayscale value of the standard detection image, the theoretical chip layout template is correspondingly overlapped on the standard detection image, and based on a preset mapping algorithm, several theoretical chip positions in the theoretical chip layout template are correspondingly mapped to the standard detection image.

[0163] In the aforementioned chip tilt detection system, the expression for the tilt angle algorithm is:

[0164] Y = 3kγ·μ + sβ 2 +eω 2

[0165] Where Y represents the tilt angle of the chip surface, k, s, and e all represent percentages, γ represents the image intensity, μ represents the average gray value, β represents the chip offset, and ω represents the aperture of the camera.

[0166] The seventh embodiment of the present invention provides a computer, including a memory, a processor, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the chip tilt detection method provided in the above embodiments.

[0167] The eighth embodiment of the present invention provides a readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the chip tilt detection method provided in the above embodiments.

[0168] In summary, the chip tilt detection method, system, computer, and readable storage medium provided in the above embodiments of the present invention can simultaneously store multiple chips under test in the sample tray, and can detect the tilt angle of each chip in the current detection image by taking only one detection image, thereby greatly shortening the chip detection time and significantly improving the detection efficiency of chip tilt angle, which is beneficial to the large-scale production of chips.

[0169] It should be noted that the above modules can be functional modules or program modules, and can be implemented through software or hardware. For modules implemented through hardware, the above modules can reside in the same processor; or the above modules can be located in different processors in any combination.

[0170] The logic and / or steps represented in the flowchart or otherwise described herein, for example, can be considered as a sequenced list of executable instructions for implementing logical functions, and can be embodied in any computer-readable medium for use by, or in conjunction with, an instruction execution system, apparatus, or device (such as a computer-based system, a processor-included system, or other system that can fetch and execute instructions from, an instruction execution system, apparatus, or device). For the purposes of this specification, "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transmit programs for use by, or in conjunction with, an instruction execution system, apparatus, or device.

[0171] More specific examples of computer-readable media (a non-exhaustive list) include: electrical connections (electronic devices) having one or more wires, portable computer disk drives (magnetic devices), random access memory (RAM), read-only memory (ROM), erasable and editable read-only memory (EPROM or flash memory), fiber optic devices, and portable optical disc read-only memory (CDROM). Furthermore, computer-readable media can even be paper or other suitable media on which the program can be printed, since the program can be obtained electronically, for example, by optically scanning the paper or other medium, followed by editing, interpreting, or otherwise processing as necessary, and then stored in computer memory.

[0172] It should be understood that various parts of the present invention can be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, multiple steps or methods can be implemented in software or firmware stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, it can be implemented using any one or a combination of the following techniques known in the art: discrete logic circuits having logic gates for implementing logical functions on data signals, application-specific integrated circuits (ASICs) having suitable combinational logic gates, programmable gate arrays (PGAs), field-programmable gate arrays (FPGAs), etc.

[0173] In the description of this specification, references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0174] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of this patent should be determined by the appended claims.

Claims

1. A chip tilt detection method, characterized in that, The method includes: The camera is pre-calibrated, and the sample disk to be tested is moved into the detection area of ​​the calibrated camera. The surface of the sample disk to be tested is imaged by the camera to acquire the corresponding detection image. The positions of several theoretical chips on the detected image are calculated based on the theoretical chip arrangement cycle and theoretical chip size parameters. The actual grayscale values ​​corresponding to several theoretical chip positions are detected respectively, and it is determined whether the actual grayscale values ​​are within a preset grayscale threshold. If it is determined that the actual gray value of the theoretical chip location is within the preset gray value threshold, then it is determined that there is an actual chip at the current theoretical chip location, and the chip area and non-chip area at the current theoretical chip location are identified. The average gray value corresponding to the chip area is calculated, and the average gray value is input into the tilt angle algorithm to calculate the tilt angle of the chip in the chip area. The step of calculating the average gray value corresponding to the chip region includes: When the chip region is obtained, the chip region is divided into several sub-regions, and each sub-region contains a target chip with a tilt angle. The average grayscale value corresponding to each of the sub-regions is calculated one by one based on a preset grayscale algorithm, and a mapping relationship between each average grayscale value and each target chip is established one by one. The mapping relationship is unique.

2. The chip tilt detection method according to claim 1, characterized in that: The pre-calibration step of the camera includes: The calibration disk is moved into the detection area of ​​the camera, and images are taken of several calibration pieces with different tilt angles in the calibration disk to obtain the corresponding calibration images. Based on the principle of image grayscale distribution, the standard coordinate values ​​corresponding to each calibration piece are extracted from the calibration image, and the standard grayscale values ​​corresponding to the tilt angle of each calibration piece surface are obtained. At least two sets of the standard coordinate values ​​and the standard grayscale values ​​are randomly selected, and the tilt angle algorithm is trained based on the standard coordinate values ​​and the standard grayscale values ​​to complete the pre-calibration of the camera.

3. The chip tilt detection method according to claim 1, characterized in that: The preset grayscale threshold includes a first extreme value and a second extreme value, wherein the first extreme value is smaller than the second extreme value. The step of determining that an actual chip exists at the current theoretical chip location and identifying the chip region and non-chip region at the current theoretical chip location includes: Determine whether each actual gray value is greater than the first extreme value and less than the second extreme value; If it is determined that there is an actual gray value that is greater than the first extreme value and less than the second extreme value, then it is determined that there is a corresponding actual chip at the current theoretical chip position, and the actual chip is set as the corresponding point element, and each point element is highlighted on the detection image. Integrate several of the aforementioned point elements to generate a corresponding point set, and set the target region where the point set exists as the chip region; If it is determined that there is an actual gray value that is not between the first extreme value and the second extreme value, then the current actual gray value is removed, and the area outside the target area is set as the non-chip area.

4. The chip tilt detection method according to claim 1, characterized in that: The step of calculating the positions of several theoretical chips on the detection image based on the theoretical chip arrangement period and theoretical chip size parameters includes: When the detection image is acquired, it is standardized to generate a corresponding standard detection image; Based on the theoretical chip arrangement cycle and theoretical chip size parameters, a corresponding theoretical chip arrangement template is generated, and the similarity between the theoretical chip arrangement template and the standard detection image is calculated. Determine whether the similarity is greater than a preset threshold; If the similarity is determined to be greater than the preset threshold, then several theoretical chip positions are extracted from the standard detection image according to the theoretical chip layout template.

5. The chip tilt detection method according to claim 4, characterized in that: The step of extracting several theoretical chip positions from the standard detection image based on the theoretical chip layout template includes: Based on the grayscale value of the standard detection image, the theoretical chip layout template is correspondingly overlapped on the standard detection image, and based on a preset mapping algorithm, several theoretical chip positions in the theoretical chip layout template are correspondingly mapped to the standard detection image.

6. The chip tilt detection method according to claim 2, characterized in that: The expression for the tilt angle algorithm is: Y=3kγ·μ+sβ 2 +eω 2 Where Y represents the tilt angle of the chip surface, k, s, and e all represent percentages, γ represents the image intensity, μ represents the average gray value, β represents the chip offset, and ω represents the aperture of the camera.

7. A chip tilt detection system, characterized in that, The system includes: The calibration module is used to pre-calibrate the camera, move the sample disk to be tested into the detection area of ​​the calibrated camera, and image the surface of the sample disk to be tested through the camera to acquire the corresponding detection image; The first calculation module is used to calculate the positions of several theoretical chips on the detection image based on the theoretical chip arrangement period and the theoretical chip size parameters. The judgment module is used to detect the actual gray values ​​corresponding to several theoretical chip positions respectively, and to determine whether the actual gray values ​​are within a preset gray value threshold. The processing module is used to determine that there is an actual chip at the current theoretical chip location if the actual gray value of the theoretical chip location is found to be within the preset gray value threshold, and to identify the chip area and non-chip area at the current theoretical chip location. The second calculation module is used to calculate the average gray value corresponding to the chip area, and input the average gray value into the tilt angle algorithm to calculate the tilt angle of the chip in the chip area. The step of calculating the average gray value corresponding to the chip region includes: When the chip region is obtained, the chip region is divided into several sub-regions, and each sub-region contains a target chip with a tilt angle. The average grayscale value corresponding to each of the sub-regions is calculated one by one based on a preset grayscale algorithm, and a mapping relationship between each average grayscale value and each target chip is established one by one. The mapping relationship is unique.

8. A computer comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the chip tilt detection method as described in any one of claims 1 to 6.

9. A readable storage medium having a computer program stored thereon, characterized in that, When executed by the processor, the program implements the chip tilt detection method as described in any one of claims 1 to 6.

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