Angle resolved raman device and analysis apparatus

Abstract

The application provides an angle-resolved Raman device and an analysis equipment, and relates to the technical field of optical machinery. During use of the device, the parallelism of the light path of a closed Raman light path system with a first direction can be adjusted by using an angle-resolved positioning mechanism first, the closed Raman light path system can be moved by using a second fine adjustment mechanism, and thus the adjustment of the parallelism is assisted to complete, so that the position of a light spot on a sample is unchanged when an incident angle alpha of the closed Raman light path system to the sample changes, and thus the in-situ property is ensured. After the adjustment of the tilt angle is completed, the position of the light path of the closed Raman light path system on a first plane can be adjusted by using a first fine adjustment mechanism, so that the light path is coaxial with an axis of the first rotating mechanism, and the in-situ property during rotation of a microscope lens is ensured.

Description

Technical Field

[0001] This invention relates to the field of optical and mechanical technology, and in particular to an angle-resolved Raman spectroscopy device and analysis equipment. Background Technology

[0002] Micro Raman spectroscopy, as a powerful tool for experimental mechanical measurement at the micro- and nano-scale that has been developed in recent years, can obtain physicochemical information such as chemical composition and crystal structure of materials within the measurement range by analyzing Raman scattering spectral information. It can also be applied to analyze mechanical parameters such as strain / stress, and has the advantages of being fast, non-destructive, non-contact, having high spatial resolution, and requiring no sample preparation.

[0003] The existing Raman spectroscopy measurement and mechanical testing machine combination device generally works by placing the mechanical testing machine, usually a miniature loading frame, directly below the Raman detection optical path. This makes it difficult to quickly achieve detection under multiple geometric configurations. When it is necessary to change the sample rotation angle, the miniature loading frame is usually rotated directly, resulting in a large in-situ error in the detection. Summary of the Invention

[0004] The purpose of this invention is to provide an angle-resolved Raman spectroscopy device and analysis equipment to alleviate the technical problem of poor in-situ accuracy in existing analysis equipment.

[0005] In a first aspect, the present invention provides an angle-resolved Raman spectroscopy device, comprising:

[0006] Base;

[0007] A first linear displacement mechanism is connected to a base; and the first linear displacement mechanism has a first mounting base capable of moving along a first direction.

[0008] A first surface displacement mechanism is connected to a first mounting base; and the first surface displacement mechanism has a second mounting base that can move along a first plane, and the first direction is perpendicular to the first plane;

[0009] A first rotating mechanism is connected to a second mounting base; and the first rotating mechanism has a third mounting base capable of rotating about a first rotating shaft, the first rotating shaft extending along a first direction;

[0010] A first fine-tuning mechanism is connected to a third mounting base, and a fourth mounting base is provided on the first fine-tuning mechanism. The fourth mounting base is capable of moving along a first plane.

[0011] The second linear displacement mechanism is connected to the fourth mounting base; and the second linear displacement mechanism has a fifth mounting base that can move along the first direction, and the adjustment accuracy of the second linear displacement mechanism is different from that of the first linear displacement mechanism.

[0012] An angle-resolving positioning mechanism is used to adjust the detection tilt angle of the optical path in a closed Raman optical path system. The angle-resolving positioning mechanism includes an angle-resolving mounting plate and a sliding seat. The angle-resolving mounting plate has an arc-shaped track, and the sliding seat is slidably connected to the track. During the sliding process, the distance from any point on the sliding seat to the center of the arc remains unchanged. A second fine-tuning mechanism is connected to the sliding seat, and the second fine-tuning mechanism has a movable sixth platform.

[0013] A closed Raman optical path system is connected to the sixth platform. The second fine-tuning mechanism can drive the closed Raman optical path system to move. The radius of the arc is equal to the distance from the focal point of the microscope head in the closed Raman optical path system in the first direction to the connection point between the closed Raman optical path system and the second fine-tuning mechanism, so that the position of the light spot irradiated on the sample remains unchanged when the incident tilt angle α of the closed Raman optical path system on the sample changes.

[0014] Furthermore, the first linear displacement mechanism also includes a first drive module, which is connected to the first mounting base and is used to drive the first mounting base to move along the first direction;

[0015] The first drive module includes a lead screw or a pneumatic cylinder or a hydraulic cylinder.

[0016] Furthermore, the first surface displacement mechanism includes a second drive module, which is connected to the second mounting base and is used to drive the second mounting base to move along the first plane;

[0017] The second drive module includes a lead screw or a pneumatic cylinder or a hydraulic cylinder.

[0018] Furthermore, the first rotating mechanism also includes a third drive module, which is connected to a third mounting base and is used to drive the third mounting base to rotate around the first rotating shaft;

[0019] The third drive module drives the lead screw via a DC motor or stepper motor to rotate the third mounting base.

[0020] Furthermore, the sliding seat has a positioning structure that slides with the track, and a locking structure that locks with the angle-resolved mounting plate.

[0021] Furthermore, the second fine-tuning mechanism includes a two-dimensional slide stage for correcting the displacement of the closed Raman optical path system in the first and second directions, the second direction being perpendicular to the first direction and the sliding plane of the slide seat, respectively.

[0022] Furthermore, the second fine-tuning mechanism is a two-dimensional or one-dimensional tilt angle displacement stage.

[0023] Secondly, the present invention provides an analytical device including the aforementioned angle-resolved Raman spectroscopy device.

[0024] Furthermore, the mechanical testing machine is connected to the base.

[0025] Furthermore, the mechanical testing machine includes a clamping part, which includes a first clamping structure, a second clamping structure, and a driving component arranged at intervals. The driving component drives the first clamping structure and the second clamping structure to move synchronously towards or away from each other.

[0026] The present invention has at least the following advantages or beneficial effects:

[0027] The angle-resolved Raman spectroscopy device provided by this invention includes: a base, a first linear displacement mechanism, a first planar displacement mechanism, a first rotation mechanism, a first fine-tuning mechanism, a second linear displacement mechanism, an angle-resolved positioning mechanism, and a closed Raman optical path system. The first linear displacement mechanism is connected to the base and has a first mounting seat capable of moving along a first direction. The first planar displacement mechanism is connected to the first mounting seat and has a second mounting seat capable of moving along a first plane, with the first direction perpendicular to the first plane. The first rotation mechanism is connected to the second mounting seat and has a third mounting seat capable of rotating around a first axis extending along the first direction. The first fine-tuning mechanism is connected to the third mounting seat and has a fourth mounting seat capable of moving along the first plane. The second linear displacement mechanism is connected to the fourth mounting seat and has a fifth mounting seat capable of moving along the first direction. The adjustment precision of the second linear displacement mechanism is different from that of the first linear displacement mechanism. The angle-resolved positioning mechanism... This mechanism is used to adjust the detection tilt angle of the closed Raman optical path system. The angle-resolved positioning mechanism includes an angle-resolved mounting plate and a sliding seat. The angle-resolved mounting plate has an arc-shaped track, and the sliding seat is slidably connected within the track. During the sliding process, the distance from any point on the sliding seat to the center of the arc remains unchanged. A second fine-tuning mechanism is connected to the sliding seat, and the second fine-tuning mechanism has a movable sixth platform. The closed Raman optical path system is connected to the sixth platform. The second fine-tuning mechanism can drive the closed Raman optical path system to move, and the radius of the arc is equal to the distance from the focal point of the microscope head in the closed Raman optical path system in the first direction to the connection point between the closed Raman optical path system and the second fine-tuning mechanism, so that when the incident tilt angle α of the closed Raman optical path system on the sample changes, the position of the light spot irradiated on the sample remains unchanged.

[0028] During the use of the device, the parallelism between the optical path of the closed Raman optical path system and the first direction can be adjusted using the angle-resolved positioning mechanism. During adjustment, the closed Raman optical path system can be moved using the second fine-tuning mechanism to assist in adjusting the parallelism. The radius of the arc is equal to the distance from the focal point of the microscope head in the closed Raman optical path system in the first direction to the connection point between the closed Raman optical path system and the second fine-tuning mechanism. This ensures that the position of the light spot on the sample remains unchanged when the incident tilt angle α of the closed Raman optical path system changes, thus guaranteeing in-situ accuracy. Further, after the tilt angle is adjusted, the position of the optical path of the closed Raman optical path system on the first plane can be adjusted using the first fine-tuning mechanism, making the optical path coaxial with the axis of the first rotating mechanism. Thus, when the first rotating mechanism drives the closed Raman optical path system to rotate, the position of the light spot on the sample remains unchanged, ensuring in-situ accuracy when the microscope head rotates. After adjustment, focusing can be performed using the first and second linear displacement mechanisms. Then, the first planar displacement mechanism is used to scan multiple points on the sample. The device provided by the present invention can achieve angular resolution of the Raman detection optical path, can change the detection rotation angle and tilt angle, and structurally, the first fine-tuning mechanism and the second fine-tuning mechanism can ensure the in-situ stability of the detection. Attached Figure Description

[0029] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0030] Figure 1 A schematic diagram of an angle-resolved Raman spectroscopy device provided in an embodiment of the present invention;

[0031] Figure 2 This is a front view schematic diagram of the angle-resolved Raman spectroscopy device provided in an embodiment of the present invention;

[0032] Figure 3 This is a side view schematic diagram of the angle-resolved Raman spectroscopy device provided in an embodiment of the present invention;

[0033] Figure 4 This is a schematic diagram of the mechanical testing machine structure of the analytical equipment provided in an embodiment of the present invention.

[0034] Icons: 100 - First transition connector; 200 - First surface displacement mechanism; 210 - First rotation mechanism; 300 - First linear displacement mechanism; 400 - Base; 500 - Angle-resolved positioning mechanism; 310 - First fine-tuning mechanism; 110 - Second transition connector; 320 - Second linear displacement mechanism; 600 - Closed Raman optical path system; 700 - Mechanical testing machine;

[0035] 510 – Angle resolution mounting plate; 520 – Track; 530 – Sliding seat; 540 – Second fine-tuning mechanism;

[0036] 531 – Base; 532 – Locking structure; 533 – Positioning structure;

[0037] 800 – Sample; 710 – First clamping structure; 711 – Second clamping structure; 720 – Piezoelectric material; 721 – Sensor; 730 – First slider; 731 – Second slider; 740 – Transmission system; 750 – Gearbox; 760 – Power source. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0039] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0040] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0041] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0042] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0043] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0044] like Figure 1 - Figure 3 As shown, the angle-resolved Raman spectroscopy device provided by the present invention includes: a base 400, which is a relatively fixed structure, that is, it is in a relatively static state during the experiment. It can be in the shape of a gantry or other shapes that do not interfere with other components.

[0045] The device also includes a first linear displacement mechanism 300, which is connected to the base 400. The first linear displacement mechanism 300 has a first mounting seat capable of moving along a first direction. This first direction can be a vertical direction, i.e., the up-down direction in this embodiment. The first linear displacement mechanism 300 also includes a first drive module, which includes a lead screw, a cylinder, or a hydraulic cylinder. The first drive module is connected to the first mounting seat and is used to drive the first mounting seat to move along the up-down direction. The first linear displacement mechanism 300 has a large stroke and relatively low precision. Users can use the first linear displacement mechanism 300 to adjust the overall angle within a large range to determine the overall height of the Raman device, facilitating sample placement or rapid focusing.

[0046] The device also includes a first surface displacement mechanism 200, which is connected to a first mounting base. The first surface displacement mechanism 200 has a second mounting base capable of moving along a first plane, with the first direction perpendicular to the first plane. The first surface displacement mechanism 200 includes a second drive module, which includes a lead screw, a cylinder, or a hydraulic cylinder. The second drive module is connected to the second mounting base and is used to drive the second mounting base to move along the first plane. In this embodiment, the first plane can be a horizontal plane. The main function of the first surface displacement mechanism 200 is to achieve bidirectional displacement in both the front-back and left-right directions of the horizontal plane, enabling multi-point detection of the sample 800. Its driving method can be electric or manual, achieving bidirectional displacement through a drive device such as a lead screw, cylinder, or hydraulic cylinder.

[0047] The device also includes a first rotating mechanism 210, which is connected to a second mounting base. The first rotating mechanism 210 has a third mounting base capable of rotating around a first rotating axis extending in a first direction. The first rotating mechanism 210 also includes a third drive module, which drives a lead screw via a DC motor or stepper motor to rotate the third mounting base. The third drive module is connected to the third mounting base and is used to drive the third mounting base to rotate around the first rotating axis. This mechanism enables automated rotation of the microscope lens, adjusting the angle between the optical path and the sample 80°.

[0048] It should be noted that a first transition connector 100 can be connected between the first rotating mechanism 210 and the second mounting base. The first transition connector 100 only serves to connect the first rotating mechanism 210 and the second mounting base. There are various structural design methods for this. Figure 1 The optimal design scheme is described in the text, which can be designed with any structure while ensuring that the function is achieved.

[0049] The device also includes a first fine-tuning mechanism 310, which is connected to a third mounting base. The first fine-tuning mechanism 310 has a fourth mounting base that can move along a first plane. The first fine-tuning mechanism 310 can serve as a two-dimensional displacement adjustment platform to move the focal point of the microscope head in the closed Raman optical path system 600 left-right and back-forward movements, used to calibrate and correct the coaxiality of the microscope head with the rotation axis of the first rotation mechanism 210, ensuring the in-situ stability of the microscope head during rotation. It can also serve as a three-dimensional displacement adjustment platform to achieve fine-tuning of the microscope head in back-forward, left-right, and up-down movements, with the up-down fine-tuning serving to achieve precise focusing.

[0050] The device also includes a second linear displacement mechanism 320, which is connected to a fourth mounting base. The second linear displacement mechanism 320 has a fifth mounting base capable of moving along a first direction, and the adjustment precision of the second linear displacement mechanism 320 differs from that of the first linear displacement mechanism 300. In this embodiment, the second linear displacement mechanism 320 is short and highly precise, enabling fine-tuning.

[0051] It should be noted that, where the structure allows, the first linear displacement mechanism 300 and the second linear displacement mechanism 320 can be interchanged.

[0052] The connection between the first fine-tuning mechanism 310 and the second linear displacement mechanism 320 is achieved through the second transition connector 110. The second transition connector 110 can be designed with any structure and its function is to realize the transition function. When the first fine-tuning mechanism 310 is a two-dimensional displacement adjustment structure, the second linear displacement mechanism 320 can be a one-dimensional displacement adjustment platform used to fine-tune the height of the microscope head to achieve precise focusing.

[0053] The device also includes an angle-resolving positioning mechanism 500. A second linear displacement mechanism 320 is installed on the right side of the angle-resolving positioning mechanism 500. The main function of the angle-resolving positioning mechanism 500 is to adjust the detection tilt angle of the closed Raman optical path system through its own positioning structure 533. The positioning method can be achieved by positioning holes and positioning pins, or by positioning methods such as V-block and cylindrical surface, conical hole and tapered mandrel. All of the above positioning methods should be within the scope of patent protection.

[0054] The angle-resolving positioning mechanism 500 includes an angle-resolving mounting plate 510 and a sliding seat 530. The angle-resolving mounting plate 510 has an arc-shaped track 520. The sliding seat 530 is slidably connected within the track 520, and during sliding, the distance from any point on the sliding seat 530 to the center of the arc remains unchanged. A second fine-tuning mechanism 540 is connected to the sliding seat 530, and the second fine-tuning mechanism 540 has a movable sixth platform.

[0055] The angle-resolved positioning mechanism 500 can accurately and quickly adjust the measurement angle of the closed Raman optical path system 600 relative to the surface of the sample 800, thereby constructing different geometric detection configurations.

[0056] The angle-resolving mounting plate 510 has an arc-shaped guide rail, the main function of which is to connect the sliding seat 530. Furthermore, the angle-resolving mounting plate 510 is equipped with auxiliary positioning structures, such as positioning holes and conical holes. It should be noted that the radius of the arc-shaped guide rail should be equal to the distance in the vertical direction from the focal point of the microscope lens in the closed Raman optical path system 600 to the connection point between the closed Raman optical path system 600 and the sliding seat 530.

[0057] Specifically, the sliding seat 530 has a seat body 531, on which a positioning structure 533 is slidably connected to the track 520, and a locking structure 532 is locked to the angle resolution mounting plate 510. Both the locking structure 532 and the positioning structure 533 are installed at one end of the sliding seat 530. During use, the positioning structure 533 first positions the seat, and then the locking structure 532 fixes it in place. The other end of the sliding seat 530 is connected to the second fine-tuning mechanism 540.

[0058] One end of the second fine-tuning mechanism 540 is connected to the sliding seat 530, and the other end is connected to the closed Raman optical path system 600. It can be a two-dimensional sliding stage used to correct the up-down and back-down displacement of the closed Raman optical path system 600, ensuring in-situ stability when the incident tilt angle α of the closed Raman optical path system 600 relative to the sample 800 is changed. It can also be a two-dimensional or one-dimensional tilt angle displacement stage used to adjust the attitude of the closed Raman optical path system 600. Based on actual usage requirements, it can also be any combination of the above two types of sliding stages.

[0059] It should be noted that if a structure similar to the slide table described above is designed to adjust the displacement and attitude of the closed Raman optical path system 600, such as using a set wire, micrometer head, or other structure to achieve fine-tuning of the orientation of the closed Raman optical path system 600, it should also be within the scope of patent protection.

[0060] The device also includes a closed Raman optical path system 600, which is connected to the sixth platform. The second fine-tuning mechanism 540 can drive the closed Raman optical path system 600 to move, and the radius of the arc is equal to the distance from the focal point of the microscope head in the closed Raman optical path system 600 in the first direction to the connection point between the closed Raman optical path system 600 and the second fine-tuning mechanism 540, so that when the incident tilt angle α of the closed Raman optical path system 600 on the sample 800 changes, the position of the light spot irradiated on the sample 800 remains unchanged.

[0061] The closed-loop Raman optical path system 600 can perform Raman spectroscopy excitation, acquisition, and analysis. The Raman optical path consists of two parts: an "observation optical path" and a "signal optical path." By introducing white light and laser light into these two parts respectively, observation of the sample 800 surface and excitation of the Raman signal can be achieved. Raman signal acquisition is achieved through a spectrometer, which disperses the spectral signal and transmits it to a single-photon detector to obtain single-point spectral data. Observation of the sample 800 surface can be achieved using an industrial camera.

[0062] During the use of the device, the angle resolution positioning mechanism 500 can be used to adjust the parallelism between the optical path of the closed Raman optical path system 600 and the first direction. During the adjustment, the second fine adjustment mechanism 540 can be used to move the closed Raman optical path system 600 to assist in the adjustment of parallelism. The radius of the arc is equal to the distance from the focal point of the microscope head in the closed Raman optical path system 600 in the first direction to the connection point between the closed Raman optical path system 600 and the second fine adjustment mechanism 540, so that when the incident tilt angle α of the closed Raman optical path system 600 on the sample 800 changes, the position of the light spot irradiated on the sample 800 remains unchanged, thus ensuring in-situ accuracy. Furthermore, after the tilt angle is adjusted, the position of the optical path of the closed Raman optical path system 600 on the first plane can be adjusted using the first fine-tuning mechanism 310, so that the optical path is coaxial with the axis of the first rotation mechanism 210. Thus, when the first rotation mechanism 210 drives the closed Raman optical path system 600 to rotate, the position of the light spot on the sample 800 remains unchanged, ensuring the in-situ stability of the microscope head during rotation. After adjustment, focusing can be performed using the first linear displacement mechanism 300 and the second linear displacement mechanism 320. Then, the first plane displacement mechanism 200 is used to scan multiple points on the sample 800. The device provided by this invention can achieve angular resolution of the Raman detection optical path, can change the detection rotation angle and tilt angle, and structurally, the first fine-tuning mechanism 310 and the second fine-tuning mechanism 540 can ensure the in-situ stability of the detection.

[0063] The analytical device provided by the present invention includes the above-mentioned angle-resolved Raman device, so as to solve the problem of detecting samples under complex stress conditions in Raman optical paths with multi-angle geometric configurations.

[0064] Furthermore, the mechanical testing machine 700 is fixedly connected to the base 400.

[0065] like Figure 4 As shown, the mechanical testing machine 700 includes a clamping part, which includes a first clamping structure 710, a second clamping structure 711 and a driving component arranged at intervals. The driving component drives the first clamping structure 710 and the second clamping structure 711 to move synchronously towards or away from each other.

[0066] Specifically, the mechanical testing machine 700 includes, but is not limited to, various mechanical testing machines 700 such as unidirectional in-situ loading testing machines and bidirectional tensile-compression loading testing machines. Because the structure described above already has an effective method for correcting the in-situ nature of the angle-resolved Raman device, as long as the mechanical testing machine 700 also has in-situ nature, the overall in-situ nature of the combined system can be guaranteed.

[0067] The sample 800 is held by the first clamping structure 710 and the second clamping structure 711 at the left and right ends respectively. The first slider 730 and the first clamping structure 710 are connected by a piezoelectric material 720, and the second slider 731 and the second clamping structure 711 are connected by a pressure sensor 721. The gearbox 750 is connected to the first slider 730 and the second slider 731 through the transmission system 740 respectively. The power source 760 can be a DC motor, a stepper motor, a hydraulic pump or other power components.

[0068] The power source 760 inputs power into the gearbox 750. After speed adjustment, the power output shaft of the gearbox 750 drives the first slider 730 and the second slider 731 to move towards or away from each other at the same speed through the transmission system 740. The first slider 730 drives the first clamping structure 710 through the piezoelectric material 720. At the same time, the second slider 731 drives the second clamping structure 711 through the pressure sensor 721. The first clamping structure 710 and the second clamping structure 711 cause the sample 800 to be loaded in situ.

[0069] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An angle-resolved Raman spectroscopy device, characterized in that, include: Base (400); A first linear displacement mechanism (300) is connected to the base (400); and the first linear displacement mechanism (300) has a first mounting seat capable of moving along a first direction; A first surface displacement mechanism (200) is connected to the first mounting base; and the first surface displacement mechanism (200) has a second mounting base that can move along a first plane, and the first direction is perpendicular to the first plane; A first rotating mechanism (210) is connected to a second mounting base; and the first rotating mechanism (210) has a third mounting base capable of rotating about a first rotating shaft, the first rotating shaft extending along a first direction; A first fine-tuning mechanism (310) is connected to the third mounting base. The first fine-tuning mechanism (310) has a fourth mounting base, which is capable of moving along a first plane. A second linear displacement mechanism (320) is connected to the fourth mounting base; and the second linear displacement mechanism (320) has a fifth mounting base that can move along a first direction, and the adjustment accuracy of the second linear displacement mechanism (320) is different from that of the first linear displacement mechanism (300); An angle-resolved positioning mechanism (500) is used to adjust the detection tilt angle of the optical path of a closed Raman optical path system. The angle-resolved positioning mechanism (500) includes an angle-resolved mounting plate (510) and a sliding seat (530). The angle-resolved mounting plate (510) has an arc-shaped track (520). The sliding seat (530) is slidably connected to the track (520), and during the sliding process, the distance from any point on the sliding seat (530) to the center of the arc remains unchanged. A second fine-tuning mechanism (540) is connected to the sliding seat (530), and the second fine-tuning mechanism (540) has a movable sixth platform. A closed Raman optical path system (600) is connected to a sixth platform. The second fine-tuning mechanism (540) can drive the closed Raman optical path system (600) to move. The radius of the arc is equal to the distance from the focal point of the microscope head in the closed Raman optical path system (600) in the first direction to the connection point between the closed Raman optical path system (600) and the second fine-tuning mechanism (540), so that when the incident tilt angle α of the closed Raman optical path system (600) on the sample (800) changes, the position of the light spot irradiated on the sample (800) remains unchanged.

2. The angle-resolved Raman spectroscopy device according to claim 1, characterized in that, The first linear displacement mechanism (300) further includes a first drive module, which is connected to the first mounting base and is used to drive the first mounting base to move along a first direction; The first drive module includes a lead screw or a cylinder or hydraulic cylinder.

3. The angle-resolved Raman spectroscopy device according to claim 2, characterized in that, The first surface displacement mechanism (200) includes a second drive module, which is connected to a second mounting base and is used to drive the second mounting base to move along the first plane; The second drive module includes a lead screw or a cylinder or hydraulic cylinder.

4. The angle-resolved Raman spectroscopy device according to claim 3, characterized in that, The first rotating mechanism (210) further includes a third driving module, which is connected to the third mounting base and is used to drive the third mounting base to rotate around the first rotating shaft; The third drive module drives the third mounting base to rotate via a DC motor or stepper motor drive screw.

5. The angle-resolved Raman spectroscopy device according to claim 4, characterized in that, The sliding seat (530) has a positioning structure (533) that is slidably connected to the track (520) and a locking structure (532) that is locked to the angle resolution mounting plate (510).

6. The angle-resolved Raman apparatus according to claim 5, characterized in that, The second fine-tuning mechanism (540) includes a two-dimensional slide for correcting the displacement of the closed Raman optical path system (600) in a first direction and a second direction, the second direction being perpendicular to the first direction and the sliding plane of the slide seat (530), respectively.

7. The angle-resolved Raman apparatus according to claim 5, characterized in that, The second fine-tuning mechanism (540) is a two-dimensional or one-dimensional tilt angle displacement stage.

8. An analytical device, characterized in that, It includes a mechanical testing machine (700) and the angle-resolved Raman apparatus as described in any one of claims 1-7.

9. The analytical apparatus according to claim 8, characterized in that, The mechanical testing machine (700) is connected to the base (400).

10. The analytical apparatus according to claim 8, characterized in that, The mechanical testing machine (700) includes a clamping part, which includes a first clamping structure (710), a second clamping structure (711) and a driving component arranged at intervals. The driving component drives the first clamping structure (710) and the second clamping structure (711) to move synchronously towards or away from each other.

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