A cylinder structure suitable for TDMAT source gas phase delivery

Abstract

This invention discloses a cylinder structure suitable for the gas-phase transport of TDMAT sources, aiming to solve the problem of uneven heating of TDMAT within the cylinder. The invention includes: a cylinder body for loading the TDMAT source; a level detector for detecting the liquid level of the TDMAT source within the cylinder body; a temperature detector for detecting the temperature within the cylinder body; heating rods for heating the TDMAT source within the cylinder body, with the heating rods spaced apart from bottom to top; and a controller that, based on the received liquid level and temperature signals from the level and temperature detectors, outputs control signals to control the operation of the heating rods, stopping heating from the heating rods exposed above the liquid surface. The cylinder structure for the gas-phase transport of TDMAT sources disclosed in this patent application ensures uniform heating of the TDMAT within the cylinder, avoiding localized overheating or underheating.

Description

TECHNICAL FIELD

[0001] The present application relates to a semiconductor chip manufacturing technology, more particularly, it relates to a cylinder structure suitable for TDMAT source gas phase delivery. BACKGROUND

[0002] The ultra-high purity TDMAT source is one of the most basic materials in the semiconductor chip manufacturing process, which is widely used in the atomic layer deposition of semiconductor chips. How the TDMAT can stably generate gas phase output to form a film layer that meets the semiconductor process depends on the stable generation of the saturated vapor pressure of TDMAT in the cylinder. Therefore, the heating method of the liquid TDMAT in the cylinder is particularly important.

[0003] Currently, the use of the TDMAT source gas phase deposition end is in the form of a steel cylinder heating sleeve wrapped around the outer surface of the steel cylinder for heat conduction. This results in insufficient heating of the TDMAT source inside the steel cylinder, which leads to unstable saturated vapor pressure and affects the quality of the chip. On the other hand, in order to ensure sufficient heating of the TDMAT inside, the heating temperature of the heating sleeve must be increased. As a result, the TDMAT at the edge of the bottle wall is burned due to the excessively high heating temperature, which reduces the purity of the TDMAT and affects the quality of the chip. SUMMARY

[0004] In order to overcome the above-mentioned deficiencies, the present application provides a cylinder structure suitable for TDMAT source gas phase delivery, which can uniformly heat the TDMAT in the cylinder and avoid local temperature too high or too low.

[0005] In order to solve the above technical problems, the present application adopts the following technical scheme: a cylinder structure suitable for TDMAT source gas phase delivery, comprising:

[0006] A cylinder body for loading TDMAT source;

[0007] A liquid level detector for detecting the liquid level of the TDMAT source in the cylinder body;

[0008] A temperature detector for detecting the temperature in the cylinder body;

[0009] A heating rod for heating the TDMAT source in the cylinder body, the heating rod is arranged at intervals from bottom to top;

[0010] A controller for outputting a control signal to control the operation of the heating rod according to the liquid level and temperature signals received by the liquid level detector and the temperature detector, so as to stop the heating of the heating rod exposed to the liquid surface.

[0011] The TDMAT source is loaded in the cylinder body, the liquid level detector and the temperature detector detect the liquid level and the temperature in the cylinder, and transmit the liquid level information and the temperature information to the controller. When the temperature is lower than the set temperature, the controller controls the heating rod below the liquid level to heat the TDMAT source, and when the temperature reaches the set temperature, the heating plate stops heating. As the liquid level of the TDMAT source decreases, the liquid level detector detects the liquid level signal, so that the heating rod exposed to the liquid surface stops heating, avoiding dry burning of the heating rod. The heating rods are arranged in the cylinder body from bottom to top, and the heating range is large, so that the volume of the TDMAT source is maximized, and the TDMAT is uniformly heated, avoiding local overheating or underheating.

[0012] As preferred, a plurality of heat exchange pipes are arranged in the cylinder body from bottom to top, and the heat exchange pipes are arranged transversely, and the heating rods are inserted into the heat exchange pipes one by one.

[0013] The TDMAT source in the cylinder body is heated by the heat exchange pipes, which facilitates the installation of the heating rods, and the heating rods do not directly contact the TDMAT source, which is beneficial to prolong the service life. The heat exchange pipes are arranged transversely, so that the whole heat exchange pipe is above or below the liquid surface at the same time.

[0014] As preferred, the heat exchange pipes are tightly installed on the inner wall of the cylinder body, and the cylinder body is provided with a corresponding insertion hole on the side wall, and the insertion hole is in communication with the heat exchange pipe, and the heating rod is inserted into the heat exchange pipe through the insertion hole.

[0015] The insertion hole is exposed to the outer wall of the cylinder body, which facilitates the installation of the heating rod.

[0016] As preferred, the cylinder body is provided with a mounting seat, and the heating rod is mounted on the mounting seat.

[0017] The mounting seat facilitates the installation of the heating rod.

[0018] As preferred, the outer wall of the cylinder body is provided with a mounting surface, and the mounting seat is provided with a fitting surface, and the heating rod is mounted on the fitting surface, and the fitting surface of the mounting seat is tightly connected with the mounting surface of the cylinder body after being fitted.

[0019] The mounting surface is fitted with the fitting surface, and the heat preservation effect is good.

[0020] As preferred, the cylinder body is provided with a heat tracing sleeve, and a heating resistor is installed in the heat tracing sleeve, and the heating resistor is electrically connected with the controller.

[0021] The heat tracing sleeve can heat the cylinder body, and the heating resistor is installed in the heat tracing sleeve to assist in heating the TDMAT source from the outside of the cylinder body. The heating rod directly heats the inside of the cylinder body, so that the TDMAT source is heated from the inside and the outside, and the heating is more uniform.

[0022] The steel bottle body is communicated with the gas inlet pipe and the gas outlet pipe, the gas inlet pipe extends to the bottom of the steel bottle body at one end and extends to the outside of the steel bottle body at the other end, and the gas inlet valve is installed on the gas inlet pipe.

[0023] The gas inlet pipe and the gas outlet pipe are arranged to facilitate the flow of the carrier gas, and the gas inlet valve and the gas outlet valve are installed to facilitate the on-off control of the gas flow.

[0024] As preferred, a plurality of rotating sleeves are movably sleeved on the heat exchange pipe, a plurality of heat dissipation blades are arranged on the rotating sleeves, and a plurality of heat dissipation needles are arranged at the edges of the heat dissipation blades.

[0025] The carrier gas is introduced into the TDMAT source in the steel bottle body to agitate the TDMAT source and drive the heat dissipation blades to rotate, and the heat of the heating rod is transmitted to the heat exchange pipe, the rotating sleeve, the heat dissipation blade and the heat dissipation needle, and the rotation of the rotating sleeve is beneficial to the heat transmission range and makes the heat transmission more uniform.

[0026] As preferred, a plurality of positioning rings are installed on the heat exchange pipe, and a rotating sleeve is arranged between adjacent two positioning rings on adjacent heat exchange pipes, and the positioning ring is tightly connected with the heat exchange pipe.

[0027] The positioning ring limits the axial direction of the rotating sleeve, so that the installation of the rotating sleeve is more stable and reliable.

[0028] Compared with the prior art, the beneficial effects of the present application are that the steel bottle structure suitable for TDMAT source gas phase delivery can make the TDMAT in the steel bottle be uniformly heated, and avoid the phenomenon of local high or low temperature. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 is a structural schematic view of the present application;

[0030] Figure 2 is a top view of the present application;

[0031] Figure 3 is a structural schematic view of the steel bottle body in the installation surface direction of the present application;

[0032] Figure 4 is a connection structure schematic view of the heating rod and the mounting seat of the present application;

[0033] Figure 5 is a structural schematic view of the inside of the steel bottle body of the present application;

[0034] Figure 6 is a connection structure schematic view of the heat exchange pipe and the rotating sleeve of the second embodiment of the present application;

[0035] In the figure: 1, steel bottle body, 2, temperature detector, 3, liquid level detector, 4, heating rod, 5, controller, 6, heat exchange pipe, 7, insertion hole, 8, mounting seat, 9, mounting surface, 10, fitting surface, 11, gas inlet pipe, 12, gas outlet pipe, 13, inlet valve, 14, outlet valve, 15, rotating sleeve, 16, heat dissipation blade, 17, heat dissipation needle, 18, positioning ring, 19, heat tracing sleeve. DETAILED DESCRIPTION

[0036] The technical solutions of the present application will be further described below through specific examples and in combination with the accompanying drawings:

[0037] Example 1: A steel bottle structure suitable for TDMAT source gas phase delivery (see attached Figure 1 to the attached Figure 4 , comprising:

[0038] The steel bottle body 1 is used to load the TDMAT source;

[0039] The liquid level detector 3 is used to detect the liquid level height of the TDMAT source in the steel bottle body;

[0040] The temperature detector 2 is used to detect the temperature in the steel bottle body;

[0041] The heating rod 4 is used to heat the TDMAT source in the steel bottle body, the heating rods are arranged in intervals from bottom to top, and the two columns of heating rods are arranged in a one-to-one correspondence in a transverse and side-by-side manner;

[0042] The controller 5 outputs a control signal to control the operation of the heating rod according to the liquid level and temperature signals received by the liquid level detector and the temperature detector, so that the heating rod exposed to the liquid surface stops heating.

[0043] A plurality of heat exchange pipes 6 are installed in the steel bottle body in intervals from bottom to top, the heat exchange pipes and the heating rods are arranged in a one-to-one correspondence, the heat exchange pipes are arranged transversely, and the heating rods are inserted into the heat exchange pipes in a one-to-one correspondence. The heat exchange pipes are tightly installed on the inner wall of the steel bottle body, and the insertion holes 7 are arranged on the side wall of the steel bottle body in a one-to-one correspondence with the heat exchange pipes, the insertion holes are in communication with the heat exchange pipes, and the heating rods are inserted into the heat exchange pipes through the insertion holes. The mounting seat 8 is arranged on the steel bottle body, and the heating rod is mounted on the mounting seat. The mounting surface 9 is arranged on the outer wall of the steel bottle body, and the fitting surface 10 is arranged on the mounting seat. The mounting surface and the fitting surface are both planar structures, the heating rod is mounted on the fitting surface, and the fitting surface on the mounting seat is tightly connected with the mounting surface on the steel bottle body to form a cylindrical steel bottle body. The steel bottle body is sleeved with a heat tracing sleeve 19, a heating resistor is installed in the heat tracing sleeve, and the heating resistor is electrically connected with the controller.

[0044] The steel bottle body is communicated with the gas inlet pipe 11 and the gas outlet pipe 12. One end of the gas inlet pipe extends to the bottom of the steel bottle body, and the other end of the gas inlet pipe extends to the outside of the steel bottle body. An inlet valve 13 is installed on the gas inlet pipe. One end of the gas outlet pipe is arranged at an upper position in the steel bottle body, and the other end of the gas outlet pipe extends to the outside of the steel bottle body. An outlet valve 14 is installed on the gas outlet pipe. The inlet valve and the outlet valve are both electrically connected with the controller. The inlet valve and the outlet valve are both solenoid valves, which are convenient for the controller to control the on-off,

[0045] The probe of the liquid level detector and the probe of the temperature detector both extend downward to the bottom position of the steel bottle body. Each heating rod is controlled by the controller to control the on-off of the current. The controller is connected with an alarm. When the temperature is too high or too low, or the liquid level is too high or too low, the alarm can alarm.

[0046] When in use, the following steps are included: a. First, the liquid level detector is removed, and the TDMAT source is installed in the liquid level detector installation position of the steel bottle body, and the liquid level detector is installed. b. The gas inlet pipe and the gas outlet pipe are connected with the gas deposition pipeline, the control system is powered, and the installation pipeline is replaced with nitrogen. c. The outlet valve is opened, and the heating rod, the liquid level detector, the temperature detector, and the heating resistor are powered on. d. When the temperature reaches the set temperature, the inlet valve is opened to introduce the carrier gas, and the TDMAT is carried into the gas deposition system as a whole. e. The liquid level detector and the temperature detector continuously detect the liquid level and the temperature signal and transmit them to the controller. When the temperature is higher than the set temperature, the number of working heating rods is reduced through the controller. When the temperature is lower than the set temperature, the number of working heating rods is increased through the controller to compensate for the temperature. As the liquid level of the TDMAT decreases, the heating rod exposed to the liquid surface is turned off. When the liquid level is lower than the set minimum liquid level, the alarm alarms, and the heating rod, the liquid level detector, the temperature detector, and the heating resistor are powered off.

[0047] Embodiment 2: A steel bottle structure suitable for TDMAT source gas phase transportation (see attached Figure 5 ), which is similar to embodiment 1. The main difference is that in this embodiment, a plurality of rotating sleeves 15 are movably installed on the heat exchange pipes. Three heat dissipation blades 16 are uniformly arranged on each rotating sleeve, and a plurality of heat dissipation needles 17 are arranged on the edges of the heat dissipation blades. The carrier gas introduced into the TDMAT source in the steel bottle body agitates the TDMAT source and drives the heat dissipation blades to rotate. A plurality of positioning rings 18 are installed on the heat exchange pipes. Adjacent two positioning rings between adjacent heat exchange pipes are both installed with a rotating sleeve, and the positioning ring is tightly connected with the heat exchange pipe. The other structures are the same as those in embodiment 1.

[0048] The carrier gas introduced into the TDMAT source in the steel bottle body agitates the TDMAT source and drives the heat dissipation blades to rotate. The heat of the heating rod is transmitted to the heat exchange pipe, the rotating sleeve, the heat dissipation blade, and the heat dissipation needle. The rotation of the rotating sleeve is conducive to the transmission range of heat, making the heat transmission more uniform.

[0049] The above embodiments are only the preferred schemes of the present application, and do not limit the present application in any form. Other variations and modifications can be made without departing from the technical solutions recited in the claims.

Claims

1. A cylinder structure suitable for TDMAT source gas phase delivery, characterized in that, The utility model relates to a TDMAT source heating device, comprising: a steel bottle body for loading TDMAT source; a liquid level detector for detecting the liquid level height of TDMAT source in the steel bottle body; a temperature detector for detecting the temperature in the steel bottle body; a heating rod for heating TDMAT source in the steel bottle body, the heating rod is arranged from bottom to top at intervals; a controller for outputting control signal to control the operation of the heating rod according to the received liquid level and temperature signals detected by the liquid level detector and the temperature detector, so that the heating rod exposed to the liquid surface stops heating; a plurality of heat exchange pipes are installed in the steel bottle body from bottom to top at intervals, the heat exchange pipes are arranged transversely, and the heating rod is inserted into the heat exchange pipe one by one; the heat exchange pipe is tightly installed on the inner wall of the steel bottle body, the steel bottle body side wall is provided with a corresponding insertion hole, and the heating rod is inserted into the heat exchange pipe through the insertion hole.

2. The cylinder structure suitable for TDMAT source gas phase delivery according to claim 1, characterized in that, The heating rod is installed on the mounting seat on the steel bottle body.

3. The cylinder structure suitable for TDMAT source gas phase delivery according to claim 2, characterized in that, The mounting seat is provided on the outer wall of the steel bottle body, and the heating rod is installed on the fitting surface of the mounting seat; the fitting surface of the mounting seat is tightly connected with the mounting surface on the steel bottle body after being fitted.

4. The cylinder structure suitable for TDMAT source gas phase delivery according to claim 1, characterized in that, The steel bottle body is sleeved with a heat tracing sleeve, a heating resistor is installed in the heat tracing sleeve, and the heating resistor is electrically connected with the controller.

5. The cylinder structure suitable for TDMAT source gas phase delivery according to any one of claims 1 to 4, characterized in that, The steel bottle body is connected with an air inlet pipe and an air outlet pipe, one end of the air inlet pipe extends to the bottom of the steel bottle body, the other end of the air inlet pipe extends to the outside of the steel bottle body, and an inlet valve is installed on the air inlet pipe; one end of the air outlet pipe is arranged at the upper position in the steel bottle body, the other end of the air outlet pipe extends to the outside of the steel bottle body, and an outlet valve is installed on the air outlet pipe.

6. The cylinder structure suitable for TDMAT source gas phase delivery according to claim 1, characterized in that, A plurality of rotating sleeves are movably sleeved on the heat exchange pipe, a plurality of heat dissipation blades are arranged on the rotating sleeve, and a plurality of heat dissipation needles are arranged on the edge of the heat dissipation blade.

7. The cylinder structure suitable for TDMAT source gas phase delivery according to claim 6, characterized in that, A plurality of positioning rings are installed on the heat exchange pipe, a rotating sleeve is installed between two adjacent positioning rings on the heat exchange pipe, and the positioning ring is tightly connected with the heat exchange pipe.

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