A method for adjusting valve dripping opening online and a multi-valve structure

Abstract

This invention relates to a method and a multi-valve structure for online adjustment of valve dripping opening. The method's step S1 provides a multi-valve structure including a common valve seat, a drip switching valve mounted on the common valve seat, and a dripping online predefined valve. The method further includes: S2 online switching between a full-flow supply mode and a dripping mode of the drip switching valve; S3 initial adjustment of the dripping online predefined valve using a valve channel constraint method to predefine the dripping opening online; S4 online redefining the dripping opening of the drip switching valve based on the predefined dripping opening; and S5 second adjustment of the dripping online predefined valve using a valve channel release method, whereby the predefined dripping valve no longer imposes opening constraints on the multi-valve or can only reduce the full-flow supply opening of the multi-valve. This method and corresponding structure enable valve dripping opening adjustment on the production line without valve disassembly or bypass.

Description

Technical Field

[0001] This invention relates to the technical field of drip valves, and in particular to a method for adjusting the drip opening of a valve online and a multi-valve structure, one specific application of which is ultrapure water replenishment and overflow in semiconductor manufacturing equipment. Background Technology

[0002] The primary purpose of existing fluid switching valves is to provide a switchable fluid supply, preventing leakage when the valve is closed. Common improvements focus on preventing leakage. However, there is a recent market demand for a reverse-engineered drip valve that allows for stable fluid leakage when closed and a large flow of fluid replenishment when open. A specific example, but not a limiting market requirement, is its application in semiconductor wafer cleaning machines. In such cases, drip valves are installed on the flow channels supplying the machine, with their opening and closing functions controlling the large-volume replenishment and overflow of the electronic ultrapure water tank, respectively.

[0003] In the simple application of fully open and fully closed control of water supply pipeline terminals, utility model patent CN2042140U discloses a control valve for preventing fluid dripping (overflow). It employs a double-spool valve series structure. The closing element of the main valve slides linearly along the valve seat to open or close the fluid passage. The secondary valve moves accordingly with the main valve, automatically adjusting the flow rate and simultaneously limiting the position of the main valve core. When there is no pressure in the fluid pipeline, the main valve core uses its own force to release the secondary valve's limit position, automatically closing the fluid passage, thus providing anti-drip and pressure loss protection functions. The control valve operates in two modes: fluid opening and fluid closing to prevent dripping. Existing related technologies do not consider the market demand for maintaining a stable dripping state when the valve is closed.

[0004] In the simple application of controlling the opening and closing of drips for watering flower pots, invention patent publication number CN104145787A discloses a drip system including a container, a cap, a needle body, and a valve. The cap is screwed onto the outlet of the container. The needle body includes a pin with a through hole fixed to the cap, a fixing sleeve screwed onto the tail of the pin, and a stop surface provided in the inner hole of the fixing sleeve. The tail of the pin is located inside the cap. The valve is located between the tail of the pin and the stop surface of the fixing sleeve. A vent hole is provided at the bottom of the container. In existing related technologies, the drip structure is a non-valve switching mode that utilizes natural gravity, and only has two modes: drip on and drip off, as well as an adjustable but unstable mode between drip on and drip off.

[0005] Dynamically adjusting the switching between drip and large-flow valve supply on a production line might seem like a simple solution: installing a gravity drip valve and a fluid switching valve on each production line for bypass switching. However, this structure would require both a drip inlet and a large-flow fluid inlet, and would occupy significant equipment space. The current technical challenge lies in achieving rapid switching between large-flow fluid supply and drip opening within a single drip valve structure, and in ensuring stable adjustment of the drip opening without shutting down the production line, disassembling the valve, or bypassing the flow. Furthermore, a readily conceivable technique is real-time online monitoring of the drip flow rate, which adds another monitoring point to the production line. This process requires continuous power consumption, and the significant difference between the drip flow rate and the large-flow rate hinders accurate microscopic monitoring of the drip flow rate. Summary of the Invention

[0006] The main objective of this invention is to provide a method for online adjustment of valve dripping opening. The main improvement lies in solving the technical problem of stable adjustment of valve dripping opening on the production line without stopping the machine, disassembling the valve, or bypassing when using a multi-valve that switches between high flow rate and dripping mode. It eliminates the need for constant monitoring of dripping flow rate, and the high flow rate does not affect the accuracy of the microscopic monitoring of dripping flow rate.

[0007] The second main objective of this invention is to provide a multi-valve structure that can be applied to a method for online adjustment of valve dripping opening.

[0008] The main objective of this invention is achieved through the following technical solution:

[0009] A method for online adjustment of valve dripping opening is proposed, comprising the following steps:

[0010] S1. A multi-valve structure is provided, the multi-valve structure including a common valve seat, a drip switching valve and a drip online predefined valve disposed on the common valve seat, wherein the drip switching valve and the drip online predefined valve are connected in series by flow channels;

[0011] S2. When the online predefined drip valve is in the open state, the online switching between the full-flow supply mode and the drip mode of the multi-valve structure is realized by the opening and closing of the drip switching valve. The closing phase of the drip switching valve provides the first online drip opening of the multi-valve structure, and the opening phase of the drip switching valve provides the first online full-flow supply opening of the multi-valve structure.

[0012] S3. During the opening or closing phase of the drip switching valve, the drip online predefined valve is adjusted for the first time to redefine the second online drip opening of the multi-valve structure online; when the drip switching valve is in the closing phase, the second online drip opening is less than the first online drip opening; when the drip switching valve is in the opening phase, the second online drip opening is greater than or less than the first online drip opening.

[0013] S4. When the first adjustment opening of the online predefined drip valve is in the state of the second online drip opening, the closing stage of the drip switching valve is adjusted. The closing stage of the drip switching valve after adjustment has a third online drip opening. The difference between the third online drip opening and the second online drip opening is less than the difference between the third online drip opening and the first online drip opening.

[0014] S5. The adjustment opening of the online predefined drip valve is adjusted for the second time to be close to or greater than the first online full-flow supply opening of the multi-valve structure; the closing phase of the drip switching valve provides the third online drip opening of the multi-valve structure, and the opening phase of the drip switching valve provides the first online full-flow supply opening of the multi-valve structure.

[0015] The implementation principle of this basic method embodiment is as follows: S2 uses online switching between the full-flow supply mode and the drip mode of the drip switching valve; S3 adjusts the online predefined drip valve for the first time using valve channel constraint to predefine the drip opening online; S4 redefines the drip opening of the drip switching valve online based on the comparison of the online predefined drip opening; and S5 adjusts the online predefined drip valve for the second time using valve channel release. The online predefined drip valve no longer has an opening constraint on the multi-port valve or can only reduce the full-flow supply opening of the multi-port valve. This method realizes the adjustment of the valve drip opening on the production line without valve disassembly or bypass.

[0016] In a preferred embodiment, the present invention can be further configured as follows: In step S5, when the adjustment opening of the drip online predefined valve is adjusted for the second time to be close to and less than the first online full-flow supply opening of the multi-valve structure, the second adjustment state of the drip online predefined valve provides the second online full-flow supply opening of the multi-valve structure, and the second online full-flow supply opening is less than the first online full-flow supply opening provided by the opening of the drip switching valve.

[0017] By employing the preferred technical features of the above method, and utilizing the adjustment opening of the drip online predefined valve in step S5, which is close to and smaller than the first online full-flow supply opening and the second online full-flow supply opening of the multi-valve structure, as the opening opening of the multi-valve, the first online full-flow supply opening of the multi-valve structure is corrected and replaced. Therefore, the drip online predefined valve not only has the function of online predefined drip opening, but also has the function of reducing and redefining the full-flow supply opening of the multi-valve.

[0018] In a preferred embodiment, the present invention can be further configured as follows: In step S5, when the adjustment opening of the online predefined drip valve is greater than the first online full-flow supply opening of the multi-valve structure, the first online full-flow supply opening and the third online drip opening of the multi-valve structure are provided online by the switching of the drip switching valve.

[0019] By employing the preferred technical features of the above method, and utilizing the fact that the adjustment opening of the drip online predefined valve in step S5 is greater than the first online full-flow supply opening of the multi-valve structure, the drip online predefined valve does not affect the switching between the first online full-flow supply opening and the third online drip opening of the multi-valve structure provided online by the drip switching valve during the switching process of the drip switching valve, thus enabling the drip online predefined valve to have better durability.

[0020] In a preferred embodiment, the present invention can be further configured such that, in step S4, the multi-valve structure is in a drip simulation change from a second online drip opening provided online by the opening of the online predefined drip valve to a third online drip opening provided online by the closing of the drip switching valve;

[0021] In step S3, when the drip switching valve is in the closed phase, the multi-valve structure is in a continuous drip adjustment process, ranging from a first online drip opening provided online by the closed position of the drip switching valve to a second online drip opening provided online by the opening position of the online predefined drip valve; or, the multi-valve structure is not affected by the first online full-flow supply opening provided online by the open position of the drip switching valve, and pre-adjusts the opening position of the online predefined drip valve to simulate the first online drip opening. After the drip switching valve switches to the open phase, the opening position of the online predefined drip valve is then adjusted to continuously adjust the drip rate to the second online drip opening.

[0022] By employing the preferred technical features of the above method, the second online drip opening provided online by the online predefined drip valve in step S4 is used as a reference for the predefined drip opening. Subsequently, the first online drip opening provided online by the closing of the drip switching valve is adjusted to the third online drip opening. Therefore, the adjustment of the online predefined drip valve can serve as a reference for the simulated drip change of the third online drip opening of the drip switching valve before adjustment. Digital information simulation is not required; the online drip opening is adjusted mechanically first and then simulated, resulting in zero or near-zero power consumption. The entire simulation adjustment process in step S4 involves the multi-valve being in the predefined drip state until the redefined drip stage of the simulation adjustment, without any sudden large flow rate.

[0023] By employing the preferred technical features of the above method, and utilizing the second online drip opening provided by the online predefined drip valve in step S3, the drip switching valve operates differently depending on whether it is greater than or less than the first online drip opening of the drip switching valve. When it is greater (the drip opening needs to be larger, i.e., the drip target value is greater than the actual drip value), the drip switching valve is in the open stage. When it is less than (the drip opening needs to be smaller, i.e., the drip target value is less than the actual drip value), the drip switching valve can be in the open stage or the closed stage. This means that if the adjustment is to decrease, the online drip opening can be adjusted downwards while maintaining the dripping stage of the multi-valve (the drip switching valve remains closed and does not switch). If the adjustment is to increase, a more complex operation is required. First, the opening of the online predefined drip valve is adjusted to be close to or less than the first online drip opening of the drip switching valve. Then, the drip switching valve is switched to the first online full-flow supply opening. Finally, the online predefined drip valve is adjusted to a second online drip opening that is larger than the first online drip opening. Therefore, regardless of whether the original first online drip opening is less than or greater than the second online drip opening to be simulated, and whether the adjustment opening of the online predefined drip valve decreases or increases, the entire adjustment process in step S3 is such that the multi-valve is in the original dripping stage until the simulated increase or decrease in dripping state, without any sudden large flow rate.

[0024] In a preferred embodiment, the present invention may be further configured such that, in step S4, a drip adjustment member disposed on the valve body of the drip switching valve is used to adjust the closing phase of the drip switching valve, the drip adjustment member having a thickness or a height position relative to the switching valve stem that can elevate the lower limit of the switching valve stem movement of the drip switching valve.

[0025] By employing the preferred technical features of the above method, and utilizing the drip adjustment element provided on the valve body of the drip switching valve, a drip adjustment element of suitable thickness is selected to change the online drip opening degree of the drip switching valve during the closing phase.

[0026] In a preferred embodiment, the present invention can be further configured as follows: in step S1, the drip online predefined valve has an adjusting cap; in step S4, the first adjustment opening of the drip online predefined valve corresponds to the adjustment scale of the adjusting cap, and the thickness of the drip adjustment member or the height position of the drip adjustment member relative to the switching valve stem is determined by the adjustment scale of the adjusting cap.

[0027] By employing the preferred technical features of the above method, the opening degree of the online predefined drip valve is adjusted by rotating the adjusting cap of the online predefined drip valve, thereby achieving continuous change in the opening degree adjustment. The adjustment scale of the adjusting cap can point to the adjustment opening degree. With reference indicators, the thickness dimension of the drip adjustment component or the height position of the drip adjustment component relative to the switching valve stem can be determined.

[0028] In a preferred embodiment, the present invention may be further configured such that the height difference between the height of the adjusting cap at the adjustment scale and the height of the valve body of the drip switching valve corresponds to the thickness of the drip adjustment member or the height position relative to the switching valve stem; preferably, when the adjustment opening of the drip online predefined valve is zero, the multi-valve structure is in a drip-closed state.

[0029] By employing the technical features of the aforementioned preferred method, and utilizing the horizontal height difference between the adjusting cap of the online drip predefined valve and the valve body height of the drip switching valve, a drip adjustment component of suitable thickness can be found more quickly. For example, at the first online drip opening, the upper surface of the original drip adjustment component and the upper surface of the adjusting cap simulating the first online drip opening have the same height on a common valve seat. The upper surface of the replacement drip adjustment component should also have the same height relative to the upper surface of the adjusting cap adjusted to the second online drip opening. Alternatively, at the first online drip opening, the upper surface of the original drip adjustment component detachably connected to the switching valve stem and the upper surface of the adjusting cap simulating the first online drip opening have the same height on a common valve seat. After adjusting the height position on the switching valve stem, the upper surface of the drip adjustment component should also have the same height relative to the upper surface of the adjusting cap adjusted to the second online drip opening during the closing phase of the drip switching valve. Therefore, both of these methods can easily determine the thickness of the drip adjustment component to be replaced or the height position to be adjusted relative to the switching valve stem.

[0030] In a preferred embodiment, the present invention can be further configured as follows: the drip switching valve is specifically a pneumatic flow switching valve, the drip online predefined valve is specifically a rotary flow regulating valve, the drip switching valve and the drip online predefined valve are applicable to valve chambers of the same size and contain valve diaphragms of the same size that can be shared, the drip switching valve is closer to the fluid input end, and the drip online predefined valve is closer to the fluid output end.

[0031] By employing the aforementioned preferred technical features, a pneumatic flow switching valve is used for online switching between full-flow and dripping modes, while a rotary flow control valve is used for online pre-definition of the target dripping opening. The valve diaphragms of both valves are universal, forming a commonality of internal key components for different functional valves on a shared valve seat. More preferably, the dripping switching valve is positioned closer to the fluid inlet, and the online dripping pre-definition valve is positioned closer to the fluid outlet. In this connection configuration, the dripping switching valve first withstands the external fluid pressure during full-flow supply, protecting the adjustment accuracy of the online dripping pre-definition valve. Even if dripping errors occur in the dripping mode of the dripping switching valve after prolonged use, or if the dripping mode of the dripping switching valve requires adaptation correction upon initial installation, the online dripping pre-definition valve can maintain the dripping opening pre-defined during the dripping process on the production line through adjustment, and then redefine the dripping opening of the dripping switching valve through adjustment.

[0032] The second main objective of this invention is achieved through the following technical solution:

[0033] A multi-valve structure for online adjustment of valve dripping degree is proposed, comprising:

[0034] It shares a valve seat and has a first valve chamber and a second valve chamber with flow channels connected in series.

[0035] A drip switching valve is installed on the first valve chamber of the common valve seat and is used to switch the full-flow supply mode and drip mode of the multi-valve structure online, so as to switch the first online full-flow supply opening and the first online drip opening of the multi-valve structure online.

[0036] A predefined online drip valve is installed on the second valve chamber of the shared valve seat to provide a second online drip opening of the multi-valve structure in drip mode in an adjustable manner. Based on the online simulation of the second online drip opening, the closing phase of the drip switching valve can be adjusted so that the drip switching valve can switch online between the first online full-flow supply opening and the third online drip opening of the multi-valve structure. The difference between the third online drip opening and the second online drip opening is less than the difference between the third online drip opening and the first online drip opening.

[0037] By adopting the basic technical features of the above structure, and utilizing the drip switching valve and the online predefined drip valve simultaneously installed on the common valve seat, the drip valve that can switch between high flow rate and dripping can be adjusted online to adjust its drip opening.

[0038] In a preferred structural example, the present invention can be further configured as follows:

[0039] The flow channel of the common valve seat includes an input flow channel section, an intermediate flow channel section and an output flow channel section. The outlet of the input flow channel section is aligned with the bottom of the first valve chamber, and the inlet of the output flow channel section is aligned with the bottom of the second valve chamber.

[0040] The drip switching valve is specifically a pneumatic flow switching valve, comprising a switching valve diaphragm capable of switching the flow mode in the first valve chamber, a switching valve stem connected to the switching valve diaphragm, a switching valve body for axial segmental movement of the switching valve stem, a switching elastic body for driving the switching valve stem downward, a blocking member attached to the switching valve stem for constraining the downward movement stop point of the switching valve stem, and a drip adjustment member disposed on the switching valve body; preferably, the switching valve body comprises a lower valve body and an upper valve body, the upper valve body having an inner stop portion relative to the lower valve body for constraining the upward movement stop point of the switching valve stem; more preferably, the switching drive of the switching valve stem... A straight guide rod is provided on the lower outer surface of the disc to increase the guiding support for the up-and-down movement of the switching drive disc; more specifically, the upper valve body is provided with an upper pneumatic hole, the lower valve body is provided with a lower pneumatic hole, and the switching drive disc connected to the switching valve rod moves in the parallel space of the height difference between the upper and lower pneumatic holes; the switching elastic body is disposed between the upper valve body and the drive disc; more specifically, the drip adjustment component is detachably connected to the switching valve rod, the drip adjustment component has a gasket ring structure, and the blocking component is disposed at the end of the switching valve rod away from the upper valve body; more specifically, the lower valve body also has a bottom vent hole;

[0041] The drip-online predefined valve is specifically a rotary valve for continuously regulating flow rate. It includes a regulating valve diaphragm capable of sealing the flow in the second valve chamber, a regulating valve stem connected to the diaphragm, a regulating valve body for continuous axial movement of the regulating valve stem, an adjusting elastic body for driving the regulating valve stem upwards, and an adjusting cap disposed on the regulating valve body to constrain the upward movement of the regulating valve body. The adjusting cap or its restraining portion is height-adjustable relative to the regulating valve body. Specifically, the adjusting cap is screwed to the regulating valve body, and the adjusting cap is in contact with the regulating valve stem. The regulating valve stem is further provided with an anti-disengagement structure relative to the regulating valve body; preferably, the regulating valve body is further provided with an inner valve ring, the regulating elastic body is disposed between the regulating drive disc of the regulating valve stem and the inner valve ring, and the inner valve ring cooperates with the common valve seat at the periphery of the second valve chamber to clamp the periphery of the regulating valve diaphragm; more preferably, the regulating valve body has an external vent hole, the inner valve ring has an internal vent hole, and the outer side of the inner valve ring and / or the inner side of the regulating valve body has a vent groove communicating with the external vent hole and the internal vent hole; the inner valve ring is in a rotatable airtight contact relationship with the regulating valve body. The individual effects and combinations of the preferred technical features of the above structure are further described in the specific embodiments.

[0042] In summary, the technical solutions of the present invention regarding methods or structures include at least one of the following technical effects that contribute to the prior art:

[0043] 1. In the new application field of valve switching between high flow rate opening and low flow rate dripping, the valve dripping opening adjustment on the production line is achieved without disassembling the valve or bypassing the multi-valve structure that can switch between high flow rate full-flow supply mode and dripping mode online, breaking the inherent thinking that valve closure must have anti-drip function.

[0044] 2. Specific products with multi-valve structures are used for large-flow water replenishment and small-flow dripping (ensuring water flow). For example, after manually setting the drip opening of the online predefined drip valve, it serves as an online adjustment reference for the drip opening of the drip switching valve. After releasing the opening constraint of the online predefined drip valve, subsequent rapid switching between full-flow large-flow mode and micro-flow dripping mode can be achieved simply by using the online predefined drip valve, such as a pneumatically operated one.

[0045] 3. The multi-valve structure meets the requirement of extremely high flow stability when switching between high-flow full-through and low-flow drip modes, while also meeting the requirement that the valve flow path design must not have dead zones. For example, in a specific application, it can ensure a stable low-flow drip effect of 270±10ml / min for a single-wafer cleaning tank in the front-end of a 12-inch wafer.

[0046] 4. Integrate multiple valve functions into one valve product to meet the compact space requirements of semiconductor front-end cleaning equipment. Attached Figure Description

[0047] Figure 1 A flowchart illustrating a method for adjusting the drip opening of an online valve according to some preferred embodiments of the present invention is shown.

[0048] Figure 2 A three-dimensional schematic diagram of the multi-valve structure provided in step S1 of a method according to some preferred embodiments of the present invention is shown.

[0049] Figure 3 An exploded disassembly diagram illustrating the multi-valve structure provided in step S1 of a method according to some preferred embodiments of the present invention is shown.

[0050] Figure 4 The diagram illustrates a cross-section along the flow path of the multi-valve structure provided in step S1 of a preferred embodiment of the present invention in a full-flow supply mode; (it may also correspond to step S2, where the opening of the online predefined drip valve is in the open state, and the opening of the drip switching valve is in the first online full-flow supply opening state).

[0051] Figure 5 A schematic diagram showing the drip switching valve cut in the vertical flow channel direction of the multi-valve structure provided in step S1 of some preferred embodiments of the present invention.

[0052] Figure 6 A schematic diagram illustrating the multi-valve structure provided in step S1 of some preferred embodiments of the present invention, showing a predefined online drip valve cut in the vertical flow channel direction;

[0053] Figure 7 The diagram illustrates a cross-section along the flow path of the multi-valve structure provided in step S2 of a method according to some preferred embodiments of the present invention in the dripping mode to be adjusted; (the opening degree of the online dripping predefined valve is in the open state, and the opening degree of the dripping switching valve is switched to the first online dripping opening degree).

[0054] Figure 8 The diagram illustrates a cross-section along the flow path of the multi-valve structure provided in step S3 of a preferred embodiment of the present invention, in a smaller drip mode to be adjusted and when the drip switching valve is in the closed phase; (the opening of the online drip predefined valve is adjusted to the second online drip opening, the opening of the drip switching valve is at the first online drip opening, and the second online drip opening is less than the first online drip opening).

[0055] Figure 9The diagram illustrates a multi-valve structure provided in step S4 of a preferred embodiment of the present invention, corresponding to the multi-valve structure provided in step S3, when adjusted to a smaller dripping mode and when the drip switching valve is in the closed phase, cut along the flow path direction; (the opening degree of the online drip predefined valve is at the second online dripping opening degree, the opening degree of the drip switching valve is adjusted to the third online dripping opening degree, and the third online dripping opening degree is close to or equal to the second online dripping opening degree).

[0056] Figure 10 The diagram illustrates a cross-section along the flow path of the multi-valve structure provided in step S5 of a preferred embodiment of the present invention when the drip switching valve is in the closed phase; (the opening of the online predefined drip valve is adjusted to the second online full-flow supply opening, and the opening of the drip switching valve is at the third online drip opening).

[0057] Figure 11 The diagram illustrates a cross-section along the flow path of the multi-valve structure provided in step S3 of another preferred embodiment of the present invention, when a larger dripping mode is to be adjusted and the drip switching valve is in the closed phase; (before the opening of the online drip predefined valve is adjusted to the second online dripping opening and the opening of the drip switching valve is switched to the first online full-flow supply opening, the second online dripping opening is greater than the first online dripping opening)

[0058] Figure 12 The diagram illustrates a cross-section along the flow path of the multi-valve structure provided in step S4 of another preferred embodiment of the present invention, when a larger dripping mode is adjusted and the drip switching valve is in the closed phase; (the opening of the online predefined drip valve is at the second online dripping opening, the opening of the drip switching valve is adjusted to the third online dripping opening, and the third online dripping opening is close to or equal to the second online dripping opening).

[0059] Figure 13 A cross-sectional schematic diagram illustrating the combination of the switching valve stem and the switching valve body of the drip switching valve in a multi-valve structure of some other preferred embodiments of the present invention is shown.

[0060] Figure 14 A perspective view illustrating the interaction between the switching valve stem and the lower valve body of the switching valve body in a multi-valve structure according to some preferred embodiments of the present invention.

[0061] Reference numerals: 10. Common valve seat; 11. First valve chamber; 12. Second valve chamber; 13. Fluid inlet; 14. Fluid outlet; 15. Inlet flow channel section; 16. Intermediate flow channel section; 17. Outlet flow channel section; 18. Inlet sleeve; 19. Outlet sleeve; 20. Drip switching valve; 20A. First online full-flow supply opening; 20B. First online drip opening; 20C. Third online drip opening; 21. Drip adjustment element; 22. Switching valve stem; 22A. Switching drive disc; 22B. Guide rod; 23. Switching valve diaphragm; 24. Switching valve body; 241. Lower valve body ; 241A, Lower pneumatic port; 241B, Bottom vent; 242, Upper valve body; 242A, Upper pneumatic port; 242B, Inner stop; 25, Switching elastic body; 26, Blocking element; 30, Drip online predefined valve; 30A, Second online drip opening; 30B, Second online full-flow supply opening; 31, Adjusting cap; 32, Adjusting valve stem; 32A, Anti-detachment structure; 32B, Adjusting drive disc; 33, Adjusting valve diaphragm; 34, Adjusting valve body; 34A, External vent; 35, Adjusting elastic body; 36, Inner valve ring; 36A, Internal vent; 36B, Vent groove. Detailed Implementation

[0062] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments for understanding the inventive concept of the present invention, and cannot represent all embodiments, nor are they interpreted as the only embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art under the premise of understanding the inventive concept of the present invention are within the scope of protection of the present invention.

[0063] It should be noted that if directional indicators (such as up, down, left, right, front, back, etc.) are involved in the embodiments of the present invention, these directional indicators are only used to explain the relative positional relationships and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly. To better understand the technical solution of the present invention, the method for adjusting the drip opening of the online valve and the structure of the multi-valve of the present invention will be described and explained in further detail below, but this is not intended to limit the scope of protection of the present invention.

[0064] The opening adjustment and opening regulation mentioned in the article are different technical concepts. Opening adjustment refers to the ability to withstand segmented switching between valve opening and closing stages, while opening regulation refers to the continuous change from a non-segmented opening state to a continuous state, and opening switching refers to segmented and rapid switching between stages. The valve flow condition corresponding to "switching" is "stage," mainly referring to drip switching valves. The means of changing the opening degree of a certain stage is called "adjustment." That is, the "stage" and the "stage" are segmented forms from one section to another. The opening and closing operation is called "switching," and the correction and modification operation is called "adjustment." For example, the adjustment of the drip switching valve from the first online drip opening to the third online drip opening is called "adjustment." The segmented change operation during production is called "switching." For example, usually, the time required for "switching" is shorter than the time required for "adjustment" and "regulation." For example, the time required for the online switching valve from the first or third online drip opening to the online full-flow supply opening or the reverse online switching is short. The valve flow condition corresponding to "regulation" is "state," mainly referring to drip online predefined valves. The "state" and the "state" are continuous changes without segmentation. The operation is usually called "regulation." For example, the "regulation" of adjusting the drip online predefined valve to the second online drip opening.

[0065] See Figure 1 This application first provides a method for online adjustment of valve dripping opening, comprising the following steps in sequence: Step S1, providing a multi-valve structure, including a common valve seat, a drip switching valve and a dripping online predefined valve disposed on the common valve seat; Step S2, using the opening and closing of the drip switching valve to realize online switching between the full-flow supply mode and the dripping mode of the multi-valve structure; Step S3, first adjusting the dripping online predefined valve to redefine the second online dripping opening of the multi-valve structure; Step S4, adjusting the closing stage of the drip switching valve based on the second online dripping opening; Step S5, second adjusting the adjustment opening of the dripping online predefined valve. Under this method, the switchable dripping opening of the multi-valve structure is adjusted during the dripping process on the production line.

[0066] In some preferred embodiments of this application, Figures 2 to 6 This diagram illustrates the multi-valve structure provided in step S1 of a method for adjusting the drip opening of an online valve. Based on the specification, the accompanying drawings represent common parts of multiple embodiments, as well as unique parts of individual embodiments. Differences or distinctions between different embodiments are described in text or presented in comparison with the drawings. Therefore, based on industry characteristics and the nature of the technology, those skilled in the art should correctly and reasonably understand and judge whether the individual technical features described below, or any combination thereof, can characterize the same embodiment, or whether multiple mutually exclusive technical features can only characterize different variations of the embodiment.

[0067] like Figures 2 to 6 As shown, some embodiments of the present invention provide a multi-valve structure for realizing online adjustment of valve dripping opening in step S1. Figure 2 Draw a three-dimensional schematic diagram of the multi-valve structure; Figure 3 Draw an exploded disassembly diagram of a multi-valve structure; Figure 4 A schematic diagram showing the structure of a multi-valve in full-flow supply mode, cut along the flow path. Figure 5 A schematic diagram showing the structure of a multi-valve system with a drip switching valve cut across the vertical flow path; Figure 6 A schematic diagram of a multi-valve structure with a predefined drip valve cut along the vertical flow path is shown. Step S1 integrates the drip switching valve 20, which switches between high-flow-rate full-flow supply and low-flow-rate dripping, with the predefined drip valve 30 on the same valve seat 10, forming a unified multi-valve structure. A specific example of this multi-valve structure mainly includes: a shared valve seat 10, a drip switching valve 20, and a predefined drip valve 30.

[0068] See Figures 2 to 6 The common valve seat 10 shown has a first valve chamber 11 and a second valve chamber 12 with flow channels connected in series; as shown Figure 3 Comparison Figure 2 and Figure 4 As shown, the example uses individual base plates below the common valve seat 10, which are connected to the valve bodies of the corresponding drip switching valve 20 and drip online predefined valve 30 via a connecting rod passing through them from top to bottom, so as to fix the drip switching valve 20 and the drip online predefined valve 30 on the same common valve seat 10 respectively; however, it is not limited to using other conventional valve body and valve seat connection methods.

[0069] See Figures 2 to 5 The drip switching valve 20 shown is disposed on the first valve chamber 11 of the common valve seat 10, and is used to switch the full-flow supply mode and drip mode of the multi-valve structure online, so as to switch the first online full-flow supply opening 20A and the first online drip opening 20B of the multi-valve structure online (as shown respectively). Figure 4 and Figure 7 (as shown); where the first online drip opening 20B specifically refers to the drip opening to be adjusted of the multi-port valve, which is usually the specific drip opening when the multi-port valve is actually used online.

[0070] See Figures 2 to 4 and Figure 6 The drip-predefined online valve 30 shown is disposed on the second valve chamber 12 of the common valve seat 10, and provides the second online drip opening 30A of the multi-valve structure in drip mode in an adjustable manner (e.g., Figure 8As shown); based on the online simulation of the second online drip opening 30A, the closing phase of the drip switching valve 20 can be adjusted, so that the drip switching valve 20 can switch online between the first online full-flow supply opening 20A and the third online drip opening 20C of the multi-valve structure (the third online drip opening 20C is shown in...). Figure 9 As shown in the figure, the difference between the third online drip opening 20C and the second online drip opening 30A is less than the difference between the third online drip opening 20C and the first online drip opening 20B. Specifically, the second online drip opening 30A is the predefined online drip opening of the multi-port valve, serving as the target drip opening for actual online use. The third online drip opening 20C refers to the redefined drip opening after adjustment of the multi-port valve, typically a newly corrected drip opening during actual online use. The third online drip opening 20C can only be adjusted and set based on the adjustment that occurs during the process of adjusting the second online drip opening 30A.

[0071] By adopting the basic technical characteristics of the above structure, see [reference] Figure 4 and Figure 7 Utilizing both the drip switching valve 20 and the drip online predefined valve 30 simultaneously installed on the common valve seat 10, fluid enters the flow channel of the common valve seat 10 from the fluid input end 13, specifically the input flow channel section 15. Preferably, the fluid first passes through the first valve chamber 11 below the drip switching valve 20, through the intermediate flow channel section 16, then through the second valve chamber 12 of the drip online predefined valve 30, through the output flow channel section 17, and finally exits from the fluid output end 14. In the full-flow supply mode of the drip switching valve 20, the fluid... For large flow channel supply, the fluid in the drip switching valve 20 is supplied in a micro-flow drip mode. During the drip process, the drip opening of the multi-valve first switches to the first online drip opening 20B, then changes to the second online drip opening 30A, and finally changes to the third online drip opening 20C. After that, it can directly switch to the third online drip opening 20C again, realizing the ability to switch between large flow and drip online adjustment of the drip valve's drip opening.

[0072] For an example of a better structure, see Figures 4 to 7 The flow channel of the common valve seat 10 includes an input flow channel section 15, an intermediate flow channel section 16, and an output flow channel section 17. The outlet of the input flow channel section 15 is aligned with the bottom of the first valve chamber 11, and the inlet of the output flow channel section 17 is aligned with the bottom of the second valve chamber 12. The intermediate flow channel section 16 connects the first valve chamber 11 and the second valve chamber 12. Therefore, by Figure 4 and Figure 7It is evident that the inflow and outflow pressures of the fluid, under abnormal changes, are aligned with the axial movement directions of the corresponding valve stems of the drip switching valve 20 and the online drip predefined valve 30, respectively. The fluid pressure changes generated between switching from high-flow to drip initiation do not directly affect the soft diaphragm portion of the switching valve diaphragm 23 of the drip switching valve 20 and the regulating valve diaphragm 33 of the online drip predefined valve 30. The switching valve stem 22 of the drip switching valve 20 and the regulating valve stem 32 of the online drip predefined valve 30 are less susceptible to eccentric forces caused by fluid pressure changes, thus accurately controlling the drip opening of the multi-valve. During the use of the multi-port valve, the external pipeline supplying fluid is fixed to the fluid input end 13 of the common valve seat 10 by rotating the input sleeve 18 to tighten the fluid input end 13, and the supply pipeline connected to the machine is fixed to the fluid output end 14 of the common valve seat 10 by rotating the output sleeve 19 to tighten the fluid output end 14. The common valve seat 10 provides the basis for the adjustment of the drip switching valve 20 to the drip online predefined valve 30.

[0073] See Figures 2 to 5 The drip switching valve 20 is specifically a pneumatic flow switching valve, including a switching valve diaphragm 23 capable of switching the flow mode within the first valve chamber 11, a switching valve stem 22 connected to the switching valve diaphragm 23, a switching valve body 24 for axial segmental movement of the switching valve stem 22, a switching elastic body 25 for driving the switching valve stem 22 downward, a blocking member 26 attached to the switching valve stem 22 for constraining the downward stop point of the switching valve stem 22, and a drip adjustment member 21 disposed on the switching valve body 24. The switching valve diaphragm 23, during its rising and falling phases at its center, respectively represents the first online full-flow supply opening 20A and the first online drip opening 20B of the drip switching valve 20 (e.g., ...). Figure 4 and Figure 7 As shown), after adjustment, it can be represented as the first online full-flow supply opening 20A and the third online drip opening 20C (as shown). Figure 4 and Figure 10 As shown), these correspond to the full-flow supply mode and the adjusted drip mode of the multi-valve structure, respectively. The third online drip opening 20C is different from the first online drip opening 20B, and can be greater or less. During the switching operation of the drip switching valve 20, the lowest position of the center part of the switching valve diaphragm 23 should be controlled so as not to close the opening of the input flow channel section 15 at the bottom of the first valve chamber 11, but to be close enough to form a drip mode, so that a small amount of flow is maintained between the input flow channel section 15 and the intermediate flow channel section 16.

[0074] In a preferred embodiment, the switching valve body 24 includes a lower valve body 241 and an upper valve body 242, wherein the upper valve body 242 has an inner stop portion 242B relative to the lower valve body 241 (specifically as shown in the figure). Figure 5 and Figure 13 As shown), it is used to constrain the upward movement stop point of the switching valve stem 22. The switching drive disc 22A of the switching valve stem 22 will not move upward under the obstruction of the inner stop part 242B. When the upper edge of the switching drive disc 22A connected to the switching valve stem 22 contacts the inner stop part 242B, the center part of the switching valve diaphragm 23 is located at a relatively high position in the first valve chamber 11, indicating that the drip switching valve 20 is at the first online full-flow supply opening 20A (as shown). Figure 4 (As shown).

[0075] In a more specific example, the upper valve body 242 is provided with an upper pneumatic port 242A, the lower valve body 241 is provided with a lower pneumatic port 241A, and the switching valve stem 22 is connected to a switching drive disc 22A (specifically as shown in the example). Figure 3 , Figure 5 , Figure 13 and Figure 14 As shown, Figure 4 and Figures 7-10 The corresponding part moves in the parallel space between the upper pneumatic hole 242A and the lower pneumatic hole 241A, which is at a height difference; the switching elastic body 25 is disposed between the upper valve body 242 and the switching drive disk 22A. When the gas pressure (or the lower cavity fluid pressure) introduced by the lower pneumatic hole 241A is greater than the gas pressure (or the upper cavity fluid pressure) introduced by the lower pneumatic hole 241A, plus the downward pressing force of the switching elastic body 25 on the switching drive disk 22A and the gravity of the related components, the switching valve rod 22 moves upward to the upper stop point, specifically, the upper edge of the switching drive disk 22A contacts the inner stop part 242B of the upper valve body 242. When the gas pressure (or the fluid pressure in the lower chamber) introduced by the lower pneumatic port 241A is less than the gas pressure (or the fluid pressure in the upper chamber) introduced by the lower pneumatic port 241A, plus the downward pressure of the switching elastomer 25 applied to the switching drive disk 22A and the gravity of the related components, the lower surface of the drip adjustment member 21 contacts the top of the switching valve body 24 by utilizing the connection position of the drip adjustment member 21 relative to the switching valve stem 22; or, by utilizing the thickness of the drip adjustment member 21, the blocking member 26 located at the upper end of the switching valve stem 22 contacts the upper surface of the drip adjustment member 21. Both of these depend on whether the middle hole of the drip adjustment member 21 is an internal threaded hole screwed to the switching valve stem 22 (or limited and fixed) or a through hole through which the switching valve stem 22 passes and moves. When the switching valve stem 22 moves downward to the lower stop point, the center of the switching valve diaphragm 23 is located at a relatively low position in the first valve chamber 11, indicating that the drip switching valve 20 is at the first online drip opening 20B or the third online drip opening 20B (e.g., Figure 7 and Figure 10(As shown). The closing phase of the drip switching valve 20 will not cause the outlet of the input flow channel section 15 at the bottom of the first valve chamber 11 to be completely blocked by the central part of the switching valve diaphragm 23.

[0076] In a more specific example, the drip adjustment component 21 is detachably connected to the switching valve stem 22, the drip adjustment component 21 has a gasket ring structure, and the blocking component 26 is disposed at the end of the switching valve stem 22 away from the upper valve body 242; more specifically, the lower valve body 241 also has a bottom vent hole 241B (specifically as shown in the example). Figure 13 As shown, in Figure 4 , Figures 7-10 The corresponding hole structure faces the bottom of the online predefined drip valve 30. The "detachable connection" means that the drip adjustment component 21 can be disassembled from the switching valve stem 22. Before disassembly, the blocking component 26 should be removed first. The "detachable connection" means that the connection between the drip adjustment component 21 and the switching valve stem 22 is screwed, fixed by a limit, or in a sliding contact. When the screwed detachable connection is selected, the drip adjustment component 21 can be adjusted by rotation while the switching valve stem 22 is not rotated. This can change the relative height position of the drip adjustment component 21 on the stem of the switching valve stem 22. When the downward stop point is reached in the closing phase, the relative height position of the center part of the switching valve diaphragm 23 in the first valve chamber 11 will change, thereby changing the online drip opening degree of the drip switching valve 20 in the closing phase. The bottom vent 241B connects to the fluid-free side of the soft membrane portion of the switching valve diaphragm 23 in the lower valve body 21, facilitating the raising and lowering of the central portion of the switching valve diaphragm 23. There is no gas communication between the bottom vent 241B and the lower pneumatic port 241A. The drip switching valve 20 and the drip online predefined valve 30 may be equipped with elastic sealing rings as shown in the attached diagram, which will not be described in detail here.

[0077] See Figures 2 to 4 and Figure 6The drip online predefined valve 30 is specifically a rotary valve for continuously adjusting flow rate. It includes a regulating valve diaphragm 33 that can seal the flow rate within the second valve chamber 12, a regulating valve stem 32 connected to the regulating valve diaphragm 33, a regulating valve body 34 for continuous axial movement of the regulating valve stem 32, an regulating elastic body 35 for driving the regulating valve stem 32 upwards, and an adjusting cap 31 disposed on the regulating valve body 34 to constrain the upward movement of the regulating valve body 34. The adjusting cap 31 or its restraining portion is height-adjustable relative to the regulating valve body 34. The restraining portion can be specifically, but not limited to, located at the center point of the shaft hole of the adjusting cap 31, or it can be any other part of the adjusting cap 31 that can constrain and stop the upward movement of the regulating valve body 34, such as a collar with a diameter smaller than the diameter of the regulating valve body 34, a support rod assembly, or a central protrusion. The adjusting cap 31 can be rotated to change the height of the adjusting valve stem 32, for example, manually, electrically, or through mechanical gears. Under the elastic force of the adjusting elastomer 35, the upper end of the adjusting valve stem 32 remains in contact with the stop portion of the adjusting cap 31, thus the rotation of the adjusting cap 31 can change the height position of the adjusting valve stem 32. Based on the change in the height position of the adjusting valve stem 32, the height of the adjusting valve diaphragm 33 in the second valve chamber 12 also changes accordingly; specifically, the center portion of the adjusting valve diaphragm 33 can close the opening of the output flow channel section 17 at the bottom of the second valve chamber 12. When the multi-port valve is not in use, the output flow channel section 17 and the intermediate flow channel section 16 can be blocked by the adjusting valve diaphragm 33. When the multi-port valve is in use, the output flow channel section 17 and the intermediate flow channel section 16 remain open, and the drip online predefined valve 30 does not affect the switching between the full supply mode and the drip mode of the drip switching valve 20 under on / off operation.

[0078] In a specific example, the adjusting cap 31 and the adjusting valve body 34 are screwed together, and the adjusting cap 31 and the adjusting valve rod 32 are in contact. The adjusting valve rod 32 is also provided with an anti-detachment structure 32A relative to the adjusting valve body 34. The anti-detachment structure 32A has the dual function of guiding the adjusting valve rod 32 to prevent it from self-rotating and from being dislodged from the adjusting valve body 34. Specifically, the anti-detachment structure 32A is a crossbar attached to the body of the adjusting valve rod 32 (see reference). Figure 3 , Figure 4 and Figure 6 The regulating valve body 34 is provided with a corresponding guide groove.

[0079] In a preferred embodiment, an inner valve ring 36 is also provided inside the regulating valve body 34 (see reference). Figure 4 and Figure 6The adjusting elastomer 35 is disposed between the adjusting drive disk 32B of the adjusting valve stem 32 and the inner valve ring 36. The inner valve ring 36 cooperates with the common valve seat 10 at the periphery of the second valve chamber 12 to clamp the periphery of the adjusting valve diaphragm 33. The adjusting elastomer 35 provides a downward pressing force to the inner valve ring 36 and an upward pressing force to the adjusting drive disk 32B and the adjusting valve stem 32 connected thereto. The upward pressing force on the adjusting valve stem 32 is further suppressed by the adjusting cap 31. Therefore, the more the adjusting cap 31 drives the adjusting valve stem 32 and the adjusting valve diaphragm 33 fixed at its lower end to move downward, the greater the compression force of the adjusting elastomer 35, and the greater the clamping pressure of the inner valve ring 36 on the periphery of the adjusting valve diaphragm 33. Correspondingly, the adjusting opening of the drip online predefined valve 30 becomes smaller, and the elastic force of the inner valve ring 36 increases to resist the fluid pressure of the smaller adjusting opening.

[0080] In a more preferred embodiment, the regulating valve body 34 has an external vent 34A, and the inner valve ring 36 has an internal vent 36A. A vent groove 36B, connecting the external vent 34A and the internal vent 36A, is formed on the outer side of the inner valve ring 36 and / or the inner side of the regulating valve body 34. The inner valve ring 36 is in a rotatable, airtight contact with the regulating valve body 34. In this embodiment, due to the convenience of better edge forming than inner edge forming, the vent groove 36B can be located on the outer side of the inner valve ring 36. The width of the vent groove 36B can be slightly larger than the diameter of the external vent 34A. Even with changes in the height of the inner valve ring 36 relative to the regulating valve body 34, gas still flows between the external vent 34A and the internal vent 36A, flowing to the second valve chamber 12 where the regulating valve diaphragm 33 separates the space without fluid. This facilitates the adjustment of the central portion of the regulating valve diaphragm 33.

[0081] Please refer to the following: Figure 4 and Figure 7 In step S2 of the method for adjusting the dripping opening of the online valve, when the online predefined dripping valve 30 is in the open state, the online switching between the full-flow supply mode and the dripping mode of the multi-valve structure is achieved by opening and closing the dripping switching valve 20. The closing phase of the dripping switching valve 20 provides the first online dripping opening 20B of the multi-valve structure, and the opening phase of the dripping switching valve 20 provides the first online full-flow supply opening 20A of the multi-valve structure. The purpose of step S2 is to confirm that the multi-valve can normally switch between online high-flow opening and low-flow dripping modes after installation. Initially after installation or after a period of use, the first online dripping opening 20B is the actual online dripping opening, but it may differ from the target online dripping opening.

[0082] Please see Figure 7 and Figure 8 In step S3 of the method for adjusting the drip opening of the online valve, during the opening or closing phase of the drip switching valve 20 (the example in the figure is the closing phase), the drip online predefined valve 30 is adjusted for the first time. The second online drip opening 30A of the multi-valve structure is redefined online by the opening of the drip online predefined valve 30. That is, the target online drip opening is found first by adjusting the drip online predefined valve 30. In some embodiments, when the drip switching valve 20 is in the closing phase, the drip switching valve 20 is at the first online drip opening 20B, and the second online drip opening 30A of the drip online predefined valve 30 is less than the first online drip opening 20B. Alternatively, in other embodiments, when the drip switching valve 20 is in the opening phase, the second online drip opening 30A is greater than or less than the first online drip opening 20B, and the overall drip opening of the multi-valve is determined by the second online drip opening 30A of the drip online predefined valve 30. Step S3 is to predefine the target online drip opening that can be simulated in the online drip predefined valve 30.

[0083] Please see Figure 8 and Figure 9 In step S4 of the method for adjusting the drip opening of the online valve, when the first adjustment opening of the online predefined drip valve 30 is in the state of the second online drip opening 30A, the closing phase of the drip switching valve 20 is adjusted. The closed phase of the drip switching valve 20 after adjustment has a third online drip opening 20C. The difference between the third online drip opening 20C and the second online drip opening 30A is less than the difference between the third online drip opening 20C and the first online drip opening 20B. The function of step S4 is to redefine the target online drip opening that can be switched on and off in the drip switching valve 20 based on the target online drip opening simulated online by the online predefined drip valve 30.

[0084] Please see Figure 9 and Figure 10In step S5 of the method for adjusting the drip opening of the online valve, the adjustment opening of the online predefined drip valve 30 is adjusted for the second time, so that it is close to or greater than the first online full-flow supply opening 20A of the multi-valve structure; the closing phase of the drip switching valve 20 provides the third online drip opening 20C of the multi-valve structure, and the opening phase of the drip switching valve 20 provides the first online full-flow supply opening 20A of the multi-valve structure. The function of step S5 is to release the target online drip opening simulated online by the online predefined drip valve 30, and the online drip opening provided by the online switching valve 20 in the closing phase can meet the target online drip opening. Step S5 also has another function: the online predefined drip valve 30 releases the control of the online valve drip opening, and the online valve drip opening is controlled by the closing stage of the drip switching valve 20. The change in the drip micro-flow rate from step S4 to step S5 is too large to determine whether the adjustment of the drip switching valve 20 in step S4 is unqualified or needs to be readjusted.

[0085] The implementation principle of this method embodiment is as follows: S2 uses online switching between the full-flow supply mode and the dripping mode of the drip switching valve 20; S3 adjusts the dripping online predefined valve 30 for the first time by means of valve channel constraint, and predefines the dripping opening online; S4 redefines the dripping opening of the drip switching valve 20 online based on the comparison of the online predefined dripping opening; S5 adjusts the dripping online predefined valve 30 for the second time by means of valve channel release. The dripping online predefined valve 30 no longer has an opening constraint on the multi-port valve or can only reduce the full-flow supply opening of the multi-port valve. This method realizes the adjustment of the valve dripping opening on the production line without disassembling the valve or bypassing it.

[0086] In a preferred example, in step S5, refer to Figure 9 and Figure 10 When the adjustment opening of the drip online predefined valve 30 is adjusted for the second time to be close to and less than the first online full-flow supply opening 20A of the multi-valve structure, the second adjustment state of the drip online predefined valve 30 provides the second online full-flow supply opening 30B of the multi-valve structure (specifically, see...). Figure 10 In a preferred example, the second online full-flow supply opening 30B can be smaller than the first online full-flow supply opening 20A provided by the opening phase of the drip switching valve 20 (see specifically in...). Figure 4By utilizing the adjustment opening of the drip online predefined valve 30 described in step S5, which is close to and smaller than the first online full-flow supply opening 20A of the multi-valve structure, and using the second online full-flow supply opening 30B as the opening opening of the multi-valve, the first online full-flow supply opening 20A of the multi-valve structure is corrected and replaced. Therefore, the drip online predefined valve 30 not only has the function of online predefined drip opening, but also has the function of reducing and redefining the full-flow supply opening of the multi-valve.

[0087] In another preferred embodiment, in step S5, when the adjustment opening of the online predefined drip valve 30 is adjusted to be greater than the first online full-flow supply opening 20A of the multi-valve structure, the switching of the drip switching valve 20 provides the first online full-flow supply opening 20A and the third online drip opening 20C of the multi-valve structure online, respectively. By using the adjustment opening of the online predefined drip valve 30 to be greater than the first online full-flow supply opening 20A of the multi-valve structure in step S5, the switching process of the drip switching valve 20 does not affect the switching of the first online full-flow supply opening 20A and the third online drip opening 20C of the multi-valve structure online, thus improving the durability of the online predefined drip valve 30.

[0088] In a preferred example, in step S4, refer to Figure 8 and Figure 9 The multi-valve structure is in a state of simulated dripping change from the second online dripping opening 30A provided online by the opening of the online predefined dripping valve 30 to the third online dripping opening 20C provided online by the closing of the drip switching valve 20. Using the second online dripping opening 30A provided online by the opening of the online predefined dripping valve 30 in step S4 as a reference for the predefined dripping opening, the first online dripping opening 20B provided online by the closing of the drip switching valve 20 is then adjusted to the third online dripping opening 20C. Therefore, the adjustment of the online predefined dripping valve 30 can serve as a reference for the simulated dripping change of the third online dripping opening 20C of the drip switching valve 20 before adjustment. No digital information simulation is required; the online dripping opening is adjusted first and then simulated using a purely mechanical method, resulting in zero or near-zero power consumption. The entire simulation adjustment process in step S4 involves the multi-valve being in a predefined dripping state until the redefined dripping stage of the simulation adjustment, without any sudden large flow rate.

[0089] See Figure 8In some embodiments, in step S3, when the drip switching valve 20 is in the closed phase, the multi-valve structure continuously adjusts its drip rate from a first online drip opening 20B provided online by the closure of the drip switching valve 20 to a second online drip opening 30A provided online by the opening of the online predefined drip valve 30. Therefore, in step S3, the online drip opening is adjusted from large to small, and the multi-valve structure is always in an online drip supply state.

[0090] Or, see Figure 11 In other embodiments, in step S3, the multi-valve structure is not affected by the first online full-flow supply opening 20A provided online by the drip switching valve 20; in the pre-operation of step S3, the opening of the online predefined drip valve 30 is pre-adjusted to simulate the first online drip opening 20B online, and then in step S3, the drip switching valve 20 is switched to the open stage, and the opening of the online predefined drip valve 30 is adjusted to continuously adjust and change the drip from small to large to the second online drip opening 30A. As can be seen from the attached figures, Figure 11 The second online drip opening of 30A is greater than the first online drip opening of 20B (e.g.) Figure 11 As shown in the diagram above, it is for illustrative purposes only. In actual operation, when the opening of the online predefined drip valve 30 is adjusted to the second online drip opening 30A, the opening of the drip switching valve 20 is first switched to the first online full-flow supply opening 20A (not shown in the diagram). In this way, the second online drip opening 30A of the online predefined drip valve 30 can serve as the online drip opening of the multi-port valve, without being affected by the smaller first online drip opening 20B of the drip switching valve 20. See also Figure 12 In other embodiments, in step S4, the opening degree of the online drip predefined valve 30 is at the second online drip opening degree 30A, and the opening degree of the drip switching valve 20 is adjusted to the third online drip opening degree 20C, which is close to or equal to the second online drip opening degree 30A.

[0091] Therefore, based on whether the second online drip opening 30A, adjusted by the online predefined drip valve 30 in step S3, is greater than or less than the first online drip opening 20B of the drip switching valve 20, the drip switching valve 20 operates differently. When it is greater than (the drip opening needs to be larger, i.e., the target drip value is greater than the actual drip value), the drip switching valve 20 is in the open stage. Before opening, the online predefined drip valve 30 pre-simulates and adjusts the first online drip opening 20B of the drip switching valve 20. When it is less than (the drip opening needs to be smaller, i.e., the target drip value is less than the actual drip value), the online predefined drip valve 30 adjusts... The drip switching valve 20 can be in an open or closed state. This means that if the adjustment is to be reduced, the online drip opening can be adjusted downwards while maintaining the dripping state of the multi-valve (the drip switching valve 20 remains closed and does not switch). If the adjustment is to be increased, a more complex operation is required. First, the opening of the online predefined drip valve 30 is adjusted to be close to or less than the first online drip opening 20B of the drip switching valve 20. Then, the drip switching valve 20 is switched to the first online full-flow supply opening 20A. Finally, the online predefined drip valve 30 is adjusted to a second online drip opening 30A, which is larger than the first online drip opening 20B. The entire operation of step S3 takes place during the dripping state of the multi-valve. Therefore, regardless of whether the simulated second online dripping opening 30A is less than or greater than the original first online dripping opening 20B, or whether the adjustment opening of the online dripping predefined valve 30 decreases or increases, the entire adjustment process in step S3 is such that, from the original dripping stage controlled by the dripping switching valve 20 to the simulated decreasing or increasing dripping state controlled by the online dripping predefined valve 30, no sudden large flow occurs.

[0092] In a preferred example, in step S4, the comparison... Figure 9 or Figure 12 The drip adjustment member 21, which is provided on the valve body of the drip switching valve 20, is used to adjust the closing phase of the drip switching valve 20. The drip adjustment member 21 has a thickness or height position relative to the switching valve stem 22 that can raise the lower limit of the movement of the switching valve stem 22 of the drip switching valve 20. By using the drip adjustment member 21 provided on the valve body of the drip switching valve 20 and selecting a drip adjustment member 21 of suitable thickness, the online drip opening of the drip switching valve 20 in the closing phase is changed. In this embodiment, the drip adjustment member 21 is screwed to the switching valve stem 22. By changing the relative height position of the drip adjustment member 21 with respect to the switching valve stem 22, the gap between the switching valve diaphragm 23 and the outlet of the input flow channel section 15 can be changed, thereby changing the first online drip opening 20B to the third online drip opening 20C (for comparison). Figure 7 and Figure 10(State of the drip switching valve 20 on the right). As for whether the aforementioned changes are useful, it can be confirmed by checking whether there is a significant change in the online drip flow rate by releasing the second online drip opening 30A of the online predefined drip valve 30 in step S5. If there is no significant change, it indicates that the third online drip opening 20C during the closed phase of the drip switching valve 20 is effectively adjusted.

[0093] For a better example, see [link / reference]. Figure 2 , Figure 4 and Figure 6 Returning to step S1, the online predefined drip valve 30 has an adjusting cap 31. In step S4, the first adjustment opening of the online predefined drip valve 30 corresponds to the adjustment scale of the adjusting cap 31. The thickness of the drip adjustment component 21 or the height position of the drip adjustment component 21 relative to the switching valve stem 22 is determined by the adjustment scale of the adjusting cap 31. The connection between the drip adjustment component 21 and the switching valve stem 22 can be a screw connection, a through-hole sleeve connection, or a through-hole sleeve connection fixed to a limiting plate. The opening of the online predefined drip valve 30 is adjusted by rotating the adjusting cap 31, achieving continuous change in opening adjustment. The adjustment scale of the adjusting cap 31 can point to the adjustment opening. With a reference indicator, the thickness of the drip adjustment component 21 or the height position of the drip adjustment component 21 relative to the switching valve stem 22 can be determined.

[0094] Regarding the first scheme for adjusting the third online drip opening 20C by the height position of the drip adjustment component 21 relative to the switching valve stem 22, in the example drawing, the drip adjustment component 21 has a screw hole screwed into the switching valve stem 22 (specifically as shown in the figure). Figure 8 and Figure 9 As shown, rotating the drip adjustment component 21 changes its relative height position on the switching valve stem 22, thus adjusting the lower stop point of the switching valve stem 22. At this time, the lower surface of the drip adjustment component 21 abuts against the top of the switching valve body 24, maintaining a small drip flow rate without closing the flow channel during the closing phase of the drip switching valve 20. The blocking component 26 or other limiting plate components can be further locked in to restrict the rotational movement of the drip adjustment component 21. Therefore, this solution has the effect of quickly adjusting the third online drip opening degree 20C.

[0095] Regarding the second scheme of adjusting the third online drip opening 20C by changing the thickness of the drip adjustment component 21, in the variation example, the drip adjustment component 21 has a through hole for the switching valve stem 22 to pass through (specifically as follows). Figure 11 and Figure 12As shown, the drip adjustment component 21 does not move with the opening and closing of the switching valve stem 22. The drip adjustment component 21 remains at the top of the switching valve body 24. By changing the thickness of the drip adjustment component 21, the lower stop point of the switching valve stem 22 is adjusted. At this time, the bottom of the blocking component 26 abuts against the upper surface of the drip adjustment component 21 on the switching valve body 24. Even during the closing phase of the drip switching valve 20, a small drip flow rate without blocking the flow channel is maintained. During the rapid switching of the drip switching valve 20 from open to closed, the blocking component 26 will impact the drip adjustment component 21. As long as the thickness of the drip adjustment component 21 does not change, the lower stop point position of the switching valve stem 22 will not change. Therefore, this second solution has the effect of accurate and durable adjustment of the third online drip opening degree 20C. It can also be seen that the drip adjustment component 21 is preferably made of a rigid material, such as a metal washer.

[0096] More preferably, the contact surface between the drip adjustment member 21 and the switching valve body 24 in Scheme 1, or the contact surface between the drip adjustment member 21 and the blocking member 26 in Scheme 2, can be formed with a sound-absorbing or noise-damping coating (not shown in the figure).

[0097] For a better example, see [link / reference]. Figure 2 and Figure 6The height difference between the adjusting cap 31 at this adjustment scale and the valve body height of the drip switching valve 20 corresponds to the thickness of the drip adjustment member 21 or its height position relative to the switching valve stem 22. In a preferred example, when the adjustment opening of the drip online predefined valve 30 is zero, the multi-valve structure is in a drip-closed state. By utilizing the horizontal height difference between the adjusting cap 31 of the drip online predefined valve 30 and the valve body height of the drip switching valve 20, a drip adjustment member 21 with a suitable thickness can be found more quickly. For example, when the first online drip opening is 20B, the upper surface of the original drip adjustment piece 21 and the upper surface of the adjusting cap 31 simulating the first online drip opening 20B have the same height on the common valve seat 10. The upper surface of the replacement drip adjustment piece 21 should also have the same height relative to the upper surface of the adjusting cap 31 that has been adjusted to the second online drip opening 30A. Alternatively, when the first online drip opening is 20B, the upper surface of the original drip adjustment piece 21 detachably connected to the switching valve stem 22 and the upper surface of the adjusting cap 31 simulating the first online drip opening 20B have the same height on the common valve seat 10. After adjusting the height position on the switching valve stem 22, the upper surface of the drip adjustment piece 21 should also have the same height relative to the upper surface of the adjusting cap 31 that has been adjusted to the second online drip opening 30A during the closing phase of the drip switching valve 20. Therefore, both of these methods can easily determine the thickness of the drip adjustment piece 21 that needs to be replaced or the height position relative to the switching valve stem 22.

[0098] For a better example, see [link / reference]. Figure 2 and Figure 6The drip switching valve 20 is specifically a pneumatic flow switching valve, and the drip online predefined valve 30 is specifically a rotary continuously adjustable flow regulating valve. The drip switching valve 20 and the drip online predefined valve 30 are designed for valve chambers of the same size and contain a shared valve diaphragm of the same size. The drip switching valve 20 is closer to the fluid inlet 13, and the drip online predefined valve 30 is closer to the fluid outlet. The rotary continuously adjustable flow regulating valve serves as the online predefined valve for adjusting the target drip opening. The valve diaphragms of the two valves are interchangeable, forming a commonality of internal key components for different functional valves on a shared valve seat 10. In a more preferred example, the drip switching valve 20 is positioned closer to the fluid input end 13, and the drip online predefined valve 30 is positioned closer to the fluid output end 14. In this connection configuration, the drip switching valve 20 will first bear the pressure of the external fluid supplied with a large flow rate at full throttle, protecting the adjustment accuracy of the drip online predefined valve 30. Even if a dripping error occurs in the dripping mode of the drip switching valve 20 after long-term use, or if the dripping mode of the drip switching valve 20 needs to be adjusted for compatibility when it is first installed, the drip online predefined valve 30 can maintain the dripping process on the production line and predefine the dripping opening in an adjustable manner, and then redefine the dripping opening of the drip switching valve 20 in an adjustable manner.

[0099] In embodiments of this method, the multi-valve structure is installed in or on the side of the machine in the production line, connected to the overflow port of the machine. Specifically, the machine can be a semiconductor front-end cleaning device, enabling the installation of the multi-valve followed by adjustment of the drip opening and online adjustment of the drip opening. A specific application is the use of a 12-inch wafer front-end single-wafer cleaning tank to ensure a stable 270±10ml / min micro-flow drip and rapid switching between high-flow and micro-flow drips. The high-flow opening flow rate can be more than five times the micro-flow drip rate. In existing technologies or combinations of conventional techniques, even with a drip valve having a fixed drip opening, inaccuracies in the micro-flow rate can occur due to the influence of gravity, temperature, fluid viscosity, fluid input pressure, installation location, and usage time of the drip valve in the installation environment. Furthermore, it is difficult to make minute adjustments to the dripping process during online production and stabilize the drip opening after installation. The method and multi-valve of this invention offer significant technical advantages for online adjustment of the drip opening of a drip valve that can switch to a high-flow opening stage.

[0100] In the example of the multi-valve of the present invention, see [reference needed]. Figure 13 and Figure 14To further explain the assembly method of its drip switching valve 20, the switching drive disc 22A of the switching valve stem 22 is first placed in the pneumatic valve chamber of the lower valve body 241. A switching elastic body 25 is installed in the pneumatic valve chamber of the upper valve body 242. When the lower valve body 241 and the upper valve body 242 are assembled into the switching valve body 24, the inner stop portion 242B of the upper valve body 242 protrudes inward from the side wall to limit the upward movement stop point of the switching drive disc 22A of the switching valve stem 22. The switching valve stem 22 has a connecting end protruding from the lower valve body 241 (e.g., ...). Figure 13 and Figure 14 The lower screw portion of the valve stem 22 is used to connect to the switching valve diaphragm 23; the switching valve stem 22 also has a connecting end protruding from the upper valve body 242 (e.g., the lower screw portion of the valve stem 22). Figure 13 and Figure 14 The upper screw section (of the screw) is detachably connected to the drip adjuster 21 and the stopper 26. For example... Figure 13 As shown, the outer top of the upper valve body 242 is flat, allowing the pad-shaped drip adjustment element 21, which moves synchronously with the switching valve stem 22, to contact or to be placed if it does not move synchronously with the stem, when the switching valve stem 22 reaches its lower stop point. A groove for installing an elastic sealing ring may be provided at an appropriate location on the stem of the switching valve stem 22 and the outer edge of the switching drive disc 22A, as shown in the example. Figure 14 The groove of the switching valve stem 22 consists of three grooves of different diameters, arranged from smallest to largest from top to bottom. In a preferred embodiment, the lower outer surface of the switching drive disc 22A of the switching valve stem 22 is provided with a straight guide rod 22B. Without increasing the thickness of the switching drive disc 22A, this provides a guide for the switching drive disc 22A to move up and down without tilting, making the drip switching valve 20 more durable when switching between online full-flow supply and online drip opening. The fact that the switching drive disc 22A is not tilted also helps improve the accuracy of the online drip opening.

[0101] The embodiments described herein are preferred embodiments for facilitating understanding or implementation of the technical solutions of the present invention, and are not intended to limit the scope of protection of the present invention. All equivalent changes made in accordance with the structure, shape, and principle of the present invention should be covered within the scope of protection claimed by the present invention.

Claims

1. A method of online adjustment of valve drip opening degree, characterized in that, The method comprises the following steps: S1, providing a multi-connected valve structure, the multi-connected valve structure comprising a common valve seat, a drop switching valve and a drop online predefinition valve arranged on the common valve seat, the drop switching valve and the drop online predefinition valve being in a flow channel series connection relationship; S2, when the drop online predefinition valve is in a valve open state, realizing online switching of a full-through supply mode and a drop mode of the multi-connected valve structure in an opening and closing mode of the drop switching valve, the closing stage of the drop switching valve providing a first online drop opening degree of the multi-connected valve structure, and the opening stage of the drop switching valve providing a first online full-through supply opening degree of the multi-connected valve structure; S3, in the opening stage or the closing stage of the drop switching valve, first adjusting the drop online predefinition valve, and redefining a second online drop opening degree of the multi-connected valve structure by the opening degree of the drop online predefinition valve; When the drop switching valve is in the closing stage, the second online drop opening degree is smaller than the first online drop opening degree; When the drop switching valve is in the opening stage, the second online drop opening degree is greater than or smaller than the first online drop opening degree; S4, in the state that the first adjusted opening degree of the drop online predefinition valve is the second online drop opening degree, adjusting the closing stage of the drop switching valve, so that the adjusted closing stage of the drop switching valve has a third online drop opening degree, and the difference between the third online drop opening degree and the second online drop opening degree is smaller than the difference between the third online drop opening degree and the first online drop opening degree; S5, second adjusting the adjusted opening degree of the drop online predefinition valve, so that the second adjusted state of the drop online predefinition valve is greater than the first online full-through supply opening degree of the multi-connected valve structure; the closing stage of the drop switching valve provides a third online drop opening degree of the multi-connected valve structure, and the opening stage of the drop switching valve provides the first online full-through supply opening degree of the multi-connected valve structure.

2. The method of online adjustment of valve droop according to claim 1, wherein, In step S5, when the second adjusted opening degree of the drop online predefinition valve is close to and smaller than the first online full-through supply opening degree of the multi-connected valve structure, the second adjusted state of the drop online predefinition valve provides a second online full-through supply opening degree of the multi-connected valve structure, and the second online full-through supply opening degree is smaller than the first online full-through supply opening degree provided by the opening of the drop switching valve.

3. The method of online adjustment of valve droop according to claim 1, wherein, In step S5, when the second adjusted opening degree of the drop online predefinition valve is greater than the first online full-through supply opening degree of the multi-connected valve structure, the first online full-through supply opening degree and the third online drop opening degree of the multi-connected valve structure are respectively provided online by switching of the drop switching valve.

4. The method of online adjustment of valve droop according to claim 1, wherein, In step S4, the multi-connected valve structure is in a drop simulation change from the second online drop opening degree provided online by the opening degree of the drop online predefinition valve to the third online drop opening degree provided online by the closing of the drop switching valve. In step S3, when the drip switching valve is in the closed phase, the multi-union valve structure is continuously changed from the first online drip opening degree provided by the closed line of the drip switching valve to the second online drip opening degree provided by the opening line of the drip online pre-defined valve; or, the multi-union valve structure is not affected by the first online full supply opening degree provided by the opening line of the drip switching valve, the opening degree of the drip online pre-defined valve is pre-adjusted to simulate the first online drip opening degree, and after the drip switching valve is switched to the open phase, the opening degree of the drip online pre-defined valve is adjusted to the second online drip opening degree.

5. The method of online adjustment of valve droop according to claim 1, wherein, In step S4, the closing phase of the drip switching valve is adjusted by a drip adjustment member provided on the valve body of the drip switching valve, and the drip adjustment member has a thickness that can raise the lower limit of the switching valve stem of the drip switching valve.

6. The method of online adjustment of valve droop according to claim 5, wherein, In step S1, the drip online pre-defined valve has an adjustment cap; in step S4, the first adjustment opening degree of the drip online pre-defined valve corresponds to the adjustment scale of the adjustment cap, and the thickness of the drip adjustment member is determined by the adjustment scale of the adjustment cap.

7. The method of online adjustment of valve droop according to claim 6, wherein, The height difference between the height level of the adjustment cap at the adjustment scale and the height of the valve body of the drip switching valve corresponds to the thickness of the drip adjustment member.

8. The method of online adjustment of valve droop according to claim 7, wherein, When the adjustment opening degree of the drip online pre-defined valve is zero, the multi-union valve structure is in a drip closed state.

9. The method of online adjustment of valve droop according to any one of claims 1-8, characterized in that, The drip switching valve is a pneumatic flow switching valve, and the drip online pre-defined valve is a rotary type continuously adjustable flow valve. The drip switching valve and the drip online pre-defined valve are suitable for the same size valve chamber and contain the same size valve film. The drip switching valve is closer to the fluid input end, and the drip online pre-defined valve is closer to the fluid output end.

10. A multiple valve structure, characterized by comprising: The multi-union valve structure for realizing online adjustment of valve drip opening degree comprises: A shared valve seat having a first valve chamber and a second valve chamber with flow channels connected in series; A drip switching valve provided on the first valve chamber of the shared valve seat, for online switching of the full supply mode and the drip mode of the multi-union valve structure, to online switch the first online full supply opening degree and the first online drip opening degree of the multi-union valve structure; A drip online pre-defined valve provided on the second valve chamber of the shared valve seat, for online adjustment of the second online drip opening degree of the multi-union valve structure in the drip mode; based on online simulation of the second online drip opening degree, the closing phase of the drip switching valve can be adjusted, so that the drip switching valve can online switch the first online full supply opening degree and the third online drip opening degree of the multi-union valve structure, and the difference between the third online drip opening degree and the second online drip opening degree is less than the difference between the third online drip opening degree and the first online drip opening degree; The flow channel of the common valve seat comprises an input flow channel section, an intermediate flow channel section and an output flow channel section, the flow outlet of the input flow channel section is aligned with the bottom of the first valve chamber, and the flow inlet of the output flow channel section is aligned with the bottom of the second valve chamber; the drip switch valve is a pneumatic flow switch valve, comprising a switch valve membrane capable of switching the flow mode in the first valve chamber, a switch valve rod connected to the switch valve membrane, a switch valve body for axial segmented movement of the switch valve rod, a switch elastic body for driving the switch valve rod to move downward, a blocking piece combined with the switch valve rod for restricting the lower stop point of the switch valve rod, and a drip adjustment piece arranged on the switch valve body.

11. The multiple valve structure according to claim 10, wherein The lower surface of the periphery of the switch driving disc of the switch valve rod is provided with a straight guide rod to increase the guidance of the up-and-down lifting of the switch driving disc.

12. The multiple valve structure according to claim 10, wherein The switch valve body comprises a lower valve body and an upper valve body, and the upper valve body has an inner stop portion relative to the lower valve body for restricting the upper stop point of the switch valve rod.

13. The multiple valve structure according to claim 12, wherein The upper valve body is provided with an upper pneumatic hole, the lower valve body is provided with a lower pneumatic hole, and the switch driving disc connected to the switch valve rod moves in the parallel space of the height difference between the upper pneumatic hole and the lower pneumatic hole; the switch elastic body is arranged between the upper valve body and the driving disc.

14. The multiple valve structure according to claim 13, wherein The drip adjustment piece is detachably connected to the switch valve rod, the drip adjustment piece has a gasket ring structure, and the blocking piece is arranged at the end of the switch valve rod away from the upper valve body.

15. The multiple valve structure according to claim 14, wherein The lower valve body is also provided with a bottom air hole; the drip valve is an online pre-defined valve, which is a rotary type continuous flow regulating valve, comprising a regulating valve membrane capable of closing the flow in the second valve chamber, a regulating valve rod connected to the regulating valve membrane, a regulating valve body for axial continuous movement of the regulating valve rod, a regulating elastic body for driving the regulating valve rod to move upward, and a regulating screw cap arranged on the regulating valve body for restricting the upward movement position of the regulating valve body, and the height of the regulating screw cap or the restraining portion of the regulating screw cap relative to the regulating valve body is adjustable.

16. The multiple valve structure according to claim 15, wherein The regulating screw cap and the regulating valve body are in a screw connection relationship, the regulating screw cap and the regulating valve rod are in a contact relationship, and the regulating valve rod is also provided with an anti-disengagement structure relative to the regulating valve body.

17. The multiple valve structure according to claim 10, wherein The regulating valve body is also provided with an inner valve ring, the regulating elastic body is arranged between the regulating driving disc of the regulating valve rod and the inner valve ring, and the inner valve ring is clamped around the periphery of the regulating valve membrane in cooperation with the common valve seat around the second valve chamber.

18. The multiple valve structure according to claim 17, wherein The regulating valve body is provided with an outer air hole, the inner valve ring is provided with an inner air hole, and the outer side of the inner valve ring or the inner side of the regulating valve body is provided with an air groove communicating the outer air hole and the inner air hole; the inner valve ring is in a rotatable airtight contact relationship relative to the regulating valve body.

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