An interface circuit board for self-checking of power signals, an automatic testing method, and a testing platform

Abstract

The present invention discloses an interface circuit board for self-checking power signals, an automatic testing method, and a testing platform. The interface circuit board is connected between a chip under test and a power supply module of an automatic tester. The power supply line and the power sense line of the interface circuit board are short-circuited on the interface circuit board, and the ground line and the ground sense line are short-circuited on the interface circuit board. The interface circuit board includes a power supply monitoring pin, and the power supply monitoring pin connects the power supply line to the digital signal channel of the automatic tester to perform self-checking on the power signal output by the power supply monitoring pin through the digital signal channel of the automatic tester. The technical solution of the present invention pre-performs self-checking on the power signal of the interface circuit board without relying on the chip, and moreover, expands the coverage of on-line power supply inspection. It does not require loading and unloading the interface circuit board or using additional instruments, improves the convenience of inspection, and reduces the hardware cost, labor cost, and time cost.

Description

Technical Field

[0001] The present invention relates to the technical field of SOC chip testing, and particularly to an interface circuit board with self-checking power signals, an automatic testing method, and a testing platform. Background Art

[0002] Chip testing is an important link in chip manufacturing to ensure chip quality. Currently, in the industry, an automatic test equipment (ATE) is usually used for wafer-level chip testing. An interface circuit board (a circuit board connecting the chip and the testing machine, also known as a DIB circuit board) is required to connect the chip under test (such as a wafer or a packaged chip) and the testing machine. Common interface circuit boards include, for example, a probe card and a test load board.

[0003] However, with the rapid development of large-scale integrated circuits, the design and manufacturing of interface circuit boards have become increasingly complex, and problems in design or manufacturing often occur. Such problems or faults are usually only detected when testing the wafer after it arrives. If the interface circuit board fails and needs to be repaired or returned to the factory, it will directly lead to the risk of delayed sample delivery, and the time required to debug the interface circuit board will also extend the initial testing time of new products.

[0004] On the other hand, the coverage of the existing technology for checking the interface circuit board is relatively small, mainly limited to performing open-short (OS) / power short (PS) ATE test programs to check the connectivity of the DIB circuit board, without covering the content related to the quality of power signals, such as the connection correctness of the power supply lines (Force lines) and power sense lines (ForceSense lines) of the power supply module DPS provided by the testing machine for powering the chip power pins, the stability of the power output voltage, the resistance measurement of the power module discharge resistor, etc. Therefore, the automatic checking of the power signals of the interface circuit board cannot be well achieved.

[0005] In addition, when it is necessary to check the power signals of the interface circuit board during chip mass production or development, generally, various instruments such as a signal generator, a multimeter, and an oscilloscope need to be used to build a checking platform for checking after unloading, and on-line checking cannot be achieved, resulting in time-consuming, laborious, and inconvenient checking operations for the interface circuit board. Summary of the Invention

[0006] In view of this, the present invention provides an interface circuit board with self-checking power signals, an automatic testing method, and a testing platform, which can pre-check whether there are design or manufacturing problems with the power signals of the interface circuit board by means of on-line checking without relying on the chip.

[0007] The present invention provides, in a first aspect, an interface circuit board for self-checking power signals. The interface circuit board is connected between a power supply module of an automatic test machine and a chip under test. A power line and a power sense line of the interface circuit board are short-circuited on the interface circuit board, and a ground line and a ground sense line of the interface circuit board are short-circuited on the interface circuit board. The interface circuit board includes a power monitoring pin, and the power monitoring pin connects the power line to a digital signal channel of the automatic test machine to perform self-checking on the power signal output by the power monitoring pin through the digital signal channel of the automatic test machine.

[0008] Preferably, the short-circuit point of the power line and the power sense line of the interface circuit board is located near the chip under test.

[0009] Preferably, the power line and the power sense line respectively output voltages Vf and Vs for detecting the connection state of the power line and the power sense line by using the automatic test machine.

[0010] Preferably, the power monitoring pin transmits the power output voltage of the power supply module to a voltage comparator of the digital signal channel of the automatic test machine for detecting the stable state of the power output voltage by using the automatic test machine.

[0011] Preferably, the power monitoring pin transmits the power output voltage of the power supply module to an electrical signal measuring unit of the digital signal channel of the automatic test machine for detecting the connection state of the discharge resistor of the power supply module by using the automatic test machine.

[0012] Preferably, the interface circuit board is a probe card or a test load board.

[0013] The present invention provides, in a second aspect, an automatic test method based on the interface circuit board for self-checking power signals in the foregoing first aspect, including:

[0014] Detecting the connection state of the power line and the power sense line according to the voltages of the power line and the power sense line of the interface circuit board;

[0015] Performing parameter scanning on the power output voltage through the power monitoring pin of the interface circuit board to obtain the highest voltage and the lowest voltage, and detecting the stable state of the power output voltage according to the difference between the highest voltage and the lowest voltage;

[0016] Detecting the connection state of the discharge resistor of the power supply module according to the voltage value of the power monitoring pin of the interface circuit board under a preset current.

[0017] Preferably, the detecting the connection state of the power line and the power sense line further includes:

[0018] Apply a fixed voltage to the power supply terminal of the power supply module, and apply a current of a preset magnitude to the power supply sensing terminal.

[0019] Measure the output voltage Vf of the power supply line and the output voltage Vs of the power supply sensing line respectively.

[0020] If the voltage difference between Vf and Vs is 0V, it is determined that the power supply line and the power supply sensing line are short-circuited correctly on the interface circuit board.

[0021] Preferably, the detecting the stable state of the power supply output voltage further includes:

[0022] Set the output voltage of the power supply line to a preset scanning voltage.

[0023] Perform parameter scanning on the power supply output voltage through the power supply monitoring pin of the interface circuit board to obtain the highest voltage VOH and the lowest voltage VOL.

[0024] If the voltage difference between VOH and VOL is within the predefined range of the preset scanning voltage, it is determined that the power supply output voltage is in a stable state.

[0025] Preferably, the detecting the connection state of the discharge resistor of the power supply module further includes:

[0026] Apply a current of a preset magnitude to the power supply monitoring pin, and then measure the voltage of the power supply monitoring pin.

[0027] Take the ratio of the voltage to the current as the resistance value of the discharge resistor of the power supply module.

[0028] If the resistance value is the predefined resistance value, it is determined that the discharge resistor of the power supply module is connected correctly.

[0029] In a third aspect, the present invention provides an automatic test device for an interface circuit board for self-checking of power signals according to the first aspect described above, including:

[0030] A connection detection module, configured to detect the connection state of the power supply line and the power supply sensing line according to the voltages of the power supply line and the power supply sensing line of the interface circuit board.

[0031] A voltage detection module, configured to perform parameter scanning on the power supply output voltage through the power supply monitoring pin of the interface circuit board to obtain the highest voltage and the lowest voltage, and detect the stable state of the power supply output voltage according to the difference between the highest voltage and the lowest voltage.

[0032] A resistance detection module, configured to detect the connection state of the discharge resistor of the power supply module according to the voltage value of the power supply monitoring pin of the interface circuit board under a preset current.

[0033] In a fourth aspect, the present invention further provides an automatic test platform that runs an automatic test program for implementing the automatic test method according to the second aspect described above.

[0034] It can be seen that the power signal self-checking interface circuit board, the automatic test method, and the test platform of the present invention can pre-check the interface circuit board without relying on the chip, so as to quickly locate possible design or manufacturing problems of the power signal of the interface circuit board, and reduce the risk of sample delivery delay. The present invention realizes the connection correctness check of the Force line and the ForceSense line of the DPS, the power output voltage stability check, the resistance measurement of the power module discharge resistor and its connection state check, and expands the coverage of the power signal check of the interface circuit board. The interface circuit board and its automatic test method of the present invention can perform on-line checks on the power signal and connection relationship on the interface circuit board, without the need to load and unload the interface circuit board, and without the need for various instruments to build a check platform, which can be achieved by executing the ATE test program, reducing the skill requirements for inspectors. This not only improves the convenience of inspection, but also reduces the hardware cost, labor cost, and time cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0036] Figure 1 Shows a schematic connection circuit diagram of the interface circuit board for power signal self-checking according to the present invention.

[0037] Figure 2 Shows a schematic connection diagram of the Force line and the ForceSense line of the interface circuit board according to the present invention.

[0038] Figure 3 Shows a flow chart for testing the connection of the Force line and the ForceSense line of the interface circuit board according to the present invention.

[0039] Figure 4 Shows a schematic diagram of the principle for detecting the power output voltage stability of the interface circuit board according to the present invention.

[0040] Figure 5 Shows a flow chart for detecting the power output voltage stability of the interface circuit board according to the present invention.

[0041] Figure 6 The connection circuit diagram of the discharge resistor of the power supply module of the interface circuit board according to the present invention is shown.

[0042] Figure 7 The resistance value measurement flow chart of the discharge resistor of the power supply module of the interface circuit board according to the present invention is shown.

[0043] Figure 8 The automatic test method flow chart of the interface circuit board based on the self-check of the power supply signal according to the present invention is shown.

[0044] Figure 9 The module diagram of the automatic test device of the interface circuit board based on the self-check of the power supply signal according to the present invention is shown. Detailed implementation manners

[0045] In order to better understand the above technical solutions, the above technical solutions will be described in detail below in conjunction with the specification drawings and specific implementation manners.

[0046] It should be clear that the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. In order to more clearly illustrate the present invention, numerous technical details are described in the following specific embodiments. Those skilled in the art should understand that the present invention can also be implemented without some of these details. In addition, in order to highlight the inventive concept of the present invention, some methods, means, components and their applications well known to those skilled in the art are not described in detail, but this does not affect the implementation of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0047] Since the interface circuit board usually arrives earlier than the wafer or the packaged chip, but due to the dependence on the chip, this time advance cannot be used for the inspection of the interface circuit board in the prior art. The inventor found that if the ATE test program is executed in advance after receiving the interface circuit board to check whether the power supply signal quality and design requirements are met, instead of waiting for the arrival of the chip, it will be possible to detect earlier whether there are design or manufacturing problems with the interface circuit board and take corresponding measures. Therefore, the present invention provides an ATE test solution for self-checking the power supply signal of the interface circuit board without relying on the chip, including a hardware design stage and a software stage, to eliminate the dependence on the chip, aiming to start the inspection when the interface circuit board arrives, so as to detect problems with the interface circuit board earlier and reduce the risk of sample delivery delay caused thereby.

[0048] In order to increase the coverage and convenience of the interface circuit board inspection, during the hardware design phase, the test solution of the present invention mainly focuses on the power signal inspection, the digital signal inspection, and the inspection of the specific circuit application functions. Moreover, this method can also achieve the on-line inspection of the interface circuit board. When it is necessary to inspect the power supply of the interface circuit board during mass production or product development, the ATE test program can be directly executed on-line without loading and unloading the interface circuit board.

[0049] Embodiment 1

[0050] On the one hand, the present invention provides an interface circuit board with self-checking power signals. Figure 1 The schematic connection diagram of the interface circuit board according to the present invention is shown. In Figure 1 this, the interface circuit board of the present invention is described by taking the probe card during wafer testing as an example.

[0051] During the hardware design phase of the interface circuit board of the present invention, all the power modules (DPS) of the automatic test equipment (ATE) are connected using Kelvin connection. The Kelvin connection is also known as the forced and detected connection method, which is used to eliminate the influence of the voltage drop generated on the wire in the circuit. The interface circuit board is connected between the power module of the ATE and the device under test (DUT). As Figure 1 shown, each dot in the left DPS represents the spring probe (Pogopin) of the test machine DPS, and the right DUT represents the device under test. The two are connected together through the wiring on the printed circuit board (PCB) of the interface circuit board. The leads of the interface circuit board include the power supply line (Force line) of the DPS, the power sense line (Force Sense line), the DPS ground line (GND line), and the ground sense line (GNDSense line). One end of the Force line and the ForceSense line are respectively connected to the power supply terminal (Force terminal) and the power sense terminal (Force Sense terminal) of the DPS, and the other ends are short-circuited on the interface circuit board. One end of the DPS GND line and the GNDSense line are also connected to the corresponding ports of the DPS, and the other ends are also short-circuited on the interface circuit board.

[0052] Among them, the short-circuit point of the Force line and the ForceSense line on the interface circuit board is located at the proximal end of the device under test (DUT), that is, as close as possible to the device under test (DUT), so as to eliminate the influence of the resistance after the short-circuit point to the greatest extent. In a specific embodiment, this short-circuit point can be located on the connection pin of the interface circuit board and the device under test (DUT).

[0053] Based on the above connection structure, a dedicated test program developed based on the ATE test platform can be run to implement the connectivity detection of the Force line and the ForceSense line. To check whether the Force line and the ForceSense line of the DPS on the interface circuit board are correctly connected, a fixed voltage can be applied to the Force terminal of the DPS, and a current of a preset magnitude ( Figure 2 shown as 5 μA) can be applied to the Force Sense terminal of the DPS, and then the voltages are measured on the Force line and the ForceSense line respectively, denoted as Vf and Vs.

[0054] Refer to Figure 3 the flowchart. If the Force line and the ForceSense line are correctly short-circuited on the interface circuit board, the voltage difference between the two voltages Vf and Vs is 0 V, or close to 0 V.

[0055] If the Force line and the ForceSense line are not short-circuited together on the interface circuit board, the current can only flow through a 100 KΩ resistor internally connected to the Force line and the ForceSense line. This resistor is an internal resource of the ATE and is not on the interface circuit board, resulting in the voltage difference between the two voltages Vf and Vs no longer being 0 V.

[0056] As Figure 1 shown, the interface circuit board further includes a power supply monitoring pin (DPS monitoring pin, DPSmonitorpin). One end of the DPS monitoring pin is connected to the Force line, and the other end is directly connected to the ATE digital signal channel. As the power supply current increases, the number of parallel DPS channels designed in the interface circuit board also increases, and the decoupling capacitor scheme becomes more and more complex. To prevent some designs from causing power supply voltage oscillation, lack of stability, or abnormal electrical signal (DC) parameters, in the hardware design stage of the interface circuit board of the present invention, for each DPS monitoring pin, its Force line is directly connected to an ATE digital signal channel through the power supply monitoring pin for measuring the voltage of the corresponding DPS. Each digital signal channel of the ATE provides resources such as a voltage comparator and an electrical signal (DC) parameter measurement module. Using these resources, the power supply signal output by the DPS monitoring pin can be self-checked and measured. Through the design of the DPSmonitorpin of the present invention, the stability and DC parameters (such as the resistance value of the discharge resistor) of the DPS can be conveniently detected using an automatic test machine.

[0057] To check the stability of the power output voltage on the interface circuit board, DPS is used as the power supply channel for the chip, and it is expected that the voltage can be stably output, especially during the execution of test vectors. For the detection of the stability of the power output voltage, the interface circuit board of the present invention is combined with the voltage comparator in the ATE tester. By running a dedicated test program developed based on the ATE test platform, the voltage comparator performs one or more parameter scans on the power output voltage via the above-mentioned DPS monitor pin, and compares the lowest voltage and the highest voltage obtained from the scans, thereby detecting the voltage stability.

[0058] In a preferred embodiment of the present invention, as Figure 4 shown, two parameter scans can be performed. The first scan is from low to high, and the lowest voltage obtained is denoted as VOL. The second scan is from high to low, and the highest voltage obtained is denoted as VOH. VOH and VOL can be used as the basis for determining the stability of the power output voltage. If the voltage comparator determines that the difference between VOH and VOL is within the predefined range of the scanned voltage ( Figure 4 shown as 1V), the output voltage is detected as stable; otherwise, it is detected as unstable. Figure 5 The flowchart of the detection of the stability of the power output voltage according to a specific embodiment of the present invention is shown.

[0059] Regarding the measurement of the resistance value of the discharge resistor of the power supply module, Figure 6 The connection circuit diagram of the power supply module discharge resistor for DPS capacitor discharge is shown. To measure whether the discharge resistor (usually 100Ω) is correctly connected, the interface circuit board of the present invention is combined with the electrical signal (DC) measurement unit in the ATE tester. The DC measurement unit is connected to the DPS monitor pin on the DPS channel, and is used to apply a preset current at the DPS monitor pin end, and then measure the voltage at the DPS monitor pin end, and calculate the ratio of the above voltage and current as the resistance value of the discharge resistor. For the specific flowchart, see Figure 7 shown. Apply a current of 50mA at the DPS monitor pin end, then measure the voltage of this pin, and calculate the ratio of the voltage to the current to obtain the resistance value R of the discharge resistor. If the resistance value of R is 100Ω, the connection of the power supply module discharge resistor is correct; otherwise, the connection is abnormal.

[0060] Embodiment 2

[0061] The technical solution of the present invention is applicable to the self-check of the power signal of the probe card before packaging. That is, on the other hand, the present invention also includes a probe card for self-checking the power signal.

[0062] In the hardware design stage of the probe card of the present invention, all power supply modules (DPS) of the automatic test equipment (ATE) are connected using Kelvin connection. The Kelvin connection, also known as the force and sense connection method, is used to eliminate the influence of the voltage drop generated on the wire in the circuit. The probe card is connected between the power supply module of the ATE and the device under test (DUT). The leads of the probe card include the power supply wire (Force wire) of the DPS, the power sense wire (ForceSense wire), the ground wire (GND) of the DPS, and the ground sense wire (GNDSense). One end of the Force wire and the ForceSense wire are respectively connected to the power supply terminal (Force terminal) and the power sense terminal (Force Sense terminal) of the DPS, and the other ends are short-circuited on the probe card. One end of the DPS GND wire and the GND Sense wire are also connected to the corresponding ports of the DPS, and the other ends are also short-circuited on the probe card.

[0063] Among them, the short-circuit point of the Force wire and the ForceSense wire on the probe card is located at the proximal end of the device under test (DUT), that is, as close as possible to the device under test (DUT), so as to eliminate the influence of the resistance after the short-circuit point to the greatest extent. In a specific embodiment, this short-circuit point can be located on the connection pin of the probe card and the device under test (DUT).

[0064] The Force wire and the ForceSense wire respectively output voltages Vf and Vs, which are used to detect the connection state of the Force wire and the ForceSense wire by using the automatic test equipment.

[0065] The power supply monitoring pin transmits the power supply output voltage of the power supply module to the voltage comparator of the digital signal channel of the automatic test equipment, which is used to detect the stable state of the power supply output voltage by using the automatic test equipment.

[0066] The power supply monitoring pin transmits the power supply output voltage of the power supply module to the electrical signal measurement unit of the digital signal channel of the automatic test equipment, which is used to detect the connection state of the discharge resistor of the power supply module by using the automatic test equipment.

[0067] Embodiment III

[0068] The technical solution of the present invention is also applicable to the self-check of the power signal of the test load board after packaging. That is, on the other hand, the present invention also includes a test load board for self-checking the power signal.

[0069] In the hardware design stage of the test load board of the present invention, all power supply modules (DPS) of the automatic test equipment (ATE) are connected using Kelvin connection. The Kelvin connection is also known as the force and sense connection method, which is used to eliminate the influence of voltage drop generated on the wires in the circuit. The test load board is connected between the power supply module of the ATE and the device under test (DUT). The leads of the test load board include the power supply line (Force line) of the DPS, the power sense line (ForceSense line), the ground line (GND) of the DPS, and the ground sense line (GNDSense). One end of the Force line and the ForceSense line are respectively connected to the power supply terminal (Force terminal) and the power sense terminal (ForceSense terminal) of the DPS, and the other ends are short-circuited on the test load board. One end of the GND line and the GNDSense line of the DPS are also connected to the corresponding ports of the DPS, and the other ends are also short-circuited on the test load board.

[0070] Among them, the short-circuit point of the Force line and the ForceSense line on the test load board is located at the proximal end of the device under test (DUT), that is, as close as possible to the device under test (DUT), so as to eliminate the influence of the resistance after the short-circuit point to the greatest extent. In a specific embodiment, this short-circuit point can be located on the connection pin of the test load board and the device under test (DUT).

[0071] The Force line and the ForceSense line respectively output voltages Vf and Vs, which are used to detect the connection status of the Force line and the ForceSense line by using the automatic test equipment.

[0072] The power supply monitoring pin transmits the power supply output voltage of the power supply module to the voltage comparator of the digital signal channel of the automatic test equipment, which is used to detect the stable state of the power supply output voltage by using the automatic test equipment.

[0073] The power supply monitoring pin transmits the power supply output voltage of the power supply module to the electrical signal measurement unit of the digital signal channel of the automatic test equipment, which is used to detect the connection status of the discharge resistor of the power supply module by using the automatic test equipment.

[0074] Embodiment 4

[0075] Another aspect of the present invention further includes an automatic test method for the interface circuit board based on the power signal self-check of the foregoing Embodiment 1. This test method is implemented by executing a dedicated test program developed based on the automatic test platform. Refer to Figure 8 The flowchart of the automatic test method of the interface circuit board shown, the specific steps include:

[0076] Step S101: Detect the connection status of the Force line and the ForceSense line according to the voltages of the Force line and the ForceSense line of the interface circuit board.

[0077] In Figure 2 the specific embodiment shown, a fixed voltage can be applied to the Force terminal of the DPS, and a current of a preset magnitude ( Figure 2 shown as 5 μA) can be applied to the ForceSense terminal of the DPS, and then the voltages are measured on the Force line and the ForceSense line respectively, denoted as Vf and Vs.

[0078] Referring to Figure 3 the flowchart, if the Force line and the ForceSense line are correctly shorted on the interface circuit board, the voltage difference between the two voltages Vf and Vs is 0 V, or close to 0 V.

[0079] If the Force line and the ForceSense line are not shorted together on the interface circuit board, the current can only flow through a 100 KΩ resistor internally connected to the Force line and the ForceSense line. This resistor is an internal resource of the ATE and is not on the interface circuit board, and the voltage difference between the two voltages Vf and Vs is no longer 0 V. Figure 3 shows that the fixed voltage applied to the Force terminal of the DPS is 0 V.

[0080] Step S102: Perform parameter scanning on the power output voltage through the power supply monitoring pin of the interface circuit board to obtain the highest voltage and the lowest voltage, and detect the stable state of the power output voltage according to the difference between the highest voltage and the lowest voltage.

[0081] In a preferred embodiment, when checking the voltage of the DPS, the voltage comparator in the ATE tester can perform one or more parameter scans on the power output voltage via the above-mentioned DPSmonitorpin, and compare the lowest voltage and the highest voltage obtained by the scan, so as to detect the voltage stability.

[0082] In a preferred embodiment of the present invention, as Figure 4 shown, after setting the output voltage of the force line to a preset scan voltage ( Figure 4 and Figure 5 shown as 1 V), two parameter scans are performed. The first is a scan from low to high, and the lowest voltage obtained is denoted as VOL. The second is a scan from high to low, and the highest voltage obtained is denoted as VOH. VOH and VOL can be used as the basis for determining the stability of the power output voltage. If the difference between VOH and VOL is within the predefined range, it is detected that the output voltage is stable, otherwise it is detected as unstable. Figure 5Shows a flowchart of the detection of the stability of the power supply output voltage according to a specific embodiment of the present invention. As Figure 5 shown, if the difference between VOH and VOL is within a predefined range (±5% of 1V), it is determined that the output voltage is in a stable state.

[0083] Step S103, detecting the connection state of the discharge resistor of the power supply module according to the voltage value of the power supply monitoring pin of the interface circuit board under a preset current.

[0084] Figure 6 Shows a connection circuit diagram of the power supply module discharge resistor for DPS capacitor discharge. In order to measure whether the discharge resistor (usually 100Ω) is correctly connected, the test method of the present invention uses the DC measurement unit of the DPS monitor pin connected to the DPS channel, applies a preset current at the DPS monitor pin end, and then measures the voltage at the DPS monitor pin end. The ratio of the above voltage and current is used as the resistance value of the discharge resistor. As Figure 7 shown in the flowchart of, apply a 50mA current at the DPS monitor pin end, then measure the voltage of this pin, and calculate the ratio of the voltage to the current to obtain the resistance value of the discharge resistor R. If the resistance value of R is 100Ω, it is determined that the connection of the power supply module discharge resistor is correct, otherwise it is determined that the connection is abnormal.

[0085] Those skilled in the art can understand that the automatic test method of the present invention is not limited to the order and combination of the above steps. Since steps S101 to S103 can be independent ATE test steps, in the actual wafer test process, any one or more of steps S101 to S103 can be selected according to the ATE test requirements, or the order of steps S101 to S103 can be adjusted arbitrarily.

[0086] Embodiment Five

[0087] Another aspect of the present invention further includes an automatic test device for the interface circuit board of the power signal self-check of the foregoing Embodiment One. Refer to Figure 9 the module diagram of the interface circuit board automatic test device shown, this device includes:

[0088] A connection detection module 201, configured to detect the connection state of the power supply line and the power supply sensing line according to the voltages of the power supply line and the power supply sensing line of the interface circuit board;

[0089] A voltage detection module 202, configured to perform parameter scanning on the power supply output voltage through the power supply monitoring pin of the interface circuit board to obtain the highest voltage and the lowest voltage, and detect the stable state of the power supply output voltage according to the difference between the highest voltage and the lowest voltage;

[0090] A resistance detection module 203 is configured to detect the connection state of the discharge resistor of the power supply module according to the voltage value of the power supply monitoring pin of the interface circuit board under a preset current.

[0091] In a specific embodiment, the connection detection module 201 is further configured to:

[0092] Apply a fixed voltage to the power supply terminal of the power supply module and apply a preset current to the power sense terminal;

[0093] Measure the output voltage Vf of the power supply line and the output voltage Vs of the power sense line respectively;

[0094] If the voltage difference between Vf and Vs is 0V, it is determined that the power supply line and the power sense line are correctly short-circuited on the interface circuit board.

[0095] The voltage detection module 202 is further configured to:

[0096] Set the output voltage of the power supply line as a preset scanning voltage;

[0097] Perform parameter scanning on the power supply output voltage through the power supply monitoring pin of the interface circuit board to obtain the highest voltage VOH and the lowest voltage VOL;

[0098] If the voltage difference between VOH and VOL is within a predefined range of the preset scanning voltage, it is determined that the power supply output voltage is in a stable state.

[0099] The resistance detection module 203 is further configured to:

[0100] Apply a preset current to the power supply monitoring pin, and then measure the voltage of the power supply monitoring pin;

[0101] Take the ratio of the voltage to the current as the resistance value of the discharge resistor of the power supply module;

[0102] If the resistance value is a predefined resistance value, it is determined that the discharge resistor of the power supply module is correctly connected.

[0103] For the specific functions implemented by each module of the device, reference can be made to the description in Embodiment 4, which will not be elaborated here.

[0104] Embodiment 6

[0105] Another aspect of the present invention further includes an automatic test platform (ATE test platform), and the automatic test platform runs an automatic test program. The platform on which the automatic test program runs is the same as the automatic test platform for chip mass production. The test program mainly includes functional modules that implement each step of one or more automatic test methods according to the foregoing Embodiment 4.

[0106] It can be seen that compared with the prior art, the power signal self-checking interface circuit board, automatic test method and test platform provided by the present invention have the following advantages:

[0107] First of all, the technical solution of the present invention realizes self-checking of the power signal of the interface circuit board without relying on the chip to execute, so that possible design or manufacturing problems of the power signal of the interface circuit board can be discovered in advance before receiving the chip, reducing the risk of sample delivery delay. For example, in the initial test stage of a new product, it is found that the DC test data of a power supply of an interface circuit board is different from that of other interface circuit boards. Through the above-mentioned discharge resistor detection process of the present invention, it can be found that the 100Ω discharge resistor is abnormally connected. Therefore, it is possible to quickly locate whether the discharge resistors of each power supply are correctly connected, so as to repair the faults of the discharge resistors before the chip arrives, reducing the time cost spent on locating problems.

[0108] Secondly, the technical solution of the present invention also realizes the connection correctness check of the DPSForce line and the ForceSense line, the power output voltage stability check, the resistance value measurement of the discharge resistor of the power supply module and its connection state check. Therefore, the coverage of the power signal check of the interface circuit board is expanded, making the check range of the interface circuit board more perfect and efficient.

[0109] Finally, the technical solution of the present invention also provides the ability to perform on-line inspection of the interface circuit board, that is, it can perform on-line inspection of the power signal and connection relationship on the interface circuit board without having to load and unload the interface circuit board. The on-line inspection process can be completed on the basis of a traditional test platform without the need to build an inspection platform with various instruments and meters. While improving the inspection convenience, it reduces the hardware cost and time cost. The automatic test method of the present invention is realized by executing the ATE test program, providing high consistency in multiple DIB automatic inspections, reducing the skill requirements for inspectors, and thus saving labor costs.

[0110] The above describes multiple embodiment solutions provided by the embodiments of the present invention. The various alternative ways described in each embodiment solution can be combined and cross-referenced with each other without conflict, so as to extend a variety of possible embodiment solutions, all of which can be considered as the embodiment solutions disclosed and made public by the embodiments of the present invention.

[0111] Although the embodiments of the present invention are disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. An interface circuit board for self-checking of power signals, the interface circuit board being connected between a chip under test and a power supply module of an automatic test machine, characterized in that: The power supply line and the power sense line of the interface circuit board are short-circuited on the interface circuit board, and the ground line and the ground sense line of the interface circuit board are short-circuited on the interface circuit board; the interface circuit board includes a power supply monitoring pin, and the power supply monitoring pin connects the power supply line to a digital signal channel of the automatic test machine to perform self-checking on the power signal output by the power supply monitoring pin through the digital signal channel of the automatic test machine; The power supply line and the power sense line respectively output voltages Vf and Vs for detecting the connection state of the power supply line and the power sense line by using an automatic test machine.

2. The interface circuit board for self-checking of power supply signals according to claim 1, characterized in that The short-circuit point of the power supply line and the power sense line of the interface circuit board is located at the proximal end of the chip under test.

3. The interface circuit board for self-checking of power supply signals according to claim 1, wherein, The power supply monitoring pin transmits the power output voltage of the power supply module to a voltage comparator of the digital signal channel of the automatic test machine for detecting the stable state of the power output voltage by using an automatic test machine.

4. The interface circuit board for self-checking of power signals according to claim 1, characterized in that, The power supply monitoring pin transmits the power output voltage of the power supply module to an electrical signal measurement unit of the digital signal channel of the automatic test machine for detecting the connection state of the discharge resistor of the power supply module by using an automatic test machine.

5. The interface circuit board for self-checking of power supply signals according to claim 1, wherein The interface circuit board is a probe card or a test load board.

6. An automatic test method for an interface circuit board with self-checking of power supply signals according to any one of claims 1-5, characterized in that, Including: Detecting the connection state of the power supply line and the power sense line according to the voltages of the power supply line and the power sense line of the interface circuit board; Performing parameter scanning on the power output voltage through the power supply monitoring pin of the interface circuit board to obtain the highest voltage and the lowest voltage, and detecting the stable state of the power output voltage according to the difference between the highest voltage and the lowest voltage; Detecting the connection state of the discharge resistor of the power supply module according to the voltage value of the power supply monitoring pin of the interface circuit board under a preset current.

7. The automatic test method according to claim 6, wherein The detecting the connection state of the power supply line and the power sense line further includes: Applying a fixed voltage to the power supply end of the power supply module and applying a preset magnitude of current to the power sense end; Respectively measuring the output voltage Vf of the power supply line and the output voltage Vs of the power sense line; If the voltage difference between Vf and Vs is 0V, it is determined that the power supply line and the power sense line are correctly short-circuited on the interface circuit board.

8. The automatic test method according to claim 6, wherein The detecting the stable state of the power output voltage further includes: Setting the output voltage of the power supply line as a preset scanning voltage; Performing parameter scanning on the power output voltage through the power supply monitoring pin of the interface circuit board to obtain the highest voltage VOH and the lowest voltage VOL; If the voltage difference between VOH and VOL is within a predefined range of the preset scanning voltage, it is determined that the power output voltage is in a stable state.

9. The automatic test method according to claim 6, characterized in that The detecting the connection state of the discharge resistor of the power supply module further includes: Applying a preset magnitude of current to the power supply monitoring pin and then measuring the voltage of the power supply monitoring pin; Taking the ratio of the voltage to the current as the resistance value of the discharge resistor of the power supply module. If the resistance value is a predefined resistance value, it is determined that the discharge resistor of the power supply module is correctly connected.

10. An automatic test device for an interface circuit board with self-check of power supply signals according to any one of claims 1-5, characterized in that, Including: A connection detection module, configured to detect the connection status of the power supply line and the power sense line according to the voltages of the power supply line and the power sense line of the interface circuit board; A voltage detection module, configured to perform parameter scanning on the power supply output voltage through the power supply monitoring pin of the interface circuit board to obtain the highest voltage and the lowest voltage, and detect the stable state of the power supply output voltage according to the difference between the highest voltage and the lowest voltage; A resistance detection module, configured to detect the connection status of the discharge resistor of the power supply module according to the voltage value of the power supply monitoring pin of the interface circuit board under a preset current.

11. An automatic test platform, characterized in that, The automatic test platform runs an automatic test program to implement the automatic test method according to any one of claims 6-9.

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