Automatic low-temperature developing unit

Abstract

This application provides an automatic low-temperature developing apparatus, including a developing chamber, a developing mechanism, and a conveying mechanism. The developing chamber isolates the developing environment for the sample. The developing mechanism includes a developing container for holding the developing solution and a first temperature control component for controlling the temperature of the developing solution. The first temperature control component is mounted on the developing container, which is installed inside the developing chamber. The conveying mechanism is used to transfer the sample to the developing container and is installed inside the developing chamber. This automatic low-temperature developing apparatus has the advantages of controllable developing solution temperature and good developing effect.

Description

Technical Field

[0001] This application belongs to the field of developing technology, and more specifically, relates to an automatic low-temperature developing apparatus. Background Technology

[0002] Electron beam lithography is a technique that uses an electron beam to directly draw or project patterns onto a semiconductor sample coated with photoresist. A developing solution dissolves the electron beam photoresist on the semiconductor sample surface. Because the solubility of the photoresist after exposure and before exposure in the developing solution differs, the photoresist pattern is retained on the semiconductor sample surface. By using a developing solution below room temperature (typically in the range of -20°C to 10°C) and increasing the exposure dose, the contrast of the photoresist can be effectively improved, resulting in smaller linewidths and steeper sidewalls, leading to better development results.

[0003] In conventional low-temperature developing processes, the developing operation is performed manually. The developing temperature and time are prone to fluctuations due to manual operation. If the sample is directly exposed to air after developing, it will inevitably warm up. Because the temperature of the developed sample is low, water vapor in the air will quickly adhere to the surface of the sample. The developer residue on the sample surface can still develop the sample after mixing with water. During the fixing operation, water vapor in the air will also adhere to the surface of the sample. The fixer solution mixed with water also has a developing function, causing the sample to continue developing after fixing. This results in increased roughness of the image edges and reduced developing effect.

[0004] An existing developing apparatus includes: a lifting mechanism, a flipping mechanism that moves along the lifting mechanism, a gripping mechanism controlled by the flipping mechanism and holding a wafer, and a developing tank that forms at least a partial accommodating space for the gripping mechanism; after the gripping mechanism loads the wafer, it flips to face the developing tank and moves downward under the guidance of the lifting mechanism to move the wafer as a whole into the developing chamber of the developing tank to perform the developing process, and keeps the wafer separated from the bottom of the developing tank during the developing process, so as to achieve rapid wafer loading and unloading and maintain the uniformity of wafer development.

[0005] The aforementioned technologies have the following drawbacks:

[0006] Similar to the conventionally designed developing apparatus described above, the temperature of the developing solution cannot be controlled, making it difficult to maintain the solubility characteristics of the electron beam resist under conditions below room temperature. The apparatus is used for developing in a non-sealed environment. After the developing sample is taken out of the developing tank, it is exposed to the air. Water vapor in the air will adhere to the surface of the developing sample and affect the developing effect. Therefore, there are technical problems such as uncontrollable developing solution temperature and poor developing effect. Summary of the Invention

[0007] The purpose of this application is to provide an automatic low-temperature developing apparatus to solve the technical problems of uncontrollable developer temperature and poor developing effect in common automatic low-temperature developing apparatuses.

[0008] To achieve the above objectives, the technical solution adopted in this application is:

[0009] An automatic low-temperature developing apparatus is provided, comprising:

[0010] The developing chamber is used to isolate the developing environment of the sample.

[0011] The developing mechanism includes a developing container for holding developer and a first temperature control component for controlling the temperature of the developer, the first temperature control component being mounted on the developing container and the developing container being mounted inside the developing chamber.

[0012] The conveyor mechanism is used to transfer the developing sample into the developing container. The conveyor mechanism is installed inside the developing chamber.

[0013] By setting up a conveyor mechanism and a developing container to work together, the developing operation of the sample can be automated, reducing errors caused by manual operation and making the developing process of the sample more precise and controllable. The developing chamber can keep the developing environment of the sample isolated from the outside world to ensure that water vapor in the air cannot affect the sample. The first temperature control component can adjust the temperature of the developing solution to ensure the chemical properties of the developing solution under conditions below room temperature, thereby improving the developing effect of the sample.

[0014] In one feasible technical solution of this application, the developing container includes a shell, a first container for holding oil bath liquid and a second container for holding developing liquid, the first container being installed inside the shell and the second container being installed inside the first container.

[0015] By employing the above-mentioned technical means, the temperature of the developer can be adjusted to below room temperature relatively quickly and maintained.

[0016] In one feasible technical solution of this application, a cavity is formed between the housing and the first receiving box, the cavity is used to accommodate the first temperature control component, and the housing is also provided with a first opening for placing the developing sample, the first opening communicating with the opening of the second receiving box.

[0017] By employing the above-mentioned technical means, the heat exchange between the developer and the outside environment can be reduced, thereby improving the heat preservation performance of the developing container.

[0018] In one feasible technical solution of this application, the automatic low-temperature developing apparatus further includes a ventilation mechanism, which is used to replace the gas in the developing chamber with nitrogen gas, and the ventilation mechanism is connected to the developing chamber.

[0019] By employing the above-mentioned technical means, the contact between air and developer can be reduced, thereby ensuring the stability of the developer.

[0020] In one feasible technical solution of this application, the automatic low-temperature developing device further includes a sample changing chamber connected to the developing chamber. The sample changing chamber is installed on the developing chamber and is connected to the air exchange mechanism. The sample changing chamber is provided with a feed port for placing developing samples.

[0021] By employing the above-mentioned technical means, the amount of air mixed into the developing solution during the sample changing process can be reduced, thus ensuring the chemical properties of the developing solution.

[0022] In one feasible technical solution of this application, the automatic low-temperature developing apparatus further includes a sample delivery component for conveying the developing sample from the sample changing chamber to the developing chamber. The sample delivery component includes a tray, a push rod connected to the tray, and an isolation plate for separating the developing chamber from the sample changing chamber. The tray is slidably installed in the sample changing chamber, the end of the push rod away from the tray slides out of the sample changing chamber, and the isolation plate is installed at the end of the tray near the developing chamber.

[0023] By employing the above-mentioned technical means, the developing sample can be isolated from the outside world during the process of being transported from the sample exchange chamber to the developing chamber, thereby further ensuring the chemical properties of the developing solution.

[0024] In one feasible technical solution of this application, the developing chamber is provided with a first air inlet connected to the ventilation mechanism and a first air outlet communicating with the inner cavity of the developing chamber, and the sample changing chamber is provided with a second air inlet connected to the ventilation mechanism and a second air outlet communicating with the inner cavity of the sample changing chamber.

[0025] By employing the above-mentioned technical means, the gas in the developing chamber and the sample changing chamber can be quickly replaced with nitrogen.

[0026] In one feasible technical solution of this application, the conveying mechanism includes an electric gripper, a first drive assembly for driving the electric gripper to rise and fall, and a second drive assembly for driving the first drive assembly to translate. The second drive assembly is installed on the top of the developing chamber, and the power output end of the second drive assembly is connected to the first drive assembly, and the power output end of the first drive assembly is connected to the electric gripper.

[0027] By employing the above-mentioned technical means, it is possible to easily and conveniently transport developing samples to the developing facility for developing.

[0028] In one feasible technical solution of this application, the second driving component includes a first driving structure for driving the first driving component to move along the length direction of the developing chamber and a second driving structure for driving the first driving structure to move along the width direction of the developing chamber. The second driving structure is connected to the developing chamber, the power output end of the second driving structure is connected to the first driving structure, and the power output end of the first driving structure is connected to the first driving component.

[0029] By adopting the above-mentioned technical means, the range of movement of the developing sample in the developing chamber can be expanded to meet the requirements of more developing conditions.

[0030] In one feasible technical solution of this application, the automatic low-temperature developing apparatus further includes a fixing mechanism for fixing the developed sample. The fixing mechanism includes a fixing container for holding the fixing solution and a second temperature control component for controlling the temperature of the fixing solution. The fixing container is located inside the developing chamber, and the second temperature control component is installed on the fixing container.

[0031] By adopting the above-mentioned technical means, the development and fixing of the sample can be completed in one integrated manner in the developing chamber, thus enriching the functionality of this device. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the structure of the automatic low-temperature developing apparatus provided in the embodiments of this application.

[0034] Figure 2 This is a schematic diagram of the internal structure of the developing chamber in an embodiment of this application.

[0035] Figure 3 This is a side cross-sectional view of the developing mechanism in an embodiment of this application.

[0036] Figure 4 This is a top cross-sectional view of the developing mechanism in an embodiment of this application.

[0037] Figure 5 This is a front view of the internal structure of the developing chamber in an embodiment of this application.

[0038] Figure 6 This is a top view of the internal structure of the developing chamber in an embodiment of this application.

[0039] The following are the labeling elements in the figure:

[0040] 10. Developing chamber;

[0041] 20. Developing mechanism; 21. Developing container; 211. First housing box; 212. Second housing box; 213. Housing; 214. Chamber; 215. First opening; 22. First temperature control component; 221. First semiconductor chip; 222. First control board; 223. Water-cooled plate; 224. Water pipe; 225. Temperature sensor;

[0042] 30. Conveying mechanism; 31. First drive assembly; 32. Second drive assembly; 321. First drive structure; 322. Second drive structure; 33. Electric gripper; 34. Air nozzle;

[0043] 40. Sample changing compartment; 41. Feed inlet; 42. Cover plate;

[0044] 50. Sample delivery assembly; 51. Tray; 511. Display stand; 52. Push rod; 53. Partition plate;

[0045] 60. First air inlet; 61. First air outlet; 62. Second air inlet; 63. Second air outlet;

[0046] 70. Fixing mechanism; 71. Fixing container; 711. Second opening; 712. Second control panel. Detailed Implementation

[0047] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0048] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0049] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0050] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. Throughout the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0051] Please also refer to Figure 1 and Figure 2 The automatic low-temperature developing apparatus provided in the embodiments of this application will now be described. The automatic low-temperature developing apparatus includes a developing chamber 10, a developing mechanism 20, and a conveying mechanism 30. The developing chamber 10 is used to isolate the developing environment of the developing sample. The developing mechanism 20 includes a developing container 21 and a first temperature control component 22. The developing container 21 is used to hold the developing solution, and the first temperature control component 22 is used to control the temperature of the developing solution. The first temperature control component 22 is installed on the developing container 21, and the developing container 21 is installed inside the developing chamber 10. The conveying mechanism 30 is used to transfer the developing sample into the developing container 21, and the conveying mechanism 30 is installed inside the developing chamber 10. By setting up the conveying mechanism 30 and the developing container 21 to work together, the developing operation of the sample can be carried out mechanically and automatically, reducing the error caused by manual operation and making the developing process of the sample more precise and controllable. The developing chamber 10 can keep the developing environment of the sample isolated from the outside world. Under the condition that the temperature of the developing solution is below room temperature, it can prevent water vapor in the air from condensing and entering the developing solution, making the ratio of the developing solution more stable. After the developing is completed, it can be ensured that the developing solution remaining on the surface of the sample will not mix with water vapor in the air, thereby improving the developing quality. The first temperature control component 22 can control the temperature of the developing solution to be below room temperature, ensuring the chemical properties of the developing solution under the condition below room temperature, thereby improving the developing effect of the sample.

[0052] In one embodiment of this application, please refer to Figure 3 and Figure 4 The developing container 21 includes a first container 211, a second container 212, and a housing 213. The first container 211 holds the oil bath solution, and the second container 212 holds the developing solution. The first container 211 is installed inside the housing 213, and the second container 212 is installed inside the first container 211. This allows the oil bath solution to absorb heat from the developing solution, efficiently adjusting the temperature of the developing solution to below room temperature. The second container 212 continuously conducts heat with the oil bath solution to maintain the temperature of the developing solution.

[0053] Optionally, in this embodiment, the oil bath liquid is a non-volatile liquid with a low curing temperature and good thermal conductivity, such as silicone oil. The oil bath liquid immerses part of the outer wall of the second container 212, and the height of the oil bath liquid is not lower than the height of the developing liquid. This ensures more sufficient heat exchange between the oil bath liquid and the second container 212, reduces temperature differences in different parts of the developing liquid, and makes the developing effect of the sample more uniform.

[0054] Optionally, in this embodiment, an ultrasonic generator (not shown) is provided inside the first receiving box 211, and the ultrasonic generator is immersed in an oil bath. This enables ultrasonic imaging function, thereby improving the functionality of the device.

[0055] In one embodiment of this application, please refer to Figure 3 and Figure 4 A chamber 214 is formed between the shell 213 and the first receiving box 211. The chamber 214 is used to accommodate the first temperature control component 22. The chamber 214 is a sealed environment. The shell 213 is also provided with a first opening 215 for placing the developing sample. The first opening 215 communicates with the opening of the second receiving box 212. This forms a multi-layer heat insulation structure inside the developing container 21, thereby reducing heat exchange between the developing solution inside the developing container 21 and the outside of the developing container 21 and enhancing the heat insulation effect of the developing container 21.

[0056] In one embodiment of this application, please refer to Figure 1 and Figure 3 The first temperature control component 22 includes a first semiconductor chip 221 and a first control board 222. The first semiconductor chip 221 is used to control the temperature of the oil bath liquid, and the first control board 222 is used to control the first semiconductor chip 221. The first semiconductor chip 221 is attached to the outside of the first receiving box 211 and is electrically connected to the first control board 222. The first control board 222 is mounted on the outer shell of the developing chamber 10. This allows for convenient adjustment of the temperature of the developing solution in the developing container 21 to the set temperature, accurately controlling the developing time and developing temperature to improve the developing effect.

[0057] Optionally, in this embodiment, the first temperature control component 22 further includes a water-cooled plate 223. The water-cooled plate 223 is used to cool and dissipate heat from the first semiconductor chip 221. The water-cooled plate 223 is attached to the side of the first semiconductor chip 221 away from the first housing 211. The water-cooled plate 223 and the first semiconductor chip 221 are sandwiched between the housing 213 and the first housing 211. A water pipe 224 is connected to the end of the water-cooled plate 223. The water pipe 224 passes through the housing 213 and the developing chamber 10 and is connected to the water tank. This allows for simple and convenient cooling of the first semiconductor chip 221, preventing the temperature of the first semiconductor chip 221 from becoming too high and ensuring the stability of the device during normal operation.

[0058] Optionally, in this embodiment, the first temperature control component 22 further includes a temperature sensor 225, which is used to test the temperature of the developer solution. The temperature sensor 225 is installed on the second container 212 and is electrically connected to the first control board 222. This allows for real-time monitoring of the temperature of the developer solution in the second container 212, facilitating timely adjustment of the developing temperature by the operator.

[0059] In one embodiment of this application, please refer to Figure 1 and Figure 2 The automatic low-temperature developing apparatus also includes a ventilation mechanism (not shown), which replaces the gas in the developing chamber 10 with nitrogen gas. The ventilation mechanism is connected to the developing chamber 10. This allows the developing chamber 10 to form a nitrogen atmosphere, reducing the influence of water vapor in the air on the developer solution ratio, thereby ensuring the stability of the developer solution.

[0060] Optionally, in this embodiment, the ventilation mechanism can be a nitrogen source. This ensures that the gas in the developing chamber 10 does not react with the developing solution, thereby guaranteeing the chemical properties of the developing solution.

[0061] In one embodiment of this application, please refer to Figure 1 and Figure 2 The automatic low-temperature developing apparatus also includes a sample changing chamber 40, which is connected to the developing chamber 10 and installed on the developing chamber 10. The sample changing chamber 40 is connected to the ventilation mechanism and has an inlet 41 for placing developing samples. This prevents air from entering the developing chamber 10 during the sample changing process, further ensuring the chemical properties of the developing solution.

[0062] Optionally, in this embodiment, the sample changing chamber 40 is further provided with a cover plate 42 for sealing the feed inlet 41, and the cover plate 42 is hinged to the developing chamber 10. This isolates the sample changing chamber 40 from the outside world, so as to replace the gas in the sample changing chamber 40 with nitrogen.

[0063] In one embodiment of this application, please refer to Figure 1 and Figure 2The automatic low-temperature developing apparatus also includes a sample delivery assembly 50, which is used to transport the developing sample from the sample exchange chamber 40 to the developing chamber 10. The sample delivery assembly 50 includes a tray 51, a push rod 52, and a partition plate 53. The push rod 52 is connected to the end of the tray 51 away from the developing chamber 10. The partition plate 53 is used to separate the developing chamber 10 from the sample exchange chamber 40. The tray 51 is slidably installed inside the sample exchange chamber 40. The sample exchange chamber 40 has a through hole on the side away from the developing chamber 10. The middle part of the push rod 52 is inserted into the through hole. The end of the push rod 52 away from the tray 51 slides out of the sample exchange chamber 40. There are two push rods 52, and a handle is connected between the two push rods 52. The partition plate 53 is installed at the end of the tray 51 near the developing chamber 10. In this way, the sample delivery assembly 50 can be driven from outside the sample exchange chamber 40, so that the developing sample can be easily and conveniently delivered from the sample exchange chamber 40 into the developing chamber 10.

[0064] Optionally, the developing chamber 10 has a first inlet on one side, and the sample exchange chamber 40 has a second inlet corresponding to the first inlet. The first inlet and the second inlet are connected. A partition plate 53 blocks the first inlet to separate the developing chamber 10 and the sample exchange chamber 40. This allows the developing chamber 10 to be isolated from the sample exchange chamber 40 when the tray 51 drives the partition plate 53 to move to the first inlet, and the developing sample to enter the developing chamber 10 through the first inlet when the tray 51 drives the partition plate 53 to move into the developing chamber 10. This prevents air mixed in with the sample exchange chamber 40 from entering the developing chamber 10, thus ensuring the stability of the developing solution.

[0065] Optionally, a connecting channel is provided between the first inlet and the second inlet, and the outer periphery of the isolation plate 53 is adapted to the inner wall of the isolation channel. This improves the airtightness between the first inlet and the second inlet.

[0066] Optionally, in this embodiment, a platform 511 is provided on the tray 51, and the platform 511 is located on the side of the partition plate 53 away from the developing chamber 10. This allows a gap to be left between the bottom surface of the developing sample and the surface of the tray 51, so that the conveying mechanism 30 can transport the developing sample.

[0067] In one embodiment of this application, please refer to Figure 1 and Figure 2 The developing chamber 10 is equipped with a first air inlet 60 and a first air outlet 61. The first air inlet 60 is used to supply nitrogen into the developing chamber 10, and the first air outlet 61 is used to discharge the gas inside the developing chamber 10. The sample exchange chamber 40 is equipped with a second air inlet 62 and a second air outlet 63. The second air inlet 62 is used to supply nitrogen into the sample exchange chamber 40, and the second air outlet 63 is used to discharge the gas inside the sample exchange chamber 40. The first air inlet 60 and the second air inlet 62 are respectively connected to the air exchange mechanism. This allows for the rapid replacement of the gas in the developing chamber 10 and the sample exchange chamber 40 with nitrogen.

[0068] In one embodiment of this application, please refer to Figure 5 and Figure 6 The conveying mechanism 30 includes a first drive assembly 31, a second drive assembly 32, and an electric gripper 33. The electric gripper 33 is used to grip the developing sample. The first drive assembly 31 is used to drive the electric gripper 33 to move up and down. The second drive assembly 32 is used to drive the first drive assembly 31 to move horizontally. The second drive assembly 32 is installed on the top of the developing chamber 10. The power output end of the second drive assembly 32 is connected to the first drive assembly 31, and the power output end of the first drive assembly 31 is connected to the electric gripper 33. This allows for simple and convenient transportation of the developing sample from the tray 51 to the developing mechanism 20 for developing.

[0069] Optionally, in this embodiment, the first drive component 31 is a motor-driven lead screw and nut structure, which allows for precise control of the vertical lifting height of the electric gripper 33.

[0070] Optionally, in this embodiment, the electric gripper 33 is an electric clamp, which can smoothly grip the developing sample.

[0071] In one embodiment, see Figure 5 and Figure 6 The second driving assembly 32 includes a first driving structure 321 and a second driving structure 322. The first driving structure 321 drives the first driving assembly 31 to move along the length direction of the developing chamber 10, and the second driving structure 322 drives the first driving structure 321 to move along the width direction of the developing chamber 10. The two ends of the second driving structure 322 are respectively connected to opposite side walls inside the developing chamber 10. The length direction of the second driving structure 322 is parallel to the width direction of the developing chamber 10. Two second driving structures 322 are arranged parallel to each other along the length direction of the developing chamber 10. The power output end of one of the two second driving structures 322 is connected to one end of the first driving structure 321, and the power output end of the other of the two second driving structures 322 is connected to the other end of the first driving structure 321. This expands the range of motion of the developing sample within the developing chamber 10, meeting the complex operating conditions of multiple developing mechanisms 20 within the developing chamber 10, thereby improving the versatility of the device.

[0072] Optionally, in this embodiment, the electric gripper 33 is equipped with a jet nozzle 34. When the developed sample is removed from the developing container 21 after development, developing solution remains on the surface of the developed sample. The jet nozzle 34 is used to blow away the developing solution from the surface of the developed sample, and the jet nozzle 34 is connected to the ventilation mechanism. This allows the developing solution to return to the developing container 21 more quickly, so that the developed sample can enter the next process more quickly, thereby improving the production efficiency of this device.

[0073] In one embodiment of this application, please refer to Figure 1 and Figure 2 The automatic low-temperature developing apparatus also includes a fixing mechanism 70, which is used to fix the developed sample. The fixing mechanism 70 includes a fixing container 71 and a second temperature control component. The fixing container 71 is used to hold the fixing solution and has a second opening 711 for placing the developed sample. The second temperature control component is installed on the fixing container 71 and is used to control the temperature of the fixing solution to adjust its activity and adapt to the temperature requirements of different developed samples. This allows the developed sample to complete the developing and fixing process in an environment isolated from the external environment, thus enriching the functionality of the apparatus.

[0074] Understandably, in this embodiment, the second temperature control component adopts the same structure as the first temperature control component 22. The second temperature control component is provided with a second control board 712 for controlling the second semiconductor chip. The second control board 712 is installed on the outer shell of the developing chamber 10. The installation method of the remaining components of the second temperature control component and the fixing container 71 is similar to the installation method of the first temperature control component 22 and the developing container 21, and will not be described again here.

[0075] In one embodiment of this application, please refer to Figure 1 and Figure 2 The developing mechanism 20 and the fixing mechanism 70 are arranged along the length of the developing chamber 10. There are two sample changing chambers 40, one of which is connected to the end of the developing chamber 10 near the developing mechanism 20, and the other is connected to the end of the developing chamber 10 near the fixing mechanism 70. This allows for continuous sample changing, developing, and fixing of multiple developing samples. While one developing sample is being processed and transported to a sample changing chamber 40, it does not affect the loading of another developing sample into the other sample changing chamber 40, thus increasing the production efficiency of the device.

[0076] The operation process of the automatic low-temperature developing apparatus of this application is as follows:

[0077] The first temperature control component 22 adjusts the temperature of the developing solution in the developing container 21 to below room temperature. The developing sample is placed in the developing chamber 10, and the conveying mechanism 30 conveys the developing sample to the developing container 21 for developing. After developing, the conveying mechanism 30 conveys the developing sample out of the developing container 21 and removes the developing sample from the developing chamber 10.

[0078] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An automatic low-temperature developing apparatus, characterized in that, include: The developing chamber (10) is used to isolate the developing environment of the developing sample; The developing mechanism (20) includes a developing container (21) for holding developing solution and a first temperature control component (22) for controlling the temperature of the developing solution. The first temperature control component (22) is installed on the developing container (21), and the developing container (21) is installed inside the developing chamber (10). A conveying mechanism (30) is used to transfer the developing sample to the developing container (21), and the conveying mechanism (30) is installed in the developing chamber (10); The automatic low-temperature developing device also includes a sample exchange chamber (40) connected to the developing chamber (10). The sample exchange chamber (40) is installed on the developing chamber (10) and has an inlet (41) for placing the developing sample. The automatic low-temperature developing device also includes a sample delivery assembly (50) for conveying the developing sample from the sample exchange chamber (40) to the developing chamber (10). The sample delivery assembly (50) includes a tray (51), a push rod (52) connected to the tray (51), and an isolation plate (53) for separating the developing chamber (10) from the sample exchange chamber (40). The tray (51) is slidably installed in the sample exchange chamber (40), and the end of the push rod (52) away from the tray (51) slides out of the sample exchange chamber (40). The isolation plate (53) is installed at the end of the tray (51) near the developing chamber (10).

2. The automatic low-temperature developing apparatus as described in claim 1, characterized in that: The developing container (21) includes a shell (213), a first container (211) for holding oil bath liquid and a second container (212) for holding the developing liquid. The first container (211) is installed inside the shell (213) and the second container (212) is installed inside the first container (211).

3. The automatic low-temperature developing apparatus as described in claim 2, characterized in that, A chamber (214) is formed between the housing (213) and the first container (211), the chamber (214) is used to accommodate the first temperature control component (22), and the housing (213) is also provided with a first opening (215) for placing the developing sample, the first opening (215) communicating with the opening of the second container (212).

4. The automatic low-temperature developing apparatus as described in claim 1, characterized in that: The automatic low-temperature developing device also includes a ventilation mechanism, which is used to replace the gas in the developing chamber (10) with nitrogen gas. The ventilation mechanism is connected to the developing chamber (10).

5. The automatic low-temperature developing apparatus as described in claim 4, characterized in that: The sample exchange chamber (40) is connected to the ventilation mechanism.

6. The automatic low-temperature developing apparatus as described in claim 5, characterized in that: The developing chamber (10) is provided with a first air inlet (60) connected to the ventilation mechanism and a first air outlet (61) communicating with the inner cavity of the developing chamber (10). The sample changing chamber (40) is provided with a second air inlet (62) connected to the ventilation mechanism and a second air outlet (63) communicating with the inner cavity of the sample changing chamber (40).

7. The automatic low-temperature developing apparatus as described in claim 1, characterized in that: The conveying mechanism (30) includes an electric gripper (33), a first drive assembly (31) for driving the electric gripper (33) to rise and fall, and a second drive assembly (32) for driving the first drive assembly (31) to translate. The second drive assembly (32) is installed on the top of the developing chamber (10). The power output end of the second drive assembly (32) is connected to the first drive assembly (31), and the power output end of the first drive assembly (31) is connected to the electric gripper (33).

8. The automatic low-temperature developing apparatus as described in claim 7, characterized in that: The second drive assembly (32) includes a first drive structure (321) for driving the first drive assembly (31) to move along the length direction of the developing chamber (10) and a second drive structure (322) for driving the first drive structure (321) to move along the width direction of the developing chamber (10). The second drive structure (322) is connected to the developing chamber (10), and the power output end of the second drive structure (322) is connected to the first drive structure (321). The power output end of the first drive structure (321) is connected to the first drive assembly (31).

9. The automatic low-temperature developing apparatus according to any one of claims 1 to 8, characterized in that: The automatic low-temperature developing apparatus further includes a fixing mechanism (70) for fixing the developed sample. The fixing mechanism (70) includes a fixing container (71) for holding the fixing solution and a second temperature control component for controlling the temperature of the fixing solution. The fixing container (71) is located inside the developing chamber (10), and the second temperature control component is installed on the fixing container (71).

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