A MEMS concave honeycomb disc gyroscope structure resistant to high load impact

Abstract

The present invention discloses a MEMS concave honeycomb disc-shaped gyroscope structure resistant to high-load impact, comprising a resonator and electrodes; the resonator is a concave honeycomb disc-shaped resonator with an external anchor point, its outer edge is the anchor point, and the center is a resonant ring, and the resonant ring and the anchor point are connected by a concave honeycomb topological structure; the concave honeycomb topological structure is formed by a circumferential array of concave hexagonal honeycombs, two circumferentially adjacent concave hexagonal honeycombs are staggered, and the upper base of one concave hexagonal honeycomb is located at the concave corner of the other concave hexagonal honeycomb. The gyroscope structure has excellent load impact resistance. The electrode arrangement distribution of the present invention improves the signal-to-noise ratio of the output signal of the resonator and reduces the interference of structural errors and external disturbances on the extraction of the normal vibration signal of the resonator. The present invention improves the survival rate of the MEMS gyroscope under high-load impact conditions, has high mechanical sensitivity and precision, and is suitable for weapon guidance, aerospace and other fields.

Description

Technical Field

[0001] The present invention relates to the field of MEMS gyroscopes, and in particular to a MEMS concave honeycomb disc-shaped gyroscope structure resistant to high-load impact. Background Art

[0002] A micromachined gyroscope (GMG) utilizes microelectromechanical systems (MEMS) technology and the Coriolis effect to detect the angular velocity of the gyro carrier. Compared to traditional mechanical and optical gyroscopes, GMGs offer advantages such as small size, light weight, low cost, low power consumption, high reliability, and high production volumes. With the advancement of MEMS technology, GMG technology has also made significant progress and is widely used in both civilian and military applications.

[0003] MEMS disc gyros, derived from hemispherical resonator gyros, inherit the hemispherical resonator gyroscope's structural symmetry, high precision, wide dynamic range, and strong overload resistance. They also offer low-cost, mass-producible performance, making them a hot topic in MEMS Coriolis gyroscope research. The weapon guidance and aerospace sectors place high demands on MEMS gyro's shock resistance, often employing buffering protection methods such as glue potting and isolation. These methods are system-level protection measures, but the gyro's structural resistance to high-load shocks is fundamental to the MEMS gyro's shock resistance. Summary of the Invention

[0004] Purpose of the invention: The present invention aims to provide a MEMS gyroscope structure with the ability to resist high-load impact.

[0005] Technical solution: The MEMS concave honeycomb disc-shaped gyroscope structure resistant to high-load impact described in the present invention includes a resonator and an electrode arranged therein; the resonator is a concave honeycomb disc-shaped resonator with an external anchor point, and the overall shape is an axially symmetrical disk. The outer edge of the resonator is the anchor point, and the center of the resonator is a circle of circular resonant rings. The resonant rings and the anchor point are connected by a concave honeycomb topological structure; the concave honeycomb topological structure is formed by a circumferential array of concave hexagonal honeycombs, and two circumferentially adjacent concave hexagonal honeycombs are staggered, and the upper base of one concave hexagonal honeycomb is located at the concave corner of the other concave hexagonal honeycomb.

[0006] Preferably, the concave angle of the concave hexagonal honeycomb is 90°, and the sides of the concave angles on both sides are equal in length. The upper and lower bases of the concave hexagonal honeycomb are arcs concentric with the resonant ring, and the arc length of the upper base is greater than that of the lower base. The concave hexagonal honeycombs distributed circumferentially are of the same size, and the concave hexagonal honeycombs distributed radially are of the same height.

[0007] Furthermore, the electrodes include an excitation electrode for exciting the resonator to generate vibration, a detection electrode for sensing the vibration displacement of the resonator, an orthogonal correction electrode for suppressing structural stiffness coupling error, and a tuning electrode for adjusting the modal resonance frequency.

[0008] Preferably, the concave honeycomb topology structure comprises a working area and a correction area alternately distributed along the circumference, the excitation electrode, the detection electrode and the tuning electrode are located in the working area, and the orthogonal correction electrode is located in the correction area.

[0009] Preferably, the working area includes, from the resonant ring outward, a first semi-concave hexagonal honeycomb, a first concave hexagonal honeycomb, a second concave hexagonal honeycomb, and a second semi-concave hexagonal honeycomb; and the correction area is composed of three concave hexagonal honeycombs.

[0010] Preferably, the detection electrode is located on the inner side of the resonant ring and in the first concave hexagonal honeycomb and close to the upper bottom edge; the excitation electrode and the detection electrode are arranged in pairs, and the excitation electrode is located in the first half of the concave hexagonal honeycomb and the second half of the concave hexagonal honeycomb and close to the lower bottom edge; the tuning electrode is located in the second half of the concave hexagonal honeycomb and close to the lower bottom edge; the orthogonal correction electrode is located in the outermost circle of the concave hexagonal honeycomb and close to the lower bottom edge.

[0011] Furthermore, the excitation electrodes include first-mode forward / reverse excitation electrodes and second-mode forward / reverse excitation electrodes, and the detection electrodes include first-mode forward / reverse detection electrodes and second-mode forward / reverse detection electrodes; the circumferential angle difference between the forward and reverse excitation electrodes is 90°, and the excitation electrodes and detection electrodes in the same working area are in the same direction and have the same working mode; the above-mentioned excitation electrodes and detection electrodes are differential electrodes, and the differential electrodes are composed of forward and reverse excitation electrodes or detection electrodes under the same working mode, and the circumferential angle difference between the differential excitation electrodes of the first mode and the differential excitation electrodes of the second mode is 45°.

[0012] Furthermore, the first modal excitation electrode, the second modal excitation electrode, the first modal detection electrode and the second modal detection electrode form a fully differential excitation and detection mode.

[0013] Preferably, the circumferential angle difference between the orthogonal correction electrode and the adjacent detection electrode is 22.5°, and the circumferential angle difference between the tuning electrode and the adjacent orthogonal correction electrode is 22.5°.

[0014] Furthermore, the working vibration mode of the concave honeycomb disc-shaped gyroscope structure is a four-antinode vibration mode.

[0015] Beneficial effects: Compared with the prior art, the present invention has the following significant advantages: 1. The gyro structure is composed of a concave honeycomb topology structure with negative Poisson's ratio characteristics, and the overall shape is an axisymmetric disk, which has excellent load impact resistance; 2. The fully differential excitation and detection mode improves the signal-to-noise ratio of the output signal of the resonator, and reduces the interference of structural errors and external disturbances on the extraction of normal vibration signals of the resonator; 2. The gyro structure of the present invention is combined with the fully differential excitation and detection mode electrode setting, which can work in a modal frequency matching state, has high mechanical sensitivity and precision, and can broaden the application field of MEMS gyroscopes. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the structure of the resonator of the present invention;

[0017] Figure 2 It is a structural diagram of a concave hexagonal honeycomb;

[0018] Figure 3 It is a structural schematic diagram of the present invention;

[0019] Figure 4 Schematic diagram of the first working mode vibration shape of the concave honeycomb disk resonator in an embodiment of the present invention;

[0020] Figure 5 Schematic diagram of the second working mode vibration shape of the concave honeycomb disk resonator in an embodiment of the present invention;

[0021] Figure 6 Schematic diagram of in-plane impact simulation of a concave honeycomb disc-shaped gyroscope structure in an embodiment of the present invention; (a) is stress distribution and (b) is displacement;

[0022] Figure 7 Schematic diagram of out-of-plane impact simulation of the concave honeycomb disc-shaped gyroscope structure in an embodiment of the present invention; (a) is the stress distribution and (b) is the displacement. DETAILED DESCRIPTION

[0023] The present invention will be further described below with reference to the accompanying drawings.

[0024] Figure 1 This is a schematic diagram of the concave honeycomb disc gyroscope structure of the present invention. The concave honeycomb disc gyroscope structure consists of a concave honeycomb resonator disc resonator 1 with an external anchor point and electrodes evenly distributed around the inner and outer circumferences. The electrodes evenly distributed around the inner and outer circumferences are located within the concave honeycomb resonator disc resonator 1 with an external anchor point.

[0025] The disc-shaped resonator 1 with an external anchor point is composed of a concave honeycomb topology structure 11, an external anchor point 12, and an innermost circular resonant ring 13, and the overall shape is an axisymmetric disc. The structure connecting the external anchor point 12 and the circular resonant ring 13 is a concave honeycomb topology structure 11 that is periodically distributed in the circumferential direction. The concave honeycomb topology structure 11 is composed of a circumferential array of concave hexagonal honeycombs 113. Two circumferentially adjacent concave hexagonal honeycombs are staggered, and the upper base of one concave hexagonal honeycomb is located at the concave corner of the other concave hexagonal honeycomb. The circumferentially distributed concave hexagonal honeycombs are of the same size, and the radially distributed concave hexagonal honeycombs are of the same height.

[0026] Figure 2 Schematic diagram of the structure of the concave hexagonal honeycomb 113. The concave honeycomb topology is a hexagonal structure with two concave sides, a 90° concave angle, and equal sides. The upper base 1131 and lower base 1132 of the concave hexagonal honeycomb are arcs concentric with the resonant ring, and the arc length of the upper base is greater than that of the lower base.

[0027] Depend on Figure 3 It can be seen that the concave honeycomb topology structure 11 includes 8 working areas 111 and 8 correction areas 112 that are alternately and evenly distributed along the circumference; the working area 111 includes the first half concave hexagonal honeycomb, the first concave hexagonal honeycomb, the second concave hexagonal honeycomb and the second half concave hexagonal honeycomb from the resonant ring outward; the correction area 112 is 3 concave hexagonal honeycombs.

[0028] The electrodes arranged in the resonator 1 include an excitation electrode for exciting the resonator to generate vibration, a detection electrode for sensing the vibration displacement of the resonator, an orthogonal correction electrode for suppressing the structural stiffness coupling error, and a tuning electrode for adjusting the modal resonance frequency.

[0029] The excitation electrodes, detection electrodes, and tuning electrodes are located in the working area 111, and the orthogonal correction electrodes are located in the correction area 112. The detection electrodes are located inside the resonant ring and inside the first concave hexagonal honeycomb, close to the upper base. The excitation electrodes and detection electrodes are arranged in pairs, with the excitation electrodes located in the first half of the concave hexagonal honeycomb and the second half of the concave hexagonal honeycomb, close to the lower base. The tuning electrodes are located in the second half of the concave hexagonal honeycomb, close to the lower base. The orthogonal correction electrodes are located in the outermost concave hexagonal honeycomb, close to the lower base.

[0030] The excitation electrodes include a first-mode forward excitation electrode 201, a first-mode reverse excitation electrode 203, a second-mode forward excitation electrode 205, and a second-mode reverse excitation electrode 207. The detection electrodes include a first-mode forward detection electrode 202, a first-mode reverse detection electrode 204, a second-mode forward detection electrode 206, and a second-mode reverse detection electrode 208. There are two electrodes of each type, and the circumferential angle difference between the same electrodes is 180°.

[0031] The first mode forward excitation electrode 201 and the first mode reverse excitation electrode 203 are differential excitation electrodes for the first mode of the resonator, and the second mode forward excitation electrode 205 and the second mode reverse excitation electrode 207 are differential excitation electrodes for the second mode of the resonator. The circumferential angle difference between the differential excitation electrodes for the first mode and the differential excitation electrodes for the second mode is 45°. The circumferential angle difference between the forward and reverse excitation electrodes is 90°.

[0032] The first-mode forward detection electrode 202 and the first-mode reverse detection electrode 204 serve as differential detection electrodes for the first mode of the resonator. The second-mode forward detection electrode 206 and the second-mode reverse detection electrode 208 serve as differential detection electrodes for the second mode of the resonator. The circumferential angle difference between the differential detection electrodes for the first mode and the differential detection electrodes for the second mode is 45°. The circumferential angle difference between the forward and reverse detection electrodes is 90°. These excitation electrodes and detection electrodes constitute a fully differential excitation and detection mode.

[0033] The orthogonal correction electrodes used to suppress structural stiffness coupling errors include a first orthogonal correction electrode 211 and a second orthogonal correction electrode 212. The first orthogonal correction electrode 211 is located in the correction zone between the working areas of the first modal reverse detection electrode 204 and the second modal reverse detection electrode 208, or between the working areas of the first modal forward detection electrode 202 and the second modal forward detection electrode 206. The second orthogonal correction electrode 212 is located in the correction zone between the working areas of the second modal reverse detection electrode 208 and the first modal forward detection electrode 202, or between the working areas of the second modal forward detection electrode 206 and the first modal reverse detection electrode 204. The circumferential angular difference between the orthogonal correction electrodes and adjacent detection electrodes is 22.5°.

[0034] The tuning electrodes used to adjust the modal resonant frequency include a first modal tuning electrode 210 and a second modal tuning electrode 209. The first modal tuning electrode 210 is located in the outermost concave hexagonal honeycomb of the working area where the first modal excitation / detection electrode resides, close to the bottom edge. The second modal tuning electrode 209 is located in the outermost concave hexagonal honeycomb of the working area where the second modal excitation / detection electrode resides, close to the bottom edge. The circumferential angular difference between the tuning electrodes and the orthogonal correction electrode is 22.5°.

[0035] Through the above electrode configuration, the working vibration mode of the concave honeycomb disc gyroscope structure is a four-antinode vibration mode. The vibration mode diagrams of the first mode and the second mode are shown in FIG. Figure 4 and Figure 5 shown.

[0036] Figure 6 and Figure 7 This is a schematic diagram of the in-plane and out-of-plane impact simulation of the concave honeycomb disc structure. The simulation load is 50,000g. The simulation results show that the maximum stress of the concave honeycomb disc gyroscope structure is less than 300 MPa and the maximum displacement is less than 8 μm, indicating that the concave honeycomb disc gyroscope structure has a high ability to resist load impact.

Claims

1. A MEMS concave honeycomb disc gyroscope structure resistant to high load impact, characterized in that: The invention comprises a resonator (1) and an electrode arranged therein; the resonator (1) is a concave honeycomb disk resonator with an external anchor point, and is in the shape of an axisymmetric disk as a whole; the outer edge of the resonator (1) is the anchor point (12), and the center of the resonator is a circle of circular resonant rings (13); the resonant rings (13) and the anchor point (12) are connected by a concave honeycomb topological structure (11); the concave honeycomb topological structure (11) is formed by a circumferential array of concave hexagonal honeycombs (113), and two circumferentially adjacent concave hexagonal honeycombs are staggered, and the upper base of one concave hexagonal honeycomb is located at the concave corner of the other concave hexagonal honeycomb; The concave honeycomb topology structure (11) includes a working area (111) and a correction area (112) alternately distributed along the circumference, the excitation electrode, the detection electrode and the tuning electrode are located in the working area (111), and the orthogonal correction electrode is located in the correction area (112); The excitation electrodes include first-mode forward / reverse excitation electrodes and second-mode forward / reverse excitation electrodes, and the detection electrodes include first-mode forward / reverse detection electrodes and second-mode forward / reverse detection electrodes; the circumferential angle difference between the forward and reverse excitation electrodes is 90°, and the excitation electrodes and detection electrodes in the same working area are in the same direction and have the same working mode; the above-mentioned excitation electrodes and detection electrodes are differential electrodes, and the differential electrodes are composed of forward and reverse excitation electrodes or detection electrodes under the same working mode, and the circumferential angle difference between the differential excitation electrodes of the first mode and the differential excitation electrodes of the second mode is 45°.

2. The MEMS concave honeycomb disc-shaped gyroscope structure resistant to high load impact according to claim 1, characterized in that: The concave angle of the concave hexagonal honeycomb (113) is 90°, and the sides of the concave angles on both sides are equal in length; the upper base (1131) and the lower base (1132) of the concave hexagonal honeycomb are arcs concentric with the resonant ring, and the arc length of the upper base is greater than that of the lower base; the concave hexagonal honeycombs distributed circumferentially have the same size, and the concave hexagonal honeycombs distributed radially have the same height.

3. The MEMS concave honeycomb disc-shaped gyroscope structure resistant to high load impact according to claim 2, characterized in that: The electrodes include an excitation electrode for exciting the resonator to generate vibration, a detection electrode for sensing the vibration displacement of the resonator, an orthogonal correction electrode for suppressing structural stiffness coupling error, and a tuning electrode for adjusting the modal resonance frequency.

4. The MEMS concave honeycomb disc-shaped gyroscope structure resistant to high load impact according to claim 3, characterized in that: The working area (111) includes, from the resonant ring outward, a first semi-concave hexagonal honeycomb, a first concave hexagonal honeycomb, a second concave hexagonal honeycomb, and a second semi-concave hexagonal honeycomb; the correction area (112) is three concave hexagonal honeycombs.

5. The MEMS concave honeycomb disc-shaped gyroscope structure resistant to high load impact according to claim 4, characterized in that: The detection electrode is located on the inner side of the resonant ring and in the first concave hexagonal honeycomb, close to the upper bottom edge; the excitation electrode and the detection electrode are arranged in pairs, and the excitation electrode is located in the first half of the concave hexagonal honeycomb and the second half of the concave hexagonal honeycomb, close to the lower bottom edge; the tuning electrode is located in the second half of the concave hexagonal honeycomb, close to the lower bottom edge; the orthogonal correction electrode is located in the outermost circle of the concave hexagonal honeycomb, close to the lower bottom edge.

6. The MEMS concave honeycomb disc-shaped gyroscope structure resistant to high load impact according to claim 5, characterized in that: The first modal excitation electrode, the second modal excitation electrode, the first modal detection electrode and the second modal detection electrode form a fully differential excitation and detection mode.

7. The MEMS concave honeycomb disc-shaped gyroscope structure resistant to high load impact according to claim 6, characterized in that: The circumferential angle difference between the orthogonal correction electrode and the adjacent detection electrode is 22.5°, and the circumferential angle difference between the tuning electrode and the adjacent orthogonal correction electrode is 22.5°.

8. The MEMS concave honeycomb disc-shaped gyroscope structure resistant to high load impact according to any one of claims 1 to 7, characterized in that: The working vibration mode of the concave honeycomb disc-shaped gyroscope structure is a four-antinode vibration mode.

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