Laser scanning repair system and method

Abstract

The present application provides a laser scanning repair system and method, which includes: a laser emitting unit, a first focusing unit, a galvanometer unit, a work surface, and a terminal unit; the laser emitting unit is configured to emit a laser beam of a fixed wavelength; the first focusing unit is configured to focus the laser beam emitted by the laser emitting unit; the galvanometer unit is configured to adjust the position at which the laser beam is incident on the work surface; the work surface is configured to place a display panel; the terminal unit is configured to divide the display panel into multiple sub-areas based on the work surface, determine the defect location in each sub-area, control the laser emitting unit to emit the laser beam, and control the galvanometer unit to irradiate the laser beam to the defect location to repair the defect. This forms a smaller and more stable work spot, which makes defect repair more accurate.

Description

Technical Field

[0001] The present application relates to the field of laser repair technology, and in particular to a laser scanning repair system and method. Background Art

[0002] In recent years, with the rapid development of new technologies such as materials, microelectronics, and semiconductor manufacturing and applications, the flat panel display industry has emerged. In particular, OLED has attracted increasing attention due to its advantages such as low power consumption, wide viewing angle, active luminescence, and flexible manufacturing.

[0003] However, the complex manufacturing process inevitably leads to product defects, such as bright spots on the screen and short circuits in signal electrodes. Laser repair of bright spots on screens involves irradiating the luminescent material in the luminescent layer with a laser of a fixed wavelength, causing the material to fail and thus eliminating the bright spots. Laser repair of signal electrode short circuits involves cutting the shorted circuit with a laser, thereby resolving the short circuit.

[0004] In the process of laser repair in related technologies, the spot size may be too large to effectively repair the bright spots or lines on the screen. At the same time, the formed laser spot is degraded and cannot form an effective repair spot. Summary of the Invention

[0005] In view of this, the purpose of this application is to provide a laser scanning repair system and method.

[0006] Based on the above purpose, the first aspect of the present application provides a laser scanning repair system, characterized in that it includes: a laser emitting unit, a first focusing unit, a galvanometer unit, a working surface and a terminal unit;

[0007] The laser emitting unit is configured to emit a laser beam of a fixed wavelength;

[0008] The first focusing unit is configured to focus the laser beam emitted by the laser emitting unit;

[0009] The galvanometer unit is configured to adjust the position at which the laser beam is incident on the working surface;

[0010] The working surface is configured to place a display panel;

[0011] The terminal unit is configured to divide the display panel into multiple sub-areas based on the working surface, establish a coordinate system for the working surface, and establish a mapping coordinate system of the coordinate system in the sub-areas covering the working surface, determine the coordinate position or coordinate interval of the defect position in the mapping coordinate system, control the laser emitting unit to emit a laser beam, and control the galvanometer unit to make the laser beam irradiate the coordinate position or coordinate interval to repair the defect.

[0012] Optionally, the terminal unit is further configured to establish a coordinate system for the working surface; and establish a mapping coordinate system of the coordinate system in a sub-area covering the working surface, and determine the coordinate position or coordinate interval of the defect position in the mapping coordinate system.

[0013] Optionally, the laser scanning repair system further includes a relay lens group, the relay lens group includes a first lens and a second lens, the first lens and the second lens are arranged in parallel along the propagation direction of the laser beam;

[0014] The focal length of the second lens is greater than the focal length of the first lens, and the first lens is used to process the laser beam to form a stable laser beam;

[0015] The second lens is used to limit the divergence angle of the stabilized laser beam.

[0016] Optionally, the galvanometer unit is disposed between the first focusing unit and the relay lens group, the galvanometer unit includes a first reflecting mirror and a second reflecting mirror, and the first reflecting mirror deflects the laser beam passing through the first focusing unit in a first direction;

[0017] The second reflecting mirror deflects the laser beam passing through the first focusing unit in a second direction; wherein the first direction is perpendicular to the second direction.

[0018] Optionally, a second focusing unit is provided between the relay lens group and the working surface, and the second focusing unit focuses the stable laser beam formed by the relay lens group to form an operating light spot.

[0019] Optionally, the first focusing unit is detachably connected to an adjustment mechanism, which is used to adjust the distance between the focusing unit and the galvanometer unit so that the energy of the laser beam passing through the first focusing unit is not greater than the tolerance limit of the galvanometer unit 3; and to adjust the focal position of the first focusing unit.

[0020] Optionally, the first reflector and the second reflector of the galvanometer unit are located between the first focusing unit and the focus of the first focusing unit.

[0021] Optionally, a first distance is set between the focus of the second focusing unit and the plane where the working surface is located.

[0022] Optionally, the first reflector is configured to have a deflection angle no greater than a first angle, and the second reflector is configured to have a deflection angle no greater than a second angle, wherein the first angle and the second angle control the deflection of the laser beam within the range of the working surface.

[0023] Optionally, the laser beam entrance of the second focusing unit is not smaller than the deflection range of the stabilized laser beam controlled by the first angle and the second angle.

[0024] A second aspect of the present application provides a laser scanning repair method, which uses the laser scanning repair system described in the first aspect, including:

[0025] Providing a display panel to be repaired, and dividing the display panel to be repaired into a plurality of sub-areas based on the working surface;

[0026] Determine the defect location in any sub-region, and place the sub-region where the defect location is located to cover the working surface;

[0027] establishing a coordinate system for the working surface;

[0028] Establishing a mapping coordinate system of the coordinate system in a sub-area covering the working surface, and determining the coordinate position or coordinate interval of the defect position in the mapping coordinate system;

[0029] The laser emitting unit is controlled to emit laser light, and the angle of the laser beam is adjusted so that the laser light is irradiated to the coordinate position or coordinate interval to perform laser repair on the defect.

[0030] From the above description, it can be seen that the laser scanning repair system and method provided by the present application adjust the direction of the laser beam through the galvanometer unit to achieve the aiming of the laser beam to the defect position, reducing the adjustment time, and through the relay transfer of the relay lens group, the laser beam emitted by the laser emitting unit forms a stable laser beam, so that the working spot formed on the working surface does not deteriorate. The diameter of the working spot formed by the laser scanning repair system provided by the present application is smaller and more stable, and the repair of defects is more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in this application or related technologies, the following briefly introduces the drawings required for use in the embodiments or related technical descriptions. Obviously, the drawings described below are merely embodiments of this application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0032] Figure 1 This is a schematic diagram of a laser scanning repair system according to an embodiment of the present application;

[0033] Figure 2 A schematic diagram of an operating light spot on an operating surface according to an embodiment of the present application;

[0034] Figure 3 This is a schematic diagram of the laser path of the laser scanning repair system according to an embodiment of the present application;

[0035] Figure 4 Schematic diagram of the laser scanning repair method according to an embodiment of the present application. DETAILED DESCRIPTION

[0036] In order to make the objectives, technical solutions and advantages of this application more clear, this application is further described in detail below in combination with specific embodiments and with reference to the accompanying drawings.

[0037] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present application should have the usual meanings understood by people with ordinary skills in the field to which this application belongs. The "first", "second" and similar words used in the embodiments of the present application do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0038] In existing OLED display panels, depolarizer technology is implemented by setting a color filter layer on the light-emitting side of the light-emitting functional layer. When the OLED display panel has abnormalities such as bright spots on the screen, laser repair technology is usually used to repair the abnormal bright spots. However, due to the low transmittance of the color filter layer to the laser, the yield of the laser repair is also reduced.

[0039] Among them, in the laser repair used in related technologies, the light spot formed will deteriorate, resulting in an unstable light spot profile and an inability to effectively repair the defect position, or the surrounding position of the defect will be damaged during the repair process, resulting in a low repair yield.

[0040] Among them, the luminous pattern is used to repair abnormalities such as bright spots. When the transmittance of the filter pattern to the laser is low, the yield of the laser repair is low. Therefore, there is an urgent need to provide a laser repair method that can improve the yield of laser repair.

[0041] In addition, laser repair can also repair the short-circuit problem of metal wires in display panels. It uses the energy of the laser and a small enough laser spot to cut the short-circuited metal wires to achieve repair.

[0042] Based on this, reference Figure 1 、 Figure 3, the present application provides a laser scanning repair system, comprising: a laser emitting unit 1, a first focusing unit 2, a galvanometer unit 3, a working surface 6 and a terminal unit;

[0043] The laser emitting unit 1 is configured to emit a laser beam of a fixed wavelength. Different laser emitting units 1 can be selected for different display panels (such as OLED display panels). Exemplarily, the laser emitting unit 1 can be a femtosecond laser or a nanosecond laser, wherein the wavelength of the femtosecond laser can be selected as 1030um or 515um, and the wavelength of the nanosecond laser can be selected as 1064um or 532um. There is no specific limitation here. Different laser emitting units 1 are used to emit a laser beam of a fixed wavelength for extinguishing bright spots in different display panels (such as OLED display panels) or cutting different metal wires.

[0044] It is understandable that when a bright spot defect in a pixel of an OLED display panel is extinguished, a laser is irradiated onto the light-emitting layer where the bright spot defect appears, thereby carbonizing the location of the light-emitting layer and achieving repair. However, the light-emitting layer in the display panel is very small, and the bright spot defect area is also smaller, so the laser beam spot on the light-emitting layer needs to be relatively small. The laser beam emitted by the laser emitting unit 1 is focused by the first focusing unit 2 to form a smaller spot or a laser beam with a smaller cross-sectional profile.

[0045] In addition, the laser beam emitted by the laser emitting unit 1 needs to pass through the subsequent galvanometer unit 3 to adjust the direction of the laser beam, and the laser beam is focused by the first focusing unit 2 so that the laser beam can enter the entrance of the galvanometer unit 3, thereby avoiding the laser beam emitted by the laser emitting unit 1 having a cross-sectional area that is too large and cannot enter the entrance of the galvanometer unit 3.

[0046] Exemplarily, the first focusing unit 2 may be an F150 plano-convex lens with a center thickness of 3 mm and a curvature radius of 77.85 mm.

[0047] The galvanometer unit 3 is configured to adjust the position at which the laser beam is incident upon the work surface. After the laser beam emitted by the laser emitting unit 1 is focused by the first focusing unit 2, the resulting laser beam has a fixed direction. To repair all defects within the area encompassed by the work surface 6, the direction of the laser beam must be adjusted so that it irradiates the entire area of the work surface 6.

[0048] The work surface 6 is configured to place a display panel. The area of the display panel to be repaired is fixed on the work surface 6, and the laser beam emitted by the laser emitting unit 1 is adjusted by the galvanometer unit 3 so that the light spot formed by the laser beam on the work surface 6 is irradiated to the defect location, thereby repairing the defect.

[0049] The terminal unit is configured to divide the display panel into multiple sub-areas based on the working surface 6, establish a coordinate system for the working surface, and establish a mapping coordinate system of the coordinate system in the sub-areas covering the working surface, determine the coordinate position or coordinate interval of the defect position in the mapping coordinate system, control the laser emitting unit 1 to emit a laser beam, and control the galvanometer unit 3 so that the laser beam is irradiated to the defect position to repair the defect.

[0050] It is understandable that the size of the display panel is large relative to the working surface 6. Therefore, the terminal unit divides the display panel into multiple sub-areas based on the working surface 6. The size of each sub-area is the same as the size of the working surface 6. At the same time, the defective sub-area is placed on the working surface 6 in units of sub-areas, overlapping with the working surface 6. The terminal unit can determine the position of the defect in the sub-area by establishing a coordinate system on the working surface 6 and a mapping coordinate system of the sub-area covering the working surface 6. The laser emitting unit 1 is then controlled to emit a laser beam, and the laser beam is adjusted by the galvanometer unit 3 so that the laser beam can irradiate the defect position, thereby repairing the defect. It is understandable that if the size of the working surface 6 is the same as the size of the display panel, then in order to enable the formed laser beam to irradiate any position of the working surface 6, the overall length of the system needs to be adjusted, which is not conducive to operation.

[0051] It is understood that the coordinate system on the working surface 6 and the mapped coordinate system of the sub-area covered on the working surface 6 have the same parameters. The coordinate system for the working surface 6 can be preset in the terminal unit or established in real time based on the size of the defect. For example, the smaller the defect, the smaller the unit length of the coordinate system, such as 1 μm; the larger the defect, the larger the unit length of the coordinate system, such as 5 μm.

[0052] For example, if there are multiple defective sub-regions, they are adjusted sequentially so that the defective sub-regions overlap with the working surface 6, thereby repairing the defects in sequence.

[0053] For example, the defect may be a bright spot defect of a pixel or a short circuit of a metal line, which is not specifically limited here.

[0054] In some embodiments, the laser scanning repair system further includes a relay lens group 4, which includes a first lens 41 and a second lens 42, and the first lens 41 and the second lens 42 are arranged in parallel along the propagation direction of the laser beam. The direction of the laser beam is adjusted by the galvanometer unit 3, and the profile of the laser beam is not stable due to the adjustment of the galvanometer unit 3. Whether it is a bright spot defect of a pixel or cutting of a metal wire to be repaired by laser repair, it is possible that damage is caused to the surrounding pixels at the bright spot defect of the pixel or the metal wires around the metal wire to be repaired, thereby causing new damage to the display panel while failing to repair the original defect. The first lens 41 is used to process the laser beam to form a stable laser beam, and the profile of the laser beam will not deteriorate. After the stable laser beam is formed, the stable laser beam needs to be processed to form an operating spot, and the second lens 42 is used to limit the divergence angle of the stable laser beam so that the stable laser beam can enter the entrance of the subsequent second focusing unit 5.

[0055] For example, first lens 41 may be an F100 plano-convex lens with a center thickness of 4.2 mm and a radius of curvature of 51.9 mm. Second lens 42 may be an F2000 plano-convex lens with a center thickness of 2.1 mm and a radius of curvature of 2076 mm. The focal length of second lens 42 is 20 times that of first lens 41, and this 20-fold phase difference limits the divergence angle of the stabilized laser beam.

[0056] In some embodiments, the galvanometer unit 3 is disposed between the first focusing unit 2 and the relay lens group 4. The galvanometer unit 3 includes a first reflector 31 and a second reflector 32. The first reflector 31 deflects the laser beam passing through the first focusing unit 2 in a first direction, and the second reflector 32 deflects the laser beam passing through the first focusing unit 2 in a second direction. It is understood that the first direction and the second direction can be any direction, wherein the first direction and the second direction are arranged perpendicularly. Through the cooperation of the first reflector 31 and the second reflector 32, the laser beam can be deflected at any position within the plane formed by the first direction and the second direction, thereby achieving position adjustment of the laser beam.

[0057] Exemplarily, the first direction may be a horizontal direction, and the second direction may be a vertical direction. By adjusting the deflection of the laser beam in the horizontal direction by the first reflector 31 and adjusting the deflection of the laser beam in the vertical direction by the second reflector 32, the laser beam can be deflected at any position within the plane formed by the horizontal and vertical directions.

[0058] It can be understood that the first reflector 31 and the second reflector 32 are both connected to a driving device, which is communicated with the terminal unit. The terminal unit controls the driving device to work so as to adjust the deflection of the first reflector 31 and the second reflector 32. The driving device can be a motor or any other device that can drive the first reflector 31 and the second reflector 32 to deflect, and is not specifically limited here.

[0059] Compared with the related art of adjusting the irradiation direction of the laser beam by moving the gantry dual drive or the optical stage area, it has better stability and reset performance and higher efficiency (shorter Tact Time).

[0060] In some embodiments, reference Figure 1 、 Figure 2 A second focusing unit 5 is provided between the relay lens group 4 and the working surface 6. The second focusing unit 5 focuses the stable laser beam formed by the relay lens group 4 to form a working light spot. The profile of the laser beam is further stabilized by the relay lens, and the stable laser beam is focused by the second focusing unit 5. The light spot formed at the focus of the second focusing unit 5 serves as the working light spot. It is understandable that since the pixel size of the display panel or the metal wire of the display panel are relatively small, the smaller the working light spot formed here, the more effective it is in repairing defects in the display panel. If the working light spot formed is too large, it is very likely that the surrounding area of the defect will be damaged after being irradiated by the laser.

[0061] For example, the outline of the working light spot may be circular, and the diameter of the working light spot is configured to be no greater than 2.6 μm.

[0062] For example, the second focusing unit 5 may be a 50X objective lens. By combining the second focusing unit 5 with the laser scanning repair system of the present application, the formed working surface 6 may be 50 μm*50 μm.

[0063] In some embodiments, the first focusing unit 2 is detachably connected to an adjustment mechanism, and the adjustment mechanism (not shown) is used to adjust the distance between the focusing unit and the galvanometer unit 3 so that the energy of the laser beam passing through the first focusing unit 2 does not exceed the tolerance limit of the galvanometer unit 3; and to adjust the focal position of the first focusing unit 2. The adjustment mechanism is used to adjust the distance between the first focusing unit 2 and the galvanometer unit 3 to prevent the light spot formed by the first focusing unit 2 at the galvanometer unit 3 from being too small and its energy density from being too high, thereby preventing damage to the first reflector 31 and the second reflector 32 of the galvanometer unit 3. In other words, when the laser beam focused by the first focusing unit 2 is irradiated on the galvanometer unit 3, the energy density of the light spot formed on the first reflector 31 and the second reflector 32 is not greater than the tolerance limit of the galvanometer unit 3, thereby preventing damage to the first reflector 31 and the second reflector 32.

[0064] Exemplarily, the adjustment mechanism can be a lifting machine or any other device capable of adjusting the first focusing unit 2. As long as it can adjust the distance between the first focusing unit 2 and the laser emitting unit 1 and the galvanometer unit 3, it can be replaced and is not specifically limited here.

[0065] For example, the spot diameter of the laser beam at the entrance of the shock unit may be 3.58 mm, the spot diameter at the first reflector 31 may be 2.9 mm, and the spot diameter at the first reflector 31 may be 1.95 mm.

[0066] Furthermore, the first reflector 31 and the second reflector 32 of the galvanometer unit 3 are located between the first focusing unit 2 and the focus of the first focusing unit 2. By adjusting the position of the first focusing unit 2, as long as it is ensured that the laser beam emitted by the laser emitting unit 1 is focused by the first focusing unit 2 so that the focused laser beam can enter the entrance of the galvanometer unit 3, it is avoided that the laser beam is blocked at the entrance of the galvanometer unit 3, resulting in the inability to form a working light spot to complete the defect repair of the display panel.

[0067] The first reflector 31 and the second reflector 32 are both located between the first focusing unit 2 and the focus of the first focusing unit 2 , which can prevent the light spot energy density at the focus of the first focusing unit 2 from being too high, thereby preventing the first reflector 31 and the second reflector 32 from being damaged.

[0068] It should be noted that the first reflector 31 and the second reflector 32 can also be located on the side of the first focusing unit 2 away from the focus of the first focusing unit 2, and the same technical effect can be achieved. Compared with the first reflector 31 and the second reflector 32 being located between the first focusing unit 2 and the focus of the first focusing unit 2, the overall length of the laser scanning repair system in this application will be lengthened, occupying more space, which is not conducive to operation.

[0069] In some embodiments, a first distance is set between the focal point of the second focusing unit 5 and the plane where the working surface 6 is located.

[0070] In some embodiments, the working surface 6 is perpendicular to the extension direction of the laser beam passing through the second focusing unit 5 .

[0071] The first distance is different for different display panels. Different display panels have different distances between the outermost encapsulation layer and the light-emitting layer, that is, the distance between the outermost encapsulation layer and the metal circuit layer is also different. Similarly, when repairing different defects, the type of defect is first determined. For example, it is determined whether the bright spot defect of the pixel of the display panel needs to be repaired or the short-circuited metal wire needs to be cut and repaired. By determining the type of defect and then determining the distance between the location of the defect and the outermost encapsulation layer, the focus of the second focusing unit 5 is determined to be on the plane where the defect location is located, so that the working light spot formed by the second focusing unit 5 is minimized.

[0072] Exemplarily, the distance between the working surface 6 and the second focusing unit 5 can be adjusted.

[0073] In some embodiments, the first reflector 31 is configured to have a deflection angle no greater than a first angle, and the second reflector 32 is configured to have a deflection angle no greater than a second angle, wherein the first angle and the second angle control the deflection of the laser beam within the range of the working surface 6. Exemplarily, the first angle and the second angle can be preset in the terminal unit, and when the terminal unit deflects the first reflector 31 and the second reflector 32, the deflection angle of the first reflector 31 is no greater than the first angle, and the deflection angle of the second reflector 32 is no greater than the second angle. Since the range of the working surface 6 is fixed, if the first angle of the first reflector 31 and the second angle of the second reflector 32 are deflected too much, the light spot formed by the laser beam will exceed the range of the working surface 6. First, the defects cannot be effectively repaired. At the same time, due to the irradiation of the working light spot, the display panel outside the range of the working surface 6 will also be damaged.

[0074] Exemplarily, the first angle is configured to be 0.3° and the second angle is configured to be 0.3°. It is understandable that in the above embodiment, when the working surface 6 is configured to be 50 μm*50 μm, the deflection angle of the first reflector 31 is configured to be 0.3° and the deflection angle of the second reflector 32 is configured to be 0.3°, so that the formed working light spot is within the range of the working surface 6.

[0075] In some embodiments, the laser beam entrance of the second focusing unit 5 is not less than the deflection range of the stable laser beam controlled by the first angle and the second angle. It can be understood that the laser beam adjusted by the first reflector 31 and the second reflector 32 is relayed and transcribed by the relay lens group 4, and while forming a stable laser beam, the divergence angle of the stable laser beam is limited. After the divergence angle is limited, the stable laser beam can stably enter the entrance of the second focusing unit 5, and the entrance of the second focusing unit 5 is blocked. Therefore, when deflecting the laser beam, it is necessary to ensure that the stable laser beam can enter the laser beam entrance of the second focusing unit 5 within the deflection range of the laser beam. Therefore, the laser beam entrance of the second focusing unit 5 is not less than the deflection range of the stable laser beam controlled by the first angle and the second angle.

[0076] Based on the same inventive concept, the embodiment of the present application also provides a laser scanning repair method, which is implemented using the laser scanning repair system provided by any of the above embodiments. Figure 4 , the method comprising:

[0077] S1. Provide a display panel to be repaired, and divide the display panel to be repaired into a plurality of sub-areas based on the working surface 6.

[0078] The range of the working surface 6 is fixed, so the repair area is based on the working surface 6. Therefore, the display panel is divided into multiple sub-areas based on the working surface 6, and the defects in each sub-area are repaired one by one.

[0079] S2. Determine the defect location in any sub-region and place the sub-region where the defect location is located over the work surface 6. Any defective sub-region is placed over the work surface 6 to repair the defect location in the defective sub-region. It should be understood that while the laser scanning repair system can operate on any location on the work surface 6, any defect location in the sub-region can also be scanned and repaired by the laser scanning repair system.

[0080] S3. Establish a coordinate system for the working surface 6. The coordinate system of the working surface 6 can be preset, directly preset in the terminal unit. It should be noted that the coordinate system of the working surface 6 can be established with any position on the plane where the working surface 6 is located as the origin and two mutually perpendicular axes on the working surface 6 as the coordinate axes. As long as the coordinate system can be identified at any position on the working surface 6, no specific limitation is imposed here.

[0081] S4. Establish a mapping coordinate system of the coordinate system in the sub-region covering the working surface 6, and determine the coordinate position or coordinate interval of the defect position in the mapping coordinate system. The sub-region covers the working surface 6. When determining the location of the defect, the coordinates of the defect position in the mapping coordinate system can be determined by mapping the coordinate system of the working surface 6 in the sub-region. Similarly, the coordinate position or coordinate interval of the defect position in the coordinate system of the working surface 6 can be determined.

[0082] S5. Control the laser emitting unit 1 to emit laser light and adjust the angle of the laser beam so that the laser light irradiates the coordinate position or coordinate interval, thereby performing laser repair on the defect. Adjust the position where the laser beam is incident on the working surface 6 through the galvanometer unit 3, and control the laser emitting unit 1 to emit laser light so that the formed working spot irradiates the defect position, thereby performing laser repair on the defect.

[0083] It should be noted that if the size of the defect is larger than the size of the working spot, for example, the size of the bright spot defect of the pixel is larger than the size of the working spot, the bright spot defect cannot be extinguished by one laser irradiation. The direction of the laser beam needs to be continuously adjusted through the galvanometer unit 3 so that the luminous layer covered by the bright spot defect is carbonized, thereby realizing pixel repair.

[0084] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present application (including the claims) is limited to these examples. Within the scope of the present application, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the embodiments of the present application as described above, which are not provided in detail for the sake of simplicity.

[0085] In addition, for simplicity of description and discussion, and in order not to make the embodiment of the application difficult to understand, the known power supply / ground connection with integrated circuit (IC) chip and other components may or may not be shown in the accompanying drawings provided. In addition, the device can be shown in the form of a block diagram to avoid making the embodiment of the application difficult to understand, and this also takes into account the following fact, that is, the details of the embodiment of these block diagram devices are highly dependent on the platform to be implemented in the embodiment of the application (that is, these details should be fully within the scope of understanding of those skilled in the art). When specific details (for example, circuit) are set forth to describe exemplary embodiments of the application, it will be apparent to those skilled in the art that the embodiment of the application can be implemented without these specific details or when these specific details are changed. Therefore, these descriptions should be considered to be illustrative rather than restrictive.

[0086] Although the present invention has been described in conjunction with specific embodiments thereof, many alternatives, modifications, and variations of these embodiments will be apparent to those skilled in the art based on the foregoing description. For example, other memory architectures (e.g., dynamic RAM (DRAM)) may utilize the embodiments discussed.

[0087] The embodiments of the present application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present application should be included in the scope of protection of this application.

Claims

1. A laser scanning repair system, characterized in that: include: Laser emitting unit, first focusing unit, galvanometer unit, working surface and terminal unit; The laser emitting unit is configured to emit a laser beam of a fixed wavelength; The first focusing unit is configured to focus the laser beam emitted by the laser emitting unit; The galvanometer unit is configured to adjust the position at which the laser beam is incident on the working surface; The working surface is configured to place a display panel; The terminal unit is configured to divide the display panel into multiple sub-areas based on the working surface, establish a coordinate system for the working surface, and establish a mapping coordinate system of the coordinate system in the sub-areas covering the working surface, determine the coordinate position or coordinate interval of the defect position in the mapping coordinate system, control the laser emitting unit to emit a laser beam, and control the galvanometer unit to make the laser beam irradiate the coordinate position or coordinate interval to repair the defect.

2. The system according to claim 1, wherein: The laser scanning repair system further includes a relay lens group, the relay lens group includes a first lens and a second lens, the first lens and the second lens are arranged in parallel along the propagation direction of the laser beam; The focal length of the second lens is greater than the focal length of the first lens, and the first lens is used to process the laser beam to form a stable laser beam; The second lens is used to limit the divergence angle of the stabilized laser beam.

3. The system according to claim 2, characterized in that The galvanometer unit is disposed between the first focusing unit and the relay lens group, the galvanometer unit includes a first reflecting mirror and a second reflecting mirror, and the first reflecting mirror deflects the laser beam passing through the first focusing unit in a first direction; The second reflecting mirror deflects the laser beam passing through the first focusing unit in a second direction; The first direction and the second direction are perpendicular.

4. The system according to claim 3, characterized in that A second focusing unit is provided between the relay lens group and the working surface. The second focusing unit focuses the stable laser beam formed by the relay lens group to form a working light spot.

5. The system according to claim 3, wherein: The first focusing unit is detachably connected to an adjustment mechanism, which is used to adjust the distance between the focusing unit and the galvanometer unit so that the energy of the laser beam passing through the first focusing unit is not greater than the tolerance limit of the galvanometer unit; and to adjust the focal position of the first focusing unit.

6. The system according to claim 5, characterized in that The first reflecting mirror and the second reflecting mirror of the galvanometer unit are located between the first focusing unit and a focus of the first focusing unit.

7. The system according to claim 4, wherein: A first distance is set between the focus of the second focusing unit and the plane where the working surface is located.

8. The system according to claim 4, wherein: The first reflector is configured to have a deflection angle no greater than a first angle, and the second reflector is configured to have a deflection angle no greater than a second angle, wherein the first angle and the second angle control the deflection of the laser beam within the range of the working surface.

9. The system according to claim 8, characterized in that The laser beam entrance of the second focusing unit is not smaller than the deflection range of the stabilized laser beam controlled at the first angle and the second angle.

10. A laser scanning repair method, using the laser scanning repair system according to any one of claims 1 to 9, characterized in that: include: Providing a display panel to be repaired, and dividing the display panel to be repaired into a plurality of sub-areas based on the working surface; Determine the defect location in any sub-region, and place the sub-region where the defect location is located to cover the working surface; establishing a coordinate system for the working surface; Establishing a mapping coordinate system of the coordinate system in a sub-area covering the working surface, and determining the coordinate position or coordinate interval of the defect position in the mapping coordinate system; The laser emitting unit is controlled to emit laser light, and the angle of the laser beam is adjusted so that the laser light is irradiated to the coordinate position or coordinate interval to perform laser repair on the defect.

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