A multicolor semiconductor laser module having a shaping and combining prism pair

By introducing a pair of shaping and beam-combining prisms into the semiconductor laser module, integrating the functions of the shaping prism and the dichroic mirror, the problem of large module space occupation is solved, the miniaturization of the laser and the stability of the optical path are realized, and flexible laser output is provided.

CN116526300BActive Publication Date: 2026-04-07PAVILION INTEGRATION CORP SUZHOU
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-12-28
Publication Date
2026-04-07

AI Technical Summary

Technical Problem

In existing semiconductor laser modules, the shaping prism pairs and beam combining dichroic mirrors occupy a large amount of space, which cannot meet the requirements for miniaturization and integration of lasers.

Method used

By employing a beam-combining prism pair and adding a coating layer on one side of the second beam-combining prism, the functions of the beam-combining prism pair and the dichroic mirror are integrated, reducing the module size and achieving optical path stability through multiple parallel laser optical paths.

Benefits of technology

It effectively reduces the size of the laser module, increases the stability of the optical path, and allows for flexible laser output by replacing different laser diodes and focusing lenses as needed.

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Abstract

The application discloses a kind of multicolor semiconductor laser modules with shaping beam combining prism pair, comprising: first laser light path, several mutually parallel second laser light paths and main light path, second laser light path and first laser light path are parallel, first laser light path includes first laser diode, first aspherical collimating lens, first telescope and first shaping beam combining prism pair arranged in sequence, first shaping beam combining prism pair includes first shaping prism and second shaping prism, one side of second shaping prism is provided with coating layer, coating layer is used to reflect the light beam of first laser light path and transmit the light beam of second laser light path, the light beam of first laser light path and the light beam of second laser light path are combined to form main light path, first long-focus plano-convex lens and focusing lens are sequentially arranged on main light path, and focusing lens is arranged at the light emitting position on the multicolor semiconductor laser module.The application compared with prior art, can effectively reduce the size of laser module, and increase the stability of optical path.
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Description

TECHNICAL FIELD

[0001] The present application belongs to the field of semiconductor laser, and particularly relates to a multi-color semiconductor laser module with a shaping and combining prism pair. BACKGROUND

[0002] Semiconductor lasers are widely used in various biological medical monitoring fields, especially in the field of flow cytometry analysis, due to their high photoelectric conversion efficiency, wide wavelength coverage, long service life, high-speed modulation, small size, light weight, low cost and other excellent optical and electrical properties.

[0003] In the laser excitation light path of a flow cytometry analyzer, the laser beams of different wavelengths are emitted from the laser, and after a series of beam shaping in the respective sub-light paths, the multi-color laser beams are reflected by the dichroic mirror in the main light path and combined into one beam, and finally pass through the focusing lens to form a focused spot and are incident into the flow chamber.

[0004] In the existing multi-color semiconductor laser module of a semiconductor laser, a shaping prism pair and a dichroic mirror are usually included. The shaping prism pair usually includes two shaping prisms, and the prism pair can change the size of the light spot in a single direction by a certain multiple without changing the direction of the light beam transmission. The dichroic mirror can reflect the light beams of corresponding wavelengths at an angle of 45°, while transmitting light beams of other wavelengths. Through this principle, the dichroic mirror combines the light beams of different wavelengths in the respective sub-channels into the main light path.

[0005] In the existing semiconductor laser, the shaping prism pair and the combining dichroic mirror occupy a large space in the laser module, which cannot meet the increasing demand for miniaturization and integration of lasers. SUMMARY

[0006] The present application aims to provide a multi-color semiconductor laser module with a shaping and combining prism pair, which can effectively reduce the size of the laser module and increase the stability of the optical path.

[0007] In order to achieve the above object, the present application adopts the following technical scheme: A multi-color semiconductor laser module with a shaping and combining prism pair, comprising a first laser light path, a plurality of parallel second laser light paths and a main light path, the second laser light paths are parallel to the first laser light path, the first laser light path comprises a first laser diode, a first aspheric collimating mirror, a first telescope and a first shaping and combining prism pair arranged in sequence, the first shaping and combining prism pair comprises a first shaping prism and a second shaping prism, a film layer is arranged on one side of the second shaping prism, the film layer is used for reflecting the light beam of the first laser light path and transmitting the light beam of the second laser light path, the second laser light path comprises a second laser diode, a second aspheric collimating mirror, a second telescope, a long-focus assembly and a second shaping and combining prism pair arranged in sequence, the second shaping and combining prism pair is used for reflecting the light beam corresponding to the second laser light path and transmitting the light beams of other parallel second laser light paths, the light beams of the first laser light path and the second laser light path are combined to form the main light path, a first long-focus plano-convex mirror and a focusing mirror are arranged on the main light path in sequence, and the focusing mirror is arranged at an light-emitting position on the multi-color semiconductor laser module.

[0008] As a further description of the above technical scheme:

[0009] The first laser diode is fixedly installed on the heat sink, and the heat sink is fixedly installed on the base.

[0010] As a further description of the above technical scheme:

[0011] A TEC refrigeration sheet is arranged between the heat sink and the base.

[0012] As a further description of the above technical scheme:

[0013] The first telescope comprises a plano-concave spherical mirror and a plano-convex spherical mirror.

[0014] As a further description of the above technical scheme:

[0015] The long-focus assembly comprises a second long-focus plano-convex mirror and an adjusting mechanism.

[0016] In summary, due to the adoption of the above technical scheme, the present application has the following beneficial effects:

[0017] 1、In the present application, in the multi-color semiconductor laser module, the shaping and combining prism pair integrates the functions of the shaping prism pair and the dichroic mirror by arranging the film layer on one side of the second shaping prism, so that the size of the laser module can be effectively reduced, and the stability of the light path can be increased.

[0018] 2、The multi-color semiconductor laser module of the present application can replace different laser diodes according to actual needs to realize laser output of different wavelengths, and can replace different focusing mirrors to realize different working distance requirements, and the multi-color semiconductor laser module is flexible in function and structure. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. Other related drawings can also be obtained by those skilled in the art without creative labor on the premise of the drawings.

[0020] Figure 1 It is a structural schematic diagram of a multi-color semiconductor laser module with a shaping and combining prism pair.

[0021] Figure 2 It is a working principle schematic diagram of a first shaping and combining prism pair in a multi-color semiconductor laser module with a shaping and combining prism pair.

[0022] LEGEND:

[0023] 1, first laser diode; 11, heat sink; 12, base; 2, first aspheric collimating mirror; 3, first telescope; 31, flat concave spherical mirror; 32, flat convex spherical mirror; 4, second long-focus flat convex mirror; 5, first shaping and combining prism pair; 51, first shaping prism; 52, second shaping prism; 521, coating layer; 6, focusing mirror; 7, first long-focus flat convex mirror. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, but not all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those skilled in the art without creative labor on the basis of the embodiments in the present application belong to the scope of protection of the present application.

[0026] Please refer to Figures 1-2The application provides a technical scheme: a multicolor semiconductor laser module with a shaping and beam combining prism pair, comprising a first laser light path, a plurality of parallel second laser light paths and a main light path, the second laser light paths are parallel to the first laser light path, the first laser light path comprises a first laser diode 1, a first aspheric collimating mirror 2, a first telescope 3 and a first shaping and beam combining prism pair 5 arranged in sequence, the first shaping and beam combining prism pair 5 comprises a first shaping prism 51 and a second shaping prism 52, one side of the second shaping prism 52 is provided with a coating layer 521, the coating layer 521 is used for reflecting the light beam of the first laser light path and transmitting the light beam of the second laser light path, and the coating layer 521 is specifically a dichroic coating, the second laser light path comprises a second laser diode, a second aspheric collimating mirror, a second telescope, a long-focus assembly and a second shaping and beam combining prism pair arranged in sequence, the second shaping and beam combining prism pair is used for reflecting the light beam corresponding to the second laser light path and transmitting the light beams of other parallel second laser light paths, the light beams of the first laser light path and the second laser light path are combined to form the main light path, a first long-focus plano-convex mirror 7 and a focusing mirror 6 are sequentially arranged on the main light path, the first long-focus plano-convex mirror 7 is used for adjusting the pointing direction of the combined light beam, and the focusing mirror 6 is arranged at an light-emitting position on the multicolor semiconductor laser module. The structure and working principle of the first laser light path and the second laser light path are the same, and the difference lies in that the long-focus assembly is not arranged in the first laser light path. The long-focus assembly in the second laser light path is used for adjusting the pointing direction of the light beam in the current laser light path.

[0027] The first laser diode 1 is fixedly installed on the heat sink 11, and the heat sink 11 is fixedly installed on the base 12, the temperature of the heat sink 11 does not change with the size of the heat energy transmitted to it, thereby effectively controlling the temperature of the laser diode 1 during work and ensuring the stability of the work.

[0028] A TEC refrigeration sheet is arranged between the heat sink 11 and the base 12, thereby further controlling the temperature of the laser diode 1 during work and ensuring the stability of the work.

[0029] The first telescope 3 comprises a plano-concave spherical mirror 31 and a plano-convex spherical mirror 32, the positive and negative mirror combination of the telescope can change the size of the light beam, and the focusing waist position of the combined light beam can be adjusted by adjusting the distance between the concave mirror and the convex mirror of the telescope.

[0030] The long-focus assembly comprises a second long-focus plano-convex mirror 4 and an adjusting mechanism, the second long-focus plano-convex mirror 4 changes the pointing direction of the light beam by using light beam eccentricity. The second long-focus plano-convex mirror 4 is fixed on the adjusting mechanism by adhesion, and the adjusting mechanism can freely move in the horizontal and vertical directions perpendicular to the light beam to adjust the eccentricity, so that the pointing direction is freely adjusted.

[0031] Working principle: as shown in the accompanying Figure 1As shown, three parallel laser light paths are arranged, the nearest laser light path to the light outlet at the lower right of the distance module is channel one (first laser light path), and the two second laser light paths are channel two and channel three in turn. The divergent light emitted by the laser diode is collimated by the aspheric collimating mirror, and then the spot size is adjusted by the telescope and the focusing waist position of the combined beam is adjusted, and then the light beam is adjusted in direction by the long-focus assembly (only for channel two and channel three). Then, the shaping and combining prism pair composed of special coated prisms can change the spot size of the light beam on one side, and the coating surface can reflect the light beam of the corresponding channel wavelength and transmit the light beam of other wavelengths. As shown in the attached Figure 2 As shown, the shaping and combining prism pair of channel one can reflect the light beam of the shaping channel one and transmit the light beams of channel two and channel three, and the shaping and combining prism pair of channel two can reflect the light beam of the shaping channel two and transmit the light beam of channel three. Finally, the focusing mirror focuses the light path at the light outlet position of the multi-path combined beam to realize a small size spot.

[0032] The above is only the preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can make equivalent replacements or changes within the technical range disclosed by the present application according to the technical solution and the inventive concept of the present application, which should be covered within the protection scope of the present application.

Claims

1. A multicolor semiconductor laser module with a shaping and beam-combining prism pair, characterized in that, The system includes a first laser optical path, several parallel second laser optical paths, and a main optical path. The second laser optical paths are connected in parallel with the first laser optical path. The first laser optical path includes a first laser diode (1), a first aspherical collimating lens (2), a first telescope (3), and a first shaping and beam combining prism pair (5) arranged in sequence. The first shaping and beam combining prism pair (5) includes a first shaping prism (51) and a second shaping prism (52). A coating layer (521) is provided on one side of the second shaping prism (52). The coating layer (521) is used to reflect the beam of the first laser optical path and allow the beam to pass through. The second laser light path includes a second laser diode, a second aspherical collimating lens, a second telescope, a long focal length assembly, and a second shaping and beam combining prism pair arranged in sequence. The second shaping and beam combining prism pair is used to reflect the light beam corresponding to the second laser light path and transmit the light beams of other parallel second laser light paths. The light beams of the first laser light path and the light beams of the second laser light path are combined to form the main light path. A first long focal length plano-convex lens (7) and a focusing lens (6) are arranged in sequence on the main light path. The focusing lens (6) is located at the light output position on the multicolor semiconductor laser module. The first telescope (3) includes a plano-concave spherical mirror (31) and a plano-convex spherical mirror (32). By adjusting the distance between the concave and convex mirrors of the telescope, the focusing waist position of the combined beam can be adjusted.

2. A multicolor semiconductor laser module with a shaping and beam-combining prism pair according to claim 1, characterized in that, The first laser diode (1) is fixedly mounted on the heat sink (11), and the heat sink (11) is fixedly mounted on the base (12).

3. A multicolor semiconductor laser module with a shaping and beam-combining prism pair according to claim 2, characterized in that, A TEC cooling plate is provided between the heat sink (11) and the base (12).

4. A multicolor semiconductor laser module with a shaping and beam-combining prism pair according to claim 1, characterized in that, The telephoto assembly includes a second telephoto planoconvex lens (4) and an adjustment mechanism.

Citation Information

Patent Citations

  • Measuring device for measuring light beam divergence angle and laser quality factor and testing method of measuring device

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  • Miniaturized multicolor semiconductor laser beam combining module

    CN215895133U