A base tooling for supporting and handling an electrostatic chuck assembly

Abstract

The application relates to a base tool for supporting and carrying an electrostatic chuck assembly, belonging to the technical field of semiconductor equipment, which comprises a base, wherein a supporting piece is arranged on the base; the supporting piece is in a vertical cylinder shape, an upper edge of the supporting piece is formed with a supporting surface, a side blocking wall extends upwards outside the supporting surface, and a space surrounded by the side blocking wall is matched with the shape of the electrostatic chuck assembly; a pipeline avoiding groove for accommodating external pipelines of the electrostatic chuck assembly is arranged on the side of the supporting piece from top to bottom; and handles are arranged on the opposite sides of the supporting piece. The scheme can improve the work efficiency during dismounting and mounting of the electrostatic chuck assembly, solve the problem that the surface of the electrostatic chuck assembly is scratched or bumped during storage and carrying after the electrostatic chuck assembly is dismounted from the equipment machine, play a role of protecting the electrostatic chuck assembly and the external pipeline structure of the electrostatic chuck assembly, prolong the service life, and facilitate inspection and maintenance of the electrostatic chuck assembly.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor equipment technology, and specifically relates to a base fixture for supporting and transporting electrostatic chuck assemblies. Background Technology

[0002] Electrostatic chucks (ESCs) are commonly used components in semiconductor equipment, such as the electrostatic chuck assemblies used in HDP (high-density plasma) equipment. Their structure can be found in [reference needed]. Figure 5 , Figure 6 As shown, the electrostatic chuck assembly A1 is generally flat cylindrical (or other shapes). The upper surface is the working surface that needs to be in direct contact with the wafer, and the lower surface has external pipes A2 including RF copper strips, water pipes and optical fibers. The electrostatic chuck assembly weighs about 25kg. It needs to be disassembled and repaired when maintaining the equipment or troubleshooting related problems.

[0003] Because the upper surface of the electrostatic chuck assembly requires a high degree of cleanliness, it is necessary to avoid bumps and scratches, and it should not come into contact with other rough surfaces. The lower surface, including the RF copper strip, water pipes, and fiber optic structures, should not be bent or easily disassembled, and should not be placed under the heavy electrostatic chuck assembly. Therefore, the storage of the electrostatic chuck assembly after removal from the equipment is a significant and difficult problem to solve. The current method involves storing the electrostatic chuck assembly upside down (working side down) on foam pads and lint-free cloths. This method is inconvenient for inspection and maintenance, and because the electrostatic chuck assembly is heavy, at least 2-3 people are needed to complete the flipping, placement, and moving process. This easily leads to bumps and scratches that could damage the electrostatic chuck assembly, and is also time-consuming and labor-intensive. Therefore, a device is needed to better facilitate the storage and handling of electrostatic chuck assemblies. Summary of the Invention

[0004] Based on the technical problems existing in the prior art, the present invention provides a base fixture for supporting and transporting electrostatic chuck assemblies, which solves the problem of difficult storage and transportation of electrostatic chuck assemblies after they are disassembled from the equipment, protects the electrostatic chuck assemblies, extends their service life, and facilitates the inspection and maintenance of the electrostatic chuck assemblies, thereby improving maintenance efficiency.

[0005] According to the technical solution of the present invention, the present invention provides a base fixture for supporting and transporting an electrostatic chuck assembly, including a base, on which a support member is provided; the support member is a vertical cylindrical shape, the upper edge of the support member forms a support surface, and a side baffle extends upward outside the support surface, the space enclosed by the side baffle matching the shape of the electrostatic chuck assembly; a pipeline clearance groove for accommodating the external pipeline of the electrostatic chuck assembly is provided on the side of the support member from top to bottom; handles are provided on opposite sides of the support member.

[0006] Furthermore, a pipeline bracket is provided at the bottom of the pipeline clearance trench.

[0007] Furthermore, the pipeline bracket has a receiving groove that matches the external pipeline.

[0008] Furthermore, the bottom of the pipeline bracket is connected to the pipeline clearance groove by bolts or screws.

[0009] Furthermore, the pipeline clearance groove is one or two oppositely arranged on both sides of the support; handle holes are provided on both sides of the line connecting the pipeline clearance groove and the center of the support, and handles are formed above the handle holes, with the upper surface of the handles being lower than the support surface.

[0010] Preferably, there are two pipeline clearance grooves arranged opposite each other; the supporting surface is four evenly distributed by the pipeline clearance grooves and the handle at intervals.

[0011] Furthermore, the base is equipped with several casters at its bottom.

[0012] Preferably, the base is cylindrical, and the casters are five evenly distributed around the lower end of the base.

[0013] Furthermore, the base and the support are connected by bolts or screws.

[0014] Preferably, the support is rigid and has a smooth surface, and the support is integrally formed.

[0015] Compared with the prior art, the beneficial technical effects of the present invention are as follows:

[0016] 1. The base fixture for supporting and transporting electrostatic chuck assemblies of the present invention can improve the work efficiency when disassembling and assembling electrostatic chuck assemblies, solve the problem that the surface of the electrostatic chuck assemblies may be scratched or bumped during storage and transportation after being disassembled from the equipment, protect the electrostatic chuck assemblies, extend their service life, facilitate the inspection and maintenance of the electrostatic chuck assemblies, and save time for maintenance equipment in FAB.

[0017] 2. The base fixture of this invention for supporting and transporting electrostatic chuck assemblies significantly improves the service life of the electrostatic chuck assemblies. After being disassembled from the equipment, electrostatic chuck assemblies are inconvenient to store because their lower surface is uneven. Existing solutions require the chuck assemblies to be flipped over for storage, making their upper surface susceptible to bumps and scratches. The support design of this invention provides support and protection for the electrostatic chuck assemblies, facilitating storage and significantly reducing the risk of bumps and scratches on the chuck surface. Since the electrostatic chuck assemblies are heavy, requiring at least 2-3 people to carry them, the fixture design effectively prevents accidental slippage and damage during transport, thus extending their service life.

[0018] 3. The base fixture of this invention for supporting and transporting electrostatic chuck assemblies significantly improves the efficiency of disassembling and assembling electrostatic chuck assemblies. After being disassembled from the equipment, electrostatic chuck assemblies need to be stored upside down. Because the upper surface of the electrostatic chuck assembly requires a high degree of cleanliness, existing solutions require the use of foam pads and lint-free cloths to prevent bumps and scratches, which takes a considerable amount of time. Furthermore, the electrostatic chuck assembly is heavy, making it inconvenient to move and transport. The fixture design of this invention allows the electrostatic chuck assembly to be placed with its upper surface facing upwards, thus securing it and facilitating inspection and maintenance without the need for flipping, preventing damage. Simultaneously, once the electrostatic chuck assembly is placed on the fixture, one person can complete the transport of the assembly, significantly improving work efficiency, saving time on disassembling and assembling the electrostatic chuck assembly, and shortening the Mean Time Till Repair (MTTR) required for on-line equipment maintenance. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural schematic diagram of an embodiment of the present invention.

[0020] Figure 2 yes Figure 1 A three-dimensional structural diagram of the central support component.

[0021] Figure 3 yes Figure 1 A three-dimensional structural diagram of the central base section.

[0022] Figure 4 yes Figure 3 A bottom view of the structure shown.

[0023] Figure 5 yes Figure 1 The diagram shows the three-dimensional structure of the tooling after the electrostatic chuck assembly has been placed.

[0024] Figure 6 This is a three-dimensional structural diagram of the electrostatic chuck assembly viewed from below.

[0025] Explanation of reference numerals in the attached figures:

[0026] 1. Base;

[0027] 2. Supporting components;

[0028] 3. Supporting surface;

[0029] 4. Side walls;

[0030] 5. Pipeline clearance trench;

[0031] 6. Handle;

[0032] 7. Pipeline brackets;

[0033] 8. Handle hole;

[0034] 9. Casters;

[0035] 10. Openwork window;

[0036] A1. Electrostatic chuck assembly;

[0037] A2. External pipeline. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0039] It should also be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings. Unless otherwise specified, the embodiments and features described herein can be combined with each other.

[0040] It should be noted that the concepts of "first" and "second" mentioned in this invention are only used to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependencies.

[0041] It should be noted that the terms "a" and "a plurality of" used in this invention are illustrative rather than restrictive. Those skilled in the art should understand that, unless otherwise expressly indicated in the context, they should be understood as "one or more".

[0042] This invention relates to a base fixture for supporting and transporting electrostatic chuck assemblies, belonging to the field of semiconductor equipment technology. It includes a base with a support member mounted on it. The support member is vertically cylindrical, with a support surface formed at its upper edge. Side walls extend upwards from the outer side of the support surface, and the space enclosed by the side walls matches the shape of the electrostatic chuck assembly. A pipeline clearance groove for accommodating the external pipelines of the electrostatic chuck assembly is formed on the side of the support member from top to bottom. Handles are provided on opposite sides of the support member. This solution improves the efficiency of disassembling and assembling electrostatic chuck assemblies, solves the problem of surface scratches or bumps that may occur during storage and transportation of the electrostatic chuck assembly after disassembly from the equipment, protects the electrostatic chuck assembly and its external pipeline structure, extends its service life, and facilitates the inspection and maintenance of the electrostatic chuck assembly.

[0043] Please refer to the following first. Figure 5 , Figure 6The diagram illustrates an existing electrostatic chuck assembly A1, which is generally flattened cylindrical. The upper surface is the working surface that needs to directly contact the wafer and should not come into contact with other rough surfaces. The lower surface has an external pipeline A2 comprising an RF copper strip, a water pipe, and an optical fiber. The RF copper strip is indirectly connected to the RF power supply, using the electrostatic chuck as the lower electrode to conduct RF signals. The water pipe circulates coolant into the electrostatic chuck, with two pipes for inlet and outlet water, serving a cooling function. The optical fiber's tip is a temperature probe, installed inside the electrostatic chuck assembly, used to measure the wafer surface temperature. The external pipeline A2 extends outward from the bottom of the electrostatic chuck assembly A1. The external pipeline A2 should not be subjected to pressure or bending and is difficult to disassemble. This solution addresses the support, placement, and handling issues of this type of electrostatic chuck assembly A1 by proposing a base fixture. This fixture allows for upright placement of the electrostatic chuck assembly A1, facilitating maintenance and preventing contact between its working surface and other components. It also effectively accommodates and protects the external pipeline A2.

[0044] Please see Figures 1 to 3 This invention discloses a base fixture for supporting and transporting electrostatic chuck assemblies, particularly suitable for electrostatic chuck assemblies in HDP equipment. It includes a base 1, on which a support member 2 is mounted. The support member 2 is an upright cylindrical shape (such as a cylinder or square tube), with a support surface 3 formed on its upper edge. A side baffle 4 extends upwards from the outside of the support surface 3, the space enclosed by the side baffle 4 matching the shape of the electrostatic chuck assembly. A pipeline clearance groove 5 for accommodating an external pipeline A2 is formed on the side of the support member 2 from top to bottom. Handles 6 are provided on opposite sides of the support member 2.

[0045] Specifically, the support component 2 is used to support and fix the electrostatic chuck assembly A1 by contacting it. The support component 2 is preferably made of PTFE (Teflon) material and is integrally processed. It is hard and has a smooth surface, so as to achieve stable placement and prevent the electrostatic chuck assembly A1 from being scratched during transportation.

[0046] Taking the electrostatic chuck assembly A1 with a circular cross-section as an example, the support 2 of this tooling is designed as a cylinder, but it is not limited to this. It can also be designed as other shapes or applied to electrostatic chuck assemblies with other cross-sectional shapes as needed, so as to achieve support through the support surface 3 and limit through the side wall 4.

[0047] The area above the pipeline clearance groove 5 is open, allowing the outer pipeline A2 to be accommodated when the electrostatic chuck assembly A1 is placed from top to bottom. Preferably, a pipeline bracket 7, for example, in sheet form, extends outward from the bottom of the pipeline clearance groove 5 to provide some support and stability for the outer pipeline A2, preventing excessive swinging of the outer pipeline A2 during transportation and causing collisions. More preferably, for example, 1. Figure 5In the illustrated embodiment, the pipeline bracket 7 has a receiving groove that matches the external pipeline A2, corresponding to the size and position of the water pipe and optical fiber. It can be configured as a C-shaped clamp, with the diameter of the C-shape being the same as or slightly smaller than the corresponding pipeline diameter, and the opening of the C-shape slightly smaller than the corresponding pipeline diameter, thus utilizing its elasticity to achieve clamping and fixing. For the intermediate RF copper strip, a square notch is opened at the end of the pipeline bracket 7 to form a corresponding receiving groove, supporting the RF copper strip and preventing excessive swaying. The pipeline bracket 7 is preferably made of PVC plastic, but other metal or plastic materials can also be selected. It is fixedly connected to the bottom of the pipeline clearance groove 5 on the support member 2 by bolts or screws. Furthermore, different pipeline brackets 7 can be designed for different pipeline conditions at the bottom of the electrostatic chuck, allowing for disassembly and replacement before use.

[0048] The pipeline clearance groove 5 can be one or two oppositely arranged on both sides of the support 2, making it easier to align the outer pipeline A2 with the pipeline clearance groove 5 during disassembly. Handle holes 8 are provided on both sides of the line connecting the center of the pipeline clearance groove 5 and the center of the support 2. A handle 6 is formed above the handle hole 8, and the upper surface of the handle 6 is lower than the support surface 3. During handling, the worker can reach into the handle holes 8 on both sides and lift the fixture using the handle 6. It should be noted that other types of handles can be used as long as they facilitate handling; this method is preferred because it allows the handle 6 to be integrally formed with the support 2, making it easier to manufacture and avoids the need for additional handles protruding outwards, further preventing bumps and knocks.

[0049] In a more specific embodiment, there are two pipeline clearance slots 5 arranged opposite each other, and the support surface 3 consists of four fan-shaped surfaces evenly distributed at intervals by the pipeline clearance slots 5 and the handle 6. These four support surfaces 3 are located on the same horizontal plane, thus providing uniform and stable support for the electrostatic chuck assembly A1. Each of the four support surfaces 3 has an upwardly extending arc-shaped side arm for limiting movement and preventing the electrostatic chuck assembly A1 from slipping and falling. During maintenance, because the electrostatic chuck assembly A1 is upright and suspended, operation is more convenient. For example, the bottom of the electrostatic chuck assembly A1 can be inspected and operated through the slots on the side. Only one worker is needed to complete the task independently, without the need for assistance from others to place and stabilize the electrostatic chuck assembly A1.

[0050] The base 1 is mainly used for counterweight to reduce the risk of tipping over. The base 1 is preferably made of aluminum alloy, but other metals or plastics can also be used. The base 1 is connected to the support 2 by bolts or screws. For ease of movement and transportation, it is preferable to install several casters 9 at the bottom of the base 1, for example, by bolts or screws. In a more preferred embodiment, the base 1 is cylindrical, and the casters 9 are five omnidirectional casters evenly distributed around the lower end face of the base 1, forming a regular pentagonal installation position, which provides higher stability and effectively prevents tipping over. The base 1 has, for example, square perforated windows 10 around its perimeter to reduce resistance during movement.

[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A base fixture for supporting and transporting electrostatic chuck assemblies, characterized in that, The device includes a base (1) on which a support member (2) is provided; the support member (2) is a vertical cylindrical shape, and a support surface (3) is formed on the upper edge of the support member (2). An arc-shaped side wall (4) extends upward from the outside of the support surface (3). The space enclosed by the side wall (4) matches the shape of the electrostatic chuck assembly for positioning; a pipeline clearance groove (5) for accommodating the outer pipeline (A2) of the electrostatic chuck assembly (A1) is provided on the side of the support member (2) from top to bottom; handles (6) are provided on opposite sides of the support member (2). The pipeline clearance grooves (5) are two oppositely arranged on both sides of the support (2); handle holes (8) are provided on both sides of the line connecting the center of the pipeline clearance grooves (5) and the center of the support (2), and handles (6) are formed above the handle holes (8), with the upper surface of the handles (6) being lower than the support surface (3); the support surface (3) is four fan-shaped surfaces evenly distributed at intervals by the pipeline clearance grooves (5) and the handles (6). The bottom of the pipeline clearance groove (5) is provided with a pipeline bracket (7) extending outward; the pipeline bracket (7) is sheet-shaped; The pipeline bracket (7) has a receiving groove that matches the external pipeline (A2); the external pipeline (A2) includes an RF copper strip, a water pipe and an optical fiber; the receiving groove includes a clamp corresponding to the water pipe and the optical fiber to use elasticity to clamp and fix the water pipe and the optical fiber, and the receiving groove also includes a square notch opened at the end of the pipeline bracket (7) to support the RF copper strip and prevent excessive swinging.

2. The base fixture for supporting and transporting electrostatic chuck assemblies as described in claim 1, characterized in that, The pipeline bracket (7) is connected to the bottom of the pipeline clearance groove (5) by bolts or screws.

3. The base fixture for supporting and transporting an electrostatic chuck assembly as described in claim 1 or 2, characterized in that, The base (1) is provided with several casters (9) at its bottom.

4. The base fixture for supporting and transporting an electrostatic chuck assembly as described in claim 3, characterized in that, The base (1) is cylindrical, and the casters (9) are five evenly arranged circumferentially on the lower end face of the base (1).

5. The base fixture for supporting and transporting an electrostatic chuck assembly as described in claim 1, characterized in that, The base (1) and the support (2) are connected by bolts or screws.

6. The base fixture for supporting and transporting an electrostatic chuck assembly as described in claim 1, characterized in that, The support member (2) is hard and has a smooth surface, and the support member (2) is integrally formed.

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