A coordinate measuring machine scanning probe

Abstract

The application relates to the field of precision instrument measurement technology, and particularly discloses a three-coordinate measuring machine scanning probe, which comprises a top supporting mechanism, an upper connecting mechanism, an XY direction measuring mechanism, a lower connecting mechanism, a Z direction measuring mechanism and a measuring rod mechanism, one set of opposite sides of the XY direction measuring mechanism are connected with the top supporting mechanism through the upper connecting mechanism, another set of opposite sides of the XY direction measuring mechanism are connected with the Z direction measuring mechanism through the lower connecting mechanism, and the measuring rod mechanism is arranged below the Z direction measuring mechanism. The three-coordinate measuring machine scanning probe provided by the application can decompose spatial displacement in three directions, has compact structure, stable movement and high measurement precision, and can realize efficient three-dimensional scanning measurement.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of precision instrument measurement, more particularly, to a three-coordinate measuring machine scanning probe. BACKGROUND

[0002] Three-dimensional scanning probe is a key component of precision measuring instrument, especially indispensable in three-coordinate measuring machine. It mainly uses the superposition of double mechanical elastic spring sheets to record signals by the movement of spring sheets to produce relative displacement of sensors and display the displacement separation in X, Y and Z directions, and can perform scanning measurement. Three-dimensional probe is provided with a square parallel spring sheet in X, Y and Z directions. Currently, three-dimensional scanning probe of series-parallel composite type is generally used in three-coordinate measuring machines at home and abroad. For example, the patent US6131300 applied by MIES GEORG of Germany unifies the movement of X and Y directions into a planar movement, and combines the movement of Z direction to form three-dimensional measurement, which has relatively simple structure, but has coupling error and square spring sheet movement error. The patent CN109373878 applied by Xi'an University of Technology uses circular spring sheets to measure through three groups of mutually perpendicular spring sheets constituting guiding mechanism, which avoids square spring sheet movement error and has compact mechanism, but Y and Z axes have un-restrained suspended state when moving. SUMMARY

[0003] In order to solve the problems in the prior art, the present application provides a three-coordinate measuring machine scanning probe, which adopts series-parallel composite type, has simple structure and small movement error.

[0004] As a first aspect of the present application, a three-coordinate measuring machine scanning probe is provided, which comprises a top support mechanism, an upper connecting mechanism, an XY direction measuring mechanism, a lower connecting mechanism, a Z direction measuring mechanism and a measuring rod mechanism. One group of opposite sides of the XY direction measuring mechanism are connected with the top support mechanism through the upper connecting mechanism respectively, and the other group of opposite sides of the XY direction measuring mechanism are connected with the Z direction measuring mechanism through the lower connecting mechanism respectively. The measuring rod mechanism is arranged below the Z direction measuring mechanism.

[0005] Further, the XY direction measuring mechanism comprises an upper fixed frame, X direction double circular spring, Y direction double circular spring, X direction fixed shaft, X direction sensor fixed frame, X direction sensor, X direction magnetic core, Y direction fixed shaft, Y direction sensor fixed frame, Y direction sensor and Y direction magnetic core, a group of opposite sides of the upper fixed frame are vertically provided with the X direction double circular spring respectively, another group of opposite sides of the upper fixed frame are vertically provided with the Y direction double circular spring respectively, the center of the X direction double circular spring is connected with the X direction fixed shaft through screw thread, the lower end of the upper connecting mechanism is fixed with the X direction magnetic core, the X direction sensor fixed frame is fixed in the inside of the upper fixed frame, and the X direction sensor fixed frame is located in the hollow part inside the X direction fixed shaft, the X direction sensor is fixed on the X direction sensor fixed frame and coaxial with the X direction magnetic core; similarly, the center of the Y direction double circular spring is connected with the Y direction fixed shaft through screw thread, below the X direction moving mechanism and perpendicular to each other, the upper end of the lower connecting mechanism is fixed with the Y direction magnetic core, the Y direction sensor fixed frame is fixed in the inside of the upper fixed frame, and the Y direction sensor fixed frame is located in the hollow part inside the Y direction fixed shaft, the Y direction sensor is fixed on the Y direction sensor fixed frame and coaxial with the Y direction magnetic core.

[0006] Further, the Z direction measuring mechanism comprises a connecting plate, Z direction double circular spring, lower fixed frame, Z direction fixed shaft, measuring rod suction disc, cylindrical pin, Z direction sensor, Z direction magnetic core, gasket, magnet shield sleeve, magnet and Z direction sensor fixed frame; the lower fixed frame is fixed below the lower connecting mechanism through the connecting plate, the center of the Z direction double circular spring is arranged in the inside of the lower fixed frame through the Z direction fixed shaft, the Z direction double circular spring is locked and connected with the lower fixed frame through the gasket, the Z direction sensor fixed frame is fixed in the inside of the lower fixed frame, and the Z direction sensor fixed frame is located in the hollow part inside the Z direction fixed shaft, the Z direction sensor is fixed on the Z direction sensor fixed frame, the suction disc device is fixed below the lower fixed frame, the Z direction magnetic core is fixed in the center of the measuring rod suction disc, the Z direction magnetic core is coaxial with the Z direction sensor, the magnet and the magnet shield sleeve are inlaid in the groove at the bottom of the measuring rod suction disc, and meanwhile, three pairs of cylindrical pins are uniformly inlaid in the cylindrical holes in the circumference of the measuring rod suction disc, for cooperation with the measuring rod mechanism.

[0007] Further, the measuring rod mechanism comprises a measuring rod disc, a probe, a cylindrical iron sheet and a ceramic ball, the probe is arranged at the bottom of the measuring rod disc, the measuring rod disc is adsorbed below the Z-direction measuring mechanism through the suction disc device, wherein the upper surface of the measuring rod disc is uniformly inlaid with the cylindrical iron sheet and the ceramic ball, the position of the cylindrical iron sheet corresponds to the magnet to generate appropriate attractive force, and the ceramic ball contacts the cylindrical pin to generate positioning effect.

[0008] Further, the top supporting mechanism and the XY-direction measuring mechanism are locked with the upper connecting mechanism through bolts.

[0009] Further, the XY-direction measuring mechanism and the Z-direction measuring mechanism are locked with the lower connecting mechanism through bolts.

[0010] Further, the upper layer fixed frame is locked with the X-direction double circular spring piece, the Y-direction double circular spring piece, the X-direction fixed shaft, the Y-direction fixed shaft, the X-direction sensor fixed frame and the Y-direction sensor fixed frame through bolts respectively.

[0011] Further, the lower layer fixed frame is locked with the Z-direction double circular spring piece, a gasket, a Z-direction fixed shaft and a Z-direction sensor fixed frame through bolts respectively.

[0012] Further, the X-direction magnetic core is locked with the upper connecting mechanism through a locking screw on the upper connecting mechanism, and the Y-direction magnetic core is locked with the lower connecting mechanism through a locking screw on the lower connecting mechanism.

[0013] Further, the Z-direction magnetic core is locked with the measuring rod suction disc through a locking screw on the measuring rod suction disc.

[0014] The three-coordinate measuring machine scanning probe provided by the application has the following advantages:

[0015] 1. The probe of the application adopts a series-parallel composite and double circular spring piece combined mode to decouple the measurement of X, Y and Z directions, and the measurement of each direction avoids the movement error caused by the square spring piece as a guide rail, thereby improving the mechanical precision.

[0016] 2. The probe of the application has a simple and compact structure and stable movement, and the relevant movement mechanisms of X, Y and Z directions are stably constrained.

[0017] 3. The probe of the application can be used for three-dimensional scanning measurement of a three-coordinate measuring machine, and has the characteristics of high measurement precision, high sensitivity and high efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0018] The accompanying drawings are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application. In the drawings:

[0019] Figure 1 A perspective view of a three-coordinate measuring machine scanning probe is provided for the present application.

[0020] Figure 2 A perspective view of an XY direction measuring mechanism and connecting piece is provided for the present application.

[0021] Figure 3 An internal structure view of the XY direction measuring mechanism and connecting piece is provided for the present application.

[0022] Figure 4 A perspective view of a Z direction measuring mechanism is provided for the present application.

[0023] Figure 5 An internal structure view of the Z direction measuring mechanism is provided for the present application.

[0024] Figure 6 A bottom view of a measuring rod suction disc is provided for the present application.

[0025] Figure 7 A perspective view of a measuring rod mechanism is provided for the present application.

[0026] In the drawings: 1, top support mechanism, 2, upper connecting mechanism, 3, XY direction measuring mechanism, 4, lower connecting mechanism, 5, Z direction measuring mechanism, 6, measuring rod mechanism;

[0027] 3-1, upper layer fixed frame, 3-2, X direction double circular spring, 3-3, Y direction double circular spring, 3-4, X direction fixed shaft, 3-5, X direction sensor fixed frame, 3-6, X direction sensor, 3-7, X direction magnetic core, 3-8, Y direction fixed shaft, 3-9, Y direction sensor fixed frame, 3-10, Y direction sensor, 3-11, Y direction magnetic core;

[0028] 5-1, connecting plate, 5-2, Z direction double circular spring, 5-3, lower layer fixed frame, 5-4, Z direction fixed shaft, 5-5, measuring rod suction disc, 5-6, cylindrical pin, 5-7, Z direction sensor, 5-8, Z direction magnetic core, 5-9, gasket, 5-10, magnet shield sleeve, 5-11, magnet, 5-12, Z direction sensor fixed frame;

[0029] 6-1, measuring rod disc, 6-2, probe, 6-3, cylindrical iron sheet, 6-4, ceramic ball. DETAILED DESCRIPTION

[0030] For further illustrating the technical means and effects taken by the present application to achieve the predetermined inventive objectives, the following will combine the drawings and preferred embodiments to specifically describe the implementation, structure, features and effects of a three-coordinate measuring machine scanning probe according to the present application, as follows. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present application.

[0031] It should be noted that the terms "first", "second", and the like in the specification and claims of the present application and the above-described drawings are used to distinguish similar objects, and do not necessarily indicate a specific order or a chronological sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented. In addition, the terms "comprise" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device comprising a series of steps or units does not necessarily limit to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to the process, method, product or device.

[0032] In the explanation of the present application, it should be noted that the terms "mount", "connect", and "connect" should be understood broadly, unless otherwise specified. For example, the connection can be a fixed connection, or can be connected through a special interface, or can be indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0033] In the present embodiment, a three-coordinate measuring machine scanning probe is provided, as shown in Figure 1 The three-coordinate measuring machine scanning probe comprises a top support mechanism 1, an upper connecting mechanism 2, an XY direction measuring mechanism 3, a lower connecting mechanism 4, a Z direction measuring mechanism 5, and a measuring rod mechanism 6. One set of opposite sides of the XY direction measuring mechanism 3 are connected to the top support mechanism 1 through the upper connecting mechanism 2, respectively. Another set of opposite sides of the XY direction measuring mechanism 3 are connected to the Z direction measuring mechanism 5 through the lower connecting mechanism 4, respectively. The measuring rod mechanism 6 is arranged below the Z direction measuring mechanism 5.

[0034] The present application realizes three-dimensional measurement through the linkage of the XY direction measuring mechanism 3 and the Z direction measuring mechanism 5 (see Figures 2-5 ).

[0035] Preferably, as shown in Figures 2-3As shown, the XY direction measuring mechanism 3 comprises an upper fixed frame 3-1, X direction double circular spring 3-2, Y direction double circular spring 3-3, X direction fixed shaft 3-4, X direction sensor fixed frame 3-5, X direction sensor 3-6, X direction magnetic core 3-7, Y direction fixed shaft 3-8, Y direction sensor fixed frame 3-9, Y direction sensor 3-10 and Y direction magnetic core 3-11, a group of opposite sides of the upper fixed frame 3-1 is respectively vertically provided with the X direction double circular spring 3-2, another group of opposite sides of the upper fixed frame 3-1 is respectively vertically provided with the Y direction double circular spring 3-3, the center of the X direction double circular spring 3-2 is connected with the X direction fixed shaft 3-4 through threads, the lower end of the upper connecting mechanism 2 is fixed with the X direction magnetic core 3-7, the X direction sensor fixed frame 3-5 is fixed inside the upper fixed frame 3-1, and the X direction sensor fixed frame 3-5 is located in the hollow part inside the X direction fixed shaft 3-4, the X direction sensor 3-6 is fixed on the X direction sensor fixed frame 3-5 and coaxial with the X direction magnetic core 3-7; similarly, the center of the Y direction double circular spring 3-3 is connected with the Y direction fixed shaft 3-8 through threads, below the X direction moving mechanism and perpendicular to each other, the upper end of the lower connecting mechanism 4 is fixed with the Y direction magnetic core 3-11, the Y direction sensor fixed frame 3-9 is fixed inside the upper fixed frame 3-1, and the Y direction sensor fixed frame 3-9 is located in the hollow part inside the Y direction fixed shaft 3-8, the Y direction sensor 3-10 is fixed on the Y direction sensor fixed frame 3-9 and coaxial with the Y direction magnetic core 3-11.

[0036] In the embodiment, the circumferences of the X direction double circular spring 3-2 and the Y direction double circular spring 3-3 are respectively fixed in the four surface circular grooves of the upper fixed frame 3-1 through bolts, the center circumference is locked between the connecting mechanism and the fixed shaft through bolts, the sensor fixed frame is fixed on both sides of the upper fixed frame 3-1, the sensor is inlaid between the fixed frames, the magnetic core is fixed at one end of the connecting mechanism, extends into the sensor inner hole and is coaxial with the sensor.

[0037] Preferably, as Figures 4-6As shown, the Z-axis measuring mechanism 5 includes a connecting plate 5-1, a Z-axis double circular spring 5-2, a lower fixing frame 5-3, a Z-axis fixing shaft 5-4, a measuring rod suction cup 5-5, a cylindrical pin 5-6, a Z-axis sensor 5-7, a Z-axis magnetic core 5-8, a gasket 5-9, a magnet shielding sleeve 5-10, a magnet 5-11, and a Z-axis sensor mounting bracket 5-12. The lower fixing frame 5-3 is fixed below the lower connecting mechanism 4 by the connecting plate 5-1. The center of the Z-axis double circular spring 5-2 is located inside the lower fixing frame 5-3 through the Z-axis fixing shaft 5-4. The Z-axis double circular spring 5-2 is locked to the lower fixing frame 5-3 by the gasket 5-9. The Z-axis sensor mounting bracket 5-7... 12 is fixed inside the lower fixing frame 5-3, and the Z-axis sensor fixing bracket 5-12 is located in the hollow part inside the Z-axis fixing shaft 5-4. The Z-axis sensor 5-7 is fixed on the Z-axis sensor fixing bracket 5-12. The suction cup device 5-5 is fixed below the lower fixing frame 5-3. The Z-axis magnetic core 5-8 is fixed at the center of the probe suction cup 5-5. The Z-axis magnetic core 5-8 and the Z-axis sensor 5-7 are coaxial. The magnet 5-11 and the magnet shielding sleeve 5-10 are embedded in the groove at the bottom of the probe suction cup 5-5. At the same time, three pairs of cylindrical pins 5-6 are evenly embedded in the cylindrical holes around the circumference of the probe suction cup 5-5 for cooperation with the probe mechanism 6.

[0038] In this embodiment, the circumference of the Z-direction double circular spring 5-2 is fixed to the upper and lower surface grooves of the lower fixing frame 5-3 by bolts, and the central circumference is locked between the connecting mechanism and the fixing shaft by bolts. The sensor fixing frame is fixed on both sides of the lower fixing frame, the sensor is embedded between the fixing frames, and the magnetic core is fixed to one end of the measuring rod suction cup 5-5, extending to the inner hole of the sensor and keeping coaxial with the sensor.

[0039] Preferably, such as Figure 7 As shown, the measuring rod mechanism 6 includes a measuring rod disk 6-1, a probe 6-2, a cylindrical iron sheet 6-3, and a ceramic ball 6-4. The probe 6-2 is located at the bottom of the measuring rod disk 6-1. The measuring rod disk 6-1 is adsorbed below the Z-axis measuring mechanism 5 by the suction cup device 5-5. The cylindrical iron sheet 6-3 and the ceramic ball 6-4 are uniformly embedded on the upper surface of the measuring rod disk 6-1. The position of the cylindrical iron sheet 6-3 corresponds to the magnet 5-11 to generate a suitable attractive force. The ceramic ball 6-4 contacts the cylindrical pin 5-6 to generate a positioning effect.

[0040] Preferably, both the top support mechanism 1 and the XY measuring mechanism 3 are locked to the upper connecting mechanism 2 by bolts.

[0041] Preferably, the XY direction measuring mechanism 3 and the Z direction measuring mechanism 5 are locked with the lower connecting mechanism 4 through bolts.

[0042] Preferably, the upper layer fixed frame 3-1 is locked with the X direction double circular spring 3-2, the Y direction double circular spring 3-3, the X direction fixed shaft 3-4, the Y direction fixed shaft 3-8, the X direction sensor fixed frame 3-5 and the Y direction sensor fixed frame 3-9 through bolts respectively.

[0043] Preferably, the lower layer fixed frame 5-3 is locked with the Z direction double circular spring 5-2, the gasket 5-9, the Z direction fixed shaft 5-4 and the Z direction sensor fixed frame 5-12 through bolts respectively.

[0044] Preferably, the X direction magnetic core 3-7 is locked with the upper connecting mechanism 2 through a locking screw on the upper connecting mechanism 2, and the Y direction magnetic core 3-11 is locked with the lower connecting mechanism 4 through a locking screw on the lower connecting mechanism 4.

[0045] Preferably, the Z direction magnetic core 5-8 is locked with the measuring rod suction disc 5-5 through a locking screw on the measuring rod suction disc 5-5.

[0046] The working principle of the scanning probe of the three-coordinate measuring machine provided by the application is as follows: the scanning probe is fixed at the end of the moving shaft of the three-coordinate measuring machine, the measured part is fixed on the workbench, when the three-coordinate measuring machine measures the part, the moving shaft is driven to make the probe 6-2 of the scanning probe contact with the surface of the part, when the probe 6-2 produces a micro spatial displacement, the spatial displacement is decomposed into X direction, Y direction and Z direction partial displacements, so that the sensors and the magnetic cores in each direction produce relative displacements.

[0047] As shown in Figures 1-7 The working process of the scanning probe of the three-coordinate measuring machine is as follows:

[0048] When the probe 6-2 is subjected to the X direction measuring force, the X direction double circular spring 3-2 elastically deforms, at this time, the X direction magnetic core 3-7 fixed at the center of the upper connecting mechanism 2 is stationary, the X direction sensor 3-6 fixed on the X direction sensor fixed frame 3-5 produces X direction displacement with the upper layer fixed frame 3-1, the X direction magnetic core 3-7 and the X direction sensor 3-6 produce relative displacement, and the Y direction magnetic core 3-11 and the Z direction magnetic core 5-8 are stationary relative to the sensors;

[0049] When the probe 6-2 is subjected to the Y direction measuring force, the Y direction double circular spring 3-3 is elastically deformed, at this time the Y direction magnetic core 3-11 fixed in the center of the lower connecting mechanism 4 generates Y direction displacement, the Y direction sensor 3-10 fixed on the Y direction sensor fixed frame 3-9 keeps still with the upper fixed frame 3-1, the Y direction magnetic core 3-11 and the Y direction sensor 3-10 generate relative displacement, while the X direction magnetic core 3-7 and the Z direction magnetic core 5-8 keep still with the sensor.

[0050] When the probe 6-2 is subjected to the Z direction measuring force, the Z direction double circular spring 5-2 is elastically deformed, at this time the Z direction magnetic core 5-8 fixed in the center of the measuring rod suction disc 5-5 generates Z direction displacement, the Z direction sensor 5-7 fixed on the Z direction sensor fixed frame 5-12 keeps still with the lower fixed frame 5-3, the Z direction magnetic core 5-8 and the Z direction sensor 5-7 generate relative displacement, while the X direction magnetic core 3-7 and the Y direction magnetic core 3-11 keep still with the sensor.

[0051] The above is only the preferred embodiment of the present application, and is not intended to limit the present application in any form. Although the present application has been disclosed as above with the preferred embodiment, it is not intended to limit the present application. Any person skilled in the art can make some changes or modifications to the above disclosed technical content to make equivalent embodiments with equivalent changes, but as long as the changes or modifications do not deviate from the technical solution of the present application, any simple modification, equivalent change and modification of the above embodiments according to the technical essence of the present application are still within the scope of the present application.

Claims

1. A scanning probe for a coordinate measuring machine, characterized in that, It includes a top support mechanism (1), an upper connecting mechanism (2), an XY direction measuring mechanism (3), a lower connecting mechanism (4), a Z direction measuring mechanism (5), and a measuring rod mechanism (6). One set of opposite sides of the XY direction measuring mechanism (3) is connected to the top support mechanism (1) through the upper connecting mechanism (2), and the other set of opposite sides of the XY direction measuring mechanism (3) is connected to the Z direction measuring mechanism (5) through the lower connecting mechanism (4). The measuring rod mechanism (6) is located below the Z direction measuring mechanism (5). The XY measuring mechanism (3) includes an upper fixed frame (3-1), an X-direction double circular spring (3-2), a Y-direction double circular spring (3-3), an X-direction fixed shaft (3-4), an X-direction sensor mounting bracket (3-5), an X-direction sensor (3-6), an X-direction magnetic core (3-7), a Y-direction fixed shaft (3-8), a Y-direction sensor mounting bracket (3-9), a Y-direction sensor (3-10), and a Y-direction magnetic core (3-11). The X-direction double circular spring (3-2) is vertically arranged on one set of opposite sides of the upper fixed frame (3-1), and the Y-direction double circular spring (3-3) is vertically arranged on the other set of opposite sides of the upper fixed frame (3-1). The center of the X-direction double circular spring (3-2) is connected to the X-direction fixed shaft (3-4) via a thread. The lower end of the upper connecting mechanism (2) is fixed with the X-direction magnetic core (3-7), and the X-direction sensor mounting bracket (3-5) is fixed with... The X-axis sensor (3-5) is located inside the upper fixed frame (3-1) and is located in the hollow part inside the X-axis fixed shaft (3-4). The X-axis sensor (3-6) is fixed on the X-axis sensor (3-5) and is coaxial with the X-axis magnetic core (3-7). Similarly, the center of the Y-axis double circular spring (3-3) is connected to the Y-axis fixed shaft (3-8) by a thread. It is located below the X-axis motion mechanism and perpendicular to each other. The upper end of the lower connecting mechanism (4) is fixed with the Y-axis magnetic core (3-11). The Y-axis sensor (3-9) is fixed inside the upper fixed frame (3-1) and is located in the hollow part inside the Y-axis fixed shaft (3-8). The Y-axis sensor (3-10) is fixed on the Y-axis sensor (3-9) and is coaxial with the Y-axis magnetic core (3-11). The Z-axis measuring mechanism (5) includes a connecting plate (5-1), a Z-axis double circular spring (5-2), a lower fixing frame (5-3), a Z-axis fixing shaft (5-4), a measuring rod suction cup (5-5), a cylindrical pin (5-6), a Z-axis sensor (5-7), a Z-axis magnetic core (5-8), a gasket (5-9), a magnet shielding sleeve (5-10), a magnet (5-11), and a Z-axis sensor mounting bracket (5-12). The lower fixing frame (5-3) is fixed below the lower connecting mechanism (4) via the connecting plate (5-1). The center of the Z-axis double circular spring (5-2) is located inside the lower fixing frame (5-3) via the Z-axis fixing shaft (5-4). The Z-axis double circular spring (5-2) is locked to the lower fixing frame (5-3) via the gasket (5-9). The Z-axis sensor mounting bracket is... The mounting bracket (5-12) is fixed inside the lower mounting frame (5-3), and the Z-axis sensor mounting bracket (5-12) is located in the hollow part inside the Z-axis fixed shaft (5-4). The Z-axis sensor (5-7) is fixed on the Z-axis sensor mounting bracket (5-12). The probe suction cup (5-5) is fixed below the lower mounting frame (5-3). The Z-axis magnetic core (5-8) is fixed at the center of the probe suction cup (5-5). The Z-axis magnetic core (5-8) and the Z-axis sensor (5-7) are coaxial. The magnet (5-11) and the magnet shielding sleeve (5-10) are embedded in the groove at the bottom of the probe suction cup (5-5). At the same time, three pairs of cylindrical pins (5-6) are evenly embedded in the cylindrical holes around the circumference of the probe suction cup (5-5) for cooperation with the probe mechanism (6).

2. The scanning probe of a coordinate measuring machine according to claim 1, characterized in that, The measuring rod mechanism (6) includes a measuring rod disk (6-1), a probe (6-2), a cylindrical iron sheet (6-3), and a ceramic ball (6-4). The probe (6-2) is located at the bottom of the measuring rod disk (6-1). The measuring rod disk (6-1) is adsorbed below the Z-axis measuring mechanism (5) by the measuring rod suction cup (5-5). The cylindrical iron sheet (6-3) and the ceramic ball (6-4) are uniformly embedded on the upper surface of the measuring rod disk (6-1). The position of the cylindrical iron sheet (6-3) corresponds to the magnet (5-11) to generate a suitable attractive force. The ceramic ball (6-4) contacts the cylindrical pin (5-6) to generate a positioning effect.

3. The scanning probe of a coordinate measuring machine according to claim 1, characterized in that, The top support mechanism (1) and the XY measuring mechanism (3) are both locked to the upper connecting mechanism (2) by bolts.

4. A scanning probe for a coordinate measuring machine according to claim 1, characterized in that, The XY measuring mechanism (3) and the Z measuring mechanism (5) are both locked to the lower connecting mechanism (4) by bolts.

5. A scanning probe for a coordinate measuring machine according to claim 1, characterized in that, The upper fixing frame (3-1) is locked to the X-direction double circular spring (3-2), Y-direction double circular spring (3-3), X-direction fixing shaft (3-4), Y-direction fixing shaft (3-8), X-direction sensor fixing bracket (3-5) and Y-direction sensor fixing bracket (3-9) by bolts.

6. A scanning probe for a coordinate measuring machine according to claim 1, characterized in that, The lower fixing frame (5-3) is locked to the Z-direction double circular spring (5-2), the gasket (5-9), the Z-direction fixing shaft (5-4), and the Z-direction sensor fixing bracket (5-12) by bolts.

7. A scanning probe for a coordinate measuring machine according to claim 1, characterized in that, The X-direction magnetic core (3-7) is locked to the upper connecting mechanism (2) by the set screw on the upper connecting mechanism (2), and the Y-direction magnetic core (3-11) is locked to the lower connecting mechanism (4) by the set screw on the lower connecting mechanism (4).

8. A scanning probe for a coordinate measuring machine according to claim 1, characterized in that, The Z-axis magnetic core (5-8) is locked to the probe suction cup (5-5) by the set screw on the probe suction cup (5-5).

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