Waste gas treatment device and control method thereof

Abstract

The present invention provides an exhaust gas treatment device and a control method thereof, which relates to the field of pan-semiconductor technology, and is used to solve the problem that the monitoring port in the exhaust gas treatment device is easily blocked due to gas disturbance, thereby greatly extending the equipment maintenance cycle and reducing the maintenance cost. The exhaust gas treatment device includes: at least one intake pipe unit; the intake pipe unit includes: an intake pipeline and a negative pressure monitoring pipeline; wherein the intake pipeline includes an intake pipe, and a plurality of monitoring ports are arranged on the pipe wall of the intake pipe; the negative pressure monitoring pipeline includes a monitoring pipe, and the monitoring pipe includes at least one inlet and a plurality of outlets, and each of the outlets is respectively connected to a different monitoring port; the inlet is configured to: when the negative pressure monitoring pipeline is in a working state, receive anti-disturbance gas, so that the gas flow is maintained inside the monitoring pipe.

Description

Technical Field

[0001] The present invention relates to the field of pan-semiconductor technology, and in particular to an exhaust gas treatment device and a control method thereof. Background Art

[0002] During the production and manufacturing of integrated circuits, a large amount of process gases are generated. In order to avoid polluting the environment, these process gases need to be treated accordingly through waste gas treatment equipment.

[0003] During the operation of the waste gas treatment equipment, once the internal pipeline is blocked, the vacuum pump in the front-end system will stop due to excessive pressure, thus affecting the operation of the system and reducing production efficiency. At present, the internal pipeline of the waste gas treatment equipment is monitored by setting a negative pressure monitoring port, but the negative pressure monitoring port is easily blocked due to internal gas disturbance, which greatly shortens the equipment maintenance cycle and increases the maintenance cost. Summary of the invention

[0004] The present invention provides an exhaust gas treatment device and a control method thereof, which are used to solve the problem that a monitoring port in the exhaust gas treatment device is easily blocked due to gas disturbance, thereby greatly extending the equipment maintenance cycle and reducing the maintenance cost.

[0005] The present invention provides an exhaust gas treatment device, comprising: at least one air intake pipe unit; the air intake pipe unit comprises: an air intake pipeline and a negative pressure monitoring pipeline;

[0006] Wherein, the air intake pipeline comprises an air intake pipe, and a plurality of monitoring ports are arranged on the wall of the air intake pipe;

[0007] The negative pressure monitoring pipeline comprises a monitoring tube, wherein the monitoring tube comprises at least one inlet and a plurality of outlets, and each of the outlets is respectively connected to a different monitoring port;

[0008] The inlet is configured to receive anti-disturbance gas when the negative pressure monitoring pipeline is in working state, so as to maintain gas flow inside the monitoring tube.

[0009] According to an exhaust gas treatment device provided by the present invention, the pipe wall of the intake pipe is provided with four monitoring ports; the monitoring pipe includes one inlet and four outlets;

[0010] The four monitoring ports are divided into two groups, each group includes a first monitoring port and a second monitoring port arranged at intervals along the axial direction of the intake pipe; the two first monitoring ports belonging to different groups are arranged along the radial direction of the intake pipe; the two second monitoring ports belonging to different groups are arranged along the radial direction of the intake pipe.

[0011] According to an exhaust gas treatment device provided by the present invention, the intake pipe includes an inlet end and an outlet end, and the distance between each monitoring port and the inlet end along the axial direction of the intake pipe is smaller than the distance between each monitoring port and the outlet end along the axial direction of the intake pipe.

[0012] According to an exhaust gas treatment device provided by the present invention, the intake pipeline also includes an isolation tube; the isolation tube is sleeved inside the intake pipe, and one end of the isolation tube is fixed to the inlet end; the axial distance of the isolation tube along the intake pipe is greater than the axial distance between any of the monitoring ports and the inlet end along the intake pipe.

[0013] According to an exhaust gas treatment device provided by the present invention, the air intake pipeline further includes a constricted pipe;

[0014] The shrinking tube is sleeved inside the air inlet pipe, and the isolation tube is arranged between the air inlet pipe and the shrinking tube, and one end of the shrinking tube is fixed to the inlet end; the axial length of the shrinking tube along the air inlet pipe is greater than the axial length of the isolation tube along the air inlet pipe.

[0015] According to an exhaust gas treatment device provided by the present invention, the length of the contracted pipe along the axial direction of the intake pipe is at least twice the length of the isolation pipe along the axial direction of the intake pipe.

[0016] According to an exhaust gas treatment device provided by the present invention, the air intake pipeline further includes a heating layer;

[0017] The heating layer is arranged around the outer wall of the air inlet pipe; the heating layer is provided with a plurality of heating openings, and the heating openings are respectively connected with the monitoring port and the outlet.

[0018] According to an exhaust gas treatment device provided by the present invention, the intake pipeline further includes a first pressure sensor, a temperature sensor, a thermostat and a controller; the negative pressure monitoring pipeline further includes a second pressure sensor; the first pressure sensor, the temperature sensor, the thermostat and the second pressure sensor are electrically connected to the controller respectively;

[0019] The first pressure sensor is configured to: obtain and transmit internal pressure information of the intake pipe to the controller;

[0020] The temperature sensor is configured to: obtain temperature information of the heating layer according to a first monitoring period and a second monitoring period respectively, and transmit the temperature information of the heating layer to the controller;

[0021] The second pressure sensor is configured to: obtain and transmit internal pressure information of the monitoring tube to the controller;

[0022] The controller is configured to: obtain and determine a proportional coefficient P of a PID formula Y=P*A1e(K)+B1e(K-1)+C1e(K-2) according to the pressure information transmitted by the first pressure sensor, the temperature information transmitted by the temperature sensor, and the pressure information transmitted by the second pressure sensor, wherein Y represents the PID control output, A1e(K) represents the proportion, B1e(K-1) represents the integral, and C1e(K-2) represents the differential; and output control information to the temperature controller according to the PID formula;

[0023] The temperature controller is configured to adjust the heating temperature of the heating layer according to the control information transmitted by the controller so that the internal temperature of the intake pipe is maintained within a preset range.

[0024] The present invention also provides a control method for the above-mentioned exhaust gas treatment equipment, comprising:

[0025] The first pressure sensor acquires and transmits the internal pressure information of the intake pipe to the controller;

[0026] The second pressure sensor acquires and transmits the internal pressure information of the monitoring tube to the controller;

[0027] The temperature sensor obtains temperature information of the heating layer according to a first monitoring period and a second monitoring period respectively, and transmits the temperature information of the heating layer to the controller;

[0028] The controller acquires and determines the proportional coefficient P of the PID formula Y=P*A1e(K)+B1e(K-1)+C1e(K-2) according to the pressure information transmitted by the first pressure sensor, the temperature information transmitted by the temperature sensor and the pressure information transmitted by the second pressure sensor, wherein Y represents the PID control output, A1e(K) represents the proportion, B1e(K-1) represents the integral, and C1e(K-2) represents the differential;

[0029] The controller outputs control information to the temperature controller according to the PID formula;

[0030] The thermostat adjusts the heating temperature of the heating layer according to the control information transmitted by the controller, so that the internal temperature of the intake pipe is maintained within a preset range.

[0031] According to a control method for an exhaust gas treatment device provided by the present invention, the controller obtains and determines the proportional coefficient P of the PID formula Y=P*A1e(K)+B1e(K-1)+C1e(K-2) according to the pressure information transmitted by the first pressure sensor, the temperature information transmitted by the temperature sensor and the pressure information transmitted by the second pressure sensor, including:

[0032] The controller determines |TC T1 -TC T2 |Whether it belongs to the interval (20,50); Among them, TC T1 ,TC T2 represents the temperature value of the heating layer obtained by the temperature sensor according to the first monitoring period and the second monitoring period respectively;

[0033] If yes, then P=1.5*(|PES1|-|PES2|); wherein P represents the proportionality coefficient of the PID formula, |PES1| represents the absolute value of the internal pressure value of the intake pipe obtained by the first pressure sensor, and |PES2| represents the absolute value of the internal pressure value of the monitoring pipe obtained by the second pressure sensor;

[0034] If not, determine the interval to which |PES1|-|PES2| belongs;

[0035] If |PES1|-|PES2|≤50, then P=1.0;

[0036] If 50<|PES1|-|PES2|≤00, then P=1.5((TC T1 +TC T2 ) / (|TC T1 -TC T2 |));

[0037] If 200<|PES1|-|PES2|≤500, then P=2((TC T1 +TC T2 ) / (|TC T1 -TC T2 |));

[0038] If 500<|PES1|-|PES2|, then P=3(|TC T1 -TC T2 |).

[0039] The present invention provides an exhaust gas treatment device and a control method thereof, the exhaust gas treatment device comprising: at least one intake pipe unit; the intake pipe unit comprising: an intake pipeline and a negative pressure monitoring pipeline; wherein the intake pipeline comprises an intake pipe, and a plurality of monitoring ports are arranged on the pipe wall of the intake pipe; the negative pressure monitoring pipeline comprises a monitoring pipe, and the monitoring pipe comprises at least one inlet and a plurality of outlets, and each of the outlets is respectively connected to a different monitoring port; the inlet is configured to receive anti-disturbance gas when the negative pressure monitoring pipeline is in a working state, so as to keep gas flowing inside the monitoring pipe. The exhaust gas treatment equipment provided in the embodiment of the present invention can input anti-disturbance gas into the inlet of the monitoring tube, and the anti-disturbance gas can purge the monitoring pipeline, so that there is always gas flowing inside the monitoring tube, thereby ensuring that there is always gas flowing out of the monitoring port, and no gas bypass will be formed at the monitoring port, thereby preventing the monitoring port from being blocked by gas disturbance, which can greatly extend the equipment maintenance cycle and reduce maintenance costs. In addition, compared with equipment with one monitoring port, the multiple monitoring ports set in the embodiment of the present invention can further extend the blocking cycle, thereby further extending the equipment maintenance cycle, while further reducing maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0041] Figure 1 It is one of the structural schematic diagrams of the waste gas treatment equipment provided by the present invention;

[0042] Figure 2 This is the second structural schematic diagram of the waste gas treatment equipment provided by the present invention;

[0043] Figure 3 This is the third structural schematic diagram of the waste gas treatment equipment provided by the present invention;

[0044] Figure 4 It is one of the flow charts of the control method of the exhaust gas treatment equipment provided by the present invention;

[0045] Figure 5 This is the second flow chart of the control method of the exhaust gas treatment equipment provided by the present invention. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0047] In the embodiments of the present invention, words such as "first" and "second" are used to distinguish between identical or similar items with substantially the same functions and effects. This is only for the purpose of clearly describing the technical solutions of the embodiments of the present invention, and shall not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features.

[0048] In the embodiments of the present invention, "multiple" means two or more, and "at least one" means one or more, unless otherwise clearly defined.

[0049] An embodiment of the present invention provides an exhaust gas treatment device, referring to Figure 1 As shown, it includes: at least one air intake pipe unit 1; the air intake pipe unit 1 includes: an air intake pipeline 2 and a negative pressure monitoring pipeline 3.

[0050] Among them, reference Figure 1 As shown, the air intake line 2 includes an air intake pipe 21, and a plurality of monitoring ports are arranged on the wall of the air intake pipe 21; the negative pressure monitoring line 3 includes a monitoring pipe 31, and the monitoring pipe 31 includes at least one inlet ( Figure 1 Unlabeled) and multiple outlets ( Figure 1 Not marked), each outlet is connected to a different monitoring port; the inlet is configured to receive anti-disturbance gas when the negative pressure monitoring pipeline is in working state to maintain gas flow inside the monitoring tube.

[0051] The number of the above-mentioned intake pipe units is not limited. Figure 1 Take an intake pipe unit as an example. The intake pipe of each intake pipe unit is provided with a negative pressure monitoring pipe. In order to avoid mutual interference, the intake pipe and the negative pressure monitoring pipe correspond to each other.

[0052] The number of monitoring ports provided on the pipe wall of the above-mentioned intake pipe is not specifically limited, and for example, 2, 3, 4, 5, etc. monitoring ports may be provided. Figure 1 Taking four monitoring ports as an example, the four monitoring ports are marked as A1, A2, A3 and A4 for easy distinction. The sizes of the above monitoring ports are not specifically limited and can be selected according to actual conditions.

[0053] There is no limitation on the length and setting method of the monitoring tube as long as the corresponding requirements are met.

[0054] There is no specific requirement for the number of inlets of the monitoring tube, and the number of outlets is the same as the number of monitoring ports. The specific type of the anti-disturbance gas received by the inlet is not limited. For example, the anti-disturbance gas may include an inert gas, such as nitrogen (N2) or helium (He). Of course, it can also be other gases, which are not listed here.

[0055] The above-mentioned exhaust gas treatment equipment may also include other structures, such as Figure 1 The air outlet pipe 4 shown; Figure 1 In the embodiment, other structures such as pipelines may be included between the air inlet pipe unit 1 and the air outlet pipe 4. Figure 1 The use of wavy lines indicates that structures such as intermediate pipelines are omitted; Figure 1 Only one intake pipe unit is shown in the figure, and the other intake pipe units are not shown. The wavy line on the right side of the intake pipe unit indicates that the other intake pipe units are omitted.

[0056] The above-mentioned waste gas treatment equipment can treat any process gas that needs to be treated in the semiconductor process, and is particularly suitable for process gases generated by the metal etching process. The process gas generated in this process is greatly affected by temperature and is very likely to cause pipeline blockage and monitoring port blockage.

[0057] The exhaust gas treatment equipment provided in the embodiment of the present invention can input anti-disturbance gas into the inlet of the monitoring tube, and the anti-disturbance gas can purge the monitoring pipeline, so that there is always gas flowing inside the monitoring tube, thereby ensuring that there is always gas flowing out of the monitoring port, and no gas bypass will be formed at the monitoring port, thereby preventing the monitoring port from being blocked by gas disturbance, which can greatly extend the equipment maintenance cycle and reduce maintenance costs. In addition, compared with equipment with one monitoring port, the multiple monitoring ports set in the embodiment of the present invention can further extend the blocking cycle, thereby further extending the equipment maintenance cycle, while further reducing maintenance costs.

[0058] In one or more embodiments, in order to ensure that the flow rate of the anti-disturbance gas in the negative pressure monitoring pipeline is maintained within a certain range, reference Figure 1 As shown, the negative pressure monitoring pipeline 3 can also include a pressure regulating valve 33. The pressure parameter of the pressure regulating valve can be set to 5-12psi, so as to ensure that the gas flow inside the monitoring tube is 1-2.5slm. In this way, a small amount of gas can be maintained flowing inside the monitoring tube, which can prevent the gas bypass problem at the monitoring port and avoid the influence of the anti-disturbance gas on the gas in the intake pipe as much as possible.

[0059] In one or more embodiments, optionally, reference Figure 2 and Figure 3 As shown, the wall of the air intake pipe 21 is provided with four monitoring ports ( Figure 2The monitoring tube 31 includes an inlet ( Figure 2 unmarked) and four exits ( Figure 2 Labeled as B1, B2, B3 and B4 respectively).

[0060] The four monitoring ports are divided into two groups, each group includes a first monitoring port and a second monitoring port arranged at intervals along the axial direction of the intake pipe; two first monitoring ports belonging to different groups are arranged radially along the intake pipe; two second monitoring ports belonging to different groups are arranged radially along the intake pipe.

[0061] refer to Figure 2 and Figure 3 As shown, monitoring port A1 can be used as the first monitoring port, monitoring port A2 can be used as the second monitoring port, and monitoring port A1 and monitoring port A2 form a group; monitoring port A3 can be used as the first monitoring port, monitoring port A4 can be used as the second monitoring port, and monitoring port A3 and monitoring port A4 form another group. Monitoring port A1 and monitoring port A2 are arranged at intervals along the axial direction OO2 of the intake pipe 21, and monitoring port A3 and monitoring port A4 are arranged at intervals along the axial direction OO2 of the intake pipe 21; monitoring port A1 and monitoring port A3 are arranged along the radial direction OO1 of the intake pipe 21, and monitoring port A2 and monitoring port A4 are arranged along the radial direction OO1 of the intake pipe 21.

[0062] The exhaust gas treatment equipment provided by the embodiment of the present invention can simplify the structure as much as possible and facilitate implementation while extending the blocking period by setting four monitoring ports; at the same time, the four monitoring ports are set according to the above-mentioned setting method to avoid mutual influence, effectively improve the use time, and further extend the blocking period.

[0063] In actual application, the inlet of the inlet pipe is first connected to the process gas, which is more prone to blockage than other parts of the inlet pipe. In order to improve the monitoring efficiency, it is optional to refer to Figure 2 and Figure 3 As shown, the air intake pipe 21 includes an inlet end 211 and an outlet end 212, and the distance between each monitoring port and the inlet end along the axial direction of the air intake pipe is smaller than the distance between each monitoring port and the outlet end along the axial direction of the air intake pipe. Figure 2 and Figure 3 As shown, taking the monitoring port A4 as an example, the distance L between the monitoring port A4 and the inlet end along the axial direction OO2 of the intake pipe is smaller than the distance L1 between the monitoring port A4 and the outlet end along the axial direction OO2 of the intake pipe, that is, the monitoring port A4 is arranged on the pipe wall closer to the inlet end.

[0064] In order to prevent the process gas from flowing around and entering the monitoring port to form a blockage, it is necessary to separate the process gas entering the inlet pipe from the monitoring port; at the same time, prevent the process gas temperature from dropping and forming adhesion blockage on the pipe wall; optionally, refer to Figure 1As shown, the air intake line 2 further includes an isolation tube 22; the isolation tube 22 is sleeved inside the air intake pipe 21, and one end of the isolation tube 22 is fixed to the inlet end 211; Figure 2 and Figure 3 As shown, the distance H of the isolation tube 22 along the axial direction OO2 of the intake pipe 21 is greater than the distance between any monitoring port and the inlet end along the axial direction of the intake pipe. Figure 2 and Figure 3 As shown, taking the monitoring port A4 as an example, the distance H of the isolation tube 22 along the axial direction OO2 of the intake pipe 21 is greater than the distance L between the monitoring port A4 and the inlet end 211 along the axial direction OO2 of the intake pipe; at the same time, the distance H of the isolation tube 22 along the axial direction OO2 of the intake pipe 21 is also greater than the distances between the monitoring ports A1, A2 and A3 and the inlet end 211 along the axial direction OO2 of the intake pipe, respectively ( Figure 2 and Figure 3 None of the three distances are marked).

[0065] In order to increase the gas flow rate inside the intake pipe and prevent the internal gas from flowing around and causing pipe blockage, further optional reference Figure 3 As shown, the air intake line also includes a reduced pipe 23; the reduced pipe 23 is sleeved inside the air intake pipe 21, and the isolation pipe 22 is arranged between the air intake pipe 21 and the reduced pipe 23, and one end of the reduced pipe 23 is fixed to the inlet end 211; the length H1 of the reduced pipe 23 along the axial OO2 direction of the air intake pipe 21 is greater than the length H of the isolation pipe 22 along the axial OO2 direction of the air intake pipe 21. The length D of the reduced pipe 23 along the radial OO1 direction of the air intake pipe 21 is less than the length D1 of the air intake pipe 21 along the axial OO2 direction, thereby reducing the diameter of the inlet of the air intake pipe.

[0066] The exhaust gas treatment equipment provided in the embodiment of the present invention can significantly reduce the possibility of internal gas bypassing under the combined effect of the isolation pipe and the shrinking pipe, and further avoid blockage of the monitoring port.

[0067] In order to further prevent the process gas from entering the monitoring port and forming a blockage, the axial length of the contraction tube along the air inlet pipe is at least twice the axial length of the isolation tube along the air inlet pipe.

[0068] Due to the requirements of the process technology, the temperature of the process gas received by the exhaust gas treatment equipment may be relatively high, and the temperature becomes lower after entering the intake pipe, which is prone to pipeline blockage; in addition, if the temperature of the anti-disturbance gas flowing into the monitoring port from the monitoring pipe is low, it is also easy to get blocked at the monitoring port; in order to avoid the above-mentioned blockage problem caused by low temperature, optional, refer to Figure 1 and Figure 3 As shown, the air intake pipe 2 further includes a heating layer 24; the heating layer 24 is arranged around the outer wall of the air intake pipe 21; the heating layer 24 is provided with a plurality of heating openings ( Figure 1 and Figure 3 Not marked), the heating opening is connected to the monitoring port and the outlet respectively.

[0069] It should be noted that, in order to improve the heating effect, a heating layer may be provided on the outer wall of the air intake pipe; of course, a heating layer may also be provided on part of the outer wall of the air intake pipe, which is not limited here.

[0070] The specific structure of the heating layer is not limited. For example, the heating layer may include a heating wire, and the heating effect is achieved by energizing the heating wire.

[0071] The waste gas treatment equipment provided in the embodiment of the present invention can increase the temperature of the pipeline by providing a heating layer, thereby increasing the temperature of the anti-disturbance gas and the process gas, thereby avoiding the blockage problem caused by low temperature.

[0072] In order to effectively control the temperature of the heating layer so that the temperature inside the intake pipe is maintained within a preset range, optionally, refer to Figure 1 and Figure 3 As shown, the intake pipeline 2 also includes a first pressure sensor 25, a temperature sensor 26, a thermostat 27 and a controller 28; the negative pressure monitoring pipeline 3 also includes a second pressure sensor 32; the first pressure sensor 25, the temperature sensor 26, the thermostat 27 and the second pressure sensor 32 are electrically connected to the controller 28 respectively.

[0073] The first pressure sensor is configured to obtain and transmit internal pressure information of the intake pipe to the controller.

[0074] The temperature sensor is configured to obtain temperature information of the heating layer according to a first monitoring period and a second monitoring period, respectively, and transmit the temperature information of the heating layer to the controller.

[0075] The second pressure sensor is configured to obtain and transmit internal pressure information of the monitoring tube to the controller.

[0076] The controller is configured to: obtain and determine the proportional coefficient P of the PID formula Y=P*A1e(K)+B1e(K-1)+C1e(K-2) based on the pressure information transmitted by the first pressure sensor, the temperature information transmitted by the temperature sensor and the pressure information transmitted by the second pressure sensor, wherein Y represents the PID control output, A1e(K) represents the proportion, B1e(K-1) represents the integral, and C1e(K-2) represents the differential; and output control information to the temperature controller according to the PID formula.

[0077] The thermostat is configured to adjust the heating temperature of the heating layer according to the control information transmitted by the controller so that the internal temperature of the intake pipe is maintained within a preset range.

[0078] The specific location, type and structure of the first pressure sensor, second pressure sensor, temperature sensor, temperature controller and controller are not limited; in order to obtain more accurate detection data, the temperature sensor can be arranged inside the heating layer, and the pressure sensing components of the first pressure sensor and the second pressure sensor can be arranged on the inner wall of the intake pipe.

[0079] The above-mentioned temperature sensor obtains the temperature information of the heating layer according to the first monitoring period and the second monitoring period respectively, wherein the first monitoring period and the second monitoring period are different in size, and the first monitoring period may be greater than or less than the second monitoring period; for example, the first monitoring period may be 10s, 15s or 20s, and the second monitoring period may be 2s, 3s or 4s, and of course it may be other values, which are not listed here.

[0080] When the exhaust gas treatment equipment is operating normally, the intake pipe and the monitoring port are not blocked, and the values ​​of the first pressure sensor and the second pressure sensor are basically the same, both of which are negative. When the intake pipe and / or the monitoring port are blocked, the pressure inside the intake pipe will gradually rise and even reach positive pressure. After long-term research, it was found that when |PES1|-|PES2|>500pa, it means that the internal pipe is blocked and needs to be cleaned, where |PES1| represents the absolute value of the internal pressure value of the intake pipe obtained by the first pressure sensor, and |PES2| represents the absolute value of the internal pressure value of the monitoring pipe obtained by the second pressure sensor.

[0081] The controller uses PID algorithm to control the temperature. PID algorithm is an algorithm widely used in industrial applications. In the control of closed-loop systems, the algorithm can automatically and accurately correct the control system. The PID algorithm includes three important coefficients: proportional coefficient, integral coefficient and differential coefficient. In the embodiment of the present invention, the PID formula Y=P*A1e(K)+B1e(K-1)+C1e(K-2) is used, where P represents the proportional coefficient, and the integral coefficient and the differential coefficient are set to 1.

[0082] After extensive research, it was found that when the temperature inside the intake pipe is between 100° and 150°, clogging is not likely to occur; therefore, the heating temperature of the heating layer can be adjusted by the thermostat so that the internal temperature of the intake pipe is maintained between 100° and 150°. The initial temperature of the heating layer can be set at 150°. The above preset range can be 100° to 150°.

[0083] The controller needs to determine the proportionality coefficient P according to the pressure information transmitted by the first pressure sensor, the temperature information transmitted by the temperature sensor and the pressure information transmitted by the second pressure sensor; the specific determination method is not limited here. For example, the controller can also be configured to: determine |TC T1 -TCT2 |Whether it belongs to the interval (20,50); Among them, TC T1 ,TC T2 It represents the temperature value of the heating layer obtained by the temperature sensor according to the first monitoring period and the second monitoring period respectively; if yes, P=1.5*(|PES1|-|PES2|); wherein P represents the proportional coefficient of the PID formula, |PES1| represents the absolute value of the internal pressure value of the intake pipe obtained by the first pressure sensor, and |PES2| represents the absolute value of the internal pressure value of the monitoring pipe obtained by the second pressure sensor; if no, it is determined to which interval |PES1|-|PES2| belongs.

[0084] If |PES1|-|PES2|≤50, then P=1.0;

[0085] If 50<|PES1|-|PES2|≤200, then P=1.5((TC T1 +TC T2 ) / (|TC T1 -C T2 |));

[0086] If 200<|PES1|-|PES2|≤500, then P=2((TC T1 +TC T2 ) / (|TC T1 -C T2 |));

[0087] If 500<|PES1|-|PES2|, then P=3(|TC T1 -TC T2 |).

[0088] By adopting the method of determining the proportional coefficient P, the above-mentioned controller can make larger adjustments when the temperature changes greatly and the pressure changes greatly, thereby maintaining the stability of the system and ensuring that the internal temperature of the intake pipe is maintained within a stable range, thereby extending the service life of the monitoring port and the pipeline, extending the blockage cycle, and thus extending the equipment maintenance cycle.

[0089] The embodiment of the present invention provides a Figure 3 The control method of the exhaust gas treatment equipment shown in FIG. Figure 4 As shown, the control method includes:

[0090] S10: The first pressure sensor acquires and transmits internal pressure information of the intake pipe to the controller.

[0091] S11. The second pressure sensor acquires and transmits the internal pressure information of the monitoring tube to the controller.

[0092] S12. The temperature sensor obtains temperature information of the heating layer according to the first monitoring period and the second monitoring period respectively, and transmits the temperature information of the heating first pressure sensor layer to the controller.

[0093] S13. The controller obtains and determines the proportional coefficient P of the PID formula Y=P*A1e(K)+B1e(K-1)+C1e(K-2) based on the pressure information transmitted by the first pressure sensor, the temperature information transmitted by the temperature sensor and the pressure information transmitted by the second pressure sensor, wherein Y represents the PID control output, A1e(K) represents the proportion, B1e(K-1) represents the integral, and C1e(K-2) represents the differential.

[0094] S14. The controller outputs control information to the temperature controller according to the PID formula.

[0095] S15. The thermostat adjusts the heating temperature of the heating layer according to the control information transmitted by the controller so that the internal temperature of the intake pipe is maintained within a preset range.

[0096] By executing the above steps, the internal temperature of the air intake pipe can be stably and efficiently controlled, thereby extending the use time of the monitoring port and the air intake pipe, extending the blocking cycle, and thus extending the equipment maintenance cycle. It should be noted that the relevant structures involved in the above control method can refer to the above embodiments and will not be repeated here.

[0097] Optional, reference Figure 5 As shown, in step S13, the controller obtains and determines the proportional coefficient P of the PID formula Y=P*A1e(K)+B1e(K-1)+C1e(K-2) according to the pressure information transmitted by the first pressure sensor, the temperature information transmitted by the temperature sensor, and the pressure information transmitted by the second pressure sensor, including:

[0098] S100, controller judgment |TC T1 -TC T2 |Whether it belongs to the interval (20,50); if so, execute step S101; if not, execute step S102; wherein, TC T1 ,TC T2 It represents the temperature value of the heating layer obtained by the temperature sensor according to the first monitoring period and the second monitoring period respectively.

[0099] S101. Determine the proportional coefficient P = 1.5*(|PES1|-|PES2|); wherein P represents the proportional coefficient of the PID formula, |PES1| represents the absolute value of the internal pressure value of the intake pipe obtained by the first pressure sensor, and |PES2| represents the absolute value of the internal pressure value of the monitoring tube obtained by the second pressure sensor.

[0100] S102. Determine the interval to which |PES1|-|PES2| belongs; if |PES1|-|PES2|≤50, execute step S103; if 50<|PES1|-|PES2|≤200, execute step S104; if 200<|PES1|-|PES2|≤500, execute step S105; if 500<|PES1|-|PES2|, execute step S106.

[0101] S103. Determine the proportionality coefficient P=1.0.

[0102] S104, determine the proportionality coefficient P = 1.5 ((TC T1 +TC T2 ) / (|TC T1 -TC T2 |)).

[0103] S105, determine the proportionality coefficient P = 2 ((TC T1 +TC T2 ) / (|TC T1 -TC T2 |)).

[0104] S106, determine the proportionality coefficient P = 3 (|TC T1 -TC T2 |).

[0105] By executing the above steps, larger adjustments can be made when there are large temperature and pressure changes, thereby maintaining the stability of the system and ensuring that the internal temperature of the intake pipe is maintained within a stable range, thereby extending the service life of the monitoring port and pipeline, extending the blocking cycle, and thus extending the equipment maintenance cycle.

[0106] References herein to "one embodiment," "embodiment," or "one or more embodiments" mean that a particular feature, structure, or characteristic described in conjunction with the embodiment is included in at least one embodiment of the present invention. In addition, please note that examples of the term "in one embodiment" do not necessarily all refer to the same embodiment.

[0107] In the description provided herein, a large number of specific details are described. However, it is understood that embodiments of the present invention can be practiced without these specific details. In some instances, well-known methods, structures and techniques are not shown in detail so as not to obscure the understanding of this description.

[0108] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A waste gas treatment device, characterized in that: include: At least one air intake pipe unit; the air intake pipe unit comprises: an air intake pipeline and a negative pressure monitoring pipeline; Wherein, the air intake pipeline comprises an air intake pipe, and a plurality of monitoring ports are arranged on the wall of the air intake pipe; The negative pressure monitoring pipeline comprises a monitoring tube, wherein the monitoring tube comprises at least one inlet and a plurality of outlets, and each of the outlets is respectively connected to a different monitoring port; The inlet is configured to: receive anti-disturbance gas when the negative pressure monitoring pipeline is in a working state, so as to keep gas flow inside the monitoring tube; the anti-disturbance gas includes an inert gas; The air intake pipe further comprises a heating layer; the heating layer is arranged around the outer wall of the air intake pipe; the heating layer is provided with a plurality of heating openings, and the heating openings are respectively connected with the monitoring port and the outlet; Wherein, the air intake pipeline further includes a first pressure sensor, a temperature sensor, a thermostat and a controller; the negative pressure monitoring pipeline further includes a second pressure sensor; the first pressure sensor, the temperature sensor, the thermostat and the second pressure sensor are electrically connected to the controller respectively; The first pressure sensor is configured to: obtain and transmit internal pressure information of the intake pipe to the controller; The temperature sensor is configured to: obtain temperature information of the heating layer according to a first monitoring period and a second monitoring period respectively, and transmit the temperature information of the heating layer to the controller; The second pressure sensor is configured to: obtain and transmit internal pressure information of the monitoring tube to the controller; The controller is configured to: obtain and determine the PID formula Y=P according to the pressure information transmitted by the first pressure sensor, the temperature information transmitted by the temperature sensor and the pressure information transmitted by the second pressure sensor. A proportional coefficient P of A1e(K)+B1e(K-1)+C1e(K-2), where Y represents the PID control output, A1e(K) represents the proportion, B1e(K-1) represents the integral, and C1e(K-2) represents the differential; output control information to the temperature controller according to the PID formula; The controller is further configured to: determine |TC T1 -TC T2 |Whether it belongs to the interval (20,50); Among them, TC T1 ,TC T2 represents the temperature value of the heating layer obtained by the temperature sensor according to the first monitoring period and the second monitoring period respectively; If yes, then P=1.5 (|PES1|-|PES2|); wherein P represents the proportional coefficient of the PID formula, |PES1| represents the absolute value of the internal pressure value of the intake pipe obtained by the first pressure sensor, and |PES2| represents the absolute value of the internal pressure value of the monitoring pipe obtained by the second pressure sensor; If not, determine the interval to which |PES1|-|PES2| belongs; If |PES1|-|PES2|≤50, then P=1.0; If 50<|PES1|-|PES2|≤200, then P=1.5((TC T1 +TC T2 ) / (|TC T1 -TC T2 |)); If 200<|PES1|-|PES2|≤500, then P=2((TC T1 +TC T2 ) / (|TC T1 -TC T2 |)); If 500<|PES1|-|PES2|, then P=3(|TC T1 -TC T2 |); The temperature controller is configured to adjust the heating temperature of the heating layer according to the control information transmitted by the controller so that the internal temperature of the intake pipe is maintained within a preset range.

2. The exhaust gas treatment equipment according to claim 1, characterized in that: The wall of the air intake pipe is provided with four monitoring ports; the monitoring pipe includes one inlet and four outlets; The four monitoring ports are divided into two groups, each group includes a first monitoring port and a second monitoring port arranged at intervals along the axial direction of the intake pipe; the two first monitoring ports belonging to different groups are arranged along the radial direction of the intake pipe; the two second monitoring ports belonging to different groups are arranged along the radial direction of the intake pipe.

3. The exhaust gas treatment equipment according to claim 1, characterized in that: The air intake pipe comprises an inlet end and an outlet end, and the distance between each monitoring port and the inlet end along the axial direction of the air intake pipe is smaller than the distance between each monitoring port and the outlet end along the axial direction of the air intake pipe.

4. The exhaust gas treatment equipment according to claim 3, characterized in that: The air intake pipeline also includes an isolation tube; the isolation tube is sleeved inside the air intake pipe, and one end of the isolation tube is fixed to the inlet end; the axial distance of the isolation tube along the air intake pipe is greater than the axial distance between any of the monitoring ports and the inlet end along the air intake pipe.

5. The exhaust gas treatment equipment according to claim 4, characterized in that: The air intake pipeline also includes a constricted pipe; The shrinking tube is sleeved inside the air inlet pipe, and the isolation tube is arranged between the air inlet pipe and the shrinking tube, and one end of the shrinking tube is fixed to the inlet end; the axial length of the shrinking tube along the air inlet pipe is greater than the axial length of the isolation tube along the air inlet pipe.

6. The exhaust gas treatment equipment according to claim 5, characterized in that: The length of the contracted tube along the axial direction of the air intake pipe is at least twice the length of the isolation tube along the axial direction of the air intake pipe.

7. A control method for the exhaust gas treatment equipment according to claim 1, characterized in that: include: The first pressure sensor acquires and transmits the internal pressure information of the intake pipe to the controller; The second pressure sensor acquires and transmits the internal pressure information of the monitoring tube to the controller; The temperature sensor obtains temperature information of the heating layer according to a first monitoring period and a second monitoring period respectively, and transmits the temperature information of the heating layer to the controller; The controller obtains and determines the PID formula Y=P according to the pressure information transmitted by the first pressure sensor, the temperature information transmitted by the temperature sensor and the pressure information transmitted by the second pressure sensor. The proportional coefficient P of A1e(K)+B1e(K-1)+C1e(K-2), where Y represents the PID control output, A1e(K) represents the proportion, B1e(K-1) represents the integral, and C1e(K-2) represents the differential; The controller outputs control information to the temperature controller according to the PID formula; The thermostat adjusts the heating temperature of the heating layer according to the control information transmitted by the controller so that the internal temperature of the intake pipe is maintained within a preset range; The controller obtains and determines the PID formula Y=P according to the pressure information transmitted by the first pressure sensor, the temperature information transmitted by the temperature sensor and the pressure information transmitted by the second pressure sensor. The proportionality coefficient P of A1e(K)+B1e(K-1)+C1e(K-2) includes: The controller determines |TC T1 -TC T2 |Whether it belongs to the interval (20,50); Among them, TC T1 ,TC T2 represents the temperature value of the heating layer obtained by the temperature sensor according to the first monitoring period and the second monitoring period respectively; If yes, then P=1.5 (|PES1|-|PES2|); wherein P represents the proportional coefficient of the PID formula, |PES1| represents the absolute value of the internal pressure value of the intake pipe obtained by the first pressure sensor, and |PES2| represents the absolute value of the internal pressure value of the monitoring pipe obtained by the second pressure sensor; If not, determine the interval to which |PES1|-|PES2| belongs; If |PES1|-|PES2|≤50, then P=1.0; If 50<|PES1|-|PES2|≤200, then P=1.5((TC T1 +TC T2 ) / (|TC T1 -TC T2 |)); If 200<|PES1|-|PES2|≤500, then P=2((TC T1 +TC T2 ) / (|TC T1 -TC T2 |)); If 500<|PES1|-|PES2|, then P=3(|TC T1 -TC T2 |).

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