A preparation method for producing yttrium oxide spraying powder by hydrothermal method

Through specific hydrothermal treatment and improved process parameters, the problems of poor bonding strength between yttrium oxide spray powder and substrate and color change of coating are solved, and high-strength and white coating effect is achieved, reducing production costs.

CN116573662BActive Publication Date: 2025-08-01苏州高芯众科半导体有限公司
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Patent Information

Application Number
CN202310435796.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-04-22
Publication Date
2025-08-01
Estimated Expiration
2043-04-22

AI Technical Summary

Technical Problem

The existing hydrothermal method produces yttrium oxide spray powder with the substrate has poor binding strength, and the coating is prone to light redness, which cannot meet the anti-corrosion requirements of the substrate surface of the semiconductor etching cavity.

Method used

Yttrium hydroxide is treated with a specific hydrothermal temperature and insulation time, combined with low-temperature calcination, grinding, surface modification and granulation processes, and specific dispersants, defoaming agents and binders are used to control the particle size and spherical degree, and obtain high-purity Yttrium oxide spray powder by removing impurities through magnetic field.

Benefits of technology

It improves the bonding strength of yttrium oxide spray powder to the substrate and the natural whiteness of the coating, reduces production costs, and meets the use requirements in the semiconductor and solar energy fields.

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Abstract

This application relates to the technical field of ceramic materials, and particularly to a preparation method for producing yttrium oxide spraying powder by hydrothermal method, which comprises the following steps: preparing slurry by adding water to yttrium hydroxide - hydrothermal treatment - calcination - grinding - modification - granulation - degumming - screening - impurity removal; the preparation method for producing yttrium oxide spraying powder by hydrothermal method in this application enables yttrium hydroxide to form an effective crystallization mechanism through specific hydrothermal treatment and specific surface modification, so that the yttrium oxide slurry has good suspension property, the compacted density of the powder after granulation is large, the strength is high, it is not easy to break, and the use effect is good; the spraying powder with good crystal lattice has a white coating appearance under the thermal spraying process, high bonding strength with the substrate, and low cost.
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