Micro-nano-arc measurement device and method for three-dimensional angle

Abstract

This invention proposes a micro-nano arc-scale three-dimensional angle inspection device and method. The device comprises a ribbed worktable, a worktable shaft, a worktable support, a drive unit, a base, a plane mirror, an autocollimator, a drive module circuit board, a main control module circuit board, a display input module circuit board, and a turntable. The method uses the drive unit to induce a three-dimensional angle deflection in the worktable, employs two sets of autocollimation systems to measure this deflection, and establishes closed-loop feedback control for the worktable. Because the two angle measurement devices are orthogonally arranged, the three-dimensional angle deflection of the worktable can be measured. Using an autocollimation system as the angle measurement device greatly improves the angle measurement resolution. The combined drive method of a lead screw and piezoelectric ceramic further enhances the resolution of the worktable angle, thus solving the problems of small-angle inspection instruments being unable to perform three-dimensional angle inspection and having low angle resolution.

Description

Technical Field

[0001] This invention belongs to the field of precision measurement technology, and in particular relates to a device and method for inspecting three-dimensional angles at the micro-nano arc level. Background Technology

[0002] In the fields of geometric metrology and instrument calibration technology, there is an urgent need for high-resolution, high-dimensional angle inspection technology over a wide working range. This technology supports the development of technologies and equipment in these fields.

[0003] In the field of geometric metrology, small angle measuring instruments can produce minute angular deflections within a certain range and can be used to generate standard angles.

[0004] In the field of instrument calibration technology, small-angle inspection devices are mainly used for the calibration of the indication of precision angle measuring instruments. They have significant applications in the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments, and high-end precision equipment manufacturing, and their indication calibration is of great significance.

[0005] Traditional small-angle inspection instruments, such as Figure 1 As shown, the device includes a ribbed worktable 1, a worktable pivot 2, a worktable support 3, a drive unit 4, a first positioning indicator 5, a second positioning indicator 6, and a base 7. The drive unit 4 pushes the ribbed worktable 1 to rotate around the worktable pivot 2, generating an angular deflection. The first positioning indicator 5 and the second positioning indicator 6 jointly measure and calculate the angular deflection value and perform closed-loop control on the ribbed worktable 1. In this structure, the distance between the axes of the two positioning indicators is generally 500mm. Furthermore, the limitations imposed by the positioning indicators on the table surface and the single drive method severely affect the angle range and resolution. These limitations make it difficult for this device to perform multi-dimensional, high-resolution angle inspections.

[0006] In summary, this system has the following two problems:

[0007] First, traditional small angle inspection instruments are only driven by one set of drive devices on the worktable, and the two positioning indicators can only perform one-dimensional angle measurement. Therefore, traditional small angle inspection instruments can only perform one-dimensional angle inspection, resulting in low calibration efficiency and difficulty in performing three-dimensional angle inspection.

[0008] Secondly, traditional small-angle inspection instruments typically have an angle resolution of only 10 due to the low resolution of the positioning indicator (usually 0.1 μm) and the low resolution of the drive device. -7 Its radian-level (hundred-nanometer radian-level) design makes it difficult to calibrate angle measuring instruments with higher resolution. Its positioning indicator and drive mechanism severely limit the improvement of the resolution of small-angle inspection instruments.

[0009] Therefore, traditional small-angle inspection instruments cannot achieve high-resolution three-dimensional angle inspection at the micro-nano arc level. Summary of the Invention

[0010] The purpose of this invention is to address the problems of traditional small-angle inspection instruments, such as their inability to perform three-dimensional angle inspection and their inability to achieve high-angle resolution at the micro-nano arc level, and to propose a three-dimensional angle inspection device and method at the micro-nano arc level.

[0011] This method uses a worktable equipped with a turntable. A drive device pushes the worktable around its axis to generate angular deflections in three directions: pitch, yaw, and roll. Two sets of orthogonally arranged angle measuring devices measure the deflection of the worktable. Based on the measured deflection, closed-loop feedback control is performed in real time to enable the worktable to generate standard three-dimensional angular deflections, thus achieving three-dimensional angle generation. Experiments show that this method can generate standard three-dimensional angular deflections, solving the problem that traditional small-angle inspection instruments cannot generate three-dimensional angles.

[0012] This method utilizes a high-resolution two-dimensional autocollimator as the angle measurement device to achieve angle resolution at the micro-nano radian level. It employs a combined drive of a lead screw motor and piezoelectric ceramic, with the lead screw motor performing coarse positioning while the piezoelectric ceramic performs precise positioning under feedback control. Experiments show that this method can generate angle resolution at the micro-nano radian level within its measurement range, solving the problem that traditional small-angle inspection instruments cannot generate angle deflections at the micro-nano radian level.

[0013] Therefore, compared with traditional small-angle inspection instruments, this invention has the technical advantages of being able to perform three-dimensional angle inspection and high angle resolution at the micro-nano arc level.

[0014] The objective of this invention is achieved as follows:

[0015] This invention proposes a micro-nano arc-scale three-dimensional angle inspection device, comprising a ribbed worktable, a worktable rotation axis, a worktable support, a first piezoelectric ceramic, a first lead screw motor, a second piezoelectric ceramic, a second lead screw motor, a base, a first plane mirror, a second plane mirror, a first autocollimator, a second autocollimator, a drive module circuit board, a main control module circuit board, a display input module circuit board, and a turntable; the first piezoelectric ceramic, the first lead screw motor, the second piezoelectric ceramic, and the second lead screw motor control the ribbed worktable to generate roll and pitch angle deflections around the worktable rotation axis; the first plane mirror... The mirror is installed on the side of the ribbed worktable and deflects at the same angle as the ribbed worktable. The first autocollimator measures the angle value of the first plane mirror, which is the angle value of the ribbed worktable. The turntable and the second plane mirror deflect at a yaw angle, and the second autocollimator measures the angle value of the second plane mirror, which is the turntable. The angle value signals measured by the first autocollimator and the second autocollimator are transmitted to the main control module circuit board and sent to the drive module circuit board. The drive module circuit board controls and adjusts the first piezoelectric ceramic, the first lead screw motor, the second piezoelectric ceramic, the second lead screw motor, and the turntable.

[0016] The first autocollimator and the second autocollimator are orthogonally arranged high-resolution two-dimensional autocollimators; the first autocollimator is installed at the same height as the ribbed worktable and is used to measure the angular deflection of the ribbed worktable; the second autocollimator is installed at the same height as the turntable and is used to measure the angular deflection of the turntable.

[0017] The first plane mirror is the target of the first autocollimator, which is mounted on the side of the ribbed worktable, with its reflecting surface parallel to the mounting surface; the second plane mirror is the target of the second autocollimator, which is mounted on the curved surface of the turntable, with its reflecting surface perpendicular to the reflecting surface of the first plane mirror.

[0018] The worktable shaft is located at the upper left corner of the ribbed worktable; the first piezoelectric ceramic and the first lead screw motor are located at the upper right corner of the ribbed worktable; the second piezoelectric ceramic and the second lead screw motor are located at the lower left corner of the ribbed worktable; the first lead screw motor and the second lead screw motor are used for large displacement coarse positioning; the first piezoelectric ceramic and the second piezoelectric ceramic are used for small displacement precise positioning.

[0019] This invention also proposes a method for inspecting three-dimensional angles at the micro-nano radian level, implemented on the aforementioned micro-nano radian-level three-dimensional angle inspection device, comprising the following steps:

[0020] Step a: Start the first autocollimator, the second autocollimator, the first piezoelectric ceramic, the first lead screw motor, the second piezoelectric ceramic, the second lead screw motor, and the turntable;

[0021] Step b: Place the instrument under test on the worktable and zero the reading;

[0022] Step c: Set the target angle on the display input module circuit board;

[0023] Step d: The main control module circuit board receives the signal from the display input module circuit board and controls the first piezoelectric ceramic, the first lead screw motor, the second piezoelectric ceramic, the second lead screw motor, and the turntable through the drive module circuit board, so that the ribbed worktable and the turntable deflect.

[0024] Step e: Keep the first piezoelectric ceramic and the first lead screw motor stationary, while the second piezoelectric ceramic and the second lead screw motor are displaced, causing the ribbed worktable to roll and deflect. At the same time, the first autocollimator measures the roll and deflection value of the ribbed worktable through the first plane mirror of the target, and performs real-time closed-loop feedback control on the roll and deflection to generate a standard roll and deflection angle γ. Simultaneously, the reading γ′ of the instrument under test is read, and the error of the instrument under test at γ is γ′-γ.

[0025] Step f: Keep the second piezoelectric ceramic and the second lead screw motor stationary, while the first piezoelectric ceramic and the first lead screw motor are displaced, causing the ribbed worktable to tilt. Simultaneously, the second autocollimator measures the tilt angle of the ribbed worktable through the second plane mirror of the target, and performs real-time closed-loop feedback control on the tilt angle to generate a standard tilt angle α. At the same time, the reading α′ of the instrument under test is read, and the error of the instrument under test at α is α′-α.

[0026] Step g: Keep the first piezoelectric ceramic, the first lead screw motor, the second piezoelectric ceramic, and the second lead screw motor stationary, causing the turntable to yaw. Simultaneously, the second autocollimator measures the turntable yaw angle deflection value through the second plane mirror of the target, performs real-time closed-loop feedback control on the yaw angle generation, and generates a standard yaw angle β. At the same time, read the reading β′ of the instrument under test. The error of the instrument under test at β is β′-β.

[0027] Step h, repeat steps c, d, e, f, and g above to complete the error verification of the instrument under test within the measurement range and complete the three-dimensional angle inspection.

[0028] The beneficial effects of this invention are as follows:

[0029] 1. To address the limitation of traditional small-angle inspection instruments in performing three-dimensional angle inspection, a micro-nano arc-scale three-dimensional angle inspection method is proposed. This method uses three sets of drive devices to control a turntable equipped with a rotary table to generate angular deflections in the pitch, roll, and yaw directions. Two orthogonally distributed two-dimensional angle measuring devices monitor the table angles in real time and perform real-time closed-loop control based on the measured angles, thereby enabling the table to generate standard three-dimensional angles. Experimental verification shows that the table can generate standard three-dimensional angle deflections, solving the problem that traditional small-angle inspection instruments cannot perform three-dimensional angle inspection.

[0030] 2. Compared with traditional small-angle inspection instruments, the device of this invention uses a high-resolution autocollimator instead of a grating ruler as the angle measuring device, which directly improves the resolution of the angle measuring device; the final resolution of the angle measuring device reaches the micro-nano radian level, realizing micro-nano radian level angle measurement.

[0031] 3. To address the issue that traditional small-angle inspection instruments cannot generate high-resolution angles over a long stroke, a method using a combined lead screw motor and piezoelectric ceramic driven by angle measurement feedback from a two-dimensional autocollimator is proposed. The lead screw motor, with its large stroke and low displacement resolution, achieves coarse positioning over a large stroke range, while the piezoelectric ceramic, with its small stroke and high displacement resolution, achieves precise positioning under the closed-loop feedback of the angle measurement device. This enables the generation of angles over a large stroke and with high resolution; ultimately, it can generate micro-nano arc-level angle displacements within the measurement range, solving the problem that traditional small-angle inspection instruments cannot generate minute angles over a large stroke range. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the structure of a traditional small-angle inspection instrument.

[0033] Figure 2a This is a side view structural schematic diagram of a specific embodiment of the micro-nano arc-scale three-dimensional angle inspection device and method of the present invention.

[0034] Figure 2b This is a top view of a specific embodiment of the micro-nano arc-scale three-dimensional angle inspection device and method of the present invention.

[0035] Figure 3a This is a side view structural schematic diagram of a specific embodiment of the micro-nano arc-scale three-dimensional angle inspection device and method of the present invention.

[0036] Figure 3b This is a top view of a specific embodiment of the micro-nano arc-scale three-dimensional angle inspection device and method of the present invention.

[0037] Figure 4a This is a side view structural schematic diagram of a specific embodiment three of the micro-nano arc-scale three-dimensional angle inspection device and method of the present invention.

[0038] Figure 4b This is a top view of a specific embodiment of the micro-nano arc-scale three-dimensional angle inspection device and method of the present invention.

[0039] Figure 5a This is a side view structural schematic diagram of a specific embodiment four of the micro-nano arc-scale three-dimensional angle inspection device and method of the present invention.

[0040] Figure 5b This is a top view of the structure of a specific embodiment four of the micro-nano arc-scale three-dimensional angle inspection device and method of the present invention.

[0041] Figure 6 This is a layout diagram of the angle generating device for changing the distribution of the driving device in specific embodiment four.

[0042] Figure 7a This is a side view structural schematic diagram of a specific embodiment five of the micro-nano arc-scale three-dimensional angle inspection device and method of the present invention.

[0043] Figure 7b This is a top view of a specific embodiment of the micro-nano arc-scale three-dimensional angle inspection device and method of the present invention.

[0044] In the figure: 1 Ribbed worktable, 2 Worktable pivot, 3 Worktable support, 4 Drive device, 41 First piezoelectric ceramic, 42 First lead screw motor, 43 Second piezoelectric ceramic, 44 Second lead screw motor, 5 First positioning indicator, 6 Second positioning indicator, 7 Base, 8 First plane mirror, 9 Second plane mirror, 10 First autocollimator, 11 Second autocollimator, 12 Drive module circuit board, 13 Main control module circuit board, 14 Display input module circuit board, 22 Turntable, 23 Third autocollimator. Detailed Implementation

[0045] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Specific Implementation Example 1

[0047] This embodiment is an example of a micro-nano arc-scale three-dimensional angle inspection device and method.

[0048] The structural schematic diagram of the micro-nano arc-scale three-dimensional angle inspection device in this embodiment is shown below. Figure 2a and Figure 2b As shown. The angle measuring device includes a ribbed worktable 1, a worktable rotating shaft 2, a worktable support 3, a drive device 4 (first piezoelectric ceramic 41, first lead screw motor 42, second piezoelectric ceramic 43, second lead screw motor 44), a base 7, a first plane reflector 8, a second plane reflector 9, a first autocollimator 10, a second autocollimator 11, a drive module circuit board 12, a main control module circuit board 13, a display input module circuit board 14, and a turntable 22.

[0049] The first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 control the ribbed worktable 1 to generate roll and pitch angles around the worktable axis 2; the first plane mirror 8 is installed on the side of the ribbed worktable 1 and generates the same angle deflection as the ribbed worktable 1; the first autocollimator 10 measures the angle value of the first plane mirror 8, that is, the angle value of the ribbed worktable 1; the turntable 22 and the second plane mirror 9 generate yaw angle deflection, and the second autocollimator 11 measures the angle value of the second plane mirror 9, that is, the turntable 22; the angle value signals measured by the first autocollimator 10 and the second autocollimator 11 are transmitted to the main control module circuit board 13 and send feedback signals to the drive module circuit board 12, and the drive module circuit board 12 controls and adjusts the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44;

[0050] The first autocollimator 10 and the second autocollimator 11 are orthogonally arranged high-resolution two-dimensional autocollimators; the first autocollimator 10 is installed at the same height as the ribbed worktable 1 and is used to measure the angular deflection of the ribbed worktable 1; the second autocollimator 11 is installed at the same height as the turntable 22 and is used to measure the angular deflection of the turntable 22.

[0051] The first plane mirror 8 is the target of the first autocollimator 10, and is installed on the side of the ribbed worktable 1, with the reflecting surface parallel to the mounting surface; the second plane mirror 9 is the target of the second autocollimator 11, and is installed on the curved surface of the turntable 22, with the reflecting surface perpendicular to the reflecting surface of the first plane mirror 8.

[0052] The worktable shaft 2 is located at the upper left corner of the ribbed worktable 1; the first piezoelectric ceramic 41 and the first lead screw motor 42 are located at the upper right corner of the ribbed worktable 1; the second piezoelectric ceramic 43 and the second lead screw motor 44 are located at the lower left corner of the ribbed worktable 1; the first lead screw motor 42 and the second lead screw motor 44 are used for large displacement coarse positioning; the first piezoelectric ceramic 41 and the second piezoelectric ceramic 43 are used for small displacement precise positioning.

[0053] The measurement principle is as follows:

[0054] The target values ​​α, β, and γ of the angle are set by the display input module circuit board 14 and sent to the main control module circuit board 13. The main control module circuit board 13 transmits command signals to the drive module circuit board 12. The drive module circuit board 12 transmits control signals to the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44, and the turntable 22 to generate three-dimensional angle deflections α1, β1, and γ1.

[0055] The first autocollimator 10 and the second autocollimator 11 measure the angular deflection values ​​α1, β1, and γ1 of the ribbed worktable 1 and the turntable 22 through the first plane mirror 8 and the second plane mirror 9 of the target.

[0056] The measured angle value signal is transmitted to the main control module circuit board 13. The drive module circuit board 12 performs closed-loop feedback control on the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44, and the turntable 22 to accurately generate three-dimensional angle deflection α, β, γ.

[0057] This embodiment of the micro-nano arc-scale three-dimensional angle inspection device and method includes the following steps:

[0058] Step a: Start the first autocollimator 10, the second autocollimator 11, the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44, and the turntable 22;

[0059] Step b: Place the instrument under test on the ribbed workbench 1 and zero the reading;

[0060] Step c: Set the target angle value on the display input module circuit board 14;

[0061] Step d: The main control module circuit board 13 receives the signal from the display input module circuit board 14, and controls the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44 and the turntable 22 through the drive module circuit board 12, so that the ribbed worktable 1 and the turntable 22 deflect.

[0062] Step e: Keep the first piezoelectric ceramic 41 and the first lead screw motor 42 stationary, while the second piezoelectric ceramic 43 and the second lead screw motor 44 are displaced, causing the ribbed worktable 1 to deflect by a roll angle; at the same time, the first autocollimator 10 measures the roll angle deflection value of the ribbed worktable 1 through the first plane reflector 8 of the target, and performs real-time closed-loop feedback control on the roll angle to generate a standard roll angle γ; at the same time, read the reading γ′ of the instrument under test, and the error of the instrument under test at γ is γ′-γ;

[0063] Step f: Keep the second piezoelectric ceramic 43 and the second lead screw motor 44 stationary, while the first piezoelectric ceramic 41 and the first lead screw motor 42 are displaced, causing the ribbed worktable 1 to tilt. At the same time, the second autocollimator 11 measures the tilt angle of the ribbed worktable 1 through the second plane mirror 9 of the target, and performs real-time closed-loop feedback control on the tilt angle to generate a standard tilt angle α. Simultaneously, the reading α′ of the instrument under test is read, and the error of the instrument under test at α is α′-α.

[0064] Step g: Keep the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 stationary, causing the turntable 22 to yaw. Simultaneously, the second autocollimator 11 measures the yaw angle of the turntable 22 through the second plane reflector 9 of the target, and performs real-time closed-loop feedback control on the yaw angle to generate a standard yaw angle β. At the same time, the reading β′ of the instrument under test is read, and the error of the instrument under test at β is β′-β.

[0065] Step h, repeat steps c, d, e, f, and g above to complete the error verification of the instrument under test within the measurement range and complete the three-dimensional angle inspection.

[0066] The innovation of this invention lies in using an orthogonally arranged first autocollimator 10 and second autocollimator 11, capable of two-dimensional angle measurement, to simultaneously measure the angles of the ribbed worktable 1 and the turntable 22, thus achieving three-dimensional angle measurement. The high-resolution first autocollimator 10 and second autocollimator 11 are used as angle measuring devices, greatly improving the resolution of angle measurement to the micro-nano arc level. The combined control of the first piezoelectric ceramic 41, first lead screw motor 42, second piezoelectric ceramic 43, and second lead screw motor 44, with closed-loop feedback control of the angle measurement by the first autocollimator 10 and second autocollimator 11, enables the first lead screw motor 42 and second lead screw motor 44 to achieve coarse positioning, while the first piezoelectric ceramic 41 and second piezoelectric ceramic 43 achieve precise positioning, realizing a large range of micro-nano arc-level angle generation. Ultimately, the system can perform micro-nano arc-level three-dimensional angle inspection, overcoming the problems of traditional small-angle inspection instruments being unable to perform three-dimensional angle inspection and having low angle generation resolution.

[0067] Therefore, compared with traditional small-angle inspection instruments, the present invention has the technical advantages of achieving micro-nano arc-level angle resolution and being able to perform three-dimensional angle inspection. Specific Implementation Example 2

[0069] This embodiment is an example of a micro-nano arc-scale three-dimensional angle inspection device and method.

[0070] The structural schematic diagram of the micro-nano arc-scale three-dimensional angle inspection device in this embodiment is shown below. Figure 3a and Figure 3b As shown. Based on the first specific embodiment, this embodiment places the worktable pivot 2 in the center on the left side of the ribbed worktable 1, and the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 are symmetrically arranged on the right side; the extra table surface on both sides of the ribbed worktable 1 on the worktable pivot 2 is removed.

[0071] This embodiment of the micro-nano arc-scale three-dimensional angle inspection device and method includes the following steps:

[0072] Step a: Start the first autocollimator 10, the second autocollimator 11, the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44, and the turntable 22;

[0073] Step b: Place the instrument under test on the ribbed workbench 1 and zero the reading;

[0074] Step c: Set the target angle value on the display input module circuit board 14;

[0075] Step d: The main control module circuit board 13 receives the signal from the display input module circuit board 14, and controls the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44 and the turntable 22 through the drive module circuit board 12, so that the ribbed worktable 1 and the turntable 22 deflect.

[0076] Step e: Control the first piezoelectric ceramic 41, the first lead screw motor 42, and the second piezoelectric ceramic 42 and the second lead screw motor 44 to produce displacements of the same magnitude but opposite directions, causing the ribbed worktable 1 to generate a roll angle deflection; at the same time, the first autocollimator 10 measures the roll angle deflection value of the ribbed worktable 1 through the first plane reflector 8 of the target, and performs real-time closed-loop feedback control on the roll angle to generate a standard roll angle γ; at the same time, read the reading γ′ of the instrument under test, and the error of the instrument under test at γ is γ′-γ;

[0077] Step f: Control the second piezoelectric ceramic 43, the second lead screw motor 44, and the first piezoelectric ceramic 41 and the first lead screw motor 42 to make displacements of the same magnitude and direction, so that the ribbed worktable 1 produces a pitch angle deflection; at the same time, the second autocollimator 11 measures the pitch angle deflection value of the ribbed worktable 1 through the second plane reflector 9 of the target, and performs real-time closed-loop feedback control on the pitch angle to generate a standard pitch angle α; at the same time, read the reading α′ of the instrument under test, and the error of the instrument under test at α is α′-α;

[0078] Step g: Keep the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 stationary, causing the turntable 22 to yaw. Simultaneously, the second autocollimator 11 measures the yaw angle of the turntable 22 through the second plane reflector 9 of the target, and performs real-time closed-loop feedback control on the yaw angle to generate a standard yaw angle β. At the same time, the reading β′ of the instrument under test is read, and the error of the instrument under test at β is β′-β.

[0079] Step h, repeat steps c, d, e, f, and g above to complete the error verification of the instrument under test within the measurement range and complete the three-dimensional angle inspection.

[0080] The innovation of this invention lies in the modification of the positional distribution of the worktable shaft 2, the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44, as well as the shape of the ribbed worktable 1. The symmetrical structure makes the ribbed worktable 1 more uniformly stressed during operation, resulting in less deformation and reducing the error in angle. Specific Implementation Example 3

[0082] This embodiment is an example of a micro-nano arc-scale three-dimensional angle inspection device and method.

[0083] The structural schematic diagram of the micro-nano arc-scale three-dimensional angle inspection device in this embodiment is shown below. Figure 4a and Figure 4b As shown. Based on the first specific embodiment, this embodiment arranges the worktable shaft 2, the first piezoelectric ceramic 41, and the first lead screw motor 42 symmetrically on the upper side of the ribbed worktable 1, and the second piezoelectric ceramic 43 and the second lead screw motor 44 are located on the lower side in the center; the extra table surface on both sides of the ribbed worktable 1 on both sides of the second piezoelectric ceramic 43 and the second lead screw motor 44 has been removed.

[0084] This embodiment of the micro-nano arc-scale three-dimensional angle inspection device and method includes the following steps:

[0085] Step a: Start the first autocollimator 10, the second autocollimator 11, the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44, and the turntable 22;

[0086] Step b: Place the instrument under test on the ribbed workbench 1 and zero the reading;

[0087] Step c: Set the target angle value on the display input module circuit board 14;

[0088] Step d: The main control module circuit board 13 receives the signal from the display input module circuit board 14, and controls the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44 and the turntable 22 through the drive module circuit board 12, so that the ribbed worktable 1 and the turntable 22 deflect.

[0089] Step e: Keep the first piezoelectric ceramic 41 and the first lead screw motor 42 stationary, while the second piezoelectric ceramic 43 and the second lead screw motor 44 are displaced, causing the ribbed worktable 1 to deflect by a roll angle; at the same time, the first autocollimator 10 measures the roll angle deflection value of the ribbed worktable 1 through the first plane reflector 8 of the target, and performs real-time closed-loop feedback control on the roll angle to generate a standard roll angle γ; at the same time, read the reading γ′ of the instrument under test, and the error of the instrument under test at γ is γ′-γ;

[0090] Step f: Control the second piezoelectric ceramic 43 and the second lead screw motor 44 to move in the same direction as the first piezoelectric ceramic 41 and the first lead screw motor 42. The displacement of the second piezoelectric ceramic 43 and the second lead screw motor 44 is half the displacement of the first piezoelectric ceramic 41 and the first lead screw motor 42, which can cause the ribbed worktable 1 to produce a pitch angle deflection. At the same time, the second autocollimator 11 measures the pitch angle deflection value of the ribbed worktable 1 through the second plane reflector 9 of the target, and performs real-time closed-loop feedback control on the pitch angle to generate a standard pitch angle α. At the same time, read the reading α′ of the instrument under test. The error of the instrument under test at α is α′-α.

[0091] Step g: Keep the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 stationary, causing the turntable 22 to yaw. Simultaneously, the second autocollimator 11 measures the yaw angle of the turntable 22 through the second plane reflector 9 of the target, and performs real-time closed-loop feedback control on the yaw angle to generate a standard yaw angle β. At the same time, the reading β′ of the instrument under test is read, and the error of the instrument under test at β is β′-β.

[0092] Step h, repeat steps c, d, e, f, and g above to complete the error verification of the instrument under test within the measurement range and complete the three-dimensional angle inspection.

[0093] The innovation of this invention lies in the modification of the positional distribution of the worktable shaft 2, the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44, as well as the shape of the ribbed worktable 1. The symmetrical structure makes the ribbed worktable 1 more uniformly stressed during operation, resulting in less deformation and reducing the error in angle. Specific Implementation Example 4

[0095] This embodiment is an example of a micro-nano arc-scale three-dimensional angle inspection device and method.

[0096] The structural schematic diagram of the micro-nano arc-scale three-dimensional angle inspection device in this embodiment is shown below. Figure 5a and Figure 5b As shown. Based on the first specific embodiment, this embodiment moves the second piezoelectric ceramic 43 and the second lead screw motor 44 to the lower right corner of the ribbed worktable 1; and removes the extra table surface on the other side of the worktable shaft 2 of the ribbed worktable 1.

[0097] or

[0098] Based on Specific Embodiment 1, this embodiment moves the first piezoelectric ceramic 41 and the first lead screw motor 42 to the lower right corner of the ribbed worktable 1; the excess table surface on the other side of the worktable pivot 2 of the ribbed worktable 1 is removed, such as... Figure 6 As shown.

[0099] This embodiment of the micro-nano arc-scale three-dimensional angle inspection device and method includes the following steps:

[0100] Step a: Start the first autocollimator 10, the second autocollimator 11, the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44, and the turntable 22;

[0101] Step b: Place the instrument under test on the ribbed workbench 1 and zero the reading;

[0102] Step c: Set the target angle value on the display input module circuit board 14;

[0103] Step d: The main control module circuit board 13 receives the signal from the display input module circuit board 14, and controls the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44 and the turntable 22 through the drive module circuit board 12, so that the ribbed worktable 1 and the turntable 22 deflect.

[0104] Step e: Keep the first piezoelectric ceramic 41 and the first lead screw motor 42 stationary, while the second piezoelectric ceramic 43 and the second lead screw motor 44 are displaced, causing the ribbed worktable 1 to deflect by a roll angle; at the same time, the first autocollimator 10 measures the roll angle deflection value of the ribbed worktable 1 through the first plane reflector 8 of the target, and performs real-time closed-loop feedback control on the roll angle to generate a standard roll angle γ; at the same time, read the reading γ′ of the instrument under test, and the error of the instrument under test at γ is γ′-γ;

[0105] or

[0106] The first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 are controlled to have the same displacement in both magnitude and direction, causing the ribbed worktable 1 to produce a roll angle deflection; at the same time, the first autocollimator 10 measures the roll angle deflection value of the ribbed worktable 1 through the first plane reflector 8 of the target, and performs real-time closed-loop feedback control on the roll angle to generate a standard roll angle γ; at the same time, the reading γ′ of the instrument under test is read, and the error of the instrument under test at γ is γ′-γ.

[0107] Step f: Control the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 to produce displacements of the same magnitude and direction, causing the ribbed worktable 1 to generate a pitch angle deflection; at the same time, the second autocollimator 11 measures the pitch angle deflection value of the ribbed worktable 1 through the second plane reflector 9 of the target, and performs real-time closed-loop feedback control on the pitch angle to generate a standard pitch angle α; at the same time, read the reading α′ of the instrument under test, and the error of the instrument under test at α is α′-α;

[0108] or

[0109] The second piezoelectric ceramic 43 and the second lead screw motor 44 are kept stationary, while the first piezoelectric ceramic 41 and the first lead screw motor 42 are displaced, causing the ribbed worktable 1 to produce a pitch angle deflection. At the same time, the second autocollimator 11 measures the pitch angle deflection value of the ribbed worktable 1 through the second plane reflector 9 of the target, and performs real-time closed-loop feedback control on the pitch angle to generate a standard pitch angle α. At the same time, the reading α′ of the instrument under test is read, and the error of the instrument under test at α is α′-α.

[0110] Step g: Keep the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 stationary, causing the turntable 22 to yaw. Simultaneously, the second autocollimator 11 measures the yaw angle of the turntable 22 through the second plane reflector 9 of the target, and performs real-time closed-loop feedback control on the yaw angle to generate a standard yaw angle β. At the same time, the reading β′ of the instrument under test is read, and the error of the instrument under test at β is β′-β.

[0111] Step h, repeat steps c, d, e, f, and g above to complete the error verification of the instrument under test within the measurement range and complete the three-dimensional angle inspection.

[0112] The innovation of this invention lies in modifying the positional distribution of the worktable shaft 2, the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44, as well as the shape of the ribbed worktable 1. The first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 are located on the same side, reducing the difficulty of control; the ribbed worktable reasonably reduces the table surface area, reduces the weight, and weakens the deformation of the ribbed worktable 1, thereby reducing the error of angle. Specific Implementation Example 5

[0114] This embodiment is an example of a micro-nano arc-scale three-dimensional angle inspection device and method.

[0115] The structural schematic diagram of the micro-nano arc-scale three-dimensional angle inspection device in this embodiment is shown below. Figure 7a and Figure 7b As shown. Based on the first specific embodiment, this embodiment uses a third autocollimator 23 capable of three-dimensional angle measurement as the angle measuring device to replace the first autocollimator 10 and the second autocollimator 11.

[0116] The third autocollimator 23 is a high-resolution three-dimensional autocollimator, and the measurement target is the second plane mirror 9, which is installed at the same height as the turntable 22.

[0117] This embodiment of the micro-nano arc-scale three-dimensional angle inspection device and method includes the following steps:

[0118] Step a: Start the third autocollimator 23, the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44, and the turntable 22;

[0119] Step b: Place the instrument under test on the ribbed workbench 1 and zero the reading;

[0120] Step c: Set the target angle value on the display input module circuit board 14;

[0121] Step d: The main control module circuit board 13 receives the signal from the display input module circuit board 14, and controls the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, the second lead screw motor 44 and the turntable 22 through the drive module circuit board 12, so that the ribbed worktable 1 and the turntable 22 deflect.

[0122] Step e: Keep the first piezoelectric ceramic 41 and the first lead screw motor 42 stationary, while the second piezoelectric ceramic 43 and the second lead screw motor 44 are displaced, causing the ribbed worktable 1 to deflect by a roll angle; at the same time, the third autocollimator 23 measures the roll angle deflection value of the ribbed worktable 1 through the second plane reflector 9 of the target, and performs real-time closed-loop feedback control on the roll angle to generate a standard roll angle γ; at the same time, read the reading γ′ of the instrument under test, and the error of the instrument under test at γ is γ′-γ;

[0123] Step f: Keep the second piezoelectric ceramic 43 and the second lead screw motor 44 stationary, while the first piezoelectric ceramic 41 and the first lead screw motor 42 are displaced, causing the ribbed worktable 1 to produce a pitch angle deflection; at the same time, the third autocollimator 23 measures the pitch angle deflection value of the ribbed worktable 1 through the second plane reflector 9 of the target, and performs real-time closed-loop feedback control on the pitch angle to generate a standard pitch angle α; at the same time, read the reading α′ of the instrument under test, and the error of the instrument under test at α is α′-α;

[0124] Step g: Control the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43, and the second lead screw motor 44 to remain stationary, causing the turntable 22 to generate a yaw angle deflection; simultaneously, the third autocollimator 23 measures the yaw angle deflection value of the turntable 22 through the second plane reflector 9 of the target, and performs real-time closed-loop feedback control on the yaw angle generation to generate a standard yaw angle β; at the same time, read the reading β′ of the instrument under test, and the error of the instrument under test at β is β′-β;

[0125] Step h, repeat steps c, d, e, f, and g above to complete the error verification of the instrument under test within the measurement range and complete the three-dimensional angle inspection.

[0126] The innovation of this invention lies in using a third autocollimator 23 capable of three-dimensional angle measurement instead of the first autocollimator 10 and the second autocollimator 11 as the angle measurement module. This structure greatly reduces the overall size of the device, making the instrument more portable, and at the same time reduces the impact of the environment on the system device.

[0127] The above provides a detailed description of the micro-nano arc-scale three-dimensional angle inspection device and method proposed in this invention. Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this invention. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A micro-nano arc-scale three-dimensional angle inspection device, characterized in that, The system includes a ribbed worktable (1), a worktable pivot (2), a worktable support (3), a drive unit (4), a base (7), a first plane mirror (8), a second plane mirror (9), a first autocollimator (10), a second autocollimator (11), a drive module circuit board (12), a main control module circuit board (13), a display input module circuit board (14), and a turntable (22). The drive unit (4) includes a first piezoelectric ceramic (41), a first lead screw motor (42), a second piezoelectric ceramic (43), and a second lead screw motor (44). The first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) control the ribbed worktable (1) to generate roll and pitch angles around the worktable pivot (2). The plane mirror (8) is installed on the side of the ribbed worktable (1) and rotates at the same angle as the ribbed worktable (1); the first autocollimator (10) measures the angle value of the first plane mirror (8), that is, the angle value of the ribbed worktable (1); the turntable (22) and the second plane mirror (9) generate yaw angle deflection, and the second autocollimator (11) measures the angle value of the second plane mirror (9), that is, the turntable (22); the angle value signals measured by the first autocollimator (10) and the second autocollimator (11) are transmitted to the main control module circuit board (13) and send feedback signals to the drive module circuit board (12). The drive module circuit board (12) controls and adjusts the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44); The first autocollimator (10) and the second autocollimator (11) are orthogonally arranged high-resolution two-dimensional autocollimators; the first autocollimator (10) is installed at the same height as the ribbed worktable (1) and is used to measure the angular deflection of the ribbed worktable (1); the second autocollimator (11) is installed at the same height as the turntable (22) and is used to measure the angular deflection of the turntable (22); The first plane mirror (8) is the target of the first autocollimator (10), and is installed on the side of the ribbed worktable (1), with the reflecting surface parallel to the mounting surface; the second plane mirror (9) is the target of the second autocollimator (11), and is installed on the curved surface of the turntable (22), with the reflecting surface perpendicular to the reflecting surface of the first plane mirror (8). The worktable shaft (2) is located at the upper left corner of the ribbed worktable (1); the first piezoelectric ceramic (41) and the first lead screw motor (42) are located at the upper right corner of the ribbed worktable (1); the second piezoelectric ceramic (43) and the second lead screw motor (44) are located at the lower left corner of the ribbed worktable (1); the first lead screw motor (42) and the second lead screw motor (44) are used for large displacement coarse positioning; the first piezoelectric ceramic (41) and the second piezoelectric ceramic (43) are used for small displacement precise positioning.

2. The micro-nano arc-scale three-dimensional angle inspection device according to claim 1, characterized in that, Change the distribution positions of the worktable shaft (2), the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44); The workbench pivot (2) is located in the center on the left side of the ribbed workbench (1), and the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) are symmetrically arranged on the right side.

3. The micro-nano arc-scale three-dimensional angle inspection device according to claim 1, characterized in that, Change the distribution positions of the worktable shaft (2), the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44); The workbench shaft (2), the first piezoelectric ceramic (41), and the first lead screw motor (42) are symmetrically arranged on the upper side of the ribbed workbench (1), while the second piezoelectric ceramic (43) and the second lead screw motor (44) are located on the lower side in the center.

4. The micro-nano arc-scale three-dimensional angle inspection device according to claim 1, characterized in that, Change the distribution positions of the worktable shaft (2), the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44); The workbench pivot (2) is located at the upper left corner; the first piezoelectric ceramic (41) and the first lead screw motor (42) are located at the upper right corner of the ribbed workbench (1); the second piezoelectric ceramic (43) and the second lead screw motor (44) are located at the lower right corner. or The workbench pivot (2) is located at the upper left corner; the first piezoelectric ceramic (41) and the first lead screw motor (42) are located at the lower right corner of the ribbed workbench (1); the second piezoelectric ceramic (43) and the second lead screw motor (44) are located at the lower left corner.

5. The micro-nano arc-scale three-dimensional angle inspection device according to claim 1, characterized in that, Use the third autocollimator (23) instead of the first autocollimator (10) and the second autocollimator (11); The third autocollimator (23) can perform three-dimensional angle measurement. The measurement target is the second plane reflector (9), which is installed at the same height as the turntable (22).

6. A method for inspecting three-dimensional angles at the micro-nano arc level, implemented on the micro-nano arc-level three-dimensional angle inspection device of claim 1, characterized in that, Includes the following steps: Step a: Start the first autocollimator (10), the second autocollimator (11), the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), the second lead screw motor (44), and the turntable (22); Step b: Place the instrument under test on the ribbed workbench (1) and zero the reading; Step c: Set the target angle value on the display input module circuit board (14); Step d: The main control module circuit board (13) receives the signal from the display input module circuit board (14) and controls the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), the second lead screw motor (44) and the turntable (22) through the drive module circuit board (12) to make the ribbed worktable (1) and the turntable (22) deflect. Step e: Control the first piezoelectric ceramic (41) and the first lead screw motor (42) to remain stationary, while the second piezoelectric ceramic (43) and the second lead screw motor (44) are displaced, causing the ribbed worktable (1) to generate a roll angle deflection; at the same time, the first autocollimator (10) measures the roll angle deflection value of the ribbed worktable (1) through the first plane reflector (8) of the target, performs real-time closed-loop feedback control on the roll angle generation, and generates a standard roll angle γ; at the same time, read the reading γ′ of the instrument under test, and the error of the instrument under test at γ is γ′-γ; Step f: Control the second piezoelectric ceramic (43) and the second lead screw motor (44) to remain stationary, while the first piezoelectric ceramic (41) and the first lead screw motor (42) are displaced, causing the ribbed worktable (1) to produce a pitch angle deflection; at the same time, the second autocollimator (11) measures the pitch angle deflection value of the ribbed worktable (1) through the second plane reflector (9) of the target, performs real-time closed-loop feedback control on the pitch angle, and generates a standard pitch angle α; at the same time, read the reading α′ of the instrument under test, and the error of the instrument under test at α is α′-α; Step g: Control the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to remain stationary, so that the turntable (22) generates a yaw angle deflection; at the same time, the second autocollimator (11) measures the yaw angle deflection value of the turntable (22) through the second plane reflector (9) of the target, performs real-time closed-loop feedback control on the yaw angle generation, and generates a standard yaw angle β; at the same time, read the reading β′ of the instrument under test, and the error of the instrument under test at β is β′-β; Step h, repeat steps c, d, e, f, and g above to complete the error verification of the instrument under test within the measurement range and complete the three-dimensional angle inspection.

7. A method for inspecting three-dimensional angles at the micro-nano arc level, implemented on the micro-nano arc-level three-dimensional angle inspection device of claim 2, characterized in that, Includes the following steps: Step a: Start the first autocollimator (10), the second autocollimator (11), the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), the second lead screw motor (44), and the turntable (22); Step b: Place the instrument under test on the ribbed workbench (1) and zero the reading; Step c: Set the target angle value on the display input module circuit board (14); Step d: The main control module circuit board (13) receives the signal from the display input module circuit board (14) and controls the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), the second lead screw motor (44) and the turntable (22) through the drive module circuit board (12) to cause the ribbed worktable (1) and the turntable (22) to deflect. Step e: Control the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to produce displacements of the same magnitude but opposite directions, so that the ribbed worktable (1) produces a roll angle deflection; at the same time, the first autocollimator (10) measures the roll angle deflection value of the ribbed worktable (1) through the first plane reflector (8) of the target, performs real-time closed-loop feedback control on the roll angle, and generates a standard roll angle γ; at the same time, read the reading γ′ of the instrument under test, and the error of the instrument under test at γ is γ′-γ; Step f: Control the second piezoelectric ceramic (43), the second lead screw motor (44) and the first piezoelectric ceramic (41) and the first lead screw motor (42) to make displacements in the same direction and magnitude, so that the ribbed worktable (1) produces a pitch angle deflection; at the same time, the second autocollimator (11) measures the pitch angle deflection value of the ribbed worktable (1) through the second plane reflector (9) of the target, and performs real-time closed-loop feedback control on the pitch angle to generate a standard pitch angle α; at the same time, read the reading α′ of the instrument under test, and the error of the instrument under test at α is α′-α; Step g: Control the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to remain stationary, so that the turntable (22) generates a yaw angle deflection; at the same time, the second autocollimator (11) measures the yaw angle deflection value of the turntable (22) through the second plane reflector (9) of the target, performs real-time closed-loop feedback control on the yaw angle generation, and generates a standard yaw angle β; at the same time, read the reading β′ of the instrument under test, and the error of the instrument under test at β is β′-β; Step h, repeat steps c, d, e, f, and g above to complete the error verification of the instrument under test within the measurement range and complete the three-dimensional angle inspection.

8. A method for inspecting three-dimensional angles at the micro-nano arc level, implemented on the micro-nano arc-level three-dimensional angle inspection device of claim 3, characterized in that, Includes the following steps: Step a: Start the first autocollimator (10), the second autocollimator (11), the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), the second lead screw motor (44), and the turntable (22); Step b: Place the instrument under test on the ribbed workbench (1) and zero the reading; Step c: Set the target angle value on the display input module circuit board (14); Step d: The main control module circuit board (13) receives the signal from the display input module circuit board (14) and controls the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), the second lead screw motor (44) and the turntable (22) through the drive module circuit board (12) to cause the ribbed worktable (1) and the turntable (22) to deflect. Step e: Control the first piezoelectric ceramic (41) and the first lead screw motor (42) to remain stationary, while the second piezoelectric ceramic (43) and the second lead screw motor (44) are displaced, causing the ribbed worktable (1) to generate a roll angle deflection; at the same time, the first autocollimator (10) measures the roll angle deflection value of the ribbed worktable (1) through the first plane reflector (8) of the target, performs real-time closed-loop feedback control on the roll angle generation, and generates a standard roll angle γ; at the same time, read the reading γ′ of the instrument under test, and the error of the instrument under test at γ is γ′-γ; Step f: Control the second piezoelectric ceramic (43) and the second lead screw motor (44) to move in the same direction as the first piezoelectric ceramic (41) and the first lead screw motor (42). The displacement of the second piezoelectric ceramic (43) and the second lead screw motor (44) is half the displacement of the first piezoelectric ceramic (41) and the first lead screw motor (42), which can cause the ribbed worktable (1) to produce a pitch angle deflection. At the same time, the second autocollimator (11) measures the pitch angle deflection value of the ribbed worktable (1) through the second plane reflector (9) of the target, and performs real-time closed-loop feedback control on the pitch angle to generate a standard pitch angle α. At the same time, read the reading α′ of the instrument under test. The error of the instrument under test at α is α′-α. Step g: Control the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to remain stationary, so that the turntable (22) generates a yaw angle deflection; at the same time, the second autocollimator (11) measures the yaw angle deflection value of the turntable (22) through the second plane reflector (9) of the target, performs real-time closed-loop feedback control on the yaw angle generation, and generates a standard yaw angle β; at the same time, read the reading β′ of the instrument under test, and the error of the instrument under test at β is β′-β; Step h, repeat steps c, d, e, f, and g above to complete the error verification of the instrument under test within the measurement range and complete the three-dimensional angle inspection.

9. A method for inspecting three-dimensional angles at the micro-nano arc level, implemented on the micro-nano arc-level three-dimensional angle inspection device of claim 4, characterized in that, Includes the following steps: Step a: Start the first autocollimator (10), the second autocollimator (11), the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), the second lead screw motor (44), and the turntable (22); Step b: Place the instrument under test on the ribbed workbench (1) and zero the reading; Step c: Set the target angle value on the display input module circuit board (14); Step d: The main control module circuit board (13) receives the signal from the display input module circuit board (14) and controls the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), the second lead screw motor (44) and the turntable (22) through the drive module circuit board (12) to cause the ribbed worktable (1) and the turntable (22) to deflect. Step e: Control the first piezoelectric ceramic (41) and the first lead screw motor (42) to remain stationary, while the second piezoelectric ceramic (43) and the second lead screw motor (44) are displaced, causing the ribbed worktable (1) to generate a roll angle deflection; at the same time, the first autocollimator (10) measures the roll angle deflection value of the ribbed worktable (1) through the first plane reflector (8) of the target, performs real-time closed-loop feedback control on the roll angle generation, and generates a standard roll angle γ; at the same time, read the reading γ′ of the instrument under test, and the error of the instrument under test at γ is γ′-γ; or The first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) are controlled to have the same displacement in both magnitude and direction, so that the ribbed worktable (1) will have a roll angle deflection; at the same time, the first autocollimator (10) measures the roll angle deflection value of the ribbed worktable (1) through the first plane reflector (8) of the target, and performs real-time closed-loop feedback control on the roll angle to generate a standard roll angle γ; at the same time, the reading γ′ of the instrument under test is read, and the error of the instrument under test at γ is γ′-γ; Step f: Control the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to produce displacements of the same magnitude and direction, so that the ribbed worktable (1) produces a pitch angle deflection; at the same time, the second autocollimator (11) measures the pitch angle deflection value of the ribbed worktable (1) through the second plane reflector (9) of the target, performs real-time closed-loop feedback control on the pitch angle, and generates a standard pitch angle α; at the same time, read the reading α′ of the instrument under test, and the error of the instrument under test at α is α′-α; or The second piezoelectric ceramic (43) and the second lead screw motor (44) are kept stationary, while the first piezoelectric ceramic (41) and the first lead screw motor (42) are displaced, causing the ribbed worktable (1) to produce a pitch angle deflection; at the same time, the second autocollimator (11) measures the pitch angle deflection value of the ribbed worktable (1) through the second plane reflector (9) of the target, and performs real-time closed-loop feedback control on the pitch angle to generate a standard pitch angle α; at the same time, the reading α′ of the instrument under test is read, and the error of the instrument under test at α is α′-α; Step g: Control the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to remain stationary, so that the turntable (22) generates a yaw angle deflection; at the same time, the second autocollimator (11) measures the yaw angle deflection value of the turntable (22) through the second plane reflector (9) of the target, performs real-time closed-loop feedback control on the yaw angle generation, and generates a standard yaw angle β; at the same time, read the reading β′ of the instrument under test, and the error of the instrument under test at β is β′-β; Step h, repeat steps c, d, e, f, and g above to complete the error verification of the instrument under test within the measurement range and complete the three-dimensional angle inspection.

10. A method for inspecting three-dimensional angles at the micro-nano arc level, implemented on the micro-nano arc-level three-dimensional angle inspection device of claim 5, characterized in that, Includes the following steps: Step a: Start the third autocollimator (23), the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), the second lead screw motor (44), and the turntable (22); Step b: Place the instrument under test on the ribbed workbench (1) and zero the reading; Step c: Set the target angle value on the display input module circuit board (14); Step d: The main control module circuit board (13) receives the signal from the display input module circuit board (14) and controls the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), the second lead screw motor (44) and the turntable (22) through the drive module circuit board (12) to cause the ribbed worktable (1) and the turntable (22) to deflect. Step e: Control the first piezoelectric ceramic (41) and the first lead screw motor (42) to remain stationary, while the second piezoelectric ceramic (43) and the second lead screw motor (44) are displaced, causing the ribbed worktable (1) to generate a roll angle deflection; at the same time, the third autocollimator (23) measures the roll angle deflection value of the ribbed worktable (1) through the second plane reflector (9) of the target, performs real-time closed-loop feedback control on the roll angle generation, and generates a standard roll angle γ; at the same time, read the reading γ′ of the instrument under test, and the error of the instrument under test at γ is γ′-γ; Step f: Control the second piezoelectric ceramic (43) and the second lead screw motor (44) to remain stationary, while the first piezoelectric ceramic (41) and the first lead screw motor (42) are displaced, causing the ribbed worktable (1) to produce a pitch angle deflection; at the same time, the third autocollimator (23) measures the pitch angle deflection value of the ribbed worktable (1) through the second plane reflector (9) of the target, performs real-time closed-loop feedback control on the pitch angle, and generates a standard pitch angle α; at the same time, read the reading α′ of the instrument under test, and the error of the instrument under test at α is α′-α; Step g: Control the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to remain stationary, so that the turntable (22) generates a yaw angle deflection; at the same time, the third autocollimator (23) measures the yaw angle deflection value of the turntable (22) through the second plane reflector (9) of the target, performs real-time closed-loop feedback control on the yaw angle generation, and generates a standard yaw angle β; at the same time, read the reading β′ of the instrument under test, and the error of the instrument under test at β is β′-β; Step h, repeat steps c, d, e, f, and g above to complete the error verification of the instrument under test within the measurement range and complete the three-dimensional angle inspection.

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