A tool breakage detection method and apparatus

Abstract

The application discloses a tool breakage detection method and device, comprising: controlling to start a blade breakage detection mechanism, so that the blade breakage detection mechanism drives a tool to be detected to operate at a set rotating speed; using the optical fiber pair of heads to detect the tool to be detected in a rotating state, so as to collect an edge sample signal; using a controller to compare the edge sample signal with a preset limit value, and to determine a deviation value based on the edge sample signal; in the case that it is determined that the tool to be detected may have a fault according to the deviation value, a deviation peak signal is collected; and in the case that it is judged that the deviation peak signal is a fault signal, it is determined that the tool to be detected has a fault. The tool breakage detection method disclosed by the application can be applied to tooth-shaped blade fault detection, and can detect various types of blades, solving the detection limitation of single circular blades in the prior art.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, and in particular to a tool breakage detection method and device. BACKGROUND

[0002] A dicing machine is a mechanical device for cutting raw materials with a tool. The basic principle is to use the cutting force generated by the high-speed rotation of the tool to cut the raw materials. The tool blade is in a ring structure and can rotate at a speed of up to 80,000 r / min under the drive of the main shaft motor. Since the tool blade is very thin, it is prone to breakage during operation. The quality of the tool blade directly affects the quality of the cut products. To ensure cutting quality, when the tool blade is damaged, it must be detected in time and the processing must be stopped immediately to effectively prevent damage to the processed objects. Since the tool blade is divided into many types such as circular blades and toothed blades.

[0003] The existing tool breakage detection is only for the detection of circular blades, and toothed blades cannot be detected. SUMMARY

[0004] The present application provides a tool breakage detection method and device to realize fault detection of toothed blades.

[0005] The present application provides a tool breakage detection method, which is realized based on a tool breakage detection mechanism. The tool breakage detection mechanism includes a fiber-optic counter head for installing an optical fiber. The installed fiber-optic counter head is opposite the edge region of the tool to be tested. A tool breakage cylinder for adjusting light flux is arranged on the fiber-optic counter head. The breakage detection is completed by the following steps:

[0006] The tool breakage detection mechanism is controlled to be turned on, so that the tool breakage detection mechanism drives the tool to be tested to operate at a set speed.

[0007] The fiber-optic counter head is used to detect the tool to be tested in a rotating state to collect an edge sample signal.

[0008] A controller is used to compare the edge sample signal with a preset limit value and determine a deviation value based on the edge sample signal.

[0009] In a case where it is determined that the tool to be tested may have a fault based on the deviation value, a deviation peak signal is collected.

[0010] In a case where it is determined that the tool to be tested has a fault based on the deviation peak signal, the tool to be tested is determined to have a fault.

[0011] Optionally, the comparison of the edge sample signal with the preset limit value includes:

[0012] Based on the collected blade sample signal, a specified number of sample signal values are obtained;

[0013] Based on each sample signal value, a signal mean value is calculated;

[0014] Based on the calculated signal mean value and the preset mean value threshold, if it exceeds the preset mean value threshold, a fiber optic head misalignment fault code is directly returned, and a deviation value is determined based on the blade sample signal;

[0015] If it does not exceed the preset mean value threshold, the deviation value is directly determined based on the blade sample signal.

[0016] Optionally, determining the deviation value based on the blade sample signal includes:

[0017] Based on the preset mean value threshold, the deviation absolute value and the maximum deviation value of each sample signal value are determined; and

[0018] Based on the deviation absolute value of each sample signal value, a deviation mean value is calculated.

[0019] Optionally, determining that the to-be-tested cutter has a possible fault based on the deviation value includes:

[0020] Judging whether the maximum deviation value exceeds the product of the deviation mean value and a tool wear threshold;

[0021] If it does not exceed, it is determined that the blade has no fault;

[0022] If it exceeds, it is determined that the to-be-tested cutter has a possible fault.

[0023] Optionally, judging the deviation peak signal as a fault signal based on the deviation peak signal includes:

[0024] If it is judged that the maximum deviation value exceeds the product of the deviation mean value and the tool wear threshold, the deviation peak signal is captured based on the blade sample signal with a possible fault;

[0025] Based on the captured deviation peak signal, a plurality of peak times are determined;

[0026] According to the determined plurality of peak times, the effectiveness of the deviation peak signal is judged;

[0027] In the case of judging that the deviation peak signal is effective, the period error of the deviation peak signal is further judged to determine whether the to-be-tested cutter has a fault.

[0028] Optionally, judging the effectiveness of the deviation peak signal according to the determined plurality of peak times includes:

[0029] Judging the size relationship between the deviation between the minimum fault period sampling periods and the time difference between adjacent peak signals;

[0030] If the product of the time difference between adjacent peak signals and the set sampling period is greater than the fault minimum period, the deviation peak signal is determined to be valid.

[0031] The embodiment of the present application also provides a tool breakage detection device, comprising:

[0032] The insert breakage detection mechanism comprises a fiber pair head for mounting the optical fiber, the mounted fiber pair head is opposite to the edge region of the tool to be detected, the fiber pair head is provided with a tool breakage cylinder for adjusting the light flux, and the insert breakage detection mechanism and the fiber pair head are controlled by the controller.

[0033] The insert breakage detection mechanism drives the tool to be detected to operate at a set rotating speed under the control instruction of the controller.

[0034] The fiber pair head is used for detecting the tool to be detected in the rotating state, collecting an edge sample signal, and transmitting the edge sample signal to the controller.

[0035] The controller is used for comparing the edge sample signal with a preset limit value and determining a deviation value based on the edge sample signal.

[0036] In a case where it is determined that the tool to be detected has a possible fault based on the deviation value, a deviation peak signal is collected.

[0037] In a case where it is determined that the tool to be detected has a possible fault based on the deviation peak signal, the tool to be detected is determined to have a fault.

[0038] The embodiment of the present application also provides a computer readable storage medium, wherein the computer readable storage medium stores a computer program, and the computer program is executed by a processor to implement the steps of the tool breakage detection method.

[0039] The embodiment of the present application provides a tool breakage detection method which can be applied to the fault detection of tooth-shaped inserts, solves the detection limitation of single circular inserts, and can detect various types of inserts.

[0040] The above description is only a summary of the technical scheme of the present application, in order to more clearly understand the technical means of the present application, the specific embodiments of the present application can be implemented according to the content of the specification, and in order to make the above and other purposes, characteristics and advantages of the present application more obvious and easy to understand, the following specific embodiments of the present application are described. BRIEF DESCRIPTION OF DRAWINGS

[0041] Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments with reference made to the accompanying drawings. The drawings are for purposes of illustration only and are not intended to be limiting in

[0042] Figure 1 An example of the installation position of the blade breakage detection mechanism of the embodiments of the present application;

[0043] Figure 2 An example of the side of the blade breakage detection mechanism of the embodiments of the present application;

[0044] Figure 3 An example of the normal tool structure to be detected of the embodiments of the present application;

[0045] Figure 4 An example of the flow of the tool breakage detection method of the embodiments of the present application in the sensor misjudgment stage;

[0046] Figure 5 An example of the flow of the tool breakage detection method of the embodiments of the present application in the tool break detection stage;

[0047] Figure 6 An example of the flow of the tool breakage detection method of the embodiments of the present application in the peak signal validity judgment stage. DETAILED DESCRIPTION

[0048] Exemplary embodiments of the present disclosure will be described below in greater detail with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it is understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure can be more thoroughly understood and the scope of the present disclosure can be accurately conveyed to those skilled in the art.

[0049] The tool breakage detection method provided by the embodiments of the present application is based on a blade breakage detection mechanism, as described in Figure 1 、 Figure 2 The blade breakage detection mechanism includes a fiber pair head 3 for installing an optical fiber, the installed fiber pair head is directly opposite the cutting edge area of the tool to be detected, the fiber pair head 3 is provided with a tool breakage air cylinder 5 for adjusting the light flux, in some specific examples, the fiber pair head 3 is also provided with a locking device 4 and a telescopic adjustment knob 2, the position of the fiber pair head 3 can be adjusted through the telescopic adjustment knob 2, and the locking of the fiber pair head 3 can be controlled through the locking device 4.

[0050] The detection method of the embodiments of the present application is completed through the following steps:

[0051] In step S101, the to-be-tested cutter 1 is installed to the blade breakage detection mechanism. As shown in the figure, the embodiment of the present application can be used for the detection of the to-be-tested cutter with notches 11 in normal condition. In some specific examples, the optical fiber pair head 3 is divided into a transmitting end and a receiving end, the opening of the cutter breakage cylinder 5 adjusts the amplifier so that the light flux reaches more than 98%, then the cutter breakage cylinder 5 is closed, the extension adjustment knob 2 is adjusted so that the optical fiber pair head 3 is across the two sides of the cutter edge, and the light flux reaches 6-15% to achieve the best detection state, and finally the locking device 4 is twisted to lock the adjusted optical fiber pair head 3 to prevent displacement. Figure 3

[0052] In step S102, the controller controls the opening of the blade breakage detection mechanism to drive the to-be-tested cutter to run at a set rotating speed.

[0053] In step S103, the optical fiber pair head is used to detect the to-be-tested cutter in the rotating state to collect an edge sample signal.

[0054] In step S104, the controller compares the edge sample signal with a preset limit value, and determines a deviation value based on the edge sample signal.

[0055] In step S105, the deviation peak signal is collected in a case where it is determined according to the deviation value that the to-be-tested cutter has a possible fault.

[0056] In step S106, the to-be-tested cutter is determined to have a fault in a case where it is judged based on the deviation peak signal that it is a fault signal.

[0057] In some specific examples, the controller can be realized by configuring a circuit board, the circuit board is provided with a processor and a memory, and a corresponding detection algorithm program is set, for example, the types of cutters are automatically identified, and three indicator lights can be set on the circuit board for easy observation, wherein the yellow light is a power indicator light, the light is on when the power is turned on, the green light is a running indicator light, the light is on when the program runs normally, and the red light is a diagnosis result indicator light, the light is on when the program diagnosis result is cutter damage, and the light is off when the diagnosis result is no cutter damage.

[0058] In a specific example, 44000 data can be collected in a set period, and the detection algorithm program has a filtering function to filter the noise generated by water and dust impurities in the external environment on the optical fiber amplifier. If the cutter is damaged in this period, an alarm will be immediately issued, and the main shaft will stop rotating.

[0059] ​The embodiment of the present application proposes a tool breakage detection method which can be applied to tooth-shaped blade fault detection, solves the detection limitation of the previous single circular blade, and can detect various types of blades.

[0060] The tool breakage detection method of the present application includes three stages, namely: sensor failure judgment stage, tool break detection stage, and peak signal effectiveness judgment stage.

[0061] For the sensor failure judgment stage, in some embodiments, comparing the cutting edge sample signal with the preset limit value includes:

[0062] Based on the collected cutting edge sample signal, a specified number of sample signal values are obtained, and in some examples, as shown in Figure 4 8192 sample signal values can be obtained, and in subsequent examples, 8192 sample signal values are taken as an example for description, and the processing mode of other numbers of sample signal values is the same.

[0063] The signal mean value is calculated based on each sample signal value, which can be summed and then the mean value is calculated.

[0064] The calculated signal mean value is compared with the preset mean value threshold, and the preset mean value threshold in the embodiment of the present application can include a preset upper limit value and a lower limit value, which can be configured through a user interface.

[0065] If the preset mean value threshold is exceeded, the fiber optic head failure code is directly returned, and the deviation value is determined based on the cutting edge sample signal. Specifically, the analog signal returned by the fiber optic amplifier can be judged in real time by using the control circuit board. If the preset mean value threshold is exceeded, the fault code is directly returned, and the deviation value is determined based on the cutting edge sample signal.

[0066] If the preset mean value threshold is not exceeded, the deviation value is directly determined based on the cutting edge sample signal, and it is judged that the blade is in a normal state.

[0067] After the judgment is completed, the maximum deviation and the mean deviation can be cleared, and the next detection is waited.

[0068] The tool break detection stage, as shown in Figure 5 The deviation value is determined based on the cutting edge sample signal, which includes:

[0069] Based on the preset mean value threshold, the deviation absolute value and the maximum deviation of each sample signal value are determined. One specific way to calculate the deviation absolute value is to use the deviation of each sample signal value from the previously calculated signal mean value.

[0070] The deviation mean value is calculated based on the deviation absolute value of each sample signal value.

[0071] In some embodiments, determining that the tool under test is likely to have a fault based on the deviation value comprises:

[0072] determining whether the maximum deviation value exceeds a product of the mean deviation value and the tool wear threshold value, for example, determining whether the mean deviation value x the tool wear threshold value is less than the maximum deviation value.

[0073] if not, determining that the insert is not likely to have a fault;

[0074] if so, determining that the tool under test is likely to have a fault, and thus requiring further determination.

[0075] a peak signal validity determination stage, as shown in Figure 6 In some embodiments, determining that the deviation peak signal is a fault signal based on the deviation peak signal comprises:

[0076] if it is determined that the maximum deviation value exceeds the product of the mean deviation value and the tool wear threshold value, then based on the blade sample signal being likely to have a fault, the deviation peak signal is captured in several times, for example, the deviation peak signal sequence is captured in 5 times, and the deviation peak signal sequence is determined as a fault signal. The determination method can compare whether 8192 deviation values are greater than a classification threshold value. If so, it is considered to be a fault signal. The classification threshold value = maximum deviation value x (0.5-0.9).

[0077] Based on the captured deviation peak signal, a plurality of peak times are determined, for example, 50 peak times can be recorded.

[0078] determining the validity of the deviation peak signal according to the determined plurality of peak times;

[0079] in the case of determining that the deviation peak signal is valid, further determining the period error of the deviation peak signal to determine whether the tool under test has a fault.

[0080] In some embodiments, determining the validity of the deviation peak signal according to the determined plurality of peak times comprises:

[0081] determining the size relationship between the deviation between the fault minimum period sampling period and the time difference between adjacent peak signals. A specific determination method is that the time difference between adjacent peak signals > fault minimum period ÷ sampling period.

[0082] if the product of the time difference between adjacent peak signals and the set sampling period is greater than the fault minimum period, then the deviation peak signal is determined to be valid, and then the period error of the deviation peak signal is further determined to determine whether the tool under test has a fault.

[0083] The detection method of the application can be used to detect circular or tooth-shaped blades, and in particular, the detection of tooth-shaped blades is technically implemented. The detection and data analysis can be performed according to different tooth pitches of the tooth-shaped blades to complete the detection of tool failure. The method of the application can monitor the service life of blades of multiple manufacturers, effectively prevent damaged blades from causing damage to the products to be processed, and reduce the chip rejection rate.

[0084] The application also provides a tool breakage detection device, which comprises:

[0085] The blade breakage detection mechanism comprises a fiber pair head for mounting an optical fiber, and the mounted fiber pair head is opposite to the edge region of the tool to be detected. The fiber pair head is provided with a tool breakage cylinder for adjusting light flux. The blade breakage detection mechanism and the fiber pair head are controlled by a controller.

[0086] The blade breakage detection mechanism drives the tool to be detected to operate at a set rotating speed under the control of the control instruction of the controller.

[0087] The fiber pair head is used to detect the tool to be detected in a rotating state to collect an edge sample signal and transmit the signal to the controller.

[0088] The controller is used to compare the edge sample signal with a preset limit value and determine a deviation value based on the edge sample signal.

[0089] In the case that the tool to be detected has a possible failure based on the deviation value, a deviation peak signal is collected.

[0090] In the case that the tool to be detected has a failure based on the deviation peak signal, the tool to be detected is determined to have a failure.

[0091] The application also provides a computer readable storage medium, which stores a computer program. When the computer program is executed by a processor, the steps of the tool breakage detection method are implemented.

[0092] It should be noted that in this document, the terms "comprising", "including", or any other variant thereof are intended to cover non-exclusive inclusion, so that processes, methods, articles, or devices including a series of elements not only include those elements, but also include other elements not explicitly listed, or inherent to such processes, methods, articles, or devices. Without more limitations, the element defined by the statement "comprising a" does not exclude the presence of additional identical elements in the process, method, article, or device including the element.

[0093] The above-mentioned application example serial numbers are only for description, and do not represent the advantages and disadvantages of the embodiments.

[0094] Those skilled in the art can clearly understand the above-mentioned embodiment method can be realized by means of software and necessary general hardware platform, of course, also can be realized by hardware, but in many cases, the former is a better embodiment. Based on such understanding, the technical solutions of the present application can be embodied in the form of a software product, which is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk) and includes a plurality of instructions for making a terminal (which can be a mobile phone, computer, server or network device, etc.) execute the method described in each embodiment of the present application.

[0095] The embodiments of the present application are described above in combination with the drawings, but the present application is not limited to the above-mentioned specific embodiments, and the above-mentioned specific embodiments are only illustrative, not restrictive. Those skilled in the art can make many forms without departing from the scope of the present application under the inspiration of the present application, which are all within the protection scope of the present application.

Claims

1. A tool breakage detection method characterized by, The tool breakage detection method is realized based on a tool blade breakage detection mechanism, the tool blade breakage detection mechanism comprises a fiber pair head for installing an optical fiber, the installed fiber pair head is opposite to a cutting edge area of a tool to be detected, and a tool breakage air cylinder for adjusting light flux is arranged on the fiber pair head, and breakage detection is completed through the following steps: The tool blade breakage detection mechanism is controlled to be started, so that the tool blade breakage detection mechanism drives the tool to be detected to operate at a set rotating speed; The tool to be detected in a rotating state is detected by the fiber pair head, so as to collect a cutting edge sample signal; The controller is used to compare the cutting edge sample signal with a preset limit value, and determine a deviation value based on the cutting edge sample signal; In a case where it is determined that the tool to be detected has a possible fault according to the deviation value, a deviation peak value signal is collected; In a case where it is judged that the deviation peak value signal is a fault signal, it is determined that the tool to be detected has a fault; The comparison between the cutting edge sample signal and the preset limit value comprises: Based on the collected cutting edge sample signal, a specified number of sample signal values are obtained; The signal mean value is calculated based on each sample signal value; The calculated signal mean value is compared with a preset mean value threshold, if the preset mean value threshold is exceeded, a fiber pair head improper fault code is directly returned, and the deviation value is determined based on the cutting edge sample signal; If the preset mean value threshold is not exceeded, the deviation value is directly determined based on the cutting edge sample signal; The determination of the deviation value based on the cutting edge sample signal comprises: Based on the preset mean value threshold, the deviation absolute value and the maximum deviation value of each sample signal value are determined; and The deviation mean value is calculated based on the deviation absolute value of each sample signal value; The determination that the tool to be detected has a possible fault according to the deviation value comprises: It is judged whether the maximum deviation value exceeds the product of the deviation mean value and a tool damage threshold; If not, it is determined that the tool blade has no fault; If yes, it is determined that the tool to be detected has a possible fault; The judgment that the deviation peak value signal is a fault signal comprises: If it is judged that the maximum deviation value exceeds the product of the deviation mean value and the tool damage threshold, the deviation peak value signal is captured based on the cutting edge sample signal with the possible fault; Based on the captured deviation peak value signal, a plurality of peak time values are determined; The effectiveness of the deviation peak value signal is judged according to the determined plurality of peak time values; In a case where the deviation peak value signal is judged to be effective, the period error of the deviation peak value signal is further judged to determine whether the tool to be detected has a fault.

2. The tool breakage detection method according to claim 1, characterized in that, The judgment of the effectiveness of the deviation peak value signal according to the determined plurality of peak time values comprises: It is judged whether the size relationship between the deviation between the minimum fault period sampling periods and the time difference between adjacent peak signals; If the product of the time difference between adjacent peak signals and the set sampling period is greater than the minimum fault period, it is judged that the deviation peak value signal is effective.

3. A tool breakage detection device, characterized by, The tool blade breakage detection mechanism comprises a fiber pair head for installing an optical fiber, the installed fiber pair head is opposite to a cutting edge area of a tool to be detected, and a tool breakage air cylinder for adjusting light flux is arranged on the fiber pair head, and the tool blade breakage detection mechanism and the fiber pair head are controlled by a controller; ​ The blade breakage detection mechanism drives the to-be-detected cutter to run at a set rotating speed after being started based on a control instruction of the controller; The optical fiber against head is positive, which is used to detect the to-be-detected cutter in a rotating state to collect an edge sample signal and transmit the edge sample signal to the controller; The controller is used to compare the edge sample signal with a preset limit value and determine a deviation value based on the edge sample signal; In a case where it is determined based on the deviation value that the to-be-detected cutter may have a fault, a deviation peak signal is collected; In a case where it is determined based on the deviation peak signal that the to-be-detected cutter has a fault, it is determined that the to-be-detected cutter has a fault; The comparison of the edge sample signal with the preset limit value comprises: Based on the collected edge sample signal, a specified number of sample signal values are obtained; Based on each sample signal value, a signal mean value is calculated; Based on the calculated signal mean value and a preset mean value threshold, if the preset mean value threshold is exceeded, a fiber against head failure code is directly returned, and a deviation value is determined based on the edge sample signal; If the preset mean value threshold is not exceeded, the deviation value is directly determined based on the edge sample signal; The determination of the deviation value based on the edge sample signal comprises: Based on the preset mean value threshold, a deviation absolute value and a maximum deviation value of each sample signal value are determined; and Based on the deviation absolute value of each sample signal value, a deviation mean value is calculated; The determination of the to-be-detected cutter based on the deviation value that the to-be-detected cutter may have a fault comprises: It is determined whether the maximum deviation value exceeds a product of the deviation mean value and a cutter damage threshold; If not, it is determined that the blade has no fault; If so, it is determined that the to-be-detected cutter may have a fault; The determination of the to-be-detected cutter based on the deviation peak signal that the to-be-detected cutter has a fault comprises: If it is determined that the maximum deviation value exceeds the product of the deviation mean value and the cutter damage threshold, a deviation peak signal is captured based on the edge sample signal that may have a fault; Based on the captured deviation peak signal, a plurality of peak times are determined; Based on the determined plurality of peak times, the effectiveness of the deviation peak signal is determined; In a case where the deviation peak signal is determined to be effective, a period error of the deviation peak signal is further determined to determine whether the to-be-detected cutter has a fault.

4. A computer-readable storage medium, characterized in that, The computer readable storage medium stores a computer program, and the computer program is executed by the processor to implement the steps of the cutter breakage detection method of claim 1 or 2.

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