A method and system for automatic zeroing of a pressure sensor

Abstract

The application provides a pressure sensor automatic zero calibration method and system. The method comprises the following steps: determining a first deviation according to first pressure detection data of the pressure sensor in a first period; determining a second deviation according to second pressure detection data of the pressure sensor in a second period; determining a deviation amplitude according to the first deviation and the second deviation; and automatically calibrating the pressure sensor according to the deviation amplitude. The scheme of the application can realize automatic zero calibration of the pressure sensor in a purifier, and reduce the influence of the detection error of the pressure sensor on the wafer production quality.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more specifically, to an automatic zeroing method, system, electronic device, and computer storage medium for a pressure sensor. Background Technology

[0002] The purifier uses a material reaction bed to remove impurities such as moisture, oxygen, carbon dioxide, carbon monoxide, hydrocarbons, and metal carbonyl compounds. This removes background-level contaminants without generating metals or other harmful pollutants in the process stream.

[0003] Pressure sensors (PTs) are a critical component of purifiers. After prolonged use, they may experience zero-point drift, which can cause deviations in the purifier and ultimately lead to wafer defects due to insufficient purity of the process gas. Summary of the Invention

[0004] In order to at least solve the technical problems existing in the background art, the present invention provides a method, system, electronic device and computer storage medium for automatic zeroing of pressure sensors.

[0005] A first aspect of the present invention provides an automatic zeroing method for a pressure sensor, the method comprising the following steps:

[0006] The first deviation is determined based on the first pressure detection data from the pressure sensor in the first time period;

[0007] The second deviation is determined based on the second pressure detection data from the pressure sensor during the second time period;

[0008] The deviation amplitude is determined based on the first deviation and the second deviation, and the pressure sensor is automatically zeroed based on the deviation amplitude.

[0009] In some embodiments, before generating the first deviation based on the first pressure detection data from the pressure sensor in the first time period, the method further includes:

[0010] A third deviation is generated based on the third pressure detection data of the pressure sensor in the third time period. If the third deviation exceeds the drift threshold, it is determined that the pressure sensor has zero-point drift.

[0011] In some embodiments, the first time period is before the purging operation, and the second time period is during the purging operation.

[0012] In some embodiments, automatically zeroing the pressure sensor based on the deviation amplitude includes:

[0013] During the fourth time period, the pressure sensor is automatically zeroed based on the deviation amplitude;

[0014] The fourth time period is located during the purging operation.

[0015] In some embodiments, determining the first deviation based on first pressure detection data from a pressure sensor in a first time period includes:

[0016] Obtain the first pressure value at the first moment of the first time period, and the second pressure value at the second moment of the first time period;

[0017] The first difference is calculated based on the first pressure value and the second pressure value;

[0018] The first deviation is calculated based on the first preset difference and the first difference.

[0019] In some embodiments, determining the second deviation based on second pressure detection data from the pressure sensor in a second time period includes:

[0020] Obtain the third pressure value at the preceding third moment of the second time period, and the fourth pressure value at the following fourth moment of the second time period;

[0021] The second difference is calculated based on the fourth pressure value and the third pressure value;

[0022] The second deviation is calculated based on the second preset difference and the second difference.

[0023] In some embodiments, determining the deviation amplitude based on the first deviation and the second deviation includes:

[0024] The deviation magnitude is calculated based on the first deviation, the second deviation, and their respective weighting coefficients.

[0025] A second aspect of the present invention provides an automatic zeroing system for a pressure sensor, comprising an acquisition module, a processing module, and a storage module; the processing module is connected to the acquisition module and the storage module.

[0026] The storage module is used to store executable computer program code;

[0027] The acquisition module is used to acquire pressure detection data from the pressure sensor and transmit it to the processing module.

[0028] The characteristic is that the processing module is configured to execute the method described in any of the preceding methods by calling the executable computer program code in the storage module.

[0029] A third aspect of the present invention also provides an electronic device, comprising: a memory storing executable program code; a processor coupled to the memory; the processor invoking the executable program code stored in the memory to perform the method as described in any of the preceding claims.

[0030] A fourth aspect of the invention provides a computer storage medium storing a computer program that, when executed by a processor, performs the method described in any of the preceding claims.

[0031] The beneficial effects of this invention are as follows:

[0032] The solution of this invention can automatically zero the pressure sensor in the purifier, reducing the impact of pressure sensor detection error on wafer production quality. Attached Figure Description

[0033] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is a flowchart illustrating an automatic zeroing method for a pressure sensor disclosed in an embodiment of the present invention;

[0035] Figure 2 This is a schematic diagram of the structure of an automatic zeroing system for a pressure sensor disclosed in an embodiment of the present invention. Detailed Implementation

[0036] The exemplary embodiments of this disclosure are described below with reference to the accompanying drawings, including various details of the embodiments to aid understanding, and should be considered merely exemplary. Therefore, those skilled in the art will recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of this disclosure. Similarly, for clarity and brevity, descriptions of well-known functions and structures are omitted in the following description.

[0037] See Figure 1 As shown in the figure, an embodiment of the present invention discloses an automatic zeroing method for a pressure sensor, the method comprising the following steps:

[0038] The first deviation is determined based on the first pressure detection data from the pressure sensor in the first time period;

[0039] The second deviation is determined based on the second pressure detection data from the pressure sensor during the second time period;

[0040] The deviation amplitude is determined based on the first deviation and the second deviation, and the pressure sensor is automatically zeroed based on the deviation amplitude.

[0041] A pressure sensor is installed within the purification chamber of the purifier. Pressure data is collected from the sensor at different operating times during the purifier's operation. This data is analyzed to determine two types of deviation from the pressure sensor, and the overall deviation amplitude is calculated. Automatic zeroing is then performed. This invention enables automatic zeroing of the pressure sensor in the purifier, reducing the impact of pressure sensor detection errors on wafer production quality.

[0042] In some embodiments, before generating the first deviation based on the first pressure detection data from the pressure sensor in the first time period, the method further includes:

[0043] A third deviation is generated based on the third pressure detection data of the pressure sensor in the third time period. If the third deviation exceeds the drift threshold, it is determined that the pressure sensor has zero-point drift.

[0044] In this embodiment, the pressure sensor typically experiences zero-point drift only after prolonged use. This invention sets up a method to detect and analyze the third pressure detection data prior to the pressure sensor. During this third time period, the purification chamber can be set to a stable state where there is neither gas replenishment nor discharge, thereby obtaining the third deviation of the pressure sensor. When the third deviation is too large, it can be determined that the pressure sensor has experienced zero-point drift, at which point the execution of the above-mentioned scheme of this invention can be triggered.

[0045] The third time period can be either the normal operating period of the purifier or the zero-point drift test monitoring period. Specifically, this can be achieved by analyzing the adjacent deviation relationship between the third pressure detection data and the gas pressure in the inlet valve channel and outlet valve channel of the purification chamber. In particular, the output gas pressure after purification of different concentrations of gas input into the purification chamber should be within a predetermined pressure range. Furthermore, since the volume of the purification chamber is fixed, after inputting a certain amount of gas to be purified, the third pressure detection data detected by the pressure sensor should also be within the predetermined pressure range. At this point, the adjacent deviation relationship of the three pressure detection data can be calculated according to the gas transmission direction. If the adjacent deviation exceeds the preset deviation relationship, it can be determined that the third pressure detection data exhibits zero-point drift.

[0046] In some embodiments, the first time period is before the purging operation, and the second time period is during the purging operation.

[0047] In this embodiment, the invention acquires first pressure detection data from the pressure sensor before the purging operation. The first time period can be the period when the purification chamber of the purifier begins gas purification. The invention also acquires second pressure detection data from the pressure sensor during the purging operation. The second time period can be the period after the gas purification operation is completed, when the purified gas (e.g., the purification concentration reaches 99.9999999%) is discharged from the purification chamber.

[0048] In some embodiments, automatically zeroing the pressure sensor based on the deviation amplitude includes:

[0049] During the fourth time period, the pressure sensor is automatically zeroed based on the deviation amplitude;

[0050] The fourth time period is located during the purging operation.

[0051] In this embodiment, the purging operation is mainly divided into two stages: replenishing and pressurizing air and opening the valve to release air. The present invention can set the second pressure detection data to be obtained in the second period of replenishing and pressurizing air, and calculate the deviation amplitude accordingly; and complete the automatic zeroing of the pressure sensor in the fourth period of opening the valve to release air.

[0052] In some embodiments, determining the first deviation based on first pressure detection data from a pressure sensor in a first time period includes:

[0053] Obtain the first pressure value at the first moment of the first time period, and the second pressure value at the second moment of the first time period;

[0054] The first difference is calculated based on the first pressure value and the second pressure value;

[0055] The first deviation is calculated based on the first preset difference and the first difference.

[0056] In this embodiment, after the purification operation begins, the impurity gas in the purification chamber is adsorbed and filtered through various means, resulting in a gradual decrease in the gas pressure within the purification chamber. This invention calculates the pressure difference, i.e., the first difference, by measuring the pressure values ​​at the start and end of the purification operation. Simultaneously, since the concentration of the gas input into the purification chamber is known in advance, meaning the concentration of the impurity gas is also known, a large amount of statistical calculation can be used to determine the theoretical gas pressure value, i.e., the first preset difference, after removing the impurity gas from the gas to a specified concentration. This allows for the determination of the first deviation.

[0057] Specifically, a pre-established pressure change relationship is created for different types and concentrations of gases after purification to a specified concentration. Based on this pressure change relationship, the aforementioned first preset difference can be determined. Of course, this pressure change relationship needs to be calculated based on the structural characteristics of the purification chamber and the amount of gas input.

[0058] In some embodiments, determining the second deviation based on second pressure detection data from the pressure sensor in a second time period includes:

[0059] Obtain the third pressure value at the preceding third moment of the second time period, and the fourth pressure value at the following fourth moment of the second time period;

[0060] The second difference is calculated based on the fourth pressure value and the third pressure value;

[0061] The second deviation is calculated based on the second preset difference and the second difference.

[0062] In this embodiment, the present invention acquires the third and fourth pressure values ​​within the purification chamber at the beginning and end of the gas replenishment and pressurization phase of the purging operation, respectively, and calculates the aforementioned second difference accordingly. Similar to the previous case, the gas pressure within the purification chamber increases after gas replenishment. The magnitude of this increase is related to the concentration of the purified gas at the third moment and the concentration of the replenished gas. Based on this, the theoretical gas pressure value within the purification chamber after replenishing a specified concentration of gas into the gas of that concentration can also be determined through extensive statistical calculations; this is the second preset difference, thus allowing the determination of the second deviation.

[0063] The method for establishing the pressure change relationship related to the second preset difference is similar to that of the first preset difference, and will not be repeated here. Of course, this pressure change relationship also needs to be calculated based on the structural characteristics of the purification chamber, the amount of gas supplied, and the amount of gas before the gas was supplied.

[0064] In some embodiments, determining the deviation amplitude based on the first deviation and the second deviation includes:

[0065] The deviation magnitude is calculated based on the first deviation, the second deviation, and their respective weighting coefficients.

[0066] In this embodiment, although the concentration of the bulk gas in the process gas can be accurately determined, the impurity components and their respective contents may differ, and the purification limits of different impurity gases are also different. This will cause the first deviation calculated above to fluctuate. Similarly, although the concentration of the gas added to the purification chamber can be determined, the impurity components and their concentrations in the purified gas cannot be accurately determined. Therefore, the second deviation calculated above will also fluctuate.

[0067] To address the aforementioned issues, this invention calculates the deviation amplitude of the pressure sensor based on the pressure detection deviation during the purification process (i.e., the first deviation, decompression deviation) and the pressure detection deviation during the gas replenishment and pressurization phase in the purging operation (i.e., the second deviation, pressurization deviation). In other words, the deviation amplitude of the pressure sensor is calculated by comprehensively considering the decompression deviation during the purification process and the pressurization deviation during the purging operation after purification, resulting in a more accurate calculation result.

[0068] The aforementioned weighting coefficients can be determined based on statistical data, or an initial weighting coefficient can be determined based on statistical data first, and then the weighting coefficient of the second deviation can be adjusted based on the similarity of the supplementary gas related to the second deviation with the original purified gas in multiple dimensions such as gas density and gas concentration. Thus, the weighting coefficient of the first deviation is the residual value of 1. The higher the similarity, the greater the adjustment of the weighting coefficient of the second deviation, and vice versa.

[0069] See Figure 2 As shown in the figure, this embodiment of the invention also discloses an automatic zeroing system for a pressure sensor, including an acquisition module, a processing module, and a storage module; the processing module is connected to the acquisition module and the storage module.

[0070] The storage module is used to store executable computer program code;

[0071] The acquisition module is used to acquire pressure detection data from the pressure sensor and transmit it to the processing module.

[0072] The characteristic feature is that the processing module is used to execute the method described in the foregoing embodiments by calling the executable computer program code in the storage module.

[0073] This invention also discloses an electronic device, comprising: a memory storing executable program code; a processor coupled to the memory; the processor calling the executable program code stored in the memory to execute the method described in the foregoing embodiments.

[0074] This invention also discloses a computer storage medium storing a computer program, which is executed by a processor to perform the methods described in the foregoing embodiments.

[0075] This invention also discloses a computer program product that executes the methods described in the foregoing embodiments when it is run.

[0076] Various embodiments of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays (FPGAs), application-specific integrated circuits (ASICs), application-specific standard products (ASSPs), systems-on-a-chip (SoCs), complex programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various embodiments may include implementations in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a dedicated or general-purpose programmable processor, capable of receiving data and instructions from a storage system, at least one input device, and at least one output device, and transmitting data and instructions to the storage system, the at least one input device, and the at least one output device.

[0077] The program code used to implement the methods of this disclosure may be written in any combination of one or more programming languages. This program code may be provided to a processor or controller of a general-purpose computer, special-purpose computer, or other programmable data processing apparatus, such that when executed by the processor or controller, the program code causes the functions / operations specified in the flowcharts and / or block diagrams to be implemented. The program code may be executed entirely on a machine, partially on a machine, as a standalone software package partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0078] In the context of this disclosure, a machine-readable medium can be a tangible medium that may contain or store a program for use by or in conjunction with an instruction execution system, apparatus, or device. A machine-readable medium can be a machine-readable signal medium or a machine-readable storage medium. A machine-readable medium can be, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination of the foregoing. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the foregoing.

[0079] To provide interaction with a user, the systems and techniques described herein can be implemented on a computer having: a display device for displaying information to the user (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor); and a keyboard and pointing device (e.g., a mouse or trackball) through which the user provides input to the computer. Other types of devices can also be used to provide interaction with the user; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including sound input, voice input, or tactile input).

[0080] The systems and technologies described herein can be implemented in computing systems that include backend components (e.g., as a data server), or computing systems that include middleware components (e.g., an application server), or computing systems that include frontend components (e.g., a user computer with a graphical user interface or web browser through which a user can interact with embodiments of the systems and technologies described herein), or any combination of such backend, middleware, or frontend components. The components of the system can be interconnected via digital data communication of any form or medium (e.g., a communication network). Examples of communication networks include local area networks (LANs), wide area networks (WANs), and the Internet.

[0081] Computer systems can include clients and servers. Clients and servers are generally located far apart and typically interact via communication networks. Client-server relationships are created by computer programs running on the respective computers and having a client-server relationship with each other. Servers can be cloud servers, servers in distributed systems, or servers incorporating blockchain technology.

[0082] It should be understood that the various forms of processes shown above can be used to rearrange, add, or delete steps. For example, the steps described in this disclosure can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution disclosed in this disclosure can be achieved, and this is not limited herein.

[0083] The specific embodiments described above do not constitute a limitation on the scope of protection of this disclosure. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A method of automatic zeroing of a pressure sensor, characterized in that, The pressure sensor is arranged in a purification working cavity of a purifier, and the method comprises the following steps: A first deviation, i.e., a pressure reduction deviation, is determined according to first pressure detection data of the pressure sensor in a first period; A second deviation, i.e., a pressure increase deviation, is determined according to second pressure detection data of the pressure sensor in a second period; the first pressure detection data and the second pressure detection data refer to pressure values; A deviation amplitude is determined according to the first deviation and the second deviation, and the pressure sensor is automatically zeroed according to the deviation amplitude; The first period is before a purging operation, and the second period is during the purging operation; The automatic zeroing of the pressure sensor according to the deviation amplitude comprises automatically zeroing the pressure sensor according to the deviation amplitude in a fourth period; the fourth period is during the purging operation; The first deviation is determined according to the first pressure detection data of the pressure sensor in the first period, which comprises: A first pressure value at a first time point before the first period and a second pressure value at a second time point after the first period are obtained; A first difference value is calculated according to the first pressure value and the second pressure value; The first deviation is calculated according to a first preset difference value and the first difference value; The second deviation is determined according to the second pressure detection data of the pressure sensor in the second period, which comprises: A third pressure value at a third time point before the second period and a fourth pressure value at a fourth time point after the second period are obtained; A second difference value is calculated according to the fourth pressure value and the third pressure value; The second deviation is calculated according to a second preset difference value and the second difference value.

2. The method of claim 1, wherein: Before the first deviation is generated according to the first pressure detection data of the pressure sensor in the first period, the method further comprises: A third deviation is generated according to third pressure detection data of the pressure sensor in a third period, and if the third deviation exceeds a drift threshold, it is determined that the pressure sensor has a zero point drift.

3. The method of claim 1, wherein: The deviation amplitude is determined according to the first deviation, the second deviation and respective weight coefficients.

4. An automatic zeroing system for a pressure sensor, comprising an obtaining module, a processing module and a storage module; the processing module is connected with the obtaining module and the storage module; The storage module is configured to store executable computer program codes; The obtaining module is configured to obtain pressure detection data of the pressure sensor and transmit the data to the processing module; The processing module is configured to execute the method according to any one of claims 1-3 by calling the executable computer program codes in the storage module. characterized in that A memory storing executable program codes; 5. An electronic device comprising: A processor coupled with the memory; the processor is configured to execute the method according to any one of claims 1-3 by calling the executable program codes stored in the memory. The computer program is executed by the processor to execute the method according to any one of claims 1-3.

6. A computer storage medium having stored thereon a computer program, characterized in that: ​

Images