Spray head device

Abstract

A nozzle device includes a nozzle and a liquid inlet pipe. The nozzle defines a chamber, an air inlet hole communicated with a top end of the chamber, at least one first outlet hole communicated with a bottom end of the chamber, and at least one second outlet hole communicated with the bottom end of the chamber and spaced from the first outlet hole. The liquid inlet pipe is arranged in the nozzle and partially located in the chamber. The liquid inlet pipe defines at least one first liquid outlet hole communicated with the chamber and corresponding to above the first outlet hole, and at least one second liquid outlet hole communicated with the chamber and corresponding to above the second outlet hole. The nozzle device has simple structure, small volume, light weight and low manufacturing cost, and can be applied in a small space cleaning occasion. In addition, the process of moving the nozzle device by the robot arm is stable and not easy to shake, which can improve the cleaning effect of the substrate.

Description

Technical Field

[0001] This invention relates to a nozzle device, and more particularly to a nozzle device for cleaning substrates. Background Technology

[0002] For example, in semiconductor manufacturing, wafers undergo multiple different processing steps. After each processing step, the wafer surface will have residues such as chemical agents. Therefore, cleaning solutions need to be sprayed onto the wafer during the cleaning process to remove these residues.

[0003] In existing cleaning processes, the nozzle assembly connects two nozzles together via a connecting structure, allowing each nozzle to spray cleaning fluid onto the wafer. However, this connecting structure results in a complex, large, and heavy overall nozzle assembly, leading to high manufacturing costs. Furthermore, due to the large size and weight of the nozzle assembly, it is prone to severe shaking during the movement of the robotic arm relative to the wafer. Summary of the Invention

[0004] Therefore, one object of the present invention is to provide a nozzle device that can overcome at least one disadvantage of the prior art.

[0005] The objective of this invention and the problem it solves are achieved by the following technical solution: According to the nozzle device proposed in this invention, a nozzle and a liquid inlet pipe are included. The nozzle defines a chamber, an air inlet hole communicating with the top of the chamber, at least one first spray hole communicating with the bottom of the chamber, and at least one second spray hole communicating with the bottom of the chamber and spaced apart from the first spray hole. The liquid inlet pipe is disposed in the nozzle and partially located in the chamber. The liquid inlet pipe defines at least one first liquid spray hole communicating with the chamber and corresponding to the top of the first spray hole, and at least one second liquid spray hole communicating with the chamber and corresponding to the top of the second spray hole.

[0006] In the nozzle device of the present invention, the center of the first spray hole is located on an inclined first axis, and the center of the second spray hole is located on an inclined second axis. The first axis and the second axis intersect at an acute angle, so that the first spray hole and the second spray hole are in an outward opening shape.

[0007] The nozzle device of the present invention includes a liquid inlet pipe comprising a diversion pipe section disposed within the chamber. The center of the diversion pipe section is longitudinally aligned with the center of the air inlet. The diversion pipe section has a bottom end abutting against the nozzle. The diversion pipe section forms a first liquid injection hole and a second liquid injection hole located on opposite sides of the bottom end. The diversion pipe section divides the chamber into a first guide channel and a second guide channel. The top of the first guide channel and the top of the second guide channel are interconnected and connected to the air inlet. The bottom of the first guide channel and the bottom of the second guide channel are not interconnected. The first guide channel is connected between the first liquid injection hole and the first ejection hole, and the second guide channel is connected between the second liquid injection hole and the second ejection hole.

[0008] The nozzle device of the present invention has a splitting pipe section having a splitting tip aligned with the center of the air inlet.

[0009] The nozzle device of the present invention includes an inlet pipe defining an inlet hole, the inlet pipe including a pipe wall disposed in the chamber and surrounding the inlet hole, the pipe wall having a non-uniform thickness and having a maximum thickness portion located at the bottom end of the inlet hole and abutting against the nozzle, the pipe wall forming a first spray hole and a second spray hole communicating with the inlet hole and respectively located on the opposite side of the maximum thickness portion.

[0010] The nozzle device of the present invention has a maximum thickness portion having a bottom end abutting against the nozzle, and the pipe wall also has a first guide slope inclinedly connected to the bottom end and a second guide slope inclinedly connected to the bottom end. The first guide slope and the second guide slope form an acute angle. The first spray hole has a first spray port formed on the first guide slope, and the second spray hole has a second spray port formed on the second guide slope.

[0011] The nozzle device of the present invention has a first guiding slope having a first blocking surface between the first spray nozzle and the top and bottom ends, and a second guiding slope having a second blocking surface between the second spray nozzle and the top and bottom ends.

[0012] The nozzle device of the present invention further includes a flow-dividing tip on the pipe wall, the flow-dividing tip being longitudinally aligned with the center of the air inlet.

[0013] The nozzle device of the present invention includes a body and two cover plates disposed on the body. The body has an air inlet, a first spray hole and a second spray hole. The cover plates and the body together define the chamber. The cover plates are respectively fixedly connected to opposite ends of the pipe wall.

[0014] The nozzle device of the present invention includes an inlet pipe comprising a top-bottom end, a first guide slope, and a second guide slope located within the chamber. The top-bottom end abuts against the nozzle. The first guide slope and the second guide slope are obliquely connected to the top-bottom end and form an acute angle. The first spray hole and the second spray hole are respectively formed on the first guide slope and the second guide slope and are respectively located on opposite sides of the top-bottom end.

[0015] The nozzle device of the present invention has a first spray hole having a first spray port formed on the first guide slope, a second spray hole having a second spray port formed on the second guide slope, the first guide slope having a first blocking surface between the first spray port and the top and bottom ends, and the second guide slope having a second blocking surface between the second spray port and the top and bottom ends.

[0016] In the nozzle device of the present invention, the first spray hole is larger than the first liquid spray hole, and the second spray hole is larger than the second liquid spray hole.

[0017] The nozzle device of the present invention includes a first bottom surface and a second bottom surface, the first bottom surface and the second bottom surface being rectangular, the first spray hole having a first spray outlet, the second spray hole having a second spray outlet, the first spray outlet being elongated and inclinedly formed on the first bottom surface, and the second spray outlet being elongated and inclinedly formed on the second bottom surface.

[0018] The nozzle device of the present invention defines a plurality of first spray holes and a plurality of second spray holes. The first spray holes are arranged at intervals along a first horizontal direction, and the second spray holes are arranged at intervals along the first horizontal direction. Each first spray hole and its corresponding second spray hole are spaced apart along a second horizontal direction perpendicular to the first horizontal direction. The liquid inlet pipe defines a plurality of first liquid spray holes and a plurality of second liquid spray holes. The first liquid spray holes are arranged at intervals along the first horizontal direction, and the second liquid spray holes are arranged at intervals along the first horizontal direction. Each first liquid spray hole and its corresponding second liquid spray hole are spaced apart along the second horizontal direction.

[0019] In the nozzle device of the present invention, each of the first spray holes is larger than the corresponding first spray hole, and each of the second spray holes is larger than the corresponding second spray hole.

[0020] The nozzle device of the present invention includes a first bottom surface and a second bottom surface, each of the first nozzles having a first nozzle outlet formed on the first bottom surface, and each of the second nozzles having a second nozzle outlet formed on the second bottom surface, wherein the first nozzle outlet and the second nozzle outlet are each elongated.

[0021] In the nozzle device of the present invention, the first bottom surface and the second bottom surface are each rectangular, the length extension direction of the first bottom surface and the length extension direction of the second bottom surface are parallel to the first horizontal direction, the first nozzle outlet of the first nozzle is obliquely formed on the first bottom surface and the oblique direction is the same, and the second nozzle outlet of the second nozzle is obliquely formed on the second bottom surface and the oblique direction is the same.

[0022] In the nozzle device of the present invention, the projection portions of the first nozzle outlets of every two adjacent first nozzles in the second horizontal direction overlap, and the projection portions of the second nozzle outlets of every two adjacent second nozzles in the second horizontal direction overlap.

[0023] The advantages of this invention are: the nozzle device has a simple overall structure, small size, light weight, and low manufacturing cost, making it suitable for cleaning applications in confined spaces. Furthermore, the robotic arm's transfer of the nozzle device is smooth and less prone to shaking, improving the cleaning effect on the substrate. Attached Figure Description

[0024] Figure 1 This is a perspective view of an embodiment of the nozzle device of the present invention;

[0025] Figure 2 This is a side view of the embodiment described;

[0026] Figure 3 This is a front view of the embodiment described;

[0027] Figure 4 It is along Figure 2 A cross-sectional view taken by line IV-IV in the diagram;

[0028] Figure 5 It is along Figure 3 A cross-sectional view taken by the V-V line in the image;

[0029] Figure 6 This is a bottom view of the embodiment described;

[0030] Figure 7 It is along Figure 3 An incomplete, magnified view viewed in the direction of arrow A;

[0031] Figure 8 It is along Figure 3 An incomplete magnified view viewed in the direction of arrow B;

[0032] Figure 9 This is a schematic diagram of the embodiment and a substrate; and

[0033] Figure 10 This is a schematic diagram of the embodiment and the substrate. Detailed Implementation

[0034] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0035] Before the invention is described in detail, it should be noted that similar components are represented by the same numbers in the following description.

[0036] See Figure 1 One embodiment of the nozzle device 200 of the present invention is, for example, applied in a semiconductor manufacturing process to clean a substrate 1, such as a wafer (e.g., ...). Figure 9 (As shown). The nozzle device 200 includes a nozzle 2 and a liquid inlet pipe 3 disposed on the nozzle 2.

[0037] For ease of subsequent explanation, the nozzle device 200 is defined as having a first horizontal direction X, a second horizontal direction Y perpendicular to the first horizontal direction X, and a longitudinal direction Z perpendicular to both the first horizontal direction X and the second horizontal direction Y. Taking the first horizontal direction X as an example (front-back direction),... Figure 1 The direction the arrow points is forward, and the opposite direction is backward. The second horizontal direction Y is taken as a left-right direction. Figure 1 The arrow points left, and the opposite direction is right. The vertical direction Z represents up and down. Figure 1 The direction the arrow points is up, and the opposite direction is down.

[0038] See Figure 2 , Figure 3 , Figure 4 and Figure 5 The nozzle 2 includes a body 21 and two cover plates 22 disposed on the body 21. The body 21 has a housing 23, a top tube 24 disposed at the top of the housing 23, and a nozzle 25 disposed at the bottom of the housing 23. The cover plates 22 cover the opposite ends of the housing 23 along the first horizontal direction X, and each cover plate 22 is fixedly connected to the housing 23 by means such as screws. The housing 23, the nozzle 25, and the cover plates 22 together define a chamber 26 through which the liquid inlet tube 3 passes. Each cover plate 22 forms a through hole 221 for the liquid inlet tube 3 to pass through. The housing 23 and the top tube 24 together define an air inlet 27 communicating with the top of the chamber 26. The jacking pipe 24 is used to connect to a gas supply source (not shown), which can supply gas to the chamber 26 through the air inlet 27. The gas is, for example, clean dry air (CDA), but is not limited thereto.

[0039] See Figure 4 , Figure 5 and Figure 6The nozzle 25 has a connecting block 250 connected to the housing 23, a first nozzle arm 251 extending downward and to the left from the bottom end of the connecting block 250, and a second nozzle arm 252 extending downward and to the right from the bottom end of the connecting block 250. The first nozzle arm 251 and the second nozzle arm 252 are outwardly forked and spaced apart along the second horizontal direction Y. The first nozzle arm 251 and the connecting block 250 together define a plurality of first ejection holes 253 communicating with the bottom end of the chamber 26 and spaced apart along the first horizontal direction X. The second nozzle arm 252 and the connecting block 250 together define a plurality of second ejection holes 254 communicating with the bottom end of the chamber 26 and spaced apart along the first horizontal direction X. The center of each first ejection hole 253 is located on an inclined first axis L1. The center of each second ejection hole 254 is located on an inclined second axis L2. The first axis L1 intersects the second axis L2 and forms an acute angle A1. In this embodiment, the acute angle A1 can be any angle between 6.5 degrees and 8.5 degrees, preferably 7.5 degrees, but is not limited thereto.

[0040] See Figure 2 , Figure 3 , Figure 4 and Figure 5 The inlet pipe 3 extends along the first horizontal direction X and passes through the outer shell 23 and the cover plate 22 of the body 21. The inlet pipe 3 includes a diversion pipe section 31 disposed in the chamber 26, an inlet pipe section 33 formed at the front end of the diversion pipe section 31, and a terminal pipe section 34 formed at the rear end of the diversion pipe section 31. The diversion pipe section 31, the inlet pipe section 33, and the terminal pipe section 34 together define an inlet hole 35. The inlet pipe section 33 and the terminal pipe section 34 are respectively passed through the through hole 221 of the cover plate 22, and the inlet pipe section 33 and the terminal pipe section 34 respectively protrude from the cover plate 22. The inlet pipe section 33 is used to connect to a liquid supply source (not shown), which can supply a cleaning liquid 4 (such as...) Figure 9 (As shown) into the inlet hole 35. The liquid 4 is exemplified by deionized water (DIW), but is not limited thereto. The diversion pipe section 31 has a pipe wall 310 surrounding the inlet hole 35. The pipe wall 310 is formed with a plurality of first spray holes 311 that communicate between the bottom end of the inlet hole 35 and the chamber 26 and are spaced apart along the first horizontal direction X, and a plurality of second spray holes 312 that communicate between the bottom end of the inlet hole 35 and the chamber 26 and are spaced apart along the first horizontal direction X. Figure 4(Only one is shown). The first spray hole 311 corresponds to the area above the first spray hole 253. The second spray hole 312 corresponds to the area above the second spray hole 254.

[0041] The center of the diversion pipe section 31 is aligned longitudinally (Z) with the center of the air inlet 27, dividing the chamber 26 into a first guide channel 261 and a second guide channel 262. The tops of the first guide channel 261 and the second guide channel 262 are interconnected and connected to the air inlet 27. The bottom of the first guide channel 261 is connected to the first spray hole 311 and the first ejection hole 253. The bottom of the second guide channel 262 is connected to the second spray hole 312 and the second ejection hole 254.

[0042] Each of the first spray holes 311 sprays the liquid 4 input from the inlet hole 35 into the first guide channel 261. The first guide channel 261 then guides the gas input from the air inlet hole 27 to the space between the first spray hole 311 and the first outlet hole 253, allowing the gas to merge with the liquid 4 sprayed from the first spray hole 311. Each of the second spray holes 312 sprays the liquid 4 input from the inlet hole 35 into the second guide channel 262. The second guide channel 262 then guides the gas input from the air inlet hole 27 to the space between the second spray hole 312 and the second outlet hole 254, allowing the gas to merge with the liquid 4 sprayed from the second spray hole 312.

[0043] The pipe wall 310 of the diversion pipe section 31 has a bottom abutting end 313 that abuts against the top of the connecting block 250 of the nozzle 25, so that the bottom of the first guide channel 261 and the bottom of the second guide channel 262 are not interconnected. This prevents the gas guided by the first guide channel 261 and the gas guided by the second guide channel 262 from converging below the pipe wall 310 and causing turbulence. Furthermore, each of the first injection holes 311 and the corresponding second injection holes 312 is located on the opposite side of the bottom abutting end 313 along the second horizontal direction Y, and its height in the longitudinal direction Z is higher than the height of the bottom abutting end 313. This allows the gas flowing in the first guide channel 261 to first converge with the liquid 4 ejected from the first injection hole 311 before driving the liquid 4 to impact the pipe wall 310 and generate aerosol 5 (e.g., Figure 9 As shown), the gas flowing in the second guide channel 262 can first merge with the liquid 4 sprayed from the second spray hole 312 and then drive the liquid 4 to hit the pipe wall 310 to generate the mist 5.

[0044] In this embodiment, the wall 310 of the diversion pipe section 31 has a non-uniform thickness. The wall 310 has a maximum thickness portion 314 located at the bottom end of the liquid inlet 35. The maximum thickness portion 314 has a top-bottom end 313, which is located below the liquid inlet 35 along the longitudinal direction Z. The maximum thickness portion 314 has a thickness T along the longitudinal direction Z, which is between the top-bottom end 313 and the liquid inlet 35. The thickness T is the maximum thickness of the wall 310. Each first spray hole 311 and the corresponding second spray hole 312 are located on opposite sides of the maximum thickness portion 314 along the second horizontal direction Y. This ensures that each of the first spray holes 311 and the corresponding second spray holes 312 maintains a certain distance from the top and bottom ends 313 in the longitudinal direction Z, thereby ensuring that the gas can first merge with the liquid 4 sprayed from the first spray hole 311 or the second spray hole 312 before driving the liquid 4 to impact the pipe wall 310.

[0045] More specifically, the pipe wall 310 of the diversion pipe section 31 further has a first guide slope 315 inclinedly connected to the top-bottom end 313, and a second guide slope 316 inclinedly connected to the top-bottom end 313. The first guide slope 315 and the second guide slope 316 are spaced apart along the second horizontal direction Y and form an acute angle A2. Each of the first spray holes 311 has a first spray port 317 formed on the first guide slope 315. Each of the second spray holes 312 has a second spray port 318 formed on the second guide slope 316. The first guide slope 315 has a first blocking surface 319 between the first spray nozzle 317 of the first spray hole 311 and the top-bottom end 313. The second guide slope 316 has a second blocking surface 320 between the second spray nozzle 318 of the second spray hole 312 and the top-bottom end 313. The first blocking surface 319 and the second blocking surface 320 are used to block the gas and the liquid 4 it carries. The size of the acute angle A2 is preferably as small as possible, so that the length of each first spray hole 311 and the length of each second spray hole 312 can be designed to be longer, thereby increasing the flow velocity of the liquid 4 in the first spray hole 311 and the second spray hole 312. Furthermore, the areas of the first guide slope 315 and the second guide slope 316 can be designed to be larger, thereby enabling the first blocking surface 319 of the first guide slope 315 and the second blocking surface 320 of the second guide slope 316 to have sufficiently large blocking areas to block and allow the gas and the liquid 4 driven by the gas to impact.

[0046] The pipe wall 310 of the diversion pipe section 31 also has a diversion tip 321 aligned with the center of the air inlet 27. The diversion tip 321 has a diversion tip 322, a first diversion ramp 323 connected to the left side of the diversion tip 322, and a second diversion ramp 324 connected to the right side of the diversion tip 322. After the gas delivered by the air inlet 27 flows into the chamber 26, it is blocked and diverted by the diversion tip 322, so that half of the gas is guided by the first diversion ramp 323 to flow smoothly into the first guide channel 261, and the other half of the gas is guided by the second diversion ramp 324 to flow smoothly into the second guide channel 262, thereby improving the smoothness of the diversion flow.

[0047] The cover plates 22 are respectively clamped to the opposite ends of the diversion pipe sections 31 along the first horizontal direction X, and each cover plate 22 is fixedly connected to the pipe wall 310 of the diversion pipe section 31 by means of screws. In this way, the diversion pipe section 31 can be prevented from rotating relative to the nozzle 2, so that the first spray port 317 of each first spray hole 311 can be maintained and positioned aligned with the center of the corresponding first spray hole 253, the second spray port 318 of each second spray hole 312 can be maintained and positioned aligned with the center of the corresponding second spray hole 254, the diversion tip 322 can be stably maintained and positioned aligned with the center of the air inlet 27, and the top abutment end 313 can be stably maintained and positioned abutting the top of the connecting block 250.

[0048] See Figure 4 , Figure 6 , Figure 7 and Figure 8The first nozzle arm 251 has a downward-facing first bottom surface 255, which is rectangular and extends in a direction parallel to the first horizontal direction X. The second nozzle arm 252 has a downward-facing second bottom surface 256, which is rectangular and extends in a direction parallel to the first horizontal direction X. Each first nozzle 253 has a first nozzle outlet 257 formed on the first bottom surface 255, and each second nozzle 254 has a second nozzle outlet 258 formed on the second bottom surface 256. The first nozzle 253 and the first nozzle outlet 257 are larger than the corresponding first nozzle 317, and the second nozzle 254 and the second nozzle outlet 258 are larger than the corresponding second nozzle 318. This allows the first nozzle 253 and the second nozzle 254 to provide a greater flow rate of the aerosol 5, and the first nozzle outlet 257 and the second nozzle outlet 258 to eject a greater flow rate of the aerosol 5. In this embodiment, the first nozzle 257 and the second nozzle 258 are each elongated, elliptical in shape but not limited to this; the elongation can also be rectangular. This results in a large spray width for the aerosol 5 ejected from the first nozzle 257 and the second nozzle 258.

[0049] Furthermore, the first nozzle 257 of the first nozzle 253 is formed obliquely on the first bottom surface 255 and in the same direction of inclination. This reduces the length occupied by the first nozzle 257 of the first nozzle 253 in the length extension direction of the first bottom surface 255, allowing the length of the first bottom surface 255 to be designed to be shorter. Similarly, the second nozzle 258 of the second nozzle 254 is formed obliquely on the second bottom surface 256 and in the same direction of inclination. This reduces the length occupied by the second nozzle 258 of the second nozzle 254 in the length extension direction of the second bottom surface 256, allowing the length of the second bottom surface 256 to be designed to be shorter.

[0050] More specifically, the projection portions of the first outlet 257 of every two adjacent first nozzles 253 in the second horizontal direction Y overlap. This not only further reduces the length occupied by the first outlet 257 of the first nozzles 253 in the length extension direction of the first bottom surface 255, but also ensures that at least a portion of the spray pattern of the aerosol 5 ejected from the first outlet 257 of every two adjacent first nozzles 253 overlaps. Similarly, the projection portions of the second outlet 258 of every two adjacent second nozzles 254 in the second horizontal direction Y overlap. This not only further reduces the length occupied by the second outlet 258 of the second nozzles 254 in the length extension direction of the second bottom surface 256, but also ensures that at least a portion of the spray pattern of the aerosol 5 ejected from the second outlet 258 of every two adjacent second nozzles 254 overlaps.

[0051] The following is a detailed description of the method by which the nozzle device 200 cleans the substrate 1:

[0052] See Figure 4 , Figure 9 and Figure 10 , Figure 9 and Figure 10 This is a schematic diagram of the nozzle device 200 cleaning the substrate 1 according to this embodiment. The substrate 1 has an upper surface 11, which is recessed to form a plurality of grooves 12. A robotic arm (not shown) moves the nozzle device 200 relative to the substrate 1 to clean the substrate 1.

[0053] The liquid 4 input through the inlet hole 35 of the inlet pipe 3 along the first horizontal direction X flows into the first spray hole 311 and the second spray hole 312. Since the diameter of each first spray hole 311 and each second spray hole 312 is smaller than the diameter of the inlet hole 35, the flow velocity of the liquid 4 increases after flowing into each first spray hole 311 and each second spray hole 312. Furthermore, the relationship between each first spray hole 311 and each second spray hole 312 and structural features such as the maximum thickness portion 314, the first guide slope 315, the second guide slope 316, and the acute angle A2 ensures that each first spray hole 311 and each second spray hole 312 has a certain length. In this way, the liquid 4 can gradually accelerate to a certain flow rate as it flows in the first spray hole 311 and the second spray hole 312, so that the liquid 4 sprayed out by each of the first spray holes 317 and each of the second spray holes 318 has a certain flow rate and pressure.

[0054] On the other hand, after the gas input through the air inlet 27 flows into the chamber 26 along the longitudinal direction Z, the gas is blocked and diverted by the diversion tip 322 of the diversion tip 321, so that half of the gas flows smoothly into the first guide channel 261 along the first diversion slope 323, and the other half of the gas flows smoothly into the second guide channel 262 along the second diversion slope 324.

[0055] The liquid 4 ejected through the first spray nozzle 317 of the first spray hole 311 is carried by the gas flowing to the bottom of the first guide channel 261 and impacts the first blocking surface 319 of the first guide slope 315, so that the gas and the liquid 4 together form the aerosol 5 and flow into the first spray hole 253. Furthermore, the liquid 4 ejected through the second spray nozzle 318 of the second spray hole 312 is carried by the gas flowing to the bottom of the second guide channel 262 and impacts the second blocking surface 320 of the second guide slope 316, so that the gas and the liquid 4 together form the aerosol 5 and flow into the second spray hole 254.

[0056] Since each of the first nozzle 253 and each of the second nozzle 254 has a certain length, the mist 5 can gradually accelerate to a certain flow velocity during the flow process in the first nozzle 253 and the second nozzle 254, so that the mist 5 sprayed from each of the first nozzle 257 and each of the second nozzle 258 has a certain flow velocity and pressure.

[0057] Because the first axis L1 and the second axis L2 intersect and form an acute angle A1 and are inclined to the upper surface 11 of the substrate 1, the spray angles of the aerosol 5 sprayed from the first nozzle outlet 257 of the first nozzle arm 251 and the second nozzle outlet 258 of the second nozzle arm 252 are different, thereby effectively increasing the spray area of ​​the aerosol 5 to form a cleaning effect without dead angles. This effectively removes residues such as chemical agents remaining in the groove 12.

[0058] In this embodiment, the nozzle device 200 defines the first spray hole 253 and the second spray hole 254 through the nozzle 2, and the first spray hole 311 and the second spray hole 312 through the liquid inlet pipe 3, enabling the nozzle device 200 to achieve the dual-output spray cleaning effect of two nozzles as in the prior art. Since the nozzle device 200 of this embodiment does not require a connecting structure to connect the two nozzles together, its overall structure is simpler, smaller, and lighter than that of the prior art nozzle device, thereby reducing manufacturing costs and allowing the nozzle device 200 to be used in cleaning applications with limited space. Furthermore, the robotic arm's transfer of the nozzle device 200 is smooth and less prone to shaking, improving the cleaning effect on the substrate 1.

[0059] It should be noted that in another embodiment of this example, the number of the first spray hole 253, the number of the second spray hole 254, the number of the first spray hole 311, and the number of the second spray hole 312 may each be designed as one as needed, and are not limited to the multiple disclosed in this embodiment.

[0060] In summary, the nozzle device 200 of this embodiment has a simple overall structure, small size, light weight, and low manufacturing cost, making it suitable for cleaning applications in confined spaces. Furthermore, the robotic arm's transfer of the nozzle device 200 is smooth and does not easily cause shaking, improving the cleaning effect on the substrate 1 and effectively achieving the objectives claimed by this invention.

Claims

1. A nozzle device; characterized in that: The nozzle device includes a nozzle and an inlet pipe. The nozzle defines a chamber, an air inlet communicating with the top of the chamber, at least one first spray hole communicating with the bottom of the chamber, and at least one second spray hole communicating with the bottom of the chamber and spaced apart from the first spray hole. The inlet pipe is disposed in the nozzle and partially located within the chamber. The inlet pipe defines at least one first spray hole communicating with the chamber and corresponding to the top of the first spray hole, and at least one second spray hole communicating with the chamber and corresponding to the top of the second spray hole. The inlet pipe includes a top-bottom end located within the chamber, a first guide slope, and a second guide slope. The top-bottom end abuts against the nozzle. The first guide slope and the second guide slope are obliquely connected to the top-bottom end and form an acute angle. The first spray hole and the second spray hole are respectively formed on the first guide slope and the second guide slope and are respectively located on opposite sides of the top-bottom end.

2. The nozzle device according to claim 1, characterized in that: The center of the first ejector hole is located on an inclined first axis, and the center of the second ejector hole is located on an inclined second axis. The first axis and the second axis intersect at an acute angle, so that the first ejector hole and the second ejector hole are in an outward opening shape.

3. The nozzle device according to claim 1, characterized in that: The liquid inlet pipe includes a diversion pipe section disposed within the chamber. The center of the diversion pipe section is longitudinally aligned with the center of the air inlet. The diversion pipe section has a top-bottom end that abuts against the nozzle. The diversion pipe section forms a first liquid spray hole and a second liquid spray hole located on opposite sides of the top-bottom end. The diversion pipe section divides the chamber into a first guide channel and a second guide channel. The top of the first guide channel and the top of the second guide channel are interconnected and connected to the air inlet. The bottom of the first guide channel and the bottom of the second guide channel are not interconnected. The first guide channel is connected between the first liquid spray hole and the first ejection hole, and the second guide channel is connected between the second liquid spray hole and the second ejection hole.

4. The nozzle device according to claim 3, characterized in that: The splitter section has a splitter tip aligned with the center of the air inlet.

5. The nozzle device according to claim 1, characterized in that: The inlet pipe defines an inlet hole. The inlet pipe includes a pipe wall disposed in the chamber and surrounding the inlet hole. The pipe wall has a non-uniform thickness and has a maximum thickness portion located at the bottom end of the inlet hole and abutting against the nozzle. The pipe wall forms a first spray hole and a second spray hole that communicate with the inlet hole and are respectively located on the opposite side of the maximum thickness portion.

6. The nozzle device according to claim 5, characterized in that: The maximum thickness portion has a bottom end that abuts against the nozzle. The pipe wall also has a first guide slope that is inclinedly connected to the bottom end and a second guide slope that is inclinedly connected to the bottom end. The first guide slope and the second guide slope form an acute angle. The first spray hole has a first spray port formed on the first guide slope, and the second spray hole has a second spray port formed on the second guide slope.

7. The nozzle device according to claim 6, characterized in that: The first guide slope has a first blocking surface between the first spray nozzle and the top and bottom ends, and the second guide slope has a second blocking surface between the second spray nozzle and the top and bottom ends.

8. The nozzle device according to claim 5, characterized in that: The pipe wall also has a split tip, which is longitudinally aligned with the center of the air inlet.

9. The nozzle device according to claim 5, characterized in that: The nozzle includes a body and two cover plates disposed on the body. The body has an air inlet, a first spray hole and a second spray hole. The cover plates and the body together define the chamber. The cover plates are respectively fixedly connected to opposite ends of the pipe wall.

10. The nozzle device according to claim 1, characterized in that: The first spray hole has a first spray nozzle formed on the first guide slope, the second spray hole has a second spray nozzle formed on the second guide slope, the first guide slope has a first blocking surface between the first spray nozzle and the top and bottom ends, and the second guide slope has a second blocking surface between the second spray nozzle and the top and bottom ends.

11. The nozzle device according to claim 1, characterized in that: The first spray hole is larger than the first liquid spray hole, and the second spray hole is larger than the second liquid spray hole.

12. The nozzle device according to claim 11, characterized in that: The nozzle includes a first bottom surface and a second bottom surface, each of which is rectangular. The first nozzle has a first nozzle outlet, and the second nozzle has a second nozzle outlet. The first nozzle outlet is elongated and inclined on the first bottom surface, and the second nozzle outlet is elongated and inclined on the second bottom surface.

13. The nozzle device according to any one of claims 1 to 10, characterized in that: The nozzle defines a plurality of first spray holes and a plurality of second spray holes. The first spray holes are spaced apart along a first horizontal direction, and the second spray holes are spaced apart along the first horizontal direction. Each first spray hole and its corresponding second spray hole are spaced apart along a second horizontal direction perpendicular to the first horizontal direction. The liquid inlet pipe defines a plurality of first liquid spray holes and a plurality of second liquid spray holes. The first liquid spray holes are spaced apart along the first horizontal direction, and the second liquid spray holes are spaced apart along the first horizontal direction. Each first liquid spray hole and its corresponding second liquid spray hole are spaced apart along the second horizontal direction.

14. The nozzle device according to claim 13, characterized in that: Each of the first spray holes is larger than the corresponding first spray hole, and each of the second spray holes is larger than the corresponding second spray hole.

15. The nozzle device according to claim 14, characterized in that: The nozzle includes a first bottom surface and a second bottom surface. Each of the first nozzles has a first nozzle outlet formed on the first bottom surface, and each of the second nozzles has a second nozzle outlet formed on the second bottom surface. The first nozzle outlet and the second nozzle outlet are each elongated.

16. The nozzle device according to claim 15, characterized in that: The first bottom surface and the second bottom surface are each rectangular. The length extension direction of the first bottom surface and the length extension direction of the second bottom surface are parallel to the first horizontal direction. The first nozzle of the first nozzle is formed obliquely on the first bottom surface and the oblique direction is the same. The second nozzle of the second nozzle is formed obliquely on the second bottom surface and the oblique direction is the same.

17. The nozzle device according to claim 16, characterized in that: The projection portions of the first nozzle outlets of every two adjacent first nozzles in the second horizontal direction overlap, and the projection portions of the second nozzle outlets of every two adjacent second nozzles in the second horizontal direction overlap.

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