A pod wafer boat transfer and unpacking device and wafer scanning calculation method thereof

Abstract

The present invention discloses a pod wafer boat transfer box opening device, comprising a first support assembly, a drive assembly, a driven support assembly, a second support assembly, a limit assembly, a pressure-sensing assembly, a scanning and recognition assembly, and a fixing assembly. The first support assembly supports the drive assembly and the second support assembly, and the drive assembly drives the driven support assembly. The second support assembly comprises an outer support member and an inner support member, the outer support member supports the inner support member, and the outer support member can support the driven support assembly in a closed box state. The beneficial effect of the present invention is that the drive assembly can drive the wafer boat transfer box on the driven support assembly to move up and down, driving the wafer boat transfer box to open or close. During the opening or rising process, various data analyses can be performed on the wafers on the wafer boat rack. After opening the wafer boat transfer box, the robotic arm can clamp the wafers on the wafer boat rack.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer boats and wafers, in particular to a PODIUM wafer boat transport and unpacking device. Background Art

[0002] A wafer refers to a silicon chip used to make silicon semiconductor circuits. The raw material is silicon. High-purity polysilicon is dissolved and doped with silicon crystal seeds, which are then slowly pulled out to form cylindrical single crystal silicon. Silicon crystal rods are ground, polished, and sliced ​​to form silicon wafers, also known as wafers. Domestic wafer production lines are mainly 8-inch and 12-inch.

[0003] The currently used pod transfer box opening device is relatively complicated and cumbersome to operate, and cannot achieve fully automated operation. In addition, the pod pod transfer box is not easy to replace, and the replacement operation is time-consuming. It is necessary to manually judge whether the pod transfer box is placed in place and correctly. In addition, it is easy to crush the wafers during the opening or closing process or fail to put them in place for other reasons, resulting in damage to the pod frame or pod, which poses a serious safety risk. For this reason, the inventors designed a fully automatic opening and closing device, which can monitor the status of the internal wafers in real time during the lifting process. Summary of the Invention

[0004] The purpose of this section is to summarize some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract and title of this application to avoid obscuring the purpose of this section, the abstract and the title of the invention, and such simplifications or omissions should not be used to limit the scope of the present invention.

[0005] In view of the above problems or problems existing in the prior art, the present invention is proposed.

[0006] Therefore, the purpose of the present invention is to provide a pod wafer boat transfer box opening device, which can automatically open the wafer boat transfer box. During the process of opening or closing the transfer box, the status of the wafers in the wafer boat can be monitored in real time through the scanning identification component to prevent the wafer boat transfer box from crushing the wafers, and the transfer box can be quickly replaced.

[0007] To solve the above technical problems, the present invention provides the following technical solutions: a pod wafer boat conveying and unpacking device, comprising a first support assembly, a driving assembly, a driven support assembly, a second support assembly, a limit assembly, a pressure sensing assembly, a scanning and identifying assembly, and a fixing assembly;

[0008] The first support assembly supports the driving assembly and the second support assembly, and the driving assembly drives the driven support assembly;

[0009] The second support assembly includes an outer support member and an inner support member, the outer support member supports the inner support member, and the outer support member can support the driven support assembly in the closed state;

[0010] A limiting component is provided on the inner support component, a scanning and identifying component is provided on the driven support component, and a fixing component is provided on the driven support component, and the fixing component fixes the driven support component.

[0011] As a preferred solution of the pod wafer boat conveying and unpacking device of the present invention, the driving assembly includes a motor, a coupling, and a connecting rod;

[0012] The motor is vertically fixed on the side of the first supporting assembly, and the motor and the connecting rod are connected through a coupling, which is arranged at the output end on the upper side of the motor.

[0013] As a preferred embodiment of the pod wafer boat transfer and unpacking device of the present invention, the driven support assembly includes a slide plate, a lifting frame, a lifting frame plate, a wafer boat transfer box, and a slider;

[0014] One side of the skateboard is fixedly connected to the slider, and the other side of the skateboard is fixedly connected to the connecting rod. The slider is vertically slidably connected to the first support assembly. The lifting frame is connected to the skateboard. The upper end surface of the lifting frame is fixedly connected to the lifting frame plate, and the upper end surface of the lifting frame plate is provided with a crystal boat transfer box.

[0015] As a preferred embodiment of the pod wafer boat conveying and unpacking device of the present invention, the outer support member includes an outer support frame and a support bottom plate;

[0016] The outer support frame is fixedly connected to the first support assembly, and the support base plate is arranged on the outer support frame. The outer support frame and the support base plate are fixedly connected.

[0017] As a preferred solution of the pod wafer boat conveying and unpacking device of the present invention, wherein: the inner support member includes an inner support frame, a wafer boat support plate, and a wafer boat frame;

[0018] The inner support frame is arranged on the upper end surface of the support base plate, the upper end surface of the inner support frame is connected with the wafer boat support plate, and the wafer boat frame is arranged above the wafer boat support plate.

[0019] As a preferred solution of the pod wafer boat transfer and opening device of the present invention, the pressure sensing component includes a pressure sensor and a light source sensing sensor arranged on the wafer boat support plate, and the pressure sensor and the light source sensing sensor are used to determine whether the wafer boat transfer box is placed correctly and in place.

[0020] As a preferred embodiment of the pod wafer boat conveying and unpacking device of the present invention, the fixing assembly includes a fixing motor, a tablet pressing chamber;

[0021] The fixed motor is vertically fixed to the lower end surface of the lifting frame plate, a cavity for accommodating the tablet is opened in the tablet pressing chamber, circular holes are opened on the lifting frame plate and in the tablet pressing chamber, and the protruding end of the fixed motor passes through the circular hole to connect with the tablet.

[0022] As a preferred solution of the pod wafer boat transfer and opening device of the present invention, steps are provided on the wafer boat transfer box to facilitate tablet pressing and fixing the steps, so that the wafer boat transfer box will not move during the lifting process.

[0023] As a preferred embodiment of the pod wafer boat conveying and unpacking device of the present invention, the device further comprises a guide assembly provided on the upper end surface of the lifting frame plate;

[0024] The guide assembly includes a guide block and a guide ramp;

[0025] The guide block is fixedly connected to the upper end surface of the lifting frame plate. The upper end surface of the guide block is provided with a guide slope, which can enable the wafer boat transfer box to be quickly and correctly placed in the designated position.

[0026] As a preferred solution of the pod wafer boat transfer and opening device of the present invention, the guide blocks are provided in four groups, and the guide blocks are provided at the intersection of the four edges and corners of the wafer boat transfer box.

[0027] As a preferred solution of the pod wafer boat conveying and unpacking device of the present invention, a second slot is provided on the upper end surface of the lifting frame plate, and the wafer boat support plate is accommodated in the second slot.

[0028] As a preferred solution of the pod wafer boat conveying and unpacking device of the present invention, the outer support member has a cavity in the middle and a first slot at the upper end, and the first slot accommodates the lifting frame plate.

[0029] As a preferred solution of the pod boat conveying and unpacking device of the present invention, the lifting frame is arranged above the supporting bottom plate.

[0030] As a preferred solution of the pod wafer boat conveying and unpacking device of the present invention, the limiting component includes a rotating cylinder and a pin shaft;

[0031] The rotating cylinder is connected to the lower end surface of the crystal boat support plate. A pin is provided inside the crystal boat support plate, and the pin is connected to the rotating cylinder. The rotating cylinder can drive the pin to perform lateral telescopic movement. A pin groove is provided on the inside of the crystal boat transfer box. The pin can be extended and inserted into the pin groove on the crystal boat transfer box, thereby preventing the crystal boat transfer box from moving due to misoperation.

[0032] As a preferred embodiment of the pod wafer boat conveying and unpacking device of the present invention, the scanning and identification component includes a protective box identification sensor, a wafer protrusion scanning sensor, a cassette in-position detection sensor, a cassette protrusion detection sensor, and a wafer scanning sensor;

[0033] The protection box identification sensor is set on the upper end surface of the lifting frame plate. The protection box identification sensor is used to scan the ID information of the wafer boat transfer box;

[0034] The wafer convex scanning sensor is arranged on the lower end surface of the lifting frame plate, and the wafer convex scanning sensor is used to scan whether the wafer is convex;

[0035] The cassette in-position detection sensor is arranged on the inner side below the lifting frame, and is used to detect whether the wafer boat rack is in a specific position;

[0036] The cassette protrusion detection sensor is arranged on the lower end surface of the lifting frame plate, and the cassette protrusion detection sensor is used to detect whether the wafer boat frame is displaced;

[0037] The wafer scanning sensor is arranged on the lower end surface of the lifting frame plate, and the wafer scanning sensor is used to detect whether the wafer is on the wafer boat frame.

[0038] As a preferred solution of the pod crystal boat conveying and opening device of the present invention, wherein: the protection box identification sensor is arranged at the front end or rear end or both the front and rear ends of the lifting frame plate; the wafer protrusion scanning sensor is set as two groups, which are arranged at the front end and rear end of the lower end surface of the lifting frame plate; the film box in-position detection sensor is set as two groups, which are arranged at the left and right ends of the lifting frame; the film box protrusion detection sensor and the wafer scanning sensor are both set as two groups, the film box protrusion detection sensor is at the left and right ends of the lower end surface of the lifting frame plate, and the wafer scanning sensor is set at the front and rear ends of the lower end surface of the lifting frame plate.

[0039] As a preferred embodiment of the pod wafer boat conveying and unpacking device of the present invention, the first support assembly includes a side support frame, a bottom support frame, a sensing door, a robot hand sensing sensor, a guide rail and a roller;

[0040] A guide rail is provided on the side of the side support frame, the guide rail is slidably connected to the slider, the side support frame is fixedly connected to the outer support frame, the bottom support frame is arranged below the outer support frame and connected to the side support frame, and an induction door is provided on the side support frame, the induction door is arranged on the side of the crystal boat frame, a robot induction sensor is provided on the bottom side of the induction door, and a roller is connected below the bottom support frame.

[0041] The beneficial effects of the pod wafer boat transfer box opening device of the present invention are as follows: the present invention can drive the wafer boat transfer box on the driven support assembly to move up and down through the driving assembly, driving the wafer boat transfer box to open or close. During the opening or rising process, various data analyses can be performed on the wafers on the wafer boat rack. After opening the wafer boat transfer box, the robotic arm can clamp the wafers on the wafer boat rack.

[0042] The present invention also provides a wafer scanning operation method, which includes a pod wafer boat transfer box opening device, and the method can provide a method for scanning and operating the wafers in the wafer boat, monitoring the specific status, and transmitting it to the control center in real time.

[0043] As a preferred embodiment of the wafer scanning operation method of the present invention, the step of opening the wafer boat transfer box is as follows:

[0044] S1: The central control system controls the rotary cylinder to rotate the pin to open the limit of the wafer boat transfer box;

[0045] S2: The central control system then controls the motor to drive the connecting rod to drive the slider on the slide to rise along the guide rail. The slide drives the lifting frame, and the lifting frame drives the lifting frame plate to rise, and the protective box liquid rises accordingly.

[0046] S3: During the ascent process, the wafer scanning sensor will successively scan the status of the wafers on each layer of the wafer boat, the wafer protrusion scanning sensor will scan whether the wafer is protruding, the cassette in-position detection sensor will detect whether the wafer boat is in a specific position, and the cassette protrusion detection sensor will detect whether the wafer boat is displaced. The results will be transmitted to the central control system in turn for analysis and processing by the central processing system;

[0047] S4: When the wafer boat transfer box reaches the designated position, the motor stops moving and the central control system controls the sensor door to open;

[0048] S5: The robotic arm will then deliver and retrieve the wafers on the wafer boat rack. When the robotic arm's sensing sensor detects the robotic arm coming in, it will send the result to the central control system. The central control system will control the motor to prohibit rotation, preventing the wafer boat transfer box from pressing on the robotic arm and squeezing the wafer.

[0049] The beneficial effects of the wafer scanning operation method of the present invention are as follows: when the transfer box is opened or closed, the present invention can scan the status of each layer of wafers through the wafer scanning sensor, scan whether the wafer is protruding through the wafer protrusion scanning sensor, detect whether the wafer box is in a specific position by the wafer box in-position detection sensor, detect whether the wafer boat rack is displaced by the wafer box protrusion detection sensor, and transmit the results to the central control system in turn, which is analyzed and processed by the central processing system to issue commands. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive effort. Among them:

[0051] Figure 1 This is the overall schematic diagram of the pod wafer boat unpacking device.

[0052] Figure 2 Schematic diagram of the hidden crystal boat delivery box for the pod crystal boat delivery opening device.

[0053] Figure 3 Schematic diagram of the hidden wafer boat rack that transports the unpacking device for the pod wafer boat.

[0054] Figure 4 This is an enlarged view of point F of the pod wafer boat transfer and unpacking device.

[0055] Figure 5 Schematic diagram of the hidden external support frame for the pod wafer boat unpacking device.

[0056] Figure 6 Schematic diagram of the hidden lift and lift plate used to transport the unpacking device for the pod wafer boat.

[0057] Figure 7 A top view of the pod wafer boat unpacking device.

[0058] Figure 8 This is a front view of the pod wafer boat transfer and unpacking device.

[0059] Figure 9 This is a cross-sectional view of the AA section of the pod wafer boat transfer and unpacking device.

[0060] Figure 10 This is a partial schematic diagram of the pod crystal boat transfer unpacking device from above.

[0061] Figure 11 This is a bottom-up diagram of the hidden support base plate for the pod wafer boat unpacking device.

[0062] Figure 12 Schematic diagram of the flow of the wafer scanning calculation method.

[0063] In the figure, 100, first support assembly, 200, driving assembly, 300, driven support assembly, 400, second support assembly, 500, limit assembly, 600, pressure sensing assembly, 700, scanning and identification assembly, 800, fixing assembly, 900, guide assembly, 201, motor, 202, coupling, 203, connecting rod, 301, slide plate, 302, lifting frame, 303, lifting frame plate, 304, crystal boat transfer box, 305, slider, 401, outer support member, 402, inner support member, 401a, outer support frame, 401b, support base plate, 402a, inner support frame, 402b, crystal boat Support plate, 402c, crystal boat rack, 601, pressure sensor, 602, light source sensing sensor, 801, fixed motor, 802, tablet pressing, 803, tablet pressing chamber, 901, guide block, 902, guide ramp, 501, rotary cylinder, 701, protective box identification sensor, 702, wafer protrusion scanning sensor, 703, film box in-position detection sensor, 704, film box protrusion detection sensor, 705, wafer scanning sensor (705), 101, side support frame, 102, bottom support frame, 103, sensing door, 104, robot hand sensing sensor, 105, guide rail, 106, roller. DETAILED DESCRIPTION

[0064] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0065] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0066] Secondly, the term "one embodiment" or "embodiment" herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in various places throughout this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive of other embodiments.

[0067] Example 1

[0068] Reference Figures 1 to 11, which is the first embodiment of the present invention, provides a pod wafer boat transfer box opening device, which includes a first support assembly 100, a driving assembly 200, a driven support assembly 300, a second support assembly 400, a limiting assembly 500, a pressure sensing assembly 600, a scanning and identification assembly 700, a fixing assembly 800, and a guide assembly 900. The driven support assembly 300 can be driven by the driving assembly 200, the movement of the driven support assembly 300 can be restricted by the limiting assembly 500, the pressure sensing assembly 600 can sense whether the wafer boat transfer box 304 is placed in place, the guide assembly 900 can accurately and quickly place the wafer boat transfer box 304, the fixing assembly 800 can fix the wafer boat transfer box 304, the second support assembly 400 can support the driven support assembly 300 in the closed box state, and the first support assembly 100 can support the second support assembly 400, the driven support assembly 300 and the driving assembly 200.

[0069] Specifically, it includes a first support assembly 100, a driving assembly 200, a driven support assembly 300, a second support assembly 400, a limiting assembly 500, a pressure sensing assembly 600, a scanning and identifying assembly 700, and a fixing assembly 800;

[0070] The first support assembly 100 supports the driving assembly 200 and the second support assembly 400, and the driving assembly 200 drives the driven support assembly 300;

[0071] The second support assembly 400 includes an outer support member 401 and an inner support member 402. The outer support member 401 supports the inner support member 402. The outer support member 401 can support the driven support assembly 300 in the closed state.

[0072] A limiting assembly 500 is provided on the inner support member 402 , a scanning and identifying assembly 700 is provided on the driven support assembly 300 , and a fixing assembly 800 is provided on the driven support assembly 300 . The fixing assembly 800 fixes the driven support assembly 300 .

[0073] In summary, the present invention can support the driving component 200, the driven support component 300 and the second support component 400 through the first support component 100, and the driven support component 300 can be raised and lowered through the driving component 200. The crystal boat transfer box 304 on the driven support component 300 can open or close the crystal boat rack 402c as it rises and falls, and then the robot arm can clamp the wafer on the crystal boat rack 402c in the open state. During the lifting and lowering process of the driven support component 300, the scanning and identification component 700 can scan and analyze the wafers on the crystal boat rack, and send the results to the control center and issue corresponding commands.

[0074] Example 2

[0075] Reference Figures 1 to 11 , which is the second embodiment of the present invention. In the previous embodiment, the pod wafer boat transfer box opening device includes a first support assembly 100, a driving assembly 200, a driven support assembly 300, a second support assembly 400, a limiting assembly 500, a pressure sensing assembly 600, a scanning and identification assembly 700, a fixing assembly 800, and a guide assembly 900. The driving assembly 200 can drive the driven support assembly 300, the limiting assembly 500 can limit the movement of the driven support assembly 300, the pressure sensing assembly 600 can sense whether the wafer boat transfer box 304 is placed in place, the guiding assembly 900 can accurately and quickly place the wafer boat transfer box 304, the fixing assembly 800 can fix the wafer boat transfer box 304, the second support assembly 400 can support the driven support assembly 300 in the closed box state, and the first support assembly 100 can support the second support assembly 400, the driven support assembly 300 and the driving assembly 200.

[0076] Specifically, it includes a first support assembly 100, a driving assembly 200, a driven support assembly 300, a second support assembly 400, a limiting assembly 500, a pressure sensing assembly 600, a scanning and identifying assembly 700, and a fixing assembly 800;

[0077] The first support assembly 100 supports the driving assembly 200 and the second support assembly 400, and the driving assembly 200 drives the driven support assembly 300;

[0078] The second support assembly 400 includes an outer support member 401 and an inner support member 402. The outer support member 401 supports the inner support member 402. The outer support member 401 can support the driven support assembly 300 in the closed state.

[0079] A limiting assembly 500 is provided on the inner support member 402 , a scanning and identifying assembly 700 is provided on the driven support assembly 300 , and a fixing assembly 800 is provided on the driven support assembly 300 . The fixing assembly 800 fixes the driven support assembly 300 .

[0080] Furthermore, the driving assembly 200 includes a motor 201, a coupling 202, and a connecting rod 203;

[0081] The motor 201 is vertically fixed to the side of the first support assembly 100. The motor 201 and the connecting rod 203 are connected by a coupling 202. The coupling 202 is located at the output end on the upper side of the motor 201. The connecting rod 203 is a telescopic rod. The motor 201 can drive the connecting rod 203 to move up and down through the coupling 202.

[0082] Furthermore, the driven support assembly 300 includes a slide plate 301, a lifting frame 302, a lifting frame plate 303, a wafer boat transfer box 304, and a slider 305;

[0083] One side of the slide 301 is fixedly connected to the slider 305, and the other side of the slide 301 is fixedly connected to the connecting rod 203. The slider 305 is vertically slidably connected to the first support assembly 100. The lifting frame 302 is connected to the slide 301. The upper end surface of the lifting frame 302 is fixedly connected to the lifting frame plate 303, and the upper end surface of the lifting frame plate 303 is provided with a wafer boat transfer box 304. The slider 305 is slidably connected to the guide rail 105 on the side support frame 101.

[0084] Preferably, the motor 201 can drive the connecting rod 203 to move up and down through the coupling 202, and the connecting rod 203 drives the slider of the slide 301 to move up and down along the guide rail 105 on the side support frame 101. The slide 301 drives the lifting frame 302 and the lifting frame plate 303 to move, and the lifting frame plate 303 will drive the crystal boat transfer box 304 to move up and down.

[0085] Furthermore, the outer support member 401 includes an outer support frame 401a and a support base plate 401b;

[0086] The outer support frame 401a is fixedly connected to the first support assembly 100. The support base plate 401b is disposed on the outer support frame 401a. The outer support frame 401a is fixedly connected to the support base plate 401b. The outer support frame 401a is fixedly connected to the side support frame 101. The outer support frame 401a is disposed to the side of the side support frame 101. The support base plate 401b is disposed on the bottom side of the outer support frame 401a. The support base plate 401b is fixedly connected to the outer support frame 401a.

[0087] Furthermore, the inner support member 402 includes an inner support frame 402a, a wafer boat support plate 402b, and a wafer boat frame 402c;

[0088] The inner support frame 402a is set on the upper end surface of the support base 401b, and the upper end surface of the inner support frame 402a is fixedly connected to the crystal boat support plate 402b. A crystal boat frame 402c is set above the crystal boat support plate 402b. The inner support frame 402a is fixedly connected to the support base 401b, and the crystal boat frame 402c can accommodate wafers.

[0089] Preferably, the pressure-sensing assembly 600 includes a pressure sensor 601 and a light-sensing sensor 602 disposed on the wafer boat support plate 402b. The pressure sensor 601 and the light-sensing sensor 602 are used to determine whether the wafer boat pod 304 is correctly placed and in place. The pressure sensor 601 determines whether the wafer boat pod 304 is placed, and the light-sensing sensor 602 determines whether the wafer boat pod 304 is correctly placed. If light is detected, it indicates that the wafer boat pod 304 is not correctly placed.

[0090] Furthermore, the fixing assembly 800 includes a fixing motor 801, a tablet pressing 802, and a tablet pressing chamber 803;

[0091] The fixed motor 801 is vertically fixed to the lower end surface of the lifting frame plate 303. A cavity for accommodating the pressing tablet 802 is opened in the tablet pressing chamber 803. Circular holes are opened on the lifting frame plate 303 and in the tablet pressing chamber 803. The protruding end of the fixed motor 801 passes through the circular hole and is connected to the pressing tablet 802.

[0092] Preferably, the fixing components 800 are arranged in two groups symmetrically on the left and right, so as to better fix the wafer boat transfer box 304 .

[0093] Furthermore, the wafer boat transport box 304 is provided with steps to facilitate the pressing piece 802 to fix the steps, so that the wafer boat transport box 304 will not move during the lifting process.

[0094] Preferably, the fixed motor 801 drives the pressing plate 802 to rotate 90 degrees through the connecting rod, and the pressing plate 802 extends out of the cavity so that the pressing plate 802 is stuck above the step of the wafer boat transfer box 304, fixing the wafer boat transfer box 304 to prevent sliding displacement during the lifting process.

[0095] Furthermore, it also includes a guide assembly 900 provided on the upper end surface of the lifting frame plate 303;

[0096] The guide assembly 900 includes a guide block 901 and a guide ramp 902;

[0097] The guide block 901 is fixedly connected to the upper end surface of the lifting frame plate 303. The upper end surface of the guide block 901 is provided with a guide slope 902, which can enable the wafer boat transfer box 304 to be quickly and correctly placed at the designated position.

[0098] Furthermore, the guide blocks 901 are arranged in four groups, and the guide blocks 901 are arranged at the intersection of the four edges and corners of the wafer boat transfer box 304. The guide blocks 901 can also prevent the wafer boat transfer box 304 from moving.

[0099] Preferably, the guide slope 902 on the guide block 901 facilitates quick placement of the wafer boat transfer box 304 to avoid a situation where the transfer box cannot be placed.

[0100] Furthermore, a second slot is formed on the upper end surface of the lifting frame plate 303 , and the wafer boat supporting plate 402 b is received in the second slot.

[0101] Furthermore, the center of the outer support member 401 is a cavity, and a first slot is formed at the upper end thereof, and the lifting frame plate 303 is accommodated in the first slot.

[0102] Furthermore, the lifting frame 302 is disposed above the supporting base plate 401b. The supporting base plate 401b can play a certain supporting and limiting role when the wafer boat transfer box 304 is in a closed state.

[0103] Furthermore, the limiting assembly 500 includes a rotating cylinder 501 and a pin;

[0104] The rotating cylinder 501 is connected to the lower end surface of the crystal boat support plate 402b. A pin is provided inside the crystal boat support plate 402b, and the pin is connected to the rotating cylinder 501. The rotating cylinder 501 can drive the pin to perform lateral telescopic movement. A pin groove is provided on the inside of the crystal boat transfer box 304. The pin can be extended and inserted into the pin groove on the crystal boat transfer box 304, thereby preventing the crystal boat transfer box 304 from moving due to misoperation.

[0105] Preferably, the pin can be driven to move by rotating the cylinder 501, so that the pin extends out from the left and right ends of the wafer boat support plate 402b, so that the pin (not shown in the figure) is stuck in the pin groove on the inside of the wafer boat transfer box 304, which can prevent the wafer boat transfer box 304 from moving.

[0106] Furthermore, the scanning and identifying component 700 includes a protective box identification sensor 701 , a wafer protrusion scanning sensor 702 , a cassette in-position detection sensor 703 , a cassette protrusion detection sensor 704 , and a wafer scanning sensor 705 ;

[0107] The protection box identification sensor 701 is disposed on the upper end surface of the lifting frame plate 303 . The protection box identification sensor 701 is used to scan the ID information of the wafer cassette 304 to confirm whether the wafer cassette 304 is placed correctly.

[0108] The wafer protrusion scanning sensor 702 is fixedly arranged on the lower end surface of the lifting frame plate 303. The wafer protrusion scanning sensor 702 is used to scan whether the wafer is protruding;

[0109] The cassette in-position detection sensor 703 is fixedly disposed on the inner side below the lifting frame 302. The cassette in-position detection sensor 703 is used to detect whether the wafer boat rack 402c is in a specific position.

[0110] The cassette protrusion detection sensor 704 is fixedly arranged on the lower end surface of the lifting frame plate 303. The cassette protrusion detection sensor 704 is used to detect whether the wafer boat frame 402c is displaced.

[0111] The wafer scanning sensor 705 is fixedly mounted on the lower end surface of the lifting frame plate 303 . The wafer scanning sensor 705 is used to detect whether the wafer is on the wafer boat 402 c .

[0112] Furthermore, the protective box identification sensor 701 is set at the front end or rear end or both the front and rear ends of the lifting frame plate 303; the wafer protrusion scanning sensor 702 is set as two groups, which are set at the front end and rear end of the lower end surface of the lifting frame plate 303; the film box in-position detection sensor 703 is set as two groups, which are set at the left and right ends of the lifting frame 302; the film box protrusion detection sensor 704 and the wafer scanning sensor 705 are both set as two groups, the film box protrusion detection sensor 704 is set at the left and right ends of the lower end surface of the lifting frame plate 303, and the wafer scanning sensor 705 is set at the front and rear ends of the lower end surface of the lifting frame plate.

[0113] Furthermore, the first support assembly 100 includes a side support frame 101, a bottom support frame 102, a sensing door 103, a robot hand sensing sensor 104, a guide rail 105 and a roller 106;

[0114] A guide rail 105 is fixedly provided on the side of the side support frame 101, and the guide rail 105 is slidably connected to the slider 305. The side support frame 101 is fixedly connected to the outer support frame 401a. The bottom support frame 102 is arranged below the outer support frame 401a and connected to the side support frame 101. A sensing door 103 is provided on the side support frame 101, and the sensing door 103 is arranged on the side of the crystal boat frame 402c. A robot sensing sensor 104 is provided on the bottom side of the sensing door 103, and a roller 106 is connected to the bottom of the bottom support frame 102.

[0115] During use, the wafer boat transfer box 304 is placed and moved: the intelligent handling robot can quickly place the wafer boat transfer box 304 on the upper end surface of the lifting frame plate 303 through the guide slope 902 on the guide block 901, and the pressure sensor 601 and the light source sensor 602 on the lifting frame plate 303 can sense whether the transfer box is placed in the correct position. The protection box identification sensor 701 can identify the ID information of the wafer boat transfer box 304 to determine whether the model of the wafer boat transfer box 304 is placed correctly.

[0116] The central control system then issues a command to secure the cassette 304. The securing motor 801 drives the pressing plate 802 through the connecting rod to rotate 90 degrees. The pressing plate 802 extends out of the cavity and is stuck above the step of the cassette 304. This secures the cassette 304 and the lifting frame 303 together to prevent sliding during the lifting process.

[0117] By rotating the cylinder 501 again, the pin can be driven to move horizontally, so that the pin extends out from the left and right ends of the crystal boat support plate 402b, so that the pin (not shown in the figure) is stuck in the pin groove on the inside of the crystal boat transfer box 304 (not shown in the figure), which can prevent the crystal boat transfer box 304 and the lifting frame plate 303 from moving.

[0118] Open the crystal boat transfer box 304 and move it: first, the control system controls the rotating cylinder 501 to make the pin shaft away from the pin shaft groove inside the crystal boat transfer box 304, so that the lifting frame plate 303 can be released from the limit and can be freely lifted and lowered; the motor 201 can drive the connecting rod 203 to rise through the coupling 202, and the connecting rod 203 drives the slider of the slide plate 301 to slide upward along the guide rail 105 on the side support frame 101, and the slide plate 301 drives the lifting frame 302 and the lifting frame plate 303 to move upward, and the lifting frame plate 303 will bring The wafer boat transfer box 304 moves upward. When it rises to a specific position, the wafer boat rack 402c in the wafer boat transfer box 304 will completely leak out. The control system will control the sensing door 103 to open, and the robotic arm will go deep into the wafer boat rack 402c to clamp the wafers in the wafer boat rack 402c. After the robotic arm sensing sensor 104 detects the entry of the robotic arm, it will prohibit the motor 201 from rotating to prevent the wafer boat transfer box 304 from suddenly falling, thereby hitting the robotic arm and further hitting the wafers in the wafer boat rack 402c.

[0119] Scanning and detection movement during the lifting and lowering process of the wafer boat transfer box 304: when the lifting frame 302 and the lifting frame plate 303 move up and down, the lifting frame plate 303 will drive the front and rear two groups of wafer protrusion scanning sensors 702 to scan the status of the wafers on the wafer boat rack 402c; the wafer box in-position detection sensor 703 on the lifting frame 302 is used to detect whether the wafer boat rack 402c is in a specific position; the wafer box protrusion detection sensor 704 on the lifting frame plate 303 is used to detect whether the wafer boat rack 402c is displaced; the wafer scanning sensor 705 is used to detect whether the wafer is on the wafer boat rack 402c; and the results are transmitted to the central control system in real time, and the system analyzes and issues commands.

[0120] In summary, the present invention can quickly place the wafer boat transfer box 304 on the lifting frame plate 303 through the guide component 900, and can quickly fix the wafer boat transfer box 304 and the lifting frame plate 303 together through the fixing component 800. The driven support component 300 can be raised and lowered by the rotating drive component 200, so as to open or close the wafer boat transfer box 304. During the lifting process of the driven support component 300, the scanning and identification component 700 can scan the status of the wafers in the wafer frame 402c and send the results to the central control system for data analysis and issuing commands.

[0121] Example 3

[0122] Reference Figure 12 , which is the third embodiment of the present invention, provides a wafer scanning operation method, including the steps of opening the wafer boat transfer box 304

[0123] S1: The central control system controls the rotary cylinder 501 to rotate the pin to open the limit of the wafer boat transfer box 304;

[0124] S2: The central control system then controls the motor 201 to drive the connecting rod 203 to drive the slider 305 on the slide 301 to rise along the guide rail 105. The slide 301 drives the lifting frame 302, and the lifting frame 302 drives the lifting frame plate 303 to rise, and the wafer boat transfer box 304 rises accordingly.

[0125] S3: During the ascending process, the wafer scanning sensor 705 successively scans the status of the wafers on each layer of the wafer boat 402c, the wafer protrusion scanning sensor 702 scans whether the wafers are protruding, the cassette in-position detection sensor 703 detects whether the wafer boat 402c is in a specific position, and the cassette protrusion detection sensor 704 detects whether the wafer boat 402c is displaced. The results are sequentially transmitted to the central control system for analysis and processing by the central processing system.

[0126] S4: When the wafer boat transfer box 304 reaches the designated position, the motor 201 stops moving, and the central control system controls the sensor door 103 to open;

[0127] S5: The robotic arm will then deliver and retrieve the wafers on the wafer boat rack 402c. When the robotic arm sensing sensor 104 detects the robotic arm coming in, it will send the result to the central control system. The central control system will control the motor to prohibit rotation, preventing the wafer boat transfer box 304 from pressing on the robotic arm and squeezing the wafer.

[0128] Step 304 of closing the wafer boat transfer box,

[0129] S6: First, the robot arm extends out of the sensing door 103 and controls the sensing door 103 to close;

[0130] S7: The central control system then controls the motor 201 to drive the connecting rod 203 to drive the slider 305 on the slide 301 to descend along the guide rail 105. The slide 301 drives the lifting frame 302 to move, and the lifting frame 302 drives the lifting frame plate 303 to descend, and the wafer boat transfer box 304 also descends.

[0131] S8: During the descent process, the wafer scanning sensor 705 successively scans the status of each layer of wafers on the wafer boat 402c. The wafer protrusion scanning sensor 702 scans whether the wafer is protruding. The cassette in-position detection sensor 703 detects whether the wafer boat 402c is in a specific position. The cassette protrusion detection sensor 704 detects whether the wafer boat 402c is displaced. The results are sequentially transmitted to the central control system for analysis and processing by the central processing system.

[0132] S9: When the wafer boat transfer box 304 reaches the designated position and completely covers the wafer boat frame 402c inside, the motor 201 stops moving.

[0133] S10: Finally, the central control system controls the rotating cylinder 501 to drive the pin to move horizontally, so that the pin extends out of the left and right ends of the wafer boat support plate 402b, and the pin is stuck in the pin groove on the inner side of the wafer boat transfer box 304, which can prevent the wafer boat transfer box 304 and the lifting frame plate 303 from moving.

[0134] In summary, the present invention uses the passive support component 300 to scan and identify the component 700 during the lifting process to read the internal wafer rack 402c and the wafers on the wafer rack 402c, detect whether the wafers have skewed wafers, overlapped wafers, or wafers, etc., and can identify various wafers at the same time, and send the results to the central control system in time for analysis and issuance of instructions.

[0135] It is important to note that the construction and arrangement of the present application shown in a number of different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, it should be readily understood by those who refer to this disclosure that many modifications are possible (e.g., the size, scale, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, directional changes, etc.) without departing substantially from the novel teachings and advantages of the subject matter described in this application. For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of the element may be inverted or otherwise changed, and the nature or number or position of the discrete elements may be altered or changed. Therefore, all such modifications are intended to be included within the scope of the present invention. The order or sequence of any process or method steps may be changed or reordered according to alternative embodiments. In the claims, any "means plus function" clause is intended to cover the structure described herein that performs the function, and is not only structurally equivalent but also equivalent structures. Other replacements, modifications, changes, and omissions may be made in the design, operating conditions, and arrangement of the exemplary embodiments without departing from the scope of the present invention. Therefore, the invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0136] Additionally, in order to provide a concise description of exemplary embodiments, all features of an actual embodiment (i.e., those features that are not relevant to the best mode presently contemplated for carrying out the invention or those that are not relevant to implementing the invention) may not be described.

[0137] It will be appreciated that in the development of any actual embodiment, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will, for those of ordinary skill having the benefit of this disclosure, be a routine undertaking of design, fabrication, and production without undue experimentation.

[0138] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A pod wafer boat transfer and unpacking device, characterized by: It includes a first supporting assembly, a driving assembly, a driven supporting assembly, a second supporting assembly, a limiting assembly, a pressure sensing assembly, a scanning and identifying assembly, and a fixing assembly; The first supporting assembly supports the driving assembly and the second supporting assembly, and the driving assembly drives the driven supporting assembly; The second support assembly includes an outer support member and an inner support member, the outer support member supports the inner support member, and the outer support member can support the driven support assembly in the closed state; The inner support member is provided with a limiting component, the driven support component is provided with a scanning and identifying component, and the driven support component is provided with a fixing component, and the fixing component fixes the driven support component; The driving assembly includes a motor, a coupling, and a connecting rod; The motor is vertically fixed to the side of the first support assembly, and the motor and the connecting rod are connected via a coupling, and the coupling is arranged at the output end on the upper side of the motor; The driven support assembly includes a slide plate, a lifting frame, a lifting frame plate, a wafer boat transfer box, and a slider; One side of the slide is fixedly connected to the slider, and the other side of the slide is fixedly connected to the connecting rod. The slider is vertically slidably connected to the first supporting assembly. The lifting frame is connected to the slide, and the upper end surface of the lifting frame is fixedly connected to the lifting frame plate. The upper end surface of the lifting frame plate is provided with a wafer boat transfer box; The outer support member includes an outer support frame and a support base plate; The outer support frame is fixedly connected to the first support assembly, a support base plate is provided on the outer support frame, and the outer support frame and the support base plate are fixedly connected; The inner support member includes an inner support frame, a crystal boat support plate, and a crystal boat frame; The inner support frame is arranged on the upper end surface of the support base plate, the upper end surface of the inner support frame is connected to the wafer boat support plate, and a wafer boat frame is arranged above the wafer boat support plate; It also includes a guide assembly provided on the upper end surface of the lifting frame plate; The guide assembly includes a guide block and a guide ramp; The guide block is fixedly connected to the upper end surface of the lifting frame plate, and the upper end surface of the guide block is provided with a guide slope, which can enable the wafer boat transfer box to be quickly and correctly placed in the designated position; The guide blocks are arranged in four groups, and the guide blocks are arranged at the intersection of the four edges and corners of the wafer boat transfer box.

2. The pod wafer boat transfer and unpacking device according to claim 1, characterized in that: The pressure sensing component includes a pressure sensor and a light source sensing sensor provided on the wafer boat supporting plate. The pressure sensor and the light source sensing sensor are used to judge whether the wafer boat transfer box is placed correctly and in place.

3. The pod wafer boat transfer and unpacking device according to claim 2, characterized in that: The fixed assembly includes a fixed motor, a tablet pressing chamber; The fixed motor is vertically fixed to the lower end surface of the lifting frame plate, a cavity for accommodating the tablet is provided in the tablet pressing chamber, circular holes are provided on the lifting frame plate and in the tablet pressing chamber, and the protruding end of the fixed motor passes through the circular hole and is connected to the tablet.

4. The pod wafer boat transfer and unpacking device according to claim 3, characterized in that: The wafer boat transfer box is provided with a step, and the pressing sheet can fix the step so that the wafer boat transfer box does not move during the lifting process.

5. The pod wafer boat transfer and unpacking device according to claim 4, characterized in that: A second slot is formed on the upper end surface of the lifting frame plate, and the wafer boat support plate is accommodated in the second slot.

6. The pod wafer boat transfer and unpacking device according to claim 5, characterized in that: The outer support member has a cavity in the middle and a first slot at the upper end. The first slot accommodates the lifting frame plate.

7. The pod wafer boat transfer and unpacking device according to claim 6, characterized in that: The lifting frame is arranged above the supporting bottom plate.

8. The pod boat transfer and unpacking device according to claim 7, characterized in that: The limiting assembly includes a rotary cylinder and a pin; The rotating cylinder is connected to the lower end surface of the crystal boat support plate. A pin is provided inside the crystal boat support plate. The pin is connected to the rotating cylinder. The rotating cylinder can drive the pin to perform lateral telescopic movement. A pin groove is provided on the inside of the crystal boat transfer box. The pin can be extended and inserted into the pin groove on the crystal boat transfer box to prevent the crystal boat transfer box from moving due to misoperation.

9. The pod wafer boat transfer and unpacking device according to claim 8, characterized in that: The scanning and identification component includes a protection box identification sensor, a wafer protrusion scanning sensor, a cassette in-position detection sensor, a cassette protrusion detection sensor, and a wafer scanning sensor; The protection box identification sensor is arranged on the upper end surface of the lifting frame plate, and the protection box identification sensor is used to scan the ID information of the wafer boat transfer box; The wafer protrusion scanning sensor is arranged on the lower end surface of the lifting frame plate, and the wafer protrusion scanning sensor is used to scan whether the wafer is protruding; The cassette in-position detection sensor is arranged on the inner side below the lifting frame, and the cassette in-position detection sensor is used to detect whether the wafer boat rack is in a specific position; The cassette protrusion detection sensor is arranged on the lower end surface of the lifting frame plate, and the cassette protrusion detection sensor is used to detect whether the wafer boat frame is displaced; The wafer scanning sensor is arranged on the lower end surface of the lifting frame plate, and the wafer scanning sensor is used to detect whether the wafer is on the wafer boat frame.

10. The pod wafer boat conveying and unpacking device according to claim 9, characterized in that: The protective box identification sensor is arranged at the front end or the rear end or both the front and rear ends of the lifting frame plate; the wafer protrusion scanning sensor is set as two groups, which are arranged at the front end and the rear end of the lower end surface of the lifting frame plate; the film box in-position detection sensor is set as two groups, which are arranged at the left and right ends of the lifting frame; the film box protrusion detection sensor and the wafer scanning sensor are both set as two groups, the film box protrusion detection sensor is at the left and right ends of the lower end surface of the lifting frame plate, and the wafer scanning sensors are set at the front and rear ends of the lower end surface of the lifting frame plate.

11. The pod boat transfer and unpacking device according to claim 10, wherein: The first support assembly includes a side support frame, a bottom support frame, a sensing door, a robot hand sensing sensor, a guide rail and a roller; A guide rail is provided on the side of the side support frame, the guide rail is slidably connected to the slider, the side support frame is fixedly connected to the outer support frame, the bottom support frame is arranged below the outer support frame and connected to the side support frame, the side support frame is provided with a sensing door, the sensing door is arranged on the side of the crystal boat frame, a robot sensing sensor is provided on the bottom side of the sensing door, and a roller is connected below the bottom support frame.

12. A wafer scanning calculation method, characterized in that: A pod boat transport and unpacking device comprising the device of claim 11, and Steps to open the crystal boat transfer box: S1: The central control system controls the rotary cylinder to rotate the pin to open the limit of the wafer boat transfer box; S2: The central control system then controls the motor to drive the connecting rod to drive the slider on the slide to rise along the guide rail. The slide drives the lifting frame, and the lifting frame drives the lifting frame plate to rise, and the wafer boat transfer box rises accordingly. S3: During the rising process, the wafer scanning sensor will successively scan the status of the wafers on each layer of the wafer boat, the wafer protrusion scanning sensor will scan whether the wafer is protruding, the cassette in-position detection sensor will detect whether the wafer boat is in a specific position, and the cassette protrusion detection sensor will detect whether the wafer boat is displaced. The results will be transmitted to the central control system in turn for analysis and processing by the central processing system; S4: When the wafer boat transfer box reaches the designated position, the motor stops moving and the central control system controls the sensor door to open; S5: The robotic arm will then deliver and retrieve the wafers on the wafer boat rack. When the robotic arm's sensing sensor detects the robotic arm coming in, it will send the result to the central control system. The central control system will control the motor to prohibit rotation, preventing the wafer boat transfer box from pressing on the robotic arm and squeezing the wafer.

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