Chip Probe Card Alignment Adjustment Device

Abstract

The present invention discloses a chip probe card alignment adjustment device, which includes a needle card position adjustment mechanism and a chip probe card automatic detection and alignment mechanism. The chip probe card automatic detection and alignment mechanism includes an image recognition component, an upper carrier table, and a bottom carrier component installed on a frame. The upper carrier table is located above the bottom carrier component and is used to carry a second workpiece. The needle card position adjustment mechanism has a position adjustment mechanism, a carrier, and a movable disassembly and assembly table installed on the frame. An identification hole for the image recognition component to identify is provided on the upper carrier table. The image recognition component is located above the upper carrier table. The image recognition component identifies the position of a first workpiece on the bottom carrier component through the identification hole. When the second workpiece is carried at the identification hole through the movement of the disassembly and assembly table, the image recognition component identifies the position of the second workpiece on the upper carrier table. The chip probe card alignment adjustment device of the present invention can realize automatic alignment between the chip and the probe card and assembly after alignment.

Description

Technical Field

[0001] The present invention relates to the technical field of chip processing, and in particular to a chip probe card alignment adjustment device. Background Art

[0002] When a chip and a probe card are processed, they often need to be assembled. The chip and the probe card often need to be aligned before assembly. In the prior art Chinese patent CN212514886U, the relative position between the chip and the probe card is adjusted directly by manual adjustment, and the position recognition is carried out manually. Due to the error of manual operation, the position accuracy of such a recognition method is low, resulting in low accuracy in the subsequent assembly of the chip and the probe card. Moreover, the subsequent assembly is all carried out manually, and its accuracy is relatively low, which cannot meet the existing production requirements.

[0003] Therefore, it is necessary to provide a chip probe card alignment adjustment device. Summary of the Invention

[0004] Aiming at the problems mentioned in the background art, the purpose of the present invention is to provide a chip probe card alignment adjustment device that can automatically align and adjust between the chip and the probe card, so as to solve the problems mentioned in the background art.

[0005] To achieve the above object, the chip probe card alignment adjustment device provided by the present invention includes a frame, a needle card position adjustment mechanism, and a chip probe card automatic detection and alignment mechanism. The chip probe card automatic detection and alignment mechanism includes an image recognition component, an upper carrier table, and a bottom carrier component installed on the frame. The bottom carrier component is used to carry and position the first workpiece. The upper carrier table is located above the bottom carrier component and is used to carry the second workpiece. The needle card position adjustment mechanism has a position adjustment mechanism, a carrier, and a movable disassembly and assembly table installed on the frame. An identification hole for the image recognition component to recognize is provided on the upper carrier table. The disassembly and assembly table moves the carrier to the upper carrier table so that the second workpiece on the carrier is carried at the identification hole. The image recognition component is located above the upper carrier table. The image recognition component recognizes the position of the first workpiece on the bottom carrier component through the identification hole. When the second workpiece is carried at the identification hole through the movement of the disassembly and assembly table, the image recognition component recognizes the position of the second workpiece on the upper carrier table. The image recognition component records the positions of the first workpiece and the second workpiece and transmits them to the position adjustment mechanism. The disassembly and assembly table moves the carrier on the upper carrier table away and adjusts the position of the carrier through the position adjustment mechanism. The disassembly and assembly table moves the adjusted carrier to the upper carrier table again. The final relative position between the second workpiece on the carrier and the first workpiece on the bottom carrier component is determined by disassembling the carrier from the disassembly and assembly table to the upper carrier table.

[0006] Preferably, the needle card position adjustment mechanism includes a lifting device, a rotating device, a Y-axis moving device, an X-axis moving device, a disassembly and assembly table, a carrier, and a locking component. The lifting device is installed on the frame. The rotating device is installed at the output end of the lifting device. The rotating device is lifted under the drive of the lifting device. The Y-axis moving device is installed at the output end of the rotating device. The Y-axis moving device rotates under the drive of the rotating device. The X-axis moving device is installed at the output end of the Y-axis moving device. The X-axis moving device moves along the Y-axis direction of the frame under the drive of the Y-axis moving device. The disassembly and assembly table is installed at the output end of the X-axis moving device. The disassembly and assembly table moves along the X-axis direction of the frame under the drive of the X-axis moving device. The disassembly and assembly table is recessed downward to form a trough structure with an upward opening and an outward opening. The carrier is slidably arranged in the trough structure. The needle card position adjustment mechanism further includes a locking component. The locking component is used to detachably install the carrier in the trough structure.

[0007] Preferably, the bottom carrier assembly includes a fixing frame, a second lifting driving device, a lifting carrier seat, a fixture and a pressure detection device. The fixing frame is installed on the machine frame, the second lifting driving device is installed on the machine frame, the lifting carrier seat is installed at the output end of the second lifting driving device, the lifting carrier seat is lifted and lowered under the drive of the second lifting driving device and has an extended position and a retracted position through lifting, the pressure detection device is built in the lifting carrier seat, the fixture is installed between the fixing frame and the lifting carrier seat, and when the lifting carrier seat is in the retracted position, the fixture releases the first workpiece on the lifting carrier seat, and when the lifting carrier seat is in the extended position, the fixture clamps the first workpiece on the lifting carrier seat.

[0008] Specifically, the fixture includes a first elastic clamping member and a second elastic clamping member. A first positioning groove and a second positioning groove with upward openings are formed in the lifting carrier seat. The first positioning groove and the second positioning groove are perpendicular to each other and communicate with each other. The intersection of the first positioning groove and the second positioning groove communicates to form two mutually perpendicular abutting walls; the first elastic clamping member has a first elastic pressing block which is slidably arranged in the first positioning groove, the second elastic clamping member has a second elastic pressing block which is slidably arranged in the second positioning groove, and the first elastic pressing block, the second elastic pressing block, the first positioning groove and the second positioning groove can jointly clamp the four edges of the first workpiece.

[0009] Specifically, each of the first elastic clamping member and the second elastic clamping member includes a guiding member, a pressing block body and an elastic member. The guiding member is installed on the fixing frame, the pressing block body is installed on the lifting carrier seat, the pressing block body is connected to the lifting carrier seat through the elastic member, and due to the elastic member, the pressing block body always has a tendency to approach the lifting carrier seat. The pressing block body extends outwards to form the first elastic pressing block or the second elastic pressing block. The guiding member has a guiding inclined surface, and the pressing block body has a guiding column slidably arranged on the guiding inclined surface. Due to the guiding column being slidably arranged on the guiding inclined surface, the pressing block body moves away from the lifting carrier seat against the elastic force of the elastic member or moves towards the lifting carrier seat under the elastic action of the elastic member.

[0010] Specifically, the pressing block body is slidably arranged on the lifting carrier seat. The lifting carrier seat is provided with connecting ears corresponding to the elastic member. One end of the elastic member is connected to the connecting ear, and the other end of the elastic member is connected to the pressing block body.

[0011] Specifically, the locking component includes a threaded hole and a nut. The threaded hole is formed at the bottom of the groove structure, and the nut is threadedly connected to the threaded hole so that the nut presses the vehicle carrier against the groove structure.

[0012] Specifically, there are multiple threaded holes and nuts. The threaded holes are arranged at intervals around the edge of the vehicle carrier, and the nuts correspond to the threaded holes one by one.

[0013] Specifically, the vehicle carrier extends outward to form a limiting ear, and when the vehicle carrier slides in place, the limiting ear abuts against the cylinder of the nut.

[0014] Specifically, the position adjustment mechanism further includes a bottom camera. The rotating device includes a rotation driving device. The bottom camera is installed at the output end of the rotation driving device, and the Y-axis moving device, the X-axis moving device and the vehicle carrier are respectively provided with light passing holes corresponding to the bottom camera.

[0015] Compared with the prior art, the chip probe card alignment adjustment device of the present invention combines a needle card position adjustment mechanism and a chip probe card automatic detection and alignment mechanism. The chip probe card automatic detection and alignment mechanism includes a frame and an image recognition component, an upper carrier table, and a bottom carrier component mounted on the frame. The bottom carrier component is used to carry and position the first workpiece. The upper carrier table is located above the bottom carrier component and is used to carry the second workpiece. The needle card position adjustment mechanism has a position adjustment mechanism, a carrier, and a movable disassembly and assembly table mounted on the frame. The disassembly and assembly table moves the carrier to the upper carrier table so that the second workpiece on the carrier is carried at the recognition hole. It can be understood that the movement of the disassembly and assembly table can avoid blocking the first workpiece located below when not in recognition and achieve the docking between the needle card position adjustment mechanism and the chip probe card automatic detection and alignment mechanism. The upper carrier table is provided with a recognition hole for the image recognition component to recognize. The image recognition component is located above the upper carrier table. The image recognition component recognizes the position of the first workpiece on the bottom carrier component through the recognition hole. When the second workpiece is carried at the recognition hole through the movement of the disassembly and assembly table, the image recognition component recognizes the position of the second workpiece on the upper carrier table. By means of the image recognition component, the positions of the first workpiece and the second workpiece are recorded and transmitted to the position adjustment mechanism. The disassembly and assembly table moves to remove the carrier on the upper carrier table and adjusts the position of the carrier through the position adjustment mechanism. The disassembly and assembly table moves to move the adjusted carrier to the upper carrier table again. By removing the carrier from the disassembly and assembly table to the upper carrier table, the final relative position between the second workpiece on the carrier and the first workpiece on the bottom carrier component is determined. In other words, the first step of the chip probe card alignment adjustment device of the present invention is to respectively recognize the positions of the first workpiece and the second workpiece, obtain the relative position between the two by comparison, then adjust the position of the second workpiece through the needle card position adjustment mechanism, and after the adjustment is completed, determine the position of the second workpiece to indirectly achieve the purpose of adjusting the relative position between the first workpiece and the second workpiece. Subsequently, the aligned first workpiece and second workpiece are removed by an external device and then assembled, which can achieve automatic alignment and post-alignment adjustment, meeting the requirements for position accuracy in existing production. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a three-dimensional structural schematic diagram of the chip probe card alignment adjustment device of the present invention;

[0017] Figure 2 is a three-dimensional structural schematic diagram of the chip probe card alignment adjustment device of the present invention after hiding the housing;

[0018] Figure 3 is a three-dimensional structural schematic diagram of the chip probe card automatic detection and alignment mechanism of the chip probe card alignment adjustment device of the present invention;

[0019] Figure 4It is a partial three-dimensional structural schematic diagram of the chip probe card automatic detection and alignment mechanism of the chip probe card alignment adjustment device of the present invention;

[0020] Figure 5 It is Figure 4 The partial enlarged view at position A in

[0021] Figure 6 It is another partial three-dimensional structural schematic diagram of the chip probe card automatic detection and alignment mechanism of the chip probe card alignment adjustment device of the present invention;

[0022] Figure 7 It is a three-dimensional structural schematic diagram of the needle card position adjustment mechanism of the chip probe card alignment adjustment device of the present invention;

[0023] Figure 8 It is another three-dimensional structural schematic diagram of the needle card position adjustment mechanism of the chip probe card alignment adjustment device of the present invention;

[0024] Figure 9 It is another three-dimensional structural schematic diagram of the needle card position adjustment mechanism of the chip probe card alignment adjustment device of the present invention;

[0025] Figure 10 It is Figure 9 The partial enlarged view at position B in Specific embodiments

[0026] In order to clearly and completely describe the purpose, technical solution of the present invention, and make the advantages more clear and understandable, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0027] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "middle", "upper", "lower", "left", "right", "inner", "outer", "top", "bottom", "side", "vertical", "horizontal", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention. In addition, the terms "first", "second", "third", "fourth", "fifth", "sixth" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0028] In the description of the present invention, it should be noted that, unless otherwise clearly specified and defined, the terms "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] Reference Figures 1 to 10, A chip probe card alignment adjustment device 100, which includes a frame 11, a needle card position adjustment mechanism 20, and a chip probe card automatic detection and alignment mechanism 10. The chip probe card automatic detection and alignment mechanism 10 includes an image recognition component 12, an upper carrier table 13, and a bottom carrier component 14 installed on the frame 11. The bottom carrier component 14 is used to carry and position the first workpiece. The upper carrier table 13 is located above the bottom carrier component 14 and is used to carry the second workpiece. The needle card position adjustment mechanism 20 has a position adjustment mechanism, a carrier 27, and a movable disassembly and assembly table 26 installed on the frame 11. The disassembly and assembly table 26 moves the carrier 27 to the upper carrier table 13 so that the second workpiece on the carrier 27 is carried at the recognition hole 131. It can be understood that the movement of the disassembly and assembly table 26 can avoid blocking the first workpiece located below when not in recognition and achieve the docking between the needle card position adjustment mechanism 20 and the chip probe card automatic detection and alignment mechanism 10. A recognition hole 131 for the image recognition component 12 to recognize is opened on the upper carrier table 13. The image recognition component 12 is located above the upper carrier table 13. The image recognition component 12 recognizes the position of the first workpiece on the bottom carrier component 14 through the recognition hole 131. When the second workpiece is carried at the recognition hole 131 through the movement of the disassembly and assembly table 26, the image recognition component 12 recognizes the position of the second workpiece on the upper carrier table 13. The image recognition component 12 records the positions of the first workpiece and the second workpiece and transmits them to the needle card position adjustment mechanism 20. The disassembly and assembly table 26 moves to remove the carrier on the upper carrier table 13 and adjusts the position of the carrier 27 through the position adjustment mechanism. The disassembly and assembly table 26 moves the adjusted carrier 27 to the upper carrier table 13 again. By detaching the carrier 27 from the disassembly and assembly table 26 to the upper carrier table 13, the final relative position between the second workpiece on the carrier 27 and the first workpiece on the bottom carrier component 14 is determined. In other words, the first step of the chip probe card alignment adjustment device 100 of the present invention is to respectively recognize the positions of the first workpiece and the second workpiece, obtain the relative position between the two through comparison, then adjust the position of the second workpiece through the needle card position adjustment mechanism 20, and after the adjustment is completed, determine the position of the second workpiece to indirectly achieve the purpose of adjusting the relative position between the first workpiece and the second workpiece. Subsequently, the aligned first workpiece and second workpiece are removed by an external device and then subsequent assembly is realized, which can achieve automatic alignment and adjustment after alignment, meeting the requirements for position accuracy in existing production.

[0030] Reference Figure 3 , The image recognition component 12 includes a first lifting drive device 121 and an image recognition head 122. The first lifting drive device 121 is installed on the frame 11. The image recognition head 122 is installed at the output end of the first lifting drive device 121. The image recognition head 122 lifts under the drive of the first lifting drive device 121. Preferably, the first lifting drive device 121 is a linear movement drive device, but it is not limited thereto.

[0031] Reference Figure 4 , the upper carrier table 13 is installed on the frame 11. The upper carrier table 13 is a horizontal table structure, and the identification hole 131 is opened on the horizontal table structure.

[0032] Reference Figures 4 to 5 , the bottom carrier assembly 14 includes a fixing frame 141, a second lifting drive device 142, a lifting carrier seat 1421, a clamp 143 and a pressure detection device 144. The fixing frame 141 is installed on the frame 11, the second lifting drive device 142 is installed on the frame 11, the lifting carrier seat 1421 is installed at the output end of the second lifting drive device 142, and the lifting carrier seat 1421 rises and falls under the drive of the second lifting drive device 142 and has an extended position and a retracted position through lifting. The pressure detection device 144 is built into the lifting carrier seat 1421. The clamp 143 is installed between the fixing frame 141 and the lifting carrier seat 1421. When the lifting carrier seat 1421 descends and the lifting carrier seat 1421 is in the retracted position, the clamp 143 descends and releases the first workpiece on the lifting carrier seat 1421 through lateral sliding. When the lifting carrier seat 1421 rises and the lifting carrier seat 1421 is in the extended position, the clamp 143 rises and clamps the first workpiece on the lifting carrier seat 1421 through lateral sliding. Specifically, the clamp 143 includes a first elastic clamping member 1431 and a second elastic clamping member 1432. The lifting carrier seat 1421 is provided with a first positioning groove 14212 and a second positioning groove 14211 with upward openings. The first positioning groove 14212 and the second positioning groove 14211 are perpendicular to each other and communicate with each other. The first positioning groove 14212 and the second positioning groove 14211 are open groove structures. The intersection of the first positioning groove 14212 and the second positioning groove 14211 communicates, thus forming two mutually perpendicular abutting walls. The first elastic clamping member 1431 has a first elastic pressing block 14311, and the first elastic pressing block 14311 is slidably arranged in the first positioning groove 14212. The second elastic clamping member 1432 has a second elastic pressing block 14321, and the second elastic pressing block 14321 is slidably arranged in the second positioning groove 14211. The first elastic pressing block 14311, the second elastic pressing block 14321, the first positioning groove 14212 and the second positioning groove 14211 can jointly clamp the four edges of the first workpiece.

[0033] Reference Figures 4 to 5, the first elastic clamping member 1431 and the second elastic clamping member 1432 each include a guide member 1433, a pressure block body 1434, and an elastic member 1435. The guide member 1433 is installed on the fixed frame 141, and the pressure block body 1434 is installed on the lifting carrier seat 1421 and they lift together. The pressure block body 1434 is connected to the lifting carrier seat 1421 through the elastic member 1435. Due to the elastic member 1435, the pressure block body 1434 always has a tendency to approach the lifting carrier seat 1421. The pressure block body 1434 extends outward to form a first elastic pressure block 14311, and another pressure block body 1434 extends outward to form a second elastic pressure block 14321. The guide member 1433 has a guide inclined surface 14331, and the pressure block body 1434 has a guide post 1434a that slides on the guide inclined surface 14331. Due to the guide post 1434a sliding on the guide inclined surface 14331, the pressure block body 1434 moves away from the lifting carrier seat 1421 against the elastic force of the elastic member 1435 or moves toward the lifting carrier seat 1421 under the elastic action of the elastic member 1435. Preferably, the elastic member 1435 is a compression spring, but it is not limited thereto.

[0034] Reference Figures 4 to 5 , the pressure block body 1434 is slidably disposed on the lifting carrier seat 1421. The lifting carrier seat 1421 is provided with a connecting ear 14213 corresponding to the elastic member 1435. One end of the elastic member 1435 is connected to the connecting ear 14213, and the other end of the elastic member 1435 is connected to the pressure block body 1434. Specifically, the pressure block body 1434 is provided with an avoidance opening 14341 corresponding to the guide post.

[0035] Reference Figures 3 to 5 , between the output end of the second lifting drive device 142 and the frame 11, there is a guide assembly 145. The guide assembly 145 includes a guide rail 1451 and a slider 1452. The rail is installed on the frame 11, and the slider 1452 is connected to the output end of the second lifting drive device 142. The slider 1452 slides on the rail 1451, so that the output end of the second lifting drive device 142 moves more smoothly relative to the frame 11.

[0036] Reference Figures 7 to 10, the needle card position adjustment mechanism includes a lifting device 22, a rotating device 23, a Y-axis moving device 24, an X-axis moving device 25, a disassembly and assembly table 26, a carrier 27 and a locking component 28. The lifting device 22 is installed on the frame 21, and the rotating device 23 is installed at the output end of the lifting device 22. The rotating device 23 is lifted under the drive of the lifting device 22, so as to adjust the position of the carrier 27 in the height direction. The Y-axis moving device 24 is installed at the output end of the rotating device 23. The Y-axis moving device 24 rotates under the drive of the rotating device 23, so as to adjust the position of the carrier 27 in the rotation direction. The X-axis moving device 25 is installed at the output end of the Y-axis moving device 24. The X-axis moving device 25 moves along the Y-axis direction of the frame 21 under the drive of the Y-axis moving device 24 (the X-axis direction is as shown by the arrow X in Figure 9 , and the Y-axis direction is as shown by the arrow Y in Figure 9 ), so as to adjust the position of the carrier 27 in the Y-axis direction. The disassembly and assembly table 26 is installed at the output end of the X-axis moving device 25. The disassembly and assembly table 26 moves along the X-axis direction of the frame 21 under the drive of the X-axis moving device 25, so as to adjust the position of the carrier 27 in the X-axis direction. The disassembly and assembly table 26 is recessed downward to form a groove structure 261 with an upward opening and an outward opening. The carrier 27 is slidably arranged in the groove structure 261 along the X-axis direction. The locking component 28 is used to detachably install the carrier 27 in the groove structure 261. Due to the setting of the locking component 28, the locking component 28 can achieve the detachable connection between the carrier 27 and the groove structure 261, that is, when the position is adjusted by using the lifting device 22, the rotating device 23, the Y-axis moving device 24 and the X-axis moving device 25, etc., it is convenient to detach the whole carrier 27 and directly assemble it, which not only realizes the automatic position adjustment, but also improves the position accuracy of the assembly.

[0037] Reference Figures 9 to 10 , the locking component 28 includes a threaded hole 281 and a nut 282. The threaded hole 281 is opened at the bottom of the groove of the groove structure 261. The nut 282 is threadedly connected with the threaded hole 281 so that the nut 2821 of the nut 282 presses the carrier 27 against the groove structure 261. Preferably, both the threaded hole 281 and the nut 282 are provided with a plurality of them to improve the stability of the disassembly and connection. The threaded holes 281 are arranged at intervals around the edge of the carrier 27, and the nuts 282 correspond to the threaded holes 281 one by one. Specifically, two corners on one side of the carrier 27 extend outward to form limiting ears 271. When the carrier 27 slides in place, the limiting ears 271 abut against the column 2822 of the nut 282, and the abutment between the limiting ears 271 and the nut 282 is used to achieve the purpose of reminding that the installation is in place.

[0038] Reference Figures 9 to 10, the rotating device 23 includes a rotation driving device 231 and a rotating plate 232. The rotation driving device 231 is installed at the output end of the lifting device 22, and the rotating plate 232 is installed at the output end of the rotation driving device 231. The rotating plate 232 rotates under the drive of the rotation driving device 231. The Y-axis moving device 24 is installed on the rotating plate 232, and the rotating plate 232 mainly provides an intermediate connection function.

[0039] Reference Figures 9 to 10 , the needle card position adjusting mechanism 20 further includes a bottom camera 29. The bottom camera 29 is installed at the output end of the rotation driving device 231. The Y-axis moving device 24, the X-axis moving device 25, and the carrier 27 are each provided with a light passing hole 210 corresponding to the bottom camera 29. The setting of the light passing hole 210 mainly facilitates the image acquisition of the bottom camera 29.

[0040] Reference Figures 9 to 10 , the Y-axis moving device 24 includes a Y-axis moving driving device 241 and a moving plate 242. The Y-axis moving driving device 241 is installed at the output end of the rotation driving device 231, and the moving plate 242 is installed at the output end of the Y-axis moving driving device 241. The moving plate 242 moves along the Y-axis direction of the frame 21 under the drive of the Y-axis moving driving device 241. The X-axis moving device 25 is installed on the moving plate 242. The rotating plate 232 mainly provides an intermediate connection function.

[0041] Reference Figures 8 to 10 , the rotating device 23 has a rotating plate 232 for connection, and the Y-axis moving device 24 has a moving plate 242 for connection. A first guiding component 211 is provided between the rotating plate 232 and the moving plate 242. The first guiding component 211 includes a first guide rail 2111 and a first slider 2112. The first guide rail 2111 is connected to the rotating plate 232, and the first slider 2112 is connected to the moving plate 242. The first slider 2112 slides on the first guide rail 2111, so that the movement between the rotating plate 232 and the moving plate 242 is smoother.

[0042] Reference Figures 8 to 10 , the needle card position adjusting mechanism 20 further includes a second guiding component 212. The Y-axis moving device 24 has a moving plate 242 for connection. The second guiding component 212 includes a second guide rail 2121 and a second slider 2122. The second guide rail 2121 is connected to the moving plate 242, and the second slider 2122 is connected to the disassembly and assembly table 26. The second slider 2122 slides on the second guide rail 2121, so that the movement between the disassembly and assembly table 26 and the moving plate 242 is smoother.

[0043] The following combines Figures 1 to 10 , and details the usage method of the chip probe card alignment adjustment device of the present invention:

[0044] The image recognition component 12 recognizes the position of the first workpiece on the bottom carrier component through the recognition hole 131. At this time, the second workpiece avoids the image recognition component at the recognition hole through the movement of the disassembly and assembly table. After the position of the first workpiece is recognized, when the second workpiece is carried at the recognition hole through the movement of the disassembly and assembly table, the image recognition component recognizes the position of the second workpiece on the upper carrier table. By comparing the relative positions of the first workpiece and the second workpiece, it is judged whether position adjustment is needed and the specific situation of position adjustment, and the corresponding position adjustment signal is transmitted to the needle card position adjustment mechanism. The second workpiece moves the carrier to the needle card position adjustment mechanism through the movement of the disassembly and assembly table. The rotating device 23 rises and falls under the drive of the lifting device 22, so as to adjust the position of the carrier 27 in the height direction. The Y-axis moving device 24 rotates under the drive of the rotating device 23, so as to adjust the position of the carrier 27 in the rotation direction. The X-axis moving device 25 moves along the Y-axis direction of the frame 21 under the drive of the Y-axis moving device 24, so as to adjust the position of the carrier 27 in the Y-axis direction. The disassembly and assembly table 26 moves along the X-axis direction of the frame 21 under the drive of the X-axis moving device 25, so as to adjust the position of the carrier 27 in the X-axis direction. After adjusting the position by using the lifting device 22, the rotating device 23, the Y-axis moving device 24 and the X-axis moving device 25, etc., the second workpiece is carried at the recognition hole again through the movement of the disassembly and assembly table. The entire carrier 27 is disassembled and directly assembled at the corresponding position of the chip by unlocking the locking component 28. At this time, the relative positions of the chip and the probe card are determined and conveyed to the next working station through an external device.

[0045] By combining a needle card position adjustment mechanism and an automatic detection and alignment mechanism for a chip probe card, etc., the automatic detection and alignment mechanism for a chip probe card includes a frame and an image recognition component, an upper carrier table, and a bottom carrier component installed on the frame. The bottom carrier component is used to carry and position the first workpiece. The upper carrier table is located above the bottom carrier component and is used to carry the second workpiece. The needle card position adjustment mechanism has a position adjustment mechanism, a carrier, and a movable disassembly and assembly table installed on the frame. The disassembly and assembly table moves the carrier to the upper carrier table so that the second workpiece on the carrier is carried at the recognition hole. It can be understood that the movement of the disassembly and assembly table can avoid blocking the first workpiece located below when not in recognition and achieve the docking between the needle card position adjustment mechanism and the automatic detection and alignment mechanism for a chip probe card. A recognition hole for the image recognition component to recognize is provided on the upper carrier table. The image recognition component is located above the upper carrier table. The image recognition component recognizes the position of the first workpiece on the bottom carrier component through the recognition hole. When the second workpiece is carried at the recognition hole through the movement of the disassembly and assembly table, the image recognition component recognizes the position of the second workpiece on the upper carrier table. By means of the image recognition component, the positions of the first workpiece and the second workpiece are recorded and sent to the position adjustment mechanism. The disassembly and assembly table moves to remove the carrier on the upper carrier table and adjusts the position of the carrier through the position adjustment mechanism. The disassembly and assembly table moves to move the adjusted carrier to the upper carrier table again. By detaching the carrier from the disassembly and assembly table to the upper carrier table, the final relative position between the second workpiece on the carrier and the first workpiece on the bottom carrier component is determined. In other words, the first step of the chip probe card alignment adjustment device of the present invention is to separately recognize the positions of the first workpiece and the second workpiece and obtain the relative position between the two through comparison, then adjust the position of the second workpiece through the needle card position adjustment mechanism, and after the adjustment is completed, determine the position of the second workpiece to indirectly achieve the purpose of adjusting the relative position between the first workpiece and the second workpiece. Subsequently, the aligned first workpiece and second workpiece are removed by an external device and then assembled, which can achieve automatic alignment and post-alignment adjustment, meeting the requirements for position accuracy in existing production.

[0046] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A chip probe card alignment adjustment device, characterized in that: The apparatus comprises a frame, a needle card position adjustment mechanism and a chip probe card automatic detection and alignment mechanism, wherein the chip probe card automatic detection and alignment mechanism comprises an image recognition component mounted on the frame, an upper carrier platform and a bottom carrier platform, wherein the bottom carrier platform is used to carry and position a first workpiece, and the upper carrier platform is located above the bottom carrier platform and is used to carry a second workpiece, wherein the needle card position adjustment mechanism comprises a position adjustment mechanism mounted on the frame, a carrier and a movable disassembly and assembly platform, wherein an identification hole for identification by the image recognition component is provided on the upper carrier platform, and the disassembly and assembly platform moves the carrier to the upper carrier platform by movement so that the second workpiece on the carrier is carried at the identification hole, and the image recognition component is located above the upper carrier platform. The image recognition component identifies the position of the first workpiece on the bottom carrier assembly through the recognition hole, and when the second workpiece is carried at the recognition hole through the movement of the disassembly and assembly platform, the image recognition component identifies the position of the second workpiece on the upper carrier. The positions of the first workpiece and the second workpiece are recorded by the image recognition component and conveyed to the position adjustment mechanism. The disassembly and assembly platform moves the carrier on the upper carrier away and adjusts the position of the carrier through the position adjustment mechanism. The disassembly and assembly platform moves the adjusted carrier back to the upper carrier, and determines the final relative position between the second workpiece on the carrier and the first workpiece on the bottom carrier assembly by disassembling the carrier from the disassembly and assembly platform to the upper carrier.

2. The chip probe card alignment adjustment device according to claim 1, wherein: The needle card position adjustment mechanism includes a lifting device, a rotating device, a Y-axis moving device, an X-axis moving device, the disassembly and assembly platform, the carrier and a locking assembly, the lifting device is installed on the frame, the rotating device is installed on the output end of the lifting device, the rotating device is lifted and lowered under the drive of the lifting device, the Y-axis moving device is installed on the output end of the rotating device, the Y-axis moving device rotates under the drive of the rotating device, the X-axis moving device is installed on the output end of the Y-axis moving device, and the X-axis moving device moves along the Y-axis direction of the frame under the drive of the Y-axis moving device, the disassembly and assembly platform is installed at the output end of the X-axis moving device, and the disassembly and assembly platform moves along the X-axis direction of the frame under the drive of the X-axis moving device, the disassembly and assembly platform is recessed downward to form a slot structure with openings facing upward and outward, the carrier is slidably provided in the slot structure, and the needle card position adjustment mechanism also includes a locking assembly, which is used to detachably install the carrier in the slot structure.

3. The chip probe card alignment adjustment device according to claim 1, wherein: The bottom carrier assembly includes a fixed frame, a second lifting drive device, a lifting carrier seat, a clamp and a pressure detection device. The fixed frame is installed on the frame, the second lifting drive device is installed on the frame, and the lifting carrier seat is installed at the output end of the second lifting drive device. The lifting carrier seat is lifted and lowered under the drive of the second lifting drive device and has an extended position and a retracted position through lifting. The pressure detection device is built into the lifting carrier seat, and the clamp is installed between the fixed frame and the lifting carrier seat. When the lifting carrier seat is in the retracted position, the clamp releases the first workpiece on the lifting carrier seat, and when the lifting carrier seat is in the extended position, the clamp clamps the first workpiece on the lifting carrier seat.

4. The chip probe card alignment adjustment device according to claim 3, wherein: The clamp includes a first elastic clamping member and a second elastic clamping member, and a first positioning groove and a second positioning groove opening upward are provided in the lifting carrier seat, the first positioning groove and the second positioning groove are perpendicular to each other and are connected to each other, and the intersection of the first positioning groove and the second positioning groove is connected to form two mutually perpendicular top walls; the first elastic clamping member has a first elastic pressure block, and the first elastic pressure block is slidably arranged in the first positioning groove, and the second elastic clamping member has a second elastic pressure block, and the second elastic pressure block is slidably arranged in the second positioning groove, and the first elastic pressure block, the second elastic pressure block, the first positioning groove and the second positioning groove can jointly clamp the four edges of the first workpiece.

5. The chip probe card alignment adjustment device according to claim 4, wherein: The first elastic clamping member and the second elastic clamping member each include a guide member, a pressure block body and an elastic member, the guide member is installed on the fixing frame, the pressure block body is installed on the lifting carrier seat, the pressure block body is connected to the lifting carrier seat through an elastic member, and the elastic member makes the pressure block body always have a tendency to approach the lifting carrier seat, the pressure block body extends outward to form the first elastic pressure block or the second elastic pressure block, the guide member has a guide inclined surface, and the pressure block body has a guide column slidably provided on the guide inclined surface, and the guide column is slidably provided on the guide inclined surface so that the pressure block body overcomes the elastic force of the elastic member and moves in the direction away from the lifting carrier seat or moves in the direction close to the lifting carrier seat under the elastic action of the elastic member.

6. The chip probe card alignment adjustment device according to claim 5, wherein: The pressing block body is slidably arranged on the lifting carrier seat. The lifting carrier seat is provided with a connecting ear corresponding to the elastic member. One end of the elastic member is connected to the connecting ear, and the other end of the elastic member is connected to the pressing block body.

7. The chip probe card alignment adjustment device according to claim 2, wherein: The locking assembly includes a threaded hole and a nut. The threaded hole is opened at the bottom of the slot structure. The nut is threadedly connected to the threaded hole so that the nut cap of the nut presses the carrier toward the slot structure.

8. The chip probe card alignment adjustment device according to claim 7, wherein: A plurality of threaded holes and a plurality of nuts are provided. The threaded holes are arranged at intervals around the edge of the carrier, and the nuts correspond to the threaded holes one by one.

9. The chip probe card alignment adjustment device according to claim 7, wherein: The carrier extends outward to form a limiting ear, and when the carrier slides into place, the limiting ear presses against the column of the nut.

10. The chip probe card alignment adjustment device according to claim 2, wherein: The position adjustment mechanism also includes a bottom camera, the rotating device includes a rotating drive device, the bottom camera is installed at the output end of the rotating drive device, and the Y-axis moving device, the X-axis moving device and the carrier each have a light hole corresponding to the bottom camera.

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