Closed dust-free semiconductor package conveying device

Abstract

The application discloses a closed dust-free semiconductor packaging conveying device, which comprises a rack, a driving mechanism, a sliding table, a tray and an air filtering device, a gear shaft is suspendedly arranged in the rack, the front and rear ends of the gear shaft penetrate through the rack and are rotationally connected with the rack, the rear side of the rack is provided with the driving mechanism, and the driving mechanism is connected with the gear shaft. The closed dust-free semiconductor packaging conveying device is provided with an air inlet, a first air outlet and a vacuum pump, the vacuum pump extracts air through the air inlet, clean air is formed after the air is filtered through the air filtering device, then the clean air is discharged into the sealed cover through the first air outlet, the regular airflow is formed on the two sides of the sealed cover through the above structure, dust invasion into the inside of the sealed cover is avoided due to the influence of vortex flow, turbulent flow and the like, meanwhile, the sealed cover wrapped outside the rack further improves the sealing effect, the material is convenient for long-distance transportation, and the requirement for the workshop is reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor packaging and conveying technology, specifically to a closed, dust-free semiconductor packaging and conveying device. Background Technology

[0002] Semiconductor processing requires the use of multiple devices and multiple processing steps, and conveying devices are needed to transfer materials between different processing devices.

[0003] Existing conveying devices typically rely on conveyor belts for transport. This method involves synchronous material movement along the entire conveyor line. However, in actual processing, some steps are difficult to standardize, resulting in significant variations in processing time. This necessitates frequent start-stop operations for existing conveyor systems, which cannot pre-transport materials, leading to long waiting times and impacting production efficiency. Furthermore, existing conveyor systems lack enclosed dust suppression mechanisms, requiring well-equipped cleanrooms for long-distance transport, greatly increasing equipment operating costs. They also typically lack material detection functions, leading to situations like failed grabbing. In such cases, the conveyor system cannot react and stop immediately, and continued material transport can cause pallets to overturn and materials to fall and become damaged. Existing conveyor systems usually rely on a single main gear to drive the entire conveyor belt, resulting in a small contact area between the drive component and the belt. This leads to high pressure on the belt, making it prone to tearing over time and increasing maintenance costs. Therefore, improvements to existing equipment are necessary to address these issues. Summary of the Invention

[0004] The purpose of this invention is to provide a closed, dust-free semiconductor packaging conveying device to solve the problems mentioned in the background art. Existing conveying devices require frequent opening and closing and cannot pre-convey materials, resulting in long waiting times and affecting production efficiency. Furthermore, existing conveying devices do not have a closed dust suppression mechanism, requiring a complete cleanroom for long-distance conveying, which greatly increases the cost of equipment use. Existing conveying devices usually do not have material detection functions, and in actual processing, situations such as grasping failure may occur. In this case, the conveying device cannot react and stop immediately, and continued conveying of materials can easily cause the pallet to overturn and the materials to fall and be damaged. Existing conveying devices usually rely on a main gear to drive the entire conveyor belt. The contact area between its driving component and the conveyor belt is small, which makes the conveyor belt bear high pressure and easily causes the conveyor belt to tear over long-term use.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a closed, dust-free semiconductor packaging conveying device, comprising a frame, a drive mechanism, a slide, a tray, and an air filter. A gear shaft is suspended inside the frame, and both ends of the gear shaft pass through the frame and are rotatably connected to it. A drive mechanism is installed on the rear side of the frame and is connected to the gear shaft. A chain is meshed on the outer side of the gear shaft, and sharp teeth are fixed on the side of the chain away from the gear shaft. A pressure roller is rotatably installed on the inner side of the frame, and the pressure roller cooperates with the gear shaft to squeeze the chain.

[0006] The frame has openings on the top and bottom sides, and a slide table is slidably installed inside the openings. The inner wall of the openings has a limiting groove. Limiting posts are fixedly installed on the front and rear sides of the slide table, and the limiting posts are slidably installed inside the limiting grooves. A first groove is opened at the bottom of the slide table, and a first slide plate is slidably installed inside the first groove. A toothed plate is fixedly installed at the bottom of the first slide plate, and the toothed plate meshes with sharp teeth. A first compression spring is installed between the first slide plate and the first groove.

[0007] The slide table has second slide grooves on both sides, and a second slide plate is slidably installed inside the second slide grooves. The slide table has a slide hole on the left side, and a top column is slidably installed inside the slide hole. A permanent magnet is fixedly installed on the right side of the slide table. A tray is suspended on the top of the slide table, and a second compression spring is installed between the tray and the slide table.

[0008] The frame is fixed with sealing covers on both the top and bottom sides, and baffles and electromagnets are fixedly installed on both the front and rear sides of the sealing covers. The inner sides of the left and right ends of the sealing covers are provided with air inlets and first air outlets, and the outer sides of the sealing covers are provided with second air outlets. The air inlets, first air outlets and second air outlets are all connected to a vacuum pump, and an air filter is installed at the connection between the air inlet and the vacuum pump. The vacuum pump is located at the front of the frame.

[0009] Preferably, a first ball bearing is rotatably mounted on the surface of the frame, and the first ball bearing is disposed in contact with the surface of the slide table;

[0010] By adopting the above technical solution, the first ball reduces the frictional resistance between the frame and the slide, making it easier for the frame to support the slide and making the slide slide more smoothly on the frame surface.

[0011] Preferably, the drive mechanism includes a worm gear, a worm, a drive shaft, a drive motor, and a gearbox. The worm gear is fixedly installed at the rear end of the gear shaft and meshes with the worm. The worm is fixedly installed on the outside of the drive shaft, and both ends of the drive shaft are rotatably connected to the gearbox. The gearbox is located on the rear side of the frame. The right end of the drive shaft is connected to the drive motor fixedly installed on the frame.

[0012] By adopting the above technical solution, the drive motor drives the drive shaft to rotate, and then the drive shaft drives all the gear shafts to rotate simultaneously through the cooperation of the worm and worm wheel.

[0013] Preferably, the slide table has a first connecting hole inside, and a first steel wire rope is installed inside the first connecting hole, and the second slide plate and the first slide plate are connected by the first steel wire rope;

[0014] By adopting the above technical solution, the first connecting hole restricts the sliding direction of the first wire rope, while the second slide plate pulls the first slide plate up through the first wire rope when sliding in the second slide groove.

[0015] Preferably, the front and rear ends of the slide table are located on the same vertical plane as the front and rear ends of the tray, and the depth of the sliding hole is greater than the length of the top column;

[0016] By adopting the above technical solution, it is easy for the top column to slide completely into the sliding hole, and then the two adjacent sliding platforms are fastened together by permanent magnets.

[0017] Preferably, the slide table has a second connecting hole inside, and a second steel wire rope is installed inside the second connecting hole, and the top column and the first slide are connected by the second steel wire rope;

[0018] By adopting the above technical solution, the second connecting hole restricts the sliding trajectory of the second wire rope, and at the same time, when the top column slides in the sliding hole, it pulls the first slide plate upward through the second wire rope.

[0019] Preferably, a support plate is welded and fixed to the inner side of the sealing cover, and a pressure sensor is fixedly installed on the surface of the support plate. A second ball bearing is rotatably installed at the bottom of the tray, and the second ball bearing is set to fit against the surface of the support plate.

[0020] By adopting the above technical solution, the second ball reduces the frictional resistance between the tray and the support plate, while the support plate supports the weight of the tray, making it easier for the pressure sensor on the support plate to detect the weight of the tray in real time.

[0021] Preferably, the distance between the electromagnet and the second sliding plate is equal to the sliding dimension of the first sliding plate in the first sliding groove, the baffle is disposed in contact with the outer side of the slide table, and the outermost edge of the first sliding plate and the outermost edge of the slide table are located on the same vertical plane;

[0022] By adopting the above technical solution, the electromagnet uses magnetic force to attract the second slide plate, causing the second slide plate to detach from the second slide groove, which facilitates the baffle to block the second slide plate and the slide table from continuing to move.

[0023] Preferably, the air inlet is located on the side away from the center of the sealing cover, and the first air outlet is located on the side close to the center of the sealing cover. The gas flow rate of the first air outlet is less than the gas flow rate of the air inlet.

[0024] By adopting the above technical solution, the air intake and exhaust volume are controlled so that the gas inside the sealing cover is saturated and stops flowing, thereby playing the role of a closed conveying device.

[0025] Compared with the prior art, the beneficial effects of the present invention are: this enclosed, dust-free semiconductor packaging and conveying device...

[0026] (1) It is equipped with a drive mechanism, pressure wheel and gear shaft. The drive motor drives the drive shaft to rotate, the worm gear on the outside of the drive shaft drives all the worm wheels to rotate, and all the gear shafts rotate at the same time. The pressure wheel squeezes the chain, so that the chain always fits the gear shaft, which greatly increases the contact area between the drive shaft and the chain, disperses the force area of ​​the chain, reduces the wear on the chain, and extends the service life of the chain.

[0027] (2) It is equipped with a slide, a toothed plate, a second slide and a top column. The slide engages with the sharp teeth on the chain through the toothed plate at the top of the first slide. The electromagnet pulls the second slide, and the second slide pulls the toothed plate to disengage from the sharp teeth. At the same time, the slide is fixed by the cooperation of the baffle and the second slide. Then the subsequent slide hits the slide that has stopped. At this time, they squeeze the top column, and the top column pulls the toothed plate to disengage from the sharp teeth, so that each slide stops on the frame in turn, which facilitates the pre-transport of materials, greatly reduces the waiting time and improves the production efficiency.

[0028] (3) It is equipped with an air inlet, a first air outlet and a vacuum pump. The vacuum pump draws air through the air inlet, and the air is filtered by the air filter to form clean air. Then the clean air is discharged into the sealed cover through the first air outlet. The above structure makes the airflow on both sides of the sealed cover regular, which prevents the outside air from being affected by eddies, turbulence and other factors and carrying dust into the sealed cover. At the same time, the sealed cover wrapped around the outside of the frame further improves the sealing effect, which facilitates long-distance material transportation and reduces the requirements for the workshop.

[0029] (4) The tray, support plate and pressure sensor: The second ball at the bottom of the tray reduces the frictional resistance between the tray and the support plate, making it easier for the tray to slide on the support plate. At the same time, the second compression spring avoids the rigid connection between the tray and the slide, making it easier for the support plate to support the weight of the tray. Then the tray moves along the support plate to the top of the pressure sensor. The weight of the tray is measured in real time during the gripping process. When the gripping fails, the slide stops conveying immediately, reducing material loss and improving the production yield. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the main cross-sectional structure of the present invention;

[0031] Figure 2 This is a side view cross-sectional structural diagram of the present invention;

[0032] Figure 3 This is a top view of the structure of the present invention;

[0033] Figure 4 This is a top view cross-sectional structural diagram of the present invention;

[0034] Figure 5 For the present invention Figure 1 Enlarged structural diagram at point A in the middle;

[0035] Figure 6 For the present invention Figure 2 Enlarged structural diagram at point B;

[0036] Figure 7 For the present invention Figure 2 Enlarged structural diagram at point C;

[0037] Figure 8 This is a schematic diagram of the three-dimensional cross-sectional structure of the slide table of the present invention.

[0038] In the diagram: 1. Frame; 2. Gear shaft; 3. Drive mechanism; 301. Worm gear; 302. Worm; 303. Drive shaft; 304. Drive motor; 305. Gearbox; 4. Chain; 5. Pointed tooth; 6. Opening; 7. Slide table; 8. Limiting slide groove; 9. Limiting post; 10. First slide groove; 11. First slide plate; 12. Gear plate; 13. First compression spring; 14. Second slide groove; 15. Second slide plate; 16. Sliding hole; 17. Top post; 18. 19. Permanent magnet; 20. Tray; 21. Second compression spring; 22. Sealing cover; 23. Baffle; 24. Electromagnet; 25. Air inlet; 26. First air outlet; 27. Second air outlet; 28. Vacuum pump; 29. ​​Air filter; 30. First connecting hole; 31. First steel wire rope; 32. Second connecting hole; 33. Second steel wire rope; 34. First ball bearing; 35. Support plate; 36. Pressure sensor; 37. Second ball bearing; 38. Pressure roller. Detailed Implementation

[0039] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0040] Please see Figure 1-8 The present invention provides a technical solution: a closed, dust-free semiconductor packaging and conveying device, such as... Figure 1 and Figure 4As shown, a gear shaft 2 is suspended inside the frame 1, and both ends of the gear shaft 2 pass through the frame 1 and are rotatably connected to it.

[0041] In a further embodiment, a first ball bearing 33 is rotatably mounted on the surface of the frame 1, and the first ball bearing 33 is disposed in contact with the surface of the slide table 7. The slide table 7 slides along the frame 1. The first ball bearing 33 reduces the frictional resistance between the slide table 7 and the frame 1, making it easier for the slide table 7 to slide.

[0042] like Figure 1 and Figure 2 As shown, a drive mechanism 3 is installed on the rear side of the frame 1, and the drive mechanism 3 is connected to the gear shaft 2. A chain 4 is meshed on the outer side of the gear shaft 2, and a sharp tooth 5 is fixed on the side of the chain 4 away from the gear shaft 2. A pressure roller 37 is rotatably installed on the inner side of the frame 1, and the pressure roller 37 cooperates with the gear shaft 2 to squeeze the chain 4.

[0043] In a further embodiment, the drive mechanism 3 includes a worm gear 301, a worm 302, a drive shaft 303, a drive motor 304, and a gearbox 305. The worm gear 301 is fixedly installed at the rear end of the gear shaft 2 and meshes with the worm 302. The worm 302 is fixedly installed on the outside of the drive shaft 303, and both ends of the drive shaft 303 are rotatably connected to the gearbox 305. The gearbox 305 is located on the rear side of the frame 1. The right end of the drive shaft 303 is connected to the drive motor 304 fixedly installed on the frame 1. The drive motor 304 drives the drive shaft 303 to rotate. The worm gear 301 and the worm 302 cooperate to drive all the gear shafts 2 to rotate. The small clearance between the worm gear 301 and the worm 302 makes the rotational deviation of all the gear shafts 2 small, thereby making the driving force on the chain 4 more synchronized.

[0044] like Figure 4 and Figure 8 As shown, there are openings 6 on the upper and lower sides of the frame 1, and a slide table 7 is slidably installed inside the opening 6.

[0045] In a further embodiment, the slide table 7 has a first connecting hole 29 inside, and a first steel wire rope 30 is provided inside the first connecting hole 29. The second slide plate 15 and the first slide plate 11 are connected by the first steel wire rope 30. When the second slide plate 15 slides, it pulls the first steel wire rope 30. The first steel wire rope 30 slides along the first connecting hole 29 and pulls the first slide plate 11 to move accordingly.

[0046] like Figure 4 As shown, the front and rear ends of the slide table 7 and the front and rear ends of the tray 19 are located on the same vertical plane. The depth dimension of the slide hole 16 is greater than the length dimension of the top column 17, so as to avoid the tray 19 from obstructing the fit between the two adjacent slide tables 7. At the same time, the top column 17 is completely retracted into the slide hole 16, which facilitates the fit and fastening between the two adjacent slide tables 7 through the permanent magnet 18.

[0047] In a further embodiment, the slide table 7 has a second connecting hole 31 inside, and a second steel wire rope 32 is provided inside the second connecting hole 31. The top column 17 and the first slide plate 11 are connected by the second steel wire rope 32. When the top column 17 slides, it pulls the second steel wire rope 32. The second steel wire rope 32 slides along the second connecting hole 31 and pulls the first slide plate 11 to move accordingly.

[0048] like Figure 1 , Figure 2 and Figure 6 As shown, the inner wall of the opening 6 has a limiting groove 8. Limiting posts 9 are fixedly installed on the front and rear sides of the slide table 7, and the limiting posts 9 are slidably installed inside the limiting groove 8. The bottom of the slide table 7 has a first groove 10, and a first slide plate 11 is slidably installed inside the first groove 10. A toothed plate 12 is fixedly installed at the bottom of the first slide plate 11, and the toothed plate 12 meshes with the sharp teeth 5. A first compression spring 13 is installed between the first slide plate 11 and the first groove 10.

[0049] like Figure 1 , Figure 5 and Figure 6 As shown, the slide table 7 has second slide grooves 14 on both sides, and a second slide plate 15 is slidably installed inside the second slide grooves 14. The slide table 7 has a slide hole 16 on the left side, and a top column 17 is slidably installed inside the slide hole 16. A permanent magnet 18 is fixedly installed on the right side of the slide table 7. A tray 19 is suspended on the top of the slide table 7, and a second compression spring 20 is installed between the tray 19 and the slide table 7.

[0050] like Figure 4 and Figure 7 As shown, sealing covers 21 are fixed on both the upper and lower sides of the frame 1, and baffles 22 and electromagnets 23 are fixedly installed on both the front and rear sides of the sealing covers 21.

[0051] In a further embodiment, a support plate 34 is welded and fixed to the inner side of the sealing cover 21, and a pressure sensor 35 is fixedly installed on the surface of the support plate 34. A second ball bearing 36 is rotatably installed at the bottom of the tray 19, and the second ball bearing 36 is set in contact with the surface of the support plate 34. The pressure sensor 35 is located near the gripping device. At this time, the tray 19 squeezes the pressure sensor 35 through the second ball bearing 36. Once it is detected that the gripping device fails to grip and the material has not left the tray 19, the conveying device is quickly stopped, which plays the role of emergency saturation material.

[0052] like Figure 1 and Figure 4As shown, the distance between the electromagnet 23 and the second slide plate 15 is equal to the sliding dimension of the first slide plate 11 in the first slide groove 10. The baffle 22 is set against the outer side of the slide table 7. The outermost edge of the first slide plate 11 and the outermost edge of the slide table 7 are located on the same vertical plane. The electromagnet 23 pulls the second slide plate 15 away from the second slide groove 14 by magnetic force. Then the baffle 22 blocks the second slide plate 15, which plays the role of blocking the slide table 7.

[0053] like Figure 2 and Figure 3 As shown, the sealing cover 21 has an air inlet 24 and a first air outlet 25 on the inner sides of both the left and right ends, and a second air outlet 26 on the outer side of the sealing cover 21.

[0054] In a further embodiment, the air inlet 24 is located on the side away from the center of the sealing cover 21, and the first air outlet 25 is located on the side close to the center of the sealing cover 21. The gas flow rate of the first air outlet 25 is less than that of the air inlet 24. By controlling the intake volume of the air inlet 24 and the exhaust volume of the first air outlet 25, the airflow direction is guided, further blocking the path of external air carrying dust into the sealing cover 21, and greatly improving the sealing effect of the sealing cover 21.

[0055] like Figure 3 As shown, the air inlet 24, the first air outlet 25 and the second air outlet 26 are all connected to the vacuum pump 27, and an air filter device 28 is installed at the connection between the air inlet 24 and the vacuum pump 27. The vacuum pump 27 is located in front of the frame 1.

[0056] In use, the material is placed on the tray 19, and the drive motor 304 is started. The drive motor 304 drives the drive shaft 303 to rotate. The drive shaft 303 drives all the gear shafts 2 to rotate through the cooperation of the worm gear 301 and the worm 302. The gear shafts 2 drive the chain 4 to rotate. The chain 4 pushes the slide table 7 through the meshing of the pointed teeth 5 and the toothed plate 12. The slide table 7 slides in the limiting groove 8 through the limiting post 9 until the slide table 7 slides next to the electromagnet 23. The electromagnet 23 is started. The electromagnet 23 pulls the second slide plate 15 through magnetic force. The second slide plate 15 slides out of the second slide plate. The groove 14 and baffle 22 prevent the second slide plate 15 and the slide table 7 from continuing to slide. At the same time, the second slide plate 15 pulls the first slide plate 11 along the first slide groove 10 through the first steel wire rope 30 until the toothed plate 12 on the first slide plate 11 disengages from the sharp teeth 5. Subsequently, the subsequent slide table 7 collides with the already stopped slide table 7, and the top column 17 inside the slide table 7 is squeezed into the sliding hole 16. At the same time, the top column 17 pulls the first slide plate 11 along the first slide groove 10 through the second steel wire rope 32 until the toothed plate 12 on the first slide plate 11 disengages from the sharp teeth 5. Simultaneously, the permanent magnet 18 causes adjacent slides 7 to come into contact, stopping all subsequent slides 7 from moving. Multiple sets of baffles 22 on the sealing cover 21 alternately operate with the electromagnet 23, releasing slides 7 as needed, facilitating real-time adjustments based on actual processing requirements. Pre-transportation also shortens the waiting time for conveying materials. During transport, the vacuum pump 27 is activated, drawing air through the air inlet 24. The air is purified by the air filter 28 and then discharged through the first air outlet 25 and the second air outlet 26, with some air exiting from the second air outlet 26. The discharge creates a difference between the inlet and outlet air inside the sealing cover 21, thereby controlling the flow trajectory of the gas. At the same time, in conjunction with the sealing cover 21, it plays the role of completely sealing and protecting the cover conveying device. When the slide table 7 is placed to the gripping device, the tray 19 above the slide table 7 contacts the support plate 34 through the second ball bearing 36. The support plate 34 supports the tray 19. At the same time, the pressure sensor 35 on the support plate 34 detects the weight of the tray 19 in real time, thereby accurately determining whether the gripping has failed. This avoids material damage caused by gripping failure, greatly improves the yield rate, and reduces production losses.

[0057] The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0058] The terms “center,” “longitudinal,” “lateral,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” and “outer,” etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are merely simplified descriptions for the convenience of describing the present invention and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of the present invention.

[0059] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A closed, dust-free semiconductor packaging conveying device, comprising a frame (1), a drive mechanism (3), a slide (7), a tray (19), and an air filter (28), characterized in that: The frame (1) is suspended inside a gear shaft (2), and both ends of the gear shaft (2) pass through the frame (1) and are rotatably connected to it. A drive mechanism (3) is installed on the rear side of the frame (1), and the drive mechanism (3) is connected to the gear shaft (2). A chain (4) is meshed on the outer side of the gear shaft (2), and sharp teeth (5) are fixed on the side of the chain (4) away from the gear shaft (2). A pressure roller (37) is rotatably installed on the inner side of the frame (1), and the pressure roller (37) cooperates with the gear shaft (2) to squeeze the chain (4). The frame (1) has openings (6) on the upper and lower sides, and a slide (7) is slidably installed inside the opening (6). The inner wall of the opening (6) has a limiting groove (8). The slide (7) has a limiting post (9) fixedly installed on the front and rear sides, and the limiting post (9) is slidably installed inside the limiting groove (8). The bottom of the slide (7) has a first groove (10), and a first slide plate (11) is slidably installed inside the first groove (10). The bottom of the first slide plate (11) has a toothed plate (12) fixedly installed, and the toothed plate (12) meshes with the sharp tooth (5). A first compression spring (13) is installed between the first slide plate (11) and the first groove (10). The slide (7) has a second slide groove (14) on both sides, and a second slide plate (15) is slidably installed inside the second slide groove (14). The slide (7) has a slide hole (16) on the left side, and a top column (17) is slidably installed inside the slide hole (16). A permanent magnet (18) is fixedly installed on the right side of the slide (7). A tray (19) is suspended above the top of the slide (7), and a second compression spring (20) is installed between the tray (19) and the slide (7). The slide (7) has a first connecting hole (29) inside, and a first steel wire rope (30) is installed inside the first connecting hole (29). The second slide plate (15) and the first slide plate (11) are connected by the first steel wire rope (30). The slide (7) has a second connecting hole (31) inside, and a second steel wire rope (32) is installed inside the second connecting hole (31). The top column (17) and the first slide plate (11) are connected by the second steel wire rope (32). The frame (1) is fixed with a sealing cover (21) on both the upper and lower sides, and a baffle (22) and an electromagnet (23) are fixedly installed on both the front and rear sides of the sealing cover (21). An air inlet (24) and a first air outlet (25) are opened on the inner side of both the left and right ends of the sealing cover (21), and a second air outlet (26) is opened on the outer side of the sealing cover (21). The air inlet (24), the first air outlet (25) and the second air outlet (26) are all connected to the vacuum pump (27), and an air filter device (28) is installed at the connection between the air inlet (24) and the vacuum pump (27). The vacuum pump (27) is located in front of the frame (1).

2. The enclosed, dust-free semiconductor packaging and conveying device according to claim 1, characterized in that: The frame (1) is rotatably mounted with a first ball (33), and the first ball (33) is set to fit against the surface of the slide (7).

3. The enclosed, dust-free semiconductor packaging and conveying device according to claim 1, characterized in that: The drive mechanism (3) includes a worm wheel (301), a worm (302), a drive shaft (303), a drive motor (304), and a gearbox (305). The worm wheel (301) is fixedly installed at the rear end of the gear shaft (2), and the worm wheel (301) meshes with the worm (302). The worm (302) is fixedly installed on the outside of the drive shaft (303), and both ends of the drive shaft (303) are rotatably connected to the gearbox (305). The gearbox (305) is located on the rear side of the frame (1). The right end of the drive shaft (303) is connected to the drive motor (304) fixedly installed on the frame (1).

4. The enclosed, dust-free semiconductor packaging and conveying device according to claim 1, characterized in that: The front and rear ends of the slide (7) are on the same vertical plane as the front and rear ends of the tray (19), and the depth dimension of the slide hole (16) is greater than the length dimension of the top column (17).

5. The enclosed, dust-free semiconductor packaging and conveying device according to claim 1, characterized in that: A support plate (34) is welded and fixed inside the sealing cover (21), and a pressure sensor (35) is fixedly installed on the surface of the support plate (34). A second ball bearing (36) is rotatably installed at the bottom of the tray (19), and the second ball bearing (36) is set in contact with the surface of the support plate (34).

6. The enclosed, dust-free semiconductor packaging conveying device according to claim 1, characterized in that: The distance between the electromagnet (23) and the second slide plate (15) is equal to the sliding dimension of the first slide plate (11) in the first slide groove (10). The baffle (22) is set to fit the outer side of the slide table (7). The outermost side of the first slide plate (11) and the outermost side of the slide table (7) are located on the same vertical plane.

7. The enclosed, dust-free semiconductor packaging and conveying device according to claim 1, characterized in that: The air inlet (24) is located on the side away from the center of the sealing cover (21), and the first air outlet (25) is located on the side close to the center of the sealing cover (21). The gas flow rate of the first air outlet (25) is less than the gas flow rate of the air inlet (24).

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