Mask plate for evaporating OLED display panel, manufacturing method thereof and display device

Abstract

The application discloses a mask plate for evaporating an OLED display panel, a manufacturing method thereof and a display device. The mask plate for evaporating the OLED display panel comprises a side edge region, wherein the mask plate further comprises at least one protrusion arranged in the side edge region, or wherein the mask unit close to the side edge region comprises a first edge and an opposite second edge located in the side edge region, the first edge and the second edge are supported on a support plate, the width of the first edge of the opening defining the to-be-evaporated region of the grid region is greater than the width of the second edge, or wherein the support plate located in the side edge region comprises at least one clamping part corresponding to the opening and being bound with the frame, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern region close to the side edge region does not wrinkle. The mask plate of the embodiment of the application can effectively improve the edge wrinkle problem in the use process of the mask plate, and has a wide application prospect.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of display. More particularly, it relates to a mask plate for evaporating OLED display panel, a manufacturing method thereof and a display device. BACKGROUND

[0002] Nowadays, the market prospect of Organic Light Emitting Diode (OLED) screen is broad, and various OLED screens are actively researched and produced by manufacturers to meet market demand. At present, the AMOLED display screen mainly uses a mask plate with a fine metal mask unit to evaporate light-emitting materials onto a display panel in a vacuum environment. The mask plate specifically includes a frame, a fine metal mask (FMM) for defining RGB sub-pixels, and a support plate for shielding a non-evaporation area and supporting the FMM. However, during evaporation, the edge of the FMM for defining the pixel area is wrinkled under the action of the edge magnetic force, resulting in evaporation color mixing at the edge and reducing product yield. SUMMARY

[0003] The present application aims to provide a mask plate and a manufacturing method thereof to solve at least one of the problems in the prior art.

[0004] To achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0005] The first aspect of the present application provides a mask plate for evaporating an OLED display panel, comprising a frame, a support plate and a plurality of mask units arranged in a first direction and supported by the support plate, the mask units having at least one grid area, the support plate being provided with a plurality of openings corresponding to the grid areas, the openings defining evaporation pattern areas of the grid areas, the mask plate comprising: a side edge area perpendicular to the first direction,

[0006] Wherein, the mask plate further comprises: at least one protrusion arranged in the side edge area, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge area does not wrinkle, or

[0007] Wherein, the mask unit close to the side edge area comprises a first edge and an opposite second edge located in the side edge area, the first edge and the second edge are supported on the support plate, the width of the first edge is greater than the width of the second edge, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge area does not wrinkle, or

[0008] Wherein, the support plate located in the side edge area comprises at least one clamping portion corresponding to the opening and bound with the frame, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge area does not wrinkle.

[0009] In some optional embodiments, the support plate comprises a protrusion protruding from a surface of the support plate away from the frame and corresponding to the opening.

[0010] In some optional embodiments, the orthographic projection of the mask unit on the support plate does not overlap with the protrusion.

[0011] In some optional embodiments, the orthographic projection of the mask unit on the support plate overlaps with the protrusion,

[0012] In some optional embodiments, the protrusion is a wedge shape, the wedge shape comprises a vertical surface extending in the thickness direction of the support plate and an inclined surface opposite to the vertical surface, and the inclined surface is away from the opening relative to the vertical surface.

[0013] In some optional embodiments, each side edge region comprises a protrusion, and a length of the protrusion in a second direction perpendicular to the first direction is equal to a length of the support plate in the second direction.

[0014] In some optional embodiments, the protrusion is a filling strip arranged on the support plate, the protrusion is arranged on a surface of the support plate away from the frame and corresponds to the opening, and the orthographic projection of the protrusion on the support plate does not overlap with the orthographic projection of the mask unit on the support plate.

[0015] In some optional embodiments, the mask unit close to the side edge region comprises a first edge and an opposite second edge located in the side edge region, and the first edge comprises a protrusion protruding from a surface of the mask unit close to the support plate and corresponding to the opening.

[0016] In some optional embodiments, the thickness of the protrusion is equal to the thickness of the mask unit.

[0017] In some optional embodiments, the side edge region comprises:

[0018] When the width of the first edge is greater than the width of the second edge, the part of the mask unit located in the side edge region is wrinkled when the mask plate is attached to the OLED display panel for evaporation, and the edge of the evaporation pattern region close to the side edge region is not wrinkled.

[0019] In some optional embodiments, each side edge region comprises a clamping portion, and a length of the clamping portion in a second direction perpendicular to the first direction is equal to a length of the support plate in the second direction, or

[0020] Each side edge region comprises a plurality of first clamping portions corresponding to the opening, and a second clamping portion arranged between the first clamping portions and corresponding to a solid between the openings.

[0021] The second aspect of the present application provides an OLED display panel, comprising: a display area and a non-display area surrounding the display area, the display area comprising an array of pixel units, and the pixel units comprising an organic light-emitting layer,

[0022] The non-display area comprises a plurality of protrusions, so that when the mask plate is attached to the OLED display panel for evaporation of the organic light-emitting layer, the protrusions are projected onto the side edge area of the mask plate, so that the part of the mask plate corresponding to the edge of the display area does not wrinkle.

[0023] The third aspect of the present application provides a manufacturing method of the mask plate described above, comprising:

[0024] Fixing the support plate on the frame;

[0025] Forming a plurality of mask plate units arranged in the first direction on the support plate and fixed to the frame;

[0026] The mask plate further comprises at least one protrusion arranged in the side edge area, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge area does not wrinkle, or

[0027] The mask unit close to the side edge area comprises a first edge and an opposite second edge located in the side edge area, and the first edge is supported on the support plate and has a width greater than that of the second edge, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge area does not wrinkle, or

[0028] The support plate located in the side edge area comprises at least one clamping portion corresponding to the opening and bound to the frame, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge area does not wrinkle.

[0029] The beneficial effects of the present application are as follows:

[0030] The present application aims at the existing problems, and provides a mask plate for evaporating OLED display panel, a manufacturing method thereof, and a display device. The protrusions are arranged in the side edge area perpendicular to the arrangement direction of the mask units. In addition, the width of the first edge of the mask unit close to the side edge area is greater than that of the opposite second edge, or the clamping portion located in the side edge area corresponds to the grid opening in the grid area and is bound to the frame, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge area does not wrinkle, and the evaporation color mixing does not occur at the edge of the evaporation pattern area during evaporation, thereby improving the yield of the display panel and having a wide application prospect. BRIEF DESCRIPTION OF DRAWINGS

[0031] The specific embodiments of the present application will be further described in detail below with reference to the accompanying drawings.

[0032] Figure 1A schematic top view of a mask template in the prior art is shown;

[0033] Figure 2 show extension Figure 1 A schematic cross-sectional view of the mask template intercepted by line AA' in the diagram;

[0034] Figure 3 The diagram shows a simulation of the deformation of the support plate under magnetic force when a photomask is attached to an OLED display panel for vapor deposition, according to existing technology.

[0035] Figure 4 A schematic top view of a mask template for evaporating an OLED display panel according to an embodiment of the present invention is shown.

[0036] Figure 5 show extension Figure 4 A schematic cross-sectional view of the mask template used for evaporating OLED display panels, taken from line BB' in the image;

[0037] Figure 6 A schematic top view of a mask template for evaporating an OLED display panel according to another embodiment of the present invention is shown;

[0038] Figure 7 A schematic cross-sectional view of a mask for evaporating an OLED display panel according to another embodiment of the present invention is shown;

[0039] Figure 8 A schematic top view of a mask template for evaporating an OLED display panel according to another embodiment of the present invention is shown;

[0040] Figure 9 show extension Figure 8 A schematic cross-sectional view of the mask used for evaporating OLED display panels, taken by line CC' in the figure;

[0041] Figure 10 Show Figure 9 A schematic enlarged view of the support plate portion shown in the figure;

[0042] Figure 11 A schematic top view of a mask template for evaporating an OLED display panel according to another embodiment of the present invention is shown;

[0043] Figure 12 show extension Figure 11 A schematic cross-sectional view of the mask template used for evaporating OLED display panels, taken from line DD' in the image;

[0044] Figure 13 A schematic top view of a mask template for evaporating an OLED display panel according to another embodiment of the present invention is shown;

[0045] Figure 14 show extension Figure 13 A schematic cross-sectional view of the mask template used for evaporating OLED display panels, taken from line EE' in the figure;

[0046] Figure 15 A schematic top view of a mask template for evaporating an OLED display panel according to another embodiment of the present invention is shown;

[0047] Figure 16 A schematic top view of a mask template for evaporating an OLED display panel according to another embodiment of the present invention is shown;

[0048] Figure 17 show extension Figure 16 The schematic cross-sectional view of the mask template used for evaporating OLED display panels, taken from line FF'. Detailed Implementation

[0049] To more clearly illustrate the present invention, the following description, in conjunction with embodiments and accompanying drawings, further explains the invention. Similar components in the drawings are indicated by the same reference numerals. Those skilled in the art should understand that the specific description below is illustrative rather than restrictive and should not be construed as limiting the scope of protection of the present invention.

[0050] It should be noted that the terms "having," "comprising," and "including" used in this invention are all open-ended, meaning that when a module is described as "having," "comprising," or "including" a first element, a second element, and / or a third element, it indicates that the module includes other elements in addition to the first, second, and / or third elements. Furthermore, the ordinal numbers "first," "second," and "third" used in this invention are not intended to define a specific order, but only to distinguish between the various parts.

[0051] In this invention, "on," "formed on," and "set on" can mean that one layer is directly formed or set on another layer, or that one layer is indirectly formed or set on another layer, meaning that there are other layers between the two layers.

[0052] like Figure 1 As shown, the existing mask template includes a frame, a support plate, and mask units. The support plate has clamps corresponding to the solid areas in the mask units. The clamps are bound to the frame to fix the support plate. Multiple mask units are arranged along the X direction. The parts of the mask units that extend beyond the support plate are welded to the frame. Multiple openings on the support plate are used to define the vapor deposition pattern area (circular openings are shown in the figure, but other shapes such as rectangles can be used in actual applications). For clarity, the outline of the OLED display panel when the mask template is attached to the OLED display panel is not shown.

[0053] likeFigure 2 As shown, when the mask plate is attached to the OLED display panel for evaporation, because there is a gap between the support plate and the display panel in the side edge area of the mask plate perpendicular to the X direction, which is consistent with the thickness s of the mask unit, under the action of the magnetic force from the display panel direction, the edge of the support plate located in the side edge area is adsorbed close to the display panel, and the support plate located in the side edge area is recessed from the display panel direction. Referring to Figure 3 As shown in the simulation diagram, under the action of the magnetic force from above, the area not fixed by the magnetic force will tilt upward toward the magnetic force direction, and the solid part between the openings of the support plate is fixed on the frame by the clamp, so that the edge of the support plate will form a wrinkle, and the wrinkle changes m relative to the normal case. Therefore, the mask unit supported on the support plate is affected by the support plate to form a wrinkle, so that the edge of the evaporation pattern area defined by the opening near the above side edge area will form a wrinkle with a height h of 1-5 μm, resulting in evaporation color mixing problem and reducing product yield.

[0054] To solve the above problems, embodiments of the present application provide a mask plate for evaporating an OLED display panel, comprising a frame, a support plate and a plurality of mask units arranged in a first direction supported by the support plate, the mask unit has at least one grid area, the support plate is provided with a plurality of openings corresponding to the grid area, and the opening defines an evaporation pattern area of the grid area, the mask plate comprises: a side edge area perpendicular to the first direction,

[0055] Wherein, the mask plate further comprises: at least one protrusion arranged in the side edge area, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge area does not form a wrinkle, or

[0056] Wherein, the mask unit close to the side edge area comprises a first edge and an opposite second edge located in the side edge area, the first edge and the second edge are supported on the support plate, and the width of the first edge is greater than the width of the second edge, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge area does not form a wrinkle, or

[0057] Wherein, the support plate located in the side edge area comprises at least one clamping part corresponding to the opening and bound with the frame, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge area does not form a wrinkle.

[0058] In the embodiment, the protrusions are arranged on the side edge regions of the mask plate perpendicular to the arrangement direction of the mask units, and the mask units close to the first side edge of the side edge regions have a width greater than that of the second side edge opposite to the first side edge, or the side edge regions are clamped by the frame and correspond to the grid openings in the grid regions, so that the edges of the evaporation pattern region close to the side edge regions do not wrinkle when the mask plate is attached to the OLED display panel for evaporation, and the edges of the evaporation pattern region do not mix colors during evaporation, thereby improving the yield of the display panel and having a wide application prospect.

[0059] In a specific example, referring to Figure 4 The mask plate for evaporating the OLED display panel in the application includes a frame 10, a support plate 20, and a plurality of mask units 30 arranged in a first direction X and supported by the support plate 20.

[0060] Each mask unit 30 has at least one grid region for defining pixels to be evaporated, and one grid opening in the grid region corresponds to one pixel point. The support plate 20 is provided with a plurality of openings 201 corresponding to the grid regions, and the openings 201 define the evaporation pattern region of the grid region, that is, the region actually completing evaporation is defined by the openings 201.

[0061] Referring to Figure 5 The mask plate includes a side edge region KK perpendicular to the first direction X, and the side edge region KK extends in a second direction Y.

[0062] In particular, in the embodiment of the application, the mask plate further includes at least one protrusion arranged in the side edge region KK, so that the edges of the evaporation pattern region close to the side edge regions do not wrinkle when the mask plate is attached to the OLED display panel for evaporation.

[0063] Specifically, continuing to refer to Figure 4 and Figure 5 The mask plate includes at least one protrusion 202-1 arranged in the side edge region KK. In this example, the support plate includes the protrusion 202-1. The protrusion protrudes from the surface of the support plate 20 away from the frame 10 and corresponds to the opening 201. The protrusion 202-1 can be made on the support plate 20 by electroplating or post-plate material etching, and the application does not limit the specific manufacturing method.

[0064] The protrusion can correspond to each opening 201 one by one, or correspond to all openings as a whole. That is, optionally, referring to Figure 6As shown, each side edge region KK of the support plate can only include one protrusion 202-2, and the length of the protrusion in the second direction Y is equal to the length of the side edge of the support plate 20 in the second direction Y. In this way, by using the protrusion 202-2 as a whole, the purpose of corresponding to the opening 201 is also achieved, while the process difficulty is reduced.

[0065] More specifically, with continued reference to Figure 4 and Figure 5 As shown, the orthogonal projection of the mask unit 30 on the support plate 20 does not overlap the protrusion 202-1, that is, the position of the protrusion 202-1 corresponds to the region where a gap is generated when the mask plate and the OLED display panel 40 are attached together for evaporation. More preferably, the thickness of the protrusion 202-1 is equal to the thickness of the mask unit 30. The thickness of the protrusion 202-1 can also be slightly lower than the thickness of the mask unit 30, for example, the thickness of the protrusion 202-1 is 2-5 μm less than the thickness of the mask unit 30. Of course, the value of the thickness of the protrusion 202-1 should not be too low so that the edge of the evaporation pattern region of the mask unit 30 defined by the opening 201 near the side edge region KK does not generate wrinkles.

[0066] It should be noted that the width of the protrusion 202-1 in the X direction is not particularly limited in the present application, as long as it can partially fill the gap so that the part of the support plate 20 located in the side edge region KK does not deform when subjected to the magnetic force. Of course, those skilled in the art can understand that the width should not be too wide, and the uniformity of the tension stress of the support plate should be considered during specific design, which will not be described here.

[0067] With this arrangement, by providing a protrusion in the region where a gap can be generated when the mask plate and the OLED display panel are attached together for evaporation, the support plate is supported in the gap region, so that the part of the support plate located in the side edge region does not tilt and warp when subjected to the magnetic force from the direction of the OLED display panel, thereby avoiding wrinkles in the corresponding evaporation pattern region of the mask unit, avoiding edge evaporation color mixing, and improving product yield.

[0068] It should be noted that it is not necessary to make a protrusion on the support plate to avoid the problem of wrinkles in the evaporation pattern region by filling the gap. Referring to Figure 7 As shown, in another alternative example, the mask plate includes a protrusion, which is a filling strip 50 provided on the support plate 20, and the protrusion 50 can be a metal strip provided on the side of the support plate away from the frame and corresponding to the opening 201. The orthogonal projection of the protrusion 50 on the support plate 20 does not overlap the orthogonal projection of the mask unit 30 on the support plate 20.

[0069] Similarly, the thickness of the protrusion 50 can also be slightly lower than the thickness of the mask unit 30, for example, the thickness of the protrusion 50 is 2-5 μm less than the thickness of the mask unit 30. Of course, the value of the thickness of the protrusion 50 cannot be too much lower than the thickness of the mask unit 30, so that the edge of the evaporation pattern area of the mask unit 30 defined by the opening 201 near the side edge region KK does not produce wrinkles.

[0070] The material of the protrusion 50 can be consistent with or inconsistent with the material of the support plate. By forming the protrusion in the form of a filling strip, another support layer can be formed on the support plate after the support plate is formed, which can reduce the process difficulty of the support plate and reduce the cost of the mask plate.

[0071] The protrusion 202-3 can correspond to each opening 201 one by one or as a whole. That is, each side edge region KK can include only one protrusion 50, and the length of the protrusion 50 in the second direction Y is equal to the length of the support plate 20 in the second direction Y. In this way, by taking the protrusion 202-2 as a whole, the purpose of corresponding to the opening 201 is also achieved, while the process difficulty is reduced.

[0072] In this way, the support plate can also be supported in the gap region, so that the part of the support plate located in the side edge region does not tilt and warp when subjected to the magnetic force from the OLED display panel, and the corresponding evaporation pattern area of the mask unit near the side edge region does not warp, thereby avoiding edge evaporation color mixing and improving product yield.

[0073] In some optional embodiments, referring to Figure 8 and Figure 9 The support plate 20 includes a protrusion 202-3, which protrudes from the surface of the support plate 20 away from the frame 10, and corresponds to the opening 201.

[0074] In this example, referring to Figure 8 and Figure 9 The orthogonal projection of the mask unit 30 on the support plate 20 overlaps the protrusion 202-3. The protrusion 202-3 is wedge-shaped, as shown in Figure 10 The wedge-shaped protrusion 202-3 includes a vertical surface in the thickness direction of the support plate 20 and an inclined surface opposite to the vertical surface, and the inclined surface is away from the opening 201 relative to the vertical surface. Optionally, the thickness of the protrusion 202-3 protruding from the surface of the support plate 20 away from the support frame is less than or equal to 10 μm. Of course, this is only exemplary, and the thickness of the protrusion can be different for different display products, and the present application is not intended to be limited.

[0075] It should be noted that the protrusion can be as shown in Figure 8The diagram shows a one-to-one correspondence between each opening 201, or a complete correspondence between the protrusion and each opening 201. That is, each side region KK can include only one protrusion, the length of which along the second direction Y is equal to the side length of the support plate 20 along the second direction Y. In this way, by treating the protrusion as a whole, the correspondence with the opening 201 is achieved, while simultaneously reducing the manufacturing complexity.

[0076] Based on the above settings, refer to Figure 9 As shown, by providing a wedge-shaped protrusion 202-3 that overlaps with the portion of the mask unit located in the side region KK in orthographic projection, when the mask is attached to the OLED display panel 40 for vapor deposition, even if the gap between the support plate 20 and the OLED display panel 40 still exists, when the support plate 20 located in the side region KK is deformed and lifted by the magnetic force from the direction of the OLED display panel 40, the inclined surface of the wedge-shaped protrusion 202-3 supports the portion of the mask unit 30 located in the side region KK, thereby preventing wrinkles from occurring on the edge of the vapor deposition pattern area of ​​the mask unit 30 near the side region KK, avoiding vapor deposition color mixing, and improving product yield.

[0077] In some alternative embodiments, refer to Figure 11 and Figure 12 As shown, the mask unit 30 near the side region KK includes a first side located in the side region KK and an opposite second side. The first side includes a protrusion 301, which protrudes from the surface of the mask unit 30 near the support plate 20 and corresponds to the opening 201. Preferably, the protrusion thickness of the protrusion 301 is consistent with the distance m that the support plate changes relative to its normal state under the influence of magnetic force when the protrusion is not provided. Figure 2 (m shown in the figure)

[0078] The protrusion can be like Figure 11 The diagram shows a one-to-one correspondence between each opening 201, or a complete correspondence between the protrusion and each opening 201. That is, each side region KK can include only one protrusion, the length of which along the second direction Y is equal to the side length of the support plate 20 along the second direction Y. In this way, by treating the protrusion as a whole, the correspondence with the opening 201 is achieved, while simultaneously reducing the manufacturing complexity.

[0079] The above settings, such as Figure 12As shown, by providing the protrusion 301 protruding from the surface of the support plate 20 in the side edge region, even if there is a gap between the support plate 20 and the OLED display panel 40 when the mask plate is attached to the OLED display panel 40 for evaporation, when the support plate 20 in the side edge region KK is deformed and raised by the magnetic force from the OLED display panel 40, the protrusion 301 fills the gap caused by the deformation of the support plate, which means that the protrusion 301 and the deformed region of the support plate form a close support when the part of the support plate in the side edge region is deformed by the magnetic force, so that the evaporation pattern area of the mask unit 30 near the edge of the side edge region KK does not wrinkle, avoiding evaporation color mixing and improving product yield.

[0080] In some optional embodiments, referring to Figure 13 and Figure 14 As shown, the mask plate for evaporating the OLED display panel includes a frame 10, a support plate 20, and a plurality of mask units 30 supported by the support plate 20 and arranged in the first direction X.

[0081] Each mask unit 30 has at least one grid region for defining pixels to be evaporated, and one mesh hole in the grid region corresponds to one pixel point. The support plate 20 is provided with a plurality of openings 201 corresponding to the grid region, and the opening 201 defines the evaporation pattern area of the grid region, that is, the specific area to be evaporated is defined by the opening 201.

[0082] Referring to Figure 13 As shown, the mask plate includes a side edge region KK perpendicular to the first direction X, and the side edge region KK extends along the second direction Y.

[0083] In particular, in this embodiment, the support plate 20 in the side edge region includes at least one clamping portion. Referring to Figure 14 As shown, the clamping portion corresponds to the opening 201 and is bound to the frame 10, so that the evaporation pattern area near the edge of the side edge region does not wrinkle when the mask plate is attached to the OLED display panel 40 for evaporation.

[0084] In particular, each side edge region KK includes a clamping portion 60, and the length of the clamping portion 60 along the second direction Y is equal to the length of the support plate along the second direction Y, wherein the second direction Y is perpendicular to the first direction X.

[0085] In this way, the support plate 20 is completely fixed on the frame 10, so that the evaporation pattern area of the mask unit 30 near the edge of the side edge region KK does not wrinkle, avoiding evaporation color mixing and improving product yield.

[0086] Further preferably, referring to Figure 15As shown, each side edge region includes a plurality of first clamping portions 60'-1 corresponding to the openings, and a plurality of second clamping portions 60'-2 arranged between the first clamping portions and corresponding to the solid portions between the openings 201.

[0087] With this arrangement, the first clamping portions 60'-1 are used to reduce the warping deformation of the edges of the support plate in the side edge regions, and the second clamping portions 60'-2 are used as a stretching clamp for the support plate to improve the tensioning force of the support plate, ensure the uniformity of the tensioning of the support plate, and ensure that sufficient tensioning ability is provided while avoiding color mixing during evaporation.

[0088] In other optional embodiments, referring to Figure 16 and Figure 17 As shown, the mask plate for evaporating an OLED display panel includes a frame 10, a support plate 20, and a plurality of mask units 31 arranged in a first direction X and supported by the support plate 20.

[0089] Each mask unit 31 has at least one grid region for defining pixels to be evaporated, and one mesh hole in the grid region corresponds to one pixel point. The support plate 20 is provided with a plurality of openings 201 corresponding to the grid regions, and the openings 201 define the evaporation pattern area of the grid region, that is, the specific area to be evaporated is defined by the openings 201.

[0090] Referring to Figure 16 As shown, the mask plate includes a side edge region KK perpendicular to the first direction X, and the side edge region KK extends along the second direction Y.

[0091] In particular, the mask units 31 near the side edge region KK include a first edge and a second edge opposite to the first edge and supported on the support plate 20, and the width a of the first edge is greater than the width b of the second edge, so that when the mask plate is attached to the OLED display panel 40 for evaporation, the evaporation pattern area near the edge of the side edge region KK does not wrinkle.

[0092] Referring to Figure 17 As shown, when the width of the first edge is greater than the width of the second edge, the part of the mask unit in the side edge region wrinkles when the mask plate is attached to the OLED display panel for evaporation, and the evaporation pattern area near the edge of the side edge region does not wrinkle.

[0093] Through the arrangement, even if the gap between the support plate 20 and the OLED display panel 40 still exists when the mask plate is attached to the OLED display panel 40 for evaporation, when the support plate 20 in the side edge region KK is deformed and warped by the magnetic force from the OLED display panel 40, because the first side in the side edge region which overlaps the support plate 20 is widened and has a width greater than the opposite second side, the part of the mask unit which is affected by the warping deformation of the support plate 20 and is wrinkled can only act on the part in the side edge region, so that the edge of the evaporation pattern region close to the side edge region KK is not affected, and the edge of the evaporation pattern region is not wrinkled, avoiding evaporation color mixing and improving product yield.

[0094] The application also provides an OLED display panel, comprising: a display area and a non-display area surrounding the display area, the display area comprising pixel units arranged in an array, the pixel units comprising an organic light-emitting layer,

[0095] The non-display area comprises a plurality of protrusions, so that when the mask plate attached to the OLED display panel is used for evaporation of the organic light-emitting layer, the part of the mask plate corresponding to the edge of the display area is not wrinkled.

[0096] Through the arrangement, a plurality of protrusions are provided in the non-display area corresponding to the side edge region of the mask plate, so that when the mask plate attached to the OLED display panel is used for evaporation of the organic light-emitting layer, the gap between the support plate of the mask plate and the OLED display panel can be filled by the protrusions, and the support force provided by the protrusions makes the part of the support plate in the side edge region not warp and deform, so that the part of the mask plate corresponding to the edge of the display area is not wrinkled, avoiding evaporation color mixing and improving product yield.

[0097] Based on the same inventive concept, the embodiments of the application also provide a manufacturing method of the mask plate described in the above embodiments, comprising:

[0098] The support plate is fixed on the frame, the mask plate unit has at least one grid region, the support plate is provided with a plurality of openings corresponding to the grid region, and the openings define the evaporation pattern region of the grid region;

[0099] A plurality of mask plate units arranged in a first direction and fixed on the frame are formed on the support plate;

[0100] The mask plate further comprises: at least one protrusion arranged in the side edge region, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern region close to the side edge region is not wrinkled, or

[0101] The mask unit close to the side edge region comprises a first edge and an opposite second edge located at the side edge region, the first edge and the second edge are supported on the support plate, and the width of the first edge is greater than the width of the second edge, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge region does not wrinkle, or

[0102] The support plate located at the side edge region comprises at least one clamping portion corresponding to the opening and bound with the frame, so that when the mask plate is attached to the OLED display panel for evaporation, the edge of the evaporation pattern area close to the side edge region does not wrinkle.

[0103] In the above manner, by improving the side edge region of the mask plate, forming a protrusion in the side edge region, and by making the width of the first edge of the mask unit formed in the side edge region greater than the opposite second edge, or by setting the clamping portion corresponding to the opening, a mask plate can be made by a simple process method, in which the edge of the evaporation pattern area close to the side edge region does not wrinkle during evaporation, thereby avoiding edge evaporation color mixing, the process steps are simple, the production cost is not improved based on the prior art, and the mask plate has a wide application prospect.

[0104] The present application aims at the existing problems, and formulates a mask plate for evaporating an OLED display panel, a manufacturing method thereof, and a display device, and a protrusion is arranged in the side edge region of the mask plate perpendicular to the arrangement direction of the mask units. In addition, by making the width of the first edge of the mask unit close to the side edge region greater than the width of the opposite second edge, or by making the clamping portion located at the side edge region corresponding to the grid opening in the grid region and bound with the frame, the edge of the evaporation pattern area close to the side edge region does not wrinkle when the mask plate is attached to the OLED display panel for evaporation, so that the edge of the evaporation pattern area does not cause evaporation color mixing during evaporation, the yield of the display panel is improved, and the mask plate has a wide application prospect.

[0105] Obviously, the above embodiments of the present application are only examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, other different forms of changes or variations can be made on the basis of the above description, and it is impossible to enumerate all the implementation modes here. Any obvious changes or variations derived from the technical solutions of the present application still fall within the protection scope of the present application.

Claims

1. A photomask for evaporating OLED display panels, characterized in that, The device includes a frame, a support plate, and a plurality of mask units arranged along a first direction and supported by the support plate. Each mask unit has at least one grid area. The support plate has a plurality of openings corresponding to the grid area, and the openings define the vapor deposition pattern area of ​​the grid area. The mask template includes a side area perpendicular to the first direction. The photomask further includes at least one protrusion in the side region, so that when the photomask is attached to the OLED display panel for vapor deposition, the edge of the vapor deposition pattern area near the side region does not wrinkle; The support plate includes the protrusion, which protrudes from the surface of the support plate away from the frame and corresponds to the opening, or The protrusion is a filler strip disposed on the support plate, the protrusion being located on the side of the support plate away from the frame and corresponding to the opening, or The mask unit near the side region includes a first side and an opposite second side located in the side region. The first side includes the protrusion, which protrudes from the surface of the mask unit near the support plate and corresponds to the opening.

2. The mask template according to claim 1, characterized in that, The support plate includes the protrusion, and the orthographic projection of the mask unit on the support plate does not overlap with the protrusion.

3. The mask template according to claim 1, characterized in that, The support plate includes the protrusion, and the orthographic projection of the mask unit on the support plate overlaps with the protrusion. The protrusion is wedge-shaped, and the wedge includes a vertical surface along the thickness direction of the support plate and an inclined surface opposite to the vertical surface, wherein the inclined surface is away from the opening relative to the vertical surface.

4. The mask template according to claim 1, characterized in that, The support plate includes the protrusion, and each side region includes one protrusion. The length of the protrusion along a second direction perpendicular to the first direction is equal to the side length of the support plate along the second direction.

5. The mask template according to claim 1, characterized in that, The protrusion is a filler strip disposed on the support plate, and the orthographic projection of the protrusion on the support plate does not overlap with the orthographic projection of the mask unit on the support plate.

6. The mask template according to claim 2 or 5, characterized in that, The thickness of the protrusion is equal to the thickness of the mask unit.

7. An OLED display panel, characterized in that, include: It includes a display area and a non-display area surrounding the display area. The display area includes an array of pixel units, and each pixel unit includes an organic light-emitting layer. The non-display area includes multiple protrusions so that when an organic light-emitting layer is deposited using a mask attached to the OLED display panel, the portion of the mask corresponding to the edge of the display area does not wrinkle.

8. A method for manufacturing a photomask according to any one of claims 1-6, characterized in that, include: The support plate is fixed on the frame. The mask unit has at least one grid area. The support plate has multiple openings corresponding to the grid area. The openings define the vapor deposition pattern area of ​​the grid area. Multiple mask template units, arranged along a first direction and fixed to the frame, are formed on the support plate; The photomask further includes at least one protrusion in the side region, so that when the photomask is attached to the OLED display panel for vapor deposition, the edge of the vapor deposition pattern area near the side region does not wrinkle; The support plate includes the protrusion, which protrudes from the surface of the support plate away from the frame and corresponds to the opening, or The protrusion is a filler strip disposed on the support plate, the protrusion being located on the side of the support plate away from the frame and corresponding to the opening, or The mask unit near the side region includes a first side and an opposite second side located in the side region. The first side includes the protrusion, which protrudes from the surface of the mask unit near the support plate and corresponds to the opening.

Images