Box door mechanism and storage box

Abstract

The application provides a box door mechanism and a storage box, and relates to the technical field of wafer storage equipment, and aims to solve the problem that the positioning structure on the box door cannot adapt to wafers of different radial sizes, causing the wafers to shake or be deformed and damaged due to excessive pressure. The box door mechanism is used for the storage box and comprises a door body and a plurality of positioning components. The plurality of positioning components are arranged on the side of the door body facing the storage box along a first direction, and the positioning components comprise positioning pieces and adjusting pieces. The positioning pieces extend along a second direction, and the two ends of the positioning pieces are connected with the door body, respectively. The adjusting pieces are arranged correspondingly with the positioning pieces, and the adjusting pieces can move towards or away from the storage box to push the positioning pieces to move towards or away from the storage box.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer storage equipment, in particular to a box door mechanism and a storage box. BACKGROUND

[0002] In the process of wafer transfer and transportation, the wafer needs to be placed in a wafer storage box for storage. In the existing storage box, a positioning structure is arranged on the inner side of the box door, so that the wafer in the interior can be pressed in the radial direction after the box door is closed, thereby ensuring the stability of the wafer.

[0003] However, since the radial dimension of the wafer will change after production, it is impossible to ensure that the dimensions of all wafers in the storage box remain consistent. Therefore, once the radial dimension of the wafer is reduced or enlarged, the positioning structure cannot press the wafer or the pressing force is too large, thereby causing the wafer to shake or be damaged.

[0004] Therefore, it is urgent to provide a box door mechanism and a storage box to solve the problems in the prior art to some extent. SUMMARY

[0005] The present application aims to provide a box door mechanism and a storage box to solve the problems of wafer outer diameter fluctuation, positioning structure on the box door unable to adapt to wafers of different radial dimensions, wafer shaking or excessive pressure deformation and damage.

[0006] The box door mechanism provided by the present application is used for a storage box and comprises a door body and a plurality of positioning assemblies. The positioning assemblies are arranged at intervals along a first direction on the side of the door body facing the storage box. The positioning assemblies comprise positioning members and adjusting members. The positioning members extend along a second direction, and the two ends of the positioning members are connected to the door body. The adjusting members are arranged correspondingly to the positioning members, and the adjusting members can move towards or away from the storage box to push the positioning members to move towards or away from the storage box.

[0007] The positioning members comprise positioning ribs and positioning blocks. The positioning ribs comprise first connecting segments, second connecting segments and mounting segments. The first connecting segments and the second connecting segments are arranged at the two ends of the mounting segments, respectively. The ends of the first connecting segments and the second connecting segments away from the mounting segments are connected to the door body. The first connecting segments, the second connecting segments and the mounting segments are all arranged at an angle. The positioning blocks are arranged on the mounting segments.

[0008] Specifically, the door body comprises a main body and a positioning frame, the positioning frame is located on the side of the main body facing the storage box, the positioning member is located in the frame-shaped space formed by the positioning frame, the adjusting member is located outside the frame-shaped space, and the positioning member and the adjusting member are oppositely arranged; the adjusting member comprises a bending segment and an adjusting segment, the inner wall surface of the positioning frame is formed with a clamping groove, one end of the bending segment is connected with the positioning frame, the other end is connected with the adjusting segment, the bending segment can bypass the positioning frame, so that the adjusting segment pushes the positioning member to move in the direction close to the storage box, and the adjusting segment can be embedded in the clamping groove, so that the adjusting segment always abuts against the positioning member.

[0009] Further, the adjusting member further comprises an abutting segment, the abutting segment is located between the bending segment and the adjusting segment, when the adjusting segment is embedded in the clamping groove, the abutting segment abuts against the side wall of the positioning frame.

[0010] Wherein, the side of the positioning block facing the inside of the storage box is formed with a positioning groove for carrying the wafer in the storage box.

[0011] Specifically, the positioning groove is in V-shaped structure.

[0012] Further, the positioning groove comprises a guide part and a carrying part, the guide part is in V-shaped structure, and the carrying part is in arc-shaped structure.

[0013] Further, the first connecting segment, the second connecting segment and the mounting segment are made of soft material.

[0014] In actual application, the number of positioning blocks is at least two, and the two positioning blocks are oppositely arranged at the two ends of the mounting segment.

[0015] Compared with the prior art, the box door mechanism provided by the application has the following advantages:

[0016] The box door mechanism provided by the application is used for a storage box, comprising a door body and a plurality of positioning assemblies, the positioning assemblies are arranged on the side of the door body facing the storage box along a first direction, and the positioning assembly comprises a positioning member and an adjusting member, the positioning member extends along a second direction, and the two ends of the positioning member are connected with the door body, the adjusting member is arranged correspondingly with the positioning member, and the adjusting member can move towards or away from the storage box to push the positioning member to move towards or away from the storage box.

[0017] From the analysis, it can be seen that the positioning assembly arranged at intervals along the first direction of the door body can provide pressure to the wafer carried in the box body after the door body closes the box body, so as to compress the wafer in the radial direction of the wafer. Since the positioning assembly in the application includes a positioning member and an adjusting member, and the two ends of the positioning member are connected with the door body respectively, the adjusting member can move towards or away from the box body, so that the movement of the positioning member towards or away from the box body can be realized through the adjusting member, and then when the diameter of the wafer decreases, the positioning member can be moved towards the box body to compress the wafer at the corresponding position in the box body, thereby improving the stability of the wafer.

[0018] Since the adjusting member and the positioning member are arranged correspondingly in the application, the positioning member at the corresponding position can be adjusted to compress the wafer at the corresponding position, so as to ensure the stability of all wafers in the box body.

[0019] In addition, the application also provides a box body, which comprises a box body and the box door mechanism described above; the box door mechanism is rotationally connected with the box body.

[0020] When the box body provided with the box door mechanism is installed, the box door mechanism is rotationally connected with the box body, so that the box body can be opened and closed. Since the box door mechanism has a positioning assembly that can move towards or away from the box body, the wafer carried in the box body can be better compressed, and the stability of the wafer in the box body can be ensured. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the specific embodiments of the application or the technical solutions in the prior art, the drawings needed in the specific embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0022] Figure 1 The structure schematic diagram of the box door mechanism from the first perspective for the embodiment of the application is provided;

[0023] Figure 2 The structure schematic diagram of the adjusting member in the expanded state in the box door mechanism for the embodiment of the application is provided;

[0024] Figure 3 The structure schematic diagram of the adjusting member in the installed state in the box door mechanism for the embodiment of the application is provided;

[0025] Figure 4 The structure schematic diagram of the adjusting member in the expanded state from the first perspective for the embodiment of the application is provided;

[0026] Figure 5 A structure schematic view of a first perspective of an installation state of an adjusting piece in a box door mechanism provided by an embodiment of the present application.

[0027] In the figure: 1 - main body; 2 - positioning frame; 201 - clamping groove; 3 - positioning assembly; 301 - positioning piece; 3011 - positioning rib; 3012 - positioning block; 3013 - first connecting section; 3014 - second connecting section; 3015 - installation section; 3016 - guide portion; 3017 - bearing portion; 302 - adjusting piece; 3021 - bending section; 3022 - abutting section; 3023 - adjusting section; 4 - wafer; 5 - box body;

[0028] S1 - first direction; S2 - second direction. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work belong to the scope of protection of the present application.

[0030] In the description of the embodiments of the present application, it should be noted that the orientations or positional relationships indicated by the terms “up”, “down”, “left”, “right”, “vertical”, “horizontal”, “inner”, “outer” and the like are based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships of the product of the present application when it is usually placed, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms “first”, “second”, “third” and the like are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.

[0031] In addition, the terms “horizontal”, “vertical” and the like do not mean that the components must be absolutely horizontal or vertical, but can be slightly inclined. For example, “horizontal” only means that its direction is relatively more horizontal than “vertical”, and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0032] In the description of the embodiments of the present application, it should be noted that unless specifically stated and defined otherwise, the terms "set", "mounted", "connected", "connected", "connected" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal connection of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0033] As used herein, the term "and / or" includes any one of the listed related items and any combination of any two or more of the listed items.

[0034] For ease of description, spatial relationship terms such as "on", "upper", "below" and "lower" can be used herein to describe the relationship of one element to another element as shown in the drawings. Such spatial relationship terms are intended to include the orientation depicted in the drawings in addition to different orientations of the device in use or operation.

[0035] The terms used herein are only used to describe various examples and are not intended to limit the present disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms "include", "contain" and "have" enumerate the presence of the stated features, quantities, operations, components, elements and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements and / or combinations thereof.

[0036] Due to manufacturing techniques and / or tolerances, variations in the shapes of the illustrated structures can occur. Therefore, the examples described herein are not limited to the specific shapes illustrated in the drawings, but include variations in the shapes that occur during manufacturing.

[0037] The features of the examples described herein can be combined in various ways as will be apparent after the disclosure of the present application is understood. In addition, although the examples described herein have various configurations, other configurations are possible as will be apparent after the disclosure of the present application is understood. In addition, the technical solutions of various embodiments can be combined with each other, but it must be based on the fact that a person skilled in the art can realize it, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, nor within the scope of protection claimed by the present application.

[0038] As Figures 1-5As shown, the present application provides a box door mechanism for a storage box, comprising a door body and a plurality of positioning assemblies 3, the plurality of positioning assemblies 3 are arranged at intervals along a first direction S1 on the side of the door body facing the storage box, and the positioning assembly 3 comprises a positioning piece 301 and an adjusting piece 302, the positioning piece 301 extends along a second direction S2, and the two ends of the positioning piece 301 are respectively connected with the door body, the adjusting piece 302 is arranged correspondingly with the positioning piece 301, and the adjusting piece 302 can move towards or away from the storage box to push the positioning piece 301 to move towards or away from the storage box.

[0039] Compared with the prior art, the box door mechanism provided by the present application has the following advantages:

[0040] The box door mechanism provided by the present application can provide pressure for the wafer 4 carried in the box body 5 after the door body closes the storage box through the positioning assembly 3 arranged at intervals along the first direction S1 of the door body, so as to compress the wafer 4 in the radial direction of the wafer 4. Since the positioning assembly 3 in the present application comprises the positioning piece 301 and the adjusting piece 302, and the two ends of the positioning piece 301 are respectively connected with the door body, the adjusting piece 302 can move towards or away from the storage box, so that the movement of the positioning piece 301 towards or away from the storage box can be realized through the adjusting piece 302, and then when the diameter of the wafer 4 decreases, the positioning piece 301 can be moved towards the storage box to compress the wafer 4 at the corresponding position in the storage box, thereby improving the stability of the wafer 4.

[0041] Since the adjusting piece 302 in the present application is arranged correspondingly with the positioning piece 301, the compression position of the positioning piece 301 at the corresponding position can be adjusted according to the diameter of the wafer 4 at different positions in the storage box, so as to ensure the stability of all wafers 4 in the storage box.

[0042] Among them, as Figure 2 Combined Figure 3 As shown, the positioning piece 301 in the present application comprises a positioning rib 3011 and a positioning block 3012, the positioning rib 3011 comprises a first connecting section 3013, a second connecting section 3014 and a mounting section 3015, the first connecting section 3013 and the second connecting section 3014 are arranged at the two ends of the mounting section 3015 respectively, and the ends of the first connecting section 3013 and the second connecting section 3014 away from the mounting section 3015 are connected with the door body, and the first connecting section 3013 and the second connecting section 3014 are both arranged at an angle with the mounting section 3015; the positioning block 3012 is arranged on the mounting section 3015.

[0043] By arranging the first connecting section 3013 and the second connecting section 3014 at an angle with the mounting section 3015, and as Figure 2 Combined Figure 3As shown, the first connecting section 3013 and the second connecting section 3014 in the present application both extend to the direction of entering the storage box, so that the mounting section 3015 protrudes from the plane where the positioning frame 2 is located, that is, the mounting section 3015 can be located in the bearing space of the storage box after the box door mechanism is closed, thereby realizing the compression of the wafer 4.

[0044] Correspondingly, by arranging the positioning block 3012 on the mounting section 3015, the wafer 4 can be positioned by the positioning block 3012, thereby ensuring the stability of the corresponding wafer 4.

[0045] It can be understood that, since the wafers 4 are arranged in the storage box in the vertical direction, the first direction S1 in the present application is the vertical direction in actual application, and the second direction S2 is the width direction of the storage box, so that the wafers 4 at the corresponding horizontal height in the storage box can be more stable by arranging the plurality of positioning assemblies 3 in the first direction S1.

[0046] Preferably, the first connecting section 3013, the second connecting section 3014 and the mounting section 3015 in the present application are all made of soft materials such as plastic, which have certain strength and elasticity, so that when the adjusting piece 302 excessively adjusts the positioning piece 301, the positioning block 3012 can move a certain distance away from the wafer 4 under the abutting force of the wafer 4 through the deformation of the first connecting section 3013, the second connecting section 3014 and the mounting section 3015, thereby avoiding the problem that the wafer 4 is deformed or broken due to excessive pressure of the positioning piece 301 on the wafer 4.

[0047] The positioning block 3012 in the present application can be provided with one, and one positioning block 3012 is arranged at the center position of the mounting section 3015, thereby ensuring the stable positioning of the wafer 4. Further preferably, the number of the positioning block 3012 in the present application is at least two, and the two positioning blocks 3012 are arranged opposite to each other at the two ends of the mounting section 3015.

[0048] By arranging two positioning blocks 3012 at the two ends of the mounting section 3015, the wafer 4 can be more uniformly stressed, thereby avoiding the problem that the positioning block 3012 deviates after abutting against the wafer 4.

[0049] Specifically, as shown in FIG. 6, the positioning block 3012 is arranged at the center position of the mounting section 3015, and the mounting section 3015 is arranged in the bearing space of the storage box. Figure 1 Combined with Figure 2 and Figure 3As shown, the door body in the application includes a main body 1 and a positioning frame 2, the positioning frame 2 is located on the side of the main body 1 facing the storage box, a positioning piece 301 is located in the frame-shaped space formed by the positioning frame 2, an adjusting piece 302 is located outside the frame-shaped space, and the positioning piece 301 and the adjusting piece 302 are oppositely arranged; the adjusting piece 302 includes a bending section 3021 and an adjusting section 3023, the inner wall surface of the positioning frame 2 is formed with a clamping groove 201, one end of the bending section 3021 is connected with the positioning frame 2, the other end is connected with the adjusting section 3023, the bending section 3021 can bypass the positioning frame 2, so that the adjusting section 3023 pushes the positioning piece 301 to move in the direction close to the storage box, and the adjusting section 3023 can be embedded in the clamping groove 201, so that the adjusting section 3023 always abuts against the positioning piece 301.

[0050] The bending section 3021 in the application can be made of rubber or plastic material, and can automatically return to the initial position after the adjusting section 3023 is separated from the clamping groove 201.

[0051] Preferably, as Figure 4 In combination Figure 5 As shown, the adjusting piece 302 in the application further includes an abutting section 3022, which is located between the bending section 3021 and the adjusting section 3023, and abuts against the side wall of the positioning frame 2 when the adjusting section 3023 is embedded in the clamping groove 201.

[0052] Through the abutting section 3022 located between the adjusting section 3023 and the bending section 3021, the position of the adjusting section 3023 embedded in the clamping groove 201 can be limited, the stability of the position of the adjusting section 3023 is improved, and the problem of movement of the adjusting section 3023 is avoided.

[0053] Optionally, as Figure 2 In combination Figure 3 As shown, the positioning block 3012 in the application is formed with a positioning groove on the side facing the inside of the storage box, for carrying the wafer 4 in the storage box.

[0054] Through the formed positioning groove, the contact area between the positioning block 3012 and the end of the wafer 4 can be increased, so as to improve the stability of the wafer 4.

[0055] Preferably, as Figure 2 In combination Figure 3 As shown, the positioning groove in the application is in V-shaped structure, and further preferably, the positioning groove includes a guide part 3016 and a carrying part 3017, the guide part 3016 is in V-shaped structure, and the carrying part 3017 is in arc-shaped structure.

[0056] The V-shaped guide part 3016 can guide the end of the wafer 4 when the box door mechanism is closed, and the arc-shaped structure of the bearing part 3017 can improve the matching between the bearing part 3017 and the end of the wafer 4, improve the positioning stability of the wafer 4, and avoid axial movement of the wafer 4.

[0057] In addition, the application further provides a storage box comprising a box body 5 and the box door mechanism.

[0058] The storage box with the box door mechanism provided by the application is rotatably connected with the box body 5 during installation, so that the box body 5 can be opened and closed. Since the box door mechanism has the positioning assembly 3 that can move towards or away from the box body 5, the wafer 4 stored in the box body 5 can be better pressed, and the stability of the wafer 4 in the box body 5 is ensured.

[0059] The above only describes the preferred embodiments of the application and is not intended to limit the application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the application shall be included in the protection scope of the application.

Claims

1. A door mechanism for storing boxes, characterized in that, The device includes a door and multiple positioning components. The multiple positioning components are spaced apart along a first direction on the side of the door facing the storage box. Each positioning component includes a positioning element and an adjusting element. The positioning element extends along a second direction and its two ends are respectively connected to the door. The adjusting element is correspondingly arranged with the positioning element and is capable of moving in or away from the storage box to push the positioning element in or away from the storage box. The adjusting element includes a bending section and an adjustment section. The bending section causes the adjustment section to push the positioning element in a direction closer to the storage box.

2. The door mechanism according to claim 1, characterized in that, The positioning component includes a positioning rib and a positioning block. The positioning rib includes a first connecting segment, a second connecting segment and an installation segment. The first connecting segment and the second connecting segment are respectively disposed at both ends of the installation segment, and the ends of the first connecting segment and the second connecting segment away from the installation segment are connected to the door body. The first connecting segment and the second connecting segment are both set at an angle to the installation segment. The positioning block is disposed on the installation section.

3. The door mechanism according to claim 1, characterized in that, The door body includes a main body and a positioning frame. The positioning frame is located on the side of the main body facing the storage box. The positioning component is located within the frame-shaped space formed by the positioning frame. The adjusting component is located outside the frame-shaped space, and the positioning component and the adjusting component are arranged opposite to each other. The inner wall of the positioning frame has a snap-fit ​​groove. One end of the bent section is connected to the positioning frame, and the other end is connected to the adjustment section. The bent section can bypass the positioning frame, and the adjustment section can be embedded in the snap-fit ​​groove, so that the adjustment section always abuts against the positioning element.

4. The door mechanism according to claim 3, characterized in that, The adjusting member further includes an abutting section located between the bending section and the adjusting section. When the adjusting section is embedded in the snap-fit ​​groove, the abutting section abuts against the side wall of the positioning frame.

5. The door mechanism according to claim 2, characterized in that, The positioning block has a positioning groove on the side facing the inside of the storage box, which is used to support the wafers inside the storage box.

6. The door mechanism according to claim 5, characterized in that, The positioning groove has a V-shaped structure.

7. The door mechanism according to claim 6, characterized in that, The positioning groove includes a guide portion and a support portion. The guide portion has a V-shaped structure, and the support portion has an arc-shaped structure.

8. The door mechanism according to claim 2, characterized in that, The first connecting segment, the second connecting segment, and the mounting segment are all made of soft material.

9. The door mechanism according to claim 2, characterized in that, The number of positioning blocks is at least two, and the two positioning blocks are disposed opposite each other at both ends of the mounting section.

10. A storage box, characterized in that, It includes a housing and a door mechanism as described in any one of claims 1-9; the door mechanism is rotatably connected to the housing.

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