Workpiece holding system and workpiece holding device

Abstract

A workpiece holding system (10) includes: a suction stage (12) formed with one or more suction holes (20) for suctioning a load placed on an upper surface; and a workpiece holding device (16) placed on the suction stage (12) and holding a workpiece (100), the workpiece holding device (16) having: a base (30) placed on the suction stage (12); a holding stage (32) for placing the workpiece (100) and capable of changing a posture with respect to the base (30); a suction passage (38) communicating with the suction hole (20); and an actuator (34) driven by air pressure generated by suction or supply of air through the suction passage (38) and changing the posture of the holding stage (32).

Description

TECHNICAL FIELD

[0001] A workpiece holding device that rotatably holds a workpiece, and a workpiece holding system having the workpiece holding device are disclosed in the present specification. BACKGROUND

[0002] Since long ago, a suction stage that suction-holds a workpiece has been known. The suction stage is formed with one or more suction holes. A suction pump is connected to the suction holes. And, the suction pump is driven in a state where the workpiece is placed on the suction stage, to block the suction holes, thereby suction-holding the workpiece.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT DOCUMENTS

[0005] Patent Document 1: Japanese Patent Laid-Open No. 2021-110558 SUMMARY OF THE INVENTION

[0006] PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] However, depending on the content of the processing performed on the workpiece, the posture of the workpiece is sometimes changed during the processing. For example, sometimes the workpiece is photographed multiple times while changing the posture of the workpiece, and the workpiece is inspected based on the multiple images obtained. In the case where the inspection is to be performed using a general suction stage, the suction must be temporarily released and the posture of the workpiece must be changed each time the photographing is performed, which is very troublesome.

[0008] Therefore, it is also conceivable to change the posture of the workpiece by adding a dedicated power source (for example, a motor or an electromagnetic cylinder, etc.). However, the addition of the power source as described above leads to an increase in cost.

[0009] Further, in Patent Document 1, there is disclosed an inspection system having a sliding stage. With the inspection system, the position of the workpiece can be changed. However, in Patent Document 1, the sliding stage is manually slid. Therefore, in order to change the position of the workpiece placed on the sliding stage, manual operation by an operator is required, which is still troublesome.

[0010] Therefore, in the present specification, a workpiece holding system and a workpiece holding device in which the posture of a workpiece can be changed without adding a dedicated power source are disclosed.

[0011] TECHNICAL MEANS FOR SOLVING THE PROBLEMS

[0012] The workpiece holding system disclosed in the present specification is characterized by including a suction stage formed with one or more suction holes for suctioning a load placed on an upper surface, and a workpiece holding device placed on the suction stage and holding a workpiece, wherein the workpiece holding device has a base placed on the suction stage, a holding stage for placing the workpiece and capable of changing a posture with respect to the base, a suction passage communicating with the suction hole, and an actuator driven by air pressure generated by suction or supply of air through the suction passage and changing the posture of the holding stage.

[0013] In this case, the holding stage can be provided to be rotatable around an up-down direction axis, and the actuator can rotate the holding stage by receiving the air pressure.

[0014] Further, the actuator can include a cylinder that extends or contracts by receiving the air pressure.

[0015] Further, the actuator can include a ratchet gear that rotates in only one direction as the cylinder extends or contracts, and the holding stage can rotate together with the ratchet gear.

[0016] Further, the workpiece holding system of the present application can further include a tilting mechanism that tilts the holding stage with respect to the base.

[0017] In this case, the workpiece holding system of the present application can further include a tool head provided on an upper side of the suction stage and capable of being raised and lowered with respect to the suction stage to perform a prescribed process on the workpiece, and the tilting mechanism can have a force point portion that is a lever capable of swinging around a horizontal axis and capable of being pressed by the tool head, and an action point portion located on an opposite side of the force point portion across the horizontal axis and pushing up the holding stage by pressing the force point portion.

[0018] Further, the bottom surface of the holding stage can have a first bottom surface portion tilted at a first angle and a second bottom surface portion tilted at a second angle different from the first angle, and a slope of an upper surface of the suction stage can change in a case of pushing up the first bottom surface portion and in a case of pushing up the second bottom surface portion.

[0019] Further, the workpiece holding system of the present application can include a reference surface that rotates together with the holding stage and does not tilt even if a slope of the holding stage is changed, and one or more magnetic elements can be provided on a bottom surface of the holding stage and the reference surface, respectively, and the one or more magnetic elements can maintain a tilted state of the holding stage by mutual magnetic suction.

[0020] The workpiece holding device disclosed in the present specification is placed on a suction stage and holds a workpiece. The workpiece holding device can also include a base placed on the suction stage, a holding stage for placing the workpiece and capable of changing a posture with respect to the base, a suction passage communicating with a suction hole formed in the suction stage, and an actuator driven by air pressure generated by suction or supply of air through the suction passage and changing the posture of the holding stage.

[0021] Effects of the Invention

[0022] According to the technology disclosed in the present specification, the posture of a workpiece can be changed without adding a dedicated power source. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is a diagram showing the schematic structure of a workpiece holding system 10.

[0024] Figure 2 is a plan view of the workpiece holding device 16.

[0025] Figure 3 is a cross-sectional view of the workpiece holding device 16 taken along line A-A of Figure 2

[0026] Figure 4 is a cross-sectional view of the workpiece holding device 16 taken along line B-B of Figure 2

[0027] Figure 5 is a cross-sectional view of the workpiece holding device 16 taken along line B-B of Figure 2

[0028] is a diagram showing the schematic structure of a cylinder. Figure 6

[0029] is a diagram showing the extraction of a swing block and a ratchet gear. Figure 7

[0030] is a diagram showing the operation of a swing block and a ratchet gear. Figure 8

[0031] is a diagram showing the inclination of a tilt lever from the direction C of Figure 9 Figure 2

[0032] [Explanation of Symbols]

[0033] 10: Workpiece holding system

[0034] 12: Suction stage

[0035] 14: Inspection head

[0036] 16: Workpiece holding device

[0037] 18: Controller ​​​​

[0038] 18a: processor

[0039] 18b: memory

[0040] 20: suction hole

[0041] 22: suction pump

[0042] 23: atmospheric pressure release valve

[0043] 24: inspection camera

[0044] 26: pressing body

[0045] 30: base

[0046] 32: holding stage

[0047] 34: actuator

[0048] 38: suction passage

[0049] 40: fixing bolt

[0050] 42: rotation shaft

[0051] 43: one-way clutch

[0052] 46: placement surface

[0053] 48: stage swing shaft

[0054] 50f: first bottom surface portion

[0055] 50s: second bottom surface portion

[0056] 60: cylinder

[0057] 62: cylinder tube

[0058] 64: piston

[0059] 66: piston rod

[0060] 70: suction port

[0061] 72: open port

[0062] 74: auxiliary spring

[0063] 76: link plate

[0064] 78: advance and retreat rod

[0065] 80: swing block

[0066] 81: block swing shaft

[0067] 82: ratchet pin

[0068] 83, 98: spring

[0069] 84a: reference surface

[0070] 84: ratchet gear

[0071] 88: support member

[0072] 90: tilt bar

[0073] 92: bar swing axis

[0074] 94: force point portion

[0075] 96: action point portion

[0076] 100: workpiece DETAILED DESCRIPTION

[0077] Hereinafter, the workpiece holding system 10 will be described with reference to the drawings. Figure 1 is a diagram showing the schematic structure of the workpiece holding system 10. Also, Figure 2 is a plan view of the workpiece holding device 16.

[0078] The workpiece holding system 10 is a system that holds a workpiece 100 and can change the posture of the workpiece 100. The workpiece holding system 10 of the present example is incorporated into an inspection device that inspects the quality of the workpiece 100 based on a captured image of the workpiece 100. Therefore, part of the constituent elements of the workpiece holding system 10 are as follows, and directly use the constituent elements of the inspection device.

[0079] The workpiece holding system 10 includes a suction stage 12, an inspection head 14, a workpiece holding device 16, and a controller 18. The suction stage 12 is a stage that suction-holds an object placed on its upper surface. One or more suction holes 20 are formed in the suction stage 12. The suction holes 20 are connected to a suction pump 22. By driving the suction pump 22, a vacuum suction force is applied to the suction holes 20, whereby an object placed on the upper surface of the suction stage 12 can be suction-held. Also, an atmospheric pressure release valve 23 is provided between the suction holes 20 and the suction pump 22. By stopping the driving of the suction pump 22 and opening the atmospheric pressure release valve 23, the suction of the object can be released. The suction stage 12 is originally provided in the inspection device. In the inspection device, the workpiece 100 to be inspected is usually placed on the suction stage 12, but in the present example, the workpiece holding device 16 is placed on the suction stage 12, and the workpiece 100 is held by the workpiece holding device 16. The reason for making such a structure will be described later.

[0080] The inspection head 14 is provided on the upper side of the suction stage 12. The inspection head 14 functions as a tool head having a tool that performs processing on the workpiece 100. In the present example, the inspection head 14 has, as a tool, an inspection camera 24 that takes an image of the workpiece 100. The inspection camera 24 has a downward optical axis and takes an image of the workpiece 100 held by the workpiece holding device 16.

[0081] The inspection head 14 is movable in the horizontal and vertical directions by a movement mechanism not shown. The inspection head 14 is also provided in the inspection apparatus as it is. In the present example, however, a pressing body 26 is further provided in the inspection head 14. The pressing body 26 is a rod-shaped member that protrudes greatly downward, and the lower end of the pressing body 26 is located further downward than the lower end of the inspection camera 24. The pressing body 26 is provided for pressing the force point portion 94 of the tilt rod 90 (see FIG. 4) described below. Figure 2

[0082] The workpiece holding device 16 is a device that holds the workpiece 100 and changes the posture of the workpiece 100. The workpiece holding device 16 has a holding stage 32 that is rotatable and swingable with respect to the suction stage 12. The workpiece 100 that is the inspection target is placed on the holding stage 32. The mechanism that rotates and swings the holding stage 32 will be described below.

[0083] The controller 18 controls the driving of the suction pump 22 and the inspection head 14, the inspection camera 24, and analyzes the image obtained by the inspection camera 24 to judge the quality of the workpiece 100. The controller 18 is physically a computer having a processor 18a and a memory 18b. The controller 18 is also provided in the inspection apparatus as it is.

[0084] Next, the structure of the workpiece holding device 16 will be described in detail. When the workpiece holding device 16 is used, the workpiece holding device 16 is placed on the suction stage 12. The workpiece holding device 16 has a base 30, a holding stage 32, an actuator 34 that rotates the holding stage 32, and a tilt mechanism that swings the holding stage 32.

[0085] The base 30 is a plate that is placed on the upper surface of the suction stage 12. As shown in FIG. 2, the base 30 has a circular hole 36 that is formed in the center of the plate. The holding stage 32 is rotatable and swingable with respect to the base 30. The holding stage 32 is provided with a circular hole 38 that is coaxial with the circular hole 36 of the base 30. Figure 2 ​As shown, the outer shape of the base 30 is larger than that of the suction stage 12, and the base 30 completely covers the suction stage 12 from the upper side. The base 30 is fixed to the suction stage 12 by fixing bolts 40. Further, in this example, the base 30 is made larger than the suction stage 12, but as long as the base 30 covers at least one suction hole 20, the shape and size thereof can be appropriately changed. For example, in a case where two suction holes 20 are formed in the suction stage 12, the base 30 can also be made in a shape that covers only one suction hole 20 and does not cover the other suction hole 20. In this case, in order to prevent air leakage, as long as some kind of closing member (for example, an adhesive tape that plugs the suction hole 20, etc.) is arranged in the suction hole 20 that is not covered, it is acceptable.

[0086] Further, as shown in Figure 1 , a communication hole 38a that penetrates in the thickness direction is formed in the base 30. The communication hole 38a is formed at a position that communicates with the suction hole 20 when the base 30 is fixed to the suction stage 12. A relay port 38b is inserted into the upper end opening of the communication hole 38a, and a connection pipe 38c is further connected to the relay port 38b. A passage that communicates the communication hole 38a with the connection pipe 38c is formed inside the relay port 38b. Hereinafter, the passage that includes the communication hole 38a, the relay port 38b, and the connection pipe 38c is referred to as a suction passage 38.

[0087] The holding stage 32 is a stage on which the workpiece 100 is placed. In this example, the workpiece 100 is adhered to the upper surface (hereinafter referred to as "placement surface 46") of the holding stage 32. The holding stage 32 is formed in a shape as the central portion when a circular plate is divided into three in the diameter direction, as shown in Figure 2 . In other words, the holding stage 32 is a substantially rectangular shape in which the upper edge and the lower edge are circular arc shapes in plan view.

[0088] The holding stage 32 is rotatable around a vertical axis, and is swingable around a horizontal axis. With reference to Figure 2 , Figure 3 , a description will be given. Figure 3 is Figure 2 an A-A cross-sectional view. As shown in Figure 2 , Figure 3 , a ratchet gear 84 is arranged on the lower side of the holding stage 32. Two support members 88 are erected from the upper surface (hereinafter referred to as "reference surface 84a") of the ratchet gear 84. The two support members 88 are arranged on both sides in the horizontal direction of the holding stage 32. In other words, the holding stage 32 is in a state of being sandwiched between the pair of support members 88 in plan view. Each support member 88 has a stage swing axis 48 that protrudes in the horizontal direction. The holding stage 32 is swingably supported by the stage swing axis 48 with respect to the support member 88.

[0089] Further, as described above, the support member 88 is fixed to the reference surface 84a of the ratchet gear 84. Therefore, in a case where the ratchet gear 84 rotates around the rotation axis 42 extending in the vertical direction, the support member 88, and the holding stage 32 supported by the support member 88 also rotate around the rotation axis 42.

[0090] Next, the actuator 34 will be described. The actuator 34 is an actuator for rotating the holding stage 32 around the rotation axis 42. The actuator 34 has a cylinder 60, a reciprocating rod 78, a swing block 80 (not shown in the drawings), and a ratchet gear 84. The ratchet gear 84 is as described above, and is disposed on the lower side of the holding stage 32, as shown in FIG. 1, for example. Figure 1 Figure 3 The ratchet gear 84 is installed to the rotation axis 42 via a one-way clutch 43. The one-way clutch 43 allows the ratchet gear 84 to rotate in the clockwise direction in plan view, and hinders the ratchet gear from rotating in the counterclockwise direction. Hereinafter, the direction of rotation allowed by the one-way clutch 43 will be referred to as the "positive rotation direction".

[0091] The cylinder 60 rotates the ratchet gear 84 in the positive rotation direction by reciprocating the piston rod 66. In the present example, the power source for reciprocating the cylinder 60 is the negative pressure of the air pressure generated by sucking air via the suction passage 38, which is the suction force supplied to the suction stage 12. The description thereof will be given with reference to FIG. 6. Figure 6 The description thereof will be given with reference to FIG. 6. Figure 6 is a schematic view of the cylinder 60. The cylinder 60 has a cylinder tube 62, a piston 64, and a piston rod 66. The piston 64 divides the internal space of the cylinder tube 62 into two. Hereinafter, the space on the right side of the paper with respect to the piston 64 will be referred to as a first pressure chamber 68f, and the space on the left side of the paper with respect to the piston 64 will be referred to as a second pressure chamber 68s. The piston 64 is reciprocable within the internal space of the cylinder tube 62. By reciprocating the piston 64, the volumes of the first pressure chamber 68f and the second pressure chamber 68s vary. The piston rod 66 protrudes from the piston 64. The piston rod 66 protrudes to the outside of the cylinder tube 62. The front end of the piston rod 66 is fixed to a link plate 76, and the reciprocating rod 78 is further fixed to the link plate 76. An auxiliary spring 74 that urges the link plate 76 and the cylinder tube 62 in a direction away from each other is provided between the link plate 76 and the cylinder tube 62.

[0092] ​The first pressure chamber 68f and the second pressure chamber 68s are respectively provided with a suction port 70 and an open port 72 connected to the outside. No piping is connected to the open port 72 in the second pressure chamber 68s, and the second pressure chamber 68s is open to atmospheric pressure. On the other hand, a connecting pipe 38c is connected to the suction port 70 in the first pressure chamber 68f. In other words, the first pressure chamber 68f is connected to the suction port 20 via the suction passage 38 (connecting pipe 38c, relay port 38b, and connecting hole 38a). Therefore, by driving the suction pump 22, negative pressure air pressure, i.e., suction force, can be applied to the first pressure chamber 68f.

[0093] The operation of cylinder 60 in the aforementioned structure will be explained. When the suction pump 22 is driven, the pressure in the first pressure chamber 68f decreases, and piston 64 moves to the right side of the paper (hereinafter referred to as the "retreat direction S-"). Subsequently, piston rod 66 and the advance / retreat rod 78 connected to piston rod 66 also move in the retreat direction S-. Then, the driving of suction pump 22 is stopped, and atmospheric pressure relief valve 23 is opened. In this case, the suction force acting on piston 64 disappears, and the advance / retreat rod 78 and the piston rod 66 and piston 64 connected to it move to the left side of the paper (hereinafter referred to as the "advance / exit direction S+"). That is, according to this example, by alternately switching the driving of suction pump 22 and atmospheric pressure relief, cylinder 60 and advance / retreat rod 78 can be moved forward and backward. Furthermore, in this example, the atmospheric pressure relief valve 23 is opened to allow the piston rod 66 to move in and out. However, the suction pump 22 can be reversed, and air can be supplied to the first pressure chamber 68f via the suction passage 38 instead of the process described above. Moreover, in this example, the cylinder 60 is moved by suction force, i.e., negative pressure air, but the cylinder 60 can also be moved by positive pressure air. That is, the suction pump 22 can be reversed, and air can be supplied to the first pressure chamber 68f via the suction passage 38, thereby extending the cylinder 60 and retracting it using the spring force of the auxiliary spring 74. Furthermore, as another embodiment, the cylinder 60 can be moved forward and backward using only air without the auxiliary spring 74. For example, the cylinder 60 can be retracted using negative pressure air and extended using positive pressure air.

[0094] like Figure 2 As shown, a swing block 80 is installed on the forward / reverse lever 78. The swing block 80 is a component that can swing in the horizontal plane around a vertical axis, namely the block swing axis 81. Near the front end of the swing block 80, a ratchet pin 82 extending in the vertical direction is provided (in... Figure 2 (The symbols are omitted in the text). The ratchet pin 82 is located near the periphery of the ratchet gear 84 and engages with the teeth of the ratchet gear 84.

[0095] Reference Figure 7 The structure of the swing block 80 and ratchet gear 84 as described above will be explained. Figure 7is an explanatory view of the ratchet gear 84 and the swing block 80. As described above, the ratchet gear 84 is attached to the rotating shaft 42 via the one-way clutch 43, and only allows rotation in the clockwise direction, i.e., the positive rotation direction R+ toward the paper surface. As shown in Figure 7 saw-toothed teeth 85 are formed on the periphery of the ratchet gear 84. Each tooth 85 is a substantially triangular shape surrounded by a first side 86a substantially parallel to the diameter direction and a second side 86b substantially inclined with respect to the diameter direction. Further, the second side 86b is located on the positive rotation direction R+ downstream side than the first side 86a belonging to the same tooth 85.

[0096] The ratchet pin 82 generally enters the recess between the teeth 85 of the ratchet gear 84. The advance and retreat rod 78 advances and retreats in a direction substantially parallel to the tangential direction of the ratchet gear 84 in the recess. The swing block 80 is elastically urged by the spring 83 toward the direction in which the ratchet pin 82 and the ratchet gear 84 are in close contact.

[0097] Next, the operation of the tilt mechanism will be described with reference to Figure 8 The operation of the ratchet gear 84 and the swing block 80 will be described. In the first paragraph of Figure 8 , the ratchet pin 82 is located in the recess between the first tooth 85f and the second tooth 85s. At this time, the cylinder 60 is in the contracted state. It is assumed that in this state, the cylinder 60 is elongated, and the advance and retreat rod 78 moves in the advance direction S+. In this case, as shown in the second paragraph of Figure 8 , the ratchet pin 82 also moves in the advance direction. At this time, due to the shape of the teeth 85, the ratchet pin 82 can easily pass over the second tooth 85s with the movement in the advance direction S+. The ratchet pin 82 is elastically urged by the spring 83 toward the direction in which the ratchet pin 82 and the ratchet gear 84 are in close contact. Therefore, when the ratchet pin 82 passes over the second tooth 85s, as shown in the third paragraph of Figure 8 , the ratchet pin 82 enters the recess between the second tooth 85s and the third tooth 85t.

[0098] Next, the cylinder 60 is contracted. If the cylinder 60 is contracted, the swing block 80 and the ratchet pin 82 also move in the retreat direction S-. At this time, due to the shape of the teeth 85, the ratchet pin 82 cannot pass over the second tooth 85s. As a result, with the movement of the ratchet pin 82 in the retreat direction S-, the ratchet gear 84 is pressed against the ratchet pin 82 and rotates only by one tooth amount in the positive rotation direction R+.

[0099] As is clear from the above description, each time the advance and retreat of the cylinder 60 is performed, the ratchet gear 84 rotates only by one tooth amount. Further, by rotating the ratchet gear 84, the holding stage 32 provided on the upper side of the ratchet gear 84 also rotates.

[0100] Next, the structure of the tilt mechanism will be described. As described above, and as shown in Figure 3As shown, the holding stage 32 is supported by a stage swing shaft 48 and is swingable about the stage swing shaft 48. In order to swing the holding stage 32 to tilt the holding stage 32, a tilt lever 90 is provided to the workpiece holding device 16. The tilt lever 90 is as shown, with its front end (i.e., a vicinity of a point of action portion 96 described below) disposed at a position located directly below the holding stage 32. Figure 2 As shown, the holding stage 32 is supported by a stage swing shaft 48 and is swingable about the stage swing shaft 48. In order to swing the holding stage 32 to tilt the holding stage 32, a tilt lever 90 is provided to the workpiece holding device 16. The tilt lever 90 is as shown, with its front end (i.e., a vicinity of a point of action portion 96 described below) disposed at a position located directly below the holding stage 32. Figure 9 As shown, the holding stage 32 is supported by a stage swing shaft 48 and is swingable about the stage swing shaft 48. In order to swing the holding stage 32 to tilt the holding stage 32, a tilt lever 90 is provided to the workpiece holding device 16. The tilt lever 90 is as shown, with its front end (i.e., a vicinity of a point of action portion 96 described below) disposed at a position located directly below the holding stage 32. Figure 2 is a view of the tilt lever 90 as viewed from the direction of arrow C.

[0101] As shown, the holding stage 32 is supported by a stage swing shaft 48 and is swingable about the stage swing shaft 48. In order to swing the holding stage 32 to tilt the holding stage 32, a tilt lever 90 is provided to the workpiece holding device 16. The tilt lever 90 is as shown, with its front end (i.e., a vicinity of a point of action portion 96 described below) disposed at a position located directly below the holding stage 32. Figure 9 As shown, the holding stage 32 is supported by a stage swing shaft 48 and is swingable about the stage swing shaft 48. In order to swing the holding stage 32 to tilt the holding stage 32, a tilt lever 90 is provided to the workpiece holding device 16. The tilt lever 90 is as shown, with its front end (i.e., a vicinity of a point of action portion 96 described below) disposed at a position located directly below the holding stage 32.

[0102] Here, in the present example, a first bottom surface portion 50f and a second bottom surface portion 50s having mutually different slopes are provided to the bottom surface of the holding stage 32, so as to change the slope of the placement surface 46 with the swing of the holding stage 32. Reference is made to Figure 4 , Figure 5 for an explanation thereof. Figure 4 , Figure 5 is a B-B sectional view of Figure 2 .

[0103] The first bottom surface portion 50f and the second bottom surface portion 50s are disposed at positions 180 degrees symmetrical about the stage swing shaft 48. In the case where the first bottom surface portion 50f is in abutment with the upper surface (i.e., the reference surface 84a) of the ratchet gear 84 as shown, the placement surface 46 has a slope as becomes substantially horizontal. Also, in the case where the second bottom surface portion 50s is in abutment with the reference surface 84a as shown, the placement surface 46 has a slope as is inclined with respect to the reference surface 84a. Figure 4 Figure 5

[0104] ​​Moreover, the first magnet 52f is fixed to the first bottom surface portion 50f, and the second magnet 52s is fixed to the second bottom surface portion 50s. A magnetic member that generates magnetic attraction between the first magnet 52f and the second magnet 52s is provided at least in part of the reference surface 84a. For example, the entire ratchet gear 84 can be formed of a ferromagnetic material (for example, steel or the like). Moreover, a ferromagnetic material or a magnet can be fixed to part of the reference surface 84a. Moreover, as another aspect, a ferromagnetic material can be provided at the first bottom surface portion 50f and the second bottom surface portion 50s, and a magnet can be provided at the reference surface 84a. In any case, the first magnet 52f or the second magnet 52s is brought into contact with the reference surface 84a, and thus magnetic attraction is generated between the first magnet 52f or the second magnet 52s and the reference surface 84a, thereby maintaining the inclined state of the holding stage 32.

[0105] Here, the force point portion 94 of the tilt lever 90 is pressed in the state shown in Figure 4 , and the action point portion 96 is raised. In this case, the action point portion 96 pushes up the first bottom surface portion 50f of the holding stage 32. Consequently, the holding stage 32 is swung about the stage swing axis 48 as shown in Figure 5 , and the second bottom surface portion 50s is brought into contact with the reference surface 84a. Moreover, the state in which the placement surface 46 is inclined with respect to the reference surface 84a is changed.

[0106] In the case of returning from the inclined state to the horizontal state, the ratchet gear 84 is rotated by 180°, and the second bottom surface portion 50s is moved to the vicinity of the action point portion 96. Next, the tilt lever 90 is swung in the state, and the second bottom surface portion 50s is raised upward.

[0107] As is clear from the above description, according to the present example, the holding stage 32 can be swung by the probe 14 that is originally provided in the inspection device. Moreover, as described above, in the present example, the holding stage 32 is rotated by the suction pump 22 that is originally provided in the inspection device. As a result, according to the present example, it is not necessary to additionally prepare a dedicated power source or a dedicated driver for driving the power source, and the like, in order to change the position and posture of the workpiece 100. As a result, it is possible to suppress the cost, and it is possible to change the position and posture of the workpiece 100 with a simple structure.

[0108] Further, the above-described structure is an example, and other structures can be changed as long as the posture of the work 100 can be changed using the suction force supplied through the suction hole 20 of the suction stage 12. For example, in the description, the holding stage 32 is rotated using the cylinder 60 and the ratchet gear 84. However, other mechanisms (for example, a piston-crank mechanism or the like) can be used to rotate the holding stage 32. Also, in this example, air pressure is used for the rotation of the holding stage 32, and air pressure can also be used for the swing of the holding stage 32. For example, a structure can be provided in which the force point portion 94 of the tilt lever 90 is pressed by the cylinder 60 along with the extension and retraction. Also, in this example, the holding stage 32 is rotated and swung, and either of the actions can be omitted. Also, the work holding system 10 is a device having the suction stage 12, and is not limited to being incorporated into the inspection device, but can be incorporated into other devices.

Claims

1. A workpiece holding system, characterized by, including: a suction table formed with one or more suction holes for suctioning an object placed on an upper surface thereof; and a workpiece holding device placed on the suction table and holding a workpiece, wherein the workpiece holding device has: a base placed on the suction table; a holding table for placing the workpiece and capable of changing a posture with respect to the base; a suction passage communicating with the suction hole; and an actuator driven by air pressure generated by suction or supply of air through the suction passage and changing the posture of the holding table, the holding table is provided to be rotatable about an up-down direction axis, the actuator receives the air pressure to rotate the holding table, the actuator includes a cylinder which receives the air pressure to extend or contract, the actuator includes a ratchet gear which rotates only in one direction as the cylinder extends or contracts, the holding table rotates together with the ratchet gear.

2. The workpiece holding system of claim 1, wherein, Further including: a tilting mechanism which tilts the holding table with respect to the base.

3. The workpiece holding system of claim 2, wherein, Further including: a tool head provided on an upper side of the suction table and capable of being raised or lowered with respect to the suction table to perform a prescribed process on the workpiece, the tilting mechanism has: a force point portion which is a lever capable of swinging about a horizontal axis and capable of being pressed by the tool head; and an action point portion located on an opposite side of the force point portion across the horizontal axis and which pushes up the holding table by pressing the force point portion.

4. The workpiece holding system according to claim 3, wherein a bottom surface of the holding table has: a first bottom surface portion which is inclined at a first angle; and a second bottom surface portion which is inclined at a second angle different from the first angle, a slope of an upper surface of the suction table changes in a case where the first bottom surface portion is pushed up and in a case where the second bottom surface portion is pushed up.

5. The workpiece holding system of claim 2, wherein, including: a reference surface which rotates together with the holding table, and which is not inclined even if a slope of the holding table is changed, one or more magnetic elements are provided on a bottom surface of the holding table and the reference surface, respectively, and the one or more magnetic elements maintain an inclined state of the holding table by mutual magnetic suction.

6. A workpiece holding device placed on a suction table and holding a workpiece, the workpiece holding device characterized by including: a base placed on the suction table; a holding table for placing the workpiece and capable of changing a posture with respect to the base; a suction passage communicating with a suction hole formed in the suction table; and an actuator driven by air pressure generated by suction or supply of air through the suction passage and changing the posture of the holding table, the holding table is provided to be rotatable about an up-down direction axis, the actuator receives the air pressure to rotate the holding table, the actuator includes a cylinder which receives the air pressure to extend or contract, the actuator includes a ratchet gear which rotates only in one direction as the cylinder extends or contracts, the holding table rotates together with the ratchet gear. ​

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