Factory building cross-region system and its transition device

Abstract

The present application discloses a plant cross-region system and a transition device thereof. The transition device is used to be arranged on a partition wall separating two rooms, and the transition device includes a cavity and a filtration module installed in the cavity. An intermediate passage is formed inside the cavity, and each of the two ends of the intermediate passage has an inlet and an outlet. One of the inlets and outlets of the cavity corresponds to a communication hole in the partition wall. The filtration module is communicated with the intermediate passage. The filtration module can perform a ventilation and filtration operation to continuously extract air from the outside of the transition device and exhaust the filtered air to the intermediate passage after filtration. Accordingly, through the ventilation and filtration operation of the filtration module, the automatic door required by the existing transition device can be effectively replaced, thereby further optimizing the production capacity of the plant.

Description

Technical Field

[0001] The present application relates to a transition device, and more particularly to a plant cross-region system for improving cross-region efficiency and its transition device. Background Art

[0002] Most of the transition devices installed in plants nowadays are equipped with automatic doors to effectively separate two areas. However, due to the use of automatic doors in existing transition devices, the overall cost is relatively high, and the transportation of objects between the two areas needs to wait for the opening and closing of the above automatic doors, thus making it difficult to further improve the production capacity of the plant.

[0003] Therefore, the applicant believes that the above defects can be improved. After painstaking research and the application of scientific principles, a present application with reasonable design and effective improvement of the above defects is finally proposed. Summary of the Invention

[0004] The purpose of the present application is to provide a plant cross-region system and its transition device, which can effectively improve the defects that may occur in existing transition devices.

[0005] The present application discloses a plant cross-region system, which includes: a first chamber and a second chamber, which are adjacent to each other, and a first cleanliness requirement of the first chamber is lower than a second cleanliness requirement of the second chamber; a partition wall separating the first chamber and the second chamber, and the partition wall is formed with a communication hole communicating the first chamber and the second chamber; a track module configured in the first chamber and the second chamber by passing through the communication hole for at least one carrier to move thereon; and a transition device provided in the first chamber and corresponding to the communication hole in position; wherein the transition device includes: a cavity, an internal transition passage is formed therein, and each of the two ends of the transition passage has an entrance and an exit; wherein the cavity corresponds to the communication hole with one of the entrances and exits, and the track module passes through the transition passage; and a filtration module installed in the cavity and communicated with the transition passage; wherein the filtration module can perform a ventilation and filtration operation to continuously extract air from the first chamber and exhaust the filtered air to the transition passage.

[0006] Optionally, the filtration module includes a plurality of fan filter units, and the plurality of fan filter units can synchronously extract air from the first chamber and exhaust the filtered air to the transition passage.

[0007] Optionally, an air pressure difference generated by the transition passage and the second chamber at the communication hole can be maintained at no more than 0.5 Pa by continuously performing the ventilation and filtration operation of the filtration module.

[0008] Optionally, the cavity includes a bottom plate, two side plates connected to the bottom plate, and a top plate connecting the two side plates; the bottom plate is formed with a plurality of holes so that the transition channel can communicate with the first chamber through the plurality of holes; the filtration module is installed on at least one of the two side plates and the top plate.

[0009] Optionally, the plurality of holes in the bottom plate have an opening ratio of not more than 25%.

[0010] Optionally, the plant cross-region system further includes at least one air curtain door installed on the partition wall, and at least one air curtain door is arranged corresponding to the communication hole.

[0011] Optionally, when at least one carrier moves from the first chamber through the transition channel to the second chamber along the track module, the flow field in the transition channel is disturbed from a stable state to a disrupted state, and the filtration module can perform a ventilation and filtration operation on the disrupted flow field to restore the flow field to a stable state within a preset time.

[0012] The present application also discloses a transition device for a plant cross-region system, which is used to be arranged on a partition wall separating two chambers, and the transition device includes: a cavity, inside which a transition channel is formed, and each end of the transition channel has an inlet and an outlet; wherein, one of the inlets and outlets of the cavity is used to correspond to a communication hole of the partition wall; and a filtration module, installed in the cavity and communicating with the transition channel; wherein, the filtration module can perform a ventilation and filtration operation to continuously extract air from the outside of the transition device and exhaust the filtered air to the transition channel.

[0013] Optionally, the cavity includes a bottom plate, two side plates connected to the bottom plate, and a top plate connecting the two side plates; the bottom plate is formed with a plurality of holes so that the transition channel can communicate with the outside through the plurality of holes; the filtration module is installed on at least one of the two side plates and the top plate.

[0014] Optionally, the plurality of holes in the bottom plate have an opening ratio of not more than 25%.

[0015] In summary, for the plant cross-region system disclosed in the present application, by installing the transition device in the first chamber, through the ventilation and filtration operation of the filtration module, it can effectively replace the automatic door required by the existing transition device, thereby avoiding the airflow flowing from the first chamber through the transition channel to the second chamber, improving the object handling efficiency of the track module and at least one carrier between the first chamber and the second chamber, and further optimizing the production capacity of the plant.

[0016] To further understand the features and technical content of this application, please refer to the following detailed description and drawings related to this application. However, these descriptions and drawings are only used to illustrate this application and do not impose any limitation on the protection scope of this application. Description of the Drawings

[0017] Figure 1 It is a three-dimensional schematic diagram of the plant cross-region system according to the first embodiment of this application.

[0018] Figure 2 It is Figure 1 a three-dimensional schematic diagram from another perspective.

[0019] Figure 3 It is Figure 1 a side view schematic diagram of

[0020] Figure 4 It is Figure 1 a sectional view schematic diagram of

[0021] Figure 5 It is Figure 4 a sectional view schematic diagram of the carrier moving from the first chamber into the transition device of

[0022] Figure 6 It is Figure 5 a sectional view schematic diagram of the carrier moving from the transition device into the second chamber of

[0023] Figure 7 It is a three-dimensional schematic diagram of the plant cross-region system according to the second embodiment of this application.

[0024] Figure 8 It is Figure 7 a sectional view schematic diagram of

[0025] Figure 9 It is a three-dimensional schematic diagram of the plant cross-region system according to the third embodiment of this application.

[0026] Figure 10 It is Figure 10 a sectional view schematic diagram of

[0027] Figure 11 It is Figure 10 another sectional view schematic diagram of Detailed Implementation Manner

[0028] The following are specific embodiments to illustrate the implementation manners of the "factory building cross-region system and its transition device" disclosed in the present application. Those skilled in the art can understand the advantages and effects of the present application from the content disclosed in this specification. The present application can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present application. In addition, the drawings of the present application are only for simple schematic illustration and are not drawn according to actual dimensions. The following embodiments will further detail the related technical content of the present application, but the disclosed content is not intended to limit the protection scope of the present application.

[0029] It should be understood that although terms such as "first", "second", "third", etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used herein should, depending on the actual situation, possibly include any one or a combination of more of the associated listed items.

[0030] Embodiment 1 Please refer to Figures 1 to 6 as shown, which is Embodiment 1 of the present application. This embodiment discloses a factory building cross-region system 100, which is preferably applied in a cleanroom of a semiconductor factory building, but the present application is not limited thereto. Among them, the factory building cross-region system 100 includes a first chamber 1, a second chamber 2 adjacent to the first chamber 1, a partition wall 3 separating the first chamber 1 and the second chamber 2, a track module 4 penetrating the partition wall 3, and a transition device 5 provided on the partition wall 3.

[0031] It should be additionally noted that in this embodiment, the factory building cross-region system 100 is described with the first chamber 1, the second chamber 2, the partition wall 3, the track module 4, and the transition device 5 cooperating with each other, but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the transition device 5 can also be applied alone (such as: sold) or used in combination with other components according to design requirements.

[0032] In this embodiment, the first chamber 1 has a first cleanliness requirement, which is lower than the second cleanliness requirement of the second chamber 2, and the air pressure in the first chamber 1 is also lower than the air pressure in the second chamber 2. For example, the first cleanliness requirement of the first chamber 1 can be Class 100K, the second cleanliness requirement of the first chamber 1 can be Class 1K, and the pressure difference between the air pressure in the first chamber 1 and the air pressure in the second chamber 2 can be between 2 Pa and 5 Pa, but the present application is not limited thereto.

[0033] Furthermore, a communication hole 31 communicating the first chamber 1 and the second chamber 2 is formed in the partition wall 3, and the communication hole 31 is located at the top of the partition wall 3. The track module 4 is disposed in the first chamber 1 and the second chamber 2 by passing through the transition device 5 and the communication hole 31 for at least one carrier 200 to move thereon.

[0034] In this embodiment, the communication hole 31 includes two sub-openings 311, and the track module 4 may be an Overhead Hoist Transfer (OHT) system, which includes two tracks 41 respectively passing through the two sub-openings 311, so that each track 41 can be used for one carrier 200 to move thereon. However, the present application is not limited thereto. For example, in other embodiments not shown in the present application, the number of the sub-openings 311 formed by the communication hole 31 can be adjusted and changed according to design requirements (such as one or more), and the track module 4 includes at least one track 41 passing through the communication hole 31.

[0035] The transition device 5 is disposed in the first chamber 1 and its position corresponds to the communication hole 31. The transition device 5 includes a cavity 51 and a filtering module 52 installed in the cavity 51. Further, a transition channel C is formed inside the cavity 51, and each of the two ends of the transition channel C has an inlet / outlet C1.

[0036] Wherein, the cavity 51 has the position and shape of one of the inlets / outlets C1 corresponding to the position and shape of the communication hole 31 (such as the communication hole 31 is adjacent to and communicates with the corresponding inlet / outlet C1), and the track module 4 passes through the transition channel C via the two inlets / outlets C1. That is to say, the inlet / outlet C1 corresponding to the communication hole 31 also forms two sub-inlet / outlets C11 in this embodiment, which respectively correspond to the two sub-openings 311. However, the present application is not limited thereto.

[0037] More specifically, in this embodiment, the cavity 51 is generally in the shape of a cuboid and includes a bottom plate 511, two side plates 512 and two end plates 513 connected to the periphery of the bottom plate 511, and a top plate 514 connecting the two side plates 512 and the two end plates 513. Among them, no holes are formed in the bottom plate 511, and the two entrances and exits C1 are respectively formed in the two end plates 513, and one of the end plates 513 abuts (or is fixed) against the partition wall 3 so that the entrance and exit C1 formed thereon can be adjacent to the communication hole 31. However, the present application is not limited thereto. For example, in other embodiments not shown in the present application, the cavity 51 may also form the corresponding entrance and exit C1 by omitting at least one of the two end plates 513.

[0038] The filtering module 52 communicates with the transition channel C, and the filtering module 52 can perform a ventilation and filtering operation to continuously extract air from the first chamber 1 and exhaust the filtered air to the transition channel C after filtration. In other words, the first chamber 1 and the second chamber 2 can be kept in spatial communication with each other through the transition channel C.

[0039] In this embodiment, the filtering module 52 includes a plurality of fan filter units 521 (FFU), and the plurality of fan filter units 521 can synchronously extract air from the first chamber 1 and exhaust the filtered air to the transition channel C after filtration. Furthermore, the filtering module 52 (or the plurality of fan filter units 521) can be installed on at least one of the two side plates 512 and the top plate 514, and preferably, the filtering module 52 is installed outside the cavity 51. However, the present application is not limited thereto.

[0040] Accordingly, in the plant cross-region system 100 disclosed in this embodiment, by installing the transition device 5 in the first chamber 1, through the ventilation and filtering operation of the filtering module 52, it can effectively replace the automatic door required by the existing transition device, thereby preventing air flow from flowing from the first chamber 1 through the transition channel C to the second chamber 2, and improving the object handling efficiency of the track module 4 and at least one handling vehicle 200 between the first chamber 1 and the second chamber 2, and further optimizing the production capacity of the plant.

[0041] More specifically, an air pressure difference generated by the transition channel C and the second chamber 2 at the communication hole 31 can be maintained at no more than 0.5 pascals (Pa) through continuous execution of the ventilation and filtration operation by the filtration module 52. That is to say, when no handling vehicle 200 passes through the transition channel C, the flow field in the transition channel C is in a stable state, and the filtration module 52 can establish sufficient pressure in the transition channel C by continuously executing the ventilation and filtration operation, thereby making the air flow at the communication hole 31 approach zero.

[0042] Furthermore, when at least one handling vehicle 200 moves from the first chamber 1 through the transition channel C along the track module 4 to the second chamber 2, the flow field in the transition channel C is disturbed from the stable state into a disrupted state, and the filtration module 52 can perform the ventilation and filtration operation on the flow field in the disrupted state to make the flow field return to the stable state within a preset time. Among them, the preset time can be within 3 seconds to 25 seconds, but the actual value of the preset time can be adjusted and changed according to design requirements, which is not limited in this application.

[0043] Embodiment 2 Please refer to Figure 7 and Figure 8 as shown, which is Embodiment 2 of the present application. Since this embodiment is similar to Embodiment 1 above, the same parts of the two embodiments will not be described in detail, and the differences between this embodiment and Embodiment 1 above are generally described as follows:

[0044] In this embodiment, the bottom plate 511 is formed with a plurality of holes 5111 so that the transition channel C can communicate with the outside (such as communicating with the first chamber 1) through the plurality of holes 5111. Among them, the plurality of holes 5111 on the bottom plate 511 preferably have an opening ratio of no more than 25% (preferably 10% - 20%). Further, when the opening ratio of the bottom plate 511 in this embodiment is 15% compared with Embodiment 1 in which the bottom plate 511 is not formed with any holes, the preset time of the plant cross-region system 100 in this embodiment can be controlled lower than that in Embodiment 1 above, so as to effectively further improve the production capacity of the plant.

[0045] Embodiment 3 Please refer to Figures 9 to 11 as shown, which is Embodiment 3 of the present application. Since this embodiment is similar to Embodiments 1 and 2 above, the same parts of the above-mentioned embodiments will not be described in detail, and the differences between this embodiment and Embodiments 1 and 2 above are generally described as follows:

[0046] In this embodiment, the plant cross-region system 100 further includes at least one air curtain door 6 installed on the partition wall 3, and at least one of the air curtain doors 6 is located in the second chamber 2 and is arranged corresponding to the communication hole 31. That is to say, the transition device 5 and at least one of the air curtain doors 6 can be respectively installed on opposite sides of the partition wall 3.

[0047] Among them, at least one of the air curtain doors 6 can close the communication hole 31 by continuously exhausting air, thereby effectively preventing air flow from flowing from the first chamber 1 to the second chamber 2 through the transition passage C. Furthermore, the volume of air discharged per minute (cubic meter per minute, CMM) of at least one of the air curtain doors 6 can be 20 to 50 cubic meters per minute (m 3 / min), but this application is not limited thereto.

[0048] Advantages of the invention

[0049] In summary, for the plant cross-region system disclosed in this application, by installing the transition device in the first chamber and performing the air change and filtration operation of the filtration module, it can effectively replace the automatic door required by the existing transition device, thereby preventing air flow from flowing from the first chamber to the second chamber through the transition passage, improving the object handling efficiency of the track module and at least one of the handling vehicles between the first chamber and the second chamber, and further optimizing the production capacity of the plant.

[0050] Furthermore, for the plant cross-region system and its transition device disclosed in this application, a plurality of holes with a specific porosity (such as not greater than 25%) can be further formed on the bottom plate of the cavity, so as to facilitate shortening the time required for the flow field to return from the disturbed state to the stable state.

[0051] In addition, for the plant cross-region system and its transition device disclosed in this application, the air curtain door can be additionally installed on the partition wall according to design requirements, so as to facilitate closing the communication hole by continuously exhausting air through the air curtain door, thereby effectively preventing air flow from flowing from the first chamber to the second chamber through the transition passage.

[0052] The content disclosed above is only an optional and feasible embodiment of this application, and does not limit the patent scope of this application. Therefore, all equivalent technical changes made by using the content of the specification and drawings of this application are included in the patent scope of this application.

Claims

1. A factory building cross - region system, characterized in that, The plant cross - zone system includes: A first chamber and a second chamber, which are arranged adjacent to each other, and a first cleanliness requirement of the first chamber is lower than a second cleanliness requirement of the second chamber; A partition wall that separates the first chamber and the second chamber, and the partition wall is formed with a communication hole that connects the first chamber and the second chamber; A track module configured in the first chamber and the second chamber by passing through the communication hole for at least one carrier vehicle to move thereon; and A transition device disposed in the first chamber and corresponding to the communication hole in position; wherein, the transition device includes: A cavity having a transition channel formed inside thereof, and each of the two ends of the transition channel has an inlet and an outlet; wherein, the cavity corresponds to the communication hole with one of the inlets and outlets, and the track module passes through the transition channel; and A filtration module installed in the cavity and communicated with the transition channel; wherein, The filtration module can perform a ventilation and filtration operation to continuously extract air from the first chamber and exhaust the filtered air to the transition channel.

2. The plant cross-region system according to claim 1, wherein The filtration module includes a plurality of fan - filter units, and the plurality of fan - filter units can synchronously extract air from the first chamber and exhaust the filtered air to the transition channel.

3. The plant cross-region system according to claim 1, characterized in that An air pressure difference generated by the transition channel and the second chamber at the communication hole can be maintained at no more than 0.5 Pa by continuously performing the ventilation and filtration operation by the filtration module.

4. The plant cross-region system according to claim 1, wherein The cavity includes a bottom plate, two side plates connected to the bottom plate, and a top plate connecting the two side plates; the bottom plate is formed with a plurality of holes so that the transition channel can communicate with the first chamber through the plurality of holes; the filtration module is installed on at least one of the two side plates and the top plate.

5. The plant cross-region system according to claim 4, characterized in that, The plurality of holes in the bottom plate have an opening ratio of no more than 25%.

6. The plant cross-region system according to claim 1, wherein The plant cross - zone system further includes at least one air curtain door installed on the partition wall, and at least one air curtain door is disposed corresponding to the communication hole.

7. The plant cross-region system according to claim 1, characterized in that When at least one carrier vehicle moves from the first chamber through the transition channel to the second chamber along the track module, the flow field in the transition channel is disturbed from a stable state to a disrupted state, and the filtration module can perform the ventilation and filtration operation on the flow field in the disrupted state to restore the flow field to the stable state within a preset time.

8. A transition device for a plant cross-region system, characterized in that, The transition device of the plant cross - zone system is used to be arranged on a partition wall separating two chambers, and the transition device includes: A cavity having a transition channel formed inside thereof, and each of the two ends of the transition channel has an inlet and an outlet; wherein, the cavity uses one of the inlets and outlets to correspond to a communication hole in the partition wall; and A filtration module installed in the cavity and communicated with the transition channel; wherein, the filtration module can perform a ventilation and filtration operation to continuously extract air from the outside of the transition device and exhaust the filtered air to the transition channel.

9. The transition device of the plant cross-region system according to claim 8, wherein The cavity includes a bottom plate, two side plates connected to the bottom plate, and a top plate connecting the two side plates; the bottom plate is formed with a plurality of holes so that the transition channel can communicate with the outside through the plurality of holes; the filtering module is installed on at least one of the two side plates and the top plate.

10. The transition device of the plant cross-region system according to claim 9, characterized in that, The plurality of holes in the bottom plate have an opening ratio of not more than 25%.

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