AR lens manufacturing apparatus and process thereof

By designing AR lens manufacturing equipment and adopting automated conveying and synchronous processing, the problem of low production efficiency in existing technologies has been solved, and efficient AR lens manufacturing has been achieved.

CN116811321BActive Publication Date: 2026-03-24ZHEJIANG ZHIGE TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-06-29
Publication Date
2026-03-24

AI Technical Summary

Technical Problem

The existing surface relief grating waveguide solution for AR lenses has low production efficiency and cannot meet the growing demand for AR lenses.

Method used

An AR lens manufacturing device is provided, including a feeding module, a coating module, a nanoimprinting module, a unloading module, and an automatic conveying module. The automatic conveying module transports glass wafer substrates between the modules for coating, imprinting, curing, and demolding. The nanoimprinting module enables the simultaneous operation of imprinting, curing, and demolding processes, thereby improving production efficiency.

Benefits of technology

This significantly improves the production efficiency of AR lenses. Through automated conveying and synchronous process handling, the manufacturing efficiency of nanoimprinting technology is enhanced.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application provides an AR lens manufacturing device and a process thereof. The AR lens manufacturing device comprises a feeding module, a glue uniformizing module, a nano-imprinting module, a discharging module and an automatic conveying module. The automatic conveying module is used to convey a glass wafer substrate in the feeding module to the glue uniformizing module for glue uniformizing treatment, so as to obtain a spin-coated imprinting glue glass wafer. The automatic conveying module is used to convey the spin-coated imprinting glue glass wafer to the nano-imprinting module for imprinting, curing and demolding treatment, so as to obtain an AR lens. The automatic conveying module is used to convey the AR lens to the discharging module. That is, the automatic conveying module is used to convey materials related to AR lens manufacturing in the feeding module, the glue uniformizing module, the nano-imprinting module and the discharging module, so as to greatly improve the production efficiency of AR lens manufacturing.
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Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of AR technology, and particularly relates to an AR lens manufacturing device and a process thereof. BACKGROUND

[0002] With the development of information technology, AR technology is increasingly mature, and AR technology is increasingly widely applied to education, medical treatment, entertainment, industry and the like.

[0003] At present, a relatively mature AR glasses technical scheme mainly includes a prism scheme, a birdbath scheme, a free-form surface scheme, an off-axis holographic lens scheme and a waveguide (Lightguide) scheme. Among them, the waveguide scheme includes a surface relief grating waveguide scheme and a volume holographic grating waveguide scheme.

[0004] The production efficiency of the AR lens manufactured by using the surface relief grating waveguide scheme is low, and the AR lens cannot meet the increasing demand. SUMMARY

[0005] In order to overcome the defects of the prior art, the application provides an AR lens manufacturing device and a process thereof.

[0006] The application achieves the above-mentioned technical effects through the following technical scheme.

[0007] The application provides an AR lens manufacturing device, which comprises a feeding module, a glue uniformizing module, a nano-imprint module, a discharging module and an automatic conveying module.

[0008] The feeding module is used for placing a glass wafer base.

[0009] The automatic conveying module conveys the glass wafer base to the glue uniformizing module.

[0010] The glue uniformizing module performs glue uniformizing treatment on the glass wafer base to obtain a spin-coated and imprinted glass wafer.

[0011] The automatic conveying module conveys the spin-coated and imprinted glass wafer to the nano-imprint module.

[0012] The nano-imprint module performs imprinting, curing and demolding treatment on the spin-coated and imprinted glass wafer to obtain an AR lens.

[0013] The automatic conveying module conveys the AR lens to the discharging module.

[0014] The discharging module is used for placing the AR lens.

[0015] Further, the application further comprises a plasma treatment module.

[0016] The automatic conveying module conveys the glass wafer substrate to a plasma processing module;

[0017] The plasma processing module processes the surface of the glass wafer substrate.

[0018] Further, the uniform coating module comprises an adsorption stage, an adhesion promoter supply unit, and a stamping glue supply unit.

[0019] The adsorption stage is rotatable.

[0020] The automatic conveying module conveys the glass wafer substrate to the adsorption stage.

[0021] The adsorption stage adsorbs and fixes the glass wafer substrate.

[0022] The adhesion promoter supply unit drops adhesion promoter onto the surface of the glass wafer substrate.

[0023] The adsorption stage rotates so that the surface of the glass wafer substrate is spin-coated with the adhesion promoter, obtaining a glass wafer with spin-coated adhesion promoter.

[0024] The stamping glue supply unit drops stamping glue onto the surface of the glass wafer with spin-coated adhesion promoter.

[0025] The adsorption stage rotates so that the stamping glue is spin-coated on the surface of the glass wafer, obtaining a glass wafer with spin-coated stamping glue.

[0026] Further, a first heating module is further included.

[0027] The automatic conveying module conveys the glass wafer with spin-coated adhesion promoter to the first heating module.

[0028] The first heating module performs heating treatment on the surface of the glass wafer with spin-coated adhesion promoter.

[0029] Further, a second heating module is further included.

[0030] The automatic conveying module conveys the glass wafer with spin-coated stamping glue to the second heating module.

[0031] The second heating module performs heating treatment on the surface of the glass wafer with spin-coated stamping glue.

[0032] Further, a cooling module is further included.

[0033] The automatic conveying module conveys the glass wafer with spin-coated stamping glue to the cooling module.

[0034] The cooling module performs cooling treatment on the glass wafer with spin-coated stamping glue.

[0035] Further, the automatic conveying module comprises a first controller, a conveying component and a mechanical hand;

[0036] The conveying component comprises a first driving motor, a first transmission screw rod, a transmission sliding block and a moving track;

[0037] The first controller is in communication connection with the first driving motor, the first driving motor is connected with the first transmission screw rod, the transmission sliding block is arranged on the first transmission screw rod, the transmission sliding block is in sliding connection with the moving track, and the mechanical hand is fixedly arranged on the transmission sliding block.

[0038] Further, the nano-imprint module comprises a second driving motor, a first transmission shaft, a first platform, a second platform, an imprint module, a curing module, a demolding module, a supporting module and a clamping module;

[0039] The clamping module is used for clamping an imprint template;

[0040] The first platform is arranged above the second platform in a stationary manner;

[0041] The lower end surface of the first platform is respectively provided with the imprint module, the curing module and the demolding module, and the imprint module, the demolding module and the supporting module can be in electromagnetic adsorption connection with the clamping module;

[0042] The upper end surface of the second platform is respectively provided with the supporting module below the imprint module, the curing module and the demolding module;

[0043] The second driving motor is connected with the first transmission shaft, the first transmission shaft is fixedly connected with the second platform, and the second driving motor drives the second platform to rotate through the first transmission shaft.

[0044] Further, the imprint template comprises a soft film substrate and a soft film adhesive adhered below the soft film substrate, and the soft film adhesive has an etching structure of a master.

[0045] Further,

[0046] A first through hole is arranged in the middle of the first platform;

[0047] A second through hole is arranged in the middle of the second platform;

[0048] The first transmission shaft is connected with the first through hole through a bearing;

[0049] The first transmission shaft is fixedly connected with the second through hole.

[0050] Further, the imprint module comprises a first supporting unit and a first roller pressing unit;

[0051] The first roller pressing unit is arranged inside the first supporting unit;

[0052] The first supporting unit is arranged at the lower end surface of the first platform, and has the functions of lifting and electromagnetic adsorption;

[0053] The first roller pressing unit is arranged at the lower end surface of the first platform, and has the functions of lifting and horizontal movement.

[0054] Further,

[0055] The first supporting unit comprises a third driving motor, a fourth driving motor, a first lifting screw, a second lifting screw, and a second controller;

[0056] The third driving motor is connected to the top end of the first lifting screw, the bottom end of the first lifting screw is provided with a first electromagnetic adsorption member, and the first electromagnetic adsorption member is in communication connection with the second controller;

[0057] The fourth driving motor is connected to the top end of the second lifting screw, the bottom end of the second lifting screw is provided with a second electromagnetic adsorption member, and the second electromagnetic adsorption member is in communication connection with the second controller;

[0058] The first platform is provided with a third through hole and a fourth through hole;

[0059] The first lifting screw is in threaded connection with the third through hole, and the second lifting screw is in threaded connection with the fourth through hole.

[0060] Further, the first roller pressing unit comprises a first horizontal sliding assembly, a first cylinder assembly, and a first pressure roller assembly;

[0061] The first horizontal sliding assembly is mounted at the lower end surface of the first platform;

[0062] The first horizontal sliding assembly is connected with the first cylinder assembly;

[0063] The first cylinder assembly is connected with the first pressure roller assembly.

[0064] Further, the first horizontal sliding assembly comprises a first sliding rail, a first sliding seat, a fifth driving motor, and a second transmission screw;

[0065] The first sliding rail is mounted at the lower end surface of the first platform;

[0066] The fifth driving motor is connected with the second transmission screw, the second transmission screw is connected with the first sliding seat, and the first sliding seat is in sliding connection with the first sliding rail;

[0067] The bottom end of the first sliding seat is fixedly connected with the first cylinder assembly.

[0068] Further, the first compression roller assembly comprises a sixth driving motor, a second transmission shaft and a first compression roller.

[0069] The bottom end of the sixth driving motor is connected with the first cylinder assembly, the side wall of the sixth driving motor is connected with the second transmission shaft, and the second transmission shaft is connected with the first compression roller.

[0070] Further, the curing module adopts a UV lamp, and the UV lamp is installed on the lower end face of the first platform.

[0071] Further, the demolding module comprises a second supporting unit and a second roller pressing unit.

[0072] The second roller pressing unit is arranged inside the second supporting unit.

[0073] The second supporting unit is arranged on the lower end face of the first platform, and the second supporting unit is capable of lifting and has an electromagnetic adsorption function.

[0074] The second roller pressing unit is arranged on the lower end face of the first platform, and the second roller pressing unit is capable of lifting and horizontally moving.

[0075] Further, the second supporting unit comprises a seventh driving motor, an eighth driving motor, a third lifting lead screw, a fourth lifting lead screw and a third controller.

[0076] The seventh driving motor is connected with the top end of the third lifting lead screw, the bottom end of the third lifting lead screw is provided with a third electromagnetic adsorption accessory, and the third electromagnetic adsorption accessory is in communication connection with the third controller.

[0077] The eighth driving motor is connected with the top end of the fourth lifting lead screw, the bottom end of the fourth lifting lead screw is provided with a fourth electromagnetic adsorption accessory, and the fourth electromagnetic adsorption accessory is in communication connection with the third controller.

[0078] The fifth through hole and the sixth through hole are arranged on the first platform.

[0079] The third lifting lead screw is in threaded connection with the fifth through hole, and the fourth lifting lead screw is in threaded connection with the sixth through hole.

[0080] Further,

[0081] The second roller pressing unit comprises a second horizontal sliding assembly, a second cylinder assembly and a second compression roller assembly.

[0082] The second horizontal sliding assembly is installed on the lower end face of the first platform.

[0083] The second horizontal sliding assembly is connected with the second cylinder assembly.

[0084] The second cylinder assembly is connected with the second compression roller assembly.

[0085] Further, the second horizontal sliding assembly comprises a second sliding rail, a second sliding base, a ninth driving motor, a third transmission screw rod;

[0086] The second sliding rail is installed on the lower end surface of the first platform;

[0087] The ninth driving motor is connected with the third transmission screw rod, the third transmission screw rod is connected with the second sliding base, and the second sliding base is in sliding connection with the second sliding rail;

[0088] The bottom end of the second sliding base is fixedly connected with the second cylinder assembly.

[0089] Further, the second compression roller assembly comprises a tenth driving motor, a third transmission shaft and a second compression roller;

[0090] The bottom end of the tenth driving motor is connected with the second cylinder assembly, the side wall of the tenth driving motor is connected with the third transmission shaft, and the third transmission shaft is connected with the second compression roller.

[0091] Further, the support module comprises a lifting unit and a support table;

[0092] The support table is installed on the upper end surface of the second platform;

[0093] The lifting unit is arranged on both sides of the support table;

[0094] The top end of the lifting unit has an electromagnetic adsorption function.

[0095] Further, the lifting unit comprises an eleventh driving motor, a twelfth driving motor, a fifth lifting screw rod, a sixth lifting screw rod and a fourth controller;

[0096] The fifth lifting screw rod and the sixth lifting screw rod are arranged on both sides of the support table;

[0097] The eleventh driving motor is connected with the bottom end of the fifth lifting screw rod, the top end of the fifth lifting screw rod is provided with a fifth electromagnetic adsorption accessory, and the fifth electromagnetic adsorption accessory is in communication connection with the fourth controller;

[0098] The twelfth driving motor is connected with the bottom end of the sixth lifting screw rod, the top end of the sixth lifting screw rod is provided with a sixth electromagnetic adsorption accessory, and the sixth electromagnetic adsorption accessory is in communication connection with the fourth controller;

[0099] The seventh through hole and the eighth through hole are arranged on the second platform;

[0100] The fifth lifting screw is threadedly connected with the seventh through hole, and the sixth lifting screw is threadedly connected with the eighth through hole.

[0101] Further, the baking module is further included;

[0102] The automatic conveying module conveys the AR lens to the baking module;

[0103] The baking module performs baking treatment on the AR lens.

[0104] Further, the post-curing module is further included;

[0105] The automatic conveying module conveys the AR lens to the post-curing module;

[0106] The post-curing module performs curing treatment on the AR lens.

[0107] Correspondingly, the application also provides an AR lens manufacturing process, comprising the following steps:

[0108] Placing a glass wafer substrate on the feeding module;

[0109] Conveying the glass wafer substrate to the glue spreading module by the automatic conveying module;

[0110] The glue spreading module performs glue spreading treatment on the glass wafer substrate to obtain a spin-coated imprint glue glass wafer;

[0111] The automatic conveying module conveys the spin-coated imprint glue glass wafer to the nano-imprint module;

[0112] The nano-imprint module performs imprinting, curing and demolding treatment on the spin-coated imprint glue glass wafer to obtain an AR lens;

[0113] The automatic conveying module conveys the AR lens to the discharging module.

[0114] Further, before the glass wafer substrate is conveyed to the glue spreading module by the automatic conveying module, the following steps are further included:

[0115] The automatic conveying module conveys the glass wafer substrate to the plasma treatment module;

[0116] The plasma treatment module performs treatment on the surface of the glass wafer substrate.

[0117] Further, the glue spreading module performs glue spreading treatment on the glass wafer substrate to obtain a spin-coated imprint glue glass wafer, and specifically comprises the following steps:

[0118] The adsorption stage is used to adsorb and fix the glass wafer substrate conveyed by the automatic conveying module;

[0119] An adhesion agent supply unit is used to drop adhesion agent on the surface of the glass wafer substrate;

[0120] The adsorption stage is rotated to spin the surface of the glass wafer substrate with the adhesion agent, so as to obtain a glass wafer with spin-coated adhesion agent;

[0121] An imprint glue supply unit is used to drop imprint glue on the surface of the glass wafer with spin-coated adhesion agent;

[0122] The adsorption stage is rotated to spin the surface of the glass wafer with spin-coated adhesion agent with the adhesion agent, so as to obtain a glass wafer with spin-coated adhesion agent;

[0123] Further, before the imprint glue supply unit is used to drop imprint glue on the surface of the glass wafer with spin-coated adhesion agent, the method further comprises:

[0124] The automatic conveying module conveys the glass wafer with spin-coated adhesion agent to the first heating module;

[0125] The first heating module performs heating treatment on the surface of the glass wafer with spin-coated adhesion agent.

[0126] Further, the method further comprises:

[0127] The automatic conveying module conveys the glass wafer with spin-coated adhesion agent to the second heating module;

[0128] The second heating module performs heating treatment on the surface of the glass wafer with spin-coated adhesion agent.

[0129] Further, after the second heating module performs heating treatment on the surface of the glass wafer with spin-coated adhesion agent, the method further comprises:

[0130] The automatic conveying module conveys the glass wafer with spin-coated adhesion agent after heating treatment to the cooling module;

[0131] The cooling module performs cooling treatment on the glass wafer with spin-coated adhesion agent after heating treatment.

[0132] Further, the automatic conveying module comprises a first controller, a conveying component, and a mechanical hand;

[0133] The conveying component comprises a first driving motor, a first transmission screw, a transmission sliding block, and a moving track;

[0134] The first controller is in communication connection with the first driving motor, the first driving motor is connected with the first transmission screw rod, a transmission sliding block is arranged on the first transmission screw rod, the transmission sliding block is in sliding connection with the moving track, and the mechanical hand is fixedly arranged on the transmission sliding block.

[0135] Further, the nano-imprinting module performs imprinting, curing and demolding processes on the spin-coated imprinting glue glass wafer to obtain an AR lens, comprising:

[0136] A plurality of spin-coated imprinting glue glass wafers are simultaneously placed in the nano-imprinting module which operates synchronously in the processes of imprinting, curing and demolding;

[0137] Each spin-coated imprinting glue glass wafer is processed according to the corresponding process in the processes of imprinting, curing and demolding.

[0138] Further, the nano-imprinting module comprises a second driving motor, a first transmission shaft, a first platform, a second platform, an imprinting module, a curing module, a demolding module, a supporting module and a clamping module;

[0139] The clamping module is used for clamping the imprinting template;

[0140] The first platform is statically arranged above the second platform;

[0141] The lower end surface of the first platform is respectively provided with the imprinting module, the curing module and the demolding module, and the imprinting module, the demolding module and the supporting module can be electromagnetically adsorbed and connected with the clamping module;

[0142] The upper end surface of the second platform is respectively provided with the supporting module below the imprinting module, the curing module and the demolding module;

[0143] The second driving motor is connected with the first transmission shaft, and the first transmission shaft is fixedly connected with the second platform;

[0144] The second driving motor drives the second platform to rotate through the first transmission shaft.

[0145] Further, the preparation process of the imprinting template is as follows:

[0146] Spin-coat soft film glue on a master plate with etching structure;

[0147] Bond the soft film substrate with the master plate, apply pressure to the soft film substrate, so that the etching structure on the master plate is transferred to the soft film glue, and the soft film glue with etching structure is obtained;

[0148] Use ultraviolet curing and demolding processes in sequence to adhere the soft film glue with etching structure to the soft film substrate to obtain the imprinting template.

[0149] Further, a plurality of the spin-coated imprinting glue glass wafers are simultaneously placed in a nano-imprint module which simultaneously operates the processes of imprinting, curing and demolding; each of the spin-coated imprinting glue glass wafers is processed according to the processes of imprinting, curing and demolding in the corresponding processes, including the following steps:

[0150] S1, placing the spin-coated imprinting glue glass wafer on the support module below the imprinting module to perform the imprinting operation, to obtain a glass wafer imprinting unit;

[0151] S2-1, driving the second driving motor to rotate the second platform through the first transmission shaft to move the glass wafer imprinting unit below the curing module, and performing the curing operation on the glass wafer imprinting unit to obtain a glass wafer curing unit;

[0152] S2-2, simultaneously, placing the spin-coated imprinting glue glass wafer on the support module below the imprinting module to perform the imprinting operation of step S1, to obtain a glass wafer imprinting unit;

[0153] S3-1, driving the second driving motor to rotate the second platform through the first transmission shaft to move the glass wafer curing unit below the demolding module to perform the demolding operation, to obtain an AR lens;

[0154] S3-2, simultaneously, moving the glass wafer imprinting unit below the curing module to perform the curing operation of step S2-1, to obtain a glass wafer curing unit;

[0155] placing the spin-coated imprinting glue glass wafer on the support module below the imprinting module to perform the imprinting operation of step S1, to obtain a glass wafer imprinting unit;

[0156] S4, repeating the above operations so that each spin-coated imprinting glue glass wafer is processed according to the processes of imprinting, curing and demolding, and different spin-coated imprinting glue glass wafers are simultaneously processed in the corresponding processes of imprinting, curing and demolding.

[0157] Further, before the automatic conveying module conveys the AR lens to the unloading module, the automatic conveying module further comprises:

[0158] The automatic conveying module conveys the AR lens to the baking module;

[0159] The baking module performs baking treatment on the AR lens.

[0160] Further, before the automatic conveying module conveys the AR lens to the unloading module, the automatic conveying module further comprises:

[0161] The automatic conveying module conveys the AR lens to the post-curing module;

[0162] The post-curing module performs a curing process on the AR lens.

[0163] Compared with the prior art, the technical scheme of the present application has the following beneficial effects:

[0164] The present application provides an AR lens manufacturing equipment, comprising a feeding module, a glue uniformizing module, a nano-imprint module, a discharging module and an automatic conveying module. The automatic conveying module is used to convey the glass wafer substrate in the feeding module to the glue uniformizing module for glue uniformizing treatment, so as to obtain a spin-coated imprinting glue glass wafer; the automatic conveying module is used to convey the spin-coated imprinting glue glass wafer to the nano-imprint module for imprinting, curing and demolding treatment, so as to obtain an AR lens; and the automatic conveying module is used to convey the AR lens to the discharging module. That is, the automatic conveying module is used to convey the materials related to the manufacturing of the AR lens in the feeding module, the glue uniformizing module, the nano-imprint module and the discharging module, so as to greatly improve the production efficiency of the manufacturing of the AR lens.

[0165] The AR lens manufacturing equipment provided by the present application adopts the nano-imprint module with synchronous operation of the imprinting, curing and demolding processes, and a plurality of spin-coated imprinting glue glass wafers are sequentially placed in the nano-imprint module with synchronous operation of the imprinting, curing and demolding processes. Each spin-coated imprinting glue glass wafer is treated according to the corresponding process of the imprinting, curing and demolding processes, so as to further improve the production efficiency of the nano-imprint process manufacturing of the AR lens. BRIEF DESCRIPTION OF DRAWINGS

[0166] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0167] Figure 1 It is a schematic diagram of the overall structure framework of the AR lens manufacturing equipment of the present application.

[0168] Figure 2 It is a structural schematic diagram of the nano-imprint module;

[0169] Figure 3 It is a structural schematic diagram of the nano-imprint module in the present application; Figure 2 It is a connection structure schematic diagram of the imprinting module and the clamping module in the present application;

[0170] Figure 4 It is a structural schematic diagram of the curing module in the present application; Figure 2 It is a structural schematic diagram of the curing module in the present application;

[0171] Figure 5 It is a structural schematic diagram of the curing module in the present application; Figure 2Structure diagram of the demolding module in the embodiment;

[0172] Figure 6 Structure diagram of the support module in the embodiment; Figure 2 Structure diagram of the support module in the embodiment;

[0173] Figure 7 Structure diagram of the support module in the embodiment; Figure 2 Structure diagram of the support module in the embodiment;

[0174] Figure 8 Structure diagram of the support module in the embodiment; Figure 7 Structure diagram of the support module in the embodiment;

[0175] Figure 9 Structure diagram of the support module in the embodiment; Figure 7 Structure diagram of the support module in the embodiment;

[0176] Figure 10 Structure diagram of the support module in the embodiment; Figure 7 Structure diagram of the support module in the embodiment;

[0177] Figure 11 Structure diagram of the support module in the embodiment; Figure 8 Structure diagram of the support module in the embodiment;

[0178] Figure 12 Structure diagram of the support module in the embodiment;

[0179] Figure 13a , Figure 13b , Figure 13c , Figure 13d , Figure 13e , Figure 13f , Figure 13g , Figure 13h , Figure 13i , Figure 13j , Figure 13k , Figure 13l , Figure 13m , Figure 13n , Figure 13o , Figure 13p , Figure 13q Structure diagram of the support module in the embodiment;

[0180] 1-1-1st lifting screw, 1-2-2nd lifting screw, 1-3-1st slide rail, 1-4-1st compression roller, 2-curing module, 2-1-UV lamp, 3-demolding module, 3-1-3rd lifting screw, 3-2-4th lifting screw, 3-3-2nd slide rail, 3-4-2nd compression roller, 4-supporting module, 4-1-5th lifting screw, 4-2-6th lifting screw, 4-3-supporting table, 5-1st transmission shaft, 6-1st platform, 7-2nd platform, 8-clamping module, 8-1-clamping frame, 8-2-1st elastic component, 8-3-2nd elastic component, 8-4-1st clamp, 8-5-2nd clamp, 8-6-1st positioning slot, 8-7-1st adsorption body, 8-8-2nd positioning slot, 8-9-2nd adsorption body, 8-10-1st roller, 8-11-2nd roller, 8-12-1st magnetic shaft body, 8-13-1st connecting block, 8-14-2nd connecting block, 8-15-1st bearing body, 8-16-1st limiting block, 8-17-2nd limiting block, 9-1st compression template, 10-glass wafer coated with spin-coated compression glue. DETAILED DESCRIPTION

[0181] The technical solutions of the present application will be described clearly and completely below in combination with the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0182] In this document, the terms "first", "second", and other similar terms are not intended to imply any order, quantity, and importance, but are only used to distinguish different elements. In this document, the terms "one", "a", and other similar terms are not intended to mean that there is only one of the mentioned things, but that the description is only directed to one of the mentioned things, which can have one or more. In this document, the terms "include", "contain", and other similar terms are intended to mean logical interrelation, and cannot be regarded as indicating spatial structural relation. For example, "A includes B" is intended to mean that B logically belongs to A, and does not mean that B is located inside A in space. In addition, the meaning of the terms "include", "contain", and other similar terms should be regarded as open, rather than closed. For example, "A includes B" is intended to mean that B belongs to A, but B does not necessarily constitute all of A, and A can also include C, D, E, and other elements.

[0183] In this document, the terms "embodiment," "this embodiment," "preferred embodiment," and "one embodiment" do not imply that the description applies only to one specific embodiment, but rather that such description may also be applicable to one or more other embodiments. Those skilled in the art will understand that any description made herein with respect to one embodiment can be substituted, combined, or otherwise incorporated with the descriptions in one or more other embodiments. Such substitutions, combinations, or other incorporations resulting in new embodiments are readily conceived by those skilled in the art and fall within the scope of protection of this invention.

[0184] In this description, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0185] This invention provides an AR lens manufacturing device, such as... Figure 1 As shown, it includes a feeding module, a plasma processing module, a homogenization module, a nanoimprinting module, a feeding module, a baking module, a post-curing module, and an automatic conveying module.

[0186] in,

[0187] The loading module is used to place the glass wafer substrate.

[0188] The plasma treatment module is used to treat the surface of the glass wafer substrate, remove contaminants such as organic matter from the surface of the glass wafer substrate, and improve the adhesion of the glass wafer substrate surface.

[0189] The spin coating module is used to perform spin coating on the glass wafer substrate after the plasma processing module to obtain a glass wafer with spin-coated and imprinted adhesive.

[0190] The nanoimprint module is used to imprint, cure, and demold glass wafers coated with spin-coated imprinting adhesive to obtain AR lenses.

[0191] The baking module can be used to bake AR lenses.

[0192] The post-curing module can be used to cure AR lenses.

[0193] The unloading module is used to place AR lenses.

[0194] For example,

[0195] The aforementioned feeding and unloading modules can adopt a cassette box design.

[0196] The plasma processing module can use existing equipment, such as atmospheric plasma processing equipment.

[0197] The baking module can use existing equipment, such as a heating plate.

[0198] The post-curing module can use existing equipment, such as a UV lamp.

[0199] The automatic conveying module is used for conveying the materials between the feeding module, the plasma processing module, the glue spreading module, the nano-imprint module, the baking module, the post-curing module and the discharging module, and greatly improves the production efficiency of the AR lens manufacturing.

[0200] For example, the automatic conveying module includes a first controller, a conveying component and a mechanical hand.

[0201] The conveying component includes a first driving motor, a first transmission screw rod, a transmission sliding block and a moving track.

[0202] The first controller is in communication connection with the first driving motor, the first driving motor is connected with the first transmission screw rod, the transmission sliding block is arranged on the first transmission screw rod, the transmission sliding block is in sliding connection with the moving track, and the mechanical hand is fixedly arranged on the transmission sliding block. The mechanical hand is used for grabbing the materials to be conveyed on each module.

[0203] The number of the automatic conveying modules is not limited, and one or more automatic conveying modules can be used, which is selected according to the arrangement design of the feeding module, the plasma processing module, the glue spreading module, the nano-imprint module, the baking module, the post-curing module and the discharging module.

[0204] For example, the glue spreading module includes an adsorption stage, an adhesion promoter supply unit and a stamping glue supply unit.

[0205] The adsorption stage can rotate, and the adsorption stage, the adhesion promoter supply unit and the stamping glue supply unit can use existing equipment, such as the existing vacuum adsorption stage, the existing pumping equipment and the like.

[0206] The adsorption stage adsorbs and fixes the glass wafer substrate conveyed by the automatic conveying module.

[0207] The adhesion promoter supply unit drops the adhesion promoter on the surface of the glass wafer substrate, and the adsorption stage rotates to spin the adhesion promoter on the surface of the glass wafer substrate, so as to obtain the glass wafer with the spin-coated adhesion promoter.

[0208] The stamping glue supply unit drops the stamping glue on the surface of the glass wafer with the spin-coated adhesion promoter.

[0209] The adsorption stage rotates to spin the stamping glue on the surface of the glass wafer, so as to obtain the glass wafer with the spin-coated stamping glue.

[0210] As a preferred embodiment, the uniform coating module further comprises a positioning unit, which can place the glass wafer substrate delivered by the automatic delivery module on the corresponding position of the adsorption stage. As an example, the positioning unit can be realized by a mechanical hand combined with an optical positioning lens, which can be realized by using existing equipment.

[0211] As a preferred embodiment, the AR lens manufacturing device described above further comprises a first heating module and a second heating module.

[0212] As an example, the first heating module can be a heating plate, and the second heating module can also be a heating plate.

[0213] Among them,

[0214] The first heating module performs heating treatment on the glass wafer surface of the spin-on adhesion agent delivered by the automatic delivery module. The heating treatment has two effects. One effect is to remove the diluent added in the adhesion agent to make the adhesion agent have a required thinness. The other effect is to improve the adhesion of the adhesion agent to the surface of the glass wafer substrate.

[0215] The second heating module performs heating treatment on the glass wafer surface of the spin-on imprinting glue delivered by the automatic delivery module to remove the diluent added in the imprinting glue to make the imprinting glue have a required thinness.

[0216] As a preferred embodiment, the AR lens manufacturing device described above further comprises a cooling module, which is used for cooling treatment on the heated spin-on imprinting glue glass wafer to make the spin-on imprinting glue glass wafer at room temperature, so as to avoid affecting the subsequent nano-imprinting effect.

[0217] As an example, the cooling module can be a cooling plate.

[0218] Among them, the nano-imprinting module can realize synchronous operation of the imprinting, curing and demolding processes.

[0219] As an example,

[0220] As shown in Figure 2 , the nano-imprinting module comprises a second driving motor, a first transmission shaft 5, a first platform 6, a second platform 7, an imprinting module 1, a curing module 2, a demolding module 3, a supporting module 4 and a clamping module (not shown in the figure).

[0221] The imprinting module 1, the demolding module 3 and the supporting module 4 can be electromagnetically adsorbed and connected with the clamping module.

[0222] The first platform 6 is located above the second platform 7.

[0223] The lower end face of the first platform 6 is respectively provided with the embossing module 1, the curing module 2 and the demolding module 3.

[0224] The upper end face of the second platform 7 is respectively provided with the support module 4 below the embossing module 1, the curing module 2 and the demolding module 3.

[0225] The first platform 6 is static, and a first through hole is formed in the middle of the first platform 6, and the first transmission shaft 5 is connected to the first through hole through a bearing.

[0226] The second platform 7 can rotate, and a second drive motor is connected to the first transmission shaft 5, a second through hole is formed in the middle of the second platform 7, the first transmission shaft 5 is fixedly connected to the second through hole, and the second drive motor drives the second platform 7 to rotate through the first transmission shaft 5.

[0227] The embossing module 1 includes a first support unit and a first roller pressing unit.

[0228] The first roller pressing unit is arranged in the first support unit.

[0229] The first support unit is arranged on the lower end face of the first platform, and the first support unit can be lifted and has an electromagnetic adsorption function.

[0230] The first roller pressing unit is arranged on the lower end face of the first platform, and the first roller pressing unit can be lifted and horizontally moved.

[0231] As shown in Figure 3 The first support unit includes a third drive motor, a fourth drive motor, a first lifting lead screw 1-1, a second lifting lead screw 1-2 and a second controller.

[0232] The third drive motor is connected to the top end of the first lifting lead screw 1-1, the bottom end of the first lifting lead screw 1-1 is provided with a first electromagnetic adsorption part, and the first electromagnetic adsorption part is in communication connection with the second controller. The second controller can control the opening and closing of the adsorption function of the first electromagnetic adsorption part, and the first electromagnetic adsorption part can adopt an electromagnetic adsorption plate.

[0233] The fourth drive motor is connected to the top end of the second lifting lead screw 1-2, the bottom end of the second lifting lead screw 1-2 is provided with a second electromagnetic adsorption part, and the second electromagnetic adsorption part is in communication connection with the second controller. The second controller can control the opening and closing of the adsorption function of the second electromagnetic adsorption part, and the second electromagnetic adsorption part can adopt an electromagnetic adsorption plate.

[0234] The first platform 6 is provided with a third through hole and a fourth through hole.

[0235] The stem of the first lifting screw 1-1 is threadedly connected with the third through hole, and the stem of the second lifting screw 1-2 is threadedly connected with the fourth through hole.

[0236] Exemplarily,

[0237] The first roller pressing unit comprises a first horizontal sliding assembly, a first cylinder assembly and a first pressing roller assembly.

[0238] The first horizontal sliding assembly is installed on the lower end surface of the first platform 6.

[0239] The first horizontal sliding assembly is connected with the first cylinder assembly.

[0240] The first cylinder assembly is connected with the first pressing roller assembly.

[0241] Exemplarily,

[0242] The first horizontal sliding assembly comprises a first sliding rail 1-3, a first sliding base, a fifth driving motor and a second transmission screw.

[0243] The first sliding rail is installed on the lower end surface of the first platform 6.

[0244] The fifth driving motor is connected with the second transmission screw, the second transmission screw is connected with the first sliding base, and the first sliding base is slidingly connected with the first sliding rail.

[0245] The bottom end of the first sliding base is fixedly connected with the first cylinder assembly.

[0246] Exemplarily, the first cylinder assembly can adopt an existing cylinder system.

[0247] Exemplarily,

[0248] As shown in Figure 3 , the first pressing roller assembly comprises a sixth driving motor, a second transmission shaft and a first pressing roller 1-4.

[0249] The bottom end of the sixth driving motor is connected with the first cylinder assembly, the side wall of the sixth driving motor is connected with the second transmission shaft, and the second transmission shaft is connected with the first pressing roller 1-4.

[0250] Exemplarily, as shown in Figure 4 , the above curing module 2 can adopt a UV lamp 2-1, and the UV lamp 2-1 is installed on the lower end surface of the first platform 6.

[0251] Exemplarily, the above demolding module 3 comprises a second supporting unit and a second roller pressing unit.

[0252] The second roller pressing unit is arranged inside the second supporting unit.

[0253] The second supporting unit is arranged on the lower end surface of the first platform, and the second supporting unit can be lifted and has an electromagnetic adsorption function.

[0254] The second roller pressing unit is arranged at the lower end surface of the first platform and can be lifted and horizontally moved.

[0255] Exemplarily,

[0256] As Figure 5 shown, the second support unit comprises a seventh driving motor, an eighth driving motor, a third lifting screw 3-1, a fourth lifting screw 3-2, and a third controller.

[0257] The seventh driving motor is connected to the top end of the third lifting screw 3-1, and the bottom end of the third lifting screw 3-1 is provided with a third electromagnetic suction accessory which is in communication connection with the third controller. The third controller can control the opening and closing of the suction function of the third electromagnetic suction accessory. Exemplarily, the third electromagnetic suction accessory herein can adopt an electromagnetic suction plate.

[0258] The eighth driving motor is connected to the top end of the fourth lifting screw 3-2, and the bottom end of the fourth lifting screw 3-2 is provided with a fourth electromagnetic suction accessory which is in communication connection with the third controller. The third controller can control the opening and closing of the suction function of the fourth electromagnetic suction accessory. Exemplarily, the fourth electromagnetic suction accessory herein can adopt an electromagnetic suction plate.

[0259] The first platform 6 is provided with a fifth through hole and a sixth through hole.

[0260] The shaft body of the third lifting screw 3-1 is in threaded connection with the fifth through hole, and the shaft body of the fourth lifting screw 3-2 is in threaded connection with the sixth through hole.

[0261] Exemplarily,

[0262] The second roller pressing unit comprises a second horizontal sliding assembly, a second cylinder assembly, and a second pressing roller assembly.

[0263] The second horizontal sliding assembly is installed at the lower end surface of the first platform 6.

[0264] The second horizontal sliding assembly is connected with the second cylinder assembly.

[0265] The second cylinder assembly is connected with the second pressing roller assembly.

[0266] Exemplarily,

[0267] The second horizontal sliding assembly comprises a second sliding rail 3-3, a second sliding seat, a ninth driving motor, and a third transmission screw.

[0268] The second sliding rail is installed at the lower end surface of the first platform 6.

[0269] The ninth driving motor is connected with the third transmission screw rod, the third transmission screw rod is connected with the second sliding base, and the second sliding base is in sliding connection with the second sliding rail.

[0270] The bottom end of the second sliding base is fixedly connected with the second cylinder assembly.

[0271] Exemplarily, the second cylinder assembly can adopt an existing cylinder system.

[0272] Exemplarily,

[0273] As Figure 5 shown, the second compression roller assembly comprises a tenth driving motor, a third transmission shaft, and a second compression roller 3-4.

[0274] The bottom end of the tenth driving motor is connected with the second cylinder assembly, the side wall of the tenth driving motor is connected with the third transmission shaft, and the third transmission shaft is connected with the second compression roller 3-4.

[0275] Exemplarily,

[0276] The support module 4 comprises a lifting unit and a support table.

[0277] The support table is installed on the upper end surface of the second platform.

[0278] The lifting unit is arranged on both sides of the support table.

[0279] The top end of the lifting unit has an electromagnetic adsorption function.

[0280] Exemplarily,

[0281] As Figure 6 shown, the lifting unit comprises an eleventh driving motor, a twelfth driving motor, a fifth lifting screw rod 4-1, a sixth lifting screw rod 4-2, and a fourth controller.

[0282] The fifth lifting screw rod 4-1 and the sixth lifting screw rod 4-2 are arranged on both sides of the support table.

[0283] The eleventh driving motor is connected with the bottom end of the fifth lifting screw rod 4-1, the top end of the fifth lifting screw rod 4-1 is provided with a fifth electromagnetic adsorption member, the fifth electromagnetic adsorption member is in communication connection with the fourth controller, and the fourth controller can control the opening and closing of the adsorption function of the fifth electromagnetic adsorption member; exemplarily, the fifth electromagnetic adsorption member herein can adopt an electromagnetic adsorption plate.

[0284] The twelfth driving motor is connected with the bottom end of the sixth lifting screw rod 4-2, the top end of the sixth lifting screw rod 4-2 is provided with a sixth electromagnetic adsorption member, the sixth electromagnetic adsorption member is in communication connection with the fourth controller, and the fourth controller can control the opening and closing of the adsorption function of the sixth electromagnetic adsorption member; exemplarily, the sixth electromagnetic adsorption member herein can adopt an electromagnetic adsorption plate.

[0285] The second platform 7 is provided with a seventh through hole and an eighth through hole.

[0286] The shank of the fifth lifting screw 4-1 is screwed into the seventh through hole, and the shank of the sixth lifting screw 4-2 is screwed into the eighth through hole.

[0287] As shown in the drawing, Figure 7 The clamping module 8 includes a clamping frame 8-1, elastic components, and clamps.

[0288] The clamps are used to clamp the embossing template 9.

[0289] The embossing template 9 includes a soft film substrate and a soft film adhesive attached to the lower side of the soft film substrate, and the soft film adhesive has an etching structure of a master.

[0290] The preparation process of the embossing template is as follows:

[0291] Spin-coat the soft film adhesive on the master with the etching structure.

[0292] Attach the soft film substrate to the master, and apply pressure to the soft film substrate so that the etching structure on the master is transferred to the soft film adhesive, obtaining the soft film adhesive with the etching structure.

[0293] Use UV curing and demolding procedures in sequence to adhere the soft film adhesive with the etching structure to the soft film substrate, obtaining the embossing template.

[0294] The elastic components include a first elastic component 8-2 and a second elastic component 8-3, and the clamps include a first clamp 8-4 and a second clamp 8-5.

[0295] The inside of the clamping frame 8-1 is connected to the first clamp 8-4 through the first elastic component 8-2, and the other side of the clamping frame 8-1 is connected to the second clamp 8-5 through the second elastic component 8-3.

[0296] One end of the embossing template 9 is connected to the first clamp 8-4, and the other end of the embossing template 9 is connected to the second clamp 8-5.

[0297] The elastic components can be springs. The first clamp and / or the second clamp can include a clamp plate and a screw, and the embossing template is fixed by the clamp plate and fastened by the screw.

[0298] The two ends of the clamping frame 8-1 are provided with adsorption bodies with magnetic attraction function, so as to be magnetically connected with the embossing module 1, the demolding module 3, the supporting module 4, etc.

[0299] For example, a first positioning groove 8-6 is formed on the upper surface of one side of the clamping frame 8-1, and a first magnetic adsorbent 8-7 with magnetic attraction function is placed in the first positioning groove 8-6. A second positioning groove 8-8 is formed on the upper surface of the other side of the clamping frame 8-1, and a second magnetic adsorbent 8-9 (e.g., ...) with magnetic attraction function is placed in the second positioning groove 8-8. Figure 9 (As shown).

[0300] Because during the imprinting process, one side of the clamping module 8 needs to be electromagnetically connected to one side of the support module 4, and the other side of the clamping module 8 needs to be electromagnetically connected to one side of the imprinting module 1. After the imprinting operation is completed, the bottom ends of the clamping module 8 and the imprinting module 1 are flush. In a preferred embodiment, the inner wall length of the first positioning groove 8-6 is greater than the diameter of the first adsorbent 8-7, and the inner wall of the second positioning groove 8-8 is adapted to the outer wall of the second adsorbent 8-9. Alternatively, the inner wall of the first positioning groove 8-6 is adapted to the outer wall of the first adsorbent 8-7, and the inner wall length of the second positioning groove 8-8 is greater than the diameter of the second adsorbent 8-9. Thus, during the imprinting process, by moving the first adsorbent 8-7 within the first positioning groove 8-6 or the second adsorbent 8-9 within the second positioning groove 8-8, it is ensured that the bottom ends of the clamping module 8 and the imprinting module 1 are flush after the imprinting operation is completed.

[0301] In a preferred embodiment, to facilitate the movement of the first adsorbent 8-7 within the first positioning groove 8-6 or the movement of the second adsorbent 8-9 within the second positioning groove 8-8, such as... Figure 10 As shown, when the inner wall length of the first positioning groove 8-6 is greater than the diameter of the first adsorbent 8-7, the first rollers 8-10 are closely arranged on the upper surface of the inner wall along the length direction of the first positioning groove 8-6, and the second rollers 8-11 are closely arranged on the lower surface of the inner wall along the length direction of the first positioning groove 8-6. When the inner wall length of the second positioning groove 8-8 is greater than the diameter of the second adsorbent 8-9, the first rollers 8-10 are closely arranged on the upper surface of the inner wall along the length direction of the second positioning groove 8-8, and the second rollers 8-11 are closely arranged on the lower surface of the inner wall along the length direction of the second positioning groove 8-8; this case is not shown in the figure.

[0302] In a preferred embodiment, the first adsorbent 8-7 and the second adsorbent 8-9 are capable of rotation. For example, the first adsorbent 8-7 employs a first magnetic shaft 8-12 (such as...). Figure 8 As shown in the figure, the second adsorbent adopts a second magnetic shaft (not shown in the figure). Under the action of external force, the first and second magnetic shafts can rotate, thereby realizing the adjustment of the imprinting angle during the imprinting process and preventing damage to the imprinting module 1 that is magnetically connected to the corresponding adsorbent. The first and second magnetic shafts can be existing magnetic shafts.

[0303] For the first adsorbent 8-7, a first magnetic shaft body is adopted, and for the second adsorbent, a second magnetic shaft body is adopted. In the case that the first positioning groove 8-6 is closely arranged with the first roller 8-10 on the upper surface of the inner wall along the length direction of the inner wall, and the first positioning groove 8-6 is closely arranged with the second roller 8-11 on the lower surface of the inner wall along the length direction of the inner wall, in order to ensure that the first magnetic shaft body and the second magnetic shaft body can rotate, and to smoothly realize the movement of the first magnetic shaft body relative to the first roller 8-10 and the second roller 8-11.

[0304] As shown in the example, Figure 8 The clamping module 8 further includes a first connecting component, which includes a first connecting block 8-13, a second connecting block 8-14, a first bearing body 8-15, and a second bearing body.

[0305] One end of the first magnetic shaft body 8-12 is connected with the first connecting block 8-13 through the first bearing body 8-15 (as shown in the example), Figure 11 The upper end surface of the first connecting block 8-13 is in contact with the first roller 8-10, and the lower end surface of the first connecting block 8-13 is in contact with the second roller 8-11.

[0306] The other end of the first magnetic shaft body 8-12 is connected with the second connecting block 8-14 through the second bearing body (not shown in the figure), the upper end surface of the second connecting block 8-14 is in contact with the first roller 8-10, and the lower end surface of the second connecting block 8-14 is in contact with the second roller 8-11.

[0307] At this time, in order to ensure that the first connecting block 8-13 and the second connecting block 8-14 are in contact with the first roller 8-10 and the second roller 8-11, the first connecting component further includes a first limiting block 8-16 and a second limiting block 8-17. The end of the first connecting block 8-13 in contact with the first roller 8-10 or the second roller 8-11 is connected with the first limiting block 8-16 through the gap between the lower end surface of the first roller 8-10 and the upper end surface of the second roller 8-11, and the height of the first limiting block 8-16 is greater than the gap height between the lower end surface of the first roller 8-10 and the upper end surface of the second roller 8-11. The end of the second connecting block 8-14 in contact with the first roller 8-10 or the second roller 8-11 is connected with the second limiting block 8-17 through the gap between the lower end surface of the first roller 8-10 and the upper end surface of the second roller 8-11, and the height of the second limiting block 8-17 is greater than the gap height between the lower end surface of the first roller 8-10 and the upper end surface of the second roller 8-11.

[0308] In the case that the first adsorption body adopts the first magnetic attraction shaft body, the second adsorption body adopts the second magnetic attraction shaft body, and the second positioning groove is closely arranged with the first roller on the inner wall upper surface along the length direction of the inner wall and closely arranged with the second roller on the inner wall lower surface along the length direction of the inner wall, in order to ensure that the first magnetic attraction shaft body and the second magnetic attraction shaft body can rotate, and in order to smoothly realize the movement of the second magnetic attraction shaft body relative to the first roller and the second roller.

[0309] Exemplarily, the clamping module 8 further comprises a second connecting component, which comprises a third connecting block, a fourth connecting block, a third bearing body and a fourth bearing body (not shown in the figure).

[0310] One end of the second magnetic attraction shaft body is connected with the third connecting block through the third bearing body, and the upper end surface of the third connecting block is in contact with the first roller, and the lower end surface of the third connecting block is in contact with the second roller. The other end of the second magnetic attraction shaft body is connected with the fourth connecting block through the fourth bearing body, and the upper end surface of the fourth connecting block is in contact with the first roller, and the lower end surface of the fourth connecting block is in contact with the second roller.

[0311] At this time, in order to ensure that the third connecting block and the fourth connecting block are in contact with the first roller and the second roller, the second connecting component further comprises a third limiting block and a fourth limiting block. The end of the third connecting block in contact with the first roller or the second roller is connected with the third limiting block through the gap between the lower end surface of the first roller and the upper end surface of the second roller, and the height of the third limiting block is greater than the gap height between the lower end surface of the first roller and the upper end surface of the second roller. The end of the fourth connecting block in contact with the first roller or the second roller is connected with the fourth limiting block through the gap between the lower end surface of the first roller and the upper end surface of the second roller, and the height of the fourth limiting block is greater than the gap height between the lower end surface of the first roller and the upper end surface of the second roller.

[0312] Correspondingly, the application further provides an AR lens manufacturing process using the above-mentioned AR lens manufacturing equipment, as shown in the figure. Figure 12 As shown, the AR lens manufacturing process generally comprises the following steps:

[0313] P1 places a glass wafer substrate on the feeding module.

[0314] P2 The automatic conveying module conveys the glass wafer substrate to the plasma treatment module.

[0315] P3 The plasma treatment module processes the surface of the glass wafer substrate. Exemplarily, the processing gas is oxygen, argon, nitrogen, etc., the processing power is 50-500w, and the processing time is 5-60s.

[0316] P4 The automatic conveying module conveys the glass wafer substrate processed by the plasma treatment module to the glue uniformizing module.

[0317] The P5 uniform glue module performs uniform glue treatment on the glass wafer substrate to obtain a glass wafer coated with spin-coated imprint glue.

[0318] The P6 automatic conveying module conveys the glass wafer coated with spin-coated imprint glue to the nano-imprint module.

[0319] The P7 nano-imprint module performs imprinting, curing and demolding treatment on the glass wafer coated with spin-coated imprint glue to obtain an AR lens.

[0320] The P8 automatic conveying module conveys the AR lens to the baking module.

[0321] The P9 baking module performs baking treatment on the AR lens. For example, the baking temperature is 50-150°C, and the baking time is 60s-1H, which can improve the stability of the product.

[0322] The P10 automatic conveying module conveys the AR lens after baking treatment to the post-curing module.

[0323] The P11 post-curing module performs curing treatment on the AR lens after baking treatment. For example, the curing treatment adopts UV curing treatment, the curing power is 100-1000mW, and the curing time is 10-600s, which can improve the stability of the product.

[0324] The P12 automatic conveying module conveys the AR lens after curing treatment to the discharging module.

[0325] It should be noted that the above P8-P11 steps are optional operations, and whether these treatments are required can be determined according to the product requirements of the AR lens.

[0326] The uniform glue module performs uniform glue treatment on the glass wafer substrate to obtain a glass wafer coated with spin-coated imprint glue, which includes the following steps:

[0327] The adsorption stage adsorbs and fixes the glass wafer substrate conveyed by the automatic conveying module.

[0328] The tackifier supply unit is used to drop tackifier on the surface of the glass wafer substrate. For example, the model of the tackifier is KH570, KBM603, etc.

[0329] The adsorption stage rotates to spin the tackifier on the surface of the glass wafer substrate to obtain a glass wafer coated with spin-coated tackifier.

[0330] The automatic conveying module conveys the glass wafer coated with spin-coated tackifier to the first heating module.

[0331] The first heating module performs heating treatment on the surface of the glass wafer coated with spin-coated tackifier, usually at 80-120°C for 2-5min.

[0332] The automatic conveying module conveys the glass wafer with the heated spin-on adhesion agent to the adsorption stage.

[0333] The adsorption stage adsorbs and fixes the glass wafer with the heated spin-on adhesion agent.

[0334] The imprinting glue supply unit is used to drop the imprinting glue on the surface of the glass wafer with the heated spin-on adhesion agent. For example, the imprinting glue can be de lo 533861 type.

[0335] The adsorption stage rotates so that the imprinting glue is spin-coated on the surface of the glass wafer, and the excess imprinting glue on the outer circle of the surface of the glass wafer substrate and the side and back surface is removed, thereby obtaining the glass wafer with the spin-coated imprinting glue.

[0336] The automatic conveying module conveys the glass wafer with the spin-coated imprinting glue to the second heating module.

[0337] The second heating module heats the glass wafer with the spin-coated imprinting glue, usually at 50-100°C for 30-120s.

[0338] The automatic conveying module conveys the glass wafer with the heated spin-coated imprinting glue to the cooling module.

[0339] The cooling module cools the glass wafer with the heated spin-coated imprinting glue, thereby obtaining the glass wafer with the cooled spin-coated imprinting glue. For example, the glass wafer with the heated spin-coated imprinting glue is placed on a cooling plate at room temperature until the temperature of the glass wafer decreases to room temperature.

[0340] The nano-imprinting module performs imprinting, curing, and demolding processes on the glass wafer with the spin-coated imprinting glue, thereby obtaining the AR lens, and specifically includes the following steps:

[0341] The plurality of glass wafers with the spin-coated imprinting glue are simultaneously placed in the nano-imprinting module that performs the imprinting, curing, and demolding processes synchronously.

[0342] Each glass wafer with the spin-coated imprinting glue is processed according to the corresponding process in the imprinting, curing, and demolding processes.

[0343] More specifically, the method includes the following steps:

[0344] S1 places the glass wafer with the spin-coated imprinting glue 10 on the support module 4 below the imprinting module 1 to perform the imprinting operation, thereby obtaining the glass wafer imprinting unit. For example, the imprinting speed is 0.5-20mm / s, and the imprinting pressure is 1000Pa-200000Pa.

[0345] Specifically,

[0346] 1) Place the spin-coated glass wafer 10 on the support module 4 under the imprint module 1 (as shown in Figure 13a .

[0347] 2) Use the clamping module 8 to clamp the imprint template 9, and magnetically attract the two sides of the clamping module 8 to the two sides of the bottom end of the first support unit (as shown in Figure 13a .

[0348] 3) Lower the one side of the bottom end of the first support unit, magnetically attract the one side of the top end of the support module 4 under the imprint module 1 to the one side of the clamping module 8, and magnetically attract the other side of the bottom end of the first support unit to the other side of the clamping module 8, so that the clamping module 8 reaches the imprinting angle (as shown in Figure 13b .

[0349] 4) Move the first roller unit to the imprint starting position, then lower the first roller unit to the surface of the spin-coated glass wafer 10, move the first roller unit from the imprint starting position to the imprint ending position, and slowly lower the other side of the bottom end of the first support unit, so that the imprinting process keeps the imprinting angle constant until the imprinting operation is completed. The purpose of keeping the imprinting angle constant is to ensure the uniformity of the imprinting action (as shown in Figure 13c , Figure 13d , Figure 13e .

[0350] 5) Continue to lower the other side of the bottom end of the first support unit, so that the two sides of the clamping module 8 are magnetically attracted to the two sides of the top end of the support module 4 under the imprint module 1, and obtain the glass wafer imprinting unit (as shown in Figure 13f .

[0351] 6) Raise the first roller unit, and complete the imprinting process (as shown in Figure 13g .

[0352] S2-1 drives the second drive motor to rotate the second platform 7 through the first transmission shaft 5, moves the glass wafer imprinting unit under the curing module 2, and performs the curing operation on the glass wafer imprinting unit, to obtain the glass wafer curing unit.

[0353] For example, turn on the UV lamp 2-1 to irradiate the glass wafer imprinting unit, so that the glass wafer imprinting unit performs the curing operation, to obtain the glass wafer curing unit (as shown in Figure 13h , Figure 13i . For example, the UV curing power is 100 mW-2000 mW, and the UV curing time is 5 s-600 s.

[0354] S2-2, at the same time, places the spin-coated glass wafer 10 on the support module 4 under the imprint module 1 to perform the imprinting operation of step S1, to obtain the glass wafer imprinting unit.

[0355] S3-1 drives the second driving motor to drive the second platform 7 through the first transmission shaft 5 to rotate, so that the glass wafer curing unit moves to the demolding module 3 below to perform the demolding operation, and the AR lens is obtained. Illustratively, the demolding pressure is 1000Pa-50000Pa, and the demolding speed is 0.1mm / s-20mm / s.

[0356] Specifically,

[0357] 1) The bottom ends of the second support units on both sides are lowered at the same time, so that the two sides of the clamping module 8 in the glass wafer curing unit moving below the demolding module 3 are electromagnetically adsorbed and connected with the bottom ends of the second support units on both sides (as shown in Figure 13j 、 Figure 13k ).

[0358] 2) The second roller pressing unit is moved, so that the second roller pressing unit is located at the demolding starting position (as shown in Figure 13k ).

[0359] 3) The bottom end of one side of the second support unit is slowly raised, and the second roller pressing unit moves from the demolding starting position to the demolding end position, during which the demolding angle is constant, until the second roller pressing unit moves to the demolding end position, and the demolding process is completed, and the AR lens is obtained on the support module 4 below the demolding module 3 (as shown in Figure 13l 、 Figure 13m ).

[0360] 4) The second roller pressing unit is raised, and the other side of the bottom end of the second support unit is raised to the second support unit flush with the clamping module 8, so that the automatic conveying module obtains the AR lens from the support module 4 (as shown in Figure 13n 、 Figure 13o ).

[0361] 5) The top end of the support module 4 below the demolding module 3 is raised, so that the top ends of the support module 4 on both sides are electromagnetically adsorbed and connected with the two sides of the clamping module 8, and the clamping module 8 can continue to be put into the stamping module 1 to perform the stamping operation by rotating the second platform 7 (as shown in Figure 13p 、 Figure 13q ).

[0362] S3-2 simultaneously, the glass wafer stamping unit moves below the curing module 2 to perform the curing operation of step S2-1, and the glass wafer curing unit is obtained.

[0363] The glass wafer 10 with spin-coated stamping glue is placed on the support module 4 below the stamping module 1 to perform the stamping operation of step S1, and the glass wafer stamping unit is obtained.

[0364]

[0365] S4 repeats the above operation, so that each spin-coated glass wafer is processed according to the above imprinting, curing and demolding processes, and different glass wafers are processed simultaneously in the corresponding processes of imprinting, curing and demolding, greatly improving the production efficiency of the AR lens nanoimprint process.

[0366] For example, the 4-inch glass wafer is spin-coated with the imprinting glue, and the nanoimprint process parameters are as follows: imprinting speed 1 mm / s, curing time 20 s, and demolding speed 1 mm / s.

[0367] The existing nanoimprint equipment: each spin-coated 4-inch glass wafer needs to enter the nanoimprint equipment in sequence, and is processed according to the sequence of imprinting, curing and demolding, and the single imprinting time is 100 s, the curing time is 20 s, the demolding time is 100 s, and the additional required time is 30 s (waiting time before curing, waiting time before demolding, and mechanical operation time), so the total time for producing a single AR lens is about 250 s.

[0368] The nanoimprint equipment of the present application: the imprinting, curing and demolding modules of the nanoimprint equipment are operated simultaneously, each spin-coated glass wafer is processed according to the processes of imprinting, curing and demolding, and different glass wafers are processed simultaneously in the corresponding processes of imprinting, curing and demolding. The imprinting time is 100 s, the curing time is 20 s, the demolding time is 100 s, and the mechanical operation time is 15 s (the waiting time before curing and the waiting time before demolding coincide with the mechanical operation time), so the time required for producing a single AR lens is equal to the sum of the longest time of the modules of imprinting, curing and demolding and the mechanical operation time, i.e. the total time is about 115 s.

[0369] It can be seen that the nanoimprint equipment of the present application greatly improves the production efficiency of the AR lens nanoimprint process compared with the existing equipment.

[0370] The above embodiments are only used to illustrate the technical solutions of the present application and not to limit it, although the present application has been described in detail with reference to the above embodiments, the ordinary skilled in the art can still modify or equivalently replace the specific embodiments of the present application, and any modification or equivalent replacement that does not deviate from the spirit and scope of the present application is within the protection scope of the claims of the application.

Claims

1. An AR lens manufacturing device, characterized in that, It includes a feeding module, a coating module, a nano-imprinting module, a discharging module, and an automatic conveying module; The feeding module is used to place the glass wafer substrate; The automatic conveying module conveys the glass wafer substrate to the homogenizing module; The spin coating module performs a spin coating process on the glass wafer substrate to obtain a glass wafer with spin-coated and imprinted adhesive. The automatic conveying module conveys the glass wafer coated with spin-on imprinting adhesive to the nanoimprinting module; The nanoimprint module performs imprinting, curing, and demolding processes on the glass wafer coated with the spin-coated imprinting adhesive to obtain an AR lens. The automatic conveying module conveys the AR lens to the unloading module; The unloading module is used to place AR lenses; The nanoimprint module includes a second drive motor, a first transmission shaft, a first platform, a second platform, an imprint module, a curing module, a demolding module, a support module, and a clamping module; The clamping module is used to clamp the embossing template; The first platform is stationary above the second platform; The lower end face of the first platform is respectively provided with an imprinting module, a curing module and a demolding module, and the imprinting module, the demolding module and the support module can be electromagnetically adsorbed and connected to the clamping module; The support modules are respectively arranged on the upper surface of the second platform below the imprinting module, the curing module and the demolding module; The second drive motor is connected to the first transmission shaft, and the first transmission shaft is fixedly connected to the second platform; the second drive motor drives the second platform to rotate through the first transmission shaft.

2. The AR lens manufacturing equipment according to claim 1, characterized in that, It also includes a plasma processing module; The automatic conveying module conveys the glass wafer substrate to the plasma processing module; The plasma processing module processes the surface of the glass wafer substrate.

3. The AR lens manufacturing equipment according to claim 1, characterized in that, The spin coating module includes an adsorption stage, a tackifier supply unit, and an imprint adhesive supply unit. The adsorption platform is rotatable; The automatic conveying module conveys the glass wafer substrate to the adsorption stage; The adsorption stage adsorbs and fixes the glass wafer substrate; The adhesive supply unit drips adhesive onto the surface of the glass wafer substrate; The adsorption stage rotates, causing the adhesive to be spin-coated onto the surface of the glass wafer substrate, thus obtaining a glass wafer with spin-coated adhesive. The imprint adhesive supply unit applies imprint adhesive to the surface of the glass wafer coated with spin-coated tackifier; The adsorption stage rotates, causing the imprinting adhesive to be spin-coated onto the surface of the glass wafer, resulting in a glass wafer with spin-coated imprinting adhesive.

4. The AR lens manufacturing equipment according to claim 3, characterized in that, It also includes a first heating module; The automatic conveying module conveys the glass wafers coated with spin-on tackifier to the first heating module; The first heating module heats the surface of the glass wafer to which the spin-coated tackifier is applied.

5. The AR lens manufacturing equipment according to claim 3 or 4, characterized in that, It also includes a second heating module; The automatic conveying module conveys the glass wafers coated with spin-on imprinting adhesive to the second heating module; The second heating module heats the surface of the glass wafer to which the spin-coated printing adhesive is applied.

6. The AR lens manufacturing equipment according to claim 1, characterized in that, It also includes a cooling module; The automatic conveying module conveys the glass wafer coated with spin-on imprinting adhesive to the cooling module; The cooling module performs a cooling process on the glass wafers coated with spin-on imprinting adhesive.

7. The AR lens manufacturing equipment according to claim 1, characterized in that, The automatic conveying module includes a first controller, a conveying component, and a robotic arm; The conveying component includes a first drive motor, a first transmission screw, a transmission slider, and a moving track; The first controller is communicatively connected to the first drive motor, the first drive motor is connected to the first transmission screw, a transmission slider is provided on the first transmission screw, the transmission slider is slidably connected to the moving track, and the robot arm is fixedly provided on the transmission slider.

8. The AR lens manufacturing equipment according to claim 1, characterized in that, The imprint template includes a soft film substrate and a soft film adhesive adhered beneath the soft film substrate, wherein the soft film adhesive has an etched structure of a master template.

9. The AR lens manufacturing equipment according to claim 1, characterized in that, A first through hole is opened in the middle of the first platform; A second through hole is opened in the middle of the second platform; The first drive shaft is connected to the first through hole via a bearing; The first drive shaft is fixedly connected to the second through hole.

10. The AR lens manufacturing equipment according to claim 1, characterized in that, The imprinting module includes a first support unit and a first roller pressing unit; The first roller pressing unit is disposed inside the first support unit; The first support unit is located on the lower end face of the first platform. The first support unit is capable of lifting and lowering and has an electromagnetic adsorption function. The first roller pressing unit is located on the lower end face of the first platform, and the first roller pressing unit can move up and down and horizontally.

11. The AR lens manufacturing equipment according to claim 10, characterized in that, The first support unit includes a third drive motor, a fourth drive motor, a first lifting screw, a second lifting screw, and a second controller; The third drive motor is connected to the top of the first lifting screw, and the bottom of the first lifting screw is provided with a first electromagnetic adsorption component, which is communicatively connected to the second controller. The fourth drive motor is connected to the top of the second lifting screw, and the bottom of the second lifting screw is provided with a second electromagnetic adsorption component, which is communicatively connected to the second controller. A third through hole and a fourth through hole are provided on the first platform; The first lifting screw is threadedly connected to the third through hole, and the second lifting screw is threadedly connected to the fourth through hole.

12. The AR lens manufacturing equipment according to claim 10, characterized in that, The first roller pressing unit includes a first horizontal sliding assembly, a first cylinder assembly, and a first pressure roller assembly; The first horizontal sliding component is mounted on the lower end face of the first platform; The first horizontal sliding component is connected to the first cylinder component; The first cylinder assembly is connected to the first pressure roller assembly.

13. The AR lens manufacturing equipment according to claim 12, characterized in that, The first horizontal sliding assembly includes a first slide rail, a first slide block, a fifth drive motor, and a second transmission screw; The first slide rail is installed on the lower end face of the first platform; The fifth drive motor is connected to the second transmission screw, the second transmission screw is connected to the first slide block, and the first slide block is slidably connected to the first slide rail. The bottom end of the first slide is fixedly connected to the first cylinder assembly.

14. The AR lens manufacturing equipment according to claim 12, characterized in that, The first pressure roller assembly includes a sixth drive motor, a second transmission shaft, and a first pressure roller; The bottom end of the sixth drive motor is connected to the first cylinder assembly, the output shaft on the side wall of the sixth drive motor is connected to the second transmission shaft, and the second transmission shaft is connected to the first pressure roller.

15. The AR lens manufacturing equipment according to claim 1, characterized in that, The curing module uses a UV lamp, which is installed on the lower end face of the first platform.

16. The AR lens manufacturing equipment according to claim 1, characterized in that, The demolding module includes a second support unit and a second roller pressing unit; The second roller pressing unit is disposed inside the second support unit; The second support unit is located on the lower end face of the first platform. The second support unit is capable of lifting and has an electromagnetic adsorption function. The second roller pressing unit is disposed on the lower end face of the first platform, and the second roller pressing unit is capable of lifting, lowering and moving horizontally.

17. The AR lens manufacturing equipment according to claim 16, characterized in that, The second support unit includes a seventh drive motor, an eighth drive motor, a third lifting screw, a fourth lifting screw, and a third controller; The seventh drive motor is connected to the top of the third lifting screw, and the bottom of the third lifting screw is provided with a third electromagnetic adsorption component, which is communicatively connected to the third controller. The eighth drive motor is connected to the top of the fourth lifting screw, and the bottom of the fourth lifting screw is provided with a fourth electromagnetic adsorption component, which is communicatively connected to the third controller. A fifth through hole and a sixth through hole are provided on the first platform; The third lifting screw is threadedly connected to the fifth through hole, and the fourth lifting screw is threadedly connected to the sixth through hole.

18. The AR lens manufacturing equipment according to claim 16, characterized in that, The second roller pressing unit includes a second horizontal sliding assembly, a second cylinder assembly, and a second pressure roller assembly; The second horizontal sliding component is installed on the lower end face of the first platform; The second horizontal sliding assembly is connected to the second cylinder assembly; The second cylinder assembly is connected to the second pressure roller assembly.

19. The AR lens manufacturing equipment according to claim 18, characterized in that, The second horizontal sliding assembly includes a second slide rail, a second slide block, a ninth drive motor, and a third transmission screw; The second slide rail is installed on the lower end face of the first platform; The ninth drive motor is connected to the third transmission screw, the third transmission screw is connected to the second slide block, and the second slide block is slidably connected to the second slide rail; The bottom end of the second slide is fixedly connected to the second cylinder assembly.

20. The AR lens manufacturing equipment according to claim 18, characterized in that, The second pressure roller assembly includes a tenth drive motor, a third transmission shaft, and a second pressure roller; The bottom end of the tenth drive motor is connected to the second cylinder assembly, the output shaft on the side wall of the tenth drive motor is connected to the third transmission shaft, and the third transmission shaft is connected to the second pressure roller.

21. The AR lens manufacturing equipment according to claim 1, characterized in that, The support module includes a lifting unit and a support platform; The support platform is installed on the upper surface of the second platform; The lifting unit is located on both sides of the support platform; The top of the lifting unit has an electromagnetic adsorption function.

22. The AR lens manufacturing equipment according to claim 21, characterized in that, The lifting unit includes an eleventh drive motor, a twelfth drive motor, a fifth lifting screw, a sixth lifting screw, and a fourth controller; The fifth and sixth lifting screws are arranged on both sides of the support platform; The eleventh drive motor is connected to the bottom end of the fifth lifting screw, and the top end of the fifth lifting screw is provided with a fifth electromagnetic adsorption component, which is communicatively connected to the fourth controller. The twelfth drive motor is connected to the bottom end of the sixth lifting screw, and the top end of the sixth lifting screw is provided with a sixth electromagnetic adsorption component, which is communicatively connected to the fourth controller. The second platform is provided with a seventh through hole and an eighth through hole; The fifth lifting screw is threadedly connected to the seventh through hole, and the sixth lifting screw is threadedly connected to the eighth through hole.

23. The AR lens manufacturing equipment according to claim 1, characterized in that, It also includes a baking module; The automatic delivery module delivers the AR lens to the baking module; The baking module performs a baking process on the AR lens.

24. The AR lens manufacturing equipment according to claim 1, characterized in that, It also includes a post-curing module; The automatic delivery module delivers the AR lens to the post-curing module; The post-curing module cures the AR lens.

25. An AR lens manufacturing process, characterized in that, Includes the following steps: A glass wafer substrate is placed on the feeding module; An automatic conveying module is used to transport the glass wafer substrate to the homogenization module; The spin coating module performs a spin coating process on the glass wafer substrate to obtain a glass wafer with spin-coated and imprinted adhesive. The automatic conveying module conveys the glass wafer coated with spin-on imprinting adhesive to the nanoimprinting module; The nanoimprint module performs imprinting, curing, and demolding processes on the glass wafer coated with the spin-coated imprinting adhesive to obtain an AR lens. The automatic conveying module conveys the AR lens to the unloading module; The nanoimprint module includes a second drive motor, a first transmission shaft, a first platform, a second platform, an imprint module, a curing module, a demolding module, a support module, and a clamping module; The clamping module is used to clamp the embossing template; The first platform is stationary above the second platform; The lower end face of the first platform is respectively provided with an imprinting module, a curing module and a demolding module, and the imprinting module, the demolding module and the support module can be electromagnetically adsorbed and connected to the clamping module; The support modules are respectively installed on the upper surface of the second platform below the imprinting module, the curing module, and the demolding module; The second drive motor is connected to the first drive shaft, and the first drive shaft is fixedly connected to the second platform; The second drive motor drives the second platform to rotate via the first transmission shaft.

26. The AR lens manufacturing process according to claim 25, characterized in that, Before the automatic conveying module conveys the glass wafer substrate to the spin coating module, the method further includes: The automatic conveying module conveys the glass wafer substrate to the plasma processing module; The plasma processing module processes the surface of the glass wafer substrate.

27. The AR lens manufacturing process according to claim 25, characterized in that, The spin coating module performs a spin coating process on the glass wafer substrate to obtain a glass wafer with spin-coated and imprinted adhesive, specifically including: An adsorption stage is used to adsorb and fix the glass wafer substrate conveyed by the automatic conveying module; An adhesive is applied to the surface of the glass wafer substrate using an adhesive supply unit. The adsorption stage rotates, causing the adhesive to be spin-coated onto the surface of the glass wafer substrate, thus obtaining a glass wafer with spin-coated adhesive. An imprinting adhesive is applied to the surface of a glass wafer coated with a spin-coated tackifier using an imprinting adhesive supply unit. The adsorption stage rotates, causing the imprinting adhesive to be spin-coated onto the surface of the glass wafer, resulting in a glass wafer with spin-coated imprinting adhesive.

28. The AR lens manufacturing process according to claim 27, characterized in that, Before the imprinting adhesive is applied to the surface of the glass wafer coated with spin-coated tackifier using the imprinting adhesive supply unit, the method further includes: The automatic conveying module conveys the glass wafers coated with spin-on tackifier to the first heating module; The first heating module heats the surface of the glass wafer to which the spin-coated tackifier is applied.

29. The AR lens manufacturing process according to claim 27 or 28, characterized in that, Also includes: The automatic conveying module conveys the glass wafers coated with spin-on imprinting adhesive to the second heating module; The second heating module heats the surface of the glass wafer to which the spin-coated printing adhesive is applied.

30. The AR lens manufacturing process according to claim 29, characterized in that, After the second heating module heats the surface of the glass wafer coated with spin-coated imprinting adhesive, it also includes: The automatic conveying module conveys the heat-treated spin-coated glass wafer to the cooling module; The cooling module cools the glass wafers that have been heat-treated and then spin-coated with adhesive.

31. The AR lens manufacturing process according to claim 25, characterized in that, The automatic conveying module includes a first controller, a conveying component, and a robotic arm; The conveying component includes a first drive motor, a first transmission screw, a transmission slider, and a moving track; The first controller is communicatively connected to the first drive motor, the first drive motor is connected to the first transmission screw, a transmission slider is provided on the first transmission screw, the transmission slider is slidably connected to the moving track, and the robot arm is fixedly provided on the transmission slider.

32. The AR lens manufacturing process according to claim 25, characterized in that, The nanoimprint module performs imprinting, curing, and demolding processes on the glass wafer coated with the spin-coated imprinting adhesive to obtain an AR lens, including: Multiple glass wafers coated with the spin-on imprinting adhesive are simultaneously placed in a nanoimprinting module where the imprinting, curing, and demolding processes operate in a synchronized manner. Each glass wafer coated with the spin-on imprinting adhesive is processed in the corresponding process according to the imprinting, curing and demolding steps.

33. The AR lens manufacturing process according to claim 25, characterized in that, The preparation process of the imprint template is as follows: Spin-coat a soft film adhesive onto a master plate with an etched structure; The soft film substrate is bonded to the master plate, and pressure is applied to the soft film substrate so that the etched structure on the master plate is transferred to the soft film adhesive, thereby obtaining a soft film adhesive with an etched structure. The etched soft film adhesive is adhered to the soft film substrate by sequentially using ultraviolet light curing and demolding processes to obtain the imprint template.

34. The AR lens manufacturing process according to claim 25, characterized in that, Multiple glass wafers coated with the spin-on imprinting adhesive are simultaneously placed in a nanoimprinting module where imprinting, curing, and demolding processes operate concurrently. Each glass wafer coated with the spin-on imprinting adhesive is processed in the corresponding process according to the imprinting, curing, and demolding steps, including the following steps: S1 places the glass wafer coated with spin-on imprinting adhesive on the support module below the imprinting module for imprinting operation, thus obtaining the glass wafer imprinting unit; S2-1 drives the second drive motor to rotate the second platform through the first transmission shaft, moving the glass wafer imprinting unit to below the curing module, and performing a curing operation on the glass wafer imprinting unit to obtain a glass wafer curing unit; S2-2 Simultaneously, the glass wafer coated with spin-on imprinting adhesive is placed on the support module below the imprinting module to perform the imprinting operation of step S1, thereby obtaining the glass wafer imprinting unit. S3-1 drives the second drive motor to rotate the second platform through the first transmission shaft, so that the glass wafer curing unit moves to the bottom of the demolding module to perform the demolding operation and obtain the AR lens. S3-2 Simultaneously, the glass wafer imprinting unit moves below the curing module to perform the curing operation in step S2-1, thereby obtaining the glass wafer curing unit; The glass wafer coated with spin-on imprinting adhesive is placed on the support module below the imprinting module to perform the imprinting operation in step S1, thereby obtaining the glass wafer imprinting unit. S4 repeats the above operation so that each spin-coated glass wafer is processed according to the above imprinting, curing and demolding process, and different spin-coated glass wafers are processed simultaneously in the corresponding imprinting, curing and demolding processes.

35. The AR lens manufacturing process according to claim 25, characterized in that, Before the automatic conveying module conveys the AR lens to the unloading module, it also includes: The automatic delivery module delivers the AR lens to the baking module; The baking module performs a baking process on the AR lens.

36. The AR lens manufacturing process according to claim 25, characterized in that, Before the automatic conveying module conveys the AR lens to the unloading module, it also includes: The automatic delivery module delivers the AR lens to the post-curing module; The post-curing module cures the AR lens.

Citation Information

Patent Citations

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