A self-locking mercury probe for electrical testing

Abstract

This invention discloses a self-locking mercury probe for electrical testing, comprising: a test stage, a first lead electrode, a second lead electrode, and reagent bottles. The test stage is a flat cylinder with a first through hole at its axis. A first connecting tube is disposed at the bottom of the first through hole. A mercury trough is disposed around the outer periphery of the first through hole, and a vacuum trough is disposed around the outer periphery of the mercury trough. A second connecting tube is disposed at the bottom of the mercury trough, and a third connecting tube is disposed at the bottom of the vacuum trough. The bottom of the third connecting tube is connected to a vacuum pump. The top of the first lead electrode is connected to the second connecting tube, and the top of the second lead electrode is connected to the first connecting tube. Two reagent bottles are disposed, one connected to the first lead electrode and the other to the second lead electrode. This device can improve detection accuracy and facilitate precise modeling.

Description

Technical Field

[0001] This invention relates to the field of electrical testing, specifically to a self-locking mercury probe for electrical testing. Background Technology

[0002] A mercury probe is a non-destructive testing instrument that, when used in conjunction with various other instruments, enables rapid measurement of semiconductor transport properties and dielectric electrical characteristics. Its principle involves using mercury to contact a semiconductor wafer or dielectric layer, forming a clearly defined contact electrode area for subsequent electrical measurements. This eliminates the drawbacks of traditional electrical measurement methods, which require the prior preparation of metal electrodes and damage to the sample. Some existing mercury probe devices use vacuum negative pressure to adsorb mercury from a reagent bottle onto the surface of the semiconductor or dielectric material being tested, forming a mercury electrode. However, the two mercury electrodes used in these devices are generally not closed loops. For non-closed loops, accurate analytical solutions cannot be obtained during the equivalent circuit modeling of the mercury probe. Furthermore, because the entire negative pressure path is connected to the outside environment, the magnitude of the negative pressure on the central mercury column is unstable, affecting the pressure at the contact surface between the mercury column and the material. Due to the high surface tension between mercury and the test material, the contact area is also unstable when the negative pressure is not constant, leading to measurement errors.

[0003] Chinese Patent 200810118013.3 discloses a mercury probe device for electrical testing. The mercury contact surface consists of a circle and a closed ring. Left and right push rods control the flow of mercury in two separate mercury flow systems, ensuring close contact between the mercury and the material being tested upon insertion. During testing, two wires are led from the left and right push rods to the positive and negative terminals of the corresponding electrical testing equipment. The push rods should be made of a metallic material capable of conducting electrical signals during testing. The mercury column rises and forms contact with the material under positive pressure. However, this device cannot accurately control the pressure and contact area between the mercury and the semiconductor or dielectric material being tested during each measurement, leading to measurement errors. Summary of the Invention

[0004] In view of the problems mentioned in the background art, the purpose of this invention is to provide a self-locking mercury probe for electrical testing, so as to solve the problems mentioned in the background art.

[0005] The above-mentioned technical objective of the present invention is achieved through the following technical solution: a self-locking mercury probe for electrical testing, comprising: a test stage, a first lead electrode, a second lead electrode, and reagent bottles. The test stage is a flat cylinder with a first through hole at its axis. A first connecting tube is provided at the bottom of the first through hole. A mercury trough is provided around the outer periphery of the first through hole, and a vacuum trough is provided around the outer periphery of the mercury trough. A second connecting tube is provided at the bottom of the mercury trough, and a third connecting tube is provided at the bottom of the vacuum trough. The bottom of the third connecting tube is connected to a vacuum pump. The top of the first lead electrode is connected to the second connecting tube. The top of the second lead electrode is connected to the first connecting tube. There are two reagent bottles, which are respectively connected to the first lead electrode and the second lead electrode.

[0006] Furthermore, the first lead electrode includes a first connector, a cover disposed at the bottom end of the first connector, and a first conduit communicating with the first connector. The first conduit is disposed within the first cover, and the inner wall of the first cover is provided with a first internal thread, which is threadedly connected to the reagent bottle.

[0007] Furthermore, the second lead electrode includes a second connector, a cap disposed at the bottom end of the second connector, and a second conduit communicating with the second connector. The second conduit is disposed within the second cap, and the inner wall of the second cap is provided with a second internal thread, which is threadedly connected to the reagent bottle.

[0008] Furthermore, the first cover and / or the second cover are provided with air holes to facilitate air intake.

[0009] Furthermore, the test platform is provided with threaded holes at the bottom ends of both the first connecting pipe and the second connecting pipe. The first connecting member and the second connecting member are provided with threads that match the threaded holes. The first connecting member is threadedly connected to the second connecting pipe, and the second connecting member is threadedly connected to the first connecting pipe.

[0010] Furthermore, the mercury trough is 2 mm from the axis.

[0011] Furthermore, the distance between the vacuum groove and the axis is 5mm.

[0012] As a preferred embodiment of the present invention, the first connector is longer than the second connector.

[0013] As a preferred embodiment of the present invention, a valve is provided on the outer periphery of the reagent bottle to which the second lead electrode is connected.

[0014] As a preferred embodiment of the present invention, the vacuum pump is connected to an external vacuum filter to prevent mercury from being drawn into the vacuum pump.

[0015] In summary, the present invention has the following main beneficial effects:

[0016] 1. This invention designs the two electrodes of the mercury probe that contact the sample as a concentric circle structure, and uses the height difference of mercury in the two reagent bottles to achieve the central mercury column to form contact with the sample one step ahead of the mercury ring. When the outer mercury ring forms contact, it seals the vacuum negative pressure area to achieve the self-locking of the central mercury column under negative pressure. The concentric circle structure of the mercury probe is made to contact under a single vacuum pump, which improves the detection accuracy.

[0017] 2: By controlling the pressure inside the mercury bottle containing the outer ring of mercury, the negative pressure on the central mercury can be adjusted. Under the condition that the height of the mercury columns in the two mercury bottles is similar, the concentric mercury probe can be made in contact, which can also improve the detection accuracy and facilitate accurate modeling.

[0018] Of course, any product implementing this invention does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure where the first connector is longer than the second connector of the present invention;

[0020] Figure 2 This is a top view of the test for the present invention;

[0021] Figure 3 This is a schematic diagram of the first lead electrode structure of the present invention;

[0022] Figure 4 This is a schematic diagram of the second lead electrode structure of the present invention;

[0023] Figure 5 This is a schematic diagram of the structure when the first connector of the present invention is longer than the second connector;

[0024] Figure 6 This is a schematic diagram of the structure when the lengths of the first connector and the second connector of the present invention are equal;

[0025] Figure 7 This is a schematic diagram of the structure of the present invention when the first connector and the second connector are of equal length.

[0026] Figure 8 This is another structural diagram when the first connector and the second connector are of equal length.

[0027] In the diagram: 1. Test stand; 11. First through hole; 12. First connecting pipe; 13. Mercury bath; 14. Vacuum bath; 15. Second connecting pipe; 16. Third connecting pipe; 17. Vacuum pump; 18. Vacuum filter;

[0028] 2. First lead electrode; 21. First connector; 22. First cover; 23. First conduit;

[0029] 3. Second lead electrode; 31. Second connector; 32. Second cover; 33. Second conduit;

[0030] 4. Reagent bottle; 41. Valve. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] Example 1

[0033] like Figure 1-5The following describes a self-locking mercury probe for electrical testing, comprising: a test stage 1, a first lead electrode 2, a second lead electrode 3, and a reagent bottle 4. The test stage 1 is a flat cylinder with a first through hole 11 at its axis. A first connecting tube 12 is located at the bottom of the first through hole 11. A mercury trough 13 is located around the first through hole 11, and a vacuum trough 14 is located around the mercury trough 13. A second connecting tube 15 is located at the bottom of the mercury trough 13, and the mercury trough 13 is 2 mm from the axis. A third connecting tube 16 is located at the bottom of the vacuum trough 14, and the vacuum trough 14 is 5 mm from the axis. A vacuum pump 17 is connected to the bottom of the third connecting tube 16. The top of the first lead electrode 2 is connected to the second connecting tube 15. The top of the second lead electrode 3 is connected to the first connecting tube 12. Two reagent bottles are connected to the first lead electrode 2 and the second lead electrode 3, respectively. The first lead electrode 2 includes a first connector 21, a cap located at the bottom of the first connector 21, and a... The first connector 21 is connected to the first pipe 23, which is disposed inside the first cover 22. The inner wall of the first cover 22 is provided with a first internal thread, which is threaded to the reagent bottle 4. The second lead electrode 3 includes a second connector 31, a cover disposed at the bottom of the second connector 31, and a second pipe 33 connected to the second connector 31. The second pipe 33 is disposed inside the second cover 32, which is provided with a second internal thread, which is threaded to the reagent bottle 4. In this embodiment, the first connector 21 is longer than the second connector 31. The first cover 22 and / or the second cover 32 are provided with air holes to facilitate air intake. The test platform 1 is provided with threaded holes at the bottom of the first connecting pipe 12 and the second connecting pipe 15. The first connector 21 and the second connector 31 are provided with threads that match the threaded holes. The first connector 21 is threaded to the second connecting pipe 15. The second connector 31 is threaded to the first connecting pipe 12.

[0034] In this embodiment, the two electrodes in contact with the sample are designed as concentric circles. The height difference of the mercury in the reagent bottle allows the central mercury column to contact the sample before the mercury ring. The outer mercury ring, when in contact, seals the vacuum negative pressure area, achieving self-locking of the central mercury column under negative pressure. The concentric circle mercury probe contact is achieved with a single vacuum pump 17. The semiconductor or dielectric material to be tested is placed at the axis of the test stage 1, ensuring the contact surface completely covers the vacuum tank 14. When the vacuum pump 17 is turned on, the mercury in the reagent bottle 4 on the first lead electrode 2 and the reagent bottle 4 on the second lead electrode 3 is drawn into the first pipe 23 and the second pipe 33 due to the negative pressure. However, due to the height difference, the mercury in the reagent bottle 4 on the second lead electrode 3 reaches the top surface of the test stage 1 and contacts the component first. The mercury in the reagent bottle 4 on the first lead electrode 2 then reaches the top mercury tank 13 and contacts the component, forming a closed ring.

[0035] At the instant the mercury bath 13 is closed, the negative pressure around the first through-hole 11 is determined by the height of the mercury in the reagent bottle 4 on the first lead electrode 2; therefore, the negative pressure around the first through-hole 11 remains constant after the mercury bath 13 is closed. Consequently, the pressure between the mercury in the first through-hole 11 and the sample remains constant, its value determined by the height difference between the mercury columns in the reagent bottle 4 on the first lead electrode 2 and the reagent bottle 4 on the second lead electrode 3. When the mercury content in both bottles is fixed, this pressure remains constant, achieving a pressure self-locking function. Therefore, the contact area between the mercury in the first through-hole 11 and the sample remains constant under a fixed pressure, improving the accuracy of the electrode contact area. Furthermore, the concentric circles formed by the central mercury and the outer mercury are beneficial for accurate modeling.

[0036] Example 2

[0037] Based on Embodiment 1, the difference in this embodiment is:

[0038] like Figure 6-7 As shown, the two mercury bottles are at similar heights. An additional valve 41 is added to the reagent bottle 4 on the first lead electrode 2, and the original vent hole of the reagent bottle 4 on the first lead electrode 2 is closed. Furthermore, a vacuum filter 18 is connected to the vacuum pump 17 to prevent mercury from being drawn into the vacuum pump 17.

[0039] In this embodiment, the semiconductor material or dielectric material to be tested is placed on the surface of the test stage 1, ensuring that the contact surface completely covers the third connecting pipe 16. A vacuum pump 17 is connected, valve 41 is closed, and after opening the vacuum pump 17, the mercury in the reagent bottle 4 on the second lead electrode 3 is drawn into the second pipe 33 due to negative pressure. During the ascent, valve 41 is slowly opened, at which point the mercury in the reagent bottle 4 on the first lead electrode 2 is drawn into the first pipe 23. At this time, the positions of the mercury column and the reagent bottle 4 on the second lead electrode 3 and the reagent bottle 4 on the first lead electrode 2 are as follows: Figure 7 As shown, when the mercury in reagent bottle 4 on the second lead electrode 3 and reagent bottle 4 on the first lead electrode 2 reaches the surface, valve 41 is closed, and the mercury tank 13 forms a closed ring, achieving self-locking of the central mercury circle. This achieves concentric mercury contact, and the final positions of the mercury column and the mercury in reagent bottle 4 on the second lead electrode 3 and reagent bottle 4 on the first lead electrode 2 are as follows: Figure 8 As shown. At this time, the pressure in contact with the sample by the central mercury column is determined by the negative pressure in valve 41 and the negative pressure in adsorption vacuum tank 14. Pressure control can also be achieved when the height difference of the mercury columns in the two mercury bottles is not significant.

[0040] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0041] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

[0042] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A self-locking mercury probe for electrical testing, characterized in that, include: Test stand (1), the test stand (1) is a flat cylinder, the test stand (1) has a first through hole (11) at the axis, the bottom of the first through hole (11) is provided with a first connecting pipe (12), the outer periphery of the first through hole (11) is provided with a mercury tank (13), the outer periphery of the mercury tank (13) is provided with a vacuum tank (14), the bottom of the mercury tank (13) is provided with a second connecting pipe (15), the bottom of the vacuum tank (14) is provided with a third connecting pipe (16), the bottom of the third connecting pipe (16) is connected to a vacuum pump (17), the vacuum pump (17) is connected to a vacuum filter (18) to prevent mercury from being sucked into the vacuum pump (17); The first lead electrode (2) is connected to the second connecting tube (15) at its top end. The first lead electrode (2) includes a first connector (21), a first cover (22) disposed at the bottom end of the first connector (21), and a first pipe (23) communicating with the first connector (21). The first pipe (23) is disposed inside the first cover (22). The inner wall of the first cover (22) is provided with a first internal thread, and the first internal thread is threadedly connected to the reagent bottle (4). The second lead electrode (3) is connected to the first connecting tube (12) at its top end. The second lead electrode (3) includes a second connector (31), a second cover (32) at the bottom end of the second connector (31), and a second pipe (33) communicating with the second connector (31). The second pipe (33) is disposed inside the second cover (32). The inner wall of the second cover (32) is provided with a second internal thread, and the second internal thread is threadedly connected to the reagent bottle (4). The test bench (1) is provided with threaded holes at the bottom ends of the first connecting pipe (12) and the second connecting pipe (15). The first connecting piece (21) and the second connecting piece (31) are provided with threads that match the threaded holes. The first connecting piece (21) is threadedly connected to the second connecting pipe (15), and the second connecting piece (31) is threadedly connected to the first connecting pipe (12). The first cover (22) and / or the second cover (32) are provided with air holes to facilitate air intake, and the first connector (21) is longer than the second connector (31); Reagent bottle (4), there are two reagent bottles, and the two reagent bottles are respectively connected to the first lead electrode (2) and the second lead electrode (3).

2. A self-locking mercury probe for electrical testing, characterized in that, include: Test stand (1), the test stand (1) is a flat cylinder, the test stand (1) has a first through hole (11) at the axis, the bottom of the first through hole (11) is provided with a first connecting pipe (12), the outer periphery of the first through hole (11) is provided with a mercury tank (13), the outer periphery of the mercury tank (13) is provided with a vacuum tank (14), the bottom of the mercury tank (13) is provided with a second connecting pipe (15), the bottom of the vacuum tank (14) is provided with a third connecting pipe (16), the bottom of the third connecting pipe (16) is connected to a vacuum pump (17), the vacuum pump (17) is connected to a vacuum filter (18) to prevent mercury from being sucked into the vacuum pump (17); The first lead electrode (2) is connected to the second connecting tube (15) at its top end. The first lead electrode (2) includes a first connector (21), a first cover (22) disposed at the bottom end of the first connector (21), and a first pipe (23) communicating with the first connector (21). The first pipe (23) is disposed inside the first cover (22). The inner wall of the first cover (22) is provided with a first internal thread, and the first internal thread is threadedly connected to the reagent bottle (4). The second lead electrode (3) is connected to the first connecting tube (12) at its top end. The second lead electrode (3) includes a second connector (31), a second cover (32) at the bottom end of the second connector (31), and a second pipe (33) communicating with the second connector (31). The second pipe (33) is disposed inside the second cover (32). The inner wall of the second cover (32) is provided with a second internal thread, and the second internal thread is threadedly connected to the reagent bottle (4). The test bench (1) is provided with threaded holes at the bottom ends of the first connecting pipe (12) and the second connecting pipe (15). The first connecting piece (21) and the second connecting piece (31) are provided with threads that match the threaded holes. The first connecting piece (21) is threadedly connected to the second connecting pipe (15), and the second connecting piece (31) is threadedly connected to the first connecting pipe (12). The first cover (22) and / or the second cover (32) are provided with air holes to facilitate air intake, and the reagent bottle (4) connected to the first lead electrode (2) is provided with a valve (41); Reagent bottle (4), there are two reagent bottles, and the two reagent bottles are respectively connected to the first lead electrode (2) and the second lead electrode (3).

3. A self-locking mercury probe for electrical testing according to claim 1 or 2, characterized in that: The mercury trough (13) is 2 mm away from the axis.

4. A self-locking mercury probe for electrical testing according to claim 1 or 2, characterized in that: The distance between the vacuum groove (14) and the axis is 5 mm.

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