Polishing tool manufacturing method, polishing tool and polishing equipment

Abstract

The present invention discloses a polishing tool manufacturing method, polishing tool, and polishing equipment for efficiently achieving mirror polishing of mold steel. The method comprises the following steps: providing a cemented carbide ball head, machining a microtexture on the surface of the cemented carbide ball head to obtain a textured cemented carbide ball head; performing an ultrasonic acid-base pretreatment on the textured cemented carbide ball head; and depositing a diamond coating on the surface of the textured cemented carbide ball head using a hot-wire chemical vapor deposition method to obtain a polishing tool.

Description

Technical Field

[0001] The present invention relates to the technical field of polishing, and in particular to a polishing tool manufacturing method, a polishing tool and a polishing device. Background Art

[0002] Hardened die steel boasts strong wear resistance, good hardenability, and excellent thermal stability, making it widely used in the manufacture of large-scale, high-load, and ultra-precision molds. In particular, some aerospace parts require mirror-finish surfaces, and accordingly, the molds used to manufacture these parts must meet mirror-finish or better surface requirements.

[0003] However, it is well known that conventional cutting tools capable of machining ferrous metals like steel are unable to achieve mirror-finishing results. Even cutting tools made of cubic boron nitride and precision ceramics cannot meet machining requirements due to their limited mechanical properties. Natural diamonds, on the other hand, can produce extremely sharp cutting edges, enabling the production of mirror-finished surfaces with extremely high precision and surface quality. However, graphitization during machining with diamond tools causes tool wear, making it difficult to achieve ultra-smooth surfaces with high surface accuracy. Traditional grinding and polishing, however, suffers from low machining efficiency, poor surface accuracy, slow precision convergence, and difficulties in ensuring product quality and cycle times, limiting the processing and application of high-end molds.

[0004] Therefore, there is an urgent need for a polishing tool and polishing equipment to meet the processing requirements of high-end mold mirror polishing. Summary of the Invention

[0005] The object of the present invention is to provide a polishing tool manufacturing method, a polishing tool and a polishing device, so as to efficiently achieve the mirror polishing effect of mold steel.

[0006] In a first aspect, the present invention provides a method for manufacturing a polishing tool, comprising the following steps:

[0007] Providing a cemented carbide ball head, and machining micro-texture on the surface of the cemented carbide ball head to obtain a textured cemented carbide ball head;

[0008] The textured carbide ball head was subjected to ultrasonic acid-base pretreatment;

[0009] Diamond coating was deposited on the surface of textured carbide ball head to obtain polishing tool.

[0010] Compared to existing technologies, this invention combines diamond coating with surface microtexturing technology to produce a polishing tool with extremely high surface finish, extremely low surface roughness, and an extremely low friction coefficient. This polishing tool is a tool with a textured ultra-nano diamond coating. The introduction of microtexture helps improve the adhesion between the diamond coating and the cemented carbide (substrate), reduces the tool-chip contact area, further reduces tool wear, and increases tool life.

[0011] Moreover, the textured ultra-nano diamond coating of the present invention forms micro-edges, which further utilize the micro-nano removal characteristics of the micro-edges to effectively improve processing efficiency and surface accuracy. The regularly distributed micro-edges will have an excellent mirror polishing effect on the workpiece surface.

[0012] As a possible implementation method, processing microtexture on the surface of a cemented carbide ball head includes the following steps: using a laser marking machine to process microtexture on the surface of the cemented carbide ball head according to a preset number of scans N, 4≤N≤6; the microtexture is a concentric circle microtexture, and the depth of the concentric circle microtexture is D, 30μm≤D≤50μm.

[0013] As a possible implementation method, the processing parameters of the laser marking machine are Vc=100mm / s~150mm / s, P=65%~75%, and f=20KHz~25KHz.

[0014] As a possible implementation method, ultrasonic acid-base pretreatment of textured carbide ball head includes:

[0015] Placing the textured cemented carbide ball head in an alkaline solution and cleaning the textured cemented carbide ball head using an ultrasonic cleaning machine for a preset time T1;

[0016] Placing the textured cemented carbide ball head in an acidic solution and cleaning the textured cemented carbide ball head using an ultrasonic cleaning machine for a preset time T2;

[0017] The textured cemented carbide ball head is placed in a mixed solution containing diamond abrasive powder, and the textured cemented carbide ball head is ground and cleaned using an ultrasonic cleaning machine according to a preset time T3.

[0018] As a possible implementation manner, 20 min ≤ T1 ≤ 30 min, 20 s ≤ T2 ≤ 40 s, and 5 min ≤ T3 ≤ 15 min.

[0019] As a possible implementation manner, the acidic solution is Caro's acid, the alkaline solution is a mixture of potassium ferrocyanide and potassium hydroxide, and the mixed solution is a mixture of diamond abrasive powder and acetone.

[0020] As a possible implementation method, a diamond coating is deposited on the surface of a textured carbide ball head using a hot wire chemical vapor deposition method to obtain a polishing tool including:

[0021] S30. Providing a hot-wire chemical vapor deposition apparatus, using a tooling to place a textured carbide ball head within a vacuum chamber of the hot-wire chemical vapor deposition apparatus, wherein M hot filaments of the hot-wire chemical vapor deposition apparatus are positioned directly above the textured carbide ball head, with a vertical distance H1 of 10 mm ≤ H1 ≤ 15 mm; and a spacing H2 between the M hot filaments of the hot-wire chemical vapor deposition apparatus, with a spacing H2 of 20 mm ≤ H2 ≤ 40 mm.

[0022] S31. Using a hot-wire chemical vapor deposition device, a silicon-doped micronized diamond film was deposited on the surface of the textured carbide ball head.

[0023] S32 using mechanical polishing technology to polish the surface of the silicon-doped micron diamond film surface smoothing process;

[0024] S33. A layer of silicon-doped nanodiamond film is deposited in situ on the surface of the polished silicon-doped microdiamond film;

[0025] S34. Surface polishing of the silicon-doped nanodiamond film;

[0026] S35. Repeat S33 and S34 until a multilayer silicon-doped micro-nano diamond film having a preset surface accuracy is obtained on the surface of the textured cemented carbide ball head.

[0027] In a second aspect, the present invention further provides a polishing tool, which is a textured cemented carbide ball head with a diamond coating deposited on the surface; the polishing tool is manufactured using the polishing tool manufacturing method provided in the first aspect.

[0028] Compared with the prior art, the beneficial effects of the polishing tool provided by the present invention are the same as the beneficial effects of the polishing tool manufacturing method provided by the first aspect and / or any implementation of the first aspect, and are not described in detail here.

[0029] In the third aspect, the present invention also provides a polishing device, including an ultrasonic vibration device and a polishing device; wherein the ultrasonic vibration device includes an ultrasonic generator, a transducer and a variable amplitude rod; the polishing device includes a machine tool worktable, a spindle, a tool holder and a polishing tool; the polishing tool is the polishing tool provided in the second aspect; the tool holder is coaxially connected to the spindle, one end of the transducer is coaxially connected to the tool holder, the other end of the transducer is coaxially connected to the variable amplitude rod, and the other end of the variable amplitude rod is coaxially connected to the polishing tool; the ultrasonic generator is electrically connected to the transducer.

[0030] As a possible implementation method, the polishing equipment also includes a cooling device, one end of the cooling device is connected to the coolant storage tank and the other end is connected to the delivery pipeline of the atomizing nozzle, and the atomizing nozzle is used to spray coolant onto the workpiece to be polished; the cooling device also includes a mobile platform arranged at one end of the delivery pipeline near the atomizing nozzle, and the delivery pipeline is placed on the mobile platform, and the mobile platform drives the delivery pipeline to rise and fall so that the distance and angle between the atomizing nozzle and the workpiece change; the cooling device also includes a pressure reducing valve and a flow regulating valve arranged at one end of the delivery pipeline near the coolant storage tank; and a temperature measuring instrument and a pressure measuring instrument arranged near the middle position of the delivery pipeline.

[0031] As a possible implementation method, a spherical hole is opened at the end of the amplitude converter, a spring chuck is installed in the spherical hole, the polishing tool is accommodated in the spherical hole and clamped by the spring chuck; a nut screwed on the end of the amplitude converter is used to confine the polishing tool in the spherical hole; the polishing part of the polishing tool protrudes from the nut.

[0032] As a possible implementation, a spiral groove is provided in the conical section of the horn to output longitudinal and torsional two-dimensional ultrasonic vibrations.

[0033] As a possible implementation method, the polishing equipment also includes a clamp, which is arranged on the machine tool workbench and is used to clamp the workpiece; a three-axis dynamometer connected to the clamp, a data acquisition card connected to the three-axis dynamometer, and a computer connected to the data acquisition card, and the computer is used to display the force changes of the workpiece in real time; the computer also provides a thermocouple wire connected to the workpiece to display the temperature changes of the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0035] Figure 1 A schematic diagram of a hot wire chemical vapor deposition method according to an embodiment of the present invention;

[0036] Figure 2 A flow chart of a method for manufacturing a polishing tool provided in an embodiment of the present invention;

[0037] Figure 3 A schematic structural diagram of a textured cemented carbide ball head provided in an embodiment of the present invention;

[0038] Figure 4 A schematic structural diagram of a hot wire chemical vapor deposition device provided in an embodiment of the present invention;

[0039] Figure 5 A schematic structural diagram of a polishing device provided in an embodiment of the present invention;

[0040] Figure 6 This is a structural schematic diagram of the connection between the ultrasonic vibration device and the polishing device provided in an embodiment of the present invention.

[0041] Reference numerals:

[0042] 10-hot wire, 11-initial molecule I, 12-initial molecule II, 110-active particle I, 120-active particle II, 13-substrate, 14-film;

[0043] 20-carbide ball head, 21-concentric micro texture;

[0044] 30-vacuum chamber, 31-hot wire, 32-tooling, 33-spring clip;

[0045] 40-ultrasonic generator, 41-transducer, 42-horn, 43-nut, 44-flange, 45-spiral groove,

[0046] 50-machine tool table, 51-spindle, 52-tool holder, 53-polishing tool, 54-clamp, 55-three-axis dynamometer, 56-data acquisition card, 57-computer,

[0047] 60-coolant storage tank, 61-delivery pipeline, 62-mobile platform, 63-pressure reducing valve, 64-flow regulating valve, 65-temperature measuring instrument, 66-pressure measuring instrument, 67-atomizing nozzle;

[0048] 70-artifacts. DETAILED DESCRIPTION

[0049] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0050] It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or indirectly connected to the other element.

[0051] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined. "Several" means one or more, unless otherwise specifically defined.

[0052] In the description of the present invention, it should be understood that the terms "up", "down", "front", "back", "left", "right", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0053] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and may encompass internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0054] See also Figure 1 The working principle of hot wire chemical vapor deposition (HWCVD) is to heat a metal wire (which can be defined as a hot wire 10) set in a reaction chamber (generally a vacuum chamber) to a preset temperature. The preset temperature can be determined according to the reaction gas, specifically the thermal decomposition temperature of the reaction gas. In actual applications, the preset temperature can be as high as 2000 degrees Celsius or more. The reaction gas (such as Figure 1 The initial molecules Ⅰ11 and Ⅱ12 shown in FIG1 undergo catalytic decomposition reaction on the hot wire with a preset temperature to form active particles (such as Figure 1 The active particles I 110 and active particles II 120 are deposited and aggregated on the surface of the substrate 13 to form a thin film 14 .

[0055] See also Figures 2 to 4 Based on the above principles, an embodiment of the present invention provides a method for manufacturing a polishing tool, comprising the following steps:

[0056] S1. Provide a cemented carbide ball head 20 and process a micro texture on the surface of the cemented carbide ball head 20 to obtain a textured cemented carbide ball head.

[0057] See also Figure 3 As an example, the microtexture is photoetched into different patterns by a laser marking machine. Specifically, a laser marking machine is used to process microtexture on the surface of the cemented carbide ball head 20 according to a preset number of scans N, 4≤N≤6, for example, N =4, N =5 or N =6. The microtexture is a concentric circular microtexture 21, and the depth of the concentric circular microtexture 21 is D, 30μm≤D≤50μm. For example, when D=45μm, the diameters of the concentric circles are 500μm, 1500μm and 2500μm respectively, the width of the circle is 50μm, the spacing is 500μm, and the number of scans required is 5 times. The processing parameters of the laser marking machine are Vc=100mm / s~150mm / s, P=65%~75%, f=20KHz~25KHz, for example, Vc=100mm / s, P=75%, f=25KHz.

[0058] It needs to be further explained that the depth of the concentric micro-texture 21 has a direct impact on the adhesion of the diamond coating subsequently deposited therein. When 30μm≤D≤50μm, it can ensure that the concentric micro-texture 21 and the surface of the carbide ball head 20 have good adhesion with the diamond coating, thereby further ensuring the stability of the diamond coating. Based on this, the wear resistance of the diamond coating is improved, the wear of the polishing tool 53 is reduced, and the polishing performance is improved.

[0059] S2. Performing ultrasonic acid-base pretreatment on the textured carbide ball head 20. The specific steps of ultrasonic acid-base pretreatment include:

[0060] S20. Place the textured carbide ball head 20 in an alkaline solution, and use an ultrasonic cleaning machine to clean the textured carbide ball head 20 according to a preset time T1. As an example, 20min≤T1≤30min, for example, T1=20min, T1=25min or T1=30min. As an example, the alkaline solution can be a mixture of potassium ferrocyanide and potassium hydroxide. The typical Murakami reagent ratio is: K3Fe(CN)6: KOH: H2O=10 g:10 g:100 ml. After the ratio is completed, stir it with a glass rod to fully dissolve the solution.

[0061] S21. The textured carbide ball stud 20 is placed in an acidic solution and cleaned using an ultrasonic cleaner for a predetermined time period, T3. As an example, 20s ≤ T2 ≤ 40s, for example, T3 = 20s, T3 = 30s, or T3 = 40s. The acidic solution can be Caro's acid, i.e., a solution of H2SO4 (30%) and H2O2 (70%) is poured into a beaker. The carbide substrate is then placed in the acidic solution to completely remove the Co element from the substrate surface, thereby further improving the adhesion between the carbide ball stud 20 and the diamond coating.

[0062] S22. Place the textured carbide ball stud 20 in a mixed solution containing diamond abrasive powder and grind and clean the textured carbide ball stud 20 using an ultrasonic cleaner for a preset time T4. As an example, 5 min ≤ T3 ≤ 15 min, for example, T3 = 5 min, T3 = 10 min, or T3 = 15 min. The mixed solution can be a mixture of acetone and diamond abrasive powder. After grinding, the carbide ball stud 20 can be placed in a neutral solution for further cleaning to remove the diamond abrasive powder. The neutral solution can be an acetone solution.

[0063] S3. A diamond coating is deposited on the surface of the textured carbide ball head 20 using a hot wire chemical vapor deposition method to obtain a polishing tool 53. Specific methods may include:

[0064] S30. Provide a hot-wire chemical vapor deposition apparatus. Use tooling 32 to place the textured carbide ball stud 20 within a vacuum chamber 30 of the hot-wire chemical vapor deposition apparatus. M hot filaments 31 of the hot-wire chemical vapor deposition apparatus are positioned directly above the textured carbide ball stud 20 at a vertical distance H1 (10 mm ≤ H1 ≤ 15 mm). The spacing between the M hot filaments 31 is H2 (20 mm ≤ H2 ≤ 40 mm).

[0065] See also Figure 4As an example, the arrangement of the diamond-coated hot wire 31 can be optimized and modified. Specifically, a fixture 32 for securing the carbide ball heads 20 can be added to the work platform within the vacuum chamber 30 included in the hot wire chemical vapor deposition equipment. As an example, the fixture 32 can be a flat plate with multiple rows of holes machined into it. The carbide ball heads 20 are placed in the holes, and the multiple carbide ball heads 20 are arranged in a row. For example, the fixture 32 is a cube measuring 5cm×5cm×5cm, with a hole diameter of 8mm. Multiple carbide ball heads 20 are mounted on the fixture 32 in parallel and at equal intervals, with the ball heads facing upward. Four hot wires 31 are arranged on both sides of the ball heads. The ends of the hot wires 31 are secured by spring clips 33. The height of the hot wires 31 from the surface of the ball heads is approximately 12mm, and the distance between the hot wires 31 is 30mm.

[0066] S31. A layer of silicon-doped micronized diamond film is deposited on the surface of the textured carbide ball head 20 using a hot wire chemical vapor deposition device. The thickness can be approximately 10-15µm. As an example, by precisely adjusting the hot wire chemical vapor deposition process parameters in stages, controlling the silicon doping concentration, argon concentration, hydrogen concentration, carbon source concentration, bias voltage, and temperature, a predetermined coating thickness, adhesion strength, and surface roughness are obtained. The surface roughness is tested to be approximately 80nm. For example, a solution of ethyl silicate (3ml) and a solution of acetone (100ml) are mixed, and the mixed solution is introduced into the vacuum chamber 30 by hydrogen bubbling. The hot wire 31 is heated to decompose the carbon source, silicon doping source, and hydrogen at high temperature, thereby depositing a layer of silicon-doped micronized diamond film on the surface of the carbide ball head 20.

[0067] S32. Use mechanical polishing technology to polish and smooth the surface of silicon-doped micronized diamond film.

[0068] S33. A layer of silicon-doped nanodiamond film is deposited in situ on the surface of the polished silicon-doped microdiamond film.

[0069] S34. Surface polishing of silicon-doped nanodiamond films.

[0070] S35. Repeat S33 and S34 until a multi-layer silicon-doped micro-nano diamond film having a preset surface accuracy is obtained on the surface of the textured cemented carbide ball head 20.

[0071] It needs to be further explained that the parameters of the above-mentioned in-situ deposition are: pressure during nucleation is -99.6KPa, bias current is 1A, and voltage is 18V.

[0072] The flow rate of the mixed reaction gas of acetone and ethyl silicate is controlled at 60 ml / min, the flow rate of hydrogen is controlled at 180 ml / min, the substrate temperature is 750-800℃, and the nucleation time is 30 minutes; the pressure during growth is -96.6Kpa, the voltage is 20V, the bias current is 0.5A, the flow rate of the mixed reaction gas of acetone and ethyl silicate is controlled at 50ml / min, the flow rate of hydrogen is controlled at 40 ml / min, the flow rate of argon is 200ml / min, the temperature is maintained at 850-900℃, and the deposition time is 4 hours.

[0073] Compared to existing technologies, the present invention combines diamond coating with surface microtexturing technology to produce a polishing tool 53 with extremely high surface finish, extremely low surface roughness, and an extremely low coefficient of friction. This polishing tool 53 is a tool with a textured ultra-nano diamond coating. The introduction of microtexture helps improve the adhesion between the diamond coating and the cemented carbide (substrate), reduces the contact area between the tool and the chip, further reduces tool wear, and increases the tool's service life.

[0074] Moreover, the textured ultra-nano diamond coating of the present invention forms micro-edges, which further utilize the micro-nano removal characteristics of the micro-edges to effectively improve processing efficiency and surface accuracy. The regularly distributed micro-edges will have an excellent mirror polishing effect on the surface of the workpiece 70.

[0075] In a second aspect, the present invention further provides a polishing tool. The polishing tool 53 is a textured carbide ball head 20 with a diamond coating deposited on the surface. The polishing tool 53 is manufactured using the polishing tool 53 manufacturing method provided in the first aspect.

[0076] Compared with the prior art, the beneficial effects of the polishing tool 53 provided by the present invention are the same as the beneficial effects of the polishing tool 53 manufacturing method provided by the first aspect and / or any implementation of the first aspect, and are not described in detail here.

[0077] See also Figure 5 and Figure 6 In a third aspect, an embodiment of the present invention further provides a polishing device, comprising an ultrasonic vibration device and a polishing device. The ultrasonic vibration device comprises an ultrasonic generator 40, a transducer 41, and an horn 42. The polishing device comprises a machine tool table 50, a spindle 51, a tool holder, and a polishing tool 53. The polishing tool 53 is the polishing tool 53 provided in the second aspect. The tool holder is coaxially connected to the spindle 51, one end of the transducer 41 is coaxially connected to the tool holder, the other end of the transducer 41 is coaxially connected to the horn 42, and the other end of the horn 42 is coaxially connected to the polishing tool 53. The ultrasonic generator 40 is electrically connected to the transducer 41.

[0078] In actual use, the spindle 51 rotates the polishing tool 53, and the ultrasonic generator, through the transducer 41 and the horn 42, drives the polishing tool 53 to vibrate intermittently, achieving intermittent contact and separation between the polishing tool 53 and the workpiece 70. When in contact, polishing is performed, and when separated, a brief cooling is achieved.

[0079] As a possible implementation method, the polishing equipment also includes a cooling device, one end of the cooling device is connected to the coolant storage tank 60, and the other end is connected to the delivery pipe 61 of the atomizing nozzle 67, and the atomizing nozzle 67 is used to spray coolant to the workpiece 70 to be polished; the cooling device also includes a movable platform 62 arranged at one end of the delivery pipe 61 near the atomizing nozzle 67, and the delivery pipe 61 is placed on the movable platform 62, and the movable platform 62 drives the delivery pipe 61 to rise and fall so that the distance and angle between the atomizing nozzle and the workpiece 70 change; the cooling device also includes a pressure reducing valve 63 and a flow regulating valve 64 arranged at one end of the delivery pipe 61 near the coolant storage tank 60; and a temperature measuring instrument 65 and a pressure measuring instrument 66 arranged near the middle position of the delivery pipe 61.

[0080] It should be further explained that the coolant can be liquid carbon dioxide. To minimize the conversion of the liquid carbon dioxide into gaseous carbon dioxide before reaching the outlet, the delivery pipeline 61 (specifically, the delivery pipeline 61 can be a high-pressure hose) is insulated by wrapping it with expandable foam material. To ensure a sufficient supply of liquid carbon dioxide, two liquid carbon dioxide storage cylinders are connected in parallel. The flow of low-temperature carbon dioxide is controlled by a combination of a carbon dioxide pressure reducing valve 63 and a micro-regulating valve.

[0081] Using the above-mentioned technical solution, the present invention incorporates ultrasonic vibration into conventional polishing. The intermittent cutting characteristics of ultrasonic vibration enable periodic separation of the polishing tool 53 from the workpiece 70. The low-temperature cooling zone ensures optimal cutting conditions in the polishing work area, addressing the problem of diamond tool graphitization caused by "overheating" during the polishing of hardened die steel. Furthermore, the present invention combines ultrasonic vibration with low-temperature cooling, allowing the cooling medium and lubricating fluid to easily enter the processing area, ensuring timely cooling and lubrication of the diamond micro-edge of the polishing tool 53. Low-temperature cutting utilizes extremely low temperatures to create an ultra-low temperature environment in the cutting zone, thereby reducing chemical reactions between the diamond tool and the workpiece 70 and facilitating the mirror polishing of the die steel.

[0082] As one possible implementation, a spherical hole is defined at the end of the horn 42, into which a spring collet is mounted. The polishing tool 53 is received within the spherical hole and held by the spring collet. A nut 43, screwed onto the end of the horn 42, restrains the polishing tool 53 within the spherical hole; the polishing portion of the polishing tool 53 protrudes from the nut 43. The end of the horn 42, distal to the end, has a flange 44, which provides a coaxial connection with the tool holder.

[0083] As a possible implementation, a spiral groove 45 is formed in the conical section of the horn 42 to output longitudinal and torsional two-dimensional ultrasonic vibrations.

[0084] As a possible implementation method, the polishing equipment also includes a clamp 54, which is arranged on the machine tool worktable 50 and is used to clamp the workpiece 70; a three-axis dynamometer 55 connected to the clamp 54, a data acquisition card 56 connected to the three-axis dynamometer 55, and a computer 57 connected to the data acquisition card 56, and the computer 57 is used to display the force changes of the workpiece 70 in real time; the computer 57 is also connected to the workpiece 70 through a thermocouple wire to display the temperature changes of the workpiece 70.

[0085] The polishing equipment provided by the embodiments of the present invention can be specifically applied to the mirror polishing of mold steel. In this application scenario, by fully combining the micro-blade polishing properties of micro-textured diamond nano-coated tools with the advantages of low-temperature ultrasonic vibration intermittent machining, and using the efficient mirror machining of hardened steel as the research object, a new low-temperature ultrasonic composite extrusion polishing process for nano-diamond coated tools is proposed. The intermittent cutting characteristics of ultrasonic machining facilitate the cooling medium to enter the cutting area, which is expected to further reduce the affinity between diamond tools and mold steel, reduce tool wear, and achieve mirror polishing of mold steel.

[0086] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in an appropriate manner in any one or more embodiments or examples.

[0087] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A method for manufacturing a polishing tool, characterized in that: The following steps are involved: A cemented carbide ball head is provided, and micro-texture is processed on the surface of the cemented carbide ball head to obtain a textured cemented carbide ball head. The method specifically comprises: using a laser marking machine to process the micro-texture on the surface of the cemented carbide ball head according to a preset number of scans N, 4≤N≤6; the micro-texture is a concentric circle micro-texture, and the depth of the concentric circle micro-texture is D, 30μm≤D≤50μm; performing ultrasonic acid-base pretreatment on the textured cemented carbide ball head; A diamond coating is deposited on the surface of the textured cemented carbide ball head by adopting a hot wire chemical vapor deposition method to obtain a polishing tool.

2. The method for manufacturing a polishing tool according to claim 1, wherein: The ultrasonic acid-base pretreatment of the textured cemented carbide ball head comprises: Placing the textured cemented carbide ball head in an alkaline solution and cleaning the textured cemented carbide ball head using an ultrasonic cleaning machine for a preset time T1; Placing the textured cemented carbide ball head in an acidic solution, and cleaning the textured cemented carbide ball head using an ultrasonic cleaning machine for a preset time T2; The textured cemented carbide ball head is placed in a mixed solution containing diamond abrasive powder, and an ultrasonic cleaning machine is used to grind and clean the textured cemented carbide ball head according to a preset time T3.

3. The method for manufacturing a polishing tool according to claim 2, wherein: 20min≤T1≤30min, 20s≤T2≤40s, 5min≤T3≤15min; and / or, The acidic solution is Caro's acid, the alkaline solution is a mixed solution of potassium ferrocyanide and potassium hydroxide, and the mixed solution is a mixed solution of diamond grinding powder and acetone.

4. The method for manufacturing a polishing tool according to claim 1, wherein: Depositing a diamond coating on the surface of the textured cemented carbide ball head by a hot wire chemical vapor deposition method to obtain a polishing tool comprising: S30. Providing a hot-wire chemical vapor deposition apparatus, using a tool to place the textured carbide ball stud within a vacuum chamber of the hot-wire chemical vapor deposition apparatus, wherein the M hot-wires of the hot-wire chemical vapor deposition apparatus are positioned directly above the textured carbide ball stud, with a vertical distance H1 of 10 mm ≤ H1 ≤ 15 mm; and a spacing H2 between the M hot-wires of 25 mm ≤ H2 ≤ 30 mm. S31 using the hot wire chemical vapor deposition equipment on the surface of the textured carbide ball head deposited a layer of silicon-doped micron diamond film; S32 using mechanical polishing technology to polish the surface of the silicon-doped micron diamond film surface smoothing process; S33. A layer of silicon-doped nanodiamond film is deposited in situ on the surface of the polished silicon-doped microdiamond film; S34. The silicon-doped nanodiamond film is surface polished; S35. Repeat S33 and S34 until a multi-layer silicon-doped micro-nano diamond film having a preset surface accuracy is obtained on the surface of the textured cemented carbide ball head.

5. A polishing tool, characterized in that: The polishing tool is a textured cemented carbide ball head with a diamond coating deposited on the surface; the polishing tool is manufactured by the polishing tool manufacturing method according to any one of claims 1 to 4.

6. A polishing device, characterized in that: It comprises an ultrasonic vibration device and a polishing device; wherein the ultrasonic vibration device comprises an ultrasonic generator, a transducer and a horn; the polishing device comprises a machine tool workbench, a spindle, a tool holder and a polishing tool; the polishing tool is the polishing tool according to claim 5; The tool handle is coaxially connected to the main shaft, one end of the transducer is coaxially connected to the tool handle, the other end of the transducer is coaxially connected to the amplitude rod, and the other end of the amplitude rod is coaxially connected to the polishing tool; the ultrasonic generator is electrically connected to the transducer.

7. The polishing device according to claim 6, characterized in that The polishing equipment further includes a cooling device, one end of which is connected to a coolant storage tank and the other end is connected to a delivery pipeline of an atomizing nozzle, and the atomizing nozzle is used to spray the coolant toward the workpiece to be polished; The cooling device further includes a movable platform disposed at one end of the delivery pipeline close to the atomizing nozzle, the delivery pipeline being placed on the movable platform, and the movable platform driving the delivery pipeline to rise and fall so as to change the distance and angle between the atomizing nozzle and the workpiece; The cooling device further comprises a pressure reducing valve and a flow regulating valve arranged at one end of the delivery pipeline close to the coolant storage tank; and a temperature measuring instrument and a pressure measuring instrument arranged at a middle position of the delivery pipeline.

8. The polishing device according to claim 6 or 7, characterized in that: A spherical hole is formed at the end of the horn, a spring chuck is installed in the spherical hole, the polishing tool is accommodated in the spherical hole and clamped by the spring chuck; a nut screwed onto the end of the horn is used to confine the polishing tool in the spherical hole; the polishing portion of the polishing tool protrudes from the nut; and / or, The cone section of the horn is provided with a spiral groove to output longitudinal and torsional two-dimensional ultrasonic vibrations; and / or, The polishing equipment also includes a clamp, which is arranged on the machine tool workbench and is used to clamp the workpiece; a three-axis dynamometer connected to the clamp, a data acquisition card connected to the three-axis dynamometer, and a computer connected to the data acquisition card, the computer is used to display the force changes of the workpiece in real time; the computer also provides a thermocouple wire connected to the workpiece to display the temperature changes of the workpiece.

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