A remote leak detection system and method for pipes inside a vacuum chamber of a fusion device
The remote leak detection system utilizes a multi-degree-of-freedom robotic arm and a quadrupole mass spectrometer to detect leaks inside a vacuum chamber, solving the problems of low efficiency and safety in leak detection in large scientific facilities, and achieving rapid and accurate leak location and fixed-point leak detection.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HEFEI UNIV OF TECH
- Filing Date
- 2023-07-27
- Publication Date
- 2026-05-15
AI Technical Summary
Existing leak detection methods cannot meet the needs of future nuclear fusion device internal leak detection, especially in high-risk environments and large scientific facilities. Conventional methods are inefficient, inaccurate, and time-consuming, and cannot quickly locate the leak point.
Design a remote leak detection system, including a leak detection module, a multi-degree-of-freedom robotic arm module, a control module, and a signal processing module. Utilize a camera and a quadrupole mass spectrometer for remote scanning and gas partial pressure data acquisition. The multi-degree-of-freedom robotic arm moves inside a vacuum chamber, and the leak location is determined by combining the gas partial pressure data and camera images.
It enables rapid, safe, and accurate leak detection in the vacuum chamber of a fully superconducting tokamak fusion device, improving leak detection efficiency and safety. It is applicable to complex internal structures and avoids contamination of the vacuum environment by manual operation.
Smart Images
Figure CN116864158B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of nuclear fusion reactor detection technology, specifically to a remote leak detection system and method for pipelines inside the vacuum chamber of a fusion reactor. Background Technology
[0002] With the advancement of science and technology, vacuum devices for certain applications are developing towards larger sizes and higher vacuum levels. In fields such as aerospace simulation, defense technology, nuclear power, and high-energy physics, many vacuum containers have volumes of tens of cubic meters, achieving high or even ultra-high vacuum levels; simultaneously, their internal components are intricately complex. Leak detection is a crucial step in achieving a vacuum, and the most commonly used method for vacuum leak detection is helium mass spectrometry. This involves using a spray gun to blow helium gas onto the surface of the cavity, while a helium leak detector monitors the changes in the partial pressure of helium gas within the cavity in real time. However, conventional leak detection methods are unsuitable for high-risk environments that endanger personnel safety, or when conventional methods cannot locate the leak point in a timely manner. Furthermore, the efficiency and accuracy of using conventional helium detection methods for leak detection in large scientific installations are relatively low.
[0003] The EAST device is my country's first fully superconducting tokamak device, independently designed and developed internationally. The main body of the EAST device is 11 meters high, 8 meters in diameter, and weighs 400 tons. It consists of six major components: an ultra-high vacuum chamber, longitudinal field coils, poloidal field coils, inner and outer cold shields, an outer vacuum Dewar, and a support system. Its experimental operation requires support from systems such as large-scale cryogenic helium refrigeration, large-scale high-power pulsed power supplies and their circuits, large-scale superconductor testing, large-scale computer control and data acquisition and processing, megawatt-level low-hybrid current drive and radio frequency heating, large-scale ultra-high vacuum, and various advanced diagnostic and measurement systems. During the manufacturing of the vacuum chamber, the installation of window equipment, and the experimental process of the fusion device, defects in the vacuum chamber shell material, installation deviations of the window equipment, and the effects of electromagnetic forces or plasma disruption during experiments can cause minute leaks in the vacuum chamber body and connecting components. This directly affects the normal plasma discharge experiments of the fusion device, causing it to shut down. Therefore, developing and applying effective vacuum leak detection systems and methods is one of the key focuses of current tokamak plasma engineering research.
[0004] The causes of internal leaks in the tokamak vacuum chamber are complex, including micro-leaks on the first wall or leaks in the divertor's water-cooling tubes. Locating a leak after it occurs is a challenging task. Due to the large volume of the vacuum chamber and the fact that leaks occur internally, attempts to locate the leak point by applying positive pressure with nitrogen or using helium mass spectrometry after disrupting the vacuum environment are cumbersome and time-consuming. Furthermore, when the tokamak device needs to inject tritium for fusion reactions, manual leak detection is impossible due to tritium's radioactivity. Therefore, a rapid leak detection method that can be remotely operated is needed to address this issue. Summary of the Invention
[0005] The purpose of this invention is to provide a remote leak detection system and method for pipelines inside the vacuum chamber of a fusion device, in order to solve the problem that existing leak detection methods cannot meet the new requirements for internal leak detection in future nuclear fusion devices.
[0006] The present invention achieves the above objectives through the following technical solutions:
[0007] A remote leak detection system for pipelines inside the vacuum chamber of a fusion device, wherein the fusion device is a fully superconducting tokamak fusion device, the system comprising:
[0008] Leak detection module;
[0009] A multi-degree-of-freedom robotic arm module is located outside the vacuum chamber and is used to install the leak detection module and, when leak detection is required, to extend the leak detection module into the vacuum chamber for moving scanning and leak detection.
[0010] The control module is used to remotely control the leak detection module and the multi-degree-of-freedom robotic arm module, and to acquire the leak detection data from the leak detection module.
[0011] The signal processing module is used to determine whether a leak has occurred and to locate the leak based on the leak detection data, and then sends the judgment and determination results to the user terminal.
[0012] A further improvement is that the leak detection module includes:
[0013] A camera used to capture images of the interior of the vacuum chamber;
[0014] A quadrupole mass spectrometer is used to measure gas partial pressure data by collecting gas plumes inside a vacuum chamber.
[0015] A further improvement is that the quadrupole mass spectrometer has a slender, tubular probe at the air inlet of the detection chamber, which is used to collect the gas plume in a directional manner and restrict the gas from remaining in the detection chamber.
[0016] A further improvement is that the probe is made of stainless steel.
[0017] A further improvement is that the multi-degree-of-freedom robotic arm module is located in a secluded space, and a gate valve is provided between the secluded space and the vacuum chamber. The opening and closing of the gate valve enables the connection or isolation between the secluded space and the vacuum chamber. The multi-degree-of-freedom robotic arm module has its own vacuum pumping mechanism for evacuating the secluded space.
[0018] A further improvement is that the multi-degree-of-freedom robotic arm module includes a robotic arm base, a robotic arm upper arm, a robotic arm middle arm, a robotic arm lower arm, a steering mechanism, a lateral swing arm, and a longitudinal swing arm connected in sequence, wherein the robotic arm upper arm, the robotic arm middle arm, and the robotic arm lower arm constitute an arc-shaped telescopic component adapted to the vacuum chamber structure.
[0019] A further improvement is that all components in the multi-degree-of-freedom robotic arm module are made of materials with low air output, and the upper arm, middle arm, lower arm, steering mechanism, lateral swing arm and longitudinal swing arm are all driven by motors, with a radiation shielding layer on the surface of the motor.
[0020] A further improvement is that the control module includes:
[0021] The robotic arm control unit is used to control the multi-degree-of-freedom robotic arm module as it extends into and moves within the vacuum chamber.
[0022] The mass spectrometer control unit is used to control the start and stop of the quadrupole mass spectrometer and to acquire the gas partial pressure data measured by the quadrupole mass spectrometer.
[0023] The image control unit is used to control the opening and closing of the camera and to acquire images of the interior of the vacuum chamber captured by the camera.
[0024] The vacuum control unit is used to control the opening and closing of the vacuum mechanism;
[0025] The slide gate valve control unit is used to control the opening and closing of the slide gate valve.
[0026] This invention also provides a remote leak detection method for pipelines inside the vacuum chamber of a fusion device. Using the aforementioned system, the specific steps include:
[0027] S1. During the operation of the fully superconducting tokamak fusion device, the vacuum level and gas composition ratio in the vacuum chamber are detected by the vacuum measuring equipment built into the vacuum chamber. When the vacuum level and gas composition ratio in the vacuum chamber are detected to be outside the normal range, the leak detection procedure is started.
[0028] S2. Control the vacuum pumping mechanism to pump the enclosed space where the multi-degree-of-freedom robotic arm module is located to a vacuum environment, and then control the opening of the gate valve between the enclosed space and the vacuum chamber.
[0029] S3. Control the multi-degree-of-freedom robotic arm module to extend into the vacuum chamber and move according to the pre-planned path, so that the quadrupole mass spectrometer scans while maintaining a certain distance from the surface of the vacuum chamber, and at the same time, the camera captures the image inside the vacuum chamber.
[0030] S4. During the quadrupole mass spectrometer scanning process, acquire the partial pressure data of the gas in the vacuum chamber. If the partial pressure data does not change, control the multi-degree-of-freedom robotic arm module to continue moving according to the pre-planned path. If the partial pressure data changes, it is determined that a leak has occurred, and control the multi-degree-of-freedom robotic arm module to perform multiple scans in the vicinity of the location where the partial pressure data changes.
[0031] S5. During multiple scans, the changes in gas partial pressure data are combined with the movement of the multi-degree-of-freedom robotic arm module to determine the leak location and send it to the user terminal.
[0032] A further improvement is that, in step S4, the multiple scans refer to: performing a grid-like route scan that is parallel to and perpendicular to the pre-planned path and spaced apart by a set distance.
[0033] The beneficial effects of this invention are as follows:
[0034] 1. This invention enables remote leak detection of the vacuum chamber of a fully superconducting tokamak fusion device, improving the safety of leak detection personnel and the efficiency of leak detection work;
[0035] 2. This invention is electrically driven and will not cause pollution to the vacuum environment;
[0036] 3. This invention utilizes a robotic arm for remote leak detection, which can scan the entire surface of the vacuum chamber, making it widely applicable;
[0037] 4. The design concept and method of this invention are complete and reliable. It uses a robotic arm to complete the leak detection work of the internal pipes of the fusion device, and performs fixed-point and range leak detection, which improves the leak detection speed.
[0038] 5. This invention specifically uses a Pitot probe installed at the front of the mass spectrometer, which improves the signal for leak detection. Attached Figure Description
[0039] Figure 1 A schematic diagram of a remote leak detection system for the internal piping of a fusion device's vacuum chamber;
[0040] Figure 2 This is a schematic diagram of the installation of a multi-degree-of-freedom robotic arm module;
[0041] Figure 3 A schematic diagram of the specific structure of a multi-degree-of-freedom robotic arm module;
[0042] Figure 4 A schematic diagram of the specific structure of the leak detection module;
[0043] Figure 5 This is a schematic diagram illustrating the working principle of the Pietro probe.
[0044] Figure 6 This is a diagram showing the status of a remote leak detection system for the piping inside the vacuum chamber of a fusion device during leak detection.
[0045] Figure 7 A flowchart of a remote leak detection method for pipelines inside the vacuum chamber of a fusion device;
[0046] In the diagram: 1. Vacuum chamber; 2. Gate valve; 3. Enclosed space; 4. Multi-degree-of-freedom robotic arm module; 41. Robotic arm base; 42. Robotic arm upper arm; 43. Robotic arm middle arm; 44. Robotic arm lower arm; 45. Steering mechanism; 46. Lateral swing arm; 47. Longitudinal swing arm; 5. Leak detection module; 51. Leak detector support; 52. Quadrupole mass spectrometer; 53. Hexagonal lock nut; 54. Hexagonal head bolt; 55. Camera; 56. Conduit; 57. Rotating shaft; 58. Pipe probe. Detailed Implementation
[0047] The present application will now be described in further detail with reference to the accompanying drawings. It should be noted that the following specific embodiments are only used to further illustrate the present application and should not be construed as limiting the scope of protection of the present application. Those skilled in the art can make some non-essential improvements and adjustments to the present application based on the above application content.
[0048] This invention targets a fully superconducting tokamak fusion device, which contains multiple plasma-facing components such as divertors and a first wall, and requires a vacuum level below 1 × 10⁻⁶ during operation. -5 Pa, there may be micro-leakage in the water-cooling pipe or the divertor water-cooling pipe in the first wall inside the vacuum chamber of the fusion device, which requires precise leak detection.
[0049] like Figure 1 As shown, a remote leak detection system for internal piping in a vacuum chamber of a fusion device is disclosed, the system comprising:
[0050] Leak detection module;
[0051] A multi-degree-of-freedom robotic arm module is located outside the vacuum chamber and is used to install the leak detection module and, when leak detection is required, to extend the leak detection module into the vacuum chamber for moving scanning and leak detection.
[0052] The control module provides an integrated control platform and interface for data interaction, used to remotely control the leak detection module and the multi-degree-of-freedom robotic arm module, and to acquire leak detection data from the leak detection module.
[0053] The signal processing module is used to determine whether a leak has occurred and to locate the leak based on the leak detection data. The judgment and determination results are then sent to the user terminal to guide the staff in leak detection and emergency handling of the leak location.
[0054] Preferred, combined Figure 2As shown, the multi-degree-of-freedom robotic arm module 4 is located in the enclosed space 3, and a gate valve 2 is provided between the enclosed space 3 and the vacuum chamber 1. When not in use, the vacuum chamber 1 is separated by the gate valve 2. The connection or isolation between the enclosed space 3 and the vacuum chamber 1 is achieved by opening and closing the gate valve 2. The multi-degree-of-freedom robotic arm module 4 has a built-in vacuum pumping mechanism (not shown in the figure) for evacuating the enclosed space 3.
[0055] In addition, in specific implementation, the slide gate valve 2 has a through hole with the same diameter as the pipeline. The diameter of the gate is slightly larger than that of the through hole and has a sealing ring on the edge. The gate can be moved up and down by rotating the rocker above or by the piston being pushed by gas. When the gate reaches the final position and is pressed, the sealing surface and the gate just seal the through hole, thereby achieving the effect of isolating both ends.
[0056] Preferred, combined Figure 3 As shown, the multi-degree-of-freedom robotic arm module 4 includes a robotic arm base 41, a robotic arm upper arm 42, a robotic arm middle arm 43, a robotic arm lower arm 44, a steering device 45, a lateral swing arm 46, and a longitudinal swing arm 47 connected in sequence. The robotic arm upper arm 42, the robotic arm middle arm 43, and the robotic arm lower arm 44 constitute an arc-shaped telescopic component adapted to the structure of the vacuum chamber 1.
[0057] Preferably, all components in the multi-degree-of-freedom robotic arm module 4 are made of materials with low outgassing rates, such as stainless steel, avoiding materials with high outgassing rates, such as copper and aluminum. The robotic arm upper arm 42, robotic arm middle arm 43, robotic arm lower arm 44, steering mechanism 45, lateral swing arm 46, and longitudinal swing arm 47 are all driven by motors. In order to adapt to the internal environment of the vacuum chamber 1, a radiation shielding layer is provided on the surface of the motor, since radiation mainly affects the motor's motion function. The material of the radiation shielding layer can be tungsten, which has strong radiation resistance and thermal stability. In addition, the motor is selected to be suitable for the vacuum environment, and the communication line is not exposed to the vacuum and can be encapsulated in a corrugated pipe.
[0058] Preferred, combined Figure 4 As shown, the leak detection module 5 includes:
[0059] Camera 55, such as a 2D camera, is used to capture images of the interior of vacuum chamber 1, facilitating observation of the interior and determining the location of leak detection module 5. Quadrupole mass spectrometer 52 is used to measure gas partial pressure data by collecting gas plumes inside vacuum chamber 1. Additionally, it includes a leak detector support 51 for placing and fixing the quadrupole mass spectrometer 52, a cable conduit 56 for winding, and a rotating shaft 57 for mounting at the end of the multi-degree-of-freedom robotic arm module 4.
[0060] The quadrupole mass spectrometer 52 features a slender, tubular (smaller diameter than the mass spectrometer's inlet pipe) Pitot probe 58 at its detection chamber inlet. This probe is used to directionally collect the gas plume and confine the gas within the detection chamber. The principle of the Pitot probe 58 is as follows: Figure 5 As shown, after the gas leaks out from the leak location, it diffuses in all directions in the vacuum environment, forming a plume. Some gas molecules enter from the port of the Pitot probe 58, either directly or by colliding with the surrounding pipe walls, and enter the detection chamber of the quadrupole mass spectrometer 52. They accumulate inside the detection chamber, forming a relatively high pressure. Since the Pitot probe 58 is a pipe with a large length-to-diameter ratio and very small gas conductance, the gas does not easily flow out from the detection chamber into the vacuum chamber 1. This results in the pressure inside the mass spectrometer always being higher than the pressure at the port, thus making the detection signal higher.
[0061] Preferably, the probe 58 is made of stainless steel, which has a relatively low outgassing rate in a vacuum. It is connected to the quadrupole mass spectrometer 52 via a knife-edge flange and is fixed by a hexagonal lock nut 53 and a hexagonal head bolt 54.
[0062] Preferably, the control module includes:
[0063] The robotic arm control unit is used to control the extension of the multi-degree-of-freedom robotic arm module 4 into the vacuum chamber 1 and its movement inside the vacuum chamber 1;
[0064] The mass spectrometer control unit is used to control the opening and closing of the quadrupole mass spectrometer 52 and to acquire the gas partial pressure data measured by the quadrupole mass spectrometer 52.
[0065] The image control unit is used to control the opening and closing of the camera 55 and to acquire the internal image of the vacuum chamber 1 captured by the camera 55.
[0066] The vacuum control unit is used to control the opening and closing of the vacuum mechanism;
[0067] The slide gate valve control unit is used to control the opening and closing of slide gate valve 2.
[0068] Combined Figure 6 and Figure 7 As shown, the present invention also provides a remote leak detection method for pipelines inside the vacuum chamber of a fusion device. Using the above system, the specific steps include:
[0069] S1. During the operation of the fully superconducting tokamak fusion device, the vacuum level and gas composition ratio in vacuum chamber 1 are detected by the vacuum measuring equipment built into the vacuum chamber. When the vacuum level and gas composition ratio in vacuum chamber 1 are detected to be outside the normal range (the total pressure changes significantly and the gas composition changes unreasonably), the leak detection procedure is started.
[0070] S2. Control the vacuum pumping mechanism to pump the encloseable space 3 where the multi-degree-of-freedom robotic arm module 4 is located to a vacuum environment, and then control the opening of the gate valve 2 between the encloseable space 3 and the vacuum chamber 1.
[0071] S3. Control the multi-degree-of-freedom robotic arm module 4 to extend into the vacuum chamber 1 and move according to the pre-planned path (the components on the surface of the vacuum chamber 1 are fixed, and the surface morphology will not change much. After a leak occurs, the leaking component is identified, and it can move along the pre-set scanning path. For more refined scanning near the leak location, the motion parameters of the robotic arm, such as the length of the robotic arm forearm and the angle of deflection, can be corrected), so that the quadrupole mass spectrometer 52 scans while maintaining a certain distance from the surface of the vacuum chamber 1, and at the same time, the camera 55 captures the internal image of the vacuum chamber 1;
[0072] S4. During the scanning process of the quadrupole mass spectrometer 52, the partial pressure data of the gas in the vacuum chamber 1 is acquired. If the partial pressure data does not change, the multi-degree-of-freedom robotic arm module 4 is controlled to continue moving according to the pre-planned path. If the partial pressure data changes, it is determined that a leak has occurred, and the multi-degree-of-freedom robotic arm module 4 is controlled to perform multiple scans in the area near the location where the partial pressure data changes (e.g., a circular area with a radius of 50cm). That is, the scan is performed in a grid pattern along a path parallel to the pre-planned path and perpendicular to the pre-planned path, with a set distance between them. The set distance can be 5cm. The reason for choosing 5cm is that if the distance is too small, it will increase the invalid repeated scanning work, and if the distance is too large, the leak location will be ignored between the two scanning paths.
[0073] S5. During multiple scans, the changes in gas partial pressure data are combined with the movement of the multi-degree-of-freedom robotic arm module 4 to determine the leak location and send it to the user terminal for subsequent repair work.
[0074] For example, water-cooled pipes for cooling the divertor and the first wall are distributed inside vacuum chamber 1. If these pipes leak during operation, the vacuum level inside vacuum chamber 1 will rise, failing to meet the vacuum level requirements for plasma discharge. At this time, the quadrupole mass spectrometer 52 is turned on to detect the partial pressure of water inside vacuum chamber 1. When the probe of the quadrupole mass spectrometer 52 passes near the leak location, the partial pressure of water will change significantly.
[0075] The embodiments described above are merely examples of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention.
Claims
1. A remote leak detection system for pipelines inside the vacuum chamber of a fusion device, wherein the fusion device is a fully superconducting tokamak fusion device, characterized in that, The system includes: Leak detection module, the leak detection module includes: A camera used to capture images of the interior of the vacuum chamber; A quadrupole mass spectrometer is used to measure gas partial pressure data by collecting gas plumes inside a vacuum chamber. The quadrupole mass spectrometer has a slender pipe-shaped probe at the gas inlet of the detection chamber for directional collection of gas plumes and confinement of gas within the detection chamber. A multi-degree-of-freedom robotic arm module is located outside the vacuum chamber and is used to install the leak detection module and, when leak detection is required, to extend the leak detection module into the vacuum chamber for moving scanning and leak detection. The control module is used to remotely control the leak detection module and the multi-degree-of-freedom robotic arm module, and to acquire the leak detection data from the leak detection module. The signal processing module is used to determine whether a leak has occurred and to locate the leak based on the leak detection data, and then sends the judgment and determination results to the user terminal.
2. The remote leak detection system for internal pipelines of a fusion device vacuum chamber according to claim 1, characterized in that, The probe is made of stainless steel.
3. A remote leak detection system for internal pipelines in a fusion device vacuum chamber according to claim 1, characterized in that, The multi-degree-of-freedom robotic arm module is located in a secluded space, and a gate valve is provided between the secluded space and the vacuum chamber. The opening and closing of the gate valve enables the connection or isolation between the secluded space and the vacuum chamber. The multi-degree-of-freedom robotic arm module has a built-in vacuum pumping mechanism for evacuating the secluded space.
4. A remote leak detection system for internal piping of a fusion device vacuum chamber according to claim 1 or 3, characterized in that, The multi-degree-of-freedom robotic arm module includes a robotic arm base, a robotic arm upper arm, a robotic arm middle arm, a robotic arm lower arm, a steering mechanism, a lateral swing arm, and a longitudinal swing arm connected in sequence. The robotic arm upper arm, the robotic arm middle arm, and the robotic arm lower arm constitute an arc-shaped telescopic component adapted to the structure of the vacuum chamber.
5. A remote leak detection system for internal piping of a fusion device vacuum chamber according to claim 4, characterized in that, All components in the multi-degree-of-freedom robotic arm module are made of materials with low air output, and the upper arm, middle arm, lower arm, steering mechanism, lateral swing arm and longitudinal swing arm are all driven by motors, with a radiation shielding layer on the surface of the motor.
6. A remote leak detection system for internal piping of a fusion device vacuum chamber according to claim 3, characterized in that, The control module includes: The robotic arm control unit is used to control the multi-degree-of-freedom robotic arm module as it extends into and moves within the vacuum chamber. The mass spectrometer control unit is used to control the start and stop of the quadrupole mass spectrometer and to acquire the gas partial pressure data measured by the quadrupole mass spectrometer. The image control unit is used to control the opening and closing of the camera and to acquire images of the interior of the vacuum chamber captured by the camera. The vacuum control unit is used to control the opening and closing of the vacuum mechanism; The slide gate valve control unit is used to control the opening and closing of the slide gate valve.
7. A remote leak detection method for pipelines inside a vacuum chamber of a fusion device, characterized in that, The specific steps of using the system according to claim 3 include: S1. During the operation of the fully superconducting tokamak fusion device, the vacuum level and gas composition ratio in the vacuum chamber are detected by the vacuum measuring equipment built into the vacuum chamber. When the vacuum level and gas composition ratio in the vacuum chamber are detected to be outside the normal range, the leak detection procedure is started. S2. Control the vacuum pumping mechanism to pump the enclosed space where the multi-degree-of-freedom robotic arm module is located to a vacuum environment, and then control the opening of the gate valve between the enclosed space and the vacuum chamber. S3. Control the multi-degree-of-freedom robotic arm module to extend into the vacuum chamber and move according to the pre-planned path, so that the quadrupole mass spectrometer scans while maintaining a certain distance from the surface of the vacuum chamber, and at the same time, the camera captures the image inside the vacuum chamber. S4. During the quadrupole mass spectrometer scanning process, acquire the partial pressure data of the gas in the vacuum chamber. If the partial pressure data does not change, control the multi-degree-of-freedom robotic arm module to continue moving according to the pre-planned path. If the partial pressure data changes, it is determined that a leak has occurred, and control the multi-degree-of-freedom robotic arm module to perform multiple scans in the vicinity of the location where the partial pressure data changes. S5. During multiple scans, the changes in gas partial pressure data are combined with the movement of the multi-degree-of-freedom robotic arm module to determine the leak location and send it to the user terminal.
8. A remote leak detection method for internal pipelines in a fusion device vacuum chamber according to claim 7, characterized in that, In step S4, the multiple scans refer to scanning a grid-like route that is parallel to and perpendicular to the pre-planned path and spaced apart by a set distance.