A detection platform and a transportation guide rail for semiconductor products

Abstract

The application provides a detection platform and a transportation guide rail for semiconductor products, and relates to the field of semiconductor processing equipment. The detection platform for semiconductor products comprises a side plate, a jacking assembly and a width adjusting motor. The width between the fixed side plate and the movable side plate can be automatically adjusted according to the width of the product during detection by arranging the width adjusting motor, the fixed side plate and the movable side plate, so that the compatibility of the detection platform for the product is greatly improved. When the width adjusting motor adjusts the width between the fixed side plate and the movable side plate, the jacking assembly is automatically centered between the fixed side plate and the movable side plate through the follow-up assembly. Since the jacking assembly can be automatically centered through the follow-up assembly, it is not necessary to additionally design a driving assembly to drive the jacking assembly to be centered, so that the design space of the whole jacking assembly is saved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing equipment, and more specifically, to a testing platform and transport rail for semiconductor products. Background Technology

[0002] The semiconductor industry in China is currently in a phase of rapid development, and semiconductor-related manufacturing equipment is of paramount importance.

[0003] Especially when visually inspecting semiconductor products, the platform is not compatible with all widths available on the market. Furthermore, the transportation of semiconductor products during visual inspection involves manual labor, which can easily damage some semiconductor products, and manual transportation is also inefficient. Summary of the Invention

[0004] The present invention includes, for example, providing a testing platform and transport rail for semiconductor products, wherein the testing platform can be dynamically adjusted according to the width of the semiconductor product and is compatible with semiconductor products of various widths.

[0005] The embodiments of the present invention can be implemented as follows:

[0006] This invention provides a testing platform for semiconductor products, comprising a side plate, a lifting assembly, and a width-adjusting motor. The side plate includes a fixed side plate and a movable side plate. The lifting assembly is used to lift and lower the product and is disposed between the fixed side plate and the movable side plate. The lifting assembly includes a follower assembly, which includes a guide rail and a linkage structure. The lifting assembly is slidably connected to the guide rail, and the linkage structure is sequentially connected to the fixed side plate, the lifting assembly, and the movable side plate. The output shaft of the width-adjusting motor is fixed to the movable side plate. When the output shaft of the width-adjusting motor drives the movable side plate to move, the linkage structure drives the lifting assembly to follow and center on the guide rail.

[0007] Furthermore, the linkage structure includes a first linkage, one end of which is connected to a fixed rail linkage, and the other end of which is connected to a moving rail linkage. The fixed rail linkage is rotatably connected to the fixed side plate, and the moving rail linkage is rotatably connected to the moving side plate. A bearing is installed on the middle part of the first linkage, and the lifting assembly is fixed with a shaft. The bearing is connected to the shaft.

[0008] Furthermore, the output shaft of the width-adjusting motor passes through the moving side plate, the lifting assembly, and the fixed side plate in sequence; or the output shaft of the width-adjusting motor passes through the fixed side plate, the lifting assembly, and the moving side plate in sequence.

[0009] Furthermore, the detection platform also includes two detection belt assemblies and belt motors respectively disposed inside the fixed side plate and the moving side plate; each of the two detection belt assemblies includes multiple driven pulleys and a belt, and the output shaft of the belt motor is drivenly connected to a first driving pulley and a second driving pulley. The first driving pulley is disposed inside the fixed side plate, and the second driving pulley is disposed inside the moving side plate. The first driving pulley drives the multiple driven pulleys of the detection belt assembly through the belt of one of the detection belt assemblies, and the second driving pulley drives the multiple driven pulleys of the detection belt assembly through the belt of the other detection belt assembly.

[0010] Furthermore, a belt lifting structure for lifting the belts is provided in the area surrounded by the two belts. The belt lifting structure includes multiple belt lifting cylinders, which are disposed on the inner wall of the side plate. A belt lifting block is fixed to the output end of the multiple belt lifting cylinders.

[0011] Furthermore, the detection platform also includes two cover plates, which are respectively disposed on the top of the side plate; at least one of the cover plates is provided with a through groove, and a side push assembly is provided on one side of at least one of the through grooves. The side push assembly includes a positioning push block and a plurality of side push cylinders. The positioning push block is connected to the output end of the plurality of side push cylinders, and the positioning push block is slidably disposed in the through groove.

[0012] Furthermore, the lifting assembly includes a mounting platform, multiple platform lifting cylinders, and at least two sliders. One end of each of the at least two sliders is fixed to the mounting platform, and the other end is slidably connected to the guide rail. The output ends of the multiple platform lifting cylinders are fixed to the platform, and the other ends are fixed to the mounting platform. The mounting platform is dynamically connected to the connecting rod structure.

[0013] In another aspect, the present invention also proposes a transport guide rail, including the aforementioned detection platform.

[0014] Furthermore, the input end of the testing platform is provided with two first extension plates, which are respectively fixed to one end of the fixed side plate and the moving side plate, and a feeding belt assembly is provided between the two first extension plates; the input end of the feeding belt assembly is provided with a feeding sensor, and the output end of the feeding belt assembly is provided with a first positioning sensor and a first lifting blocking block structure, which is used to block the product from entering the testing platform.

[0015] Furthermore, the output end of the detection platform is provided with two second extension plates, which are respectively fixed to the other end of the fixed side plate and the moving side plate. A feeding belt assembly is provided between the two second extension plates. The input end of the feeding belt assembly is provided with a second positioning sensor and a second lifting blocking block structure. The second lifting blocking block structure is used to block the product from entering the feeding belt assembly. The output end of the feeding belt assembly is provided with a feeding sensor.

[0016] The beneficial effects of the embodiments of the present invention include, for example:

[0017] This invention, by setting up a width-adjusting motor, a fixed side plate, and a moving side plate, enables the width between the fixed and moving side plates to be automatically adjusted according to the width of the product during inspection, greatly improving the compatibility of the inspection platform with the product. When the width-adjusting motor adjusts the width between the fixed and moving side plates, the lifting component follows and centers itself between the fixed and moving side plates through a follower component. Furthermore, since the lifting component can achieve centering through the follower component, there is no need to design a separate drive component for driving centering, thus saving the design space of the entire lifting component. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the transport guide rail structure;

[0020] Figure 2 A top view showing products on the transport rails;

[0021] Figure 3 This is a cross-sectional view of the transport guide rail;

[0022] Figure 4 This is a partial schematic diagram of the input end of the feeding belt assembly;

[0023] Figure 5 This is a partial connection diagram of the lifting component and the follower component of the testing platform;

[0024] Figure 6 for Figure 5 Top view;

[0025] Figure 7 This is a partial bottom view of the testing platform;

[0026] Figure 8This is a cross-sectional view of the testing platform from the belt motor.

[0027] Figure 9 This is a partial schematic diagram of the detection belt assembly inside the moving side plate;

[0028] Figure 10 This is a partial cross-sectional view of the inspection platform at the side thrust component.

[0029] Icons: 100 - Detection platform; 110 - Side plate; 111 - Fixed side plate; 112 - Moving side plate; 113 - Cover plate; 114 - Sliding structure;

[0030] 120 - Lifting assembly; 121 - Mounting platform; 122 - Platform lifting cylinder; 123 - Slider; 124 - Platform;

[0031] 130 - Follower component; 131 - Guide rail; 132 - Linkage structure; 133 - First link; 134 - Fixed rail link; 135 - Moving rail link; 136 - Bearing;

[0032] 140-Adjustable width motor;

[0033] 150 - Detection belt assembly; 151 - Belt motor; 152 - First drive pulley; 153 - Second drive pulley; 154 - Driven pulley; 155 - Belt lifting cylinder; 156 - Belt lifting block;

[0034] 160 - Side push assembly; 161 - Positioning push block; 162 - Side push cylinder;

[0035] 200 - Feeding belt assembly; 210 - Feeding sensor; 220 - First lifting stop block structure; 230 - Pressure roller;

[0036] 300 - Feeding belt assembly; 310 - Second lifting blocking block structure; 320 - Feeding sensor;

[0037] 400-product. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0039] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0040] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0041] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0042] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0043] It should be noted that, where there is no conflict, the features in the embodiments of the present invention can be combined with each other.

[0044] Please refer to Figure 1-3 This invention provides a testing platform 100 for a semiconductor product 400, including a side plate 110, a lifting assembly 120, and a width-adjusting motor 140. The side plate 110 includes a fixed side plate 111 and a movable side plate 112. The lifting assembly 120 is used to lift and lower the product 400 and is disposed between the fixed side plate 111 and the movable side plate 112. The lifting assembly 120 includes a follower assembly 130, which includes a guide rail 131 and a connecting rod structure 132. The lifting assembly 120 is slidably connected to the guide rail 131, and the connecting rod structure 132 is sequentially connected to the fixed side plate 111, the lifting assembly 120, and the movable side plate 112. The output shaft of the width-adjusting motor 140 is fixed to the movable side plate 112. When the output shaft of the width-adjusting motor 140 drives the movable side plate 112 to move, the connecting rod structure 132 is used to drive the lifting assembly 120 to follow and center on the guide rail 131.

[0045] Two guide rails 131 are provided under the lifting assembly 120. The two ends of the guide rails 131 are provided with chamfered grooves, which can limit the lifting assembly 120 while ensuring that the edge of the guide rails 131 is relatively smooth.

[0046] In an optional embodiment of the invention, please refer to Figure 5-7 The linkage structure 132 includes a first linkage 133, one end of which is connected to a fixed rail linkage 134, and the other end is connected to a moving rail linkage 135. The fixed rail linkage 134 is rotatably connected to the fixed side plate 111, and the moving rail linkage 135 is rotatably connected to the moving side plate 112. A bearing 136 is installed on the middle part of the first linkage 133, and a shaft is fixed on the lifting assembly 120. The bearing 136 is connected to the shaft.

[0047] In an optional embodiment of the invention, the output shaft of the width-adjusting motor 140 passes through the moving side plate 112, the lifting assembly 120, and the fixed side plate 111 in sequence; or the output shaft of the width-adjusting motor 140 passes through the fixed side plate 111, the lifting assembly 120, and the moving side plate 112 in sequence.

[0048] When the output shaft of the width-adjusting motor 140 passes sequentially through the moving side plate 112, the lifting assembly 120, and the fixed side plate 111; and the output shaft of the width-adjusting motor 140 is fixed to the moving side plate 112 and slidably connected to the lifting assembly 120 and the fixed side plate 111, the width-adjusting motor 140 extends its output shaft to push the moving side plate 112 towards the fixed side plate 111. When the output shaft of the width-adjusting motor 140 passes sequentially through the fixed side plate 111, the lifting assembly 120, and the moving side plate 112; and the output shaft of the width-adjusting motor 140 is fixed to the moving side plate 112 and slidably connected to the lifting assembly 120 and the fixed side plate 111, the width-adjusting motor 140 retracts its output shaft to move the moving side plate 112 away from the fixed side plate 111.

[0049] In an optional embodiment of the invention, please refer to Figure 8-9 The detection platform 100 also includes two detection belt assemblies 150 and a belt motor 151 respectively disposed inside the fixed side plate 111 and the moving side plate 112. Each detection belt assembly 150 includes multiple driven pulleys 154 and a belt. The output shaft of the belt motor 151 is driven by a first driving pulley 152 and a second driving pulley 153. The first driving pulley 152 is disposed inside the moving side plate 112, and the second driving pulley 153 is disposed inside the fixed side plate 111. The first driving pulley 152 drives the multiple driven pulleys 154 of the detection belt assembly 150 through the belt of one of the detection belt assemblies 150, and the second driving pulley 153 drives the multiple driven pulleys 154 of the detection belt assembly 150 through the belt of the other detection belt assembly 150.

[0050] The detection belt assemblies 150 installed inside the moving side plate 112 and the fixed side plate 111 are used to move the product 400. The belt motor 151 drives the first drive pulley 152 and the second drive pulley 153 to synchronously drive the two detection belt assemblies 150, thereby transporting the product 400 located on the two detection belt assemblies 150. The first drive pulley 152, while connected to the output shaft of the belt motor 151, can also achieve axial sliding connection with the output shaft of the belt motor 151 through a structure such as a sliding groove; that is, when the moving side plate 112 is pushed by the width-adjusting motor 140, the first drive pulley 152 on the moving side plate 112 slides axially on the output shaft of the belt motor 151. This allows the detection belt assembly 150 at the end of the moving side plate 112 to move accordingly when the moving side plate 112 is pushed.

[0051] In an optional embodiment of the invention, please refer to Figure 9-10 The area enclosed by the two belts is equipped with a belt lifting structure for lifting the belts. The belt lifting structure includes multiple belt lifting cylinders 155, which are disposed on the inner wall of the side plate 110. A belt lifting block 156 is fixed to the output end of each belt lifting cylinder 155. The output shafts of the multiple belt lifting cylinders 155 drive the belt lifting block 156 to move upwards or downwards, lifting the belt and thus the product 400 upwards. In other embodiments, the belt lifting cylinder 155 can also be a belt lifting motor.

[0052] In an optional embodiment of the invention, please refer to Figure 8 and Figure 10 The testing platform 100 also includes two cover plates 113, which are respectively disposed on the top of the side plate 110. At least one cover plate 113 is provided with a through groove, and a side push assembly 160 is provided on one side of at least one through groove. The side push assembly 160 includes a positioning push block 161 and multiple side push cylinders 162. The positioning push block 161 is connected to the output end of the multiple side push cylinders 162 and is slidably disposed in the through groove. The side push assembly 160 can be disposed on the outer wall of the moving side plate 112 or on the outer wall of the fixed side plate 111. One end of the positioning push block 161 is connected to the output end of the multiple side push cylinders 162, and the other end can match the multiple through grooves and slide in the through grooves. When the product 400 is present at this location, the multiple side push cylinders 162 synchronously drive the positioning push block 161 to slide in the through groove. The positioning push block 161 extends out of the groove and holds the product 400 in place, positioning the product 400 at this location. A cover plate 113 is provided on the top of the side plate 110 to prevent the product 400 from being removed manually or from warping and flying out during transportation. In other embodiments, the side push cylinder 162 may also be a side push motor.

[0053] In an optional embodiment of the invention, please refer to Figure 5The lifting assembly 120 includes a mounting platform 121, multiple platform lifting cylinders 122, and two sliders 123. One end of each slider 123 is fixed to the mounting platform 121, and the other end is slidably connected to a guide rail 131. The output ends of the multiple platform lifting cylinders 122 are fixed to a platform 124, and the other ends are fixed to the mounting platform 121. The mounting platform 121 is movably connected to a connecting rod structure 132. The mounting platform 121 has a through slot for the output shaft of the width-adjusting motor 140 to pass through. In other embodiments, the platform lifting cylinders 122 can also be platform lifting motors.

[0054] The working principle of the testing platform 100 for semiconductor product 400 provided by the present invention is as follows:

[0055] When a product 400 is input at one end of the detection platform 100, the belt motor 151 synchronously drives the detection belt assembly 150 inside the moving side plate 112 and the detection belt assembly 150 on the fixed side plate 111, and synchronously moves the product 400 to the detection position.

[0056] When moved to the detection position, i.e., position 124 of the stage, please refer to... Figure 5-7 Based on the width of product 400, the output shaft of the width-adjusting motor 140 pushes the moving side plate 112, causing it to move towards the fixed side plate 111. Since the first connecting rod 133 is connected to the moving rail connecting rod 135, the lifting assembly 120, driven by the first connecting rod 133, moves synchronously on the two guide rails 131 at the bottom. As the moving side plate 112 moves, the moving rail connecting rod 135, located at the lower end of the moving side plate 112, moves inward and pushes the first connecting rod 133; the first connecting rod 133 pushes the fixed rail connecting rod 134, which only rotates without moving; at this time, the lifting assembly 120 achieves centering with the help of the connecting rod structure 132 and the slide rail structure. The output shaft of the width-adjusting motor 140 pushes the moving side plate 112. Through the follower component 130 and the lifting component 120 working in conjunction with the guide rail 131, the distance between the fixed side plate 111 and the moving side plate 112 is adjusted to fit the width of the product 400. When lifting the product 400, the lifting component 120 needs to lift the center area of ​​the product 400 to ensure that the product 400 does not tilt during the lifting process. Therefore, the lifting component 120 follows and centers the product 400 when adjusting the width between the moving side plate 112 and the fixed side plate 111, ensuring that the product 400 can be smoothly lifted to the detection height for inspection. Furthermore, the following and centering of the lifting component 120 does not require a separate drive component for driving and centering, saving design space for the entire lifting component 120.

[0057] After product 400 is moved to the detection position, the platform lifting cylinder 122 on the mounting platform 121 lifts the platform 124 to the detection height; at the same time, the output end of the belt lifting cylinder 155 on the inner side of the fixed side plate 111 drives the belt lifting block 156 to move upward, and the belt lifting cylinder 155 on the inner side of the moving side plate 112 drives the belt lifting block 156 to move upward. The two belt lifting blocks 156 simultaneously lift product 400 until one side of product 400 is in close contact with the cover plate 113.

[0058] After the product 400 is lifted to the inspection height and pressed tightly against the cover plate 113, the output ends of the two side-push cylinders 162 located on the outside of the cover plate 113 on the moving side plate 112 push the positioning push block 161. The other end of the positioning push block 161 slides in the through groove until it extends out of the through groove and presses against one side of the product 400, so that the upper surface of the product 400 is pressed against the lower surface of the cover plate 113. That is, the height of the lower surface of the cover plate 113 is the inspection height, and the product 400 is positioned at the inspection height for visual inspection.

[0059] After visual inspection of product 400 at the inspection height on platform 124 is completed, the output end of side push cylinder 162 retracts, positioning push block 161 retracts, and positioning of product 400 is canceled. Platform lifting cylinder 122 retracts its output end, and as platform 124 moves downward, belt lifting cylinder 155 on the inner side of fixed side plate 111 and belt lifting cylinder 155 on the inner side of moving side plate 112 simultaneously retract their output ends, and two belt lifting blocks 156 move downward simultaneously, returning product 400 to the transport position.

[0060] The belt motor 151 synchronously drives the detection belt assembly 150 on the inner side of the moving side plate 112 and the detection belt assembly 150 on the fixed side plate 111 to transport the product 400 to the next equipment.

[0061] This invention, by setting up a width-adjusting motor 140 and a follower component 130 in cooperation, enables the lifting component 120 to be centered between the fixed side plate 111 and the moving side plate 112. This allows the testing platform 100 to automatically adjust the width within the support of the fixed side plate 111 and the moving side plate 112 according to the width of the product 400, greatly improving the compatibility of the testing platform 100. Furthermore, it eliminates the need for a separate drive component to drive and center the lifting component, saving design space for the lifting component 120.

[0062] The present invention also provides a cover plate 113 to prevent the product 400 from warping and flying out when the product 400 is manually removed or transported, thus achieving fully enclosed transmission.

[0063] The present invention also uses a lifting component 120 in conjunction with a belt lifting cylinder 155 to keep the inspection height of visual inspection at the inspection station constant, so that the inspection height will not vary due to different product thickness or belt deformation.

[0064] Please refer to Figure 1-4 The present invention also proposes a transport guide rail, including the aforementioned detection platform 100.

[0065] In an optional embodiment of the present invention, the input end of the detection platform 100 is provided with two first extension plates, which are respectively fixed to one end of the fixed side plate 111 and the moving side plate 112, and a feeding belt assembly 200 is provided between the two first extension plates; the input end of the feeding belt assembly 200 is provided with a feeding sensor 210, and the output end of the feeding belt assembly 200 is provided with a first positioning sensor and a first lifting blocking block structure 220, which is used to block the product 400 from entering the detection platform 100.

[0066] A feeding pressure roller 230 is provided at the feeding end of the feeding belt assembly 200 in conjunction with the first extension plate. The feeding pressure roller 230 has the function of assisting in the transmission of the product 400. Only a small part of the product 400 needs to enter the feeding belt assembly 200, and the pressure roller 230 can assist the belt to transmit the entire product 400 into the feeding belt assembly 200.

[0067] In an optional embodiment of the present invention, the output end of the detection platform 100 is provided with two second extension plates, which are respectively fixed to the other end of the fixed side plate 111 and the moving side plate 112. A feeding belt assembly 300 is provided between the two second extension plates. The input end of the feeding belt assembly 300 is provided with a second positioning sensor and a second lifting blocking block structure 310. The second lifting blocking block structure 310 is used to block the product 400 from entering the feeding belt assembly 300. The output end of the feeding belt assembly 300 is provided with a feeding sensor 320.

[0068] According to the present invention, the working principle of the transport guide rail is as follows:

[0069] Product 400 is loaded onto the feeding belt assembly 200. The feeding roller 230 at the inlet end of the feeding belt assembly 200 assists product 400 into the feeding belt assembly 200. The feeding belt assembly 200 transports product 400 to the testing platform 100 for testing. After the testing platform 100 completes the testing, product 400 is transported to the unloading belt assembly 300, which then transports product 400 to the next workstation.

[0070] The feeding belt assembly 200 and the unloading belt assembly 300 are both mounted on the fixed side plate 111 and the moving side plate 112 via the first extension plate and the second extension plate, respectively. Alternatively, the feeding belt assembly 200 and the unloading belt assembly 300 can be directly mounted on the extended fixed side plate 111 and the moving side plate 112. This allows them to work together with the detection platform 100 to adjust the width between the fixed side plate 111 and the moving side plate 112 according to the width of the product 400. If the entire transport track is too long, sliding structures 114 can be provided at the feeding belt assembly 200 and the unloading belt assembly 300 to dynamically adjust the width between the fixed side plate 111 and the moving side plate 112 of the entire transport track.

[0071] Please refer to Figure 2 When a product 400 is being inspected on the inspection platform 100, and the feeding sensor 210 at the input end of the feeding belt assembly 200 detects that product 400 is being fed, the first lifting blocking block structure 220 blocks product 400 from entering the inspection platform 100, keeping product 400 in the feeding waiting position. Until the feeding sensor 210 detects that there is no product 400 on the inspection platform 100, the first lifting blocking block structure 220 no longer blocks product 400, allowing product 400 to enter the inspection platform 100.

[0072] Please refer to Figure 2 When a product 400 is being transported on the feeding belt assembly 300 and a product 400 has been inspected on the inspection platform 100, the second lifting blocking block structure 310 prevents the product 400 from entering the feeding belt assembly 300. The second lifting blocking block structure 310 stops blocking the product 400 from entering the feeding belt assembly 300 once the feeding sensor 320 at the output end of the feeding belt assembly 300 detects that the product 400 on the feeding belt assembly 300 has been transported out, allowing the product 400 to enter the feeding belt assembly 300 and be positioned at the feeding waiting station.

[0073] The proposed transport track features three independently operating workstations: a material loading / waiting station for the loading conveyor belt assembly 200, a detection station for the detection platform 100, and a material unloading / waiting station for the unloading conveyor belt assembly 300. These three stations can operate independently at high speed. Furthermore, each station is equipped with sensors and lifting stop structures to ensure independence and prevent interference between them.

[0074] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A testing platform for semiconductor products, characterized in that, include: Side plate, the side plate including a fixed side plate and a movable side plate; Two cover plates are respectively disposed on the top of the side plate; Two detection belt assemblies are respectively arranged inside the fixed side plate and the moving side plate, and a belt lifting structure for lifting the belts is provided in the area surrounded by the two belts. A lifting assembly is used to lift and lower a product. The lifting assembly is disposed between the fixed side plate and the movable side plate. The lifting assembly includes a follower assembly, which includes a guide rail and a linkage structure. The lifting assembly is slidably connected to the guide rail. The linkage structure is sequentially connected to the fixed side plate, the lifting assembly, and the movable side plate. A width-adjusting motor, the output shaft of which is fixed to the moving side plate, when the output shaft of the width-adjusting motor drives the moving side plate to move, the linkage structure is used to drive the lifting assembly to follow and center on the guide rail, when the width-adjusting motor adjusts the width between the fixed side plate and the moving side plate, the lifting assembly follows and centers between the fixed side plate and the moving side plate through the follower assembly; The linkage structure includes a first linkage, one end of which is connected to a fixed rail linkage, and the other end of which is connected to a movable rail linkage. The fixed rail linkage is rotatably connected to the fixed side plate, and the movable rail linkage is rotatably connected to the movable side plate. A bearing is installed on the middle part of the first connecting rod, and a shaft is fixed to the lifting assembly. The bearing is connected to the shaft. At least one of the cover plates is provided with a through groove, and a side push assembly is provided on one side of at least one of the through grooves.

2. The testing platform for semiconductor products according to claim 1, characterized in that, The output shaft of the width-adjusting motor passes sequentially through the moving side plate, the lifting assembly, and the fixed side plate; Alternatively, the output shaft of the width-adjusting motor may pass sequentially through the fixed side plate, the lifting assembly, and the moving side plate.

3. The testing platform for semiconductor products according to claim 1, characterized in that, The testing platform also includes a belt motor; Both of the aforementioned detection belt assemblies include multiple driven pulleys and a belt. The output shaft of the belt motor is driven by a first driving pulley and a second driving pulley. The first driving pulley is located inside the fixed side plate, and the second driving pulley is located inside the moving side plate. The first driving pulley drives a plurality of driven pulleys of the detection belt assembly via the belt of one of the detection belt assemblies, and the second driving pulley drives a plurality of driven pulleys of the detection belt assembly via the belt of another detection belt assembly.

4. The testing platform for semiconductor products according to claim 3, characterized in that, The belt lifting structure includes multiple belt lifting cylinders, which are disposed on the inner wall of the side plate, and belt lifting blocks are fixed to the output ends of the multiple belt lifting cylinders.

5. The testing platform for semiconductor products according to claim 4, characterized in that, The side-push assembly includes a positioning push block and multiple side-push cylinders. The positioning push block is connected to the output ends of the multiple side-push cylinders and is slidably disposed in the through groove.

6. The testing platform for semiconductor products according to claim 1, characterized in that, The lifting assembly includes a mounting platform, multiple platform lifting cylinders, and at least two sliders. At least two of the sliders are fixed at one end to the mounting platform and slidably connected to the guide rail at the other end; the output end of the plurality of platform lifting cylinders is fixed to the platform and the other end is fixed to the mounting platform. The mounting platform is dynamically connected to the connecting rod structure.

7. A transport guide rail, characterized in that, Includes the detection platform described in any one of claims 1-6.

8. The transport guide rail according to claim 7, characterized in that, The input end of the detection platform is provided with two first extension plates, which are respectively fixed to one end of the fixed side plate and the moving side plate, and a feeding belt assembly is provided between the two first extension plates; The input end of the feeding belt assembly is equipped with a feeding sensor, and the output end of the feeding belt assembly is equipped with a first positioning sensor and a first lifting blocking block structure. The first lifting blocking block structure is used to prevent products from entering the detection platform.

9. The transport guide rail according to claim 7, characterized in that, The output end of the detection platform is provided with two second extension plates, which are respectively fixed to the other end of the fixed side plate and the moving side plate. A feeding belt assembly is provided between the two second extension plates. The input end of the feeding belt assembly is provided with a second positioning sensor and a second lifting blocking block structure. The second lifting blocking block structure is used to block the product from entering the feeding belt assembly. The output end of the feeding belt assembly is provided with a feeding sensor.

Images