Vacuum suction device and vacuum sample drive system

Abstract

The disclosure provides a vacuum adsorption device and a vacuum sample driving system, comprising: a main body, which is hollow and comprises a supporting surface on the inside; and one or more adsorption plates, which are arranged on the supporting surface and comprise an adsorption material arranged on the surface for adsorbing gas. The vacuum sample driving system comprises: a driving vacuum cavity; a sample holder located outside the driving vacuum cavity for carrying a sample; a first driving shaft, the proximal end of which is arranged inside the driving vacuum cavity and the distal end of which is fixedly connected with the sample holder; a transmission magnetic assembly arranged at the proximal end of the first driving shaft; a driving magnetic assembly arranged outside the driving vacuum cavity and magnetically coupled with the transmission magnetic assembly to drive the transmission magnetic assembly to move, thereby driving the first driving shaft and the sample holder to move; and a vacuum adsorption device sleeved outside the first driving shaft.

Description

Technical Field

[0001] This disclosure relates to the field of vacuum technology, and in particular to a vacuum adsorption device and a vacuum sample driving system. Background Technology

[0002] In vacuum deposition technologies, such as molecular beam epitaxy (MBE), coating uniformity is one of the main criteria for judging coating quality. Generally, large-area coating uniformity is achieved by rotating the sample tray during production or experimentation. In traditional technologies, the sample tray rotates at 10-60 revolutions per minute (rpm), while large trays in large-scale deposition systems typically rotate at 20 rpm. For materials requiring extremely thin single-layer deposition, coating uniformity is highly dependent on the sample tray rotation speed, requiring the substrate tray to rotate at 100-200 rpm.

[0003] However, since the current sample tray rotation in the vacuum chamber uses a gear-driven structure, the rotation of the sample tray is driven by the meshing of the gears. The gear located below the flange is sealed inside the vacuum chamber by the flange. When the gear rotates at high speed, friction will release a large amount of gases such as hydrogen and carbon monoxide, which will be directly discharged into the vacuum growth chamber. Moreover, the faster the sample stage rotates, the greater the amount of gas released, which will damage the ultra-high vacuum coating environment and directly lead to a reduction in the quality of the epitaxial film. Summary of the Invention

[0004] This disclosure provides a vacuum adsorption device, characterized in that it comprises: a body, the body being hollow and including a support surface located on the inner side; and one or more adsorption plates, the adsorption plates being disposed on the support surface and including adsorption material disposed on the surface for adsorbing gas.

[0005] This disclosure provides a vacuum sample driving system, characterized in that it includes: a driving vacuum chamber; a sample holder located outside the driving vacuum chamber for carrying a sample; a first driving shaft with its proximal end disposed inside the driving vacuum chamber and its distal end fixedly connected to the sample holder; a transmission magnetic assembly disposed near the first driving shaft; a driving magnetic assembly disposed outside the driving vacuum chamber and magnetically coupled to the transmission magnetic assembly to drive the transmission magnetic assembly to move, thereby driving the first driving shaft and the sample holder to move; and a vacuum adsorption device as described in any of the embodiments of this disclosure, sleeved outside the first driving shaft. Attached Figure Description

[0006] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0007] Figure 1 An exploded perspective view of a vacuum adsorption apparatus according to some embodiments of the present disclosure is shown.

[0008] Figure 2 A schematic diagram of the structure of a vacuum sample driving system according to some embodiments of the present disclosure is shown;

[0009] Figure 3 A cross-sectional view of a vacuum sample driving system according to some embodiments of the present disclosure is shown;

[0010] Figure 4 This diagram shows a structural schematic of a drive magnetic assembly and a first drive device according to some embodiments of the present disclosure;

[0011] Figure 5 A side view of a drive magnetic assembly and a first drive device according to some embodiments of the present disclosure is shown;

[0012] Figure 6 A partial structural cross-sectional view of a vacuum sample driving system according to some embodiments of the present disclosure is shown;

[0013] Figure 7 A schematic diagram of the structure of a second drive device according to some embodiments of the present disclosure is shown;

[0014] Figure 8 A schematic diagram of the structure of a third drive device according to some embodiments of the present disclosure is shown;

[0015] Figure 9 A schematic diagram of the structure of a vacuum coating system according to some embodiments of the present disclosure is shown.

[0016] In the above figures, the reference numerals represent:

[0017] 200 Vacuum Adsorption Device

[0018] 210 Main Body

[0019] 220 Adsorption Plate

[0020] 100 Vacuum Sample Drive System

[0021] 10. Driving vacuum chamber

[0022] 11 First bellows

[0023] 12 First vacuum cavity section

[0024] 13 Second drive unit

[0025] 131 Second Motor

[0026] 132 Second driving gear

[0027] 134a, 134c, 134d Second Lead Screw

[0028] 14 Second Corrugated Pipe

[0029] 15 Second Vacuum Chamber Section

[0030] 16 Third drive unit

[0031] 161 Third Motor

[0032] 162 Third driving gear

[0033] 164a, 164b, 164c, 164d third lead screw

[0034] 20 Sample racks

[0035] 30 First drive shaft

[0036] 40. Drive magnetic assembly

[0037] 50 Drive Magnetic Assembly

[0038] 60 First drive unit

[0039] 61 First Electric Motor

[0040] 62 First driven gear

[0041] 63a and 63b drive bearings

[0042] 70 Heating device

[0043] 80 Second drive shaft

[0044] 90 connecting shaft

[0045] 91 Through Hole

[0046] 1000 Vacuum Coating System

[0047] 300 Coating Chamber Detailed Implementation

[0048] Some embodiments of this disclosure will now be described with reference to the accompanying drawings. Obviously, the described embodiments are merely exemplary embodiments of this disclosure, and not all embodiments.

[0049] In the description of this disclosure, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "top," and "bottom," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this disclosure, it should be noted that unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "coupling" should be interpreted broadly, for example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two elements. In the description of this disclosure, "distal" or "farside" refers to one end or side that extends into a vacuum environment (e.g., a vacuum cavity), and "proximal" or "proximal" is one end or side opposite to "distal" or "farside" (e.g., one end or side away from the vacuum cavity, or one end or side within the vacuum cavity that is closer to the vacuum cavity wall, etc.). Those skilled in the art will understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0050] Figure 1 An exploded perspective view of a vacuum adsorption apparatus 200 according to some embodiments of the present disclosure is shown.

[0051] like Figure 1 As shown, the vacuum adsorption device 0 may include a main body 210 and a plurality of adsorption plates 220. The main body 210 is hollow and may include a support surface 211 located on its inner side. The support surface 211 may be the inner surface of the main body 210, or it may be a mounting surface disposed on the inner side of the main body 210 for supporting the adsorption plates 220. For example, the support surface 211 may include the upper surface of a protruding structure protruding inward from the inner surface of the main body 210. The plurality of adsorption plates 220 are disposed on the support surface 211, and the adsorption plates 220 may include adsorption material disposed on their surfaces for adsorbing gases. The adsorption material may include various suitable adsorption materials, such as Ti / Pb materials. Ti / Pb materials have good adsorption properties for hydrogen and carbon monoxide gases.

[0052] Those skilled in the art will understand that, although Figure 1 Multiple adsorption plates 220 are shown, but this is only an exemplary structure, and the number of adsorption plates 220 may also be one. Similarly, those skilled in the art will understand that the adsorption materials listed in this embodiment, including Ti / Pb materials, are merely exemplary, and the adsorption materials may also include other materials capable of adsorbing gases.

[0053] like Figure 1 As shown, in some embodiments of this disclosure, the plurality of adsorption plates 220 may include a plurality of adsorption plates arranged at intervals along the axial direction of the body 210. The axially spaced arrangement of the plurality of adsorption plates 220 can increase the contact area with the gas to be adsorbed, and the gas to be adsorbed can be largely adsorbed by the adsorption plates 220 when it passes through the body 210.

[0054] Those skilled in the art will understand that, although Figure 1 The diagram shows multiple adsorption plates 220, which may include multiple adsorption plates spaced apart along the axial direction of the body 210. However, this is merely exemplary, and the multiple adsorption plates 220 may also be multiple adsorption plates arranged in a cross-shaped grid. Furthermore, the adsorption plates may also be spirally arranged along the axial direction of the body, and the number may be one or more.

[0055] like Figure 1 As shown, in some embodiments of this disclosure, the axial angle θ between the plurality of adsorption plates 220 and the body 210 is less than or equal to 90° (e.g., the axial angle between the adsorption plates 220 and the axial direction is between 30° and 60°), and the plurality of adsorption plates 220 may include adsorption material disposed on the adsorption plates 220. In this disclosure, the axial angle between the adsorption plates 220 and the body 210 refers to the proximal angle between the two (e.g., ...). Figure 1 The upper angle shown, Figure 6 The included angle θ shown above.

[0056] like Figure 1 As shown, in some embodiments of this disclosure, the main body 210 is cylindrical and may include a first portion 212 and a second portion 213. The first portion 212 and the second portion 213 cooperate to form the cylindrical main body 210. For example, as... Figure 1 As shown, the first part 212 and the second part 213 can be semi-cylindrical, cooperating to form a complete cylindrical main body 210. Multiple adsorption plates 220 are annular. The multiple adsorption plates 220 can also consist of two parts, respectively disposed on the first part 212 and the second part 213 of the main body 210. By assembling the first part 212 and the second part 213, a complete vacuum adsorption device 200 can be easily formed, facilitating installation.

[0057] Those skilled in the art will understand that, although Figure 1 The main body 210 shown includes a first part 212 and a second part 213, but this is only exemplary, and the main body 210 can also be a one-piece molded structure. Similarly, the adsorption plate 220 can also be a one-piece molded structure. Furthermore, the adsorption plate 220 and the main body 210 can also be a one-piece molded structure to facilitate the installation of the vacuum adsorption device 200. Similarly, although... Figure 1The cross-section of the main body 210 is shown to be circular, but the cross-section of the main body 210 can also be at least one of rectangular, polygonal, or elliptical.

[0058] Figure 2 A schematic diagram of the structure of a vacuum sample driving system 100 according to some embodiments of the present disclosure is shown. Figure 3 A cross-sectional view of a vacuum sample drive system 100 according to some embodiments of the present disclosure is shown.

[0059] like Figure 2 and Figure 3 As shown, the vacuum sample driving system 100 may include a driving vacuum chamber 10, a sample holder 20, a first driving shaft 30, a transmission magnetic assembly 40, a driving magnetic assembly 50, and a vacuum adsorption device 200. The sample holder 20 is located outside the driving vacuum chamber 10 and can be used to hold samples, such as wafers or bar strips on a tray at the distal end of the holder. The proximal end of the first driving shaft 30 is disposed within the driving vacuum chamber 10, and the distal end is fixedly connected to the sample holder 20. The transmission magnetic assembly 40 is disposed near the first driving shaft 30, and the driving magnetic assembly 50 is disposed outside the driving vacuum chamber 10 and magnetically coupled to the transmission magnetic assembly 40 to drive the transmission magnetic assembly 40 to move, thereby moving the first driving shaft 30 and the sample holder 20. Those skilled in the art will understand that the movement of the sample holder 20 may include lifting and / or rotation. The vacuum adsorption device 200 is sleeved outside the first driving shaft 30 and can adsorb gases released from friction between the components of the vacuum sample driving system 100, preventing the coating chamber 300 (e.g., Figure 9 The vacuum level (as shown) should be maintained to avoid affecting the coating quality.

[0060] like Figure 2 and Figure 3 As shown, in some embodiments of this disclosure, the vacuum sample driving system 100 may further include a first driving device 60. The first driving device 60 is capable of driving the driving magnetic assembly 50 to rise and / or rotate, thereby driving the transmission magnetic assembly 40 to rise and / or rotate, and driving the first driving shaft 30 and the sample holder 20 to rise and / or rotate.

[0061] Figure 4 A schematic diagram of the structure of the drive magnetic assembly 50 and the first drive device 60 according to some embodiments of the present disclosure is shown. Figure 5 A side view of a drive magnetic assembly 50 and a first drive device 60 according to some embodiments of the present disclosure is shown.

[0062] like Figures 2-5As shown, in some embodiments of this disclosure, the first driving device 60 may include a first motor 61, a first driving gear (not shown), and a first driven gear 62. The first driving gear is fixedly mounted on the output end of the first motor 61 and can rotate with the rotation of the output end of the first motor 61. The first driven gear 62 is fixedly sleeved on the driving magnetic assembly 50 and is coupled to the first driving gear (e.g., meshing, connected through a transmission gear set, connected by a synchronous belt, etc.). It can rotate under the drive of the first driving gear, driving the driving magnetic assembly 50 to rotate. The driving magnetic assembly 50 is magnetically coupled to the transmission magnetic assembly 40. The driving magnetic assembly 50 rotates under the drive of the first driving device 60 to drive the transmission magnetic assembly 40 to rotate, thereby driving the first drive shaft 30 and the sample holder 20 to rotate. The driving magnetic assembly 50 and the transmission magnetic assembly 40 drive the first drive shaft 30 through a magnetic coupling driving method, reducing equipment wear and extending the service life of the equipment.

[0063] like Figures 2-5 As shown, in some embodiments of this disclosure, the first driving device 60 may further include driving bearings (e.g., driving bearing 63a and driving bearing 63b). Driving bearing 63a and driving bearing 63b are respectively disposed at the distal and proximal ends of the first driving shaft 30, such that the first driving shaft 30 is rotatably connected to the driving vacuum chamber 10, thereby enabling the first driving shaft 30 to rotate relative to the driving vacuum chamber 10, thereby driving the sample holder 20 to rotate. The driving bearings (e.g., driving bearing 63a and driving bearing 63b) may include stainless steel bearings, and volatile gases (e.g., hydrogen and carbon monoxide) released by friction from the stainless steel bearings will enter the coating chamber 300. In some embodiments of this disclosure, the volatile gases (e.g., hydrogen and carbon monoxide) will first pass through the vacuum adsorption device 200 before entering the coating chamber 300. The adsorption plate 220 of the vacuum adsorption device 200 is provided with an adsorption material (e.g., Ti / Pb material), which has a good adsorption effect on volatile gases (e.g., hydrogen and carbon monoxide). The volatile gases (e.g., hydrogen, carbon monoxide) released by the friction of the drive bearing are largely adsorbed by the adsorption plate 220, leaving only a negligible amount of gas to enter the coating chamber 300. In this way, the coating chamber 300 can maintain a vacuum level, especially an ultra-high vacuum level.

[0064] Those skilled in the art will understand that, although some embodiments of this disclosure only show the first driving device 60 driving the first driving shaft 30 and the sample holder 20 to rotate, in other embodiments of this disclosure, the first driving device 60 may also drive the first driving shaft 30 and the sample holder 20 to move up and down. This disclosure uses the example of the first driving device 60 driving the driving magnetic assembly 50 to rotate.

[0065] Figure 6A partial structural cross-sectional view of a vacuum sample drive system 100 according to some embodiments of the present disclosure is shown.

[0066] like Figure 6 As shown, in some embodiments of this disclosure, the following data are used as examples: the length L of the main body 210 of the vacuum adsorption device 200 is 28 cm, the horizontal distance D1 between the multiple adsorption plates 220 is 7 cm, and the diameter D2 of the connecting shaft 90 is 6 cm. The angle between the multiple adsorption plates 220 and the axial direction of the main body 210 is less than or equal to 90° (for example, the angle between the adsorption plate 220 and the axial direction is between 30° and 60°), the width of the multiple adsorption plates 220 is 20 mm, and the vertical distance between adjacent adsorption plates 220 is 13 mm. Calculations show that the conductance of the vacuum adsorption device 200 for the gas released by friction is... (The flow rate of the gas released by friction in the vacuum adsorption device 200 is 53 liters per second.)

[0067] The pumping speed S of the vacuum adsorption device 200 is proportional to the total adsorption area of ​​the multiple adsorption plates 220. Based on the pumping speed of the Ti / Pb material, the pumping speed S of the vacuum adsorption device 200 can be calculated to be 3950 L / s.

[0068] The sample holder 20 generates a total outgassing volume Q when rotating at high speed. If this outgassing volume Q directly enters the coating chamber 300, it will cause an increase in internal gas pressure. Where T is the total pumping speed of the coating chamber 300, and the amount of gas released after passing through the vacuum adsorption device 200 and flowing back into the coating chamber 300 is... The final amount of gas Q entering the coating chamber 300 ′ The pressure increase caused by the coating chamber 300 As can be seen, in some embodiments of this disclosure, by setting up the vacuum adsorption device 200, the pressure increment of the bearing friction venting in the vacuum sample drive system 100 to the coating chamber 300 will decrease by two orders of magnitude, and the impact of the vacuum degree on the coating chamber 300 will be greatly reduced. Therefore, the rotation speed of the sample holder 20 can be greatly increased, and it has a wider range of applications.

[0069] Those skilled in the art will understand that the above structural data are exemplary structures provided to clearly illustrate the calculation of the release volume and the effect of the reduction in the release volume, and are not intended to limit the present disclosure. For example, the length L of the main body 210 can be between 20cm and 40cm, the horizontal distance D1 between the multiple adsorption plates 220 can be between 5cm and 10cm, the diameter D2 of the connecting shaft 90 can be between 3cm and 9cm, the angle between the multiple adsorption plates 220 and the axial direction is less than or equal to 90° (for example, the angle between the adsorption plates 220 and the axial direction is between 30° and 60°), the width of the multiple adsorption plates 220 is between 15mm and 25mm, and the vertical distance between adjacent adsorption plates 220 is between 10mm and 17mm.

[0070] like Figure 2 and Figure 3 As shown, in some embodiments of this disclosure, the driving vacuum chamber 10 may include a first bellows 11, a first vacuum chamber section 12, and a second driving device 13. The distal end of the first vacuum chamber section 12 is vacuum-sealed to the first bellows 11. A transmission magnetic assembly 40 is disposed within the first vacuum chamber section 12, and a driving magnetic assembly 50 is disposed outside the first vacuum chamber section 12. The first vacuum chamber section 12 is rotatably connected to the first drive shaft 30, for example, via drive bearings 63a and 63b. The second driving device 13 is connected to the first vacuum chamber section 12 and can be used to drive the first vacuum chamber section 12 to move up and down via the first bellows 11, thereby driving the first drive shaft 30 and the sample holder 20 to move up and down. Figure 2 As shown, the distal end of the first vacuum chamber section 12 can extend into the first bellows 11 to obtain better stability and vacuum sealing.

[0071] Figure 7 A schematic diagram of the structure of a second drive device 13 according to some embodiments of the present disclosure is shown.

[0072] like Figures 2-7As shown, in some embodiments of this disclosure, the second drive device 13 may include a second motor 131, a second drive gear 132, a second driven main gear (not shown in the figure), a second driven secondary gear (not shown in the figure), and a second lead screw (e.g., second lead screw 134a, second lead screw 134b, second lead screw 134c, second lead screw 134d). The second drive gear 132 is fixedly connected to the output end of the second motor 131 and can rotate with the output end of the second motor 131. The second driven main gear is sleeved on the distal end of the first bellows 11 and coupled to the second drive gear 132 (e.g., meshing, connected through a transmission gear set, connected by a synchronous belt, etc.), and can rotate under the drive of the second drive gear 132. A plurality of second driven secondary gears mesh with the second driven main gear and are circumferentially distributed around the second driven main gear, and can rotate under the drive of the second driven main gear. Multiple second lead screws (e.g., second lead screw 134a, second lead screw 134b, second lead screw 134c, second lead screw 134d) are fixedly connected to multiple second driven pair gears, and the proximal ends of the multiple second lead screws (e.g., second lead screw 134a, second lead screw 134b, second lead screw 134c, second lead screw 134d) are threadedly connected to the distal end of the first vacuum chamber section 12 (e.g., the distal flange of the first vacuum chamber section 12, or the proximal flange of the first bellows 11). The distal ends of the multiple second lead screws (e.g., second lead screw 134a, second lead screw 134b, second lead screw 134c, second lead screw 134d) are rotatably connected to the distal end of the first bellows 11 (e.g., the distal flange of the first bellows 11). Driven by the rotation of multiple driven gears, multiple second lead screws (e.g., second lead screw 134a, second lead screw 134b, second lead screw 134c, and second lead screw 134d) rotate, driving the distal end of the first vacuum chamber section 12 (e.g., the distal flange of the first vacuum chamber section 12, or the proximal flange of the first bellows 11) to rise and fall through the threads, thus raising and lowering the first vacuum chamber section 12. During the raising and lowering of the first vacuum chamber section 12, the first bellows 11 extends or contracts to provide the lifting distance and maintain the vacuum environment within the drive vacuum chamber 10.

[0073] In some embodiments of this disclosure, the first vacuum chamber section 12 is rotatably connected to the first drive shaft 30 and can be driven to rotate by the first drive device 60. Furthermore, when the second drive device 13 drives the first vacuum section 12 to rise or fall, it also drives the first drive shaft 30 to rise or fall, thereby causing the sample holder 20 to rise or fall. In some embodiments of this disclosure, the sample holder 20 can rotate under the drive of the first drive device 60 and rise or fall under the drive of the second drive device 13, flexibly adjusting the position of the sample holder 20, improving the coating quality, and enabling real-time coating detection through position adjustment.

[0074] like Figure 2 and Figure 3As shown, in some embodiments of this disclosure, the vacuum sample driving system 100 may further include a heating device 70 and a second drive shaft 80. The heating device 70 is used to heat the sample on the sample holder 20, and the second drive shaft 80 is fixedly connected to the heating device 70 and is used to drive the heating device 70 to move up and down.

[0075] like Figure 2 and Figure 3 As shown, in some embodiments of this disclosure, the driving vacuum chamber 10 may further include a second bellows 14, a second vacuum chamber section 15, and a third driving device 16. The distal end of the second bellows 14 is vacuum-sealed to the first vacuum chamber section 12, for example, via a flange connection. The distal end of the second vacuum chamber section 15 is vacuum-sealed to the second bellows 14. The second vacuum chamber section 15 is fixedly connected to the second drive shaft 80. The third driving device 16 is connected to the second vacuum chamber section 15 and can be used to drive the second vacuum chamber section 15 to rise and fall, thereby driving the second drive shaft 80 and the heating device 70 to rise and fall.

[0076] Figure 8 A schematic diagram of the structure of a third drive device 16 according to some embodiments of the present disclosure is shown.

[0077] like Figures 2-8As shown, in some embodiments of this disclosure, the third drive device 16 may include a third motor 161, a third drive gear 162, a third driven main gear (not shown in the figure), a third driven secondary gear (not shown in the figure), and a third lead screw (e.g., third lead screw 164a, third lead screw 164b, third lead screw 164c, third lead screw 164d). The third drive gear 162 is fixedly connected to the output end of the third motor 161 and can rotate with the output end of the third motor 161. The third driven main gear is sleeved on the distal end of the second bellows 14 and coupled to the third drive gear 162 (e.g., meshing, connected through a transmission gear set, connected by a synchronous belt, etc.), and can rotate under the drive of the third drive gear 162. A plurality of third driven secondary gears mesh with the third driven main gear and are circumferentially distributed around the third driven main gear, and can rotate under the drive of the third driven main gear. Multiple third lead screws (e.g., third lead screw 164a, third lead screw 164b, third lead screw 164c, third lead screw 164d) are fixedly connected to multiple third driven pair gears, and their proximal ends are threadedly connected to the distal end of the second vacuum chamber section 15 (e.g., the distal flange of the second vacuum chamber section 15, or the proximal flange of the second bellows 14). The distal ends of the multiple third lead screws (e.g., third lead screw 164a, third lead screw 164b, third lead screw 164c, third lead screw 164d) are rotatably connected to the distal end of the second bellows 14 (e.g., the distal flange of the second bellows 14). Driven by the rotation of multiple third driven gears, multiple third lead screws (e.g., third lead screw 164a, third lead screw 164b, third lead screw 164c, and third lead screw 164d) rotate, driving the distal end of the second vacuum chamber section 15 (e.g., the distal flange of the second vacuum chamber section 15, or the proximal flange of the second bellows 14) to rise and fall through the threads. This, in turn, causes the second vacuum chamber section 15 to rise and fall, thereby driving the second drive shaft 80 and the heating device 70 to rise and fall. During the rising and falling of the second vacuum chamber section 15, the second bellows 14 extends or contracts to provide the rising and falling distance and maintain the vacuum environment within the drive vacuum chamber 10.

[0078] like Figure 2-8 As shown, in some embodiments of this disclosure, the first vacuum chamber 12 and the second vacuum chamber 15 are connected by a second bellows 14. When the second drive device 13 drives the first vacuum chamber 12 to rise and fall, the second bellows 14 and the second vacuum chamber 15 also rise and fall accordingly, so that the second drive device 13 can drive the sample holder 20 and the heating device 70 to rise and fall together, avoiding collision between the sample holder 20 and the heating device 70 and causing damage to the equipment.

[0079] like Figure 2 and Figure 3As shown, in some embodiments of this disclosure, the second vacuum chamber segment 15 is located at the end of the driving vacuum chamber 10, and the first driving shaft 30 is coaxially arranged with the second driving shaft 80 and sleeved outside the second driving shaft 80.

[0080] In some embodiments of this disclosure, the vacuum sample drive system 100 may further include a thermocouple (not shown). The thermocouple is connected to the heating device 70 and can be used to measure the heating temperature of the sample.

[0081] like Figures 2-8 As shown, in some embodiments of this disclosure, the proximal end of the first bellows 11 is connected to the sample holder 20 via a connecting shaft 90. The connecting shaft 90 is coaxially arranged with the first drive shaft 30 and is sleeved outside the first drive shaft 30.

[0082] In some embodiments of this disclosure, such as Figure 6 As shown, the connecting shaft 90 includes at least one through hole 91 disposed on the side wall. The vacuum adsorption device 200 is coaxially disposed with the connecting shaft 90 and sleeved outside the connecting shaft 90, and can be used to adsorb the gas released through the through hole 91.

[0083] The vacuum sample driving system 100 of some embodiments of this disclosure can reduce equipment friction and venting, increase sample stage rotation speed, thereby improving coating quality and expanding its application fields. It also reduces equipment wear, extends equipment lifespan, allows for flexible adjustment of the sample holder position according to actual production or experimental conditions, and delivers high-quality coating. Furthermore, it allows for flexible adjustment of the heating device height to alter the heating effect and provides space for real-time coating measurement.

[0084] Figure 9 A schematic diagram of the structure of a vacuum coating system 1000 according to some embodiments of the present disclosure is shown.

[0085] like Figure 9 As shown, the vacuum coating system 1000 may include a coating chamber 300 and a vacuum sample driving system 100. The vacuum sample driving system 100 is at least partially disposed within the coating chamber 300 and can be used to adjust the position of the sample within the coating chamber 300, rotate the sample, and adjust the position of the heating device 70. In some embodiments of this disclosure, the vacuum coating system 1000 can achieve the technical effects of extending equipment lifespan, reducing production or experimental costs, and improving coating quality.

[0086] It should be noted that the above are merely exemplary embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A vacuum sample driving system, characterized in that, include: Drive vacuum chamber; A sample holder, located outside the driving vacuum chamber, is used to hold the sample; The first drive shaft has its proximal end disposed in the drive vacuum chamber and its distal end fixedly connected to the sample holder. A transmission magnetic assembly is disposed near the first drive shaft; A driving magnetic assembly, located outside the driving vacuum cavity and magnetically coupled to the transmission magnetic assembly, drives the transmission magnetic assembly to move, thereby moving the first driving shaft and the sample holder. A vacuum adsorption device, sleeved outside the first drive shaft, comprises: The body is hollow and includes a support surface located on the inner side; as well as One or more adsorption plates are disposed on the support surface and include adsorption material disposed on the surface for adsorbing gases.

2. The vacuum sample driving system according to claim 1, characterized in that, The one or more adsorption plates include: Multiple adsorption plates arranged at intervals along the axial direction of the main body; or Multiple adsorption plates arranged in a cross-shaped grid; or One or more adsorption plates that are spirally arranged along the axial direction of the main body.

3. The vacuum sample driving system according to claim 1, characterized in that, The angle between the one or more adsorption plates and the axis of the main body is less than or equal to 90°.

4. The vacuum sample driving system according to any one of claims 1-3, characterized in that, The main body is cylindrical, and the cross-section of the main body is at least one of circular, polygonal, and elliptical shapes; and / or The one or more adsorption plates are in a ring shape.

5. The vacuum sample driving system according to claim 1, characterized in that, Also includes: A first driving device is used to drive the driving magnetic assembly to lift and / or rotate, thereby driving the transmission magnetic assembly to lift and / or rotate, and causing the first driving shaft and the sample holder to lift and / or rotate.

6. The vacuum sample driving system according to claim 5, characterized in that, The first driving device includes: First motor; The first driving gear is fixedly mounted on the output end of the first motor; and The first driven gear is fixedly sleeved on the drive magnetic assembly. The first driven gear is coupled to the first driving gear and is used to rotate under the drive of the first driving gear, thereby driving the drive magnetic assembly to rotate, which in turn drives the transmission magnetic assembly to rotate, thereby driving the first drive shaft and the sample holder to rotate.

7. The vacuum sample driving system according to claim 1, characterized in that, The driving vacuum chamber includes: First bellows, The first vacuum chamber section, the distal end of the first vacuum chamber section is vacuum-sealed to the first bellows, and the first vacuum chamber section is rotatably connected to the first drive shaft; The second drive unit, connected to the first vacuum chamber section, is used to drive the first vacuum chamber section to rise and fall via the first bellows, thereby driving the first drive shaft and the sample holder to rise and fall. The transmission magnetic assembly is disposed inside the first vacuum cavity section, and the drive magnetic assembly is disposed outside the first vacuum cavity section.

8. The vacuum sample driving system according to claim 7, characterized in that, The second driving device includes: Second motor; The second drive gear is fixedly connected to the output end of the second motor and can rotate with the output end of the second motor. The second driven main gear is sleeved on the far end of the first bellows and coupled with the second driving gear, and can rotate under the drive of the second driving gear; Multiple second driven auxiliary gears mesh with the second driven main gear and are circumferentially distributed around the second driven main gear, capable of rotating under the drive of the second driven main gear; and Multiple second lead screws are fixedly connected to the multiple second driven pair gears, with their proximal ends threadedly connected to the distal end of the first vacuum chamber section and their distal ends rotatably connected to the distal end of the first bellows, so as to drive the first vacuum chamber section to rise and fall under the rotation of the multiple second driven pair gears.

9. The vacuum sample driving system according to claim 7, characterized in that, Also includes: A heating device for heating the sample on the sample holder; The second drive shaft is fixedly connected to the heating device and is used to drive the heating device to move up and down.

10. The vacuum sample driving system according to claim 9, characterized in that, The driving vacuum chamber further includes: The second bellows, the distal end of which is vacuum-sealed to the first vacuum chamber section; A second vacuum chamber section, the distal end of which is vacuum-sealed to the second bellows, and the second vacuum chamber section is fixedly connected to the second drive shaft; and The third driving device is connected to the second vacuum chamber section and is used to drive the second vacuum chamber section to rise and fall, thereby driving the second drive shaft and the heating device to rise and fall.

11. The vacuum sample driving system according to claim 10, characterized in that, The third driving device includes: Third motor; The third driving gear is fixedly connected to the output end of the third motor and can rotate with the output end of the third motor; The third driven main gear is sleeved on the far end of the second bellows and coupled with the third driving gear, and can rotate under the drive of the third driving gear; Multiple third driven auxiliary gears mesh with the third driven main gear and are circumferentially distributed around the third driven main gear, capable of rotating under the drive of the third driven main gear; and Multiple third lead screws are fixedly connected to the multiple third driven pair gears, with their proximal ends threadedly connected to the distal end of the second vacuum chamber section and their distal ends rotatably connected to the distal end of the second bellows, so that the second vacuum chamber section is driven to rise and fall under the rotation of the multiple third driven pair gears.

12. The vacuum sample driving system according to claim 11, characterized in that, The second vacuum chamber segment is located at the end of the driving vacuum chamber. The first drive shaft is coaxially arranged with the second drive shaft and is sleeved on the outside of the second drive shaft.

13. The vacuum sample driving system according to claim 12, characterized in that, The proximal end of the first bellows is connected to the sample holder via a connecting shaft. The connecting shaft is coaxially arranged with the first drive shaft and is sleeved on the outside of the first drive shaft.

14. The vacuum sample driving system according to claim 13, characterized in that, The connecting shaft includes at least one through hole provided on the side wall. The vacuum adsorption device is coaxially arranged with the connecting shaft and sleeved outside the connecting shaft, and is used to adsorb the gas released through the through hole.

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