Air nozzle for microscope

Abstract

Provided is a microscope air nozzle capable of effectively removing water from an observed surface of a microscope. The microscope air nozzle includes a first jet port (84) that jets air toward the observed surface (S) from a direction inclined with respect to an optical axis (P) of the microscope (50), and a second jet port (86) that is provided at a position farther from the optical axis (P) than the first jet port (84) on a side on which the first jet port (84) is disposed with respect to the optical axis (P), and jets air toward a peripheral portion of the observed surface (S).

Description

Technical Field

[0001] This invention relates to air nozzles for microscopes, and more particularly to air nozzles for microscopes mounted on semiconductor wafer cutting devices. Background Technology

[0002] In the semiconductor manufacturing process, various treatments are applied to the surface of semiconductor wafers (hereinafter referred to as workpieces) to manufacture multiple semiconductor components with electronic devices. After the electrical characteristics of each semiconductor component are inspected by an inspection device, they are separated into individual chips by the high-speed rotating blades of a dicing device.

[0003] The cutting device has the function of continuously supplying water to the workpiece during the cutting process to form a water film on the workpiece surface, so that cutting chips do not adhere to the workpiece surface. However, when performing workpiece cut inspection (cutting position confirmation) and alignment correction (pattern position reconfirmation), it is necessary to locally remove the water film in order to observe the workpiece surface under a microscope. By removing the water film, it is possible to prevent the distortion of the pattern image caused by uneven water film thickness, and thus the correct position can be detected by image processing.

[0004] Patent documents 1 and 2 disclose air nozzles and air jetting mechanisms (equivalent to microscope air nozzles) for removing the aforementioned water film. The air nozzle in Patent Document 1 is positioned between the microscope and the workpiece, and jets air toward the microscope objective. Patent Document 1 includes a shroud that guides the air reflected from the objective toward the workpiece surface (the observed surface). Patent Document 2's air jetting mechanism has an external air jetting mechanism outside the microscope housing, removing water droplets from the workpiece surface by jetting air from the air jet nozzle of the external air jetting mechanism toward the workpiece surface (the observed surface).

[0005] Prior art literature

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 3-126909

[0008] Patent Document 2: Japanese Patent Application Publication No. 2013-116518 Summary of the Invention

[0009] The problem that the invention aims to solve

[0010] However, the microscope air nozzle described in Patent Document 1 is a structure positioned between the objective lens and the workpiece, which presents a problem, for example, difficulty in placement when the gap between the objective lens and the workpiece is narrow. In contrast, the microscope air nozzle described in Patent Document 2 is a structure that sprays air at an angle relative to the optical axis of the microscope, thus allowing placement even when the gap between the objective lens and the workpiece is narrow. However, in the microscope air nozzle of Patent Document 2, water may sometimes be drawn into the rear part of the nozzle (upstream of the air spray direction) due to the flow rate of the air sprayed from the nozzle, and this water may adhere to the observed surface of the microscope. As a result, in the microscope air nozzle described in Patent Document 2, it is difficult to remove water from the observed surface of the microscope.

[0011] The present invention was made in view of the following problem, and its object is to provide an air nozzle for a microscope that can effectively remove water from the surface of the microscope being observed.

[0012] Solution for solving the problem

[0013] To achieve the objective of this invention, the microscope air nozzle of this invention is a microscope air nozzle provided by a microscope for observing the observed surface of a workpiece. The microscope air nozzle includes: a first injection port that injects air toward the observed surface from a direction inclined relative to the optical axis of the microscope; and a second injection port that is disposed on the side of the first injection port arranged relative to the optical axis and at a position further away from the optical axis than the first injection port, and injects air toward the periphery of the observed surface.

[0014] In one embodiment of the invention, it is preferred that the first injection port and the second injection port are disposed on the same pipe component.

[0015] In one aspect of the present invention, it is preferred that a first injection port is provided at the front end of the pipe member, and a second injection port is provided at a position on the pipe member that is further rearward than the front end.

[0016] In one aspect of the invention, it is preferred that the front end of the tube member has a front end tube portion that is inclined relative to the optical axis.

[0017] In one aspect of the present invention, it is preferred that the front end of the front end tube has an opening surface perpendicular to the optical axis, and the first injection port is formed by an opening formed on the opening surface.

[0018] In one aspect of the invention, it is preferred that the second injection port is formed by a notch opening disposed at a position on the pipe member opposite to the periphery of the surface being observed.

[0019] In one aspect of the invention, it is preferred that the microscope air nozzles are provided with a plurality of tubular components arranged side by side.

[0020] Invention Effects

[0021] According to the present invention, water can be effectively removed from the surface of the microscope being observed. Attached Figure Description

[0022] Figure 1 This is a three-dimensional view of the cutting device.

[0023] Figure 2 It means Figure 1 A perspective view of the structure of the processing section of the cutting device shown.

[0024] Figure 3 This is an enlarged side view of the main part of the microscope air nozzle according to the embodiment.

[0025] Figure 4 This is an enlarged view of the air nozzle in the implementation method.

[0026] Figure 5 This is an enlarged view of the main part of the air nozzle in the embodiment.

[0027] Figure 6 This is an explanatory diagram showing an image of a cut when it is in a dry state.

[0028] Figure 7 This is an explanatory diagram showing an image of a cut when it is in a wet state.

[0029] Figure 8 It is an explanatory diagram showing the reflection of light caused by the pad onto the water surface.

[0030] Explanation of reference numerals in the attached figures:

[0031] 10…Cutting device, 12…Blade, 14…Spindle, 16…Workpiece stage, 18…Machining section, 20…Cleaning section, 22…Loading port, 24…Transporting device, 26…Control section, 28…X base, 30…X guide, 32…Linear motor, 34…X worktable, 36…Rotary table, 38…Y base, 40…Y guide, 42…Y worktable, 44…Z worktable, 50…Microscope, 52…Objective lens, 54…Cover, 56…Lower opening, 70…Air nozzle, 72…Air pipe, 74…Horizontal pipe, 75…Front end pipe, 76…Plumb pipe, 78…Connector, 80…Air pipe, 82…Air supply source, 84…First jet port, 86…Second jet port, 90…Air curtain, 100…Slit. Detailed Implementation

[0032] Hereinafter, embodiments of the microscope air nozzle of the present invention will be described with reference to the accompanying drawings.

[0033] Figure 1This is an overall perspective view of the cutting apparatus 10 equipped with the microscope air nozzle (hereinafter referred to as the air nozzle) according to the embodiment. First, the structure of the cutting apparatus 10 will be described.

[0034] like Figure 1 As shown, the cutting device 10 in this example is a cutting device called a dual-spindle cutting machine, which is configured with a pair of blades 12 facing each other. The cutting device 10 includes a processing unit 18, which has a pair of high-frequency motor-driven spindles 14 with blades 12 mounted at their front ends, and a workpiece stage 16 that holds and holds the workpiece W. The processing unit 18 performs cutting processing on the workpiece W using the blades 12 while moving the workpiece W relative to the blades 12.

[0035] Furthermore, in the cutting apparatus 10, a cleaning unit 20 for rotating and cleaning the processed workpieces W, a loading port 22 for holding multiple workpieces W, and a transport device 24 for transporting the workpieces W are respectively arranged in designated positions. In addition, the cutting apparatus 10 has a built-in control unit 26 for uniformly controlling the operation of each component of the cutting apparatus 10.

[0036] Figure 2 This is a perspective view showing the structure of the machining section 18. (For example...) Figure 2 As shown, the machining unit 18 includes an X-stage 34. The X-stage 34 is guided by X-guides 30, 30 provided on the X-base 28 and driven by a linear motor 32 in the X direction indicated by arrow XX. Furthermore, a rotary table 36 rotating in the θ direction is fixed to the upper surface of the X-stage 34, and a workpiece table 16 is provided on this rotary table 36. Thus, the workpiece table 16 moves in the X direction via the X-stage 34 and rotates in the θ direction via the rotary table 36.

[0037] Additionally, the machining section 18X includes a Y-base 38 configured as a portal frame spanning the base 28. A pair of Y-worktables 42, 42 are provided on the wall of the Y-base 38. The pair of Y-worktables 42, 42 are guided by Y-guides 40, 40 fixed to the wall of the Y-base 38 and driven in the Y direction indicated by the arrow YY by a drive device consisting of a stepper motor and a ball screw (not shown).

[0038] Z-worktables 44 and 44 are respectively provided on Y-worktables 42 and 42. Z-worktables 44 and 44 are guided by Z-guides (not shown) provided on Y-worktable 42 and are driven in the Z direction as indicated by arrow ZZ by a drive device consisting of a stepper motor and a ball screw (not shown). Spindles 14 and 14 are fixed to Z-worktables 44 and 44 in an opposing state, and blades 12 and 12 mounted on the front ends of spindles 14 and 14 are arranged opposite each other.

[0039] With the structure of the machining section 18 described above, the cutting blades 12, 12 are indexed and fed in the Y direction and cut into the Z direction, while the workpiece table 16 is fed in the X direction and rotates in the θ direction. Through the operation of the machining section 18 and the rotating cutting blades 12, 12, a checkerboard-shaped groove (cut) is machined on the surface of the workpiece W.

[0040] Figure 3 It is mounted on the cutting device 10 (see reference) Figure 1 A magnified side view of the main parts of the microscope 50 and the microscope air nozzle (hereinafter referred to as air nozzle) 70 of the embodiment.

[0041] First, the microscope 50 using the air nozzle 70 of the embodiment will be described. In recent years, there has been a growing demand for higher precision in workpiece cutting position accuracy, thus the required resolution of microscopes has gradually increased. To address this, high-magnification microscopes are increasingly being designed with higher NA (Numerical Aperture). That is, they are designed such that if the lens diameter of the microscope is the same, the focal length becomes shorter. For example, in the case of an effective lens diameter... With a focal length of 6mm and an NA of 0.35, the differential distance (focal length) is 8mm. Here, assuming the thickness of the water film formed on the surface of the workpiece W is 1mm, the distance between the objective lens (front end) of the microscope and the water film when removing water is 7mm. That is, the distance between the objective lens and the water film of a high-NA microscope is small, making it difficult to place an air nozzle therebetween. In the following description, an air nozzle 70 applied to a high-magnification microscope with high NA will be used as an example. It should be noted that the air nozzle 70 of the embodiment is not only applicable to the high-magnification microscope described above, but can also be applied to other microscopes (e.g., low-magnification microscopes).

[0042] like Figure 3 As shown, the microscope 50 has an objective lens 52 at the lower part of the microscope body 51. It should be noted that... Figure 3 In the figure, the optical axis of the objective lens 52, which serves as the optical axis of the microscope 50, is indicated by the reference numeral P.

[0043] like Figure 3 As shown, a cylindrical cover 54 covers the microscope 50. The cover 54 has a lower opening 56, and a gate mechanism (not shown) is provided between the lower opening 56 and the objective lens 52. The lower opening 56 can be opened and closed using this gate mechanism.

[0044] like Figure 3 As shown, an air nozzle 70, as described in this embodiment, is disposed in the gap between the microscope 50 and the cover 54. The air nozzle 70 has an air tube 72, which is an example of a tube member of the present invention. As an example, the air tube 72 is configured in an L-shape and is mounted to the microscope body 51 via an accessory member 53.

[0045] Specifically, the air tube 72 includes a horizontal tube 74 arranged approximately parallel to the direction orthogonal to the optical axis P of the microscope 50, and a vertical tube 76 arranged approximately parallel to the optical axis P. Furthermore, a connector 78 is provided at the upper end of the vertical tube 76, which is connected to the air supply source 82 via the air tube 80.

[0046] like Figure 3 As shown, a first injection port 84 and a second injection port 86 are formed in the air pipe 72. That is, the first injection port 84 and the second injection port 86 are provided in the same air pipe 72.

[0047] The first injection port 84 is formed to inject air from a direction inclined relative to the optical axis P of the microscope 50 toward the surface S being observed. This first injection port 84 is located at the front end of the horizontal tube 74 (corresponding to the front end of the tube member). The first injection port 84 is an example of the first injection port of the present invention.

[0048] The second nozzle 86 is positioned on the side where the first nozzle 84 is located, relative to the optical axis P of the microscope 50 (in...). Figure 3 The second nozzle (located on the left) is further away from the optical axis P than the first nozzle 84. As an example, the second nozzle 86 is formed to spray air towards the periphery of the observed surface S in a direction parallel to the optical axis P. This second nozzle 86 is located rearward from the front end of the air pipe 72. The second nozzle 86 is an example of the second nozzle of the present invention. It should be noted that the second nozzle 86 can be any nozzle that sprays air towards the periphery of the observed surface S; for example, it can also be a nozzle that sprays air in a direction inclined relative to the direction parallel to the optical axis P.

[0049] The detailed structure of the first injection port 84 and the second injection port 86 will be described below. Figure 4 This is an enlarged view of air nozzle 70.

[0050] like Figure 4 As shown, the front end of the horizontal tube 74 has a front end tube portion 75 that is inclined relative to the optical axis P of the microscope 50. The front end of the front end tube portion 75 has an opening surface 75A perpendicular to the optical axis P, and the first injection port 84 is formed by the opening portion formed on the opening surface 75A. The front end tube portion 75 is an example of the front end tube portion of the present invention.

[0051] According to the first injection port 84 having the above structure, it is possible to draw air from the air supply source 82 (refer to...) Figure 3Air supplied via air tube 72 is sprayed towards the observed surface S from a direction inclined relative to the optical axis P of microscope 50. As a result, water adhering to the observed surface S can be removed (blown away) from the observed surface S towards the opposite side of the first spray port 84. It should be noted that, as an example, the air spray angle of the first spray port 84 relative to the optical axis P is set to approximately 30 to 40 degrees. Therefore, the air sprayed from the first spray port 84 can effectively blow water adhering to the observed surface S away from the observed surface S towards the opposite side of the first spray port 84. It should be noted that, from the viewpoint of effectively removing water from the observed surface S, the opening shape of the first spray port 84 is preferably circular (perfect circle or elliptical), but is not particularly limited; for example, it can also be rectangular.

[0052] As an example, the second jet nozzle 86 is formed by a notched opening, which is located in the horizontal tube 74 opposite to the periphery of the observed surface S of the microscope 50.

[0053] According to the second injection port 86 having the above structure, it is possible to inject air from the air supply source 82 (refer to...) Figure 3 A portion of the air supplied via air pipe 72 is sprayed along a direction parallel to the optical axis P of microscope 50 toward the periphery of the observed surface S. Thus, as... Figure 5 As shown in the enlarged view of the main part of the air nozzle 70, an air curtain 90 is formed extending from the second injection port 86 toward the periphery of the observed surface S. As a result, the air curtain 90 can block water that would be entrained from the second injection port 86 side toward the observed surface S relative to the first injection port 84. Therefore, the amount of water that would be entrained from the second injection port 86 side toward the observed surface S relative to the first injection port 84 can be reduced. It should be noted that, from the viewpoint of forming the air curtain 90, the opening shape of the second injection port 86 is preferably a notched opening, but it is not particularly limited; for example, it can also be circular (perfect circle or elliptical).

[0054] According to the air nozzle 70 configured as described above, water adhering to the observed surface S can be blown away from the observed surface S to the opposite side of the first spray port 84 by air ejected from the first spray port 84. At this time, air (air curtain 90) ejected from the second spray port 86 can block water that is about to be entrained towards the observed surface S from a position located on the side of the second spray port 86 relative to the first spray port 84. As a result, water in the observed surface S can be effectively removed.

[0055] Therefore, the air nozzle 70 of this embodiment employs a structure having a first spray port 84 and a second spray port. The first spray port 84 sprays air towards the observed surface S from a direction inclined relative to the optical axis P of the microscope 50. The second spray port is located on the side where the first spray port 84 is disposed relative to the optical axis P, and is further away from the optical axis P than the first spray port 84. It sprays air towards the periphery of the observed surface S in a direction parallel to the optical axis P, thus effectively removing water from the observed surface S. Furthermore, by providing the second spray port 86, the area to which the water film is removed can be reduced, thereby shortening the removal time. Thus, the air nozzle 70 according to this embodiment can prevent cutting chips from adhering to the observed surface S.

[0056] [Other Implementation Methods]

[0057] As another embodiment, the first injection port 84 and the second injection port 86 may be formed in separate air pipes 72, 72. However, since this structure requires two air pipes 72, 72, from the viewpoint of equipment cost and configuration space, the structure in this example, in which the first injection port 84 and the second injection port 86 are formed in the same air pipe 72, is preferred.

[0058] Alternatively, as another implementation, multiple air tubes 72, 72… can be arranged along… Figure 3 The structure is arranged without gaps in the depth direction on the paper surface. According to this structure, water on the outside of the observed surface S can also be removed, thus reliably preventing water from being drawn into the observed surface S.

[0059] The other functions of the air nozzle 70 in the embodiment will be described below.

[0060] In this example, the air nozzle 70 is set to spray a higher airflow rate from the second spray port 86, so that water is essentially not entrained into the observed surface S. Conversely, when inspecting cut width and debris using the microscope 50, it is sometimes preferable to set a lower airflow rate from the second spray port 86. Thus, a small amount of water is entrained into the cut within the observed surface S, leaving water residue in the cut, thereby enabling the acquisition of an image that easily identifies the cut.

[0061] Furthermore, by setting a higher airflow rate from the second nozzle 86, water can be prevented from being drawn into the cut, thus keeping the cut dry. Here, Figure 6 This represents the image of the cut when the cut is in its dry state (cut 100). Figure 6 Reference numeral A in the attached figure is a line image representing the correct edge of cut 100. However, when cut 100 is in a dry state, there is a possibility that light may be reflected by saw marks (not shown) formed at the bottom of cut 100, causing misidentification of cut 100. For example, Figure 6 Reference numeral B in the attached diagram is a line image that is mistakenly identified as the edge of the cut 100 due to saw marks. This line image B is identified as being located inside the cut 100 relative to the correct line image A. In this case, the airflow rate ejected from the second nozzle 86 is set to be relatively low. As a result, the cut becomes wet due to water entering it, making it difficult to observe the saw marks at the bottom of the cut. Consequently, because reflected light from the saw marks can be suppressed, as... Figure 7 As shown in the image of the cut in a wet state, the line image A described above is easily identifiable, and the cut 100 can be accurately detected. That is, the air nozzle 70 according to this example also has the function of accurately detecting the cut by allowing water to enter the cut by switching the air flow to a lower level.

[0062] Additionally, when the airflow is set low and there is a TEG (Test Element Group) pad pattern at both ends of the cut, oblique lighting can cause light reflection from the metal pads onto the water surface, sometimes making the cut unrecognizable. Here, in Figure 8 The cut image of cut 100 shown illustrates image C of reflected light from the aforementioned pad, reflecting onto the water surface. In this case, it is necessary to turn off the oblique illumination, reduce the brightness of the oblique illumination and observe using coaxial illumination, or set the airflow rate ejected from the second jet 86 to be higher to remove water from the cut.

[0063] The above describes one example of the air nozzle for a microscope according to the present invention. However, the technology of the present invention is not limited to the embodiments. Several modifications or variations can be made without departing from the spirit of the present invention.

Claims

1. A microscope air nozzle, which is an air nozzle for observing the observed surface of a workpiece, wherein, The microscope air nozzle has the following features: The first jet nozzle sprays air toward the surface being observed from a direction inclined relative to the optical axis of the microscope; as well as The second nozzle is located on the same side as the first nozzle relative to the optical axis, and further away from the optical axis than the first nozzle, and sprays air toward the periphery of the observed surface. The gas ejected from the second nozzle is used to block water that is drawn into the observed surface from the side of the second nozzle relative to the first nozzle.

2. The microscope air nozzle according to claim 1, wherein, The first injection port and the second injection port are disposed on the same pipe component.

3. The microscope air nozzle according to claim 2, wherein, The first injection port is provided at the front end of the pipe component. The second injection port is provided at a position rearward of the front end of the pipe member.

4. The microscope air nozzle according to claim 3, wherein, The front end of the tube component has a front end tube portion that is inclined relative to the optical axis.

5. The microscope air nozzle according to claim 4, wherein, The front end of the front tube has an opening surface perpendicular to the optical axis. The first injection port is formed by an opening on the opening surface.

6. The microscope air nozzle according to any one of claims 2 to 5, wherein, The second injection port is formed by a notched opening, which is positioned on the pipe member opposite to the periphery of the observed surface.

7. The microscope air nozzle according to any one of claims 2 to 5, wherein, The microscope has multiple tubular components arranged side by side for its air nozzles.

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