Method for storing and retrieving photomask boxes in a semiconductor intelligent warehouse

Abstract

The present invention provides a method for storing and retrieving a photomask box in a semiconductor intelligent warehouse. The intelligent warehouse includes: a warehouse body for storing photomask boxes for storing semiconductor wafers; a photomask box transfer and circulation device is provided on one side of the warehouse body for circulating and transferring the photomask boxes; a photomask box horizontal transfer mechanism is provided at one end inside the warehouse body; a photomask box picking device is provided inside the warehouse body to send the photomask box transferred to the photomask box horizontal transfer mechanism into the warehouse body, and the photomask box picking device sends the photomask box onto the photomask box support for storing photomask boxes in the warehouse body. Through this intelligent warehouse, the function of circularly storing the photomask box outside the warehouse can be realized, avoiding the repeated handling of the photomask box by manual labor. By adjusting and sucking in the vertical direction of the picking mechanism, the moving range and accuracy of the photomask box picking device are increased. The overall efficiency of storing and retrieving the photomask box is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer storage, and specifically relates to a method for a photomask box for semiconductor wafers. Background Art

[0002] Semiconductor wafers are important raw materials for semiconductor manufacturing, on which minute circuit patterns are engraved for the production of various integrated circuits. In order to protect the circuit patterns on the wafers from being contaminated or damaged, it is necessary to use a photomask box to store the wafers in a sealed manner. A photomask box is a special container with a clean environment inside, which can prevent dust, moisture, static electricity, etc. from affecting the wafers.

[0003] With the development of semiconductor technology, the size of wafers is getting larger and the number of photomask boxes is increasing, thus posing higher requirements for the storage and management of photomask boxes. The traditional storage method of photomask boxes is to place the photomask boxes on shelves or cabinets manually or semi-automatically. This method has the following disadvantages: it occupies a large space and has low storage efficiency; manual operation is prone to misoperation or damage; it cannot achieve intelligent management and traceability; it cannot meet the requirements of high cleanliness and high stability.

[0004] To solve the above problems, some technicians have proposed a solution to use an intelligent warehousing system to store and manage photomask boxes. An intelligent warehousing system is a system that uses automated equipment and information technology to achieve automated handling, storage, retrieval, and management of photomask boxes. The intelligent warehousing system has the following advantages: it saves space and improves storage efficiency; it reduces manual operation and lowers the risk of damage; it realizes intelligent management and traceability, improving production efficiency and quality; it ensures high cleanliness and high stability, and extends the life of photomask boxes.

[0005] Several patents of intelligent warehousing systems for photomask boxes are disclosed in the prior art. For example, the patent application No. CN201910801498.8 discloses an automated warehousing system for semiconductor wafer photomask boxes and its control method. The system includes: a plurality of shelf units, a transfer track arranged between the plurality of shelf units, a handling robot running along the transfer track, import and export devices located at both ends of the transfer track, a buffer area located beside the import and export devices, a cleaning area located beside the buffer area, a detection area located beside the cleaning area, and a control center. The system realizes the automated handling of photomask boxes between the shelf units, the buffer area, the cleaning area, and the detection area through the handling robot, and realizes the monitoring and management of the entire system through the control center.

[0006] This technology requires the use of a handling robot for handling, which has the risk of damage to the photomask box caused by vibration or collision during the handling process, and there is also the possibility of robot failure or out-of-control, affecting the safety and reliability of the system. Summary of the Invention

[0007] To solve the above technical problems, the present invention provides a method for a semiconductor intelligent warehouse to store and retrieve a photomask box, which can realize the automatic picking and placing and rotational movement of the photomask box, and aims to improve the efficiency of accessing the photomask box.

[0008] The intelligent warehouse includes:

[0009] A storage body for storing photomask boxes for semiconductor wafers;

[0010] A photomask box transfer and circulation device is provided on one side of the storage body for circulating the photomask box;

[0011] A photomask box horizontal transfer mechanism is provided at one end inside the storage body;

[0012] A photomask box picking device is provided inside the storage body to send the photomask box transferred to the photomask box horizontal transfer mechanism into the storage body. The photomask box picking device sends the photomask box onto the photomask box bracket for storing the photomask box in the storage body. It is characterized in that

[0013] The photomask box transfer and circulation device includes a housing, a circulation guide rail is provided inside the housing; rollers, several rollers are connected to the circulation guide rail, and the rollers can move cyclically along the circulation guide rail; fixtures, several fixtures are respectively fixed on the rollers, and a photomask box seat is provided on the fixtures for placing the photomask box; a chain drive device, including a drive motor and a chain, the drive motor is connected to the chain, and the chain is connected to the rollers for driving the rollers to move cyclically along the circulation guide rail; a positioning device, including a positioning block and a positioning sensor, the positioning block is provided on one side of the circulation guide rail; a feed inlet and a discharge outlet are respectively provided on one side and the other side of the housing and are communicated with the circulation guide rail for the feeding and discharging of the photomask box; a control unit is connected to the drive motor, the positioning sensor, the feed inlet and the discharge outlet for controlling the operation of the entire device;

[0014] A warehouse door is provided on the storage body. After the warehouse door is opened, the mounting plate two of the photomask box picking device will extend from the warehouse door and transfer the photomask box circulated by the photomask box transfer and circulation device to the corresponding position of the warehouse door by a negative pressure device, suck the photomask box and transfer it into the storage body;

[0015] The photomask cassette picking device includes a first guide rail, on which a walking support seat is arranged. A vertical support frame is arranged on the walking support seat, and a vertical guide rail is arranged on the vertical support frame. It also includes a horizontal support plate, the two sides of which are connected to the vertical guide rail. A first rotating mechanism is arranged on the horizontal support plate, and a first mounting plate is arranged on the first rotating mechanism. The first rotating mechanism drives the first mounting plate to make a rotational movement; a first horizontal guide rail is arranged on the first mounting plate, a slider is arranged on the first horizontal guide rail, a second mounting plate is arranged on the slider, and a negative pressure device is arranged on the second mounting plate for sucking the photomask cassette;

[0016] The photomask cassette horizontal transfer mechanism includes a third guide rail, on which a transfer seat body is arranged. A second rotating mechanism is arranged on the transfer seat body, and a fourth mounting plate is arranged on the second rotating mechanism. The second rotating mechanism drives the fourth mounting plate to make a rotational movement; a third horizontal guide rail is arranged on the fourth mounting plate, a slider is arranged on the third horizontal guide rail, a fifth mounting plate is arranged on the slider, and a negative pressure device is arranged on the fifth mounting plate for sucking the photomask cassette;

[0017] A transfer platform is arranged between the photomask cassette horizontal transfer mechanism and the photomask cassette picking device;

[0018] The following steps are used to store the photomask cassette in the storage body:

[0019] Step 1: The photomask cassette is circulated and transported in the photomask cassette transfer and circulation device. When it is necessary to store the photomask cassette in the storage body in the circulation device, the control unit of the intelligent storage will send a signal to the photomask cassette transfer and circulation device to transfer a specific photomask cassette to the discharge port position of the photomask cassette transfer and circulation device;

[0020] Step 2: The door of the storage body is opened, and the fifth mounting plate of the photomask cassette horizontal transfer mechanism will extend into the discharge port position. After sucking the photomask cassette through the negative pressure device, it will return to the storage body. After the second rotating mechanism rotates, the photomask cassette will be rotated by a certain angle and then placed on the fixture of the photomask cassette on the transfer platform;

[0021] Step 3: After the negative pressure device of the second mounting plate of the photomask cassette picking device sucks the photomask cassette from the fixture on the transfer platform, the walking support seat moves along the first guide rail to the specified position. Then, the horizontal support plate moves upward along the vertical guide rail to the position of the photomask cassette storage rack. After the first rotating mechanism rotates by a certain angle, the second mounting plate extends into the storage bracket and stores the photomask cassette.

[0022] Further, the fixture is a flat rectangular structure, and a reticle cassette seat is arranged on the fixture. The reticle cassette seat is a groove-shaped structure, and the size and shape of the reticle cassette seat are adapted to the size and shape of the reticle cassette, so as to stably place the reticle cassette in the reticle cassette seat. A carrier is arranged at the bottom of the fixture, and the carrier is connected to a roller.

[0023] Preferably, drive sprockets are arranged on both sides of the casing, and the drive sprockets are connected to a chain for driving the roller to move along the circulating guide rail.

[0024] Preferably, a notch is further arranged on the carrier, and the positioning block can be clamped into the notch to fix the position of the fixture.

[0025] Further, the positioning block is a straight rod-shaped structure, and the positioning sensor is a photoelectric sensor; the notch on the carrier is a groove-shaped structure, and the size and shape of the notch are adapted to the size and shape of the positioning block, so as to clamp the positioning block into the notch to fix the position of the fixture.

[0026] Further, the negative pressure device includes a lead screw, the lead screw is connected to mounting plate three, and a motor drives the lead screw to rotate to drive mounting plate three to move up and down along the lead screw. A vacuum generator is arranged on mounting plate three, an absorbing plate is arranged on mounting plate three, a gas passage is arranged in the absorbing plate, the gas passage in the absorbing plate is communicated with a gas nozzle, and the gas nozzle is communicated with the vacuum generator through an air pipe. The absorbing plate is connected with a silica gel pad, and a plurality of through holes are arranged on the silica gel pad.

[0027] Further, a lead screw frame is arranged on mounting plate three, one end of the lead screw is connected in a through hole of the frame, and a lead screw motor is arranged on one side of mounting plate two. The output shaft of the lead screw motor drives the lead screw to rotate through a pulley; the first rotating mechanism includes a rotating base, and a rotating disk is arranged on the rotating base. The rotating disk is fixedly connected to mounting plate two;

[0028] A driving motor is arranged at one end of mounting plate two, the output shaft of the driving motor is connected to a first driving gear, a second driving gear is arranged on the other side of mounting plate two, the first driving gear and the second driving gear are connected through a driving belt with a rack, and a connecting block is fixedly connected to the bottom of mounting plate three. The inner side of the connecting block is engaged and driven with the rack of the driving belt.

[0029] The beneficial effects of a method for storing and retrieving a reticle cassette in a semiconductor intelligent warehouse provided by the present invention are as follows.

[0030] The mask box is placed in the mask box transfer and circulation device for circular transfer, realizing the automatic circular feeding and discharging of the mask box, improving the usage efficiency and safety of the mask box, and avoiding the inefficiency and risks of manual handling and warehousing management. Among them, a driving device composed of a chain, a sprocket and a motor drives the rollers to run on the circular guide rail, so that the mask box can move circularly and feed and discharge in the machine shell according to a preset program. An inlet and outlet opening for docking with the warehouse door of the storage body is arranged on the side of the housing of the transfer and circulation device. Through this opening, the mounting plate two of the mask box picking device can take out the mask box from the fixture by means of negative pressure suction and send it into the storage body, or put the mask box from the storage body into the fixture.

[0031] A mask box horizontal transfer mechanism is arranged in the storage body, including a guide rail three. A transfer seat body is arranged on the guide rail three. A rotating mechanism two is arranged on the transfer seat body. An installation plate four is arranged on the rotating mechanism two. The rotating mechanism two drives the installation plate four to make a rotating movement. A horizontal guide rail three is arranged on the installation plate four. A slider is arranged on the horizontal guide rail three. An installation plate five is arranged on the slider. A negative pressure device for sucking the mask box is arranged on the installation plate five. The mask box in the mask box transfer and circulation device is sucked by the negative pressure device on the installation plate five of the horizontal transfer mechanism and placed on the fixture on the transfer platform for storage, and then taken out by the mask box picking device and transferred into the storage body.

[0032] The mask box picking device, by setting a rotating mechanism one and a negative pressure device, can accurately position and suck the mask box according to different picking and placing positions and directions, avoiding the damage or pollution of the mask box that may be caused during manual or robotic arm operation, and improving the processing efficiency and safety of the mask box. Further, by setting components such as a lead screw, a motor, a vacuum generator, and a suction plate, the up and down movement and vacuum adsorption function of the negative pressure device are realized, and it can be adaptively adjusted and sucked according to mask boxes of different heights and sizes, increasing the applicable range and flexibility of the mask box picking device.

[0033] When the reticle box is put into the storage body, a guide rail 1 is arranged in the storage body for the reticle box. A traveling support base is arranged on the guide rail 1. A vertical support frame is arranged on the traveling support base. A vertical guide rail is arranged on the vertical support frame. A horizontal support plate is also included. Both sides of the horizontal support plate are connected to the vertical guide rail. A rotating mechanism 1 is arranged on the horizontal support plate. The traveling support base moves on the guide rail 1 to the position of the bracket for storing the reticle box, and moves on the vertical guide rail through the horizontal support plate to reach the corresponding height position of the support frame. Finally, after the rotating base rotates, the second mounting plate extends and retracts to send the reticle box onto the bracket. When the reticle box needs to be taken out of the storage body, the second mounting plate moves to the designated bracket position to take down the reticle box, and then the reticle box is placed on the fixture of the circulating device through the reticle box material taking device. The circulating device transfers the reticle box in the circulating device to the rear end for queuing for use or transfers it outside the circulating device for use.

[0034] Through this intelligent storage, the circulating storage function of the reticle box outside the storage body can be realized, avoiding the repeated handling of the reticle box by manual labor. Through the adjustment and suction of the material taking mechanism in the vertical direction, the moving range and accuracy of the reticle box material taking device are increased. The overall efficiency of storing and retrieving the reticle box is improved. Brief Description of the Drawings

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art.

[0036] Attached Figure 1 is the overall structural schematic diagram of the present invention;

[0037] Attached Figure 2 is the structural schematic diagram of the reticle box feeding and discharging circulating device of the present invention;

[0038] Attached Figure 3 is the internal structural schematic diagram of the reticle box feeding and discharging circulating device of the present invention after removing the outer shell;

[0039] Attached Figure 4 is the structural schematic diagram of the fixture in the reticle box feeding and discharging circulating device of the present invention;

[0040] Attached Figure 5 is the structural schematic diagram of the chain drive device in the reticle box feeding and discharging circulating device of the present invention;

[0041] Attached Figure 6 is in the present invention Attached Figure 5 The partial enlarged view of part A in is to show the structural schematic diagram of the connection between the positioning device and the fixture;

[0042] Attached Figure 7It is a schematic diagram of the external structure of the storage body of the intelligent warehouse in the present invention;

[0043] Appendix Figure 8 It is an internal schematic diagram of the storage body of the intelligent warehouse in the present invention after removing the housing;

[0044] Appendix Figure 9 It is a schematic diagram of the structure of the photomask cassette picking device in the present invention;

[0045] Appendix Figure 10 It is a schematic diagram of the overall structure of the horizontal support plate in the present invention;

[0046] Appendix Figure 11 It is a schematic diagram of the structure of the vacuum generator in the present invention;

[0047] Appendix Figure 12 It is a schematic diagram of the structure on mounting plate 1 in the present invention;

[0048] Appendix Figure 13 It is a schematic diagram of the structure where the silica gel pad is arranged on the suction plate in the present invention;

[0049] Appendix Figure 14 It is a schematic diagram of the structure where a connecting block is connected to the lower part of mounting plate 2 in the present invention;

[0050] Appendix Figure 15 It is a schematic diagram of the structure of the photomask cassette horizontal transfer mechanism in the present invention. Detailed implementation manners

[0051] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention.

[0052] As Figure 1 shown, this embodiment provides a method for storing and retrieving photomask cassettes in a semiconductor intelligent warehouse, which includes a storage body 1. A frame for storing photomask cassettes is arranged in the storage body 1, and a photomask cassette feeding and discharging circulation device 2 for circularly storing photomask cassettes is arranged on one side of the storage body 1.

[0053] The photomask cassette feeding and discharging circulation device 2 is as Figure 2 shown, and includes a machine shell 21, rollers 22, a jig 23, a chain drive device 24, a positioning device 25, a feeding port 26, a discharging port 27, and a control unit (not shown in the figure).

[0054] The machine shell 21 is of a rectangular structure. A circulation guide rail 29 is arranged in the machine shell 21. The circulation guide rail 29 is arranged on a mounting seat in the machine shell 21. The length and width of the circulation guide rail 29 are the same as or slightly smaller than the length and width of the machine shell 21.

[0055] As Figures 3 - 5As shown, the roller 22 has a cylindrical structure. A plurality of rollers 22 are connected to the circulating guide rail 29, and the rollers 22 can move cyclically along the circulating guide rail 29. The number of rollers 22 can be determined as needed, and in this embodiment, it is four. The roller 22 is connected to the jig through a carrier 230. The jig 23 has a flat rectangular structure. A plurality of jigs 23 are respectively fixed on the rollers 22. A reticle cassette seat 210 is provided on the jig 23 for placing the reticle cassette 211. The reticle cassette seat 210 has a groove-like structure, and the size and shape of the reticle cassette seat 210 are adapted to the size and shape of the reticle cassette 211 so as to stably place the reticle cassette 211 in the reticle cassette seat 210. The number of jigs 23 can be determined as needed, and in this embodiment, it is four.

[0056] As Figure 5 shown, the chain drive device 24 includes a drive motor 241 and a drive sprocket 243 in the machine housing. The drive sprocket 243 is connected to the chain 242, and the chain 242 is connected to the roller 22 for driving the roller 22 to move cyclically along the circulating guide rail 29. The guide rail three 41 can be set at any position of the storage body 1 as needed. In this embodiment, it is set at a corner of the storage body 1. The chain 242 can be set at any position of the roller 22 as needed. In this embodiment, it is set outside the roller 22. The chain drive device 24 can adopt other types of drive devices as needed, such as a belt drive device, a gear drive device, etc.

[0057] As Figure 6 shown, the positioning device 25 includes a positioning block 251 and a positioning sensor. The positioning block 251 is arranged on one side of the circulating guide rail 29. The positioning sensor is arranged at any position capable of detecting the jig 23 and sends a signal to the drive motor 241 to stop or start the drive motor 241. The positioning block 251 is connected to a rotating shaft 254, and the rotating shaft 254 is connected to a crank 255. The crank 255 is connected to a cylinder 252. The cylinder 252 drives the crank 255 to move, and then drives the rotating shaft 254 to rotate forward or reversely, synchronously driving the positioning block 251 to rotate. The positioning block 251 is provided with a protrusion. The length of the positioning block 251 can be determined as needed. A notch 253 is further provided on the carrier 230 under the jig 23. The notch 253 has a groove-like structure, and the size and shape of the notch 253 are adapted to the size and shape of the protrusion of the positioning block 251 so as to snap the positioning block 251 into the notch 253 to fix the position of the jig 23.

[0058] When the fixture 23 moves to the positioning block 51, the positioning sensor detects the fixture 23 and sends a signal to the third guide rail 41, causing the third guide rail 41 to stop operating. At this time, the position of the fixture 23 is fixed. When it is necessary to start the fixture 23, the positioning block 51 disengages from the notch 53, and the positioning sensor sends a signal to the third guide rail 41, causing the third guide rail 41 to operate again, and the fixture 23 continues to move along the circular guide rail 29.

[0059] As Figure 2 shown, a feed inlet 26 is provided on one side of the shown chassis 21, and a discharge outlet 27 is provided on the other side. When the fixture 23 moves to the feed inlet 26, the positioning sensor detects the notch 253 of the fixture 23 and sends a signal to the drive motor 241, causing the drive motor 241 to stop operating. At this time, the position of the fixture 23 is fixed. Then, the reticle box 211 is manually or by a manipulator placed into the reticle box seat 210 of the fixture 23 from the outside. After that, the feed inlet 26 is closed, and the drive motor 241 restarts, driving the roller 22 to continue to circulate along the circular guide rail 29, and sending the reticle box 211 into the device interior.

[0060] When it is necessary to send the reticle box 211 out of the device interior, the drive motor 241 starts, driving the roller 22 to circulate along the circular guide rail 9. When the fixture 23 moves to the discharge outlet 27, the positioning sensor detects the fixture and sends a signal to the drive motor 241, causing the drive motor 241 to stop operating. At this time, the position of the fixture 23 is fixed. By the above method, the present invention realizes the automatic feeding and discharging and recycling of the reticle box 211, improving the utilization efficiency and safety of the reticle box 211; through the positioning device 25, the position of the fixture 23 is accurately positioned and controlled, facilitating the cooperation of devices such as manipulators; through the control unit, the operation of the entire device is uniformly controlled, facilitating operation and management.

[0061] The feed inlet 26 and the discharge outlet 27 are respectively provided on one side and the other side of the storage body 1, and are connected to the circular guide rail 29 for the feeding and discharging of the reticle box 211. The feed inlet 26 and the discharge outlet 27 are of an open structure, and the sizes and shapes of the feed inlet 26 and the discharge outlet 27 are adapted to the size and shape of the reticle box 211.

[0062] The control unit is connected to the driving motor 241, the positioning sensor, the feed inlet 26 and the discharge outlet 27, and is used to control the operation of the entire device. The control unit is a microprocessor or other type of controller, and can be arranged inside or outside the housing 21 as required. In this embodiment, it is arranged outside the housing 21. The control unit can be connected to the driving motor 241, the positioning sensor, the feed inlet 26 and the discharge outlet 27 in a wired or wireless manner. In this embodiment, a wired connection is adopted. The control unit can control the start and stop of the driving motor 241, the detection of the positioning sensor, the opening and closing of the feed inlet 26 and the discharge outlet 27, etc. according to a preset program or an external instruction.

[0063] As Figure 7 shown, the outside of the storage body 1 is a sealed structure composed of sheet metal, and a frame for storing the mask boxes is arranged inside it. As Figure 8 shown, a mask box picking device 3 is arranged on one side of the frame. The mask box picking device 3 includes a first guide rail 31. A mask box picking device 3 is arranged on the first guide rail 31. A vertical support frame 33 is arranged on the mask box picking device 3. A vertical guide rail 34 is arranged on the vertical support frame 33. It also includes a horizontal support plate 35. Both sides of the horizontal support plate 35 are connected to the vertical guide rail 34. The first guide rail 31 can be fixed on the ground or other platforms. The mask box picking device 3 can move horizontally along the first guide rail 31. The horizontal support plate 35 can move vertically along the mask box picking device 3. The method for storing and picking mask boxes in the semiconductor intelligent warehouse can be adjusted and positioned in both horizontal and vertical directions.

[0064] As Figure 9 shown, a first rotating mechanism 329 is arranged on the horizontal support plate 35. A first mounting plate 37 is arranged on the first rotating mechanism 329. The first rotating mechanism 329 drives the first mounting plate 37 to make a rotational movement. The first rotating mechanism 329 includes a first rotating mechanism 329 and a rotating disk 321. The first rotating mechanism 329 is fixed on the horizontal support plate 35. The rotating disk 321 is fixedly connected to the first mounting plate 37. The first rotating mechanism 329 can control the rotation angle and speed of the rotating disk 321 through a motor or other driving means. In this way, the method for storing and picking mask boxes in the semiconductor intelligent warehouse can realize the rotational movement of the mask box.

[0065] As Figure 10 and Figure 12As shown in the figure, a horizontal guide rail two 38 is provided on the mounting plate one 37, a slider 39 is provided on the horizontal guide rail two 38, a mounting plate two 310 is provided on the slider 39, and a negative pressure device 311 for sucking the photomask box is provided on the mounting plate two 310. The negative pressure device 311 includes a lead screw 312, the lead screw 312 is connected to a mounting plate three 313, and a lead screw motor 314 drives the lead screw 312 to rotate to drive the mounting plate three 313 to move up and down along the lead screw 312. A vacuum generator 315 is provided on the mounting plate three 313, a suction plate 316 is provided on the mounting plate three 313, a gas passage is provided in the suction plate 316, the gas passage in the suction plate 316 is communicated with a gas nozzle 318, and the gas nozzle 318 is communicated with the vacuum generator 315 through an air pipe. The suction plate 316 is connected with a silica gel pad 317, and a plurality of through holes 320 are provided on the silica gel pad 317. A valve 331 is provided in the vacuum generator 315, and the valve 331 is controlled to be opened and closed by a controller to control the flow and stop of the gas. When it is necessary to suck the photomask box, the controller controls the valve 331 to open, the vacuum generator 315 generates negative pressure, and the negative pressure is transmitted to the silica gel pad 317 through components such as the air pipe, the gas nozzle 318, the gas passage, and the through holes 320, so that the silica gel pad 317 is closely attached to the surface of the photomask box, and a suction force is generated to adsorb the photomask box on the suction plate 316; when it is necessary to release the photomask box, the controller controls the valve 331 to close, the vacuum generator 315 stops generating negative pressure, and the positive pressure is transmitted to the silica gel pad 317 through components such as the air pipe, the gas nozzle 318, the gas passage, and the through holes 320, so that the silica gel pad 317 is separated from the surface of the photomask box, and the suction force is eliminated to release the photomask box at a designated position. In this way, the method for storing and retrieving the photomask box in the semiconductor intelligent warehouse can realize the automatic suction and release of the photomask box.

[0066] A lead screw frame 322 is provided on the mounting plate three 313, one end of the lead screw 312 is connected to the through hole of the frame 322, a lead screw motor 314 is provided on one side of the mounting plate two 310, and the output shaft of the lead screw motor 314 drives the lead screw 312 to rotate through a pulley. When it is necessary to adjust the vertical position of the mounting plate three 313, the lead screw motor 314 drives the lead screw 312 to rotate, and the lead screw 312 drives the mounting plate three 313 to move up and down along the lead screw 312. In this way, the method for storing and retrieving the photomask box in the semiconductor intelligent warehouse can realize the vertical movement function of the mounting plate three 313.

[0067] As Figure 12 shown, a transmission motor 324 is provided at one end of the mounting plate one 37, the output shaft of the transmission motor 324 is connected to a first transmission gear 325, a second transmission gear 326 is provided on the other side of the mounting plate one 37, and the first transmission gear 325 and the second transmission gear 326 are connected by a transmission belt 327 with a rack, as Figure 10 and Figure 14A connecting block 328 is fixedly connected to the bottom of the shown mounting plate two 310. Inside the connecting block 328, there is a meshing drive with the rack of the transmission belt 327. When it is necessary to adjust the horizontal position of the mounting plate two 310, the drive motor 324 drives the first drive gear 325 to rotate. The first drive gear 325 drives the second drive gear 326 and the transmission belt 327 to rotate. The transmission belt 327 drives the connecting block 328 and the mounting plate two 310 to move horizontally along the horizontal guide rail two 38. In this way, the method for the semiconductor intelligent warehouse to store and retrieve the photomask box can realize the horizontal movement function of the mounting plate two 310.

[0068] When it is necessary to take out the photomask box from a certain position, first, according to the position and direction of the photomask box, by controlling the movement and rotation of the photomask box feeding device 3, the vertical support frame 33, the horizontal support plate 35 and the first rotating mechanism 329, the mounting plate one 37 is aligned with the photomask box; then, according to the height and size of the photomask box, by controlling the rotation of the drive motor 324 and the lead screw motor 314, the mounting plate two 310 and the mounting plate three 313 are moved to appropriate positions so that the silicone pad 317 contacts the surface of the photomask box; then, the controller controls the valve 331 to open, such as Figure 13 the vacuum generator 315 generates negative pressure, and the negative pressure is transmitted to the silicone pad 317 through each component, so that the silicone pad 317 is closely attached to the surface of the photomask box and generates suction to adsorb the photomask box on the suction plate 316; finally, by controlling the movement and rotation of each component, the sucked photomask box is moved to a specified position and put down.

[0069] When it is necessary to put the photomask box into a certain position, first, according to the position and direction of the photomask box, by controlling the movement and rotation of the photomask box feeding device 3, the vertical support frame 33, the horizontal support plate 35 and the first rotating mechanism 329, the mounting plate one 37 is aligned with the specified position; then, according to the height and size of the specified position, by controlling the rotation of the drive motor 324 and the lead screw motor 314, the mounting plate two 310 and the mounting plate three 313 are moved to appropriate positions so that the silicone pad 317 contacts the surface of the specified position; then, the controller controls the valve 331 to close, the vacuum generator 315 stops generating negative pressure, and the positive pressure is transmitted to the silicone pad 317 through each component, so that the silicone pad 317 is separated from the surface of the specified position and the suction is eliminated to release the photomask box at the specified position.

[0070] The method for the semiconductor intelligent warehouse to store and retrieve photomask boxes in this embodiment can be adjusted and improved according to different types and specifications of photomask boxes. For example, according to different sizes and shapes of photomask boxes, appropriate suction plates 316 and silicone pads 317 can be selected to ensure the stability and reliability of the suction and release of photomask boxes; according to different weights and loads of photomask boxes, appropriate vacuum generators 315 and valves 331 can be selected to ensure the efficiency and safety of the suction and release of photomask boxes; according to different pick-and-place positions and directions of photomask boxes, appropriate rotation mechanism I 329 and drive motor 324 can be selected to ensure the flexibility and precision of the rotational movement of photomask boxes.

[0071] The method for the semiconductor intelligent warehouse to store and retrieve photomask boxes in this embodiment can be used in cooperation with other devices or systems. For example, it can be used in cooperation with photomask manufacturing equipment, photomask detection equipment, photomask cleaning equipment, photomask storage equipment, etc. to achieve the automatic transmission and processing of photomask boxes between different processes.

[0072] The method for the semiconductor intelligent warehouse to store and retrieve photomask boxes in this embodiment can adopt various control methods to control each component. For example, wired or wireless communication methods can be adopted, and control signals or instructions are sent through a controller or other control devices to control components such as the photomask box picking device 3, vertical support frame 33, horizontal support plate 35, rotation mechanism I 329, drive motor 324, lead screw motor 314, valve 331, etc.; manual or automatic operation methods can also be adopted, and control parameters or commands are input through a touch screen or other operation devices to control each component.

[0073] As Figure 3 shown, a photomask box horizontal transfer mechanism 4 is provided between the photomask box loading and unloading circulation device 2 and the photomask box picking device 3. As Figure 15 shown, the photomask box horizontal transfer mechanism 4 includes a guide rail III 41. A transfer seat body 42 is provided on the guide rail III 41. A rotation mechanism II 43 is provided on the transfer seat body 42. An installation plate IV 44 is provided on the rotation mechanism II 43, and the rotation mechanism II 43 drives the installation plate IV 44 to perform rotational movement; a horizontal guide rail IV 45 is provided on the installation plate IV 44. A slider is provided on the horizontal guide rail IV 45. An installation plate V 46 is provided on the slider. A negative pressure device for sucking the photomask box is provided on the installation plate V 46. The structure of the rotation mechanism II 43 is the same as that of the rotation mechanism I 329, and the installation plate V 46 is the same as the installation plate III 313.

[0074] When the photomask box is stored in the warehouse body:

[0075] The photomask box is stored in the warehouse body through the following steps:

[0076] Step 1: The mask box is circulated and transported within the mask box transfer and circulation device. When it is necessary to store the mask box in the circulation device into the storage body, the control unit of the intelligent storage will send a signal to the mask box transfer and circulation device to transfer a specific mask box to the discharge port position of the mask box transfer and circulation device;

[0077] Step 2: The warehouse door of the storage body is opened. The mounting plate five of the mask box horizontal transfer mechanism will extend into the discharge port position. After sucking the mask box through the negative pressure device, it will return to the storage body. After the rotating mechanism two rotates, the mask box will be rotated by a certain angle and then placed on the jig of the mask box on the transfer platform;

[0078] Step 3: After the negative pressure device on the mounting plate two of the mask box picking device sucks the mask box from the jig on the transfer platform, the walking support base moves along the first guide rail to the designated position. Then, the horizontal support plate moves upward along the vertical guide rail to the position of the mask box storage rack. After the rotating mechanism one rotates by a certain angle, the mounting plate two extends into the storage rack and stores the mask box.

[0079] The above embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention patent shall be subject to the appended claims.

Claims

1. A method for storing and retrieving a photomask box in a semiconductor intelligent warehouse, wherein, The intelligent warehouse includes: A storage body for storing photomask boxes for semiconductor wafers; On one side of the storage body, there is a photomask box transfer and circulation device for circulating the transfer of photomask boxes; At one end inside the storage body, there is a photomask box horizontal transfer mechanism; Inside the storage body, there is a photomask box picking device that sends the photomask box transferred to the photomask box horizontal transfer mechanism into the storage body. The photomask box picking device sends the photomask box onto the photomask box support for storing photomask boxes in the storage body. It is characterized in that, The photomask box transfer and circulation device includes a machine shell with a circulation guide rail inside; rollers, several rollers are connected to the circulation guide rail, and the rollers can move in a cycle along the circulation guide rail; fixtures, several fixtures are respectively fixed on the rollers, and a photomask box seat is arranged on the fixture for placing the photomask box; a chain drive device, including a drive motor and a chain, the drive motor is connected to the chain, and the chain is connected to the rollers for driving the rollers to move in a cycle along the circulation guide rail; a positioning device, including a positioning block and a positioning sensor, the positioning block is arranged on one side of the circulation guide rail; a feed port and a discharge port are respectively arranged on one side and the other side of the machine shell and are connected to the circulation guide rail for the feeding and discharging of photomask boxes; a control unit is connected to the drive motor, the positioning sensor, the feed port and the discharge port for controlling the operation of the entire device; There is a warehouse door on the storage body. After the warehouse door is opened, the mounting plate two of the photomask box picking device will extend from the warehouse door and then use a negative pressure device to transfer the photomask box circulated by the photomask box transfer and circulation device to the position corresponding to the warehouse door, suck the photomask box and transfer it into the storage body; The photomask box picking device includes a guide rail one. A walking support seat is arranged on the guide rail one. A vertical support frame is arranged on the walking support seat. A vertical guide rail is arranged on the vertical support frame. It also includes a horizontal support plate. Both sides of the horizontal support plate are connected to the vertical guide rail. A rotation mechanism one is arranged on the horizontal support plate. An installation plate one is arranged on the rotation mechanism one. The rotation mechanism one drives the installation plate one to make a rotational movement; a horizontal guide rail one is arranged on the installation plate one. A slider is arranged on the horizontal guide rail one. An installation plate two is arranged on the slider. A negative pressure device for sucking the photomask box is arranged on the installation plate two; The photomask box horizontal transfer mechanism includes a guide rail three. A transfer seat body is arranged on the guide rail three. A rotation mechanism two is arranged on the transfer seat body. An installation plate four is arranged on the rotation mechanism two. The rotation mechanism two drives the installation plate four to make a rotational movement; a horizontal guide rail three is arranged on the installation plate four. A slider is arranged on the horizontal guide rail three. An installation plate five is arranged on the slider. A negative pressure device for sucking the photomask box is arranged on the installation plate five; A transfer platform is arranged between the photomask box horizontal transfer mechanism and the photomask box picking device; The steps to store the photomask box in the storage body are as follows: Step 1: The mask box is circulated and transported within the mask box transfer circulation device. When it is necessary to store the mask box in the circulation device into the storage body, the control unit of the intelligent storage will send a signal to the mask box transfer circulation device to transfer a specific mask box to the discharge port position of the mask box transfer circulation device; Step 2: The warehouse door of the storage body is opened, and the mounting plate five of the mask box horizontal transfer mechanism will extend into the discharge port position. After sucking the belonging mask box through the negative pressure device, it will return to the storage body. After the rotating mechanism two rotates, the mask box will be rotated by a certain angle and then placed on the fixture of the mask box on the transfer platform; Step 3: After the negative pressure device on the mounting plate two of the mask box picking device sucks the mask box from the fixture on the transfer platform, the walking support base moves along the guide rail one to the designated position. Then, the horizontal support plate moves upward along the vertical guide rail to the position of the mask box storage rack. After the rotating mechanism one rotates by a certain angle, the mounting plate two extends into the storage bracket and stores the mask box.

2. The method for storing and retrieving a semiconductor intelligent storage photomask box according to claim 1, wherein, The fixture is a flat rectangular structure. A mask box seat is arranged on the fixture. The mask box seat is a groove-like structure. The size and shape of the mask box seat are adapted to the size and shape of the mask box, so as to stably place the mask box in the mask box seat. A carrier is arranged at the bottom of the fixture, and the carrier is connected to a roller.

3. The method for storing and retrieving a semiconductor intelligent light mask box according to claim 1, wherein, Drive sprockets are arranged on both sides of the machine shell. The drive sprockets are connected to a chain drive to drive the roller to move along the circulation guide rail.

4. A method for storing and retrieving a semiconductor intelligent storage photomask box according to claim 2, characterized in that, A notch is also arranged on the carrier. The positioning block can be clamped into the notch to fix the position of the fixture.

5. A method for storing and retrieving a semiconductor intelligent light mask box according to claim 4, characterized in that, The positioning block is a straight rod-like structure, and the positioning sensor is a photoelectric sensor; the notch on the carrier is a groove-like structure. The size and shape of the notch are adapted to the size and shape of the positioning block, so as to clamp the positioning block into the notch to fix the position of the fixture.

6. A method for storing and retrieving a semiconductor intelligent light mask box according to claim 1, characterized in that, The negative pressure device includes a lead screw. The lead screw is connected to the mounting plate three. The motor drives the lead screw to rotate to drive the mounting plate three to move up and down along the lead screw. A vacuum generator is arranged on the mounting plate three. The mounting plate three is provided with a suction plate. A gas passage is arranged in the suction plate. The gas passage in the suction plate is communicated with a nozzle. The nozzle is communicated with the vacuum generator through a trachea. The suction plate is connected with a silica gel pad, and a number of through holes are arranged on the silica gel pad.

7. A method for storing and retrieving a semiconductor intelligent light mask box according to claim 6, characterized in that, A lead screw frame is arranged on the mounting plate three. One end of the lead screw is connected to the through hole of the frame. A lead screw motor is arranged on one side of the mounting plate two. The output shaft of the lead screw motor drives the lead screw to rotate through a pulley; The rotating mechanism one includes a rotating base. A rotating disk is arranged on the rotating base. The rotating disk is fixedly connected to the mounting plate two; One end of the second mounting plate is provided with a driving motor, the output shaft of the driving motor is connected to a first driving gear, a second driving gear is arranged on the other side of the second mounting plate, the first driving gear and the second driving gear are connected by a driving belt with a rack, a connecting block is fixedly connected to the bottom of the third mounting plate, and the inner side of the connecting block is provided with meshing transmission with the rack of the driving belt.

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