TiBCrYN coating for rotary tillage tools and preparation method thereof
By setting up a multi-layer composite coating on the rotary tillage tool, using arc ion plating and HIPIMS technology, the problems of fast wear and easy rust by rotary tillage tool are solved, and the wear resistance, corrosion resistance and cutting performance are improved, and the service life is extended.
Patent Information
- Application Number
- CN202310805263.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-07-03
- Publication Date
- 2025-08-29
- Estimated Expiration
- 2043-07-03
AI Technical Summary
The existing rotary tillage tool materials wear quickly and are prone to rust, which cannot meet the requirements of efficient and high-quality operations in modern agriculture.
The Cr metal bombardment layer, TiAlN transition layer, TiBN/CrYN nano multi-layer support layer, and TiBCrYN functional gradient layer were arranged on the rotary tillage tool in turn, and the deposit was carried out using arc ion plating and HIPIMS technology to form a multi-layer composite structural coating.
It improves the wear resistance, corrosion resistance and cutting performance of rotary tillage tools, extends the service life, and improves the working efficiency of agricultural machinery.
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Figure CN116926470B_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the coating technology of rotary tillage tools, and particularly relates to a TiBCrYN coating for rotary tillage tools and a preparation method thereof. Background Art
[0002] A rotary tiller is a widely used piece of machinery in agriculture, often used for operations such as plowing and tilling. The tiller blade is a key component, and its performance directly impacts the efficiency and quality of the tiller's operation. Currently, the materials used to manufacture rotary tillers primarily include ordinary carbon steel and alloy steel. However, these materials suffer from rapid wear and rust, making them unable to meet the high-efficiency, high-quality demands of modern agriculture.
[0003] In recent years, coating technology has been widely used in the field of mechanical manufacturing. It can provide a protective layer on the surface of materials, with excellent wear resistance, corrosion resistance, high-temperature stability and other properties. It can effectively extend the service life of mechanical parts and improve the operating efficiency and stability of mechanical equipment. Therefore, the development of a coating technology suitable for rotary tillage tools has become a hot topic of research. Summary of the Invention
[0004] In view of this, the main object of the present invention is to provide a TiBCrYN coating for a rotary tillage tool and a preparation method thereof.
[0005] To achieve the above object, the technical solution of the present invention is achieved as follows:
[0006] An embodiment of the present invention provides a TiBCrYN coating for a rotary tillage tool, wherein a Cr metal bombardment layer, a TiAlN transition layer, a TiBN / CrYN nano-multilayer support layer, and a TiBCrYN functional gradient layer are sequentially arranged on a substrate of the rotary tillage tool; the thickness ratio of the Cr metal bombardment layer, the TiAlN transition layer, the TiBN / CrYN nano-multilayer support layer, and the TiBCrYN functional gradient layer is: 1:10:20:40-60;
[0007] The TiBN / CrYN nano multilayer support layer is a nano multilayer structure formed by alternately depositing a plurality of TiBN coatings and CrN coatings.
[0008] In the above scheme, the thickness of the Cr metal bombardment layer is 50-100 nm, the thickness of the TiAlN transition layer is 500-1000 nm, the total thickness of the TiBN / CrYN nano multilayer support layer is 1000-2000 nm, the thickness of each layer is 10-100 nm, and the thickness of the TiBCrYN functional gradient layer is 3000-4000 nm.
[0009] In the above scheme, the Cr metal bombardment layer is prepared by arc ion plating; the TiAlN transition layer is prepared by HIPIMS; in the iBN / CrYN nano multilayer support layer, the TiBN coating is prepared by HIPIMS, and the CrYN coating is prepared by arc ion plating; the TiBCrYN functional gradient layer is prepared by HIPIMS.
[0010] An embodiment of the present invention further provides a method for preparing a TiBCrYN coating for a rotary tillage tool according to any one of the above-mentioned solutions, the method comprising: placing a rotary tillage tool substrate that has been cleaned and dried in a deposition chamber of a vacuum coating device;
[0011] Depositing a Cr metal bombardment layer on the surface of a substrate of a rotary tillage tool to prepare a Cr metal bombardment layer;
[0012] Then, a TiAlN transition layer is deposited on the surface of the Cr metal bombardment layer to prepare a TiAlN transition layer;
[0013] Then, a TiBN / CrYN nano multilayer support layer is deposited on the surface of the TiAlN transition layer to prepare a TiBN / CrYN nano multilayer support layer;
[0014] Afterwards, a TiBCrYN functional gradient layer is deposited on the surface of the TiBN / CrYN nano multilayer support layer to prepare a TiBCrYN functional gradient layer.
[0015] In the above scheme, the Cr metal bombardment layer is deposited on the surface of the substrate of the rotary tillage tool to prepare the Cr metal bombardment layer, specifically: arc ion plating is used for preparation, and the deposition parameters are: temperature 350 ° C, vacuum chamber pressure 5×10 -3 Pa, bias voltage is -200~1000V, target current is 50~100A, Ar gas flow rate is 50~200sccm, deposition pressure is 0.05~1.0Pa, and deposition time is 5~30min.
[0016] In the above scheme, a TiAlN transition layer is deposited on the surface of the Cr metal bombardment layer to prepare a TiAlN transition layer. Specifically, HIPIMS is used for preparation, and the deposition parameters are a pulse frequency of 50 to 300 Hz, a pulse width of 50 to 200 μs, a pulse duty cycle of 10%, an argon flow rate of 20-200 sccm, a nitrogen flow rate of 20 to 100 sccm, a working pressure of 0.05 to 1.0 Pa, a deposition temperature of 350°C, and a deposition time of 30 to 60 min.
[0017] In the above scheme, a TiBN / CrYN nano-multilayer support layer is deposited on the surface of the TiAlN transition layer to prepare a TiBN / CrYN nano-multilayer support layer. Specifically, the TiBN coating is prepared by HIPIMS, and the deposition parameters are a pulse frequency of 50 to 300 Hz, a pulse width of 50 to 200 μs, a pulse duty cycle of 10%, an argon flow rate of 20 to 200 sccm, a nitrogen flow rate of 20 to 100 sccm, a working pressure of 0.05 to 1.0 Pa, a deposition temperature of 350° C., and a deposition time of 30 to 60 min; the CrYN coating is prepared by arc ion plating, and the deposition parameters are a temperature of 350° C. and a vacuum chamber pressure of 5×10 -3 Pa, bias voltage is -50~200V, target current is 50~100A, nitrogen flow rate is 50~500sccm, deposition pressure is 0.05~1.0Pa, and deposition time is 10~20min.
[0018] In the above scheme, a TiBCrYN functional gradient layer is deposited on the surface of the TiBN / CrYN nano-multilayer support layer to prepare a TiBCrYN functional gradient layer. Specifically, HIPIMS is used for preparation, and the deposition parameters are a pulse frequency of 50 to 300 Hz, a pulse width of 50 to 200 μs, a pulse duty cycle of 10%, an argon flow rate of 20-200 sccm, a nitrogen flow rate of 20 to 100 sccm, a working pressure of 0.05 to 1.0 Pa, a deposition temperature of 350°C, and a deposition time of 60 to 120 min.
[0019] Compared with the existing technology, the coating of the present invention is widely used in the rotary tiller blades on agricultural machinery, has good wear resistance, corrosion resistance and cutting performance, can greatly extend the service life of the rotary tiller blades, and improve the working efficiency of agricultural machinery. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The accompanying drawings described herein are used to further understand the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:
[0021] Figure 1 A schematic diagram of structure I of a TiBCrYN coating for a rotary tillage tool is provided in an embodiment of the present invention. DETAILED DESCRIPTION
[0022] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.
[0023] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "inner", "outer", etc. indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.
[0024] It should be noted that, in this document, the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, article, or device comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, article, or device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, article, or device comprising the element.
[0025] The embodiment of the present invention provides a TiBCrYN coating for a rotary tillage tool, such as Figure 1 As shown, a Cr metal bombardment layer, a TiAlN transition layer, a TiBN / CrYN nano-multilayer support layer, and a TiBCrYN functional gradient layer are sequentially provided on the substrate of the rotary tillage tool; the thickness ratio of the Cr metal bombardment layer, the TiAlN transition layer, the TiBN / CrYN nano-multilayer support layer, and the TiBCrYN functional gradient layer is: 1:10:20:40-60;
[0026] The Cr metal bombardment layer is located on the outermost layer of the substrate surface and is the connecting layer between the coating and the substrate. The TiAlN transition layer is located above the Cr metal bombardment layer and has good wear resistance and corrosion resistance, and is an important protective layer of the coating.
[0027] The TiBN / CrYN nano-multilayer support layer is located on the TiAlN transition layer and comprises alternating depositions of TiBN and CrYN coatings. The TiBN coating has good hardness and oxidation resistance, and can effectively improve the wear resistance of the coating. The CrYN coating has good density and smoothness, and can increase the structural tightness of the coating and improve the corrosion resistance of the coating.
[0028] The TiBCrYN functionally gradient layer is located above the TiBN / CrYN nano-multilayer support layer and has good wear resistance and corrosion resistance, as well as excellent cutting performance.
[0029] The thickness of the Cr metal bombardment layer is 50-100nm, the thickness of the TiAlN transition layer is 500-1000nm, the total thickness of the TiBN / CrYN nano multilayer support layer is 1000-2000nm, the thickness of each layer is 10-100nm, and the thickness of the TiBCrYN functional gradient layer is 3000-4000nm.
[0030] The Cr metal bombardment layer is prepared by arc ion plating; the TiAlN transition layer is prepared by HIPIMS; in the TiBN / CrYN nano multilayer support layer, the TiBN coating is prepared by HIPIMS, and the CrYN coating is prepared by arc ion plating; the TiBCrYN functional gradient layer is prepared by HIPIMS.
[0031] An embodiment of the present invention further provides a method for preparing a TiBCrYN coating for a rotary tillage tool, the method comprising:
[0032] Step 1: Place the cleaned and dried rotary tillage tool substrate in the deposition chamber of the vacuum coating equipment;
[0033] Step 2: depositing a Cr metal bombardment layer on the surface of the substrate of the rotary tillage tool to prepare a Cr metal bombardment layer;
[0034] Specifically, arc ion plating was used for preparation, and the deposition parameters were as follows: temperature 350 °C, vacuum chamber pressure 5×10 -3 Pa, bias voltage is -200 V, -400 V, -800 V, -1000 V, target current is 80 A, Ar gas flow rate is 200 sccm, deposition pressure is 1.0 Pa, and deposition time is 20 min.
[0035] Step 3: depositing a TiAlN transition layer on the surface of the Cr metal bombardment layer to prepare a TiAlN transition layer;
[0036] Specifically, HIPIMS was used for preparation, and the deposition parameters were pulse frequency of 200 Hz, pulse width of 100 μs, pulse duty cycle of 10%, argon flow rate of 90 sccm, nitrogen flow rate of 35 sccm, working pressure of 1.0 Pa, deposition temperature of 350° C., and deposition time of 30 min.
[0037] Step 4: depositing a TiBN / CrYN nano-multilayer support layer on the surface of the TiAlN transition layer to prepare a TiBN / CrYN nano-multilayer support layer;
[0038] Specifically, the TiBN coating was prepared by HIPIMS with the following deposition parameters: pulse frequency of 200 Hz, pulse width of 100 μs, pulse duty cycle of 10%, argon flow rate of 90 sccm, nitrogen flow rate of 35 sccm, working pressure of 1.0 Pa, deposition temperature of 350 ° C, and deposition time of 60 min; the CrYN coating was prepared by arc ion plating with the following deposition parameters: temperature of 350 ° C, vacuum chamber pressure of 5×10 -3 Pa, bias voltage is 100 V, target current is 70 A, nitrogen flow rate is 500 sccm, deposition pressure is 1.0 Pa, and deposition time is 20 min.
[0039] Step 5: Depositing a TiBCrYN functional gradient layer on the surface of the TiBN / CrYN nano multilayer support layer to prepare a TiBCrYN functional gradient layer.
[0040] Specifically, HIPIMS was used for preparation, and the deposition parameters were pulse frequency of 150 Hz, pulse width of 100 μs, pulse duty cycle of 10%, argon flow rate of 90 sccm, nitrogen flow rate of 30 sccm, working pressure of 1.0 Pa, deposition temperature of 350° C., and deposition time of 120 min.
[0041] In the preparation process of the coating of the present invention, the Cr metal bombardment layer adopts arc ion plating preparation technology, which can better bond the coating to the substrate through high-energy ion bombardment, improve the bonding force of the coating, and thus increase the wear resistance and corrosion resistance of the coating. The TiAlN transition layer adopts HIPIMS preparation technology, which can form a dense aluminum oxide layer on the surface of the coating to protect the coating from corrosion and oxidation, while improving the hardness and wear resistance of the coating. In the TiBN / CrYN nano-multilayer support layer, the TiBN coating adopts HIPIMS preparation technology, which can improve the hardness and oxidation resistance of the coating; the CrYN coating adopts arc ion plating preparation technology, which can improve the density and smoothness of the coating, thereby improving the wear resistance and corrosion resistance of the coating. The TiBCrYN functional gradient layer adopts HIPIMS preparation technology, which can improve the wear resistance and corrosion resistance of the coating, and at the same time has good cutting performance, which can meet the use requirements under complex working conditions such as high temperature, high pressure and high speed.
[0042] In summary, the coating structure employed in this invention features multi-layer composites and functional stratification, enhancing the overall performance of cutting tools, including hardness, wear resistance, corrosion resistance, oxidation resistance, and cutting performance. Specifically, the TiAlN transition layer improves the coating's wear and corrosion resistance, extending its service life; the TiBN / CrYN nano-multilayer support layer enhances the coating's hardness, oxidation resistance, density, and smoothness; and the TiBCrYN functionally gradient layer improves the coating's wear resistance, corrosion resistance, and cutting performance.
[0043] During the deposition process, different preparation processes and deposition parameters can have different effects on the performance of the coating, so optimization and selection are necessary based on the specific application scenario. The preparation processes used in this invention include arc ion plating and HIPIMS, which have the advantages of high efficiency, environmental protection, and energy stability, and can achieve high-quality and highly stable coating deposition.
[0044] Therefore, the coating structure and preparation process adopted in the present invention have broad application prospects and can be widely used in fields such as high-speed cutting, friction and wear in high-temperature environments, and contribute to improving industrial production efficiency and reducing production costs.
[0045] Example 1:
[0046] 1. Preparation process of Cr metal bombardment layer
[0047] Technical Features
[0048] Arc ion plating was used for the deposition. The deposition parameters were as follows: temperature 350℃, vacuum chamber pressure 5×10 -3 Pa, bias voltage is -200 V, -400 V, -800 V, -1000 V, target current is 80 A, Ar gas flow rate is 50-200 sccm, deposition pressure is 1.0 Pa, and deposition time is 20 min.
[0049] Implementation steps
[0050] (1) Placing a substrate that has been pre-treated by polishing, ultrasonication, etc. in a vacuum reaction chamber;
[0051] (2) Open the reaction chamber, under the condition of temperature 350℃ and vacuum chamber pressure 5×10 -3 Pa, the Ar gas flow rate is 200 sccm;
[0052] (3) Set the bias voltage to -200 V, -400 V, -800 V, and -1000 V, the target current to 80 A, and the deposition pressure to 1.0 Pa;
[0053] (4) Start deposition, the deposition time is 20 minutes.
[0054] 2. Preparation process of TiAlN transition layer
[0055] Technical Features
[0056] The deposition parameters were as follows: pulse frequency of 200 Hz, pulse width of 100 μs, pulse duty cycle of 10%, argon flow rate of 90 sccm, nitrogen flow rate of 35 sccm, working pressure of 1.0 Pa, deposition temperature of 350°C, and deposition time of 30 min.
[0057] Implementation steps
[0058] (1) Set the pulse frequency to 200 Hz, the pulse width to 100 μs, the pulse duty cycle to 10%, the argon flow rate to 90 sccm, the nitrogen flow rate to 35 sccm, and the operating pressure to 1.0 Pa;
[0059] (2) Start deposition, the deposition time is 30 minutes.
[0060] 3. Preparation process of TiBN / CrYN nano-multilayer support layer
[0061] Technical Features
[0062] (1) Preparation process of TiBN coating: HIPIMS was used for preparation. The deposition parameters were pulse frequency of 200 Hz, pulse width of 100 μs, pulse duty cycle of 10%, argon flow rate of 90 sccm, nitrogen flow rate of 35 sccm, working pressure of 1.0 Pa, deposition temperature of 350 °C, and deposition time of 60 min.
[0063] (2) Preparation process of CrYN coating: CrYN coating was prepared by arc ion plating. The deposition parameters were as follows: temperature 350 °C, vacuum chamber pressure 5 × 10 -3 Pa, bias voltage is 100 V, target current is 70 A, nitrogen flow rate is 500 sccm, deposition pressure is 1.0 Pa, and deposition time is 20 min.
[0064] The preparation process of TiBN / CrYN nano multilayer support layer has the following technical characteristics:
[0065] (1) TiBN coating is prepared by HIPIMS, which uses the effects of high-energy ion bombardment and electron collision to form a dense lattice structure, thereby improving the smoothness and density of the coating;
[0066] (2) The CrYN coating is prepared by arc ion plating, which can improve the density and smoothness of the coating, thereby improving the wear resistance and corrosion resistance of the coating;
[0067] (3) TiBN / CrYN nano-multilayer structure, by optimizing the thickness and deposition order of different material layers, can form a good interface bonding, thereby improving the wear resistance and oxidation resistance of the coating;
[0068] (4) The nano-multilayer structure design is adopted to make the coating have better mechanical properties and cutting performance, which can adapt to different process requirements.
[0069] 4. Preparation process of TiBCrYN functionally graded layer
[0070] Technical Features
[0071] The deposition parameters were as follows: pulse frequency of 180 Hz, pulse width of 100 μs, pulse duty cycle of 10%, argon flow rate of 90 sccm, nitrogen flow rate of 30 sccm, working pressure of 1.0 Pa, deposition temperature of 350°C, and deposition time of 120 min.
[0072] The preparation process of TiBCrYN functional gradient layer has the following technical characteristics:
[0073] (1) Preparation using HIPIMS: The use of HIPIMS technology makes the deposition rate faster, and functional gradient layers can be prepared in a shorter time, thereby improving production efficiency.
[0074] (2) Use of multiple gases: Injecting argon and nitrogen simultaneously during the preparation process can introduce different elements into the coating, forming a variety of compounds, thereby improving the performance and application range of the coating.
[0075] (3) Reaction chamber pressure control: The reaction chamber pressure is 1.0 Pa, which can provide a relatively stable working environment and is conducive to the deposition of coatings with stable quality and excellent performance.
[0076] (4) Moderate deposition time: The deposition time is 120 min, which can ensure both the thickness of the coating and the deposition quality, and avoid excessive deposition time causing the coating to lose its good crystallinity and density.
[0077] In summary, the TiBCrYN functionally gradient layer preparation process using HIPIMS has the advantages of high production efficiency, excellent coating performance and wide application range.
[0078] Testing of rotary tillage tools
[0079] The prepared rotary tillage cutter was tested using an X-ray diffractometer (XRD), a scanning electron microscope (SEM) and a microhardness tester. The XRD test results showed that the TiAlSiYN coating was a single-phase face-centered cubic structure. The SEM observation results showed that the surface of the rotary tillage cutter prepared by the present invention had good smoothness and density, and the surface coating was uniform without obvious cracks and peeling. The total thickness of the coating was 5900nm, the thickness of the TiAlN transition layer was 500nm, the total thickness of the TiBN / CrYN nano-multilayer support layer was 1600nm, and the thickness of the TiBCrYN functional gradient layer was 3800nm. The microhardness test results showed that the surface hardness of the rotary tillage cutter was greatly improved, reaching 35.8GPa.
[0080] To test the machining performance of the rotary tillage cutters, machining tests were conducted using different materials, including high-strength steel, stainless steel, and copper. The results showed that the rotary tillage cutters prepared in this invention had a longer service life and better cutting performance than uncoated rotary tillage cutters.
[0081] These excellent properties make the coating have excellent wear resistance, corrosion resistance, high temperature resistance and pressure resistance in complex environments such as high temperature, high pressure and strong corrosion. It is widely used in aerospace, automobile, electronics, machinery and other fields.
[0082] The preparation process of the present invention uses both arc ion plating and HIPIMS technologies, effectively combining the advantages of the two technologies to optimize and enhance coating performance. Furthermore, the preparation process is simple and easy to implement, suitable for large-scale production, and has great application prospects.
[0083] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention.
Claims
1. A TiBCrYN coating for a rotary tillage tool, characterized in that: A Cr metal bombardment layer, a TiAlN transition layer, a TiBN / CrYN nano-multilayer support layer, and a TiBCrYN functional gradient layer are sequentially arranged on a substrate of a rotary tillage tool; the thickness ratio of the Cr metal bombardment layer, the TiAlN transition layer, the TiBN / CrYN nano-multilayer support layer, and the TiBCrYN functional gradient layer is 1:10:20:40-60; wherein the TiBN / CrYN nano-multilayer support layer is a nano-multilayer structure composed of a plurality of TiBN coatings and CrYN coatings deposited alternately; The thickness of the Cr metal bombardment layer is 50-100 nm, the thickness of the TiAlN transition layer is 0.5-1 μm, the total thickness of the TiBN / CrYN nano multilayer support layer is 1-2 μm, the thickness of each layer is 10-100 nm, and the thickness of the TiBCrYN functional gradient layer is 3-4 μm. The Cr metal bombardment layer is prepared by arc ion plating; the TiAlN transition layer is prepared by HIPIMS; in the TiBN / CrYN nano multilayer support layer, the TiBN layer is prepared by HIPIMS, and the CrYN layer is prepared by arc ion plating; the TiBCrYN functional gradient layer is prepared by HIPIMS.
2. A method for preparing a TiBCrYN coating for a rotary tillage tool according to claim 1, characterized in that: The method comprises the following steps: placing a rotary tillage tool substrate that has been cleaned and dried in a deposition chamber of a vacuum coating device; Depositing a Cr metal bombardment layer on the surface of a substrate of a rotary tillage tool to prepare a Cr metal bombardment layer; Then, a TiAlN transition layer is deposited on the surface of the Cr metal bombardment layer to prepare a TiAlN transition layer; Then, a TiBN / CrYN nano multilayer support layer is deposited on the surface of the TiAlN transition layer to prepare a TiBN / CrYN nano multilayer support layer; Afterwards, a TiBCrYN functional gradient layer is deposited on the surface of the TiBN / CrYN nano multilayer support layer to prepare a TiBCrYN functional gradient layer.
3. The preparation method according to claim 2, characterized in that The Cr metal bombardment layer was deposited on the substrate surface of the rotary tillage tool to prepare the Cr metal bombardment layer. The Cr metal bombardment layer was prepared by arc ion plating. The deposition parameters were as follows: temperature 350 ° C, vacuum chamber pressure 5×10 -3 Pa, bias voltage -200~1000V, target current 50~100A, Ar gas flow rate 50~200SCCM, deposition pressure 0.05~1.0Pa, deposition time 5~30min.
4. The preparation method according to claim 3, characterized in that A TiAlN transition layer is deposited on the surface of the Cr metal bombardment layer to prepare the TiAlN transition layer. The TiAlN transition layer is prepared by HIPIMS. The deposition parameters are: pulse frequency 50-200 Hz, pulse width 100-300 μs, pulse duty cycle 10%, argon flow rate 20-100 SCCM, nitrogen flow rate 200-280 SCCM, working pressure 0.05-1.0 Pa, deposition temperature 350°C, and deposition time 30-60 min.
5. The preparation method according to claim 4, characterized in that A TiBN / CrYN nano-multilayer support layer was deposited on the surface of the TiAlN transition layer to prepare a TiBN / CrYN nano-multilayer support layer. Specifically, the TiBN layer was prepared by HIPIMS, and the deposition parameters were as follows: a pulse frequency of 50 to 200 Hz, a pulse width of 100 to 300 μs, a pulse duty cycle of 10%, an argon flow rate of 20 to 100 SCCM, a nitrogen flow rate of 200 to 280 SCCM, a working pressure of 0.05 to 1.0 Pa, a deposition temperature of 350° C., and a deposition time of 30 to 60 min. The CrYN layer was prepared by arc ion plating, and the deposition parameters were as follows: a temperature of 350° C., a vacuum chamber pressure of 5×10 - 3 Pa, bias voltage -50~200V, target current 50~100A, nitrogen flow rate 50~500SCCM, deposition pressure 0.05~1.0Pa, deposition time 10~20min.
6. The preparation method according to claim 5, characterized in that A TiBCrYN functional gradient layer is deposited on the surface of the TiBN / CrYN nano-multilayer support layer to prepare a TiBCrYN functional gradient layer. The TiBCrYN functional gradient layer is prepared by HIPIMS. The deposition parameters are: pulse frequency 50-200 Hz, pulse width 100-300 μs, pulse duty cycle 10%, argon flow rate 20-100 SCCM, nitrogen flow rate 200-280 SCCM, working pressure 0.05-1.0 Pa, deposition temperature 350°C, and deposition time 60-120 min.
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