A polycrystalline silicon rod crushing device and crushing method thereof

Abstract

The present invention relates to the field of polysilicon production technology, and in particular to a polysilicon rod crushing device and a crushing method thereof. The polysilicon rods are subjected to a heating-quenching treatment so that the silicon rods are subjected to intercrystalline stress and cracks are generated. The cracked silicon rods are then fixed on a fixed seat, and a crushing device is sleeved on the silicon rods by a driving mechanism. The silicon rod area surrounded by the first and second air bags after inflating with the help of an external air supply assembly is the area to be crushed. The air pressure pulse device is operated to blow high-pressure clean air into the top cover in a very short time, forming an air pressure pulse, which is poured into the cracks of the silicon rods, flushing the cracks open, and then crushing the silicon rods. The crushing device used in the present invention can reduce the contact between silicon materials and people, thereby avoiding contamination of the silicon materials. The crushing process does not require mechanical crushing, reducing the introduction of impurity ions. The high-pressure pulse impact is used to fill the cracks of the silicon rods and flush them open, while simultaneously revealing and flushing hidden cracks, saving manpower.

Description

Technical Field

[0001] The present invention relates to the technical field of polysilicon production, and in particular to a polysilicon rod crushing device and a crushing method thereof. Background Art

[0002] In the polysilicon industry, electronic-grade polysilicon produced by the vapor deposition method is in the form of large rods, which need to be crushed into blocks before being used downstream. Because the purity requirements for electronic-grade polysilicon are extremely high, it is very important to control impurity contamination during the silicon rod crushing process.

[0003] At present, various impurities will inevitably be introduced in both manual and mechanical crushing processes. Although manual crushing has good flexibility, its crushing efficiency is low, and the crushing process will generate a large amount of dust, which poses a great threat to workers' health. Mechanical crushing has high efficiency, but it will inevitably introduce metal impurities such as Fe, Al, and Na during crushing, and the pollutants generated by mechanical movement friction are even more difficult to remove. Therefore, it is necessary to seek breakthroughs in the crushing process. Summary of the Invention

[0004] The present invention provides a polysilicon rod crushing device and a crushing method thereof, which can effectively solve the problems in the background technology.

[0005] In order to achieve the above object, the technical solution adopted by the present invention is:

[0006] A polysilicon rod crushing device comprises a fixing seat provided on a base, a driving mechanism, and a pneumatic pulse device, wherein the driving mechanism is connected to the crushing device and can drive the crushing device to move in a vertical direction, and the crushing device is located above the fixing seat and connected to the pneumatic pulse device;

[0007] A protective cover is provided on the fixing seat, and the protective cover is retractable in its length direction. The crushing device is provided toward one end of the fixing seat and is detachably connected to the end of the protective cover away from the fixing seat.

[0008] The crushing device includes a top cover and a partitioned airbag arranged inside the top cover, the partitioned airbag includes a first airbag and a second airbag respectively arranged near the top and bottom of the top cover, an inflation hole is opened on the top cover between the first airbag and the second airbag, the air pressure pulse device is connected to the inside of the top cover through the inflation hole, and the first airbag and the second airbag are connected to the outside of the top cover through the air inlet and exhaust holes respectively arranged on the top cover.

[0009] Furthermore, the top cover includes a shell and a cover, and the shell is configured as a columnar structure with two ends penetrating therethrough and is connected to the driving mechanism;

[0010] The cover is arranged at one end of the shell away from the fixing seat, and includes a spherical arch surface in the middle and a first platform on the outer ring. The spherical arch surface is convex toward the side away from the shell.

[0011] Furthermore, a second platform is provided at the connection end between the shell and the cover, a limit ring is provided on the inner wall of the shell near the first platform, and a ring seat is provided on the side of the first platform facing the shell;

[0012] The ring seat is vertically arranged with respect to the first platform. The outer diameter of the ring seat is adapted to the inner diameter of the limiting ring. A first ring groove is provided on the inner ring of the limiting ring. A first sealing ring is provided in the first ring groove.

[0013] Furthermore, a first clamping block is provided on a side of the first platform facing the shell, and a second clamping block is provided on the outer ring of the ring seat;

[0014] An annular cavity is formed between the second platform and the limiting ring, and a slot is provided on the second platform. Both the first clamping block and the second clamping block are adapted to the slot, and the distance between the side of the second clamping block away from the first clamping block and the first clamping block is adapted to the width of the annular cavity.

[0015] Furthermore, the clamping slots are provided in plurality along the circumference of the second platform, and the first clamping blocks are provided corresponding to the clamping slots;

[0016] The second clamping block is arranged between two adjacent first clamping blocks, and a plurality of the second clamping blocks are evenly distributed in the circumferential direction of the ring seat.

[0017] Furthermore, a second annular groove is provided on the first platform, the second annular groove is located on the outer ring of the first clamping block, and a second sealing ring is provided in the second annular groove;

[0018] The inner wall of the shell is provided with placement grooves corresponding to the first airbag and the second airbag, and the placement grooves include ring plates provided on both sides of the airbags.

[0019] Furthermore, the driving mechanism includes a support column arranged in a vertical direction, on which a motor, a screw rod and a connecting seat are arranged. The screw rod is arranged in a vertical direction and connected to the motor. The connecting seat is threadedly connected to the screw rod and slidingly connected to the support column. The connecting seat is also connected to the shell.

[0020] Furthermore, the fixing seat includes a fixing ring and a threaded rod arranged thereon, and a plurality of the threaded rods are arranged along the circumference of the fixing ring and are all arranged along the radial direction of the fixing ring;

[0021] The threaded rod passes through the fixing ring sleeve and is screwed thereto. A top arc holding plate is provided at one end of the threaded rod located in the fixing ring sleeve, and a protective pad is provided on the top arc holding plate.

[0022] A method for crushing a polycrystalline silicon rod crushing device, using the above-mentioned polycrystalline silicon rod crushing device, comprises the following steps:

[0023] First, the polysilicon rod is heated and rapidly cooled, and then the treated polysilicon rod is fixed on a fixing seat in a vertical direction;

[0024] The top cover is driven by a driving mechanism to be sleeved on the polysilicon rod, and the external air supply device inflates the zone airbag through the air inlet and outlet holes, so that it fits tightly on the outer wall of the polysilicon rod;

[0025] Connect the protective cover and the top cover, start the air pressure pulse equipment to blow high-pressure clean air into the top cover, forming an air pressure pulse to break the polysilicon rods.

[0026] Furthermore, in the process of putting the top cover on the polysilicon rod:

[0027] Remove the cover on the top cover to allow the polysilicon rod to pass through the top cover shell, and cooperate with the external air supply device to inflate the first airbag and the second airbag so that both airbags are tightly attached to the outer wall of the polysilicon rod;

[0028] The top cover is installed integrally with the shell so that the top of the polysilicon rod abuts against the inner top of the top cover, and the second air bag is inflated with the external air supply device so that it fits tightly against the outer wall of the polysilicon rod.

[0029] The beneficial effects of the present invention are:

[0030] In the present invention, a polycrystalline silicon rod is heated and rapidly cooled to induce intercrystalline stress and cracks in the rod. The cracked rod is then fixed to a fixed seat, and a crushing device is lowered onto the rod via a drive mechanism. An external air supply assembly is used to supply air to the compartmentalized airbags, causing them to fit tightly against the outer wall of the rod. Two groups of compartmentalized airbags are provided, located in the upper and lower inner portions of the top cover, respectively. The area of ​​the silicon rod surrounded by the inflated first and second airbags is the area to be crushed. The air pressure pulse device is operated to pump high-pressure clean air into the top cover in a very short period of time, forming an air pressure pulse that is injected into the cracks of the silicon rod, opening the cracks and thereby crushing the rod.

[0031] The crushing device of the present invention reduces the contact between silicon materials and people, thereby preventing the silicon materials from being contaminated; does not require mechanical crushing, thereby reducing the introduction of impurity ions; utilizes high-voltage pulse impact to inject into the cracks of silicon rods and flush them open, while also revealing and flushing hidden cracks, saving manpower. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0033] Figure 1 Schematic diagram of the structure of a polysilicon rod crushing device according to an embodiment of the present invention;

[0034] Figure 2 Schematic diagram of the connection structure between the cover and the shell in the top cover structure in an embodiment of the present invention;

[0035] Figure 3 is a top view of the top cover in an embodiment of the present invention;

[0036] Figure 4 Schematic diagram of the cross-sectional structure of the top cover in an embodiment of the present invention;

[0037] Figure 5 for Figure 4 A magnified view of the local structure at point B in the middle;

[0038] Figure 6 A bottom view of the top cover according to an embodiment of the present invention;

[0039] Figure 7 Schematic diagram of the structure of the fixing seat in an embodiment of the present invention.

[0040] Reference numerals: 1, base; 2, fixing seat; 21, fixing ring; 22, threaded rod; 23, top arc holding plate; 24, protective pad; 3, driving mechanism; 31, support column; 32, motor; 33, screw rod; 34, connecting seat; 4, air pressure pulse device; 5, crushing device; 51, top cover; 52, housing; 521, second platform; 521a, slot; 522, limiting ring; 522a, first ring groove; 523 , first sealing ring; 524, annular cavity; 525, placement groove; 525a, ring plate; 53, cover body; 531, spherical arch surface; 532, first platform; 533, ring seat; 534, first clamping block; 535, second clamping block; 536, second annular groove; 537, second sealing ring; 54, inflation hole; 55, air inlet and exhaust hole; 56, domain airbag; 561, first airbag; 562, second airbag; 6, protective cover. DETAILED DESCRIPTION

[0041] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0042] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly attached to the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used in this specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0044] like Figures 1 to 7 The polysilicon rod crushing device shown includes a fixed base 2, a driving mechanism 3 and an air pressure pulse device 4 arranged on a base 1. The driving mechanism 3 is connected to the crushing device 5 and can drive the crushing device 5 to move in the vertical direction. The crushing device 5 is located above the fixed base 2 and connected to the air pressure pulse device 4; a protective cover 6 is provided on the fixed base 2, and the protective cover 6 is retractable in its length direction. The crushing device 5 is arranged to open at one end of the fixed base 2 and is detachably connected to the end of the protective cover 6 away from the fixed base 2.

[0045] Among them, the crushing device 5 includes a top cover 51 and a domain airbag 56 arranged inside the top cover 51. The domain airbag 56 includes a first airbag 561 and a second airbag 562 respectively arranged near the top and bottom of the top cover 51. An inflation hole 54 is opened on the top cover 51 between the first airbag 561 and the second airbag 562. The air pressure pulse device 4 is connected to the inside of the top cover 51 through the inflation hole 54. The first airbag 561 and the second airbag 562 are respectively connected to the outside of the top cover 51 through the air inlet and exhaust holes 55 set on the top cover 51.

[0046] In the present invention, a polycrystalline silicon rod is heated and rapidly cooled to induce intercrystalline stress and cracks in the silicon rod. The cracked silicon rod is then fixed to a fixing base 2, and a crushing device 5 is lowered and sleeved onto the silicon rod via a driving mechanism 3. Air is then supplied to the partitioned airbags 56 with the aid of an external air supply assembly, so that the partitioned airbags 56 fit tightly against the outer wall of the silicon rod. Two groups of partitioned airbags 56 are provided, located in the upper and lower parts of the top cover 51, respectively. The silicon rod area surrounded by the first airbag 561 and the second airbag 562 after inflation is the area to be crushed. The air pressure pulse device 4 is operated to pump high-pressure clean air into the top cover 51 in a very short time, forming an air pressure pulse that is injected into the cracks of the silicon rod, flushing the cracks and thereby crushing the silicon rod.

[0047] The crushing device 5 described in the present invention can reduce the contact between silicon materials and people, thereby preventing the silicon materials from being contaminated; it does not require mechanical crushing, reducing the introduction of impurity ions; it uses high-voltage pulse impact to inject into the cracks of the silicon rods and flush them open, while also revealing and flushing hidden cracks, saving manpower.

[0048] In this embodiment, if Figure 2 As shown, the top cover 51 includes a shell 52 and a cover 53. The shell 52 is configured as a columnar structure with both ends through and is connected to the drive mechanism 3; the cover 53 is arranged at one end of the shell 52 away from the fixed seat 2, including a spherical arch surface 531 located in the middle and a first platform 532 on the outer ring, and the spherical arch surface 531 is configured to protrude toward the side away from the shell 52.

[0049] Furthermore, a second platform 521 is provided at the connecting end of the shell 52 and the cover body 53, a limiting ring 522 is provided on the inner wall of the shell 52 near the first platform 532, and a ring seat 533 is provided on the side of the first platform 532 facing the shell 52; the ring seat 533 is arranged perpendicular to the first platform 532, the outer diameter of the ring seat 533 is adapted to the inner diameter of the limiting ring 522, a first ring groove 522a is opened on the inner ring of the limiting ring 522, and a first sealing ring 523 is provided in the first ring groove 522a.

[0050] When the shell 52 and the cover body 53 are spliced ​​together, the ring seat 533 on the cover body 53 is inserted into the shell 52 and passes through the limit ring 522. The first sealing ring 523 arranged in the first ring groove 522a is pressed by the ring seat 533 and the limit ring 522 to achieve a sealing effect at the connection between the cover body 53 and the shell 52.

[0051] Furthermore, a first clamping block 534 is provided on the side of the first platform 532 facing the shell 52, and a second clamping block 535 is provided on the outer ring of the ring seat 533; a ring cavity 524 is formed between the second platform 521 and the limiting ring 522, and a clamping groove 521a is provided on the second platform 521, and the first clamping block 534 and the second clamping block 535 are both adapted to the clamping groove 521a, and the distance between the side of the second clamping block 535 away from the first clamping block 534 and the first clamping block 534 is adapted to the width of the ring cavity 524.

[0052] A second annular groove 536 is provided on the first platform 532, and the second annular groove 536 is located on the outer ring of the first clamping block 534. A second sealing ring 537 is provided in the second annular groove 536; a placement groove 525 is provided on the inner wall of the shell 52 corresponding to the first airbag 561 and the second airbag 562, and the placement groove 525 includes an annular plate 525a provided on both sides of the airbag.

[0053] Multiple slots 521a are provided along the circumference of the second platform 521 , and the first clamping blocks 534 are provided corresponding to the slots 521a ; the second clamping blocks 535 are provided between two adjacent first clamping blocks 534 , and the multiple second clamping blocks 535 are evenly distributed around the ring seat 533 .

[0054] When the shell 52 and the cover 53 are spliced ​​together, the first platform 532 on the cover 53 abuts against the second platform 521 at the end of the shell 52, and a sealing effect is achieved at the connection between the first platform 532 and the second platform 521 by the second sealing ring 537 arranged in the second annular groove 536.

[0055] During the installation process of the cover body 53 and the shell 52, first align the second clamping block 535 on the cover body 53 with the clamping groove 521a on the first platform 532 at the end of the shell 52, and after the second clamping block 535 passes through the clamping groove 521a, the first clamping block 534 abuts against the surface of the second platform 521; after rotating the cover body 53 so that the first clamping block 534 is inserted into the clamping groove 521a, the second platform 521 abuts against the second platform 521, completing the splicing between the cover body 53 and the shell 52.

[0056] In the present invention, the driving mechanism 3 includes a support column 31 arranged in a vertical direction, on which a motor 32, a screw rod 33 and a connecting seat 34 are arranged. The screw rod 33 is arranged in a vertical direction and connected to the motor 32. The connecting seat 34 is screwed to the screw rod 33 and is slidingly connected to the support column 31. The connecting seat 34 is also connected to the shell 52.

[0057] like Figure 7 As shown, the fixing seat 2 includes a fixing ring sleeve 21 and a threaded rod 22 arranged thereon. There are multiple threaded rods 22 along the circumference of the fixing ring sleeve 21, and they are all arranged radially along the fixing ring sleeve 21; the threaded rod 22 passes through the fixing ring sleeve 21 and is screwed thereto, and a top arc holding plate 23 is provided at one end of the threaded rod 22 located in the fixing ring sleeve 21, and a protective pad 24 is provided on the top arc holding plate 23.

[0058] During the specific implementation process, the silicon rod that has been thermally broken and has cracks is placed in the fixed ring sleeve 21, and the threaded rods 22 at various angles are tightened so that multiple groups of top arc plates 23 are supported on the outer surface of the silicon rod, and one end of the silicon rod is pressed and fixed to achieve the vertical limit fixation of the entire silicon rod.

[0059] The present invention further discloses a method for crushing a polycrystalline silicon rod using the above-mentioned polycrystalline silicon rod crushing device, comprising the following steps:

[0060] First, the polysilicon rods are heated and rapidly cooled, and then the treated polysilicon rods are fixed on the fixing seat 2 in the vertical direction; the top cover 51 is driven by the driving mechanism 3 to be mounted on the polysilicon rods, and the external air supply device inflates the domain airbags 56 through the air inlet and outlet holes 55 to make them fit tightly on the outer wall of the polysilicon rods; the air pressure pulse device 4 is started to blow high-pressure clean air into the top cover 51 to form an air pressure pulse to break the polysilicon rods.

[0061] By heating and rapidly cooling the polysilicon rods, intercrystalline stress is generated in the silicon rods to produce cracks; the area of ​​the silicon rods surrounded by the first airbag 561 and the second airbag 562 in the top cover 51 after inflation is the area to be crushed; the air pressure pulse device 4 blows high-pressure clean air into the top cover 51 in a very short time, forming an air pressure pulse, which is injected into the cracks of the silicon rods, flushing the cracks open and achieving the crushing of the silicon rods.

[0062] As a preferred embodiment of the above, in the process of putting the top cover 51 on the polycrystalline silicon rod: the cover body 53 on the top cover 51 is removed so that the polycrystalline silicon rod can pass through the shell 52 of the top cover 51, and the first air bag 561 and the second air bag 562 are inflated with the external air supply device so that the two air bags are tightly fitted on the outer wall of the polycrystalline silicon rod; the cover body 53 on the top cover 51 is installed as a whole with the shell 52 so that the top of the polycrystalline silicon rod is abutted against the inner top of the top cover 51, and the second air bag 562 is inflated with the external air supply device so that it is tightly fitted on the outer wall of the polycrystalline silicon rod.

[0063] After removing the cover 53 on the top cover 51, the polysilicon rod can pass through the shell 52. The shell 52 can be moved to any position of the silicon rod through the driving mechanism 3, and the sealing area formed between the first airbag 561 and the second airbag 562 can be used to accurately crush different positions of the silicon rod.

[0064] After the upper cover 53 of the top cover 51 and the shell 52 are integrally assembled, the second airbag 562 is inflated to form a sealed area with the top cover 51, so that the entire silicon rod can be broken into sections from top to bottom.

[0065] Those skilled in the art will appreciate that the present invention is not limited to the foregoing embodiments. The foregoing embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A polysilicon rod crushing device, characterized in that: The device comprises a fixing seat, a driving mechanism and an air pressure pulse device provided on a base. The driving mechanism is connected to a crushing device and can drive the crushing device to move in a vertical direction. The crushing device is located above the fixing seat and is connected to the air pressure pulse device. The fixing seat is used to fix the silicon rods that have undergone heating and rapid cooling treatment. A protective cover is provided on the fixing seat, and the protective cover is retractable in its length direction. The crushing device is provided toward one end of the fixing seat and is detachably connected to the end of the protective cover away from the fixing seat. The crushing device includes a top cover and a partitioned airbag disposed inside the top cover. The partitioned airbag includes a first airbag and a second airbag disposed near the top and bottom of the top cover, respectively. The silicon rod area surrounded by the first and second airbags after inflation is the area to be crushed. The top cover includes a shell and a cover. An inflation hole is provided on the top cover between the first airbag and the second airbag, and the air pressure pulse device is connected to the inside of the top cover through the inflation hole. The first airbag and the second airbag are connected to the outside of the top cover through the air inlet and exhaust holes provided on the top cover respectively.

2. The polysilicon rod crushing device according to claim 1, characterized in that: The top cover includes a shell and a cover, wherein the shell is a columnar structure with two ends through and is connected to the driving mechanism; The cover is arranged at one end of the shell away from the fixing seat, and includes a spherical arch surface in the middle and a first platform on the outer ring. The spherical arch surface is convex toward the side away from the shell.

3. The polysilicon rod crushing device according to claim 2, characterized in that: A second platform is provided at the connection end between the shell and the cover, a limit ring is provided on the inner wall of the shell near the first platform, and a ring seat is provided on the side of the first platform facing the shell; The ring seat is vertically arranged with respect to the first platform. The outer diameter of the ring seat is adapted to the inner diameter of the limiting ring. A first ring groove is provided on the inner ring of the limiting ring. A first sealing ring is provided in the first ring groove.

4. The polysilicon rod crushing device according to claim 3, characterized in that: A first clamping block is provided on a side of the first platform facing the housing, and a second clamping block is provided on the outer ring of the ring seat; An annular cavity is formed between the second platform and the limiting ring, and a slot is provided on the second platform. Both the first clamping block and the second clamping block are adapted to the slot, and the distance between the side of the second clamping block away from the first clamping block and the first clamping block is adapted to the width of the annular cavity.

5. The polysilicon rod crushing device according to claim 4, characterized in that: The clamping slots are provided in plurality along the circumference of the second platform, and the first clamping blocks are provided corresponding to the clamping slots; The second clamping block is arranged between two adjacent first clamping blocks, and a plurality of the second clamping blocks are evenly distributed in the circumferential direction of the ring seat.

6. The polysilicon rod crushing device according to claim 4, characterized in that: A second ring groove is provided on the first platform, the second ring groove is located on the outer ring of the first clamping block, and a second sealing ring is provided in the second ring groove; The inner wall of the shell is provided with placement grooves corresponding to the first airbag and the second airbag, and the placement grooves include ring plates provided on both sides of the airbags.

7. The polysilicon rod crushing device according to claim 2, characterized in that: The driving mechanism includes a support column arranged in a vertical direction, on which a motor, a screw rod and a connecting seat are arranged. The screw rod is arranged in a vertical direction and connected to the motor. The connecting seat is threadedly connected to the screw rod and slidingly connected to the support column. The connecting seat is also connected to the shell.

8. The polysilicon rod crushing device according to claim 1, characterized in that: The fixing seat includes a fixing ring and a threaded rod arranged thereon, wherein a plurality of threaded rods are arranged along the circumference of the fixing ring and are arranged radially along the fixing ring; The threaded rod passes through the fixing ring sleeve and is screwed thereto. A top arc holding plate is provided at one end of the threaded rod located in the fixing ring sleeve, and a protective pad is provided on the top arc holding plate.

9. A method for crushing a polysilicon rod crushing device, characterized in that: The polycrystalline silicon rod crushing device according to any one of claims 1 to 8 comprises the following steps: First, the polysilicon rod is heated and rapidly cooled, and then the treated polysilicon rod is fixed on a fixing seat in a vertical direction; The top cover is driven by a driving mechanism to be sleeved on the polysilicon rod, and the external air supply device inflates the airbag through the air inlet and outlet holes to make it fit tightly on the outer wall of the polysilicon rod; Connect the protective cover and the top cover, start the air pressure pulse equipment to blow high-pressure clean air into the top cover, forming an air pressure pulse to break the polysilicon rods.

10. The crushing method of the polysilicon rod crushing device according to claim 9, characterized in that: During the process of putting the top cover on the polysilicon rod: Remove the cover on the top cover to allow the polysilicon rod to pass through the top cover shell, and cooperate with the external air supply device to inflate the first airbag and the second airbag so that both airbags are tightly attached to the outer wall of the polysilicon rod; The top cover is installed integrally with the shell so that the top of the polysilicon rod abuts against the inner top of the top cover, and the second air bag is inflated with the external air supply device so that it fits tightly against the outer wall of the polysilicon rod.

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