Apparatus and method for ultrasonic assisted high speed skiving of small module cylindrical internal gear

Abstract

The application discloses a device and a use method for ultrasonic-assisted high-speed broaching of small-modulus cylindrical internal gear, and relates to the technical field, which comprises an ultrasonic vibration amplitude rod, a first connecting fixing part, a second connecting fixing part, an ultrasonic vibration clamp device and a broach.The ultrasonic vibration amplitude rod vibrates at a fixed frequency.The first connecting fixing part is connected to the ultrasonic vibration amplitude rod.The second connecting fixing part is connected to the ultrasonic vibration amplitude rod, and the distance from the connecting point of the first connecting fixing part and the ultrasonic vibration amplitude rod to the connecting point of the second connecting fixing part and the ultrasonic vibration amplitude rod is an odd multiple of the half wavelength of the resonant wave in the ultrasonic vibration amplitude rod.The ultrasonic vibration clamp device is used for fixing the gear, and the left and right ends of the ultrasonic vibration clamp device are connected to the first connecting fixing part and the second connecting fixing part respectively.The broach is used for broaching the gear.The application improves the machining precision and the service life of the broach.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of machining, in particular to a device and method for ultrasonic-assisted high-speed broaching of small-modulus cylindrical internal gear. BACKGROUND

[0002] Small-modulus gear refers to gear with modulus less than or equal to 1. High-performance small-modulus gear is widely used in aerospace, electronic products, precision machinery, instruments and timing mechanisms, etc. The material of high-performance small-modulus gear has the characteristics of high strength and high hardness, and the hardness of the tooth surface after heat treatment quenching reaches 68HRC. During the machining of the gear steel, the cutting force is large and fluctuates greatly, resulting in serious tool release phenomenon, low tool life, low machining quality, and workpiece scrap, etc. SUMMARY

[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides a device and method for ultrasonic-assisted high-speed broaching of small-modulus cylindrical internal gear, which can improve the machining precision and the service life of the broach.

[0004] According to the device for ultrasonic-assisted high-speed broaching of small-modulus cylindrical internal gear provided by the first aspect of the present application, the device is used for machining gear, and comprises an ultrasonic vibration amplitude rod, a first connecting fixing part, a second connecting fixing part, an ultrasonic vibration clamp device, and a broach. The ultrasonic vibration amplitude rod vibrates at a fixed frequency. The first connecting fixing part is connected to the ultrasonic vibration amplitude rod. The second connecting fixing part is connected to the ultrasonic vibration amplitude rod. The distance from the connection point of the first connecting fixing part and the ultrasonic vibration amplitude rod to the connection point of the second connecting fixing part and the ultrasonic vibration amplitude rod is an odd multiple of the half wavelength of the resonant wave in the ultrasonic vibration amplitude rod. The ultrasonic vibration clamp device is used for fixing the gear. The left and right ends of the ultrasonic vibration clamp device are respectively connected to the first connecting fixing part and the second connecting fixing part. The broach is provided with a first correction section, a rough machining section, a second correction section, a finishing section, a third correction section, and a tooth profile machining section, which are sequentially arranged to perform broaching machining on the gear.

[0005] The device for ultrasonic-assisted high-speed broaching of small-modulus cylindrical internal gear according to the present application has at least the following beneficial effects: the gear is driven to vibrate by the ultrasonic vibration clamp device, so that the cutting force is concentrated in a very small range of the tool teeth. Due to the impact of the tool teeth, the ultrasonic wave is transmitted in the shear area of the gear, reducing the shear strength of the material in front of the tool teeth and the contact length of the tool and the chip. The tool life is improved, and the overall cutting resistance is reduced.

[0006] According to some embodiments of the present application, the ultrasonic vibration horn is connected with an ultrasonic transducer, the ultrasonic transducer is connected with a power supply, the ultrasonic transducer is used to convert electric energy into vibrating mechanical energy, and the ultrasonic vibration horn is used to amplify the vibration generated by the ultrasonic transducer.

[0007] According to some embodiments of the present application, the gear left and right adjustable position is fixed in the ultrasonic vibration clamp device.

[0008] According to some embodiments of the second aspect of the present application, a method for using the device for ultrasonic-assisted high-speed broaching of small-modulus cylindrical internal gear, the method is realized by applying the above-mentioned device for ultrasonic-assisted high-speed broaching of small-modulus cylindrical internal gear, and includes the following steps:

[0009] Step S1, measuring the cutting force coefficient k rc and the cutting edge coefficient k te , measuring the cutting width of the first correction section, the rough machining section, the second correction section, the finishing section, the third correction section, and the tooth profile machining section on the gear respectively s(i), i=1,…,6, and the cutting depth h(i), i=1,…,6;

[0010] Step S2, respectively calculating the cutting force F S (i) of the first correction section, the rough machining section, the second correction section, the finishing section, the third correction section, and the tooth profile machining section, i=1,…,6;

[0011] Step S3, modal testing the whole device for ultrasonic-assisted high-speed broaching of small-modulus cylindrical internal gear, measuring the modal mass m1, measuring the radial damping coefficient and modal stiffness respectively c1,ψ1, measuring the frequency w of the overall vibration mode and the natural frequency w n , performing damping coefficient identification test on the device for ultrasonic-assisted high-speed broaching of small-modulus cylindrical internal gear under different cutting speeds, measuring the cutting damping c, and calculating the damping ratio ξ;

[0012] Step S4, measuring the spacing l between the first correction section, the rough machining section, the second correction section, the finishing section, the third correction section, and the tooth profile machining section and the cutting speed v, calculating the broaching force excitation frequency f and the interval time period T of adjacent tool teeth entering cutting;

[0013] Step S5, the ultrasonic vibration amplitude ζ1, ζ2, ζ3, ζ4, ζ5, ζ6 of the observation point on the ultrasonic vibration amplitude rod during the machining of the gear in the first correction section, the rough machining section, the second correction section, the finish machining section, the third correction section, and the tooth profile machining section are measured in sequence, and the average value ζ of the target point vibration amplitude of the first correction section, the rough machining section, the second correction section, the finish machining section, the third correction section, and the tooth profile machining section is calculated.

[0014] Step S6, the displacement y(i) in the up-down direction of the first correction section, the rough machining section, the second correction section, the finish machining section, the third correction section, and the tooth profile machining section is calculated respectively, i=1,...,6.

[0015] Step S7, the maximum value of the displacement y(i), i=1,...,6 is taken as y max .

[0016] Step S8, the optimization limit value A of the cutting depth is measured by experiment, and then the cutting depth setting value B of the machine tool in actual machining is calculated.

[0017] According to some embodiments of the present application, the calculation formula in step S2 is F s (i)=s(i)k te +s(i)k rc h(i).

[0018] According to some embodiments of the present application, the calculation formula in step S4 is,

[0019] According to some embodiments of the present application, the calculation formula in step S6 is

[0020] According to some embodiments of the present application, in step S8, the calculation formula is B=|A-ζ-y max |.

[0021] According to some embodiments of the present application, in step S5, a finite element model of the ultrasonic vibration amplitude rod is first established, the vibration mode of the amplitude rod is analyzed, the positions of the observation point and the target point are determined, and the vibration amplitude ratios λ1, λ2, λ3, λ4, λ5, λ6 between the observation point and the target point during the machining of the first correction section, the rough machining section, the second correction section, the finish machining section, the third correction section, and the tooth profile machining section are calculated respectively, the vibration amplitudes of the target point in the first correction section, the rough machining section, the second correction section, the finish machining section, the third correction section, and the tooth profile machining section are calculated respectively, and the calculation is performed through the formula i=1~6. the value of ζ is calculated by the formula the value of ζ is calculated by the formula

[0022] According to some embodiments of the present application, in the step S3, the formula for calculating the damping ratio ξ is

[0023] Additional aspects and advantages of the present application will be made apparent from the following description, which, taken in conjunction with the accompanying drawings, illustrates a few embodiments of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0024] The present application will be further described below with reference to the drawings and embodiments, wherein:

[0025] Figure 1 is a cross-sectional view of the mounting structure of an embodiment of the present application;

[0026] Figure 2 is a schematic view of a broach of an embodiment of the present application.

[0027] REFERENCE NUMERALS

[0028] Gear 100;

[0029] Ultrasonic vibration amplitude horn 200;

[0030] First connecting fixing member 300;

[0031] Second connecting fixing member 400;

[0032] Ultrasonic vibration clamp device 500;

[0033] Broach 600, first correction section 610, rough machining section 620, second correction section 630, finish machining section 640, third correction section 650, tooth profile machining section 660;

[0034] Ultrasonic transducer 700. DETAILED DESCRIPTION

[0035] Embodiments of the present application are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the accompanying drawings are exemplary and are only used to explain the present application and cannot be understood as a limitation of the present application.

[0036] In the description of the application, it is to be understood that the orientation description, such as the orientation or position relationship indicated by up, down, etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the application.

[0037] In the description of the application, more refers to more than two. If there is a description of first, second, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the sequence of technical features indicated.

[0038] In the description of the application, unless otherwise explicitly limited, the words such as setting, installation, connection, etc. should be broadly understood, and those skilled in the art can reasonably determine the specific meaning of the above words in the application in combination with the specific content of the technical scheme.

[0039] Reference Figure 1 and Figure 2As shown, the application provides an ultrasonic auxiliary high-speed broaching small modulus cylindrical internal gear device for machining gear 100, comprising: an ultrasonic vibration amplitude rod 200, a first connecting fixing part 300, a second connecting fixing part 400, an ultrasonic vibration clamp device 500, a broach 600, the ultrasonic vibration amplitude rod 200 vibrates at a fixed frequency; the ultrasonic vibration amplitude rod 200 amplifies mechanical vibration, so that energy can be concentrated on the first connecting fixing part 300 and the second connecting fixing part 400, the first connecting fixing part 300 is connected to the ultrasonic vibration amplitude rod 200; the second connecting fixing part 400 is connected to the ultrasonic vibration amplitude rod 200, and the first connecting fixing part 300 and the second connecting fixing part 400 vibrate together with the ultrasonic vibration amplitude rod 200. The distance from the connecting point of the first connecting fixing part 300 and the ultrasonic vibration amplitude rod 200 to the connecting point of the second connecting fixing part 400 and the ultrasonic vibration amplitude rod 200 is an odd multiple of the half wavelength of the resonant wave in the ultrasonic vibration amplitude rod 200. Therefore, the first connecting fixing part 300 and the second connecting fixing part 400 vibrate in opposite phases. When the first connecting fixing part 300 is at the highest displacement, the second connecting fixing part 400 is at the lowest displacement, and when the first connecting fixing part 300 is at the lowest displacement, the second connecting fixing part 400 is at the highest displacement. The ultrasonic vibration clamp device 500 is used to fix the gear 100, and the specific structure of the ultrasonic vibration clamp device 500 is the prior art, so it will not be described in detail. The left and right ends of the ultrasonic vibration clamp device 500 are respectively welded to the first connecting fixing part 300 and the second connecting fixing part 400. Because the first connecting fixing part 300 and the second connecting fixing part 400 vibrate in opposite phases, the left and right ends of the ultrasonic vibration clamp device 500 also vibrate in opposite phases, so that the ultrasonic vibration clamp device 500 makes reciprocating swing with its center of mass as the center of rotation. The specific structure of the broach 600 is the prior art, so it will not be described in detail. The broach 600 is provided with a first correction section 610, a rough machining section 620, a second correction section 630, a finishing section 640, a third correction section 650, and a tooth profile machining section 660, which are sequentially arranged to perform broaching machining on the gear 100. The broach 600 is driven by a hydraulic device. When the broach 600 passes through the center of the gear 100, multiple teeth on the outer wall of the broach 600 cut off a very thin metal layer from the workpiece in turn, so as to machine the gear 100 into the required shape. The gear 100 is driven to vibrate by the ultrasonic vibration clamp device 500, so that the cutting force is concentrated in a very small range of the teeth, and due to the impact of the teeth, the ultrasonic wave is transmitted in the shear area of the gear 100, reducing the shear strength of the material in front of the teeth and the contact length of the tool and the chip. Improve tool life and reduce overall cutting resistance.

[0040] Reference Figure 1 and Figure 2As shown, it can be understood that the ultrasonic vibration amplitude rod 200 is connected with the ultrasonic transducer 700, the ultrasonic transducer 700 is connected with the power supply, the ultrasonic transducer 700 is used for converting electric energy into vibrating mechanical energy, and the ultrasonic vibration amplitude rod 200 is used for amplifying the vibration generated by the ultrasonic transducer 700. The ultrasonic transducer 700 is connected to the ultrasonic vibration amplitude rod 200, and the function of the ultrasonic transducer 700 is to convert the input electric power into mechanical power, that is, ultrasonic waves, and then transmit the ultrasonic waves to the ultrasonic vibration amplitude rod 200. The ultrasonic transducer 700 selects a piezoelectric transducer.

[0041] Referring to Figure 1 and Figure 2 As shown, it can be understood that the gear 100 is fixed in the ultrasonic vibration clamp device 500 in a left and right adjustable position. The gear 100 is away from the swing rotation center of the ultrasonic vibration clamp device 500, so that the vibration amplitude of the gear 100 is increased, and the vibration amplitude of the gear 100 is adjusted under the condition that the output power of the ultrasonic transducer 700 is unchanged.

[0042] The application also provides a use method of the ultrasonic auxiliary high-speed broaching small modulus cylindrical internal gear device, and the method is realized by applying the ultrasonic auxiliary high-speed broaching small modulus cylindrical internal gear device, and includes the following steps:

[0043] Step S1, a cutting force coefficient identification test is carried out, wherein the material is consistent with the material of the small modulus gear 100, and the tool is consistent with the broach 600. The specific operation process of the cutting force coefficient identification test is the prior art, and therefore will not be described in detail. The cutting force coefficient k rc and the cutting edge coefficient k te are measured. The cutting width of the first correction section 610, the rough machining section 620, the second correction section 630, the finishing section 640, the third correction section 650 and the tooth profile machining section 660 on the gear 100 is s(i), i=1,…,6, and the cutting depth is h(i), i=1,…,6;

[0044] Step S2, the cutting force F S (i), i=1,…,6 of the first correction section 610, the rough machining section 620, the second correction section 630, the finishing section 640, the third correction section 650 and the tooth profile machining section 660 are calculated respectively.

[0045] Step S3, modal test is conducted on the ultrasonic-assisted high-speed broaching device for small modulus cylindrical internal gear described above. The modal test is a vibration test for measuring modal parameters of a linear vibration system, the specific operation process is prior art, and will not be described in detail. The modal mass m1 of the overall ultrasonic-assisted high-speed broaching device for small modulus cylindrical internal gear described above is measured, and the radial damping coefficient and modal stiffness are measured as c1, ψ1, and the vibration mode frequency w and the natural frequency w n of the overall system are measured. The damping coefficient identification test is conducted on the ultrasonic-assisted high-speed broaching device for small modulus cylindrical internal gear described above as a whole at different cutting speeds, the cutting damping c of the ultrasonic-assisted high-speed broaching device for small modulus cylindrical internal gear described above is measured, and the damping ratio ξ is calculated, wherein the vibration mode frequency w of the overall system is obtained by measuring the vibration frequency under the excitation of the cutting force F S (1)+F S (2)+F S (3)+F S (4)+F S (5)+F S (6); n The natural frequency w

[0046] Step S4, the distance l between the first correction section 610, the rough machining section 620, the second correction section 630, the finishing section 640, the third correction section 650, and the tooth profile machining section 660 is measured, and the cutting speed v is calculated. The broaching force excitation frequency f and the time period T of the adjacent tooth entering the cutting interval are calculated.

[0047] Step S5, the ultrasonic vibration amplitudes ζ1, ζ2, ζ3, ζ4, ζ5, ζ6 of the observation points on the ultrasonic vibration amplitude rod 200 when the first correction section 610, the rough machining section 620, the second correction section 630, the finishing section 640, the third correction section 650, and the tooth profile machining section 660 are used to machine the gear 100 are measured in sequence, and the average value ζ of the target point vibration amplitudes of the first correction section 610, the rough machining section 620, the second correction section 630, the finishing section 640, the third correction section 650, and the tooth profile machining section 660 is calculated. The target point is the contact point between the tooth of the broach (600) and the gear (100), i.e. the cutting point. Since it is difficult to directly measure the vibration of the cutting point, the vibration amplitude of the observation point on the ultrasonic vibration amplitude rod is measured by the laser vibration measuring instrument, and the observation point is a part on the ultrasonic vibration amplitude rod which is convenient for measuring by the instrument.

[0048] Step S6, the radial displacements yi, i=1,…,6 of the first correction section 610, the rough machining section 620, the second correction section 630, the finishing section 640, the third correction section 650, and the tooth profile machining section 660 are calculated respectively.

[0049] Step S7, taking the maximum value of the displacement yi, i = 1, …, 6, defined as y max ;

[0050] Step S8, the experimental measurement of the cutting depth optimization limit value A, and then calculate the actual machining machine cutting depth set value B.

[0051] It can be understood that the calculation formula in step S2 is F s (i) = s(i)k te + s(i)k rc h(i).

[0052] It can be understood that the calculation formula in step S4 is,

[0053] It can be understood that the broaching machining dynamics model is:

[0054]

[0055] F s (i) = s(i)k te + s(i)k rc h(i),

[0056] Since the cutting force of the first correction section 610, the rough machining section 620, the second correction section 630, the finishing section 640, the third correction section 650, and the tooth profile machining section 660 is an interval periodic function, according to Fourier series expansion, the cutting force is

[0057]

[0058] Considering the fitting accuracy and simplification, the cutting force is expanded according to the Fourier series, and the first Fourier series is taken as the approximate value, and the cutting force is respectively:

[0059]

[0060] Wherein, According to the superposition method, the displacement of the dynamics model is:

[0061] Wherein, Analyzing the above formula, it can be seen that as j increases, the displacement will gradually decrease, and the corresponding term will tend to zero. Therefore, the first term is taken as the approximate result of the amplitude displacement of the machining system in this scheme. Then the amplitude displacement is:

[0062]

[0063] It can be understood that in step S8, the calculation formula is B = |A-ζ-y maxThe cutting depth optimization limit value A can be determined by conducting simulation experiments with different cutting depths, followed by measuring the workpiece surface roughness and residual stress. The cutting depth affects the workpiece surface roughness and residual stress. The surface roughness and residual stress of a qualified gear 100 need to be controlled within a certain range. The maximum allowable cutting depth for a qualified gear 100, measured experimentally, is the cutting depth optimization limit value A. In actual machining, the machine tool's cutting depth setting value B is equal to A - ζ - y. max The absolute value of the value is used to avoid the maximum cutting depth exceeding the optimized limit due to vibration, which could lead to tool breakage and workpiece damage.

[0064] Understandably, in step S5, a finite element model of the ultrasonic vibration amplitude transformer 200 is first established, the vibration modes of the amplitude transformer are analyzed, the positions of the observation point and the target point are determined, and the vibration amplitude ratios λ1, λ2, λ3, λ4, λ5, and λ6 between the observation point and the target point during the processing of the first correction segment 610, the roughing segment 620, the second correction segment 630, the finishing segment 640, the third correction segment 650, and the tooth profile machining segment 660 are calculated respectively. The vibration amplitudes of the target point in the first correction segment 610, roughing segment 620, second correction segment 630, finishing segment 640, third correction segment 650, and tooth profile machining segment 660 are respectively calculated using the formula... Calculate using i = 1 to 6. The value, through the formula Calculate the value of ζ.

[0065] Understandably, in step S3, the formula for calculating the damping ratio ξ is:

[0066] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A device for ultrasonically assisted high-speed broaching of small-module cylindrical internal gears, used for machining gears (100), characterized in that, include: An ultrasonic vibration amplitude transformer (200) vibrates at a fixed frequency; The first connecting fastener (300) is connected to the ultrasonic vibration amplitude transformer (200); The second connecting fastener (400) is connected to the ultrasonic vibration amplitude transformer (200). The distance from the connection point between the first connecting fastener (300) and the ultrasonic vibration amplitude transformer (200) to the connection point between the second connecting fastener (400) and the ultrasonic vibration amplitude transformer (200) is an odd multiple of half the wavelength of the resonant wave in the ultrasonic vibration amplitude transformer (200). An ultrasonic vibration clamping device (500) is used to fix the gear (100). The left and right ends of the ultrasonic vibration clamping device (500) are respectively connected to the first connecting fastener (300) and the second connecting fastener (400). A broach (600) is provided with a first correction section (610), a roughing section (620), a second correction section (630), a finishing section (640), a third correction section (650), and a tooth profile machining section (660) for sequentially broaching the gear (100).

2. The device for ultrasonic-assisted high-speed broaching of small-module cylindrical internal gears according to claim 1, characterized in that: The ultrasonic vibration amplitude rod (200) is connected to an ultrasonic transducer (700), which is connected to a power source. The ultrasonic transducer (700) is used to convert electrical energy into mechanical energy of vibration, and the ultrasonic vibration amplitude rod (200) is used to amplify the vibration generated by the ultrasonic transducer (700).

3. The device for ultrasonically assisted high-speed broaching of small-module cylindrical internal gears according to claim 2, characterized in that: The gear (100) is fixed in the ultrasonic vibration clamp device (500) with an adjustable left and right position.

4. A method of using an ultrasonic-assisted high-speed broaching device for small-module cylindrical internal gears, wherein the method is implemented by applying the ultrasonic-assisted high-speed broaching device for small-module cylindrical internal gears as described in any one of claims 1 to 3, characterized in that... The method includes the following steps: Step S1, Measure the cutting force coefficient With cutting edge coefficient The cutting widths of the first correction section (610), the roughing section (620), the second correction section (630), the finishing section (640), the third correction section (650), and the tooth profile machining section (660) on the gear (100) are measured respectively. , The cutting depth is , ; Step S2: Calculate the cutting forces of the first correction segment (610), the roughing segment (620), the second correction segment (630), the finishing segment (640), the third correction segment (650), and the tooth profile machining segment (660), respectively. F S ( i ), ; Step S3: Perform modal testing on the entire device for ultrasonic-assisted high-speed broaching of small-module cylindrical internal gears and measure its modal quality. The measured radial damping coefficient and modal stiffness were respectively... The frequency of the overall vibration mode was measured. and natural frequency The device for ultrasonic-assisted high-speed broaching of small-module cylindrical internal gears was subjected to damping coefficient identification tests at different cutting speeds, and the cutting damping was measured. c The damping ratio was calculated. ; Step S4: Measure the distance between the first correction section (610), the roughing section (620), the second correction section (630), the finishing section (640), the third correction section (650), and the tooth profile machining section (660). With cutting speed Calculate the excitation frequency of the broaching force. The cutting interval period T between adjacent cutting teeth; Step S5: Sequentially measure the ultrasonic vibration amplitude at the observation point on the ultrasonic vibration amplitude transformer (200) during the machining of the gear (100) in the first correction section (610), the rough machining section (620), the second correction section (630), the finish machining section (640), the third correction section (650), and the tooth profile machining section (660). , , , , , The average value of the vibration amplitude at the target point of the first correction segment (610), the roughing segment (620), the second correction segment (630), the finishing segment (640), the third correction segment (650), and the tooth profile machining segment (660) is calculated. ; Step S6: Calculate the vertical displacement of the first correction segment (610), the roughing segment (620), the second correction segment (630), the finishing segment (640), the third correction segment (650), and the tooth profile machining segment (660), respectively. y ( i ), ; Step S7, take the displacement y ( i ), The maximum value in is defined as ; Step S8: Perform an experimental measurement of the optimized limit value A of the cutting depth, and then calculate the cutting depth setting value B of the machine tool in actual machining.

5. The method of using the ultrasonic-assisted high-speed broaching device for small-module cylindrical internal gears according to claim 4, characterized in that: The calculation formula in step S2 is: .

6. The method of using the ultrasonic-assisted high-speed broaching device for small-module cylindrical internal gears according to claim 5, characterized in that: The calculation formula in step S4 is as follows: , .

7. The method of using the ultrasonic-assisted high-speed broaching device for small-module cylindrical internal gears according to claim 6, characterized in that: In step S8, the calculation formula is as follows: .

8. The method of using the ultrasonic-assisted high-speed broaching device for small-module cylindrical internal gears according to claim 7, characterized in that: In step S5, a finite element model of the ultrasonic vibration amplitude transformer (200) is first established, the vibration modes of the amplitude transformer are analyzed, the positions of the observation point and the target point are determined, and the vibration amplitude ratio between the observation point and the target point during the processing of the first correction section (610), the roughing section (620), the second correction section (630), the finishing section (640), the third correction section (650), and the tooth profile processing section (660) is calculated respectively. , , , , , , The vibration amplitudes of the target point in the first correction segment (610), roughing segment (620), second correction segment (630), finishing segment (640), third correction segment (650), and tooth profile machining segment (660) are respectively calculated using the formula. To calculate , , , , , The value, through the formula ,calculate The value.

9. The method of using the ultrasonic-assisted high-speed broaching device for small-module cylindrical internal gears according to claim 4, characterized in that: In step S3, the damping ratio is calculated. The formula is , .

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