A cleaning device for a glue spraying head of a mask plate gluing machine

Abstract

The application discloses a glue spraying head cleaning device of a mask plate gluing machine, which comprises a cleaning platform, a cleaning mechanism and a rotary driving mechanism; the cleaning mechanism comprises a plurality of elastic sheets arranged vertically, the elastic sheet has a fixed end and a free end, the fixed end is fixedly connected with the cleaning platform, and the distance between the fixed end and the rotary shaft of the cleaning mechanism is greater than the outer diameter of the glue spraying head; the free end extends upward, and the distance between the free end and the cleaning platform is adapted to the length of the glue spraying head; the elastic sheet further has an inner side surface facing the rotary shaft of the cleaning mechanism, a first flexible cleaning layer is fixed on the inner side surface, and the surface of the first flexible cleaning layer facing the rotary shaft of the cleaning mechanism is a cleaning surface; the glue spraying head cleaning device of the application can automatically clean the glue spraying head of the gluing machine, is simple and quick to operate, has good cleaning effect, and does not affect the production rhythm.

Description

Technical Field

[0001] This invention relates to the field of photomask coating machine technology, and more specifically to a cleaning device for the coating nozzle of a photomask coating machine. Background Technology

[0002] Photomasks are essential tools used in the semiconductor industry to create intricate patterns. They enable rapid replication of target patterns, making mass production of semiconductor and display devices possible. As the master pattern, the photomask's fabrication process demands high precision and quality. It involves processes such as chrome plating, resist coating, photolithography, development, etching, removal, inspection, and repair on a quartz or other material surface that meets transmittance and flatness requirements. Currently, two methods are used for resist coating: slot coating and spin coating. Spin coating uses a nozzle to spray photoresist onto a chrome plate, then high-speed rotation spreads the photoresist evenly, achieving a relatively uniform photoresist layer with a thickness below 1000nm.

[0003] After each coating process, a small amount of photoresist will splatter onto the outer wall of the coating machine nozzle. After several such splatters, cleaning is necessary. Additionally, if the coating nozzle is left for more than 6 hours, surface drying and condensation will occur. If not cleaned, this can lead to foreign matter or uneven coating. Current coating equipment lacks automatic cleaning devices, requiring operators to manually clean the equipment. Personnel entering the equipment can disrupt production cycles, contaminate the equipment with dust, expose personnel to close contact with photoresist, and cause inhalation of volatile substances. Furthermore, the effectiveness of manual cleaning is difficult to guarantee. Summary of the Invention

[0004] The purpose of this invention is to provide a cleaning device for the glue spray nozzle of a mask glue coating machine, which can automatically clean the glue spray nozzle of the glue coating machine. The operation is simple and fast, the cleaning effect is good, and it does not affect the production cycle.

[0005] The present invention provides a cleaning device for the glue spray nozzle of a mask glue applicator, comprising a cleaning platform, wherein a cleaning mechanism and a rotary drive mechanism for driving the cleaning mechanism to rotate are provided on the cleaning platform.

[0006] The cleaning mechanism includes several vertically arranged elastic plates, each elastic plate having a fixed end and a free end. The fixed end is fixedly connected to the cleaning platform, and the distance between the fixed end and the rotating shaft of the cleaning mechanism is greater than the outer diameter of the adhesive spray nozzle. The free end extends upward, and the distance between the free end and the cleaning platform is adapted to the length of the adhesive spray nozzle.

[0007] The elastic sheet also has an inner side facing the rotation axis of the cleaning mechanism, and a first flexible cleaning layer is fixed on the inner side. The surface of the first flexible cleaning layer facing the rotation axis of the cleaning mechanism is the cleaning surface.

[0008] The elastic sheet has a first state, a second state, and a third state;

[0009] When the elastic sheet is in the first state, the rotary drive mechanism is not working, the elastic sheet is stationary, the free end tilts and resets towards the rotating shaft of the cleaning mechanism, and the distance between the cleaning surface and the rotating shaft of the cleaning mechanism is less than the outer diameter of the adhesive spray nozzle.

[0010] When the elastic sheet is in the second state, the rotary drive mechanism works, the elastic sheet rotates at high speed around the rotating shaft of the cleaning mechanism, the free end tilts away from the rotating shaft of the cleaning mechanism, and the distance between the cleaning surface and the rotating shaft of the cleaning mechanism is greater than the outer diameter of the glue spray nozzle.

[0011] When the elastic sheet is in the third state, the rotary drive mechanism is working, the elastic sheet rotates at low speed around the rotating shaft of the cleaning mechanism, the free end is tilted away from the rotating shaft of the cleaning mechanism, the distance between the cleaning surface and the rotating shaft of the cleaning mechanism is adapted to the outer diameter of the adhesive spray nozzle; the cleaning surface contacts and rubs against the outer peripheral surface of the adhesive spray nozzle.

[0012] Preferably, the rotary drive mechanism includes a rotary motor disposed at the bottom of the cleaning platform. The axis of the rotary motor is vertical and coincides with the rotation axis of the cleaning mechanism. The motor axis of the rotary motor extends upward and is fixedly connected to a connecting seat. The connecting seat is placed on the bottom surface of the cleaning platform and fixedly connected to the cleaning platform.

[0013] Preferably, the rotary motor is a DC motor or an AC motor equipped with a frequency converter.

[0014] Preferably, the elastic sheet has an arc-shaped cross-section, with an inner arc surface and an outer arc surface, the inner arc surface being the inner surface; the radius of the inner arc surface is adapted to the outer diameter of the adhesive spray nozzle, and the chord length of the inner arc surface is smaller than the diameter of the inner arc surface.

[0015] Preferably, the fixed end is connected to an mounting plate, which is fixed to the outer side of the outer arc surface and detachably installed with the cleaning platform; the mounting plate and the elastic sheet are integrally formed, and the included angle between the mounting plate and the elastic sheet is an obtuse angle.

[0016] Preferably, the elastic sheet is a metal sheet or a flexible plastic sheet.

[0017] Preferably, the cleaning platform is provided with a second flexible cleaning layer, which contacts the outer end face of the adhesive spray nozzle during cleaning.

[0018] Preferably, the first flexible cleaning layer is formed by brush bristles fixed on the inner side surface, or by non-woven fabric fixed on the inner side surface; the second flexible cleaning layer is formed by brush bristles fixed on the cleaning platform, or by non-woven fabric fixed on the cleaning platform.

[0019] Preferably, the adhesive spray nozzle cleaning device further includes a cleaning cylinder having a cavity with an opening at the top to form a feeding port; the cleaning platform is placed inside the cavity; the feeding port is positioned higher than the free end; during cleaning, the adhesive spray nozzle extends into the cleaning mechanism through the feeding port.

[0020] Preferably, the inner bottom surface of the cleaning cylinder is set as an inclined surface, and a drain port is provided at the lower end of the inclined surface. A plurality of nozzles are provided on the inner wall of the cleaning cylinder, and the nozzles are positioned facing the cleaning surface. A cleaning liquid delivery pump is connected to each nozzle, and the inlet of the cleaning liquid delivery pump is connected to a cleaning liquid storage tank. The nozzles are located on the inner wall of the cleaning cylinder between two adjacent elastic plates. A rotary motor is located below the cleaning cylinder, and the motor axis of the rotary motor passes through the inner bottom surface of the cleaning cylinder and is fixedly connected to the cleaning platform.

[0021] The beneficial effects of the adhesive spray nozzle cleaning device for a mask adhesive coating machine according to the technical solution of the present invention are:

[0022] 1. The cleaning mechanism enables automatic cleaning of the glue spray nozzles. It is simple to operate, fast to clean, and has a good cleaning effect. No operator is required to enter the equipment, so it does not affect the production cycle.

[0023] 2. By designing and using the elastic sheet, the centrifugal force of rotation opens the elastic sheet area, making it easier for the adhesive spray nozzle to enter the cleaning mechanism. The low-speed rotating elastic sheet adheres to the adhesive spray nozzle, ensuring sufficient friction between the cleaning surface and the outer circumference of the adhesive spray nozzle, thus ensuring the cleaning effect. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the adhesive spray nozzle cleaning device for a mask adhesive applicator according to this solution.

[0025] Figure 2 This is an isometric view of the nozzle cleaning device for a mask glue applicator according to this solution.

[0026] Figure 3 This is a schematic diagram of the cleaning mechanism in this solution.

[0027] Figure 4 This is a cross-sectional view of the cleaning mechanism in this solution.

[0028] Figure 5 This is a schematic diagram of the cleaning mechanism in this solution.

[0029] Figure 6 This is a schematic diagram of another embodiment of the cleaning mechanism in this solution.

[0030] Figure 7 This diagram shows the installation locations of the glue spray nozzle cleaning device and the glue applicator in this solution. Detailed Implementation

[0031] To facilitate understanding of the technical solution of the present invention by those skilled in the art, the technical solution of the present invention will now be further described in conjunction with specific embodiments and the accompanying drawings.

[0032] like Figure 7 As shown, the existing mask coating machine has a coating platform 101, a coating nozzle 100, a coating robotic arm 103 for moving the coating nozzle 100, and a nozzle storage tank 102 for temporarily storing the coating nozzle 100. The coating robotic arm 103 can control the movement of the coating nozzle 100 in a three-dimensional coordinate system, that is, control the movement, swinging, lifting, and other operations of the coating nozzle 100, all of which are controlled by the programmable control system on the mask coating machine itself. When the photomask coating machine is performing the coating operation, the programmable control system controls the coating robot arm 103 through the set program. The coating robot arm 103 drives the coating nozzle 100 to move to the coating platform 101 and sprays photoresist onto the photomask on the coating platform 101. After the spraying is completed, the coating robot arm 103 drives the coating nozzle 100 to the nozzle storage tank 102 and inserts the coating nozzle 100 into the nozzle storage tank 102 for temporary storage.

[0033] Based on the above-mentioned photomask coating process, a photomask cleaning device 200 is added next to the nozzle storage tank 102. After the photomask 100 sprays photoresist onto the photomask on the coating platform 101, the coating robot arm 103 first moves the photomask 100 to the photomask cleaning device 200 and inserts the photomask 100 into the photomask cleaning device 200 for cleaning. After cleaning, the coating robot arm 103 continues to move the photomask 100 to the position of the nozzle storage tank 102 and inserts it into the nozzle storage tank 102 for temporary storage. In this way, automatic cleaning of the coating nozzle 100 only requires adding a coating nozzle cleaning device 200 near the nozzle storage tank 102. The cleaning can be achieved by using the programmable control system on the mask coating machine to control the coating nozzle to enter and exit the coating nozzle cleaning device 200. The structure is simple, easy to install and layout, and can be easily connected to the coating machine without changing the structure, working mode and process of the mask coating machine itself.

[0034] Meanwhile, the use of the adhesive spray nozzle cleaning device 200 in this solution also avoids the need for operators to enter the equipment to clean the adhesive spray nozzle 100, thus avoiding the possibility of contamination inside the equipment.

[0035] The biggest advantage of using the coating nozzle cleaning device 200 is that it does not affect the production cycle. With the coating nozzle cleaning device 200, operators do not need to enter the equipment. The device automatically cleans the coating nozzles, meaning the coating machine does not need to be stopped for cleaning, thus not affecting the production cycle. The cleaning frequency and timing can be adjusted according to the production cycle, allowing the nozzle cleaning to be synchronized with the normal coating operation. For example, after the coating nozzle 100 sprays photoresist onto the photomask, it withdraws from above the photomask. At this time, the photomask needs to be rotated at high speed to evenly distribute the photoresist. The coating nozzle 100 can then enter the coating nozzle cleaning device 200 for cleaning, and after cleaning, it is temporarily stored in the nozzle storage tank 102.

[0036] To facilitate a better understanding of the adhesive spray nozzle cleaning device 200 in this solution by those skilled in the art, the adhesive spray nozzle cleaning device 200 will be described in detail below.

[0037] like Figure 3 As shown, the present invention provides a cleaning device for the adhesive nozzle of a mask adhesive applicator, comprising a cleaning platform 1, on which a cleaning mechanism 201 and a rotary drive mechanism 6 are mounted. During cleaning, the adhesive nozzle 100 extends into the cleaning mechanism 201, and the rotary drive mechanism 6 drives the cleaning mechanism 201 to move relative to the adhesive nozzle 100, thereby rubbing the parts of the adhesive nozzle 100 to be cleaned and cleaning the nozzle 100. The automatic rotation of the cleaning mechanism 201 replaces manual cleaning, improving cleaning efficiency and preventing personnel from entering the equipment, thus avoiding the risk of contamination and disruption to production.

[0038] In this plan, such as Figure 3 and Figure 4 As shown, the cleaning mechanism 201 includes several vertically arranged elastic plates 2, each elastic plate 2 having a fixed end 21 and a free end 22. The fixed end 21 is fixedly connected to the cleaning platform 1, and the distance between the fixed end 21 and the rotating shaft 10 of the cleaning mechanism is greater than the outer diameter of the adhesive nozzle 100, ensuring that the adhesive nozzle 100 can smoothly extend into the area enclosed by the elastic plates to clean the adhesive nozzle 100. The free end 22 extends upward, and the distance between the free end 22 and the cleaning platform 1 is adapted to the length of the adhesive nozzle 100, allowing the adhesive nozzle to fully extend into the cleaning mechanism 201 to clean the entire adhesive nozzle 100 and avoid leaving cleaning dead corners on the adhesive nozzle 100.

[0039] In this plan, such as Figure 3 and Figure 4As shown, the elastic sheet 2 also has an inner surface 23 facing the rotating shaft 10 of the cleaning mechanism. A first flexible cleaning layer 3 is fixed on the inner surface 23, and the surface of the first flexible cleaning layer 3 facing the rotating shaft 10 of the cleaning mechanism is the cleaning surface 31. During cleaning, the adhesive spray nozzle 100 contacts the cleaning surface 31 to achieve cleaning.

[0040] In this plan, such as Figure 5 As shown, the elastic sheet 2 has a first state 20, a second state 30, and a third state 40.

[0041] First state 20 Figure 5 As shown in (a), this state indicates that the cleaning mechanism 201 is not in operation. When the elastic sheet 2 is in the first state 20, the rotary drive mechanism 6 is not working, the elastic sheet 2 is stationary, and the free end 22 tilts back towards the rotating shaft 10 of the cleaning mechanism. The distance between the cleaning surface 31 and the rotating shaft 10 of the cleaning mechanism is less than the outer diameter of the adhesive spray nozzle 100. That is, when the elastic sheet is stationary, it is clamped inward under its own elastic force, and the cross-section of the area enclosed by all the cleaning surfaces 31 is less than the outer diameter of the adhesive spray nozzle 100.

[0042] Second state 30, as shown Figure 5 As shown in (b), this state is the high-speed rotation state of the cleaning mechanism 201. When the elastic sheet 2 is in the second state 30, the rotation drive mechanism 6 works, and the elastic sheet 2 rotates at high speed around the rotation axis 10 of the cleaning mechanism. The free end 22 tilts away from the rotation axis 10 of the cleaning mechanism, and the distance between the cleaning surface 31 and the rotation axis 10 of the cleaning mechanism is greater than the outer diameter of the adhesive spray nozzle 100. In the second state, the cleaning mechanism 201 rotates at high speed, and the elastic sheet tilts and expands outward under the action of centrifugal force due to its own elasticity. The cross-section of the area enclosed by the inner surfaces 23 of all the elastic sheets is greater than the outer diameter of the adhesive spray nozzle. At this time, the first flexible cleaning layer 3 also opens outward due to centrifugal force. The cross-section of the area enclosed by all the cleaning surfaces 31 is greater than the outer diameter of the adhesive spray nozzle 100. At this time, the adhesive spraying robot arm 103 drives the adhesive spray nozzle into the area enclosed by the cleaning surfaces 31, so that the adhesive spray nozzle can smoothly enter the cleaning mechanism 201.

[0043] Before the adhesive spray nozzle is cleaned and before the cleaning mechanism starts rotating, the first flexible cleaning layer 3 and the second flexible cleaning layer 5 have already been sprayed with enough cleaning liquid. The high-speed rotation of the cleaning mechanism can throw off the excess cleaning liquid on the first flexible cleaning layer 3 and the second flexible cleaning layer 5, avoiding the problem of too much cleaning liquid residue on the adhesive spray nozzle after cleaning.

[0044] Third state 40, as shown Figure 5As shown in (c), this state is the low-speed rotation state of the cleaning mechanism 201. When the elastic sheet 2 is in the third state 40, the rotation drive mechanism 6 works, the elastic sheet 2 rotates at low speed around the rotating shaft 10 of the cleaning mechanism, the free end 22 tilts away from the rotating shaft 10 of the cleaning mechanism, and the distance between the cleaning surface 31 and the rotating shaft 10 of the cleaning mechanism is adapted to the outer diameter of the adhesive spray nozzle 100. The third state 40 is the working state following the second state 30. In the third state 40, the rotation speed of the cleaning mechanism 201 is lower than that in the second state 30. At this time, the elastic sheet is tilted outward compared to the first state, but compared to the second state, the elastic sheet is reduced by centrifugal force and will recover a certain distance inward. At this time, the cleaning surface 31 is pressed against the outer peripheral surface of the adhesive spray nozzle 100 under the action of the restoring force of the elastic sheet. That is, the cleaning surface 31 contacts and rubs against the outer peripheral surface of the adhesive spray nozzle 100, thereby cleaning the outer peripheral surface of the adhesive spray nozzle 100. The cleaning surface 31 being pressed against the outer peripheral surface of the adhesive spray nozzle 100 also ensures the cleaning effect of the outer peripheral surface of the adhesive spray nozzle 100.

[0045] Based on the above technical solution, this solution utilizes an elastic sheet and controls its rotation speed to provide sufficient space for the glue-applying nozzle 100 to feed the material smoothly (the glue-applying nozzle enters the cleaning mechanism and is placed within the area enclosed by the cleaning surface 31). Simultaneously, it provides sufficient cleaning force for the glue-applying nozzle 100, ensuring cleaning effectiveness and efficiency.

[0046] Based on the above technical solution, by controlling the rotation speed of the cleaning mechanism, the position and state of the elastic sheet and the cleaning surface can be controlled. This method is simple to operate and control, and also simplifies the structure of the cleaning mechanism, facilitating its layout and installation within the glue applicator. By controlling the rotation speed of the elastic sheet, the amount of pressure applied to the first flexible cleaning layer 3 on the glue applicator nozzle 100 can be controlled, thereby achieving control over the cleaning force, cleaning effect, and cleaning efficiency.

[0047] In this technical solution, the rotary drive mechanism 6 includes a rotary motor 61 disposed at the bottom of the cleaning platform 1. The axis of the rotary motor 61 is vertical and coincides with the rotation axis 10 of the cleaning mechanism. The motor axis of the rotary motor 61 extends upward and is fixedly connected to a connecting seat 62. The connecting seat 62 is placed on the bottom surface of the cleaning platform 1 and fixedly connected to the cleaning platform 1. By setting the connecting seat 62, a detachable connection with the cleaning platform 1 is achieved, which facilitates the overall replacement of the cleaning platform 1. When it is necessary to replace the cleaning mechanism or the first flexible cleaning layer 3 within the cleaning mechanism, the cleaning platform 1 together with the cleaning mechanism can be disassembled and replaced. The operation is simple and quick and does not affect the production cycle.

[0048] In this solution, the rotary motor 61 is a DC motor or an AC motor equipped with a frequency converter, which makes it easy to adjust and control the output speed of the rotary motor 61, thereby easily controlling the rotation speed of the cleaning mechanism.

[0049] In this design, the elastic sheet 2 has an arc-shaped cross-section, with an inner arc surface and an outer arc surface. The inner arc surface is the inner surface 23. The radius of the inner arc surface of the elastic sheet 2 is adapted to the outer diameter of the adhesive spray nozzle 100, increasing the contact area between the cleaning surface and the outer peripheral surface of the adhesive spray nozzle 100, thus improving cleaning efficiency. It also increases the clamping force of the cleaning surface compared to the outer peripheral surface of the adhesive spray nozzle 100, thereby improving the cleaning effect. The chord length of the inner arc surface is less than the diameter of the inner arc surface, and a gap is left between adjacent elastic sheets to avoid interference between adjacent elastic sheets when they reset inward or expand outward. At the same time, there is a gap between adjacent elastic sheets, that is, there is also a gap between adjacent cleaning surfaces. This allows excess cleaning liquid or cleaning waste liquid on the first flexible cleaning layer 3 to be discharged through the gap between adjacent cleaning surfaces, preventing excessive cleaning liquid residue on the adhesive spray nozzle after cleaning and ensuring proper subsequent adhesive application.

[0050] In this design, the fixed end 21 is connected to a mounting plate 4. The mounting plate 4 is fixed to the outer side of the outer arc surface and can be detachably installed with the cleaning platform 1, which facilitates the installation and fixing of the elastic plate to the cleaning platform, and also facilitates the replacement, maintenance and repair of the elastic plate as a whole. The mounting plate 4 and the elastic plate 2 are integrally formed, and the included angle between the mounting plate 4 and the elastic plate 2 is an obtuse angle, ensuring that when the elastic plate is stationary, it tilts inward, so that when the elastic plate rotates at low speed, it can press against the glue spray head to clean the glue spray head.

[0051] In this solution, the elastic sheet 2 is a metal sheet or a flexible plastic sheet, ensuring the strength and toughness of the elastic sheet, ensuring that the elastic sheet can expand outward when rotating at high speed, and can be pressed against the outer peripheral surface of the adhesive spray nozzle when rotating at low speed.

[0052] In this design, a second flexible cleaning layer 5 is provided on the cleaning platform 1. During cleaning, the second flexible cleaning layer 5 contacts the outer end face of the adhesive application nozzle 100. The second flexible cleaning layer 5 cleans the front end face of the adhesive application nozzle. During cleaning, the adhesive application nozzle is inserted into the cleaning mechanism to a sufficient depth, ensuring that the front end face of the nozzle is in full contact with the second flexible cleaning layer 5 on the cleaning platform 1. This provides sufficient friction between the second flexible cleaning layer 5 and the front end face of the nozzle, ensuring effective cleaning of the nozzle's front end face.

[0053] In this plan, such as Figure 3 and Figure 6 As shown, the first flexible cleaning layer 3 is formed by bristles fixed to the inner surface 23, or by non-woven fabric fixed to the inner surface 23. Figure 3 and Figure 6As shown, the second flexible cleaning layer 5 is formed by fixing brush bristles to the cleaning platform 1, or by fixing non-woven fabric to the cleaning platform 1. The brush bristles or non-woven fabric are fixed to the inner side of the elastic sheet and the cleaning platform 1 by adhesive, which is simple and quick to operate.

[0054] like Figure 4 As shown, in this solution, the cleaning device for the adhesive nozzle 100 also includes a cleaning cylinder 7. The cleaning cylinder is designed to block and collect the cleaning liquid, preventing it from overflowing or splashing onto other parts of the adhesive applicator. The cleaning cylinder 7 has a cavity with an opening at the top, forming a feed port 71. The cleaning platform 1 is placed inside the cavity; the feed port 71 is positioned higher than the free end 22. During cleaning, the adhesive nozzle 100 extends into the cleaning mechanism 201 through the feed port 71.

[0055] In this scheme, in order to facilitate the collection and discharge of cleaning waste liquid, the inner bottom surface of the cleaning cylinder 7 is set as an inclined surface 72, and a drain port 73 is set at the lower end of the inclined surface 72. The drain port 73 is connected to the outside of the waste liquid collection cylinder to realize the centralized collection and treatment of waste liquid and avoid pollution to the environment.

[0056] Several nozzles 8 are installed on the inner wall of the cleaning cylinder 7, with the nozzles 8 facing the cleaning surface 31. Before the adhesive spray nozzles clean and before the cleaning mechanism starts rotating, the nozzles 8 spray sufficient cleaning liquid onto the first flexible cleaning layer 3 and the second flexible cleaning layer 5. A cleaning liquid delivery pump is connected to the nozzle 8, and the inlet of the cleaning liquid delivery pump is connected to a cleaning liquid storage tank. The cleaning liquid delivery pump delivers the cleaning liquid and sprays it out through the nozzles 8.

[0057] The nozzle 8 is located on the inner wall of the cleaning cylinder 7 between two adjacent elastic sheets 2, ensuring that the cleaning liquid can be completely sprayed onto the first flexible cleaning layer 3 and the second flexible cleaning layer 5, avoiding waste of cleaning liquid, and also ensuring that there is enough cleaning liquid on the first flexible cleaning layer 3 and the second flexible cleaning layer 5 to ensure the cleaning effect.

[0058] To facilitate the setup, installation, and maintenance of the rotary drive mechanism 6, the rotary motor 61 is positioned below the cleaning cylinder 7, and the motor shaft 63 of the rotary motor 61 passes upward through the inner bottom surface of the cleaning cylinder 7 and is fixedly connected to the cleaning platform 1. A through hole is provided on the bottom surface of the cleaning cylinder 7, and the motor shaft 63 of the rotary motor 61 is mounted in the through hole via bearings. A sealing rubber 64 is used to seal the through hole and the motor shaft 63 of the rotary motor 61, preventing cleaning fluid from overflowing from the through hole.

[0059] The technical solution of the present invention has been described above by way of example in conjunction with the embodiments and accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any non-substantial improvements made by adopting the inventive concept and technical solution of the present invention, or the direct application of the inventive concept and technical solution to other occasions without modification, are all within the protection scope of the present invention.

Claims

1. A cleaning device for the glue spray nozzle of a mask glue coating machine, characterized in that, It includes a cleaning platform, on which a cleaning mechanism and a rotary drive mechanism for driving the cleaning mechanism to rotate are provided; The cleaning mechanism includes several vertically arranged elastic plates, each elastic plate having a fixed end and a free end. The fixed end is fixedly connected to the cleaning platform, and the distance between the fixed end and the rotating shaft of the cleaning mechanism is greater than the outer diameter of the adhesive spray nozzle. The free end extends upward, and the distance between the free end and the cleaning platform is adapted to the length of the adhesive spray nozzle. The elastic sheet also has an inner side facing the rotation axis of the cleaning mechanism, and a first flexible cleaning layer is fixed on the inner side. The surface of the first flexible cleaning layer facing the rotation axis of the cleaning mechanism is the cleaning surface. The elastic sheet has a first state, a second state, and a third state; When the elastic sheet is in the first state, the rotary drive mechanism is not working, the elastic sheet is stationary, the free end tilts and resets towards the rotating shaft of the cleaning mechanism, and the distance between the cleaning surface and the rotating shaft of the cleaning mechanism is less than the outer diameter of the adhesive spray nozzle. When the elastic sheet is in the second state, the rotary drive mechanism works, the elastic sheet rotates at high speed around the rotating shaft of the cleaning mechanism, the free end tilts away from the rotating shaft of the cleaning mechanism, and the distance between the cleaning surface and the rotating shaft of the cleaning mechanism is greater than the outer diameter of the glue spray nozzle, so that the glue spray nozzle can smoothly enter the cleaning mechanism and the high-speed rotation of the cleaning mechanism can throw off the excess cleaning liquid on the first flexible cleaning layer. When the elastic sheet is in the third state, the rotary drive mechanism is working, the elastic sheet rotates at low speed around the rotating shaft of the cleaning mechanism, the free end is tilted away from the rotating shaft of the cleaning mechanism, the distance between the cleaning surface and the rotating shaft of the cleaning mechanism is adapted to the outer diameter of the adhesive spray nozzle; the cleaning surface contacts and rubs against the outer peripheral surface of the adhesive spray nozzle.

2. The adhesive spray nozzle cleaning device for the mask coating machine according to claim 1, characterized in that, The rotary drive mechanism includes a rotary motor disposed at the bottom of the cleaning platform. The axis of the rotary motor is vertical and coincides with the rotation axis of the cleaning mechanism. The motor axis of the rotary motor extends upward and is fixedly connected to a connecting seat. The connecting seat is placed on the bottom surface of the cleaning platform and fixedly connected to the cleaning platform.

3. The adhesive spray nozzle cleaning device for the mask coating machine according to claim 2, characterized in that, The rotary motor is a DC motor or an AC motor equipped with a frequency converter.

4. The adhesive spray nozzle cleaning device for the mask coating machine according to claim 1, characterized in that, The elastic sheet has an arc-shaped cross-section, with an inner arc surface and an outer arc surface. The inner arc surface is the inner surface. The radius of the inner arc surface is adapted to the outer diameter of the adhesive spray nozzle, and the chord length of the inner arc surface is smaller than the diameter of the inner arc surface.

5. The adhesive spray nozzle cleaning device for the mask coating machine according to claim 4, characterized in that, The fixed end is connected to an installation piece, which is fixed to the outer side of the outer arc surface and detachably installed with the cleaning platform; the installation piece and the elastic sheet are integrally formed, and the included angle between the installation piece and the elastic sheet is an obtuse angle.

6. The adhesive spray nozzle cleaning device for a mask coating machine according to claim 1 or 5, characterized in that, The elastic sheet is a metal sheet or a flexible plastic sheet.

7. The adhesive spray nozzle cleaning device for the mask coating machine according to claim 1, characterized in that, The cleaning platform is provided with a second flexible cleaning layer, which comes into contact with the outer end face of the adhesive spray nozzle during cleaning.

8. The adhesive spray nozzle cleaning device for the mask coating machine according to claim 7, characterized in that, The first flexible cleaning layer is formed by brush bristles fixed on the inner side surface, or by non-woven fabric fixed on the inner side surface; the second flexible cleaning layer is formed by brush bristles fixed on the cleaning platform, or by non-woven fabric fixed on the cleaning platform.

9. The adhesive spray nozzle cleaning device for the mask coating machine according to claim 1, characterized in that, It also includes a cleaning cylinder having a cavity with an opening at the top to form a feeding port; the cleaning platform is placed inside the cavity; the feeding port is positioned higher than the free end; during cleaning, the adhesive spray nozzle extends into the cleaning mechanism through the feeding port.

10. The adhesive spray nozzle cleaning device for the mask coating machine according to claim 9, characterized in that, The inner bottom surface of the cleaning cylinder is set as an inclined surface, and a drain port is provided at the lower end of the inclined surface. Several nozzles are provided on the inner wall of the cleaning cylinder, and the nozzles are set facing the cleaning surface. A cleaning liquid delivery pump is connected to the nozzle, and the inlet of the cleaning liquid delivery pump is connected to a cleaning liquid storage tank. The nozzles are set on the inner wall of the cleaning cylinder between two adjacent elastic plates. The rotary motor is set below the cleaning cylinder, and the motor axis of the rotary motor passes through the inner bottom surface of the cleaning cylinder and is fixedly connected to the cleaning platform.

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