A grinding slurry mixing and supply device

Abstract

This invention relates to the field of chemical mechanical polishing, and particularly to a mixing and supply device for polishing slurry, comprising a mixing component, a supply tank, and a pressure supply component; the mixing component includes a rotary throttle valve; the rotary throttle valve includes a lower fixed plate and an upper rotating plate that are tightly fitted together; a pre-reserved hole for polishing slurry is provided in a corresponding area of ​​the first front chamber, and a pre-reserved hole for water flow is provided in a corresponding area of ​​the second front chamber; a mixing passage hole is provided on the upper rotating plate; the mixing passage hole, the pre-reserved hole for water flow, and the pre-reserved hole for polishing slurry are all arranged on a circle with a predetermined radius from the rotation axis of the upper rotating plate; the number of mixing passage holes coinciding with the pre-reserved holes for water flow or polishing slurry varies depending on the rotation position of the upper rotating plate. This invention ensures the freshness of the prepared polishing slurry, making the results of material testing experiments more reliable and improving experimental efficiency.

Description

Technical Field

[0001] This invention relates to the field of chemical mechanical polishing, and in particular to a mixing and supply device for polishing slurry. Background Technology

[0002] As chemical mechanical polishing (CMP) technology becomes increasingly important and complex, the requirements for the materials used in CMP are also rising. Among the various materials required for CMP, the polishing solution has the most direct impact on the CMP process.

[0003] Once prepared, the grinding solution has a limited lifespan and must be used within a predetermined time; otherwise, the grinding effect cannot be guaranteed. Currently, CMP grinding solutions are supplied through a central or local supply system, which is more suitable for mass production processes than for materials research and process verification. In other words, the current supply system is only suitable for preparing grinding solutions with fixed, pre-verified mixing ratios and cannot handle the repeated changes in the mixing ratios during process verification. If materials research and process verification are conducted using the current supply system, it will result in a great deal of waste.

[0004] In the existing technology, the supply of grinding concentrates with different mixing ratios during the material research and process verification stages is usually done manually, which puts a certain pressure on manpower and poses certain safety risks during the preparation process.

[0005] Therefore, how to solve the problem that the existing grinding slurry supply device cannot quickly adjust the mixing ratio of the grinding slurry, resulting in a large amount of waste of grinding slurry and low experimental efficiency in the current material research stage, is an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0006] The purpose of this invention is to provide a grinding slurry mixing and supply device to solve the problem that existing grinding slurry supply devices cannot quickly adjust the mixing ratio of the grinding slurry, resulting in a large amount of waste of grinding slurry and low experimental efficiency in the current material research stage.

[0007] To solve the above-mentioned technical problems, the present invention provides a mixing and supply device for grinding slurry, including a mixing component, a supply tank, and a pressure supply component;

[0008] The supply tank includes a tank body, a top cover, and a supply tank partition plate; the top cover and the supply tank partition plate cooperate to divide the tank body into a grinding solution storage chamber and a water storage chamber;

[0009] The pressure supply assembly includes a gas source and a gas delivery pipe; the gas source supplies propulsion gas at a preset pressure to the supply tank through the gas delivery pipe;

[0010] The mixing assembly includes a first insertion tube, a front first chamber, a second insertion tube, a front second chamber, a rear mixing chamber, and a rotary throttle valve;

[0011] The input end of the first insertion tube is located at the bottom of the grinding solution storage chamber, and the output end is connected to the front first chamber; the input end of the second insertion tube is located at the bottom of the water storage chamber, and the output end is connected to the front second chamber.

[0012] The rotary throttle valve includes a lower fixed plate and an upper rotating plate that are tightly fitted together.

[0013] The upper rotating plate is the bottom plate of the rear mixing chamber;

[0014] The lower fixing plate is the top cover of the front first chamber and the front second chamber, and a grinding liquid reserved hole is provided in the corresponding area of ​​the front first chamber, and a water flow reserved hole is provided in the corresponding area of ​​the front second chamber; a mixing passage hole is provided on the upper rotating plate.

[0015] The mixing passage hole, the water flow reserved hole, and the grinding liquid reserved hole are all arranged on a circle with a preset radius from the rotation axis of the upper rotating plate;

[0016] The different rotation positions of the upper rotating plate result in different numbers of mixing through holes that overlap with the water flow reserved hole or the grinding liquid reserved hole, thus causing different ratios of grinding liquid and water flowing into the rear mixing chamber.

[0017] Optionally, in the grinding slurry mixing and supply device, the mixing component is a tubular element;

[0018] The top cover is the bottom surface of the hybrid component, and the top cover includes a bottom connection hole for connection with the corresponding bottom tube;

[0019] The hybrid component includes a hybrid component isolation plate;

[0020] The sidewall of the tubular component, the top cover, and the lower fixing plate form a front end chamber, and the hybrid component isolation plate divides the front end chamber into the first front end chamber and the second front end chamber.

[0021] Optionally, in the grinding slurry mixing and supply device, the lower fixing plate includes a first upper limit of grinding slurry reserved holes and a second upper limit of water flow reserved holes;

[0022] The flow rate of the grinding fluid corresponding to the first upper limit of the grinding fluid reserved holes is the maximum designed flow rate of the grinding fluid of the mixing component; the flow rate of the water corresponding to the second upper limit of the water flow reserved holes is the maximum designed flow rate of the water of the mixing component.

[0023] Optionally, in the grinding slurry mixing supply device, the mixing through hole includes a water flow through hole and a grinding slurry flow through hole;

[0024] The rotary throttle valve includes a limiter;

[0025] The limiter is used to limit the rotation angle of the upper rotating plate relative to the lower fixed plate, so that the water flow through hole can coincide with the water flow reserved hole, but cannot coincide with the grinding liquid reserved hole.

[0026] Optionally, in the grinding fluid mixing and supply device, the rotational position state of the rotary throttle valve includes a locked state;

[0027] The mixing passage on the rotary throttle valve in the locked state does not coincide with either the water flow reserved hole or the grinding liquid reserved hole.

[0028] Optionally, in the grinding slurry mixing and supply device, the mixing through hole, the water flow reserved hole, and the grinding slurry reserved hole are of the same size.

[0029] Optionally, in the grinding slurry mixing and supply device, the air supply pipe includes an air inlet and two air outlets;

[0030] The air inlet is connected to the air source, and the two air outlets are respectively connected to the water storage chamber and the grinding solution storage chamber.

[0031] Optionally, in the grinding slurry mixing and supply device, the gas source supplies nitrogen gas into the gas delivery pipe.

[0032] Optionally, in the grinding fluid mixing and supply device, the edges of the barrel and the top cover include mutually cooperating horizontal S-shaped grooves.

[0033] A horizontal S-shaped sealing ring is provided in the horizontal S-shaped groove, and the barrel body and the top cover are sealed and connected by the horizontal S-shaped sealing ring.

[0034] Optionally, in the grinding fluid mixing and supply device, the water flow reserved hole and the grinding fluid reserved hole are respectively located in two diagonal quadrants of the lower fixed plate.

[0035] The present invention provides a grinding slurry mixing and supply device, comprising a mixing component, a supply tank, and a pressure supply component; the supply tank includes a tank body, a top cover, and a supply tank partition plate; the top cover and the supply tank partition plate cooperate to divide the tank body into a grinding slurry storage chamber and a water storage chamber; the pressure supply component includes a gas source and a gas delivery pipe; the gas source provides a propulsion gas of a preset pressure to the supply tank through the gas delivery pipe; the mixing component includes a first bottom insertion tube, a front first chamber, a second bottom insertion tube, a front second chamber, a rear mixing chamber, and a rotary throttle valve; the input end of the first bottom insertion tube is located at the bottom of the grinding slurry storage chamber, and the output end is connected to the front first chamber; the input end of the second bottom insertion tube is located at the bottom of the water storage chamber, and the output end is connected to the front second chamber; the rotary throttle valve... The throttle valve includes a lower fixed plate and an upper rotating plate that fit tightly together; the upper rotating plate is the bottom plate of the rear mixing chamber; the lower fixed plate is the top cover of the front first chamber and the front second chamber, and a grinding solution pre-reserved hole is provided in the corresponding area of ​​the front first chamber, and a water flow pre-reserved hole is provided in the corresponding area of ​​the front second chamber; a mixing passage hole is provided on the upper rotating plate; the mixing passage hole, the water flow pre-reserved hole, and the grinding solution pre-reserved hole are all arranged on a circle with a preset radius from the rotation axis of the upper rotating plate; the number of mixing passage holes that coincide with the water flow pre-reserved hole or the grinding solution pre-reserved hole varies depending on the rotation position of the upper rotating plate, resulting in different ratios of grinding solution and water flowing into the rear mixing chamber.

[0036] This invention, by rotating the upper rotating plate in the rotary throttle valve, changes the number of pre-drilled holes for the grinding solution and the number of pre-drilled holes for the water flow. This allows for continuous adjustment of the ratio of grinding solution to water during the supply of grinding solution, ensuring the freshness of the prepared grinding solution and making the results of material testing experiments more reliable. For two experiments with different grinding solution ratios, the ratio of grinding solution to water can be changed simply by rotating the rotary throttle valve, significantly shortening the interval between the two experiments. This reduces waste, lowers the workload for staff, and greatly improves experimental efficiency. Attached Figure Description

[0037] To more clearly illustrate the technical solutions of the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 A schematic diagram of a specific embodiment of the grinding slurry mixing and supply device provided by the present invention;

[0039] Figure 2 A partial structural schematic diagram of a specific embodiment of the grinding slurry mixing and supply device provided by the present invention;

[0040] Figure 3 A partial structural schematic diagram of the supply tank in a specific embodiment of the grinding fluid mixing and supply device provided by the present invention;

[0041] Figure 4 , Figure 5 A schematic diagram of the rotary throttle valve in a specific embodiment of the grinding slurry mixing and supply device provided by the present invention;

[0042] Figure 6 , Figure 7 A partial structural schematic diagram of the rotary throttle valve in a specific embodiment of the grinding slurry mixing and supply device provided by the present invention.

[0043] Figures 8 to 11 This is a schematic diagram of the mixing component in different angle states in a specific embodiment of the grinding slurry mixing and supply device provided by the present invention.

[0044] The diagram includes: 100 - mixing component, 110 - first insertion tube, 120 - second insertion tube, 130 - front first chamber, 140 - front second chamber, 150 - rear mixing chamber, - rotary throttle valve, 170 - mixing component isolation plate, 161 - upper rotating plate, 162 - lower fixing plate, 161A - mixing through hole, 161B - rotating shaft, 162A - grinding raw material reserved hole, 162B - water flow reserved hole, 210 - barrel body, 220 - top cover, 230 - supply barrel isolation plate, 211 - grinding raw material storage chamber, 212 - water storage chamber, 221 - horizontal S-shaped groove, 222 - horizontal S-shaped sealing ring, 310 - air source, 320 - air supply pipe, 400 - discharge pipe. Detailed Implementation

[0045] To enable those skilled in the art to better understand the present invention, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are merely some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0046] The core of this invention is to provide a mixing and supply device for grinding slurry, the structure of which is shown in the schematic diagram of one specific embodiment. Figures 1 to 11 This is referred to as Specific Implementation Method 1, which includes a mixing component 100, a supply tank, and a pressure supply component;

[0047] The supply tank includes a tank body 210, a top cover 220, and a supply tank partition plate 230; the top cover 220 and the supply tank partition plate 230 cooperate to divide the tank body 210 into a grinding liquid storage chamber 211 and a water storage chamber 212;

[0048] The pressure supply assembly includes a gas source 310 and a gas delivery pipe 320; the gas source 310 supplies propulsion gas at a preset pressure to the supply tank through the gas delivery pipe 320;

[0049] The mixing assembly 100 includes a first insertion tube 110, a front first chamber 130, a second insertion tube 120, a front second chamber 140, a rear mixing chamber 150, and;

[0050] The input end of the first insertion tube 110 is located at the bottom of the grinding solution storage chamber 211, and the output end is connected to the front first chamber 130; the input end of the second insertion tube 120 is located at the bottom of the water storage chamber 212, and the output end is connected to the front second chamber 140.

[0051] The rotary throttle valve includes a lower fixed plate 162 and an upper rotating plate 161 that are tightly fitted together.

[0052] The upper rotating plate 161 is the bottom plate of the rear mixing chamber 150;

[0053] The lower fixing plate 162 serves as the top cover 220 of the front first chamber 130 and the front second chamber 140, and a grinding liquid reserved hole 162A is provided in the corresponding area of ​​the front first chamber 130, and a water flow reserved hole 162B is provided in the corresponding area of ​​the front second chamber 140; a mixing passage hole 161A is provided on the upper rotating plate 161;

[0054] The mixing passage hole 161A, the water flow reserved hole 162B, and the grinding liquid reserved hole 162A are all arranged on a circle with a preset radius from the rotation axis 161B of the upper rotating plate 161;

[0055] The different rotation positions of the upper rotating plate 161 result in different numbers of mixing through holes 161A that overlap with the water flow reserved hole 162B or the grinding liquid reserved hole 162A, thus causing different ratios of grinding liquid to water flowing into the rear mixing chamber 150.

[0056] The water used in this device is preferably deionized water. Figure 1 This is a schematic diagram of the mixing and supply device for the grinding slurry, and a detailed schematic diagram of the mixing component 100 can be found in [link to schematic diagram]. Figure 2 .

[0057] Preferably, the mixing passage 161A, the water flow reserved passage 162B, and the grinding concentrate reserved passage 162A are all the same size. Since all the holes on the rotary throttle valve are of the same size, the ratio of the grinding concentrate to the water flow can be easily converted into a ratio of the number of holes, making the adjustment more intuitive and faster and more accurate. Figure 4 In the diagram, there is one pre-drilled hole 162A for the grinding fluid and five pre-drilled holes 162B for the water flow. Therefore, the ratio of grinding fluid to water is 1:5. Of course, the hole sizes can be varied as needed. Figure 4 For example, assuming that the area of ​​the grinding solution reserved hole 162A is twice the area of ​​the water flow reserved hole 162B, and the area of ​​the mixing passage hole 161A corresponding to the grinding solution reserved hole 162A is equivalent to that of the grinding solution reserved hole 162A, then the ratio of grinding solution to water is 2:5.

[0058] Figure 1 , Figure 2 In this process, the grinding solution is mixed with water to obtain a grinding mixture, which is then discharged into subsequent equipment through the discharge pipe 400.

[0059] In one specific embodiment, the mixing component 100 is a tubular component;

[0060] The top cover 220 is the bottom surface of the mixing component 100, and the top cover 220 includes a bottom connection hole for connecting to the corresponding bottom tube.

[0061] The hybrid component 100 includes a hybrid component isolation plate 170;

[0062] The sidewall of the tubular component, the top cover 220, and the lower fixing plate 162 form a front end chamber. The hybrid component isolation plate 170 divides the front end chamber into the front end first chamber 130 and the front end second chamber 140.

[0063] The front-end chamber is a collective term for the first front-end chamber 130 and the second front-end chamber 140. Please refer to [the relevant documentation]. Figures 8 to 11As can be seen from these four figures, the mixing component 100 in this specific embodiment is based on a tubular component. By installing the rotary throttle valve inside a "tube" (i.e., the side wall of the mixing component 100), the tube is divided into an upper chamber and a lower chamber. Then, the lower chamber is connected to the top cover 220, with the top cover 220 serving as the bottom surface of the lower chamber. The mixing component isolation plate 170 is then installed inside the lower chamber, dividing the lower chamber into two sub-chambers, thus obtaining the front first chamber 130 and the front second chamber 140. Of course, since the mixing component 100 is directly mounted on the top cover 220, and to ensure that the first insertion tube 110 and the second insertion tube 120 are both straight tubes, the mixing component 100 should be installed at the supply tank isolation plate 230. Preferably, the supply tank isolation plate 230 and the mixing component isolation plate 170 are integrally formed isolation plates. Of course, the positions and orientations of the mixing component isolation plate 170 and the supply tank isolation plate 230 can also be different, and can be selected according to the actual situation.

[0064] The first front chamber 130 and the second front chamber 140 can also be configured as chambers of other shapes, such as connecting a funnel to the top of the corresponding insertion tube so that the top surface of the funnel fits against the lower fixing plate to form a corresponding front chamber, etc., which can be adjusted according to actual needs.

[0065] In one specific embodiment, the mixing passage 161A includes a water flow passage and a grinding liquid flow passage;

[0066] The rotary throttle valve includes a limiter;

[0067] The limiter is used to limit the rotation angle of the upper rotating plate 161 relative to the lower fixed plate 162, so that the water flow through hole can coincide with the water flow reserved hole 162B and cannot coincide with the grinding liquid reserved hole 162A, and the grinding liquid through hole can coincide with the grinding liquid reserved hole 162A and cannot coincide with the water flow reserved hole 162B.

[0068] Please refer to Figure 4 , Figure 4 The water flow reserved hole 162B and the grinding liquid reserved hole 162A both have 5 holes, but the water flow reserved hole 162B has 5 corresponding mixing passage holes 161A, while the grinding liquid reserved hole 162A has only 1 corresponding mixing passage hole 161A. That is, Figure 4 The adjustment range for the mixing ratio of the grinding stock solution and water is 1:1 to 1:5. Figure 4(The arrow indicates a hole in a conductive state). Typically, in related technologies, the proportion of water in the final grinding mixture is not lower than the proportion of the original grinding solution. Similarly, to avoid... Figure 4 In the diagram, a single mixing passage 161A of the upper rotating plate 161 rotates to the water flow reserved hole 162B, and five consecutive mixing passages 161A rotate to the grinding concentrate reserved hole 162A, resulting in more grinding concentrate passing through than water, which is contrary to the original design. In this preferred embodiment, a limiter is added to the rotary throttle valve to prevent this. Figure 4 A single mixing passage 161A can only coincide with the grinding solution reserved passage 162A, while five consecutive mixing passages 161A can only coincide with the water flow reserved passage 162B. This avoids operator error and serves as a foolproof measure, thereby ensuring that the composition ratio of the grinding mixture in the rear mixing chamber 150 meets expectations and guarantees the success rate of the experiment.

[0069] The limiter can be a grooved slide and a paired protrusion. The slide of the limiter is an arc-shaped slide, which is disposed on one of the upper rotating plate 161 or the lower fixed plate 162, and the protrusion is disposed on the other one. During the rotation of the upper rotating plate 161, the protrusion slides in the arc-shaped slide, and the arc-shaped slide limits the rotation angle of the upper rotating plate 161.

[0070] As another specific embodiment, the lower fixing plate 162 includes a first upper limit of a grinding liquid reserved hole 162A and a second upper limit of a water flow reserved hole 162B;

[0071] The grinding fluid flow rate corresponding to the first upper limit of the grinding fluid reserved holes 162A is the maximum designed grinding fluid flow rate of the mixing component 100; the water flow rate corresponding to the second upper limit of the water flow reserved holes 162B is the maximum designed water flow rate of the mixing component 100.

[0072] In this specific embodiment, the number of holes on the lower fixing plate 162 is the maximum flow rate of the corresponding fluid that can pass through the mixing component 100 during operation. For example, assuming that the preset adjustment range of the grinding stock solution to water ratio is still 1:1 to 1:5, the difference between this specific embodiment and the above specific embodiment is that... Figure 4 The number of grinding fluid pre-reserved holes 162A is changed to 1, while the number of mixing passage holes 161A corresponding to the grinding fluid pre-reserved hole 162A is changed to 5. The remaining parts are all connected to... Figure 4 Similarly, the structural schematic diagram of the lower fixing plate 162 is as follows: Figure 6 As shown, the corresponding structural schematic diagram of the upper rotating plate 161 is as follows: Figure 7 As shown, in the new solution of this specific embodiment, there is no need to set a limiter. No matter how the rotary throttle valve rotates, the grinding mixture in the rear mixing chamber 150 will not exceed the preset component ratio range. This also avoids operator error and serves as a foolproof measure, thereby ensuring that the component ratio of the grinding mixture in the rear mixing chamber 150 meets expectations and ensuring the success rate of the experiment.

[0073] Furthermore, the rotational position state of the rotary throttle valve includes a locked state;

[0074] The mixing passage 161A on the rotary throttle valve in the locked state does not coincide with the water flow reserved hole 162B or the grinding liquid reserved hole 162A.

[0075] This specific embodiment further limits the rotational position of the rotary throttle valve. The locked state, in other words, means that liquid cannot pass through the rotary throttle valve. After the upper rotating plate 161 rotates to a certain position, the mixing passage 161A does not coincide with either the water flow reserved hole 162B or the grinding concentrate reserved hole 162A. The rotary throttle valve functions as an on / off switch for the mixing assembly 100. In case of system failure or misoperation, it can stop the supply of the grinding mixture, improving the robustness and operational stability of the device. (See reference...) Figure 5 , Figure 5 The rotation position of the upper rotating plate 161 is such that the mixing through hole 161A does not coincide with either of the two reserved holes below, and the rotating throttle valve is not open.

[0076] Preferably, the gas pipe 320 includes one inlet end and two outlet ends;

[0077] The air inlet is connected to the air source 310, and the two air outlets are respectively connected to the water storage chamber 212 and the grinding solution storage chamber 211.

[0078] In this preferred embodiment, the air source 310 pressurizes both the grinding liquid storage chamber 211 and the water storage chamber 212 simultaneously through an air inlet, keeping the air pressure in the two storage chambers consistent. This simplifies the device structure and further ensures that the mixing ratio of the two liquids is determined solely by the number of orifices on the rotary throttle valve, thereby improving the accuracy of the mixture ratio.

[0079] Furthermore, the gas source 310 supplies nitrogen gas into the gas supply pipe 320. That is, nitrogen gas pressurizes the water storage chamber 212 and the grinding solution storage chamber 211, causing the gas to accumulate above the corresponding storage chambers, pressurizing the liquid inside and forcing it into the corresponding insertion pipe. Nitrogen gas is stable, ensuring the stability and safety of the device's top, and it is also inexpensive to produce and easy to mass-produce.

[0080] In a preferred embodiment, the edges of the barrel body 210 and the top cover 220 include mutually cooperating horizontal S-shaped grooves 221;

[0081] A horizontal S-shaped sealing ring 222 is provided in the horizontal S-shaped groove 221, and the barrel body 210 and the top cover 220 are sealed and connected by the horizontal S-shaped sealing ring 222.

[0082] Please refer to Figure 3 , Figure 3 The diagram shows a cross-sectional view of the edge structure of the barrel body 210 and the top cover 220. The horizontal S-shaped groove 221 refers to a groove whose cross-section is horizontally S-shaped. It works with the corresponding horizontal S-shaped sealing ring 222 to seal the top cover 220 and the barrel body 210. The horizontal S-shaped groove makes it difficult for the high-pressure gas inside the barrel body 210 to break through, which greatly improves the pressure resistance of the supply barrel. While improving the working stability and safety of the device, it also allows the liquid in the supply barrel to flow into the mixing component 100 quickly under higher gas pressure, thus improving experimental efficiency.

[0083] Furthermore, the water flow reserved hole 162B and the grinding liquid reserved hole 162A are respectively located in two diagonal quadrants of the lower fixing plate 162.

[0084] Please refer to Figures 8 to 11 The surface of the lower fixed plate 162 is a plane. Using the rotation axis of the upper rotating plate 161 as the origin, a rectangular coordinate system is established. The water flow pre-reserved hole 162B and the grinding liquid pre-reserved hole 162A are located in the first and third quadrants, or the second and fourth quadrants, respectively. Furthermore, the mixing passage hole 161A is also concentrated within two diagonal quadrants of the upper rotating plate 161. Figures 8 to 11As shown, when the two quadrants of the prime number mixing passage hole 161A on the upper rotating plate 161 completely or partially overlap with the two quadrants of the water flow reserved hole 162B and the grinding liquid reserved hole 162A, the mixing assembly 100 is in a conductive working state. When the two quadrants of the upper rotating plate 161 with the mixing passage hole 161A are completely misaligned with the two quadrants of the lower fixed plate 162 with the hole, the mixing assembly 100 stops working. This specific embodiment simplifies the design of the mixing assembly 100, improves working stability, reduces the design difficulty of the assembly, and enhances its versatility.

[0085] Figures 8 to 11 This is a schematic diagram of the hybrid component 100 in different rotational positions in one specific embodiment, where the through holes are indicated by arrows, such as... Figure 8 In the middle, one of the aforementioned grinding solution reserved holes 162A and five water flow reserved holes 162B are connected. Figure 9 There are no holes or holes for connection (see reference). Figure 5 ), Figure 10 One of the aforementioned grinding solution pre-reserved holes 162A and four water flow pre-reserved holes 162B are connected. Figure 11 One of the grinding solution pre-reserved holes 162A and two water flow pre-reserved holes 162B are connected. Figures 8 to 11 The upper rotating plate 161 rotates clockwise as described above. Of course, it can also rotate counterclockwise as needed, which is not limited here.

[0086] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to in the method section.

[0087] It should be noted that, in this specification, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0088] The mixing and supply device for grinding slurry provided by the present invention has been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. It should be noted that those skilled in the art can make several improvements and modifications to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims

1. A mixed solution supply device of a polishing liquid, characterized by comprising: The mixing assembly, the supply barrel, and the pressure supply assembly; The supply barrel comprises a barrel body, a top cover, and a supply barrel partition plate; the top cover and the supply barrel partition plate cooperate to divide the barrel body into a grinding stock storage chamber and a water storage chamber; The pressure supply assembly comprises a gas source and a gas delivery pipe; the gas source provides a propellant gas with a preset pressure into the supply barrel through the gas delivery pipe; The mixing assembly comprises a first bottom insertion pipe, a front-end first chamber, a second bottom insertion pipe, a front-end second chamber, a rear-end mixing chamber, and a rotary throttle valve; The input end of the first bottom insertion pipe is located at the bottom of the grinding stock storage chamber, and the output end is connected to the front-end first chamber; the input end of the second bottom insertion pipe is located at the bottom of the water storage chamber, and the output end is connected to the front-end second chamber; The rotary throttle valve comprises a lower fixed plate and an upper rotary plate that are tightly attached to each other; The upper rotary plate is the bottom plate of the rear-end mixing chamber; The lower fixed plate is the top cover of the front-end first chamber and the front-end second chamber, and is provided with a grinding stock reservation hole in the corresponding area of the front-end first chamber and a water flow reservation hole in the corresponding area of the front-end second chamber; the upper rotary plate is provided with a mixing passing hole; The mixing passing hole, the water flow reservation hole, and the grinding stock reservation hole are all arranged on a circle with a preset radius from the rotation axis of the upper rotary plate; The rotary position of the upper rotary plate is different, and the number of the mixing passing holes coinciding with the water flow reservation hole or the grinding stock reservation hole is also different, so that the ratio of the grinding stock and the water flowing into the rear-end mixing chamber is different; The mixing assembly is a tubular member; The top cover is the bottom surface of the mixing assembly, and the top cover comprises an insertion bottom connection hole connected to the corresponding bottom insertion pipe; The mixing assembly comprises a mixing assembly partition plate; The side wall of the tubular member, the top cover, and the lower fixed plate enclose a front-end chamber, and the mixing assembly partition plate divides the front-end chamber into the front-end first chamber and the front-end second chamber.

2. The mixed solution supply apparatus for polishing liquid according to Claim 1, wherein The lower fixed plate comprises a first upper limit number of grinding stock reservation holes and a second upper limit number of water flow reservation holes; The corresponding grinding stock flow of the first upper limit number of grinding stock reservation holes is the designed maximum grinding stock flow of the mixing assembly; The corresponding water flow of the second upper limit number of water flow reservation holes is the designed maximum water flow of the mixing assembly.

3. The mixed solution supply apparatus for polishing liquid according to Claim 1, wherein The mixing passing hole comprises a water flow passing hole and a grinding stock passing hole; The rotary throttle valve comprises a position limiter; The position limiter is used to limit the rotation angle of the upper rotary plate relative to the lower fixed plate, so that the water flow passing hole can coincide with the water flow reservation hole but cannot coincide with the grinding stock reservation hole, and the grinding stock passing hole can coincide with the grinding stock reservation hole but cannot coincide with the water flow reservation hole.

4. The mixed solution supply apparatus for polishing liquid according to Claim 1, wherein The rotary position state of the rotary throttle valve comprises a lock state; In the lock state, the mixing passing hole on the rotary throttle valve does not coincide with the water flow reservation hole or the grinding stock reservation hole.

5. The mixed solution supply apparatus for polishing liquid according to Claim 1, wherein The size of the mixing passing hole, the water flow reservation hole, and the grinding stock reservation hole is the same.

6. The mixed solution supply apparatus for polishing liquid according to Claim 1, wherein The gas conveying pipe comprises an inlet end and two outlet ends; The inlet end is connected with the gas source, and the two outlet ends are connected with the water storage chamber and the grinding stock solution storage chamber respectively.

7. The mixed solution supply apparatus for polishing liquid according to Claim 1, wherein The gas source supplies nitrogen into the gas conveying pipe.

8. The mixed solution supply apparatus for polishing liquid according to Claim 1, wherein The edges of the barrel body and the top cover comprise mutually matched horizontal S-shaped grooves; Horizontal S-shaped sealing rings are arranged in the horizontal S-shaped grooves, and the barrel body and the top cover are sealingly connected through the horizontal S-shaped sealing rings.

9. The mixed solution supply apparatus for polishing liquid according to any one of claims 1 to 8, wherein The water flow reservation hole and the grinding stock solution reservation hole are arranged in two opposite quadrants of the lower fixing plate respectively.

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