A vapor deposition and pressing system and its adaptive control method for vacuum breaking pressure.

By introducing an electromagnetic pressure regulating valve and a pressure detection unit into the vapor deposition and pressing system, the vacuum breaking pressure can be adjusted in real time, solving the problem of screen position displacement caused by pressure fluctuations in the vapor deposition and encapsulation chamber, and achieving stability and safety in the production process.

CN117070898BActive Publication Date: 2025-12-02SUZHOU QUINGYUE OPTOELECTRONICS TECH CO LTD +1
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Patent Information

Application Number
CN202311064734.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-08-23
Publication Date
2025-12-02
Estimated Expiration
2043-08-23

AI Technical Summary

Technical Problem

Pressure fluctuations inside the vapor deposition encapsulation chamber cause the screen to shift position when it falls off the pressing platform, resulting in screen damage and production risks, and affecting the stability of the production line.

Method used

By equipping the vapor deposition pressing system with an electromagnetic pressure regulating valve and a pressure detection unit, the pressure in the vapor deposition chamber is monitored in real time and the vacuum breaking pressure is adjusted to maintain a relatively constant vacuum breaking pressure on the pressing platform and pressure inside the chamber, thus preventing screen misalignment.

Benefits of technology

This ensures the stability and efficiency of the vacuum breaking process, prevents damage to the screen due to misalignment, and guarantees the continuous and stable operation of production.

✦ Generated by Eureka AI based on patent content.

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Abstract

This invention relates to a vapor deposition pressing system and its adaptive control method for vacuum breaking pressure. The system includes: a pressing platform for adsorbing and transporting a screen; an air outlet on the contact surface between the pressing platform and the screen, connected to a vacuum breaking air source via an air pipe; an electromagnetic pressure regulating valve connected in series with the air pipe; a robotic arm carrying the screen delivered by the pressing platform and completing the transport; the pressing platform and the robotic arm being positioned in a vapor deposition chamber; and a pressure detection unit within the vapor deposition chamber; a control unit's data input terminal connected to the pressure detection unit, and its control output terminal connected to the electromagnetic pressure regulating valve, used to adjust the output gas pressure of the electromagnetic pressure regulating valve according to the gas pressure within the vapor deposition chamber. This application, through structural adjustments and a control method, calculates and controls pressure parameters to achieve adaptive adjustment of the vacuum breaking pressure, reducing the accidental damage rate of the screen and ensuring continuous and stable operation of production.
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Description

Technical Field

[0001] This invention relates to the field of vapor deposition and packaging technology, specifically to a vapor deposition and pressing system and its vacuum pressure adaptive control method. Background Technology

[0002] The vapor deposition encapsulation of the display screen is carried out in a vapor deposition encapsulation chamber, which is a combination of acrylic and plastic operating gloves. Nitrogen is supplied through external pipes to maintain a positive pressure environment inside the chamber. However, due to long-term use, the operating gloves may become damaged, and leaks may occur at the pipe joints. This can cause changes in the internal pressure of the vapor deposition encapsulation chamber. To maintain a positive pressure environment inside the chamber, the chamber pressure setting needs to be manually increased. This results in pressure fluctuations within the chamber. However, the vacuum release pressure of the pressing platform for pressing the screen is constant. These pressure fluctuations can easily cause the screen to shift its position on the robotic arm when it detaches from the pressing platform and falls. This can lead to collisions or the screen falling out of the chamber when the product is sent to the next workstation, causing damage to the screen, unnecessary losses, and risks to the normal operation of the production line.

[0003] Therefore, how to optimize the vapor deposition and encapsulation system of the screen to ensure stable vacuum breaking on the pressing platform, stable screen transfer process, and stable production line operation is the technical problem that this application needs to solve. Summary of the Invention

[0004] A primary objective of this invention is to overcome at least one of the aforementioned defects by providing a vapor deposition and pressing system that achieves adaptive adjustment of vacuum pressure through structural adjustments, thereby reducing the accidental damage rate of the screen and ensuring the continuous and stable operation of production.

[0005] A primary objective of this invention is to overcome at least one of the aforementioned deficiencies by providing an adaptive control method for vacuum breaking pressure in a vapor deposition and pressing system. This method combines adjustments to the system structure with calculation and control of pressure parameters to achieve adaptive adjustment of vacuum breaking pressure, thereby reducing the accidental damage rate of the screen and ensuring the continuous and stable operation of production.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0007] This invention provides a vapor deposition and pressing system, comprising:

[0008] A pressing platform is used to adsorb and transport the screen body. Several air outlets are provided on the contact surface between the pressing platform and the screen body. The several air outlets are connected to a vacuum air source through air pipes.

[0009] An electromagnetic pressure regulating valve is connected in series with the air pipe to control the gas pressure of the vacuum-breaking air source to the plurality of air outlets, thereby controlling the pressure of the vacuum-breaking gas sent out by the plurality of air outlets.

[0010] A robotic arm is used to carry the screen body sent by the pressing platform and complete the transfer.

[0011] The vapor deposition chamber, in which the pressing platform and the robotic arm are located;

[0012] A pressure detection unit is installed in the vapor deposition chamber to detect the pressure in the vapor deposition chamber.

[0013] The control unit has a data input terminal connected to the air pressure detection unit and a control output terminal connected to the electromagnetic air pressure regulating valve. It is used to adjust the output gas pressure of the electromagnetic air pressure regulating valve according to the air pressure in the vapor deposition chamber.

[0014] According to one embodiment of the present invention, an air inlet is provided on the vapor deposition chamber, and the air inlet is connected to a positive pressure fan.

[0015] According to one embodiment of the present invention, the control unit is configured with a target pressure difference value P1, and the output gas pressure P3 of the electromagnetic pressure regulating valve is determined based on the target pressure difference value P1 and the gas pressure P2 in the vapor deposition chamber, wherein P3 = P1 + P2.

[0016] According to one embodiment of the present invention, the pressing platform is flat, and a plurality of vacuum suction cups are provided on the side of the pressing platform facing the screen body, and the plurality of vacuum suction cups are evenly arranged below the pressing platform.

[0017] According to one embodiment of the present invention, the plurality of air outlets are evenly arranged on the bottom surface of the pressing platform, the pressing platform is provided with an air inlet chamber, the air inlet chamber is connected to the plurality of air outlets, the pressing platform is provided with an air inlet that is connected to the air inlet chamber, and the cross-sectional area of ​​the air inlet is equal to the sum of the cross-sectional areas of the plurality of air outlets.

[0018] Specifically, this application provides an adaptive control method for vacuum pressure breaking of the vapor deposition and pressing system as described above, wherein the gas pressure P2 of the vapor deposition chamber is detected in real time, and the gas pressure P3 output by the electromagnetic pressure regulating valve is adjusted according to the internal gas pressure of the vapor deposition chamber, so that the gas pressure P3 output by the electromagnetic pressure regulating valve and the gas pressure P2 of the vapor deposition chamber are maintained at the target pressure difference value P1, i.e., P1 = P3 - P2.

[0019] According to one embodiment of the present invention, the interior of the vapor deposition chamber is under positive pressure, and the gas pressure P2 of the vapor deposition chamber is between 2.5 kPa and 6 kPa.

[0020] According to one embodiment of the present invention, the output gas pressure P3 of the electromagnetic pressure regulating valve and the output gas pressure P2 of the vapor deposition chamber, i.e., the target value of the gas pressure difference P1, are maintained between 200 kPa and 550 kPa.

[0021] Compared with existing technologies, the advantages and beneficial effects of the vapor deposition and pressing system and its vacuum breaking pressure adaptive control method of this patent application are as follows:

[0022] The vapor deposition and pressing system of this application uses a pressure detection unit to detect the air pressure inside the vapor deposition chamber in real time. Then, it adjusts the vacuum breaking pressure sent to the pressing platform according to the internal pressure of the vapor deposition chamber. This makes the vacuum breaking pressure adapt to the internal pressure changes of the vapor deposition chamber, so that the vacuum breaking process is stable and efficient and will not cause displacement deviation, thus avoiding damage to the screen due to misalignment or affecting the normal operation of the production line.

[0023] The vacuum breaking pressure adaptive control method of the vapor deposition pressing system of this application combines the detection parameters of the internal pressure of the vapor deposition chamber during the control process, and calculates the output air pressure of the electromagnetic air pressure regulating valve through the preset air pressure difference target value, so as to realize the controllable output of the electromagnetic air pressure regulating valve, thereby making the magnitude of the vacuum breaking force at the pressing platform relatively constant compared with the air pressure inside the chamber, thus making the vacuum breaking process stable and efficient, and preventing displacement deviation, avoiding damage to the screen due to misalignment or affecting the normal operation of the production line. Attached Figure Description

[0024] The following sections will describe some specific embodiments of the invention in detail by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or portions. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0025] Figure 1 This is a schematic diagram of the structure of a vapor deposition and pressing system according to an embodiment of the present invention.

[0026] The attached figures are labeled as follows:

[0027] 1. Pressing platform; 11. Air inlet chamber; 12. Air inlet port; 13. Air outlet port; 14. Vacuum suction cup.

[0028] 21. Electromagnetic pressure regulating valve; 22. Vacuum air source; 23. Air pipe;

[0029] 3. Robotic arm;

[0030] 4. Evaporation chamber; 41. Air pressure detection unit;

[0031] 5. Control unit;

[0032] 6. Screen body;

[0033] 7. Positive pressure fan. Detailed Implementation

[0034] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0036] Example 1:

[0037] This embodiment describes a vapor deposition and pressing system, such as Figure 1 As shown, it includes:

[0038] The pressing platform 1 is used to adsorb the screen body 6 and transport it. The contact surface between the pressing platform 1 and the screen body 6 is provided with a plurality of air outlets 13. The plurality of air outlets 13 are connected to the vacuum air source 22 through air pipes 23.

[0039] An electromagnetic pressure regulating valve 21 is connected in series with the air pipe 23 to control the gas pressure of the vacuum-breaking air source 22 to the plurality of air outlets 13, thereby controlling the pressure of the vacuum-breaking gas sent out by the plurality of air outlets 13.

[0040] The robotic arm 3 is used to carry the screen 6 delivered by the pressing platform 1 and complete the transfer.

[0041] The vapor deposition chamber 4, in which the pressing platform 1 and the robotic arm 3 are disposed;

[0042] A pressure detection unit 41 is installed in the vapor deposition chamber 4 and is used to detect the pressure in the vapor deposition chamber 4.

[0043] The control unit 5 has a data input terminal connected to the air pressure detection unit 41 and a control output terminal connected to the electromagnetic air pressure regulating valve 21. It is used to adjust the output gas pressure of the electromagnetic air pressure regulating valve 21 according to the air pressure in the vapor deposition chamber 4.

[0044] In this embodiment, the vapor deposition and pressing system uses a pressure detection unit 41 to detect the pressure inside the vapor deposition chamber 4 in real time. Then, the control unit 5 adjusts the pressure of the output gas of the electromagnetic pressure regulating valve 21 according to the detected internal pressure of the vapor deposition chamber 4. This adjusts the vacuum breaking pressure sent to the pressing platform 1, making the vacuum breaking pressure adapt to the internal pressure changes of the vapor deposition chamber 4. This ensures that the vacuum breaking process is stable and efficient, and does not cause displacement deviation, thus preventing damage to the screen 6 due to misalignment or affecting the normal operation of the production line.

[0045] In one embodiment, the pressing platform 1 is flat, and a plurality of vacuum suction cups 14 are provided on the side of the pressing platform 1 facing the screen body 6. The plurality of vacuum suction cups 14 are evenly arranged below the pressing platform 1, and the vacuum suction cups 14 can be used to vacuum adsorb the screen body 6. Of course, other methods of vacuum adsorption of the screen body 6 can also be used, such as adsorption by combining openings with a vacuum pump.

[0046] In one embodiment, the plurality of air outlets 13 are evenly arranged on the bottom surface of the pressing platform 1. An air inlet chamber 11 is provided inside the pressing platform 1, and the air inlet chamber 11 is connected to the plurality of air outlets 13. The presence of the air inlet chamber 11 ensures that the gas pressure output from each air outlet 13 is relatively uniform. An air inlet 12 is provided on the pressing platform 1, which is connected to the air inlet chamber 11. The cross-sectional area of ​​the air inlet 12 is equal to the sum of the cross-sectional areas of the plurality of air outlets 13. Setting the cross-sectional area of ​​the air inlet 12 to be equal to the sum of the cross-sectional areas of the plurality of air outlets 13 allows for better control of the vacuum breaking pressure output from the air outlets 13 through the output control of the electromagnetic pressure regulating valve 21. Because P = F / A (P is air pressure, F is delivery pressure, and A is unit area), if the cross-sectional areas of the two are not equal, the output gas pressure of the electromagnetic air pressure regulating valve 21 at the outlet 13 will change. Although it can still be controlled, it requires relatively complex calculations. To ensure that the cross-sectional area of ​​the inlet 12 is equal to the sum of the cross-sectional areas of the several outlets 13, it is possible to ensure that the gas pressure delivered by the electromagnetic air pressure regulating valve 21 to the inlet chamber 11 is equal to the overall air pressure (vacuum pressure) delivered from the several outlets 13, which is more conducive to calculation and control.

[0047] In one embodiment, the vapor deposition chamber 4 is provided with an air inlet, which is connected to a positive pressure fan 7. In order to effectively protect the vapor deposition quality and avoid damage to the screen 6, the gas used by the positive pressure fan 7 to maintain positive pressure output and the gas used by the vacuum air source 22 are both inert gases, preferably nitrogen.

[0048] In one embodiment, during specific control, a target pressure difference value P1 is configured in the control unit 5. The gas pressure P3 output by the electromagnetic pressure regulating valve 21 is determined based on the target pressure difference value P1 and the gas pressure P2 in the vapor deposition chamber 4, where P3 = P1 + P2. The vapor deposition chamber 4 is under positive pressure, and the gas pressure P2 in the vapor deposition chamber 4 is between 2.5 kPa and 6 kPa. The difference between the gas pressure P3 output by the electromagnetic pressure regulating valve 21 and the output pressure P2 in the vapor deposition chamber 4, i.e., the target pressure difference value P1, is maintained between 200 kPa and 550 kPa. By presetting the target pressure difference value P1 and measuring the gas pressure P2 in the vapor deposition chamber 4, the gas pressure P3 output by the electromagnetic pressure regulating valve 21 can be determined. This ensures that the relative pressure between the gas pressure ultimately delivered by the plurality of air outlets 13 and the external environment (chamber environment pressure) remains constant, thereby guaranteeing the vacuum breaking effect.

[0049] Example 2:

[0050] This embodiment provides an adaptive control method for vacuum pressure breaking of the vapor deposition and pressing system as described in Embodiment 1. In this method, the gas pressure P2 of the vapor deposition chamber 4 is detected in real time, and the gas pressure P3 output by the electromagnetic pressure regulating valve 21 is adjusted according to the internal gas pressure of the vapor deposition chamber 4, so that the gas pressure P3 output by the electromagnetic pressure regulating valve 21 and the gas pressure P2 of the vapor deposition chamber 4 are maintained at the target gas pressure difference value P1, i.e., P1 = P3 - P2.

[0051] According to one embodiment of the present invention, the interior of the vapor deposition chamber 4 is under positive pressure, and the gas pressure P2 of the vapor deposition chamber 4 is between 2.5 kPa and 6 kPa.

[0052] According to one embodiment of the present invention, the output gas pressure P3 of the electromagnetic pressure regulating valve 21 and the output gas pressure P2 of the vapor deposition chamber 4, i.e., the target value of the gas pressure difference P1, are maintained between 200 kPa and 550 kPa.

[0053] The vacuum breaking pressure adaptive control method of the vapor deposition pressing system in this embodiment combines the detection parameters of the internal pressure of the vapor deposition chamber 4 during the control process, and calculates the output pressure of the electromagnetic pressure regulating valve 21 through the preset air pressure difference target value, so as to realize the controllable output of the electromagnetic pressure regulating valve 21. In this way, the magnitude of the vacuum breaking force at the pressing platform 1 remains relatively constant compared with the internal air pressure of the chamber, thereby making the vacuum breaking process stable and efficient, and preventing displacement deviation, avoiding damage to the screen 6 due to misalignment or affecting the normal operation of the production line.

[0054] The above embodiments are only for illustrating the technical concept and features of the present invention. Their purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be used to limit the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A vapor deposition and pressing system, characterized in that, include: A pressing platform (1) is used to adsorb the screen body (6) and transport it. Several air outlets (13) are provided on the contact surface between the pressing platform (1) and the screen body (6). The several air outlets (13) are connected to the vacuum air source (22) through air pipes (23). An electromagnetic pressure regulating valve (21) is connected in series with the air pipe (23) to control the gas pressure of the vacuum-breaking air source (22) to the plurality of air outlets (13), thereby controlling the pressure of the vacuum-breaking gas sent out by the plurality of air outlets (13). The robotic arm (3) is used to carry the screen (6) sent by the pressing platform (1) and complete the transfer; The vapor deposition chamber (4) is in which the pressing platform (1) and the robot (3) are arranged; A pressure detection unit (41) is installed in the vapor deposition chamber (4) to detect the pressure in the vapor deposition chamber (4); The control unit (5) has a data input terminal connected to the air pressure detection unit (41) and a control output terminal connected to the electromagnetic air pressure regulating valve (21). It is used to adjust the output gas pressure of the electromagnetic air pressure regulating valve (21) according to the air pressure in the vapor deposition chamber (4). The control unit (5) is equipped with a target value P1 for air pressure difference. The output gas pressure P3 of the electromagnetic air pressure regulating valve (21) is determined according to the target value P1 for air pressure difference and the air pressure P2 in the vapor deposition chamber (4), where P3 = P1 + P2.

2. The vapor deposition and pressing system according to claim 1, characterized in that, An air inlet is provided on the vapor deposition chamber (4), and the air inlet is connected to a positive pressure fan (7).

3. The vapor deposition and pressing system according to claim 1, characterized in that, The pressing platform (1) is flat and has several vacuum suction cups (14) on the side facing the screen (6). The several vacuum suction cups (14) are evenly arranged below the pressing platform (1).

4. The vapor deposition and pressing system according to claim 1 or 3, characterized in that, The plurality of air outlets (13) are evenly arranged on the bottom surface of the pressing platform (1). The pressing platform (1) has an air inlet chamber (11) inside, which is connected to the plurality of air outlets (13). The pressing platform (1) has an air inlet (12) connected to the air inlet chamber (11). The cross-sectional area of ​​the air inlet (12) is equal to the sum of the cross-sectional areas of the plurality of air outlets (13).

5. A method for adaptive control of vacuum breaking pressure in a vapor deposition and pressing system, characterized in that, The method is aimed at the vapor deposition pressing system as described in any one of claims 1 to 4. The gas pressure P2 of the vapor deposition chamber (4) is detected in real time. The gas pressure P3 output by the electromagnetic gas pressure regulating valve (21) is adjusted according to the internal gas pressure of the vapor deposition chamber (4) so ​​that the gas pressure P3 output by the electromagnetic gas pressure regulating valve (21) and the gas pressure P2 of the vapor deposition chamber (4) are maintained at the target gas pressure difference value P1, that is, P1 = P3 - P2.

6. The adaptive control method for vacuum breaking pressure of the vapor deposition and pressing system according to claim 5, characterized in that, The vapor deposition chamber (4) is under positive pressure, and the gas pressure P2 of the vapor deposition chamber (4) is between 2.5 kPa and 6 kPa.

7. The adaptive control method for vacuum breaking pressure of the vapor deposition and pressing system according to claim 6, characterized in that, The output gas pressure P3 of the electromagnetic pressure regulating valve (21) and the output gas pressure P2 of the vapor deposition chamber (4), i.e. the target value of the gas pressure difference P1, are maintained between 200 kPa and 550 kPa.

Citation Information

Patent Citations

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