Surface treatment device

Abstract

The present invention provides a surface treatment device that reduces the amount of treatment liquid (Q) that is scattered from a flow-coating type surface treatment device. A honeycomb member (60) is provided below the vertical direction of a carrying hook (16). The honeycomb member (60) is formed by connecting a plurality of cylindrical members with hexagonal holes. When the treatment liquid (Q) falls in the vertical direction (arrow (α) direction), the treatment liquid (Q) passes through the through holes of the honeycomb member. Then, when colliding with the liquid surface (H), a portion of the treatment liquid (Q) is bounced back. The portion of the treatment liquid (Q) that is bounced back is bounced back in the inclined direction, and thus collides with the inner wall of the through hole of the honeycomb member (60). Thus, the amount of treatment liquid (Q) that reappears on the upper surface of the through hole is reduced. Thus, the honeycomb member (60) achieves a scattering prevention function.

Description

[0001] This application is a divisional application of the invention patent application entitled "Surface Treatment Apparatus", filed on December 25, 2019, with application number 201911357841.7. Technical Field

[0002] This invention relates to a pouring surface treatment apparatus, and more particularly to preventing liquid from splashing into adjacent treatment chambers. Background Technology

[0003] In patent document 1 Figure 10 The present invention discloses a casting-type surface treatment device that has a scattering prevention component installed at the bottom of the workpiece.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2014-88600

[0005] As for the anti-scattering device disclosed in Patent Document 1, sponges, filters, and fibrous materials (such as the synthetic fiber lock (trademark) manufactured by TOYO CUSHION) are included (paragraph 0085 of Patent Document 1). However, these cannot achieve a sufficient anti-scattering effect. This is because, in these materials, droplets that collide with the surface of the anti-scattering device are directly bounced off. When this bounce occurs, the liquid may mix into the adjacent processing chamber.

[0006] To address this issue, one approach is to increase the distance between the processing chambers or to make the lower surface of the spacers between the processing chambers sufficiently higher than the surface from which the droplets bounce. However, this would result in an overall increase in the size of the device. Summary of the Invention

[0007] The present invention addresses the above-mentioned problems and aims to provide a miniaturized, pouring-type surface treatment apparatus that prevents liquid from mixing into adjacent processing chambers.

[0008] 1) This invention is a surface treatment apparatus comprising: a first treatment chamber into which a workpiece is held vertically; a first treatment liquid pouring mechanism disposed in the first treatment chamber, which pours a first treatment liquid from the upper part of the workpiece being poured into the surface area of ​​the workpiece being held vertically; a second treatment chamber adjacent to the first treatment chamber into which the workpiece is held vertically; and a second treatment liquid pouring mechanism disposed in the second treatment chamber, which pours a second treatment liquid from the upper part of the workpiece being poured into the surface area of ​​the workpiece being held vertically. The treatment liquid is poured onto the surface area of ​​the workpiece; a dividing wall is provided between the first treatment chamber and the second treatment chamber, having an inlet opening for the workpiece to be carried in while being held vertically; and a mixing reduction mechanism is provided in the first or second treatment chamber near the dividing wall to reduce the situation where the treatment liquid falling from the workpiece bounces off the ground and mixes into the adjacent treatment chamber through the inlet opening, the mixing reduction mechanism being a shape consisting of a plurality of longitudinally elongated individual cylindrical members with their openings facing vertically.

[0009] As the treatment liquid passing through the opening is bounced off the ground, it collides with the inner wall of the elongated, individual cylindrical component and falls back onto the ground. This provides a flow-type surface treatment apparatus that prevents liquid from mixing into adjacent treatment chambers and allows for miniaturization.

[0010] 2) In the surface treatment apparatus of the present invention, the shape formed by arranging a plurality of the longitudinally elongated individual cylindrical members is approximately honeycomb-shaped. Therefore, the treatment liquid collides with the inner wall of the longitudinally elongated individual cylindrical members in the approximately honeycomb shape and falls toward the landing surface.

[0011] 3) In the surface treatment apparatus of the present invention, the approximate honeycomb shape is a honeycomb shape. Therefore, the treatment liquid collides with the inner wall of the longitudinally elongated individual cylindrical member of the honeycomb shape and falls towards the landing surface.

[0012] 4) In the surface treatment apparatus of the present invention, the surface treatment apparatus further includes a first treatment liquid recovery mechanism, which recovers the first treatment liquid falling from the bottom of the workpiece and provides the first treatment liquid to the first treatment liquid pouring mechanism.

[0013] Furthermore, the surface treatment apparatus also includes a second treatment liquid recovery mechanism, which recovers the second treatment liquid that falls from the bottom of the workpiece and supplies it to the second treatment liquid pouring mechanism. Therefore, it is possible to reduce the possibility of different treatment liquids being mixed in the recovered treatment liquid.

[0014] 5) In the surface treatment apparatus of the present invention, the surface treatment apparatus has a first treatment liquid reservoir below the workpiece in the first treatment chamber. The first treatment liquid reservoir stores the first treatment liquid that flows down from the bottom of the workpiece. In the first treatment liquid reservoir, the liquid surface is exposed, and a gap is provided between the liquid surface and the lower surface of the mixing reduction mechanism. This reduces the amount of scattering from the surface of the first treatment liquid.

[0015] 6) In the surface treatment apparatus of the present invention, the first treatment liquid pouring mechanism draws in the first treatment liquid stored in the first treatment liquid reservoir and pours it in. Therefore, it is possible to reduce the possibility of the second treatment liquid being mixed in the recycled first treatment liquid.

[0016] 7) In the surface treatment apparatus of the present invention, the surface treatment apparatus further includes an airflow control mechanism that controls the airflow so that the treatment liquid that is bounced off the contact surface returns along the vertical direction. This reduces bounce from the contact surface.

[0017] 8) In the surface treatment apparatus of the present invention, the workpiece is sheet-shaped, and the airflow control mechanism has a transversely elongated opening along the loading direction toward the sheet-shaped workpiece, through which air is drawn. Therefore, airflow can be used to reduce bounce from the contact surface.

[0018] 9) The present invention is a surface treatment apparatus comprising: a first treatment chamber into which a sheet-like workpiece is conveyed in a vertically held state; a first treatment liquid pouring mechanism disposed in the first treatment chamber, which pours a first treatment liquid from the upper part of the workpiece being conveyed into the treatment chamber onto the surface area of ​​the workpiece being held vertically; a second treatment chamber adjacent to the first treatment chamber into which the workpiece is conveyed in a vertically held state; and a second treatment liquid pouring mechanism disposed in the second treatment chamber, which pours a second treatment liquid from the upper part of the workpiece being conveyed into the treatment chamber onto the surface area of ​​the workpiece being held vertically. The partition wall, which is provided between the first processing chamber and the second processing chamber, has an inlet opening for the treated material to be carried in while being held vertically; and a mixing reduction mechanism, which is provided in the first or second processing chamber near the partition wall to reduce the situation where the treatment liquid falling from the bottom of the treated material is bounced off the ground and the bounced treatment liquid mixes into the adjacent processing chamber from the inlet opening. The mixing reduction mechanism reduces the amount of treatment liquid bounced off the ground by controlling the air to flow vertically along the two planes of the sheet-like treated material.

[0019] Therefore, by utilizing the vertical airflow along the two planes of the sheet-like workpiece, the amount of treatment liquid bouncing off the contact surface can be reduced. This allows for the provision of a miniaturized, pour-flow surface treatment apparatus that prevents liquid mixing with adjacent treatment chambers.

[0020] 10) In the surface treatment apparatus of the present invention, the airflow control mechanism has a slit-shaped guide portion disposed near the lower part of the sheet-shaped workpiece along two planes of the workpiece. This guide portion can increase the air intake speed.

[0021] 11) In the surface treatment apparatus of the present invention, the mixing reduction mechanism has a slit-shaped guide portion disposed near the lower part of the sheet-shaped workpiece along two planes of the workpiece. Therefore, the velocity of the air flowing vertically along the two planes of the sheet-shaped workpiece can be increased.

[0022] 12) In the surface treatment apparatus of the present invention, the surface treatment apparatus has a height adjustment mechanism for adjusting the distance between the opening of the contamination reduction mechanism and the workpiece. Therefore, the distance between the opening of the contamination reduction mechanism and the workpiece can be adjusted according to the size of the workpiece.

[0023] 13) The present invention is a surface treatment apparatus, characterized in that the surface treatment apparatus comprises: a first treatment chamber into which a workpiece is carried in a vertically held state; a first treatment liquid pouring mechanism disposed in the first treatment chamber, which pours a first treatment liquid from the upper part of the carried-in workpiece toward the surface area of ​​the workpiece held in the vertical direction; a second treatment chamber adjacent to the first treatment chamber into which the workpiece is carried in a vertically held state; and a second treatment liquid pouring mechanism disposed in the second treatment chamber, which pours a second treatment liquid from the upper part of the carried-in workpiece toward the surface area of ​​the workpiece held in the vertical direction. The treatment liquid is poured onto the surface area of ​​the object being treated; a partition wall is provided between the first treatment chamber and the second treatment chamber, having an inlet opening for the object being treated to be carried in while being held vertically; and a mixing reduction mechanism is provided in the first or second treatment chamber near the partition wall to reduce the situation where the treatment liquid falling from the bottom of the object is bounced off the contact surface and the bounced treatment liquid mixes into the adjacent treatment chamber from the inlet opening, wherein the mixing reduction mechanism is a bounce direction changing part whose shape of the contact surface increases vertically as it approaches the inlet opening.

[0024] The shape of the contact surface of the rebound direction changing section increases vertically as it approaches the inlet opening. Therefore, the rebound direction can be directed away from the inlet opening. This allows for a miniaturized, pour-type surface treatment apparatus that prevents liquid from mixing with adjacent processing chambers.

[0025] 14) The present invention is a surface treatment method in which, when the workpiece to be treated is carried into a first treatment chamber while held vertically, a first treatment liquid is poured from the top of the workpiece to the surface area of ​​the workpiece held vertically. After the workpiece is poured with the first treatment liquid, it is carried into a second treatment chamber adjacent to the first treatment chamber while held vertically, and a second treatment liquid is poured from the top of the workpiece to the surface area of ​​the workpiece held vertically. An entry opening is provided between the first and second treatment chambers to allow the workpiece to be carried in while held vertically. In the first or second treatment chamber, near the dividing wall, a plurality of elongated individual cylindrical members are arranged with the openings facing vertically to reduce the possibility that the treatment liquid falling from the bottom of the workpiece bounces off the ground and mixes into the adjacent treatment chamber from the entry opening.

[0026] Therefore, it is possible to provide a flow-type surface treatment device that does not allow liquid to mix with adjacent processing chambers and can be miniaturized.

[0027] 15) The surface treatment apparatus of the present invention comprises: a treatment chamber into which a workpiece is carried in while being held vertically; a treatment liquid pouring mechanism disposed in the treatment chamber to pour treatment liquid from the upper part of the workpiece being carried in to the surface area of ​​the workpiece being held vertically; a partition wall disposed in the treatment chamber having an entry opening for carrying the workpiece in while being held vertically; and a mixing reduction mechanism disposed in the treatment chamber near the partition wall to reduce the mixing of treatment liquid from the entry opening to the outside of the treatment chamber, wherein the treatment liquid is treatment liquid that falls from the lower part of the workpiece and bounces off the ground and bounces off the entry opening to the outside of the treatment chamber, and the mixing reduction mechanism is a shape in which a plurality of longitudinally elongated individual cylindrical members are arranged with their openings facing vertically.

[0028] Therefore, it is possible to provide a flow-type surface treatment apparatus that prevents liquid from mixing with adjacent processing chambers and allows for miniaturization.

[0029] In this specification, "approximate honeycomb shape" refers to a shape formed by arranging multiple polygonal or circular individual cylindrical components with their openings facing the vertical direction. Furthermore, "honeycomb structure" refers to a structure in which the individual cylindrical components in the aforementioned approximate honeycomb structure are hexagonal.

[0030] For "pouring from top to bottom", it is acceptable as long as the result is a pouring state from top to bottom, including cases where the pouring is performed directly onto the object being treated or indirectly through a holding part that holds the object being treated.

[0031] The features, other objects, uses, effects, etc. of the present invention will be made clear through the implementation methods and accompanying drawings. Attached Figure Description

[0032] Figure 1 This is a top view of the configuration of the surface treatment device 300.

[0033] Figure 2 This is a side view of the surface treatment apparatus 300 viewed from the α direction.

[0034] Figure 3 The electroless copper plating tank 200 is part of the surface treatment apparatus 300. Figure 1 β-β line sectional view.

[0035] Figure 4 This is a diagram showing the state of the electroless copper plating tank 200 as viewed from above.

[0036] Figure 5 This is a diagram showing the structure of the liquid ejection section 4.

[0037] Figure 6 This is a diagram showing the flow of the processing liquid Q ejected from the nozzle 6 of the liquid ejection section 4.

[0038] Figure 7 This is a diagram showing an improved example of a flow-changing component 40 being disposed in the liquid ejection section 4.

[0039] Figure 8 It is a cross-sectional view of the flow of the processing fluid Q before and after colliding with the flow converter 40.

[0040] Figure 9 This diagram illustrates the connection relationships used to control the movement of the conveying mechanism 18.

[0041] Figure 10 This is a cross-sectional view showing the guide rail 14 between the third water washing tank 312 and the electroless copper plating tank 200.

[0042] Figure 11 Detailed information about the honeycomb component 60 is shown (stereoscopic view, enlarged view of key parts).

[0043] Figure 12 This is a diagram used to illustrate the relationship between droplets and bounce.

[0044] Figure 13 This is a diagram showing the conditions of the confirmation experiment for the effect of preventing scattering.

[0045] Figure 14 This is a graph showing the results of a confirmation experiment demonstrating the effectiveness of the anti-scattering test.

[0046] Figure 15 This is a diagram showing an example of a section where the direction of the rebound changes.

[0047] Figure 16 This is the front view of the third embodiment.

[0048] Figure 17 It shows from Figure 16 A diagram showing the positional relationship between the plate-shaped workpiece 10 and the tray 80 as observed in the direction of arrow α.

[0049] Figure 18 This is a diagram showing the details of tray 80.

[0050] Figure 19 It shows from Figure 16 The diagram showing the positional relationship between the plate-shaped workpiece 10 and the tray 80 as observed by arrow δ1.

[0051] Figure 20 This figure illustrates an embodiment in which the guide section 120 is provided.

[0052] Label Explanation

[0053] 60: Honeycomb component; 61: Through hole; 79: Rebound direction change part; 80: Tray. Detailed Implementation

[0054] (1. First Embodiment)

[0055] 1.1 Structure of the surface treatment apparatus 300

[0056] First, use Figure 1 and Figure 2 The structure of the surface treatment apparatus 300 of the present invention will be described below. Furthermore, Figure 1 This is a top view of the configuration of the surface treatment device 300. Figure 2 Observed from the α direction Figure 1 A side view of the surface treatment apparatus 300 shown. Additionally, in Figure 1 In the middle, the following was omitted. Figure 2 The shown are the handling hook 16 and the handling mechanism 18.

[0057] like Figure 1As shown, in the surface treatment apparatus 300, along the plate-shaped workpiece 10 (which is the object to be treated) Figure 2 The conveying direction X is sequentially arranged with a loading unit 302, a first washing tank 304, a decontamination tank 306, a second washing tank 308, a pretreatment tank 310, a third washing tank 312, an electroless copper plating tank 200, a fourth washing tank 314, and an unloading unit 316, and the necessary processes for electroless copper plating are performed in this order. In each tank, a process is formed... Figure 2 The notch 8 in the passageway of the conveying hook 16 shown. Figure 1 It is set to extend along the vertical direction. Furthermore, the details of each process will be described later.

[0058] The surface treatment apparatus 300 also includes: a handling hook 16, which is connected to a clamp 15 ( Figure 2 The system handles and moves the plate-shaped workpiece 10, which is held vertically, horizontally; and the transport mechanism 18 moves the workpiece into the slots via the transport hooks 16. Additionally, Figure 2 The image shows the plate-shaped workpiece 10 being mounted on the transport hook 16 via the loading section 302.

[0059] After the plate-shaped workpiece 10 is installed via the loading section 302, the transport mechanism 18 begins to move in the horizontal direction X, thereby passing the plate-shaped workpiece 10 through each tank (such as the electroless copper plating tank 200). Afterward, the transport mechanism 18 finally stops at the unloading section 316, unloading the electroplated plate-shaped workpiece 10 from the transport hook 16.

[0060] Figure 3 Electroless copper plating bath 200, which is part of the surface treatment apparatus 300, is an electroless copper plating bath. Figure 1 ) β-β section view. Figure 4 This shows the view from above. Figure 3 A diagram showing the state of the electroless copper plating bath 200. Additionally, in Figure 4 In the text, the handling hook 16 and the handling mechanism 18 are omitted.

[0061] Figure 3 The electroless copper plating tank 200 shown has: a tank body 2, which is placed on a frame 56; and a circulation pump 50, which supplies the treatment liquid Q (electroless copper plating solution) stored at the bottom of the tank body 2 to the liquid spray section 4 and circulates the treatment liquid Q.

[0062] To process plate-shaped workpieces 10, liquid ejection sections 4 with nozzles 6 are installed inside each tank, such as the electroless copper plating tank 200. For example... Figure 3As shown, the treatment liquid Q is sprayed obliquely upward relative to the horizontal surface from the nozzle 6 of the liquid spraying section 4 toward the plate-shaped workpiece 10. Consequently, inside the tank 2, the treatment liquid Q (electrolytic copper plating solution) collides with the upper part of the plate-shaped workpiece 10, which is held by the transport hook 16. As a result, as the treatment liquid Q spreads and moves on the plate-shaped workpiece 10, it adheres to the surface of the plate-shaped workpiece 10. Furthermore, the detailed structure of the liquid spraying section 4 will be described below.

[0063] In this way, the plate-shaped workpiece 10 is not immersed in the stored treatment liquid Q, but the circulating treatment liquid Q is spread on the plate-shaped workpiece 10, thereby reducing the total amount of treatment liquid Q used by the surface treatment apparatus 300 as a whole compared to the immersion structure.

[0064] The handling mechanism 18 consists of Figure 3 The device comprises guide rails 12 and 14, a support component 20, and transport rollers 22 and 24. Transport rollers 22 and 24 are mounted on the bottom of the support component 20 to move the transport mechanism 18 along the guide rails 12 and 14. The transport rollers 22 and 24 are driven by an electric motor (not shown). Furthermore, guide rails 12 and 14 are fixed to frames 52 and 54, respectively. Because the transport is performed horizontally in this manner, lifting of plate-shaped workpieces is unnecessary, resulting in a lower device height and thus saving space.

[0065] like Figure 3 As shown, the transport hook 16 is fixed below the support member 20, which is installed across the two guide rails 12 and 14. This reduces the vibration of the plate-shaped workpiece 10 and the deformation of the structure of the support transport mechanism 18 (guide rails 12 and 14, frames 52 and 54, etc.).

[0066] In addition, Figure 4 Multiple magnets 21 are embedded at designated positions on the guide rails 12 and 14. The conveying mechanism 18 has a magnetic sensor 19 for detecting the magnets 21 on the guide rails 12 and 14. The magnetic sensor 19 is located below the support member 20 (at one location on the side of the guide rail 14).

[0067] Thus, the transport hook 16, which moves within the electroless copper plating bath 200, can be stopped at a predetermined position (e.g., Figure 4 The central position of the electroless copper plating bath 200 shown.

[0068] like Figure 3 As shown, the circulation pump 50 installed in each tank is connected to the bottom of the tank body 2, and the tank body 2 is connected to the liquid ejection section 4 via the circulation pump 50 (shown by the dashed arrow). Thus, the treatment liquid Q stored at the bottom of the tank body 2 is supplied to the liquid ejection section 4 again through the circulation pump 50.

[0069] The tank 2 consists of side walls 2a and 2b and a bottom 2c. These side walls 2a and 2b, along with the bottom 2c, are assembled into a single unit by processing and bonding materials such as PVC (polyvinyl chloride). In the tank 2, the bottom 2c receives the treatment fluid after collision with the plate-shaped workpiece 10. Furthermore, in the tank 2, Figure 1 All tanks except the electroless copper plating tank 200 shown use the same shape. That is, all tanks have the same structure, only the types of processing solutions (plating solution, cleaning solution, rinsing water, etc.) used in each tank are different.

[0070] In addition, Figure 3 The side wall 2b of the tank 2 shown has a notch, i.e., a slit 8, extending vertically. This allows the plate-shaped workpiece 10 to pass through the slit 8 when the transport hook 16 is used for transport. However, if the lower end 8a of the slit 8 is too low, the processing liquid Q stored in the tank 2 may overflow and flow outwards.

[0071] Therefore, the supply of treatment fluid Q needs to be adjusted so that the liquid level H of the treatment fluid Q stored in tank 2 is ( Figure 3 The liquid level (H) of the treatment fluid Q stored in the tank 2 is always located lower than the lower end 8a of the gap 8. In this embodiment, the liquid level (H) of the treatment fluid Q stored in the tank 2 is kept below the lower end 8a of the gap 8. Figure 3 The total amount of treatment liquid Q used is determined by the position of the tank body 2 being located lower than the lower end 8a of the gap 8, and the tank body 2 is connected to the liquid spray section 4 via the circulation pump 50.

[0072] [Structure of liquid ejection section 4]

[0073] exist Figure 5 The structure of the liquid ejection section 4 is shown in the figure. Figure 5 yes Figure 3 An enlarged view of the liquid ejection section 4 shown.

[0074] like Figure 5 As shown, the liquid ejection section 4 is securely mounted on the base F1 by two U-shaped fasteners F2. The base F1 is obtained by fixing a square tube to the side wall 2a. In this embodiment, the liquid ejection section 4 is fastened with an appropriate strength that allows for manual rotation.

[0075] like Figure 4 As shown, the liquid ejection section 4 is composed of a circular tube that has an internal space and serves as a pipe component, with both ends sealed along its length. Furthermore, a plurality of holes arranged at predetermined intervals along the length constitute the ejection outlet 6. A flexible pipe T1 and a piping T2, which penetrate the sidewall 2a of the tank, are connected to the liquid ejection section 4. The piping T2 is connected to the discharge port of the pump 50. Thus, the processing liquid Q received from the pump 50 can be ejected from the ejection outlet 6.

[0076] like Figure 6 As shown in Figure A, the ejection angle θ of the nozzle 6 is set obliquely upward relative to the horizontal plane L (e.g., in the range of 5° to 85°). Therefore, the flow of the treatment fluid Q ejected from the nozzle 6 moves along a parabola. The position of the vertex Z is determined by the ejection velocity V of the treatment fluid Q and the ejection angle θ. Furthermore, the ejection velocity V of the treatment fluid Q depends on the pressure from the pump 50 and the size of the nozzle 6.

[0077] In this embodiment, the ejection angle θ is designed such that, with the liquid ejection section 4 (radius r) positioned at a predetermined distance D from the plate-shaped workpiece 10, the processing liquid Q ejected at an ejection velocity V collides with the plate-shaped workpiece 10 at the vertex Z of the parabola. Figure 6 The position of the vertex Z of the parabola shown in B does not contain the vertical velocity component Vy of the treated liquid Q, leaving only the horizontal velocity component Vx at the time of ejection, thus reducing the generation of bubbles.

[0078] Furthermore, since the liquid flow collides perpendicularly with the surface of the plate-shaped workpiece 10, the processing liquid Q colliding with the plate-shaped workpiece 10 spreads uniformly in a concentric circle on the surface. Alternatively, the collision can occur near the vertex, that is, at a predetermined distance in front of or behind the vertex.

[0079] When the treatment fluid Q is sprayed horizontally or downwards relative to the horizontal plane L without being sprayed diagonally upwards, the vertical velocity component Vy of the treatment fluid Q continuously increases, and this vertical velocity component Vy also increases accordingly in the composite velocity V. As a result, the treatment fluid Q colliding with the plate-shaped workpiece 10 will disperse in the y-direction and easily generate bubbles.

[0080] As described above, by spraying the treatment liquid in an upward direction relative to the horizontal plane L, the generation of foam that occurs when colliding with the workpiece is suppressed, thereby preventing an increase in the dissolved oxygen content in the treatment liquid Q.

[0081] In addition, such as Figure 7 As shown, alternatively, a flow-changing component 40 for altering the flow direction of the ejected treatment liquid Q can be installed on the outer periphery of the liquid ejection section 4, covering the nozzle 6. Furthermore, the flow-changing component 40 is spaced apart from the nozzle 6.

[0082] Figure 7 This is an enlarged view showing the state in which the direction of the ejected treatment fluid Q is changed by the flow converter 40. Figure 8 A is a γ1 cross-sectional view of the ejected treatment fluid Q (before colliding with the flow converter 40). Figure 8 B is a γ2 cross-sectional view of the treatment fluid Q after colliding with the converter component 40.

[0083] If the flow converter 40 is used, the liquid flow ejected from each nozzle 6 ( Figure 8 The cross-sectional area shown in Figure A collides with the converter plate, and the cross-sectional area increases ( Figure 8 (B). Therefore, upon collision with the plate-shaped workpiece 10, the liquid flows from adjacent nozzles 6 connect ( Figure 8 (B), thereby enabling the homogenization of the processing liquid Q that collides with the surface of the plate-shaped workpiece 10.

[0084] Ideally, the liquid should be homogenized like a stream ejected from a slit (or elongated hole). However, to create a parabolic trajectory similar to that of a stream ejected from a slit (or elongated hole), the slit needs to be narrow (and the slit area needs to be the same as the total area of ​​the orifice to achieve the same flow velocity), which makes it prone to clogging by impurities. Therefore, orifices are used to achieve the same effect as slits.

[0085] 1.2 Contents of each process in the surface treatment apparatus 300

[0086] use Figure 9 The contents of each process performed in the surface treatment apparatus 300 will be described. In addition, in this embodiment, the treatment liquid Q used in each tank of the surface treatment apparatus 300 is continuously circulated by the circulation pump 50 of each tank.

[0087] Figure 9 This diagram shows the connection relationships of the control units that control the operation of the conveying mechanism 18. (Example) Figure 9 As shown, magnetic sensor 19 ( Figure 4 The magnetic sensor 19 is connected to the PLC 30, which detects when the magnetic sensor reaches the top of the magnet positioned on the detection guide 14. The signal detected by the magnetic sensor 19 is provided to the PLC 30. Upon receiving the signal, the PLC 30 turns the motor 28 on / off, controlling the movement (forward, backward, stop, etc.) of the conveying rollers 22 and 24.

[0088] First of all, Figure 1 In the loading section 302 shown, the plate-shaped workpiece 10, which is to be coated, is mounted on the transport hook 16 by an operator or an installation device (not shown). Figure 2 (The state shown).

[0089] Then, when the operator presses the transport switch (not shown), the transport hook 16 moves along the guide rails 12 and 14 within the first washing tank 304. That is, the PLC 30 turns on the motor 28 to drive the transport rollers 22 and 24 forward.

[0090] Next, in the first washing tank 304, the plate-shaped workpiece 10 is washed by colliding water with both sides. The transport hook 16 stops in the first washing tank 304 for a predetermined time and then moves into the decontamination tank 306.

[0091] For example, after the PLC 30 receives a signal from the magnetic sensor 19 indicating that it has reached the center of the first washing tank 304, it stops the motor 28 for one minute. Then, it turns the motor 28 on again to drive the conveying rollers 22 and 24 forward. The same control is performed in the second washing tank 308, the third washing tank 312, and the fourth washing tank 314.

[0092] In the cleaning tank 306, the transport hook 16 is stopped for a specified time (e.g., 5 minutes) to allow the cleaning solution (swelling solution, resin etching solution, neutralizing solution, etc.) to collide with the plate-shaped workpiece 10 from both sides. Here, the cleaning treatment is the removal of processing stains (resin) left when opening holes in the plate-shaped workpiece 10.

[0093] For example, after receiving a signal from the magnetic sensor 19 indicating that the center of the decontamination tank 306 has been reached, the PLC 30 stops the motor 28 for 5 minutes. Then, it turns the motor 28 back on to drive the conveying rollers 22 and 24 forward. The same control is performed in the pretreatment tank 310 below.

[0094] Next, in the second washing tank 308, the plate-shaped workpiece 10 is washed by colliding water with both sides. The transport hook 16 is stopped in the second washing tank 308 for a predetermined time (e.g., 1 minute) and then moved into the forward processing tank 310.

[0095] In the pretreatment tank 310, the transport hook 16 is stopped for a specified time (e.g., 5 minutes) and the pretreatment liquid collides with the plate-shaped workpiece 10 from both sides.

[0096] Next, in the third washing tank 312, the plate-shaped workpiece 10 is washed by colliding water with both sides. The handling hook 16 is stopped in the third washing tank 312 for a specified time (e.g., 1 minute).

[0097] Then, it is moved to the electroless copper plating bath 200 ( Figure 3 , Figure 4 Before proceeding with the electroless copper plating process, the following reciprocating motion is performed a specified number of times. This is because, when holes such as through holes are created in the plate-shaped workpiece 10, air (bubbles) may remain in these holes, potentially preventing the processing solution Q from adhering to the plate-shaped workpiece 10. Therefore, it is necessary to thoroughly remove the air (bubbles) before performing the electroless copper plating process. Figure 10 The image shows the third water washing tank 312 and the electroless copper plating tank 200. Figure 1 A cross-sectional view of guide rail 14 between ( ). For example Figure 10 and Figure 1 As shown, a protrusion 26 serving as an impact generating part is provided on the guide rail 14. The water in the processing liquid Q can be removed by utilizing the impact generated when the transport roller 24 passes over the protrusion 26.

[0098] For example, PLC 30 receives a representation from magnetic sensor 19 Figure 10 After receiving a signal indicating that the magnet 21 has reached the center (i.e., the transport roller 24 has passed the protrusion 26), the motor 28 is controlled to drive the transport rollers 22 and 24 backward by a predetermined distance. Figure 10 (Y1 direction shown). Then, the conveying rollers 22 and 24 are driven forward until the magnet 21 is detected again (as shown). Figure 10 (Y2 direction shown). After repeating the above back-and-forth movement a predetermined number of times (e.g., 3 reciprocations), it stops at the central position within the electroless copper plating bath 200. Figure 4 In the electroless copper plating tank 200, the transport hook 16 stops for a specified time, allowing the electroless copper plating solution to collide with the plate-shaped workpiece 10 from both sides.

[0099] For example, after receiving a signal from the magnetic sensor 19 indicating that the center of the electroless copper plating tank 200 has been reached, the PLC 30 stops the motor 28 for 5 minutes. Afterward, the motor 28 is turned on to drive the conveying rollers 22 and 24 forward.

[0100] Next, in the fourth water washing tank 314, the plate-shaped workpiece 10 is washed by colliding water with both sides. The transport hook 16 is stopped in the fourth water washing tank 314 for a predetermined time (e.g., 1 minute), and then moved to the unloading unit 316.

[0101] Finally, the transport hook 16, which has moved to the unloading section 316, is stopped. For example, after the PLC 30 receives a signal from the magnetic sensor 19 indicating that it has reached the unloading section 316, it stops the motor 28. Then, the plate-shaped workpiece 10 is removed from the transport hook by the operator. This concludes the series of processes in the electroless coating process.

[0102] Furthermore, in the above embodiment, the surface treatment apparatus 300 employs a plurality of grooves ( Figure 1 The structure shown includes the first water washing tank 304, the decontamination tank 306, the pretreatment tank 310, the electroless copper plating tank 200, etc., but the surface treatment device 300 may also adopt a structure having at least one of these tanks.

[0103] In addition, in the above embodiment, the plate workpiece 10 is electroless copper plating is performed by the surface treatment apparatus 300, but other electroless plating films (e.g., electroless nickel plating, electroless tin plating, electroless gold plating, etc.) can also be performed on the plate workpiece 10.

[0104] In addition, the structure of the conveying mechanism 18 is not limited.

[0105] 1.3 Honeycomb Components

[0106] use Figure 11 The honeycomb component 60, located below the plumb bob of the transport hook 16, will be described. The honeycomb component 60 is formed by connecting multiple cylindrical components with hexagonal openings. Droplets of the treatment fluid fall vertically (arrow α direction), thus the droplets pass through the through-hole 61 (see reference). Figure 12 A). For example Figure 12 As shown in Figure B, the droplets after passing through the through-hole 61 collide with the liquid surface H, thus disrupting the droplet's shape and causing a portion to bounce off. At this point, a portion of the bounced droplets bounces off in an inclined direction, thus colliding with the inner wall of the cylindrical component. This reduces the amount of droplets ejected onto the through-hole 61. Utilizing this bounce off the inner wall, the honeycomb component 60 achieves a scattering prevention function.

[0107] use Figure 13 The experiment confirming the effectiveness of the honeycomb component 60 in preventing scattering is explained. For example... Figure 13 As shown in Figure A, a sidewall 71 with an opening 72 is provided between the first chamber 74 and the second chamber 75. In the first chamber 74, water is supplied from a height of 750 mm toward the bottom plate of the first chamber 74 at a distance M from the sidewall 71 at a rate of 0.3 L / min / N.

[0108] A tray 76 is provided adjacent to the side wall 71 of the second chamber 75 to collect water splashed from the first chamber 74 into the second chamber 75 and to measure the water volume. In this embodiment, the tray 76 has a length D of 180 mm, a width W of 125 mm, and a height H of 60 mm.

[0109] exist Figure 14 The figures show the measurement results under various altered experimental conditions. In experiments 1-3, like... Figure 13 As in case A, no components are set on the bottom surface. In this case, if the distance M = 180 mm and the height of the lower end of the opening 72 is changed to L1 = 60 mm, 160 mm, and 260 mm, the higher the height, the less splashing occurs, and the splashing amount becomes approximately 330 mL / 30 min, 36 mL / 30 min, and 7 mL / 30 min, respectively.

[0110] In addition, compared to Experiment 1, Experiments 4 and 5 involved supplying water from a distance of M = 100 mm and close to the side wall 71. Under these conditions, the splash amounts were 330 mL / 30 min and 32 mL / 30 min, respectively, at L1 = 60 mm and 160 mm.

[0111] As shown in Experiments 1-5, although the distance from the sidewall 71 is slightly different, the amount of splashing remains the same. However, if the height of the spacer L1 is increased, the amount of splashing decreases.

[0112] like Figure 13 As shown in Figure B, Experiment 6 was conducted with the water level at the bottom of chamber 1 (74) reaching a height of 20 mm; all other conditions were the same as in Experiment 1. Under these conditions, the splashing amount was 100 mL / 30 minutes. Thus, by adjusting the water level, even without increasing the interval height L1, the splashing amount is reduced to less than one-third. Figure 12 As shown in B, this is considered to be due to the water surface bouncing back.

[0113] like Figure 13 As shown in Figure C, experiments 7 and 8 involve setting the honeycomb component HC1 so that the height of the upper surface is equal to the height L1 of the opening 72. In this embodiment, the honeycomb HC1 is defined as follows: L: 530mm (pitch P: 23mm), W: 350mm (unit size CL: 12mm) x height H: 55mm x thickness t: 0.2mm (reference). Figure 11 The honeycomb component. According to Experiments 7 and 8, when the spacer height L1 is 60mm, distances M of 180mm and 100mm will reduce the splash amount to 15mL / 30min, which is less than 1 / 20 of that in Experiment 1.

[0114] In experiments 7 and 8, the droplets bounced off the bottom surface. In this case, as... Figure 12 As shown in Figure C, similar to the case of being bounced off the water surface, the droplet bounced off the bottom surface of chamber 1 74 is disrupted and a portion of the droplet is bounced off. In this case, a portion of the bounced droplet is blocked by the inner wall of the honeycomb component 60.

[0115] Experiment 9 involved the use of honeycomb component HC2. Honeycomb HC2 had the following dimensions: L: 530mm (pitch P: 5.4mm), W: 350mm (unit size CL: 3.3mm), height H: 55mm, and thickness t: 0.1mm. This means the through-hole 61 was smaller than in Experiments 7 and 8. Even with this smaller through-hole 61, the splashing amount was reduced to less than approximately one-quarter compared to Experiment 1. According to the inventors, the higher splashing amount in Experiment 9 was because, compared to honeycomb component HC1, the area of ​​the thickness t of honeycomb component HC2 was increased compared to the area of ​​the exposed surface of through-hole 61; therefore, water droplets did not enter through-hole 61 but were bounced off the upper surface.

[0116] By providing the honeycomb component 60 described above, a surface treatment apparatus with minimal rebound can be provided even when the height is reduced to the opening in the side wall 2b. Therefore, even with an overall miniaturized surface treatment apparatus, the mixing of liquid into adjacent processing chambers can be reduced.

[0117] 1.4 Regarding the modified examples

[0118] In the above embodiment, a honeycomb component 60 with a honeycomb structure is used as a rebound-preventing part, but it is not limited to this. A honeycomb-like structure, similar to the honeycomb component 60, can also be used, formed by arranging multiple polygonal or circular cylindrical components other than hexagons. That is, a shape obtained by arranging multiple longitudinally elongated individual cylindrical components with the openings facing the vertical direction can be used. This is because, if this structure is used, droplets entering from the upper surface of the individual cylindrical component will pass through the through hole and be rebounded by the bottom surface, etc., and then enter the individual cylindrical component again from the lower surface of the individual cylindrical component. These droplets will be rebounded by the inner surface of the individual cylindrical component, thereby preventing the droplets from flying out from the upper surface of the individual cylindrical component.

[0119] In the implementation method, such as Figure 3 As shown, a surface treatment apparatus that directly sprays the treatment liquid Q from the liquid ejection section 4 onto the plate-shaped workpiece 10 has been described. However, a surface treatment apparatus that indirectly sprays the treatment liquid Q onto the plate-shaped workpiece 10 can also be used. That is, the present invention can be applied as long as it is a surface treatment apparatus of the following type.

[0120] Provide a surface treatment apparatus, which has:

[0121] Handling hooks are used to move items being processed.

[0122] A tank, which serves to allow the treatment fluid to adhere to the workpiece being transported by the transport hooks; and

[0123] The transport mechanism moves the transport hook into the tank.

[0124] in,

[0125] The tank has:

[0126] A liquid receiving section for receiving the processing liquid after it collides with the object being processed;

[0127] A liquid retention section, positioned above the liquid receiving section, is used to retain the processing liquid that collides with the object being processed; and

[0128] The liquid outlet is configured to allow the processed liquid that overflows and flows down from the liquid retention section to flow out toward the processed liquid, and its end protrudes from the liquid retention section or the connecting section connected to the liquid receiving section.

[0129] Furthermore, in this embodiment, different processing solutions collide with the workpiece in each processing chamber. For example, if the first processing solution is a plating solution, and this plating solution mixes with water, which is the adjacent second processing solution, there is no particular problem in the second processing chamber, but the amount of plating solution mixed into the second processing chamber is correspondingly reduced. Conversely, if the first processing solution is water, and this water mixes with the adjacent second processing solution, then the plating solution in the second processing chamber is mixed with water. The plating solution mixed with water is extracted and re-blown onto the workpiece, thus the function of the plating solution is correspondingly reduced.

[0130] Thus, problems will occur both when the first processing liquid is mixed with the second processing liquid and when the second processing liquid is mixed with the first processing liquid.

[0131] In addition, in this embodiment, a tank for the processing liquid Q is provided at the lower part of the plate-shaped workpiece 10, but this can be done in any way.

[0132] 2. (Second Implementation)

[0133] exist Figure 15 The second embodiment is shown. In the above embodiment, by providing a bounce-stopping part that prevents droplets bounced off the bottom surface from splashing into adjacent processing chambers, contamination into adjacent processing chambers is prevented. However, it is also possible to provide a similar... Figure 15 The rebound direction changing section 79, as shown, ensures that even if the droplet bounces, it bounces away from the opening of the side wall 2b. By controlling the rebound direction of the droplet in this way, the amount of rebound towards adjacent processing chambers can be reduced. This rebound direction changing section... Figure 15 The design employs a curved shape where the vertical height increases as it approaches gap 8, but a straight shape can also be used. In other words, any shape that increases vertically as it approaches gap 8 is acceptable, and any structure can be adopted.

[0134] 3. (Third Implementation)

[0135] exist Figure 16 The third embodiment is shown. In this embodiment, a flow control mechanism is provided that reduces the amount of droplets bouncing off the surface of the honeycomb component 60 by causing the air in the processing chamber to flow downwards. The flow control mechanism reduces splashing by drawing air and liquid downwards, as described later.

[0136] In this embodiment, a flow control mechanism is provided at the lower part of the honeycomb component 60. Figure 16 A tray 80 of the shape shown is used to control airflow. Figure 17 From Figure 16 The diagram viewed in the direction of arrow α. Additionally, in Figure 17 For ease of understanding, the structure without the frame 54 is illustrated in the diagram. Figure 17 As shown, trays 80 are provided at two locations, one at the bottom of the plate-shaped workpiece 10 and the other near the gap 8. This is to reduce splashing into the adjacent processing chamber near the gap 8.

[0137] use Figure 18 The shape of tray 80 is described. Figure 18 For ease of explanation, the relative positions of the honeycomb component 60 are shown with dashed lines. A plane 82a is continuously formed at the end of the frame 82. An inclined surface 84 is formed from the inner end of the plane 82a along the x-direction. An inclined surface 85 is formed from the end of the inclined surface 84 along the y-direction. In addition, a pair of caps 81b are inlaid on the upper surface of the longitudinal tubular component 81, and the pair of caps 81b forms a groove 81a.

[0138] In this embodiment, the width d1 of the groove 81a is approximately 2 mm. This width is determined simply so that the allowable amount (determined by the inner diameter) that the longitudinal tubular member 81 can draw in per unit time is greater than the amount of liquid collected by the tray 80 per unit time. However, if the distance d1 is too large, the flow rate will decrease when the airflow rate (flow rate (Q) = opening area (A) * flow velocity (V)) is constant; therefore, 5 mm or less is preferred.

[0139] exist Figure 19 The text shows from Figure 16 The arrow view is taken in the direction of arrow δ1. The tray 80 is configured such that, when viewed from above as shown, the inclined surfaces 84 are located on both sides of the plate-shaped workpiece 10, and the direction of the groove formed by the lower ends of the two inclined surfaces 84 is parallel to the plate-shaped workpiece 10.

[0140] A longitudinal tubular component 81 is connected to the end of the inclined plane 85. For example... Figure 16 As shown, the horizontal tubular component 88 and the vertical tubular component 81 are connected midway.

[0141] Thus, the liquid passing through the through hole 61 of the honeycomb component 60 is collected in the longitudinal tubular component 81 via the inclined surfaces 84 and 85. In addition, in this embodiment, the space 94 is drawn into a negative pressure state by a pump 92 provided at the end of the pipe 93.

[0142] An air intake 95 is provided at the top of the processing chamber. Air drawn in through the air intake 95 via the aforementioned suction flows from the through-hole 61 of the honeycomb member 60 through the inclined surfaces 84 and 85 to the longitudinal tubular member 81 and the transverse tubular member 88. Furthermore, it is discharged from the transverse tubular member 88 into the space 94 along with the collected liquid.

[0143] In addition, such as Figure 19 As shown, the tray 80 is configured such that inclined surfaces 84 are located on both sides of the plate-shaped workpiece 10, and the direction of the groove formed by the lower ends of the two inclined surfaces 84 is parallel to the plate-shaped workpiece 10. Therefore, when the pump 92 performs suction, it produces a... Figure 16 The airflow is in the direction of arrow δ2. In this way, by generating an airflow in the direction of arrow δ2 at the lower part of the plate-shaped workpiece 10, the posture of the thin plate-shaped workpiece 10 can be stabilized.

[0144] In this embodiment, a tray 80 is provided at the lower part of the honeycomb component 60, but it can also be a component other than the honeycomb component 60. Alternatively, the tray 80 can be provided without the honeycomb component 60. In this case, the intake airflow can also prevent droplet bounce.

[0145] Alternatively, a shape other than tray 80 can be used as the flow control mechanism. That is, any flow control mechanism can be used as long as it can reduce the amount of rebound of droplets jumping on the surface of honeycomb component 60 by making the air in the processing chamber flow from top to bottom.

[0146] In this embodiment, the suction of pump 92 is used to maintain the controlled air velocity in the processing chamber at 0.2 m / s to 0.5 m / s. By employing this level of air velocity, the posture of the plate-shaped workpiece 10 can be stabilized, and the surface rebound of the honeycomb component 60 can be reduced.

[0147] In this embodiment, the tray 80 at the lower part of the honeycomb component 60 is inclined. Therefore, the droplets that pass through the honeycomb component 60 bounce off at an angle, thus preventing the bounced droplets from passing through the through hole 61.

[0148] In this embodiment, the groove 81a is formed by a pair of caps 81b, but other methods, such as using a tube partially formed in the shape of the groove 81a, may also be used.

[0149] exist Figure 20 A shows an embodiment provided with a guide 120 for drawing in air. Figure 20 B and C respectively show Figure 20 Sectional view of A along line AA and BB. The guide part 120 is composed of covers 121a and 121b. Figure 20 D shows a perspective view of cover 121a.

[0150] The cover 121a has a side surface 122, a beveled portion 123, and a semicircular portion 125. Multiple through holes 122a are provided on the side surface 122. The cover 121b and cover 121a are symmetrical in shape.

[0151] If the covers 121a and 121b are positioned on the tray 80, the inclined surfaces 84 and 85 are held in contact with the inclined surface 123, and a portion of the longitudinal tubular member 81 is closed by the semicircular portion 125. Furthermore, the honeycomb member 60 is divided into two parts, forming a gap d1 between the honeycomb members 60 and onto the longitudinal tubular member 81, spaced apart by the side surface 122. This allows the suction inlet to be closer to the plate-shaped workpiece 10, thus increasing the suction force. Additionally, the suction inlet can be narrower, thereby increasing the airflow velocity below the plate-shaped workpiece 10. This reduces droplet bounce.

[0152] Furthermore, the problem of liquid droplets accumulating in the tray 80 due to the covers 121a and 121b can be solved by providing through holes 122a. The location and number of through holes 122a can be designed according to the amount of liquid accumulated in the tray 80.

[0153] exist Figure 20 In this design, covers 121a and 121b with side surfaces 122 are used, but the beveled surface 123 is not necessary if a separate holding mechanism is provided. Alternatively, the side surfaces 122 may be omitted. In this case, the suction inlet can be narrowed by using a cover consisting only of a semicircular portion 125, thereby increasing the airflow velocity at the lower part of the plate-shaped workpiece 10.

[0154] Furthermore, the case where the distance between the plate-shaped workpiece 10 and the tray 80 varies due to the shape of the plate-shaped workpiece 10 is also considered. In this case, such as Figure 20 As shown in B, the tray 80 can be configured to slide freely along the height direction. For this height adjustment, a tube 83 with an outer diameter approximately the same as the inner diameter of the longitudinal tubular member 81 can be provided at the lower part of the tray 80, or it can be configured with a corrugated structure. As for the mechanism to maintain the height of the tray 80 in a sliding position, any known mechanism can be used.

[0155] In addition, the control air velocity in the treatment room is not limited to the above range.

[0156] In addition, the air intake 95 and pump 92 mentioned above can be installed in each processing chamber.

[0157] Therefore, almost no air was directed into the treatment room. Figure 17 The airflow in the direction of arrow R (airflow towards gap 8) is almost vertical, thus stabilizing the posture of the plate-shaped workpiece 10.

[0158] Furthermore, the lower end face of frame 52 is located below the treatment fluid Q. Therefore, airflow into space 94 is achieved via the longitudinal tubular component 81 and the transverse tubular component 88.

[0159] In this embodiment, the condition of the treatment liquid Q is described, and the water washing tank for water washing (refer to...) Figure 1 The same structure can also be used.

[0160] In addition, the shape of tray 80 is not limited to the above.

[0161] In this embodiment, a flow control mechanism is used to reduce bounce, but a flow control mechanism can also be used simply to stabilize the attitude.

[0162] In this case, the apparatus of Embodiment 3 can be understood as an apparatus having an inventive concept as follows.

[0163] The surface treatment apparatus is characterized in that it has:

[0164] The first processing chamber is where sheet-like materials to be processed are moved in while being held vertically.

[0165] The first treatment liquid pouring mechanism is provided in the first treatment chamber, which pours the first treatment liquid from the upper part of the transported object to the surface area of ​​the object being treated which is held along the vertical direction.

[0166] The second processing chamber, which is adjacent to the first processing chamber, is for the object to be processed to be moved in a vertically held state.

[0167] The second treatment liquid pouring mechanism is provided in the second treatment chamber, which pours the second treatment liquid from the upper part of the transported workpiece to the surface area of ​​the workpiece held along the vertical direction.

[0168] A partition wall, which is provided between the first processing chamber and the second processing chamber, has an inlet opening that allows the workpiece to be processed to be moved in while being held vertically; and

[0169] A mixing reduction mechanism is provided in either the first or second processing chamber near the dividing wall to reduce the rebound of processing liquid falling from the bottom of the processed object onto the ground, and to prevent the rebounded processing liquid from mixing into adjacent processing chambers through the inlet opening.

[0170] The mixing reduction mechanism has an airflow control mechanism that controls the airflow to flow vertically along the two planes of the sheet-like workpiece.

[0171] In this invention, like Figure 20 In this way, by setting the guide part 120, the air flow rate is increased, thus achieving the effect of stabilizing the plate-shaped workpiece 10.

[0172] The present invention has been described above as a preferred embodiment, but it is not intended to limit the present invention and is only used for illustration. Modifications can be made within the scope and spirit of the appended claims as long as they do not depart from the scope and spirit of the present invention.

Claims

1. A surface treatment apparatus, characterized in that, The surface treatment device has the following features: The first processing chamber is where sheet-like materials to be processed are moved in while being held vertically. The first treatment liquid pouring mechanism is provided in the first treatment chamber, which pours the first treatment liquid from the upper part of the object to be treated into the surface area of ​​the object to be treated which is held along the vertical direction. The second processing chamber, which is adjacent to the first processing chamber, is for the object to be processed to be moved in a vertically held state. The second treatment liquid pouring mechanism is provided in the second treatment chamber, which pours the second treatment liquid from the upper part of the object to be treated into the surface area of ​​the object to be treated which is held along the vertical direction. The partition wall, which is provided between the first processing chamber and the second processing chamber, has an inlet opening that allows the processed object to be moved in while being held vertically. as well as A mixing reduction mechanism is provided in the first or second processing chamber near the dividing wall to reduce the amount of processing liquid falling from the bottom of the processed object and bouncing off the ground or water surface, causing the bouncing liquid to mix into the adjacent processing chamber through the inlet opening. The mixing reduction mechanism reduces the amount of treatment liquid that bounces off the ground or water surface by controlling the air to flow vertically along the two planes of the sheet-like treated material.

2. The surface treatment apparatus according to claim 1, characterized in that, The contamination reduction mechanism has slit-shaped guide portions disposed near the lower part of the sheet-like workpiece along two planes of the workpiece.

3. The surface treatment apparatus according to claim 1, characterized in that, The surface treatment apparatus has a height adjustment mechanism for adjusting the distance between the opening of the contamination reduction mechanism and the workpiece.

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