Gas diffuser laser cleaning and film removal equipment and method

Abstract

The present invention provides a gas diffuser laser cleaning and film removal device and method, comprising a nitric acid cleaning pool, wherein a limit frame is provided in the nitric acid cleaning pool, wherein the limit frame is used to fix and limit the gas diffuser, wherein diffusion holes are distributed in an array on the gas diffuser, and laser film removal devices are movably provided on both sides of the gas diffuser, wherein the fixed open cabin and the movable enclosing rib form a nitric acid cleaning pool with an open structure on the top during the cooperation process, and the inflatable protective cover together with the inclined laser head and the vertical laser head are driven by a mechanical arm to be below the liquid surface of the nitric acid solution to perform film removal operations, and the present invention adopts a combined cleaning and film removal method of laser and nitric acid immersion to complete the cleaning operation of the gas diffuser surface, which greatly shortens the immersion time, and the gas discharges dust during the overflow process, effectively preventing the diffusion hole from being blocked, and also ensuring that the laser film removal device can smoothly complete the laser film removal operation on the gas diffuser surface.

Description

Technical Field

[0001] The present invention relates to the technical field of gas diffuser cleaning devices, and in particular to a gas diffuser laser cleaning and film removal device and method. Background Art

[0002] The diffuser (gas diffuser, hereinafter referred to as DIFF), a component of chemical vapor deposition equipment, is an aluminum flat plate structure with gas diffusion holes evenly distributed on the surface. The air inlet surface is a straight hole, and the air outlet surface is an inclined hole. It is one of the most core components of the chemical vapor deposition chamber in the LCD and OLED manufacturing industries. DIFF is used in high-temperature and vacuum environments. Its function is to evenly diffuse the process gas entering the chamber into the chamber through the gas diffusion holes. Under high temperature, vacuum and power conditions, the gas is converted into plasma gas, which is eventually deposited on the peeled substrate to form a chemical vapor deposition film. However, after long-term use, an oxide film will form on the surface of the DIFF and adhere to the DIFF surface and the gas diffusion holes. Therefore, after six months to a year of use, the DIFF needs to be removed from the machine for cleaning and removal of the surface oxide film.

[0003] Therefore, a gas diffuser cleaning process and cleaning auxiliary equipment disclosed in the prior art with the publication number "CN115156146A" relates to the field of chemical vapor deposition device cleaning technology, and is a gas diffuser cleaning process and cleaning auxiliary equipment, including primary stripping → secondary stripping → grinding → sandblasting → chemical polishing → OVEN drying → warehouse inspection → packaging; the gas diffuser that is not stripped clean is subjected to secondary stripping, and the secondary stripping includes wet sandblasting → high-pressure water washing. By using wet sandblasting to remove local residues, reduce liquid immersion, and avoid pore expansion, the pore expansion of the gas diffuser is ensured to be <0.03mm; in addition, the surface roughness will not increase significantly when wet sandblasting is used for local operations, which can meet the requirement that the gas diffuser surface has a certain roughness and ensure the uniformity of grinding.

[0004] However, the above-mentioned gas diffuser cleaning process and cleaning auxiliary equipment still have obvious defects during use: the above-mentioned cleaning process cleans the gas diffuser by pickling and high-pressure water gun flushing, but this cleaning method is difficult to effectively clean the inside of the gas diffusion hole, thereby shortening the cleaning cycle. However, the traditional long-term nitric acid immersion method will cause the aperture of the gas diffusion hole to expand, which is not conducive to the long-term and stable use of the gas diffuser. Summary of the Invention

[0005] The object of the present invention is to provide a gas diffuser laser cleaning and film removal device and method to solve the problems raised in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A gas diffuser laser cleaning and film removal device comprises a nitric acid cleaning tank, wherein a limit frame is provided in the nitric acid cleaning tank, wherein the limit frame is used to fix and limit the gas diffuser, wherein diffusion holes are distributed in an array on the gas diffuser, and laser film removal devices are movably provided on both sides of the gas diffuser, wherein the laser film removal devices on both sides are driven by a robotic arm to remove the film from the surface of the gas diffuser, wherein the nitric acid cleaning tank comprises a fixed open cabin and a movable enclosing rib, wherein the fixed open cabin and the movable enclosing rib form a nitric acid cleaning tank with an open structure at the top, wherein a liquid inlet and a liquid outlet are respectively provided at the bottom of the fixed open cabin, wherein the liquid inlet and the liquid outlet are connected to a nitric acid storage tank via an embedded pipeline, and wherein the nitric acid solution is alternately transferred between the nitric acid storage tank and the nitric acid cleaning tank via the pipeline;

[0008] The laser film removal device includes an inclined laser head and a vertical laser head, and the inclined laser head and the vertical laser head are both fixedly installed in an inflatable protective cover, and the inflatable protective cover is fixedly installed at the operating end of a robotic arm. The robotic arm is provided with an air pumping device for continuously filling the inflatable protective cover with gas. The gas diffuser is immersed in the nitric acid solution put into the nitric acid cleaning tank during the cleaning and film removal process. The inflatable protective cover, together with the inclined laser head and the vertical laser head, is driven by the robotic arm to be below the liquid surface of the nitric acid solution to perform film removal operations. The gas continuously pumped into the inflatable protective cover by the air pumping device forms a gas protection space. The gas in the inflatable protective cover overflows outward through the edge where the inflatable protective cover and the gas diffuser abut against each other and several diffusion holes in the enclosed area. A distance sensor is also provided in the inflatable protective cover.

[0009] Preferably, the limiting frame includes a U-shaped frame and a positioning slot installed thereon, and the gas diffuser is installed on the U-shaped frame through the positioning slot.

[0010] Preferably, the robotic arms on both sides include an X-axis slide bar, a mechanism box is provided on the X-axis slide bar for sliding and translation, a Y-axis slide bar is fixedly connected to the mechanism box, a Z-axis mechanism box is provided on the Y-axis slide bar for sliding and translation, a Z-axis drive arm is provided on the Z-axis mechanism box in a lifting manner, and the inflatable protective cover is fixedly installed on the bottom of the Z-axis drive arm.

[0011] Preferably, the X-axis sliding rods on both sides are respectively fixedly mounted on the side away from the fixed open cabin or the movable enclosing rib.

[0012] Preferably, a sealing groove is provided on one side where the fixed open cabin and the movable enclosing rib abut against each other, and a sealing strip cooperating with the sealing groove is provided on the movable enclosing rib. A plurality of hydraulic telescopic cylinders are also installed on the side of the movable enclosing rib away from the fixed open cabin, and a plurality of the hydraulic telescopic cylinders are fixedly installed on a fixed seat on the side away from the movable enclosing rib, and the plurality of the hydraulic telescopic cylinders synchronously extend and retract to drive the movable enclosing rib to approach or move away from the fixed open cabin.

[0013] Preferably, the diffusion holes arranged in an array include a straight hole end and an inclined hole end, the straight hole end and the inclined hole end are connected to each other, the vertical laser head is used to perform film removal operations on the straight hole end, and the inclined laser head is used to perform film removal operations on the inclined hole end, and the inclined laser heads are arranged in a pair, and the inclined laser heads are symmetrically arranged on both sides of the vertical laser head.

[0014] Preferably, a filter box is further provided in the nitric acid storage tank, and the nitric acid solution flowing into the nitric acid storage tank through the liquid outlet is filtered through the filter box.

[0015] A method for laser cleaning and film removal of a gas diffuser, using the above-mentioned gas diffuser laser cleaning and film removal equipment, comprises the following steps:

[0016] Step 1: Drive the movable enclosing rib to separate from the fixed open cabin, hoist the gas diffuser into the fixed open cabin, and manually make the gas diffuser fit with the limiting frame to complete the fixing and limiting of the gas diffuser;

[0017] Step 2: Drive the movable enclosing rib to cooperate with the fixed open hatch to form a nitric acid cleaning pool, and pump the nitric acid solution in the nitric acid storage pool into the nitric acid cleaning pool through the liquid inlet hole until the gas diffuser is completely immersed in the nitric acid solution;

[0018] Step 3: Drive the robotic arms on both sides to move to the sides of the gas diffuser so that the inflatable protective covers on both sides are in close contact with the surface of the gas diffuser. By controlling the operation of the air pump device, gas is continuously introduced into the inflatable protective cover. The robotic arms are slowly moved downward so that the inflatable protective cover and the laser film removal device fixed thereto are completely immersed below the nitric acid solution.

[0019] Step 4: The robotic arms on both sides drive the inflatable protective covers connected to them to perform S-shaped movements to clean and remove the film on the surface of the gas diffuser. The gas continuously filled by the gas pump device forms a gas protection space in the inflatable protective cover, thereby protecting the inclined laser head and the vertical laser head installed in the inflatable protective cover. At the same time, the gas dries the surface of the gas diffuser during the outward flow from the inflatable protective cover, so that the inclined laser head or the vertical laser head can complete the film removal operation on the gas diffuser. In addition, the gas promotes the emptying of impurities in the diffusion hole during the flow from one end to the other end of the diffusion hole, which is beneficial to dredging the diffusion hole. The dust generated during the laser film removal process enters the nitric acid solution with the flow of gas and is finally filtered and collected;

[0020] Step 5: After the cleaning and film removal of the gas diffuser is completed, the nitric acid solution in the nitric acid cleaning tank is drained into the nitric acid storage tank through the liquid outlet, the movable enclosing rib is removed, the surface of the gas diffuser is manually cleaned, and then it is hoisted out of the limit frame.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] The present invention adopts a combined cleaning and film removal method of laser and nitric acid immersion to complete the cleaning operation of the gas diffuser surface. Compared with the traditional nitric acid immersion method, the immersion time is greatly shortened and the hole expansion rate is effectively reduced. At the same time, the film removal operation on the gas diffuser surface is synchronously completed during the nitric acid immersion process, further shortening the processing time. A gas protection space is formed in the inflatable protective cover to protect the laser film removal device. At the same time, the gas discharges the dust formed in the laser film removal process during the overflow process, prompting it to dissolve in the nitric acid solution. In addition, the gas passes through the diffusion hole during the overflow process, effectively preventing the diffusion hole from being blocked, and promoting the emptying and cleaning operation inside the diffusion hole after the film removal is completed. Furthermore, the gas can also effectively empty and dry the nitric acid solution on the gas diffuser surface covered in the inflatable protective cover, ensuring that the laser film removal device can smoothly complete the laser film removal operation on the gas diffuser surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a three-dimensional schematic diagram of the overall structure of the present invention;

[0024] Figure 2 This is a schematic diagram of the gas diffuser installation structure of the present invention;

[0025] Figure 3 This is a schematic diagram of the enlarged structure of region A of the present invention;

[0026] Figure 4 This is a schematic diagram of the working state of the laser film removal device of the present invention;

[0027] Figure 5Schematic diagram of the connection between the nitric acid storage tank and the nitric acid cleaning tank of the present invention;

[0028] Figure 6 It is a schematic diagram of the three-dimensional structure of the limiting frame of the present invention.

[0029] In the figure: 1 nitric acid cleaning tank, 2 limit frame, 3 gas diffuser, 4 diffusion hole, 5 fixed open hatch, 6 movable enclosing rib, 7 liquid inlet, 8 liquid outlet, 9 pipeline, 10 nitric acid storage tank, 11 tilted laser head, 12 vertical laser head, 13 inflatable protective cover, 14 air pump device, 15 gas protection space, 16 U-shaped frame, 17 positioning slot, 18 X-axis slide rod, 19 mechanism box, 20 Y-axis slide rod, 21 Z-axis mechanism box, 22 Z-axis drive arm, 23 sealing groove, 24 hydraulic telescopic cylinder, 25 straight hole end, 26 inclined hole end, 27 filter box. DETAILED DESCRIPTION

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] See also Figure 1-6 , the present invention provides a technical solution:

[0032] Example 1:

[0033] A gas diffuser laser cleaning and film removal device includes a nitric acid cleaning tank 1. A limiting frame 2 is provided in the nitric acid cleaning tank 1. The limiting frame 2 is used to fix and limit a gas diffuser 3. The gas diffuser 3 is provided with an array of diffusion holes 4 extending therethrough. Laser film removal devices are movably provided on both sides of the gas diffuser 3. The laser film removal devices on both sides remove the film from the surface of the gas diffuser 3 under the drive of a robotic arm. The nitric acid cleaning tank 1 includes a fixed open cabin 5 and a movable enclosing rib 6. The fixed open cabin 5 and the movable enclosing rib 6 form the nitric acid cleaning tank 1 with an open structure at the top during the cooperation process. A liquid inlet 7 and a liquid outlet 8 are respectively provided at the bottom of the fixed open cabin 5. The liquid inlet 7 and the liquid outlet 8 are connected to a nitric acid storage tank 10 through an embedded pipeline 9. The nitric acid solution is alternately transferred between the nitric acid storage tank 10 and the nitric acid cleaning tank 1 through the pipeline 9.

[0034] The laser film removal device includes an inclined laser head 11 and a vertical laser head 12. The inclined laser head 11 and the vertical laser head 12 are both fixedly installed in an inflatable protective cover 13. The inflatable protective cover 13 is fixedly installed at the operating end of the robotic arm. The robotic arm is provided with a pumping device 14 for continuously filling gas into the inflatable protective cover 13. The gas diffuser 3 is immersed in the nitric acid solution put into the nitric acid cleaning tank 1 during the cleaning and film removal process. The inflatable protective cover 13, together with the inclined laser head 11 and the vertical laser head 12, is driven by the robotic arm and is below the liquid surface of the nitric acid solution to perform the film removal operation. The gas continuously pumped into the inflatable protective cover 13 by the pumping device 14 forms a gas protection space 15. The gas in the inflatable protective cover 13 overflows outward through the edge where the inflatable protective cover 13 and the gas diffuser 3 are abutted and several diffusion holes 4 in the enclosed area. A distance sensor is also provided in the inflatable protective cover 13.

[0035] In this embodiment, the nitric acid cleaning pool 1 is used to immerse and clean the gas diffuser 3 placed on the limiting frame 2. The limiting frame 2 is used to limit and fix the gas diffuser 3. The limiting frame 2 includes a U-shaped frame 16 and a positioning slot 17 installed thereon. The gas diffuser 3 is installed on the U-shaped frame 16 through the positioning slot 17. Due to the special structure and working environment of the gas diffuser 3, an oxide film will be formed on its surface and in the gas diffusion hole after long-term use. Therefore, after half a year to one year of use, the gas diffuser 3 needs to be taken off the machine for cleaning and the surface oxide film needs to be removed. The above-mentioned nitric acid immersion cleaning is a commonly used gas diffuser 3 cleaning method in the prior art. The traditional immersion time usually requires 8-12 hours of continuous immersion. This immersion method is easy to use. It is easy to cause the gas diffuser 3 to expand, which in turn affects its subsequent gas phase deposition. Therefore, in order to reduce the expansion rate and improve the cleaning efficiency at the same time, a laser film removal device is added in this embodiment to perform film removal operations on the surface of the gas diffuser 3, and the laser film removal device is a pair of settings, respectively placed on the two sides of the gas diffuser 3. The film removal efficiency can be further improved by simultaneous film removal operations. In order to facilitate the installation of the gas diffuser 3, the nitric acid cleaning tank 1 in this embodiment adopts a fixed open cabin 5 and a movable enclosing rib 6 enclosed setting. When the fixed open cabin 5 and the movable enclosing rib 6 are enclosed to form the nitric acid cleaning tank 1, nitric acid solution is filled into the interior through the liquid inlet 7. When cleaning is completed, the nitric acid solution is extracted through the liquid outlet 8. At the same time, after the movable enclosing rib 6 is opened It is convenient for manual access to install and fix the gas diffuser 3 and the limit frame 2. In order to facilitate the storage of the nitric acid solution, a nitric acid storage tank 10 is further provided in this embodiment for storing the nitric acid solution to realize its transfer between the nitric acid storage tank 10 and the nitric acid cleaning tank 1. The transfer process is realized by a pump, and the nitric acid solution is transferred through the buried pipeline 9. At the same time, the laser film removal device includes an inclined laser head 11 and a vertical laser head 12. This is because the diffusion hole 4 includes a straight hole end 25 and an inclined hole end 26, and the straight hole end 25 and the inclined hole end 26 are interconnected. The vertical laser head 12 is used to perform film removal operations on the straight hole end 25, and the inclined laser head 11 is used to perform film removal operations on the inclined hole end 26. The inclined laser head 11 is set as a pair, and the inclined laser head 11 is symmetrically arranged on both sides of the vertical laser head 12. The inclined laser head 11 and the vertical laser head 12 can further ensure the efficient film removal work. Since the laser film removal device needs to be immersed below the nitric acid solution during the film removal process, due to the strong corrosiveness and instability of nitric acid, a main body made of a material resistant to nitric acid corrosion needs to be used as the installation equipment of the laser film removal device. Therefore, in order to prevent the nitric acid solution from contacting the laser film removal device and ensure that the laser does not attenuate energy, the inclined laser head 11 and the vertical laser head 12 are protected by an inflatable protective cover 13. The laser generates heat during operation, and the heat is evacuated to the nitric acid pool through the gas diffuser 3, thereby preventing the nitric acid solution from being locally overheated and causing nitric acid instability.At the same time, the laser film removal device does not work continuously in the nitric acid pool. It ensures that the heat is evacuated during each working interval before entering the next laser film removal process. The tilted laser head 11 and the vertical laser head 12 are connected to the main cabinet through optical fiber cables arranged inside the robot arm. The main cabinet is equipped with a laser and a cooling device. The laser beam generated by the main cabinet is transmitted to the tilted laser head 11 and the vertical laser head 12 through the optical fiber cables arranged in the robot arm, thereby realizing the laser film removal operation. The laser film removal device is a common technical solution in the prior art and will not be described in detail here. Therefore, in order to prevent The tilted laser head 11 and the vertical laser head 12 are immersed in the nitric acid solution. In this embodiment, a high-flow gas is continuously injected into the inflatable protective cover 13 to form a gas protection space 15 inside. Since there is a gap between the inflatable protective cover 13 and the surface of the gas diffuser 3, the large flow of gas can effectively ensure the gas environment inside the inflatable protective cover 13, thereby providing conditions for the built-in tilted laser head 11 and the vertical laser head 12 to work. At the same time, since the nitric acid solution cannot withstand high temperatures, the large flow of gas is continuously released for a period of time to ensure that the nitric acid solution in this area is emptied. And after air drying, the laser film removal operation can be carried out, and the nitric acid solution is excluded by gas, thereby realizing the protection of the laser film removal device. In addition, the continuously released gas can also timely remove the gas dust formed in the laser film removal process, and dissolve the gas in the nitric acid solution through the mixture of gas and nitric acid solution, and the particulate matter formed later is removed by filtering. In addition, the continuously released gas can also be discharged from one end of the diffusion hole 4 to the other end. During the gas flow process, the dust remaining in the diffusion hole 4 can be emptied, further improving the cleaning of the diffusion hole 4, and the gas The nitric acid solution on the surface of the gas diffuser 3 at the laser working area can also be air-dried, ensuring the normal operation of the laser film removal device. During operation, the inflatable protective cover 13 is closely attached to the surface of the gas diffuser 3. The inflatable protective cover 13 is also equipped with a distance sensor to ensure that the inflatable protective cover 13 can continue to adhere to the surface of the gas diffuser 3. Since traditional nitric acid immersion cleaning takes 8-12 hours, the combined immersion and laser film removal method can greatly reduce the film removal time. In addition, the nitric acid solution can be replaced with oxalic acid or other mixed acid solutions.

[0036] Example 2:

[0037] In this embodiment, the robotic arms on both sides include an X-axis slide bar 18, a mechanism box 19 is provided on the X-axis slide bar 18 for sliding and translation, a Y-axis slide bar 20 is fixedly connected to the mechanism box 19, a Z-axis mechanism box 21 is provided on the Y-axis slide bar 20 for sliding and translation, a Z-axis driving arm 22 is provided on the Z-axis mechanism box 21 in a lifting manner, and the inflatable protective cover 13 is fixedly installed at the bottom of the Z-axis driving arm 22, wherein the mechanism box 19 and the Z-axis mechanism box 21 are both operated by a driving mechanism, which is controlled by a PLC control module, and the working parameters of the PLC are set manually. Through the synergistic action of the above-mentioned mechanisms, the robotic arm drives the laser film removal device to perform S-shaped film removal movement on the surface of the gas diffuser 3.

[0038] Example 3:

[0039] In this embodiment, the X-axis slide bars on both sides are respectively fixedly mounted on the side away from the fixed open cabin 5 or the movable enclosing rib 6, and a sealing groove 23 is provided on the side where the fixed open cabin 5 and the movable enclosing rib 6 abut against each other. A sealing strip that cooperates with the sealing groove 23 is provided on the movable enclosing rib 6. A plurality of hydraulic telescopic cylinders 24 are further installed on the side of the movable enclosing rib 6 away from the fixed open cabin 5. The plurality of hydraulic telescopic cylinders 24 are fixedly mounted on the fixed seat on the side away from the movable enclosing rib 6. The plurality of hydraulic telescopic cylinders 24 synchronously extend and retract to drive the movable enclosing rib 6 to approach or move away from the fixed open cabin 5. By fixing the X-axis slide rod to one side of the fixed open cabin 5 or the movable enclosing rib 6, the installation structure of the device is simplified by eliminating the use of the mounting frame. At the same time, in order to improve the sealing of the nitric acid cleaning tank 1 on all sides, a sealing groove 23 is provided on one side where the fixed open cabin 5 and the movable enclosing rib 6 abut against each other. The sealing groove 23 cooperates with the sealing strip to prevent the nitric acid solution from leaking. In addition, a plurality of hydraulic telescopic cylinders 24 are installed on the side of the movable enclosing rib 6 away from the fixed open cabin 5. The translational sliding of the movable enclosing rib 6 is achieved by the extension and retraction of the hydraulic telescopic cylinders 24.

[0040] Example 4:

[0041] A filter box 27 is also provided in the nitric acid storage tank 10. The nitric acid solution flowing into the nitric acid storage tank 10 through the liquid outlet 8 is filtered through the filter box 27. In addition, due to the strong corrosiveness of the nitric acid solution, the fixed open cabin 5, the movable enclosing rib 6, the inflatable protective cover 13, the pipeline 9, the nitric acid storage tank 10 and the robotic arm that are in direct contact with the nitric acid solution in this embodiment are all made of aluminum structures. Since the aluminum structure undergoes a passivation reaction after contact with nitric acid to form a dense oxide film, it can be repeatedly immersed in the nitric acid solution without being damaged.

[0042] A method for laser cleaning and film removal of a gas diffuser, using the above-mentioned gas diffuser laser cleaning and film removal equipment, comprises the following steps:

[0043] Step 1: Drive the movable enclosing rib 6 to separate from the fixed open cabin 5, hoist the gas diffuser 3 into the fixed open cabin 5, and manually make the gas diffuser 3 match the limiting frame 2 to complete the fixing and limiting of the gas diffuser 3;

[0044] Step 2: Drive the movable enclosing rib 6 to cooperate with the fixed open hatch 5 to form the nitric acid cleaning tank 1, and pump the nitric acid solution in the nitric acid storage tank 10 into the nitric acid cleaning tank 1 through the liquid inlet 7 until the gas diffuser 3 is completely immersed in the nitric acid solution;

[0045] Step 3: Drive the robotic arms on both sides to move to both sides of the gas diffuser 3 so that the inflatable protective covers 13 on both sides are in close contact with the surface of the gas diffuser 3. By controlling the operation of the air pump device 14, gas is continuously introduced into the inflatable protective cover 13. The robotic arms are slowly moved downward so that the inflatable protective cover 13 and the laser film removal device fixed thereto are completely immersed below the nitric acid solution.

[0046] Step 4: The robotic arms on both sides drive the inflatable protective covers 13 connected to them to perform S-shaped movements to clean and remove the film on the surface of the gas diffuser 3. The gas continuously filled by the air pump device 14 forms a gas protection space 15 in the inflatable protective cover 13, thereby protecting the inclined laser head 11 and the vertical laser head 12 installed in the inflatable protective cover 13. At the same time, the surface of the gas diffuser 3 is dried during the outward flow of the gas from the inflatable protective cover 13, so that the inclined laser head 11 or the vertical laser head 12 can complete the film removal operation on the gas diffuser 3. In addition, the gas promotes the emptying of impurities in the diffusion hole 4 during the flow from one end to the other end of the diffusion hole 4, which is beneficial to dredging the diffusion hole 4. The dust generated during the laser film removal process enters the nitric acid solution with the flow of the gas and is finally filtered and collected;

[0047] Step 5: After the cleaning and film removal of the gas diffuser 3 is completed, the nitric acid solution in the nitric acid cleaning tank 1 is drained into the nitric acid storage tank 10 through the liquid outlet 8, the movable enclosing rib 6 is removed, the surface of the gas diffuser 3 is manually cleaned, and then the limiting frame 2 is hoisted out.

[0048] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A gas diffuser laser cleaning and film removal device, comprising a nitric acid cleaning tank, a limit frame provided in the nitric acid cleaning tank, the limit frame being used to fix the gas diffuser, the gas diffuser having an array of diffusion holes extending therethrough, and laser film removal devices movably provided on both sides of the gas diffuser, the laser film removal devices on both sides being driven by a robotic arm to remove film from the surface of the gas diffuser, characterized in that: The nitric acid cleaning tank includes a fixed open cabin and a movable enclosing rib, wherein the fixed open cabin and the movable enclosing rib form a nitric acid cleaning tank with an open structure at the top during the cooperation process, and a liquid inlet and a liquid outlet are respectively opened at the bottom of the fixed open cabin, and the liquid inlet and the liquid outlet are connected to the nitric acid storage tank through an embedded pipeline, and the nitric acid solution is alternately transferred between the nitric acid storage tank and the nitric acid cleaning tank through the pipeline; The laser film removal device includes a tilted laser head and a vertical laser head, and the tilted laser head and the vertical laser head are both fixedly installed in an inflatable protective cover, and the inflatable protective cover is fixedly installed at the operating end of a robotic arm. The robotic arm is provided with an air pumping device for continuously filling the inflatable protective cover with gas. The gas diffuser is immersed in the nitric acid solution put into the nitric acid cleaning tank during the cleaning and film removal process. The inflatable protective cover, together with the tilted laser head and the vertical laser head, is driven by the robotic arm to be below the liquid level of the nitric acid solution to perform the film removal operation. The gas continuously pumped into the inflatable protective cover by the air pumping device forms a gas protection space, which can prevent the tilted laser head and the vertical laser head from being immersed in the nitric acid solution. The gas in the inflatable protective cover overflows outward through the edge where the inflatable protective cover and the gas diffuser abut against each other and a plurality of diffusion holes in the enclosed area. The inflatable protective cover is also provided with a distance sensor. The diffusion holes arranged in an array include a straight hole end and an inclined hole end, and the straight hole end and the inclined hole end are connected to each other. The vertical laser head is used to perform film removal operations on the straight hole end, and the inclined laser head is used to perform film removal operations on the inclined hole end. The inclined laser heads are arranged in a pair, and the inclined laser heads are symmetrically arranged on both sides of the vertical laser head.

2. The gas diffuser laser cleaning and film removal equipment according to claim 1, characterized in that: The limiting frame includes a U-shaped frame and a positioning slot installed thereon, and the gas diffuser is installed on the U-shaped frame through the positioning slot.

3. The gas diffuser laser cleaning and film removal equipment according to claim 1, characterized in that: The robotic arms on both sides include an X-axis slide bar, a mechanism box is set on the X-axis slide bar for sliding and translation, a Y-axis slide bar is fixedly connected to the mechanism box, a Z-axis mechanism box is set on the Y-axis slide bar for sliding and translation, a Z-axis drive arm is set on the Z-axis mechanism box in a lifting manner, and the inflatable protective cover is fixedly installed at the bottom of the Z-axis drive arm.

4. The gas diffuser laser cleaning and film removal equipment according to claim 3, characterized in that: The X-axis sliding bars on both sides are respectively fixedly mounted on the side where the fixed open hatch and the movable enclosing rib are separated.

5. The gas diffuser laser cleaning and film removal equipment according to claim 1 or 4, characterized in that: A sealing groove is provided on one side of the fixed open cabin and the movable enclosing rib, and a sealing strip that cooperates with the sealing groove is provided on the movable enclosing rib. A plurality of hydraulic telescopic cylinders are also installed on the side of the movable enclosing rib away from the fixed open cabin. Several of the hydraulic telescopic cylinders are fixedly installed on the fixed seat on the side away from the movable enclosing rib, and the plurality of hydraulic telescopic cylinders are synchronously extended and retracted to drive the movable enclosing rib closer to or away from the fixed open cabin.

6. The gas diffuser laser cleaning and film removal equipment according to claim 5, characterized in that: A filter box is also provided in the nitric acid storage tank, and the nitric acid solution flowing into the nitric acid storage tank through the liquid outlet is filtered through the filter box.

7. A method for laser cleaning and film removal of a gas diffuser, using the gas diffuser laser cleaning and film removal equipment according to any one of claims 1 to 6, characterized in that: The following steps are involved: Step 1: Drive the movable enclosing rib to separate from the fixed open cabin, hoist the gas diffuser into the fixed open cabin, and manually make the gas diffuser fit with the limiting frame to complete the fixing and limiting of the gas diffuser; Step 2: Drive the movable enclosing rib to cooperate with the fixed open hatch to form a nitric acid cleaning pool, and pump the nitric acid solution in the nitric acid storage pool into the nitric acid cleaning pool through the liquid inlet hole until the gas diffuser is completely immersed in the nitric acid solution; Step 3: Drive the robotic arms on both sides to move to the sides of the gas diffuser so that the inflatable protective covers on both sides are in close contact with the surface of the gas diffuser. By controlling the operation of the air pump device, gas is continuously introduced into the inflatable protective cover. The robotic arms are slowly moved downward so that the inflatable protective cover and the laser film removal device fixed thereto are completely immersed below the nitric acid solution. Step 4: The robotic arms on both sides drive the inflatable protective covers connected to them to perform S-shaped movements to clean and remove the film on the surface of the gas diffuser. The gas continuously filled by the gas pump device forms a gas protection space in the inflatable protective cover, thereby protecting the inclined laser head and the vertical laser head installed in the inflatable protective cover. At the same time, the gas dries the surface of the gas diffuser during the outward flow from the inflatable protective cover, so that the inclined laser head or the vertical laser head can complete the film removal operation on the gas diffuser. In addition, the gas promotes the emptying of impurities in the diffusion hole during the flow from one end to the other end of the diffusion hole, which is beneficial to dredging the diffusion hole. The dust generated during the laser film removal process enters the nitric acid solution with the flow of gas and is finally filtered and collected; Step 5: After the cleaning and film removal of the gas diffuser is completed, the nitric acid solution in the nitric acid cleaning tank is drained into the nitric acid storage tank through the liquid outlet, the movable enclosing rib is removed, the surface of the gas diffuser is manually cleaned, and then it is hoisted out of the limit frame.

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