Aperture adjustment system and semiconductor testing equipment

Abstract

This invention provides an aperture adjustment system and a semiconductor detection device. The aperture adjustment system includes an aperture integrated module, a traction component, and a driving mechanism. The aperture integrated module is disposed in the optical path. The driving mechanism is disposed on one side of the aperture integrated module away from the optical path. The traction component is connected to the aperture integrated module and the driving mechanism. The driving mechanism is configured to drive a corresponding part of the aperture integrated module to move through the traction component, thereby forming a corresponding light-blocking pattern in the aperture integrated module. By placing the aperture integrated module, which can form the light-blocking pattern, in the optical path, and placing the driving mechanism on one side of the aperture integrated module away from the optical path, the driving mechanism is prevented from affecting the optical path. Since the driving mechanism can traction the aperture integrated module through the traction component, the driving mechanism does not need to be disposed in the optical path. Only the aperture integrated module needs to be disposed in the optical path to achieve the adjustment of the light-blocking pattern, thus simplifying the structure located in the optical path.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to an aperture adjustment system and semiconductor testing equipment. Background Technology

[0002] An aperture stop is a key component in an optical system. By controlling the quantity and quality of the light beam and adjusting the depth of field, it affects the imaging effect and the performance of the optical system. In the semiconductor field, it is necessary to adjust the aperture stop to control the light beam.

[0003] Existing aperture adjustment devices typically fall into two categories: one type uses a circular or other fixed-shape aperture, which can only be adjusted by screws and cannot change its shape; the other type is a variable aperture adjustment mechanism, which typically has a linkage structure that extends into the adjustment mechanism to adjust the aperture size. However, this type of aperture can only be circular or other fixed-shape, so the linkage structure can only adjust the aperture size. Furthermore, because the linkage structure extends into the adjustment mechanism, the entire aperture adjustment mechanism occupies a large amount of space, making it difficult to install in the optical path.

[0004] In view of this, the present invention is hereby proposed. Summary of the Invention

[0005] This application provides an aperture adjustment system and a semiconductor detection device to solve the technical problem that existing aperture adjustment systems are too large and difficult to install in the optical path.

[0006] The first aspect of the present invention provides an aperture adjustment system, including an aperture integrated module, a traction component, and a driving mechanism; the aperture integrated module is disposed in an optical path; the driving mechanism is disposed on one side of the aperture integrated module and connected to the aperture integrated module through the traction component, the traction component being connected to the aperture integrated module and the driving mechanism; the driving mechanism is configured to drive a corresponding part of the aperture integrated module to move through the traction component, so as to form a corresponding light-blocking pattern in the aperture integrated module.

[0007] In this scheme, based on the setting of the traction component, the aperture integrated module and the drive mechanism can be set far apart. Thus, when the aperture integrated module is set in the optical path, the drive mechanism can be set far apart from the optical path, so that the drive mechanism is no longer limited by the space of the optical path system and a higher precision drive mechanism can be selected, thereby improving the adjustment accuracy of the aperture adjustment system. At the same time, since the aperture adjustment system of this application can realize the adjustment of the optical path system by only setting the aperture integrated module in the optical path, the aperture adjustment system of this application can adapt to the narrower optical path system, thereby improving the applicability of the aperture adjustment system of this application.

[0008] In a further embodiment of the invention, the traction assembly includes a traction rope and a steering component; the steering component is slidably connected to the traction rope to adjust the direction of the traction rope, and the traction rope is connected to the aperture integrated module and the drive mechanism so that the drive mechanism can be set away from the optical path.

[0009] In this scheme, the traction rope connects the aperture integrated module and the drive mechanism. The drive mechanism drives a part of the aperture integrated module to move through the traction rope to form a corresponding light-blocking pattern. The steering component is used to adjust the direction of the traction rope. The traction rope drives the aperture integrated module and the drive mechanism, which can keep the drive mechanism away from the optical path and simplify the structure located in the optical path.

[0010] In a further embodiment of the present invention, the steering component includes a pulley block, which is disposed on the drive mechanism side and slidably connected to the traction rope to adjust the direction of the traction rope.

[0011] In this design, due to the sliding characteristics of the pulley block itself, the resistance generated during adjustment can be greatly reduced when the pulley block slides in conjunction with the traction rope, thereby ensuring the driving efficiency of the drive mechanism. Furthermore, to accommodate the small size requirements of the optical path system, the pulley block can be selectively positioned closer to the drive mechanism, thus not occupying space in the optical path system. This allows the aperture adjustment system of this application to further adapt to even smaller optical path systems.

[0012] In a further embodiment of the present invention, the steering component includes a limiting component, which is disposed on the side of the aperture integrated module and has a guide groove. The guide groove slides with the traction rope to adjust the direction of the traction rope.

[0013] In this scheme, the limiting component limits the traction rope by setting a limiting groove to adjust the direction of the traction rope. Compared with the pulley block, the size of the limiting component can be made smaller, so it can be set close to the optical path or in the optical path. Therefore, the limiting component can be set on the optical aperture integrated module to adjust the direction of the traction rope.

[0014] In a further embodiment of the present invention, the aperture integration module includes an aperture assembly and an adjustment assembly; the aperture assembly is connected to the adjustment assembly, and the adjustment assembly is connected to the traction assembly; the driving mechanism is configured to drive the adjustment assembly to move through the traction assembly, so as to form a corresponding light-blocking pattern in the aperture assembly.

[0015] In this scheme, the traction component is driven by the drive mechanism, which pulls the adjustment component connected to the aperture component to move. The adjustment component can adjust the aperture component to form a corresponding light-blocking pattern.

[0016] In a further embodiment of the present invention, the aperture assembly includes an aperture frame and a plurality of light-blocking blocks; the aperture frame is provided with a movable opening, and the adjustment component is configured to drive the corresponding light-blocking blocks to move within the movable opening under the action of the driving mechanism to form a corresponding light-blocking pattern.

[0017] In this design, the aperture frame has a movable opening, within which the light-blocking blocks move. The adjustment component drives the traction component via a drive mechanism, which in turn pulls the adjustment component. When pulled by the traction component, the adjustment component controls the corresponding light-blocking blocks to move within the movable opening to form a corresponding light-blocking pattern.

[0018] In a further embodiment of the present invention, a plurality of light-blocking blocks are arranged into at least one row of light-blocking blocks; the aperture assembly further includes a guide member, which is slidably connected to a row of light-blocking blocks.

[0019] In this scheme, by setting a guide and connecting a row of light-blocking blocks in series on the guide, the adjustment component can move along the direction of the guide when it drives the light-blocking blocks, thus making the light-blocking pattern more accurate.

[0020] In a further embodiment of the present invention, the aperture frame is provided with an installation opening; the guide includes a guide portion and a limiting portion, at least a portion of the guide portion is disposed in the movable opening, and the limiting portion is disposed in the installation opening; the aperture frame is also provided with an installation groove, the two ends of the installation groove are connected to the movable opening and the installation opening, and at least a portion of the guide portion is disposed in the installation groove to prevent the guide from deflecting.

[0021] In a further embodiment of the present invention, the thickness of the guide portion is less than the width of the mounting groove, the width of the limiting portion is greater than the width of the guide portion, and after one end of the guide member is installed, the guide member is stretched and inserted into the mounting groove to tighten the entire guide member; the width of the guide portion is greater than the length of the mounting groove to prevent the guide portion from deflecting.

[0022] In this solution, by setting an installation groove and placing at least part of the guide in the installation groove, the guide can be effectively prevented from deflecting, thereby making the movement of the light-blocking block on the guide more precise and the light-blocking pattern formed by adjustment more accurate. Similarly, by stretching the guide and inserting it into the installation groove, the guide can be prevented from shaking, thereby making the light-blocking pattern formed after adjustment more accurate.

[0023] In a further embodiment of the present invention, the light-blocking block includes a body portion and a driving protrusion. The body portion is provided with a guide hole so that the body portion passes through the guide hole onto the guide member. The driving protrusion protrudes from the body portion. The adjustment component is configured to drive the driving protrusion to move the light-blocking block under the action of the driving mechanism.

[0024] In this design, a guide hole is provided on the main body so that the light-blocking block can pass through the guide hole and be mounted on the guide member. A drive protrusion is provided on the main body so that the position of the light-blocking block can be adjusted by the adjustment assembly.

[0025] In a further embodiment of the present invention, the light-blocking block is further provided with a first light-blocking protrusion and a second light-blocking protrusion, the first light-blocking protrusion and the second light-blocking protrusion being staggered in height on both sides of the main body; the sum of the widths of the first light-blocking protrusion and the second light-blocking protrusion is not less than the distance between the main bodies of two adjacent rows of light-blocking blocks.

[0026] In this design, a first light-blocking protrusion and a second light-blocking protrusion are provided on both sides of the main body. The first light-blocking protrusion and the second light-blocking protrusion cooperate with each other to block the gap between the light-blocking blocks on the adjacent guide members. Since the first light-blocking protrusion and the second light-blocking protrusion are misaligned in height, direct contact between the light-blocking blocks on the adjacent guide members can be avoided, reducing the wear of the light-blocking blocks and thus improving the lifespan of the entire aperture assembly.

[0027] In a further embodiment of the invention, the adjustment assembly includes an adjustment frame and a plurality of magnets. The adjustment frame is connected to the traction assembly, and the plurality of magnets are disposed on the adjustment frame. The iron core in each magnet is configured to extend in a controlled manner to push the corresponding light-blocking block to move under the action of the traction assembly. The plurality of magnets are arranged in an array.

[0028] In this scheme, the adjustment frame is moved by a traction component. Magnets are set on the frame. By controlling the corresponding magnets, the iron core inside can be extended. The adjustment frame drives the magnets to move, and the extended iron core will drive the light-blocking block to move by driving the protrusion. By adjusting the light-blocking block on the guide, the corresponding light-blocking pattern can be formed.

[0029] In a further embodiment of the present invention, the adjusting frame is provided with an active channel and is fitted onto the aperture frame through the active channel; the iron core in each magnet is configured to extend in a controlled manner to enter the active channel, and the adjusting frame is configured to move relative to the aperture frame under the action of the traction component, so that the corresponding iron core pushes the corresponding light-blocking block to move; the two sides of the active channel are provided with sliding grooves, and the two ends of the aperture frame are inserted into the sliding grooves to slide and connect with the sliding grooves.

[0030] In this scheme, by setting an active channel on the adjustment frame and fitting the active channel onto the aperture frame, the adjustment frame and the magnet located on it can move along the aperture frame, so that the adjustment of the light blocking block is more accurate. The magnet is controlled to extend into the active channel to adjust the light blocking block located on the aperture frame.

[0031] The second aspect of the present invention provides a semiconductor detection device, including: an optical path channel and an aperture adjustment system provided in the first aspect of the present invention, wherein the aperture integrated module is disposed in the optical path channel and the driving mechanism is disposed away from the optical path channel.

[0032] In summary, the aperture adjustment module provided in this application has the following beneficial effects:

[0033] In this application, based on the arrangement of the traction component, the aperture integrated module and the drive mechanism can be positioned far apart. Thus, when the aperture integrated module is placed in the optical path, the drive mechanism can be positioned far away from the optical path, thereby freeing the drive mechanism from the spatial limitations of the optical path system and allowing the selection of a higher-precision drive mechanism. This improves the adjustment accuracy of the aperture adjustment system. Furthermore, since the aperture adjustment system of this application only requires the aperture integrated module to be placed in the optical path to achieve optical path adjustment, it can adapt to narrower optical path systems, thereby expanding the applicability of the aperture adjustment system of this application. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application; those skilled in the art can obtain other drawings based on these drawings without any creative effort.

[0035] Figure 1 A schematic diagram of the aperture adjustment system is provided for embodiments of this application;

[0036] Figure 2 A perspective view of the limiting member provided in the embodiments of this application;

[0037] Figure 3 This is a schematic diagram of the structure of the light-blocking block provided in an embodiment of this application;

[0038] Figure 4 This is a schematic diagram of the structure of the aperture integrated module provided in the embodiments of this application;

[0039] Figure 5 A perspective view of the aperture integrated module provided in the embodiments of this application;

[0040] Figure 6 A partial structural schematic diagram of the aperture assembly provided in the embodiments of this application; and

[0041] Figure 7 This is a schematic diagram of the structure of the magnet-adjustable light-blocking block provided in an embodiment of this application.

[0042] The attached figures are labeled as follows:

[0043] 10. Aperture integrated module; 11. Aperture assembly; 111. Aperture frame; 111A. Movable opening; 111B. Mounting opening; 111C. Mounting slot; 112. Light blocking block; 1121. Main body; 1122. Guide hole; 1123. First light blocking protrusion; 1124. Second light blocking protrusion; 1125. Drive protrusion; 113. Guide component; 1131. Guide part; 1132. Limiting part;

[0044] 12. Adjustment component; 121. Adjustment frame; 121A. Movable channel; 122. Magnet; 1221. Iron core;

[0045] 20. Traction assembly; 21. Traction rope; 22. Steering component; 221. Pulley block; 222. Limiting component; 222A. Limiting groove;

[0046] 30. Drive mechanism. Detailed Implementation

[0047] In the description of this application, it should be understood that the use of terms such as "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" to indicate orientation or positional relationship, unless otherwise specified, is understood to be based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0048] Furthermore, features specified with "first" or "second" for descriptive purposes only should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Features specified with "first" or "second" may explicitly or implicitly include at least one of the specified features. The description of "multiple" generally means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0049] In this application, unless otherwise explicitly specified and limited, terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can be a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0050] In the description of this specification, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that the specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0051] Please refer to Figure 1 The first aspect of the present invention provides an aperture adjustment system, including an aperture integration module 10, a traction component 20, and a drive mechanism 30; the aperture integration module 10 is disposed in an optical path; the drive mechanism 30 is disposed on one side of the aperture integration module 10 and connected to the aperture integration module 10 through the traction component 20 to be disposed away from the optical path; the drive mechanism 30 is configured to drive a corresponding part of the aperture integration module 10 to move through the traction component 20, so as to form a corresponding light-blocking pattern in the aperture integration module 10.

[0052] In this scheme, based on the setting of the traction component 20, the aperture integration module 10 and the drive mechanism 30 can be set far apart. Thus, when the aperture integration module 10 is set in the optical path, the drive mechanism 30 can be set far apart from the optical path, so that the drive mechanism 30 is no longer limited by the space of the optical path system and can use a drive mechanism with higher precision, thereby improving the adjustment accuracy of the aperture adjustment system. At the same time, since the aperture adjustment system of this application can realize the adjustment of the optical path in the optical path system by only setting the aperture integration module 10 in the optical path, the aperture adjustment system of this application can adapt to the narrower optical path system, thereby improving the applicability of the aperture adjustment system of this application.

[0053] In a further embodiment of the present invention, the traction assembly 20 includes a traction rope 21 and a steering member 22; the steering member 22 and the traction rope 21 are slidably connected to adjust the direction of the traction rope 21, and the traction rope 21 is connected to the aperture integrated module 10 and the drive mechanism 30 so that the drive mechanism 30 can be set away from the optical path.

[0054] In this scheme, the traction rope 21 connects the aperture integrated module 10 and the drive mechanism 30. The drive mechanism 30 drives a part of the aperture integrated module 10 to move through the traction rope 21 to form a corresponding light-blocking pattern. The steering component 22 is used to adjust the direction of the traction rope 21. The aperture integrated module 10 and the drive mechanism 30 are connected by the traction rope 21, which can make the drive mechanism 30 move away from the optical path and simplify the structure located in the optical path.

[0055] In a further embodiment of the present invention, the steering component 22 includes a pulley assembly 221, which is disposed on the drive mechanism 30 side and slidably connected to the traction rope 21 to adjust the direction of the traction rope 21.

[0056] In this design, due to the sliding characteristics of the pulley block 221, when the pulley block 221 slides in conjunction with the traction rope 21, the resistance generated during adjustment can be greatly reduced, thereby ensuring the driving efficiency of the drive mechanism 30. Furthermore, to adapt to the small size requirements of the optical path system, the pulley block 221 can be selectively positioned closer to the drive mechanism 30, thus not occupying space in the optical path system. This allows the aperture adjustment system of this application to further adapt to even smaller optical path systems.

[0057] In a further embodiment of the present invention, the steering component 22 includes a limiting component 222, which is disposed on the side of the aperture integration module 10 and has a guide groove. The guide groove is slidably engaged with the traction rope 21 to adjust the direction of the traction rope 21.

[0058] In this scheme, the limiting member 222 limits the traction rope 21 by setting the limiting groove 222A to adjust the direction of the traction rope 21. Compared with the pulley block 221, the size of the limiting member 222 can be made smaller, so it can be set close to the optical path or in the optical path. Therefore, the limiting member 222 can be set on the aperture integrated module 10 to adjust the direction of the traction rope 21.

[0059] Furthermore, the selection of the limiting component 222 should ensure the smoothness of its limiting groove 222A, minimize the friction at the limiting groove 222A, and reduce the impact on the movement of the wire rope; the pulley block 221 and the limiting component 222 can also adopt other structural adjustments, such as sliding column structures.

[0060] In a further embodiment of the present invention, the aperture integration module 10 includes an aperture assembly 11 and an adjustment assembly 12; the aperture assembly 11 is connected to the adjustment assembly 12, and the adjustment assembly 12 is connected to the traction assembly 20; the drive mechanism 30 is configured to drive the adjustment assembly 12 to move through the traction assembly 20 so as to form a corresponding light-blocking pattern in the aperture assembly 11.

[0061] In this scheme, the traction component 20 is driven by the drive mechanism 30, which pulls the adjustment component 12 connected to the aperture component 11 to move. The adjustment component 12 can adjust the aperture component 11 to form a corresponding light-blocking pattern.

[0062] In a further embodiment of the present invention, the aperture assembly 11 includes an aperture frame 111 and a plurality of light-blocking blocks 112; the aperture frame 111 is provided with a movable opening 111A, and the adjustment assembly 12 is configured to drive the corresponding light-blocking block 112 to move within the movable opening 111A under the action of the driving mechanism 30 to form a corresponding light-blocking pattern.

[0063] In this design, the aperture frame 111 has a movable opening 111A, and the light-blocking block 112 moves within the movable opening 111A. The adjustment component 12 drives the traction component 20 via the drive mechanism 30, and the traction component 20 pulls the adjustment component 12 to move. When pulled by the traction component 20, the adjustment component 12 controls the corresponding light-blocking block 112 to move within the movable opening 111A to form a corresponding light-blocking pattern.

[0064] In a further embodiment of the present invention, a plurality of light-blocking blocks 112 are arranged in at least one row of light-blocking blocks 112; the aperture assembly 11 further includes a guide 113, which is slidably connected to a row of light-blocking blocks 112.

[0065] In this scheme, by setting a guide 113 and connecting a row of light-blocking blocks 112 in series on the guide 113, the adjustment component 12 can move along the direction of the guide 113 when it drives the light-blocking blocks 112 to move, thereby making the light-blocking pattern more accurate.

[0066] Specifically, multiple guide members 113 should be provided, with a row of light-blocking blocks 112 connected in series on each guide member 113. The guide members 113 are arranged parallel to each other. When a light aperture of a specific shape is required, a specific light-blocking pattern can be formed by adjusting the movement of a specific light-blocking block 112 on a specific guide member 113.

[0067] In a further embodiment of the present invention, the aperture frame 111 is provided with a mounting opening 111B; the guide member 113 includes a guide portion 1131 and a limiting portion 1132, at least a portion of the guide portion 1131 is disposed in the movable opening 111A, and the limiting portion 1132 is disposed in the mounting opening 111B; the aperture frame 111 is also provided with a mounting groove 111C, the two ends of the mounting groove 111C are connected to the movable opening 111A and the mounting opening 111B, and at least a portion of the guide portion 1131 is disposed in the mounting groove 111C to prevent the guide member 113 from deflecting.

[0068] Please refer to further information. Figure 2 and combined Figure 1In a further embodiment of the present invention, the thickness of the guide portion 1131 is less than the width of the mounting groove 111C, the width of the limiting portion 1132 is greater than the width of the guide portion 1131, and after one end of the guide member 113 is installed, the guide member 113 is stretched and inserted into the mounting groove 111C to make the entire guide member 113 taut; the width of the guide portion 1131 is greater than the length of the mounting groove 111C to prevent the guide portion 1131 from deflecting.

[0069] In this scheme, by setting the mounting groove 111C and placing at least a portion of the guide part 1131 in the mounting groove 111C, the guide part 113 can be effectively prevented from deflecting, thereby making the movement of the light blocking block 112 on the guide part 113 more precise and the light blocking pattern formed by adjustment more accurate. Similarly, by stretching the guide part 113 and inserting it into the mounting groove 111C, the guide part 113 can be prevented from shaking, thereby making the light blocking pattern formed after adjustment more accurate.

[0070] Please refer to Figure 3 In a further embodiment of the present invention, the light-blocking block 112 includes a body portion 1121 and a driving protrusion 1125. The body portion 1121 is provided with a guide hole 1122 so that the body portion 1121 passes through the guide hole 1122 and is mounted on the guide member 113. The driving protrusion 1125 protrudes from the body portion 1121. The adjustment component 12 is configured to drive the driving protrusion 1125 under the action of the driving mechanism 30 to drive the light-blocking block 112 to move.

[0071] In this scheme, a guide hole 1122 is provided on the main body 1121 so that the light blocking block 112 can pass through the guide hole 1122 and be installed on the guide member 113. A drive protrusion 1125 is provided on the main body 1121 so that the adjustment assembly 12 can adjust the position of the light blocking block 112.

[0072] In a further embodiment of the present invention, the light-blocking block 112 is further provided with a first light-blocking protrusion 1123 and a second light-blocking protrusion 1124, the first light-blocking protrusion 1123 and the second light-blocking protrusion 1124 being staggered in height on both sides of the body portion 1121; the sum of the widths of the first light-blocking protrusion 1123 and the second light-blocking protrusion 1124 is not less than the distance between the body portions 1121 of two adjacent rows of light-blocking blocks 112.

[0073] In this design, a first light-blocking protrusion 1123 and a second light-blocking protrusion 1124 are provided on both sides of the main body 1121. Since the sum of the widths of the first light-blocking protrusion 1123 and the second light-blocking protrusion 1124 is not less than the distance between the main bodies 1121 of two adjacent rows of light-blocking blocks 112, the gap between the light-blocking blocks 112 on the adjacent guide members 113 can be blocked based on the mutual cooperation between the first light-blocking protrusion 1123 and the second light-blocking protrusion 1124, thereby improving the light-blocking effect. At the same time, since the first light-blocking protrusion 1123 and the second light-blocking protrusion 1124 are misaligned in height, direct contact between the light-blocking blocks 112 on the adjacent guide members 113 can be avoided, reducing the wear of the light-blocking blocks 112 and thus improving the lifespan of the entire aperture assembly 11.

[0074] Furthermore, the top surface of the main body 1121 serves as a light-blocking surface, and the light-blocking surface is arranged perpendicular to the light path; at the same time, the tip of the first light-blocking protrusion 1123 or the second light-blocking protrusion 1124 can be on the same plane as the top surface of the main body 1121.

[0075] Please refer to further information. Figures 4-7 In a further embodiment of the present invention, the adjustment component 12 includes an adjustment frame 121 and a plurality of magnets 122. The adjustment frame 121 is connected to the traction component 20, and the plurality of magnets 122 are disposed on the adjustment frame 121. The iron core 1221 of each magnet 122 is configured to extend in a controlled manner to push the corresponding light-blocking block 112 to move under the action of the traction component 20. The plurality of magnets 122 are arranged in an array. In alternative embodiments, the magnet 122 is generally an electromagnet 122 to facilitate the controlled extension of the iron core 1221. At the same time, the magnet 122 can be replaced by various structures with controlled extension, such as a cylinder extending a pneumatic arm to push the light-blocking block 112.

[0076] In this scheme, the adjustment frame 121 is pulled by the traction component 20. The magnet 122 is set on the frame. By controlling the corresponding magnet 122, the iron core 1221 inside can be extended. The adjustment frame 121 drives the magnet 122 to move. The extended iron core 1221 will drive the light blocking block 112 to move by driving the protrusion 1125. By adjusting the light blocking block 112 on the guide 113, the corresponding light blocking pattern can be formed.

[0077] Furthermore, one limiting member 222 is provided at each end of the aperture frame 111. The line connecting the ends of the upper limiting grooves 222A of the two limiting members 222 is parallel to the guide member 113, so that the traction rope 21 slidably connected to the two limiting members 222 is parallel to the guide member 113. This arrangement can reduce the number of magnets 122 on the adjustment frame 121. The number of magnets 122 only needs to be the same as the number of guide members 113. At the same time, the magnets 122 on the adjustment frame 121 are arranged in multiple rows, and the multiple rows of magnets 122 are staggered to increase the space occupied by the entire magnet 122, so that higher precision magnets 122 can be selected.

[0078] In a further embodiment of the present invention, the adjusting frame 121 is provided with an active channel 121A and is sleeved on the aperture frame 111 through the active channel 121A; the iron core 1221 in each magnet 122 is configured to extend in a controlled manner into the active channel 121A, and the adjusting frame 121 is configured to move relative to the aperture frame 111 under the action of the traction component 20, so that the corresponding iron core 1221 pushes the corresponding light blocking block 112 to move; the two sides of the active channel 121A are provided with sliding grooves, and the two ends of the aperture frame 111 are inserted into the sliding grooves to slide and connect with the sliding grooves.

[0079] In this scheme, by setting an active channel 121A on the adjustment frame 121 and fitting the active channel 121A onto the aperture frame 111, the adjustment frame 121 and the magnet 122 located thereon can move along the aperture frame 111, so that the adjustment of the light blocking block 112 is more accurate. The magnet 122 is controlled to extend into the active channel 121A to adjust the light blocking block 112 located on the aperture frame 111.

[0080] In specific embodiments, the aperture frame 111 and the adjustment frame 121 are made of soft or hard materials, respectively. For example, the aperture frame 111 can be made of metal, and the adjustment frame 121 can be made of resin.

[0081] The second aspect of the present invention provides a semiconductor detection device, including: an optical path channel and an aperture adjustment system provided in the first aspect of the present invention, wherein the aperture integrated module 10 is disposed in the optical path channel and the driving mechanism 30 is disposed away from the optical path channel.

[0082] In this scheme, by placing the aperture integrated module 10 in the optical path channel, the optical path in the optical path channel can be adjusted when the aperture integrated module is adjusted; the drive mechanism 30 pulls the corresponding part of the aperture integrated module 10 to move through the traction component, so that it can be placed away from the optical path channel, thus simplifying the structure located in the optical path channel.

[0083] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. An aperture adjustment system, characterized in that, It includes an aperture integration module (10), a traction component (20), and a drive mechanism (30); The aperture integration module (10) is used to be installed in the optical path; The drive mechanism (30) is disposed on one side of the aperture integration module (10) and connected to the aperture integration module (10) through the traction component (20), so as to be disposed away from the optical path; The drive mechanism (30) is configured to drive the corresponding part of the aperture integration module (10) to move through the traction component (20) so as to form a corresponding light-blocking pattern in the aperture integration module (10); The aperture integration module (10) includes an aperture assembly (11) and an adjustment assembly (12); The aperture assembly (11) includes an aperture frame (111) and multiple light-blocking blocks (112). The plurality of light-blocking blocks (112) are arranged in at least one row of light-blocking blocks (112); The aperture assembly (11) also includes a guide (113), which is slidably connected to a row of light-blocking blocks (112). The light-blocking block (112) includes a body part (1121) and a driving protrusion (1125). The body part (1121) is provided with a guide hole (1122) so that the body part (1121) passes through the guide hole (1122) onto the guide member (113). The driving protrusion (1125) protrudes from the body part (1121). The adjustment component (12) is configured to drive the drive protrusion (1125) to move the light blocking block (112) under the action of the drive mechanism (30).

2. The aperture adjustment system according to claim 1, characterized in that, The traction assembly (20) includes a traction rope (21) and a steering component (22); The steering component (22) is slidably connected to the traction rope (21) to adjust the direction of the traction rope (21); The traction rope (21) is connected to the aperture integrated module (10) and the drive mechanism (30) so that the drive mechanism (30) can be located away from the optical path.

3. The aperture adjustment system according to claim 2, characterized in that, The steering component (22) includes a pulley block (221) and / or a limiting component (222); The pulley block (221) is disposed on the side of the drive mechanism (30) and slidably connected to the traction rope (21) to adjust the direction of the traction rope (21); The limiting member (222) is disposed on the side of the aperture integrated module (10) and has a guide groove. The guide groove is slidably engaged with the traction rope (21) to adjust the direction of the traction rope (21).

4. The aperture adjustment system according to claim 1, characterized in that, The aperture assembly (11) is connected to the adjustment assembly (12), and the adjustment assembly (12) is connected to the traction assembly (20). The drive mechanism (30) is configured to drive the adjustment component (12) to move via the traction component (20) to form a corresponding light-blocking pattern in the aperture component (11).

5. The aperture adjustment system according to claim 4, characterized in that, The aperture frame (111) is provided with a movable opening (111A), and the adjustment component (12) is configured to drive the corresponding light blocking block (112) to move within the movable opening (111A) under the action of the driving mechanism (30) to form a corresponding light blocking pattern.

6. The aperture adjustment system according to claim 1, characterized in that, The light-blocking block (112) is also provided with a first light-blocking protrusion (1123) and a second light-blocking protrusion (1124), which are offset in height on both sides of the main body (1121); The sum of the widths of the first light-blocking protrusion (1123) and the second light-blocking protrusion (1124) is not less than the distance between the body portions (1121) of the two adjacent rows of light-blocking blocks (112).

7. The aperture adjustment system according to claim 1, characterized in that, The adjustment assembly (12) includes an adjustment frame (121) and a plurality of magnets (122). The adjustment frame (121) is connected to the traction assembly (20), and a plurality of magnets (122) are disposed on the adjustment frame (121); The iron core (1221) in each of the magnets (122) is configured to extend in a controlled manner to push the corresponding light-blocking block (112) to move under the action of the traction assembly (20).

8. A semiconductor testing device, characterized in that, include: The optical path channel and the aperture adjustment system according to any one of claims 1-7, wherein the aperture integration module (10) is disposed in the optical path channel and the driving mechanism (30) is disposed away from the optical path channel.

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