Vacuum pressure equalization system and equalization process

Abstract

The application relates to the field of vacuum coating, in particular to a vacuum pressure balancing system and a balancing process, which comprises a vacuum box and a first balancing device, the first balancing device comprises a balancing barrel and a first vacuum pump, the vacuum box is connected with the first vacuum pump through a first vacuum pipe, the vacuum box is connected with the balancing barrel through a balancing pipe, the balancing barrel is connected with the first vacuum pipe through a first air exhaust pipe, and a sealing device is arranged at the connecting position of the first air exhaust pipe and the first vacuum pipe. The application improves the problem that the time required for vacuumizing the vacuum box is long in the traditional mode, and can shorten the time required for vacuumizing the vacuum box.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of vacuum coating, in particular to a vacuum pressure balancing system and a balancing process. BACKGROUND

[0002] With the development of solar energy technology, solar cells are gradually widely used. At present, the main solar cells are silicon solar cells, and the cell piece is the core component of the solar cell. The cell piece is usually produced from a silicon wafer, and in the process step, the silicon wafer usually needs to be coated.

[0003] At present, the existing coating equipment generally includes a vacuum box for coating. When the carrier plate loaded with silicon wafers is transported into the vacuum box, the vacuum box is closed, the gas in the vacuum box is extracted by a vacuum pump, the air pressure in the vacuum box is lowered to the required air pressure, and then the silicon wafers in the vacuum box are coated.

[0004] In the conventional process, the vacuum of the vacuum box is realized by setting multiple vacuum pumps to work at the same time. However, in the case of a sharp change in air pressure in the vacuum box in a short time, the silicon wafers will be impacted and damaged. Therefore, when the vacuum of the vacuum box is extracted, the air pressure in the vacuum box is first lowered to an appropriate value, and then the vacuum is quickly extracted to the required pressure. This makes the time consumed in the vacuum extraction process of the vacuum box longer. SUMMARY

[0005] In order to shorten the time required for vacuum extraction of the vacuum box, the present application provides a vacuum pressure balancing system and a balancing process.

[0006] In a first aspect, the present application provides a vacuum pressure balancing system, which adopts the following technical solution:

[0007] A vacuum pressure balancing system, comprising a vacuum box and a first balancing device, the first balancing device comprising a balancing barrel and a first vacuum pump, the vacuum box being connected to the first vacuum pump through a first vacuum pipe, the vacuum box being connected to the balancing barrel through a balancing pipe, the balancing barrel being connected to the first vacuum pipe through a first gas extraction pipe, and a sealing device being arranged at the connection part of the first gas extraction pipe and the first vacuum pipe.

[0008] By adopting the technical scheme, the first vacuum pump extracts the air pressure in the balance bucket to the air pressure at work through the first air extraction pipe, and keeps the air tightness at the time of air extraction of the first vacuum pump through the sealing device. Then, in the process of vacuumizing the vacuum box, the balance bucket balances the air pressure in the vacuum box through the balance pipe, and the vacuum pump extracts air from the vacuum box through the vacuum pipe, thereby realizing the vacuumizing process of the vacuum box, so that the vacuum box can reach the speed of improving the process required pressure of the vacuum box, thereby shortening the time of vacuumizing the vacuum box through the air pressure balancing mode.

[0009] In a specific implementable scheme, a secondary balancing device is further included, which comprises a buffer tank and a second vacuum pump, the vacuum box is connected with the buffer tank through a buffer pipe, the balance bucket is connected with the second vacuum pipe through a third air extraction pipe, the buffer tank is connected with the second vacuum pump through a second vacuum pipe, the vacuum box is connected with the second vacuum pipe through a second air extraction pipe, and the connection part of the second air extraction pipe and the second vacuum pipe is also provided with a sealing device.

[0010] By adopting the technical scheme, the second vacuum pump extracts the air pressure in the buffer tank to the air pressure at work through the second air extraction pipe, and keeps the air tightness at the time of air extraction of the second vacuum pump through the sealing device. In the process of vacuumizing the vacuum box balanced with the balance bucket, the buffer tank balances the air pressure in the vacuum box again through the buffer pipe, thereby further shortening the time of vacuumizing the vacuum box, so that the vacuum box can reach the speed of further improving the process required pressure of the vacuum box after being balanced twice by the balance bucket and the buffer tank in the process of vacuumizing.

[0011] In a specific implementable scheme, the balance pipe is provided with a first control valve, the first air extraction pipe is provided with a second control valve, the third air extraction pipe is provided with a fourth control valve, the second air extraction pipe is provided with a fifth control valve, and the buffer pipe is provided with a sixth control valve.

[0012] By adopting the technical scheme, the first control valve is arranged to control the opening and closing of the balance pipe, the second control valve is arranged to control the opening and closing of the first air extraction pipe, the fourth control valve is arranged to control the opening and closing of the third air extraction pipe, the fifth control valve is arranged to control the opening and closing of the second air extraction pipe, and the sixth control valve is arranged to control the opening and closing of the buffer pipe.

[0013] In a specific implementable scheme, the sealing device comprises a male joint and a female joint, the female joint is mounted on the first vacuum pipe and the second vacuum pipe, the male joint is mounted on the first air extraction pipe and the second air extraction pipe, and the male joint is used for plugging in the female joint.

[0014] By adopting the technical scheme, the male joint is arranged on the first and second air exhaust pipes, and the female joint is arranged on the vacuum pipe, so that the first and second air exhaust pipes are connected to the female joint on the vacuum pipe through the male joint, thereby realizing the connection of the first and second air exhaust pipes to the vacuum pipe.

[0015] In a specific embodiment, the sealing device further comprises a locking mechanism, the locking mechanism comprising a locking block, a locking rod and a reset spring piece, one end of the male joint being inserted into the female joint is provided with a limiting ring, the locking block is mounted on the female joint and used for limiting the limiting ring, one end of the reset spring piece is mounted on the female joint, the other end of the reset spring piece is connected with the locking block, one end of the locking rod is mounted on the locking block, the other end of the locking rod extends outward through the side wall of the female joint, and the outer side wall of the female joint is further provided with a limiting piece used for limiting the locking rod.

[0016] By adopting the technical scheme, the limiting ring on the male joint is limited by the locking block, thereby maintaining the tightness of the connection between the male joint and the female joint. When it is necessary to disassemble the male joint, the limiting ring is pulled to separate the locking block from the limiting ring, thereby realizing the separation of the male joint from the female joint.

[0017] In a specific embodiment, the limiting piece comprises a locking ring, the locking ring being mounted on the end of the locking rod located outside the female joint, and the side wall of the female joint is mounted with a locking hook used for positioning the locking ring.

[0018] By adopting the technical scheme, when the male joint is mounted on the female joint, the locking ring is positioned by connecting the locking ring with the locking hook on the female joint, thereby reducing the separation of the male joint from the female joint caused by misoperation.

[0019] In a specific embodiment, the sealing device further comprises a sealing mechanism, the sealing mechanism comprising a sealing ring, a sealing ring, a sealing block and a sealing spring, the sealing ring being mounted on the inner wall of one end of the female joint connected with the male joint, the sealing block being mounted on the inner wall of the female joint, the sealing ring being mounted on the inner wall of the female joint and located between the sealing ring and the sealing block, one end of the sealing ring being connected with the side wall of the sealing block, the other end of the sealing ring being connected with the sealing ring, the side wall of the sealing ring being mounted with a sealing plate, and the sealing plate being located between the sealing ring and the inner wall of the female joint, the sealing spring being mounted in the female joint, one end of the sealing spring being connected with the side wall of the sealing ring, and the other end of the sealing spring being connected with the side wall of the sealing block.

[0020] By adopting the technical scheme, when the male connector is plugged into the female connector, the limiting ring on the male connector pushes the sealing block to slide along the inner wall of the female connector and compresses the sealing spring, at the same time, the sealing plate drives the sealing ring to move, so that the sealing ring drives one end of the sealing ring to move towards the female connector, so that the end of the sealing ring connected with the sealing ring moves towards the other end, so that the middle part of the sealing ring is arched and abuts against the outer wall of the male connector, thereby improving the air tightness of the connection part of the male connector and the female connector.

[0021] In a second aspect, the application also provides a vacuum pressure balance process, which adopts the following technical scheme:

[0022] A vacuum pressure balance process comprises the following steps:

[0023] First-level balance: the vacuum box is communicated with the first-level balance device, so that the air pressure in the vacuum box and the air pressure in the first-level balance device are balanced, after the air pressure in the vacuum box is reduced, the vacuum box is disconnected with the first-level balance device;

[0024] Vacuumizing: the vacuum box is vacuumized, so that the pressure in the vacuum box reaches the required pressure of the process, and then the vacuumizing of the vacuum box is stopped;

[0025] Recovering the pressure in the first-level balance device: the first-level balance device is vacuumized, so that the pressure in the first-level balance device is recovered to the initial pressure, and then the vacuumizing of the first-level balance device is stopped.

[0026] By adopting the technical scheme, the pressure in the first-level balance device which is lower than the air pressure in the vacuum box is balanced with the air pressure in the vacuum box, so that the air pressure in the vacuum box is quickly reduced, thereby shortening the time of air pressure reduction, and then the vacuumizing of the vacuum box is continued, so that the air pressure in the vacuum box is reduced to the required air pressure of the process, thereby shortening the time required for the vacuumizing of the vacuum box.

[0027] In a specific implementation scheme, between the first-level balance step and the vacuumizing step, a second-level balance is further included, the buffer tank in the second-level balance device is communicated with the vacuum box, so that the air pressure in the buffer tank is balanced with the air pressure in the vacuum box, the air pressure in the vacuum box is reduced, and then the buffer tank is disconnected with the vacuum box.

[0028] By adopting the technical scheme, when the pressure in the vacuum box is close to the pressure in the buffer tank, the pressure balance is performed between the air pressure in the buffer tank and the air pressure in the vacuum box, so that the air pressure in the vacuum box is quickly further reduced, so as to further improve the speed of the vacuumizing of the vacuum box.

[0029] In one specific embodiment, after the vacuumizing step, the method further comprises recovering the pressure in the secondary balancing device, vacuumizing the buffer tank, reducing the pressure in the buffer tank to the working pressure, and then stopping the vacuumizing of the buffer tank.

[0030] By using the above technical solution, when the pressure in the buffer tank needs to be recovered, the gas in the buffer tank is extracted by the vacuum pump, so that the air pressure in the buffer tank is reduced to the air pressure at work, so that the buffer tank can continuously balance the air pressure in the vacuum tank.

[0031] In summary, the present application includes at least one of the following beneficial effects:

[0032] 1. The present application balances the air pressure in the vacuum tank by using the balancing barrel with lower pressure than the vacuum tank during the vacuumizing process of the vacuum tank, so that the air pressure in the vacuum tank is quickly reduced to a set range, and then the air pressure in the vacuum tank is extracted to other process required by the vacuum pump, thereby shortening the time required for vacuumizing the vacuum tank and reducing the impact on the silicon wafer in the vacuum tank when the air pressure is suddenly reduced to the process required air pressure.

[0033] 2. The present application further shortens the time required for vacuumizing the vacuum tank by setting the buffer tank, and balancing the pressure between the buffer tank and the vacuum tank when the pressure in the vacuum tank is reduced to close to the pressure in the buffer tank.

[0034] 3. The present application sets a sealing device at the connection between the first air pipe and the vacuum pipe, and the second air pipe and the vacuum pipe, which facilitates maintaining the air tightness of the connection between the vacuum pipe and the first air pipe, and the vacuum pipe and the second air pipe. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 is a structural schematic diagram of the vacuum pressure balancing system of the present application.

[0036] Figure 2 is a schematic diagram of the connection between the vacuum tank and the first vacuum pipe in the embodiment of the present application.

[0037] Figure 3 is a schematic diagram of the connection between the balancing barrel and the second vacuum pipe in the embodiment of the present application.

[0038] Figure 4 is a structural schematic diagram of the sealing device in the embodiment of the present application.

[0039] Figure 5 is a sectional view of the sealing device in the embodiment of the present application.

[0040] Figure 6 is an exploded view of the sealing device in the embodiment of the present application.

[0041] Figure 7 Figure 9 is a schematic view of the male connector and the female connector being separated in the embodiment of the present application.

[0042] Reference signs:

[0043] 1, vacuum tank; 11, first extension pipe; 2, buffer tank; 21, second extension pipe; 22, buffer pipe; 23, sixth control valve; 24, seventh control valve; 3, balance bucket; 31, balance pipe; 32, first control valve; 4, first vacuum pump; 41, first vacuum pipe; 5, second vacuum pump; 51, second vacuum pipe; 6, first exhaust pipe; 61, second control valve; 7, second exhaust pipe; 71, fifth control valve; 8, third exhaust pipe; 81, fourth control valve; 9, sealing device; 91, male connector; 92, female connector; 93, locking mechanism; 931, locking block; 932, locking rod; 933, locking ring; 934, locking hook; 935, limiting ring; 936, reset spring; 94, sealing mechanism; 941, sealing ring; 942, sealing plate; 943, sealing spring; 944, sealing block; 945, sealing groove; 946, sealing ring. DETAILED DESCRIPTION

[0044] The present application will be further described in detail below with reference to the accompanying drawings.

[0045] The embodiment of the present application discloses a vacuum pressure balance system, referring to Figure 1 and Figure 2 , comprising a vacuum tank 1, a first balance device and a second balance device, the first balance device comprising a balance bucket 3 and a first vacuum pump 4, the second balance device comprising a buffer tank 2 and a second vacuum pump 5, the first vacuum pump 4 being connected with a first vacuum pipe 41, and the second vacuum pump 5 being connected with a second vacuum pipe 51. A first extension pipe 11 is fixedly installed on the bottom wall of the vacuum tank 1, the first extension pipe 11 being connected with the end of the first vacuum pipe 41 away from the first vacuum pump 4, the first extension pipe 11 being connected with the balance bucket 3 through a balance pipe 31, and the balance bucket 3 being connected with the first vacuum pipe 41 through a first exhaust pipe 6. A second extension pipe 21 is fixedly installed on the bottom wall of the buffer tank 2, the end of the second vacuum pipe 51 away from the second vacuum pump 5 being connected with the second extension pipe 21, the second vacuum pipe 51 being connected with the vacuum tank 1 through a second exhaust pipe 7, the second vacuum pipe 51 being further connected with the balance bucket 3 through a third exhaust pipe 8, and the vacuum tank 1 and the buffer tank 2 being connected through a buffer pipe 22.

[0046] Referring to Figure 2 and Figure 3 , the working pressure in the balance bucket 3 is between atmospheric pressure and the required pressure of the process, and the working pressure in the buffer tank 2 is between the working pressure in the balance bucket 3 and the required pressure of the process.

[0047] Referring toFigure 2 And Figure 3 The first control valve 32 is arranged on the balance pipe 31, the second control valve 61 is arranged on the first suction pipe 6, the third control valve is arranged on the first extension pipe 11, the part where the balance pipe 31 is connected with the first extension pipe 11 is located above the third control valve, and the part where the first suction pipe 6 is connected with the first vacuum pipe 41 is located below the third control valve. The fourth control valve 81 is arranged on the third suction pipe 8, the fifth control valve 71 is arranged on the second suction pipe 7, the sixth control valve 23 is arranged on the buffer pipe 22, the seventh control valve 24 is arranged on the second extension pipe 21, and the seventh control valve 24 is located above the fourth control valve 81 and the fifth control valve 71.

[0048] With reference to Figure 3 And Figure 4 The first suction pipe 6 is connected with the first vacuum pipe 41 through the sealing device 9, and the second suction pipe 7 is connected with the second vacuum pipe 51 through the sealing device 9. The sealing device 9 comprises a male connector 91, a female connector 92 and a locking mechanism 93. The female connector 92 is fixedly installed on the first vacuum pipe 41 and the second vacuum pipe 51, the male connector 91 is fixedly installed on the first suction pipe 6 and the second suction pipe 7, and the male connector 91 is inserted into the female connector 92.

[0049] With reference to Figure 5 And Figure 6 The locking mechanism 93 comprises a locking block 931, a locking rod 932 and a reset spring 936. A limiting ring 935 is fixedly installed on the outer wall of one end of the male connector 91 inserted into the female connector 92. The locking block 931 is slidingly installed on the inner wall of the female connector 92, and the sliding axis of the locking block 931 is perpendicular to the axis of the female connector 92. The locking block 931 is used for limiting the limiting ring 935. One end of the locking rod 932 is fixedly installed on one end of the locking block 931 located in the inner wall of the female connector 92. The other end of the locking rod 932 extends outward through the side wall of the female connector 92. A locking ring 933 is rotatably installed on the end of the locking rod 932 located outside the female connector 92. A locking hook 934 is fixedly installed on the outer side wall of the female connector 92. The locking ring 933 is clamped with the locking hook 934. An accommodation cavity is formed in the end of the female connector 92 close to the locking block 931. The reset spring 936 is installed in the accommodation cavity, and one end of the reset spring 936 is connected with the inner wall of the accommodation cavity, and the other end of the reset spring 936 abuts against the side wall of the locking block 931 close to the locking rod 932.

[0050] With reference to Figure 5 And Figure 6When the male connector 91 is plugged on the female connector 92, the limiting ring 935 on the male connector 91 slides along the inner wall of the female connector 92 to the locking block 931, so that the limiting ring 935 passes over the locking block 931, at this time the locking block 931 extends into the female connector 92 under the action of the reset spring 936, so that the side wall of the limiting ring 935 away from the side wall of the female connector 92 is in contact with the side wall of the locking block 931, and then the locking ring 933 is clamped with the locking hook 934, so as to realize the locking of the male connector 91. When it is needed to separate the male connector 91 and the female connector 92, the locking ring 933 is separated from the locking hook 934, and then the locking ring 933 is pulled, so that the locking block 931 is driven by the locking rod 932 to move towards the inner wall of the female connector 92, so that the locking block 931 is separated from the limiting ring 935, thereby facilitating the disassembly of the male connector 91 from the female connector 92.

[0051] With reference to Figure 5 and Figure 6 , the sealing device 9 further comprises a sealing mechanism 94, the sealing mechanism 94 comprises a sealing ring 941, a sealing ring 946, a sealing block 944 and a sealing spring 943, the sealing block 944 is fixedly installed on the inner wall of the female connector 92, and the sealing block 944 is located in the female connector 92 close to the first vacuum pipe 41 or the second vacuum pipe 51, the sealing ring 941 is slidably installed on the inner wall of the female connector 92, and the sealing ring 941 is located on the inner wall of the female connector 92 close to the locking block 931, the inner diameter of the sealing ring 941 is greater than the outer diameter of the male connector 91, and the side wall of the sealing ring 941 is used for being in contact with the side wall of the limiting ring 935. The side wall of one side of the sealing ring 941 close to the sealing block 944 is fixedly installed with a sealing plate 942, the sealing plate 942 extends towards the sealing block 944, the side wall of the sealing block 944 is provided with a sealing groove 945 for inserting the sealing plate 942, and the side wall of one side of the sealing plate 942 close to the inner wall of the female connector 92 is in contact with the side wall of one end of the locking block 931 away from the locking rod 932.

[0052] With reference to Figure 5 and Figure 6 , one end of the sealing spring 943 is fixedly installed on the side wall of the sealing ring 941 close to the sealing block 944, and the other end is fixedly installed on the side wall of the sealing block 944. The sealing ring 946 is installed in the female connector 92 and located between the sealing block 944 and the sealing ring 941, one end of the sealing ring 946 is fixedly connected with the side wall of the sealing ring 941, the other end is fixedly connected with the side wall of the sealing block 944, and the sealing spring 943 is located between the sealing ring 946 and the sealing plate 942.

[0053] With reference to Figure 5 and Figure 6When the male connector 91 is inserted into the female connector 92, the limiting ring 935 on the male connector 91 abuts against the sealing ring 941 and pushes the sealing ring 941 towards the sealing block 944, thereby compressing the sealing spring 943 and causing the sealing plate 942 to be inserted into the sealing groove 945, and the sealing ring 946 is moved towards the sealing block 944 under the action of the sealing ring 941, thereby causing the sealing ring 946 to be extruded and protrude towards the male connector 91, so that the sealing ring 946 fills the gap between the end of the male connector 91 and the sealing block 944, thereby achieving sealing. When the limiting ring 935 on the male connector 91 moves to the position between the locking block 931 and the sealing block 944, the locking block 931 extends out of the accommodating cavity under the action of the reset spring 936, thereby causing the locking block 931 to abut against the side wall on the side of the limiting ring 935 away from the sealing block 944, thereby limiting the limiting ring 935, thereby achieving the action of connecting the male connector 91 to the female connector 92.

[0054] With reference to Figure 5 and Figure 7 When the male connector 91 is detached from the female connector 92, the locking ring 933 is pulled to cause the locking block 931 to separate from the locking hook 934, thereby releasing the limiting of the limiting ring 935 by the locking block 931, at this time, the sealing ring 941 is moved to reset under the action of the sealing spring 943, thereby pushing the limiting ring 935 to move away from the sealing block 944, and the sealing ring 941 drives the sealing plate 942 to move away from the sealing block 944, so that the sealing plate 942 moves to the position of the locking block 931 and the sealing ring 946 recovers to be flat from the deformed state, and then the locking ring 933 is released, so that the locking block 931 abuts against the side wall of the sealing plate 942 under the action of the reset spring 936.

[0055] With reference to Figure 1 The connection positions between the pipelines at other positions in the application can also be provided with the sealing device 9 for sealing.

[0056] The working principle of the embodiment of the application is that the pipelines in the vacuum balance system are connected, the sealing device 9 is used to seal the connection positions of the pipelines, the first vacuum pump 4 and the second vacuum pump 5 are controlled to keep the state of pumping, and the first control valve 32, the second control valve 61, the third control valve, the fourth control valve 81, the fifth control valve 71, the sixth control valve 23 and the seventh control valve 24 are controlled to keep the state of being closed.

[0057] When the vacuum balance system needs to work, the first control valve 32 is opened, so that the balance bucket 3 is communicated with the vacuum box 1, thereby balancing the pressure in the balance bucket 3 with the pressure in the vacuum box 1, so as to reduce the pressure in the vacuum box 1 to a suitable range, so as to avoid the silicon wafer in the vacuum box 1 from being impacted by the sharply changed pressure. Then, the first control valve 32 is closed, while the third control valve and the fifth control valve 71 are opened, so that the vacuum box 1 is pumped by the first vacuum pump 4 and the second vacuum pump 5, thereby reducing the air pressure in the vacuum box 1. When the pressure in the vacuum box 1 approaches the pressure in the buffer box 2, the third control valve and the fifth control valve 71 are closed, the sixth control valve 23 is opened, so that the buffer box 2 is balanced with the vacuum box 1, thereby quickly reducing the pressure in the vacuum box 1, then the sixth control valve 23 is closed, the third control valve and the fifth control valve 71 are continuously opened, and the pressure in the vacuum box 1 is reduced to the pressure required by the process, then the third control valve and the fifth control valve 71 are closed.

[0058] When the pressure in the vacuum box 1 reaches the pressure required by the process, the third control valve and the fifth control valve 71 are kept closed, the second control valve 61 and the fourth control valve 81 are opened, the pressure in the balance bucket 3 is pumped by the first vacuum pump 4 and the second vacuum pump 5, thereby reducing the pressure in the balance bucket 3 to the pressure value in the working state, then the second control valve 61 and the fourth control valve 81 are closed, then the seventh control valve 24 is opened, the gas in the buffer box 2 is pumped by the second vacuum pump 5, so that the pressure in the buffer box 2 is reduced to the pressure in the working state, then the seventh control valve 24 is closed.

[0059] When the pipeline needs to be repaired, the first vacuum pump 4 and the second vacuum pump 5 are controlled to stop, then the locking mechanism 93 is controlled to release the locking state between the male joint 91 and the female joint 92, so that the male joint 91 and the female joint 92 are disassembled, thereby realizing the repair of the pipeline.

[0060] The embodiment of the present application also discloses a vacuum pressure balance process, which comprises the following steps, referring to Figure 1 and Figure 2 ,

[0061] Primary balance: the vacuum box 1 is connected with the balance bucket 3 in the primary balance device through a pipeline, and the vacuum box 1 is communicated with the balance bucket 3, so that the air pressure in the vacuum box 1 is balanced with the air pressure in the balance bucket 3, after the air pressure in the vacuum box 1 is reduced, the pipeline connected between the vacuum box 1 and the balance bucket 3 is closed.

[0062] Vacuumizing: the vacuum box 1 is connected with the first vacuum pump 4 through a pipeline, and the vacuum box 1 is connected with the second vacuum pump 5 through a pipeline, the vacuum in the vacuum box 1 is continuously pumped by the first vacuum pump 4 and the second vacuum pump 5, so that the pressure in the vacuum box 1 continues to decrease to approach the pressure in the buffer box 2, then the pipeline connected between the vacuum box 1 and the first vacuum pump 4 and the second vacuum pump 5 is closed.

[0063] Secondary pressure balancing: connecting the vacuum chamber 1 with the buffer tank 2 through a pipe, and connecting the buffer tank 2 with the second vacuum pump 5 through a pipe. When the pressure in the vacuum chamber 1 approaches the pressure in the buffer tank 2, the pipe connecting the vacuum chamber 1 with the buffer tank 2 is opened, so that the pressure in the buffer tank 2 is balanced with the pressure in the vacuum chamber 1. After the pressure in the vacuum chamber 1 is continuously reduced, the pipe connecting the vacuum chamber 1 with the buffer tank 2 is closed. At the same time, the pipe connecting the vacuum chamber 1 with the first vacuum pump 4 is opened, so that the first vacuum pump 4 continues to extract the gas in the vacuum chamber 1, thereby reducing the pressure in the vacuum chamber 1 to the required pressure for the process. Subsequently, the pipe connecting the vacuum chamber 1 with the first vacuum pump 4 is closed.

[0064] Restoring the pressure in the primary pressure balancing device: connecting the first vacuum pump 4 with the balancing barrel 3 through a pipe, and connecting the balancing barrel 3 with the second vacuum pump 5 through a pipe. The pipe connecting the first vacuum pump 4 with the balancing barrel 3 is opened, and the pipe connecting the balancing barrel 3 with the second vacuum pump 5 is opened. After the pressure in the balancing barrel 3 is restored to the working pressure, the pipe connecting the first vacuum pump 4 with the balancing barrel 3 is closed, and the pipe connecting the balancing barrel 3 with the second vacuum pump 5 is closed. At this time, the pressure in the balancing barrel 3 is between the atmospheric pressure and the required pressure for the process.

[0065] Restoring the pressure in the secondary pressure balancing device: connecting the buffer tank 2 with the second vacuum pump 5 through a pipe. The pipe connecting the buffer tank 2 with the second vacuum pump 5 is opened, and the pressure in the buffer tank 2 is reduced. After the pressure in the buffer tank 2 reaches the working pressure, the pipe connecting the buffer tank 2 with the second vacuum pump 5 is closed. At this time, the pressure in the buffer tank 2 is between the pressure in the balancing barrel 3 and the required pressure for the process.

[0066] The above is the preferred embodiment of the present application, which does not limit the protection scope of the present application. Therefore, any equivalent changes made on the structure, shape, and principle of the present application shall be covered within the protection scope of the present application.

Claims

1. A vacuum pressure balancing system, characterized in that, The system includes a vacuum chamber (1) and a primary balancing device. The primary balancing device includes a balancing tank (3) and a first vacuum pump (4). The vacuum chamber (1) is connected to the first vacuum pump (4) via a first vacuum tube (41). The vacuum chamber (1) and the balancing tank (3) are connected via a balancing tube (31). The balancing tank (3) is connected to the first vacuum tube (41) via a first suction tube (6). The first suction tube (6) is connected to the first vacuum tube (41) via a sealing device (9). The vacuum pressure balancing system also includes a secondary balancing device. The secondary balancing device includes a buffer tank (2) and a second vacuum pump (5). The vacuum chamber (1) is connected to the buffer tank (2) via a buffer tube (22). The buffer tank (2) is connected to the second vacuum tube (5). 51) Connected to the second vacuum pump (5), the balance tank (3) is connected to the second vacuum tube (51) through the third suction pipe (8), the vacuum box (1) is connected to the second vacuum tube (51) through the second suction pipe (7), the second suction pipe (7) is also connected to the second vacuum tube (51) through the sealing device (9), the sealing device (9) includes a male connector (91) and a female connector (92), the female connector (92) is installed on the first vacuum tube (41) and the second vacuum tube (51), the male connector (91) is installed on the first suction pipe (6) and the second suction pipe (7), the male connector (91) is used to insert into the female connector (92), the sealing device (9) also includes a locking mechanism (93), the locking mechanism The structure (93) includes a locking block (931), a locking rod (932), and a reset spring (936). One end of the male connector (91) that is inserted into the female connector (92) is provided with a limiting ring (935). The locking block (931) is installed on the female connector (92) and is used to limit the limiting ring (935). One end of the reset spring (936) is installed on the female connector (92), and the other end of the reset spring (936) is connected to the locking block (931). One end of the locking rod (932) is installed on the locking block (931), and the other end passes through the side wall of the female connector (92) and extends outward. The outer side wall of the female connector (92) is also provided with a function to limit the locking rod (932). The sealing device (9) further includes a sealing mechanism (94), which includes a sealing ring (941), a sealing ring (946), a sealing block (944), and a sealing spring (943). The sealing ring (941) is installed on the inner wall of the end of the female connector (92) connected to the male connector (91). The diameter of the inner ring of the sealing ring (941) is larger than the diameter of the outer ring of the male connector (91). The sealing block (944) is installed on the inner wall of the female connector (92). A sealing groove (945) for the sealing plate (942) to be inserted is provided on the side wall of the sealing block (944). The sealing ring (946) is installed on the inner wall of the female connector (92) and is located between the sealing ring (941) and the sealing block (944).One end of the sealing ring (946) is connected to the side wall of the sealing block (944), and the other end is connected to the sealing ring (941). A sealing plate (942) is installed on the side wall of the sealing ring (941), and the sealing plate (942) is located between the sealing ring (946) and the inner wall of the female connector (92). The sealing spring (943) is installed inside the female connector (92), and one end of the sealing spring (943) is connected to the side wall of the sealing ring (941), and the other end is connected to the side wall of the sealing block (944).

2. The vacuum pressure balancing system according to claim 1, characterized in that: The balance pipe (31) is provided with a first control valve (32), the first suction pipe (6) is provided with a second control valve (61), the third suction pipe (8) is provided with a fourth control valve (81), the second suction pipe (7) is provided with a fifth control valve (71), and the buffer pipe (22) is provided with a sixth control valve (23).

3. The vacuum pressure balancing system according to claim 2, characterized in that: The limiting component includes a locking ring (933), which is installed on the end of the locking rod (932) outside the female connector (92). A locking hook (934) is installed on the side wall of the female connector (92), which is used to position the locking ring (933).

4. A vacuum pressure balancing process, based on a vacuum pressure balancing system according to any one of claims 1-3, characterized in that, Includes the following steps: First-stage balancing: Connect the vacuum chamber (1) to the first-stage balancing device to balance the air pressure in the vacuum chamber (1) with the air pressure in the first-stage balancing device. After reducing the air pressure in the vacuum chamber (1), disconnect the vacuum chamber (1) from the first-stage balancing device. Vacuuming: Vacuuming the vacuum chamber (1) until the pressure inside the vacuum chamber (1) reaches the pressure required by the process, and then stopping the vacuuming of the vacuum chamber (1); Restoring the pressure inside the primary balancing device: Evacuate the primary balancing device to restore the pressure inside to the initial pressure, and then stop evacuating the primary balancing device.

5. The vacuum pressure balancing process according to claim 4, characterized in that: The first-level balancing step and the vacuuming step also include a second-level balancing step, in which the buffer box (2) in the second-level balancing device is connected to the vacuum box (1) to balance the air pressure in the buffer box (2) with the air pressure in the vacuum box (1), thereby reducing the air pressure in the vacuum box (1), and then the buffer box (2) is disconnected from the vacuum box (1).

6. The vacuum pressure balancing process according to claim 5, characterized in that: After the vacuuming step, the pressure in the secondary balancing device is restored, the buffer tank (2) is evacuated, the pressure in the buffer tank (2) is reduced to the working pressure, and then the vacuuming of the buffer tank (2) is stopped.

Images