A galvanometer fast correction method and system

Abstract

The application discloses a mirror quick correction method and system, which comprises the following steps: setting a closed quadrilateral figure; laser is scanned along four edges of the quadrilateral figure under the action of a mirror system to form an actual marking figure; the quadrilateral figure and the actual marking figure are superposed to an XY two-dimensional coordinate system; compensation amounts in X and Y directions are obtained; input processing point coordinates are compensated according to the compensation amounts, and the mirror system moves to a predetermined position according to the compensation result, so that the laser spot finally falls on the desired position on the working surface. The application is simple and easy to operate, has small detection error, high correction precision and low use cost.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of laser processing, and particularly relates to a galvanometer rapid correction method and system. BACKGROUND

[0002] In the field of laser processing, a galvanometer needs to be used for scanning processing. In the process of device installation and use, due to mechanical structure errors, assembly errors, optical path adjustment errors and other reasons, the processing patterns in the scanning area may be misaligned and deformed, and therefore the galvanometer needs to be corrected in time to reduce the deviation.

[0003] A traditional method is to measure multiple points and establish a correction table. This method is complex to operate and time-consuming, and cumulative errors may occur in the multiple point measurement, resulting in insufficient calibration accuracy. Therefore, there are some existing methods for correcting the galvanometer system, for example, the invention patent applications with the publication numbers CN114029611A and CN102152007A both use a CCD image acquisition device to position a matrix target, and use a correction processing module to output a compensation file for the galvanometer. However, the above two methods both need to use a CCD camera to assist in measuring the position of the target, which is expensive and the measurement accuracy of the camera cannot be guaranteed. SUMMARY

[0004] In view of the deficiencies of the prior art, the application provides a galvanometer rapid correction method and system, which is simple to operate, has small detection errors, high correction accuracy and low use cost.

[0005] To achieve the above-mentioned purpose, the application provides the following technical solutions.

[0006] On the one hand, a galvanometer rapid correction method is provided, which includes the following steps:

[0007] An XY coordinate system is established, and a closed quadrilateral pattern is set, the center of the quadrilateral pattern coincides with the origin of the XY coordinate system;

[0008] A laser is generated, and under the action of the galvanometer system, the laser starts from one corner point of the quadrilateral pattern and scans along the four sides of the quadrilateral pattern to form an actual engraved pattern;

[0009] The quadrilateral pattern and the actual engraved pattern are both superimposed on the XY two-dimensional coordinate system, and the center of the quadrilateral pattern, the center of the actual engraved pattern and the origin of the XY two-dimensional coordinate system coincide;

[0010] The compensation amount in the X direction and the Y direction is obtained;

[0011] According to the compensation amount, the input machining point coordinates are compensated, and the galvanometer system moves to the predetermined position according to the compensation result, so that the laser spot finally falls on the desired position on the working plane.

[0012] Preferably, the quadrilateral pattern comprises a first side, a second side, a third side and a fourth side, the four sides are sequentially connected to form a closed pattern, and wherein the first side and the third side are parallel to each other, the second side and the fourth side are parallel to each other, and the length of the first side and the third side is Xi, and the length of the second side and the fourth side is Yi.

[0013] Preferably, the actual marking pattern is symmetrical about the X axis / Y axis.

[0014] Preferably, the compensation amount in the X direction and the Y direction comprises the following steps:

[0015] In the XY two-dimensional coordinate system, the distance X between two corner points on the actual marking pattern in the X axis direction is obtained l , the distance X between the two closest points is obtained p , and the distance Y between two corner points on the actual marking pattern in the Y axis direction is obtained l , the distance Y between the two farthest points is obtained p .

[0016] And the compensation amount in the X direction and the Y direction is obtained according to formulas (1-1) and (1-2):

[0017]

[0018]

[0019] Wherein, x0, y0 are the horizontal coordinate and the vertical coordinate of the actual position of the laser spot falling on the working plane in the XY two-dimensional coordinate system, and the actual position is on the actual marking pattern;

[0020] Δx, Δy are the compensation amount of the actual position of the laser spot falling on the working plane in the X direction and the Y direction in the XY two-dimensional coordinate system;

[0021] a, b are binomial coefficients of the X direction compensation amount Δx; c, d are binomial coefficients of the Y direction compensation amount Δy.

[0022] Preferably, the compensation of the input machining point coordinates according to the compensation amount comprises the following steps:

[0023] The input machining point coordinates are compensated according to formulas (2-1) and (2-2):

[0024] X 实 = X 输 + Δx输 (2-1)

[0025] Y 实 = Y 输 + Δy 输 (2-2)

[0026] wherein, X 输 , Y 输 are the horizontal coordinate and the vertical coordinate of the input machining point respectively; X 实 , Y 实 are the compensated horizontal coordinate and the compensated vertical coordinate respectively; Δx 输 is the horizontal coordinate compensation amount of the input machining point, which is calculated by substituting X 输 = x0, Y 输 = y0 into formula (1-1); Δy 输 is the vertical coordinate compensation amount of the input machining point, which is calculated by substituting X 输 = x0, Y 输 = y0 into formula (1-2).

[0027] Preferably, the binomial coefficients a, b of the X-direction compensation amount Δx are respectively:

[0028]

[0029] Preferably, the binomial coefficients c, d of the Y-direction compensation amount Δy are respectively:

[0030]

[0031] On the other hand, a galvanometer fast correction system for implementing the above-mentioned galvanometer fast correction method is also provided, which comprises:

[0032] a laser for generating laser, and the laser is scanned under the action of a galvanometer system, with a corner point of a set closed quadrilateral pattern as a starting point, and along the four sides of the quadrilateral pattern, to form an actual marking pattern;

[0033] a distance acquisition unit for acquiring, in an XY two-dimensional coordinate system, the distance X l between two corner points on the actual marking pattern in the X-axis direction, the distance X p between the two closest points, and the distance Y l between two corner points on the actual marking pattern in the Y-axis direction, and the distance Y p between the two farthest points;

[0034] a compensation amount acquisition unit for acquiring the compensation amounts in the X-direction and the Y-direction;

[0035] a compensation unit for compensating the input machining point coordinates according to a compensation amount;

[0036] a galvanometer control unit for receiving the compensation result and controlling the galvanometer system to move to a predetermined position according to the compensation result.

[0037] Compared with the prior art, the present application has the following beneficial effects:

[0038] According to the characteristics of the galvanometer field distortion, the present application pre-engraves a square or rectangle symmetrical about the XY coordinate system axis, only needs to measure the length of the 4 edges in the X direction and the Y direction, and uses the symmetry characteristics of the figure to complete the compensation amount calculation, further realizes the correction effect of the galvanometer pillow-shaped and barrel-shaped distortion, compared with the traditional multi-point measurement method, the method in the present application is simple and easy to operate, has small detection error and high correction accuracy, compared with the error correction method based on vision, the present application does not need an additional camera, and the use cost can be reduced. BRIEF DESCRIPTION OF DRAWINGS

[0039] Figure 1 is a step flow chart of the galvanometer rapid correction method in the present application;

[0040] Figure 2 is a closed quadrilateral figure P1 in the present application;

[0041] Figure 3 is an actual engraved figure P2 in the present application;

[0042] Figure 4 is a schematic view of the closed quadrilateral figure P1 and the actual engraved figure P2 in the present application superimposed to the same XY coordinate system;

[0043] Figure 5 is a laser engraved figure obtained by the galvanometer system without correction;

[0044] Figure 6 is a laser engraved figure obtained by the galvanometer system after correction by the present application;

[0045] Figure 7 is a structure schematic view of the galvanometer rapid correction system in the present application. DETAILED DESCRIPTION

[0046] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0047] Embodiment 1:

[0048] As Figure 1 shown in the embodiment, a mirror fast correction method is provided, which comprises the following steps:

[0049] S1, an XY coordinate system is established, and a closed quadrilateral figure P1 (as Figure 2 shown) is set, the center of the quadrilateral figure P1 coincides with the origin O of the XY coordinate system, and is symmetrical about the X axis / Y axis;

[0050] The quadrilateral figure P1 includes a first side, a second side, a third side and a fourth side, which are sequentially connected to form a closed figure, and wherein the first side and the third side are parallel to each other, the second side and the fourth side are parallel to each other, and the length of the first side and the third side is Xi, the length of the second side and the fourth side is Yi, when Xi≠Yi, the quadrilateral is a rectangle, and when Xi=Yi, the quadrilateral is a square;

[0051] S2, start the laser to generate laser, and the laser is scanned along the four sides of the quadrilateral figure P1 under the action of the mirror system, taking one corner point of the quadrilateral figure P1 as the starting point, to form an actual marking figure P2 (as Figure 3 shown);

[0052] As Figure 3 can be seen, due to various optical path errors of the mirror system, the actual marking figure P2 formed has obvious pillow-shaped distortion and barrel-shaped distortion;

[0053] S3, superimpose the quadrilateral figure P1 and the actual marking figure P2 to the XY two-dimensional coordinate system, and the center of the quadrilateral figure P1, the center of the actual marking figure P2 and the origin O of the XY two-dimensional coordinate system coincide (as Figure 4 shown), and the actual marking figure P2 is also symmetrical about the X axis / Y axis;

[0054] S4, in the XY two-dimensional coordinate system, obtain the distance X l between the two closest points on the actual marking figure P2 in the X axis direction, the distance X p between the two closest points, and obtain the distance Y l between the two farthest points on the actual marking figure P2 in the Y axis direction, and the distance Y p ;

[0055] And according to formulas (1-1), (1-2), obtain the compensation amount in X direction and Y direction:

[0056]

[0057]

[0058] wherein x0, y0 are the horizontal coordinate and the vertical coordinate of the actual position P' of the laser spot on the working surface in the XY two-dimensional coordinate system, and the actual position P' is on the actual marking pattern P2;

[0059] Δx, Δy are the compensation amount of the actual position P' of the laser spot on the working surface in the X direction and the Y direction in the XY two-dimensional coordinate system;

[0060] a, b are the binomial coefficients of the X direction compensation amount Δx; c, d are the binomial coefficients of the Y direction compensation amount Δy;

[0061] and S5, compensating the input machining point coordinates according to the formula (2-1), (2-2), and the galvanometer system moves to the predetermined position according to the compensation result, so that the laser spot finally falls on the desired position on the working surface, to realize the distortion of the galvanometer system, and finally obtain the expected target pattern;

[0062] X 实 = X 输 + Δx 输 (2-1)

[0063] Y 实 = Y 输 + Δy 输 (2-2)

[0064] wherein X 输 , Y 输 are the horizontal coordinate and the vertical coordinate of the input machining point; X 实 , Y 实 are the compensated horizontal coordinate and the vertical coordinate; Δx 输 is the horizontal coordinate compensation amount of the input machining point, which is calculated by substituting X 输 = x0, Y 输 = y0 into formula (1-1); Δy 输 is the vertical coordinate compensation amount of the input machining point, which is calculated by substituting X 输 = x0, Y 输 = y0 into formula (1-2).

[0065] For example, when the laser machining trajectory is a straight line, the starting point coordinate is (0, 0), and the end point coordinate is (50, 50), it can be first interpolated into several line segments, the starting point coordinates of which are all (0, 0), and the end point coordinates are (0, 1), (0, 2), (0, 3), … (0, 50), and then each end point is compensated according to the formula (2-1), (2-2), that is, the compensated end point coordinates are obtained: (Δx1, 1+Δy1), (Δx2, 2+Δy2), (Δx3, 3+Δy3), …, Δx50 50+Δy 50 Finally, the compensated point coordinates are sent to the galvanometer controller, and the galvanometer system is controlled to move to the specified position.

[0066] As shown in Figure 5 When the correction method in the present application is not implemented, the laser marking pattern obtained by the galvanometer system has obvious distortion, and after the method in the present application is implemented, the distortion of the marking pattern is significantly improved.

[0067] In summary, according to the characteristics of the galvanometer field distortion, the square or rectangle symmetric about the XY coordinate system axis is marked in advance, only the lengths of the four edges in the X direction and the Y direction need to be measured, and the compensation amount calculation can be completed by using the symmetry characteristics of the pattern, and the correction effect of the galvanometer pillow shape and barrel shape distortion is further realized. It is especially suitable for the correction of small area laser marking system. Compared with the traditional multi-point measurement method, the method in the present application is simple and easy to operate, the detection error is small, and the correction precision is high. Compared with the error correction method based on vision, the present application does not need an additional camera, and the use cost can be reduced.

[0068] Embodiment 2:

[0069] The difference between this embodiment and embodiment 1 is only that due to the symmetry of the pattern, and the quadratic polynomial characteristics of formula (1-1) and (1-2), the binomial coefficients can be obtained by solving the coordinates of the characteristic points.

[0070] Specifically, two points P1(x1, y1) and P2(x2, y2) of the actual marking pattern P2 in the first quadrant are taken as follows:

[0071]

[0072] According to formula (3), the compensation amounts Δx1 and Δx2 of P1(x1, y1) and P2(x2, y2) in the X direction are obtained respectively:

[0073]

[0074] According to the polynomial solving formula (4), the binomial coefficients a and b of the X direction compensation amount Δx are obtained:

[0075]

[0076] Similarly, two points P2(x2, y2) and P3(x3, y3) of the actual marking pattern P2 in the first quadrant are taken as follows:

[0077]

[0078] The binomial coefficients c and d of the Y direction compensation amount Δy can be obtained according to the method for obtaining the binomial coefficients a and b of the X direction compensation amount Δx.

[0079]

[0080] The method has small calculation amount, is simple and easy to operate, can quickly obtain the binomial coefficients, and improves the correction efficiency.

[0081] Embodiment 3:

[0082] The embodiment provides a galvanometer fast correction system for implementing the galvanometer fast correction method in embodiments 1 or 2, as shown in the figure, which comprises: Figure 7

[0083] A laser 1 is used to generate laser, and the laser is scanned along four edges of a set closed quadrilateral figure P1 under the action of a galvanometer system, so as to form an actual marking figure P2 with one corner point of the quadrilateral figure P1 as a starting point.

[0084] A distance acquisition unit 2 is used to acquire distances X l , X p , Y l , and Y p between two corner points on the actual marking figure P2 in the X axis direction and the Y axis direction respectively.

[0085] A compensation amount acquisition unit 3 is used to acquire compensation amounts in the X direction and the Y direction, and the process is the same as step S4.

[0086] A compensation unit 4 is used to compensate the input machining point coordinates according to the compensation amounts.

[0087] A galvanometer control unit 5 is used to receive the compensation results and control the galvanometer system to move to a predetermined position according to the compensation results.

[0088] In summary, according to the characteristics of the galvanometer field distortion, a square or rectangle symmetric about the XY coordinate system is pre-marked, only the lengths of the four edges in the X direction and the Y direction need to be measured, the compensation amount calculation can be completed by using the symmetry characteristics of the figure, and the correction effect of the galvanometer pillow-shaped and barrel-shaped distortion is further realized. Compared with the traditional multi-point measurement and the error correction method based on vision, the method has the advantages of simple operation, small detection error, high correction accuracy, low use cost and the like.

[0089] ​It should be noted that the technical features in the above-mentioned embodiments 1 to 2 can be combined in any manner, and the technical solutions formed by the combinations all belong to the protection scope of the present application. In this document, terms such as “comprising”, “including” or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such a process, method, article or device. Without more limitations, the element defined by the statement “including a…” does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0090] Although the embodiments of the present application have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A rapid correction method for galvanometers, characterized in that, Includes the following steps: Establish an XY coordinate system and set a closed quadrilateral shape, the center of which coincides with the origin of the XY coordinate system; A laser is generated, and under the action of the galvanometer system, the laser scans along the four sides of the quadrilateral shape, starting from one corner point, to form an actual marking pattern. The quadrilateral figure and the actual marked figure are superimposed on the XY two-dimensional coordinate system, and the center of the quadrilateral figure, the center of the actual marked figure and the origin of the XY two-dimensional coordinate system coincide. Obtain the compensation amounts in the X and Y directions; The input processing point coordinates are compensated according to the compensation amount, and the galvanometer system moves to the predetermined position according to the compensation result, so that the laser spot finally falls on the desired position on the working surface. Obtaining the compensation amounts in the X and Y directions involves the following steps: In the XY two-dimensional coordinate system, obtain the distance X between two corner points on the actual marked pattern along the X-axis. l The distance X between the two closest points p And obtain the distance Y between two corner points on the actual marked pattern in the Y-axis direction. l The distance Y between the two farthest points p ; And obtain the compensation amounts in the X and Y directions according to formulas (1-1) and (1-2): （1-1） （1-2） Where x0 and y0 are the abscissa and ordinate of the actual position of the laser spot on the working surface in the XY two-dimensional coordinate system, and the actual position is on the actual marked pattern. Δx and Δy are the compensation amounts in the X and Y directions, respectively, for the actual position of the laser spot on the working surface in the XY two-dimensional coordinate system. a and b are the binomial coefficients of the X-direction compensation amount Δx; c and d are the binomial coefficients of the Y-direction compensation amount Δy. The quadrilateral figure includes a first side, a second side, a third side, and a fourth side, which are connected sequentially to form a closed figure. The first and third sides are parallel to each other, as are the second and fourth sides, and both the first and third sides have a length of X. i The lengths of the second and fourth sides are both Y. i .

2. The rapid correction method for galvanometers as described in claim 1, characterized in that, The actual marking pattern is symmetrical about the X-axis / Y-axis.

3. The rapid correction method for galvanometers as described in claim 1, characterized in that, Compensating the input machining point coordinates based on the compensation amount includes the following steps: The input machining point coordinates are compensated according to formulas (2-1) and (2-2): X 实 =X 输 +Δx 输 (2-1) Y 实 =Y 输 +Δy 输 (2-2) Among them, X 输 Y 输 These are the x and y coordinates of the input processing point, respectively; X 实 Y 实 These are the compensated x-coordinate and y-coordinate, respectively; Δx 输 The x-coordinate compensation amount for the input machining point is calculated by X... 输 =x0、Y 输 Substituting y0 into formula (1-1) yields Δy. 输 The input is the ordinate compensation amount for the machining point, which is achieved by adjusting the X... 输 =x0、Y 输 =y0 is obtained by substituting into formula (1-2).

4. The rapid correction method for galvanometers as described in claim 1, characterized in that, The binomial coefficients a and b of the X-direction compensation Δx are respectively: 。 5. The rapid correction method for galvanometers as described in claim 1, characterized in that, The binomial coefficients c and d of the Y-direction compensation Δy are respectively: 。 6. A rapid galvanometer correction system for implementing the rapid galvanometer correction method according to any one of claims 1-5, characterized in that, include: A laser is used to generate laser light, and the laser light, under the action of a galvanometer system, scans along the four sides of a closed quadrilateral shape, starting from a corner point of the shape, to form an actual marking pattern. The distance acquisition unit is used to acquire the distance X between two corner points on the actual marked pattern in the X-axis direction in the XY two-dimensional coordinate system. l The distance X between the two closest points p And obtain the distance Y between two corner points on the actual marked pattern in the Y-axis direction. l The distance Y between the two farthest points p ; The compensation amount acquisition unit is used to acquire the compensation amount in the X and Y directions; The compensation unit is used to compensate the input machining point coordinates according to the compensation amount. The galvanometer control unit receives the compensation results and controls the galvanometer system to move to a predetermined position based on the compensation results.

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