A vibration measurement and control device and method of a multi-integrated structure coupled flexible beam

Abstract

The application discloses a kind of multi-integral structure coupling flexible beam's vibration measurement and control device and method, comprising: compliant structure part, including first structure, second structure and third structure;First structure and the fixation of second structure are on the same slider, slider corresponding guide rail is fixed on experiment table, second structure and third structure are connected by rigid rod, slider is connected with alternating current servo motor, the rotation of alternating current servo motor is converted into the linear motion of compliant structure by rack and pinion with alternating current servo motor;First structure, second structure and third structure both sides are symmetrically set flexible cantilever beam;Vibration detection part is used to detect the vibration signal of flexible cantilever beam;Drive control part is used to inhibit the vibration of flexible cantilever beam according to the vibration signal of vibration detection part.The application has simple structure and is easy to operate.

Description

Technical Field

[0001] This invention relates to the field of vibration measurement, and in particular to a vibration measurement and control device and method for a multi-integrated structure coupled flexible beam. Background Technology

[0002] In modern engineering fields such as aerospace, robotics, high-speed mechanisms and vehicles, there is a wide range of relative motion between the components of a large number of complex mechanical systems. The topology and constraint forms of the interconnection of these components are diverse. In addition to the interaction between external forces and the components of the system, there may also be complex control links. The common feature is that the system is composed of multiple objects with relative motion, hence it is called a multibody system.

[0003] Structural vibration is a widespread phenomenon in industrial production and daily life, and a common problem of great concern in many engineering fields. In most cases, structural vibration is more harmful than beneficial, such as causing a decrease in manufacturing precision and structural instability and collapse, making it a phenomenon that needs to be controlled. Structural vibration control refers to taking certain measures to ensure that the dynamic load response of the structure does not exceed the limit value to meet engineering requirements.

[0004] In addition, many dangerous and monotonous tasks in industrial production are performed by industrial robots. Traditional rigid industrial robots are slow, energy-inefficient, and have low payload capacity, making it difficult to achieve high-efficiency production. Therefore, to improve production efficiency, people have begun to consider reducing the weight of robotic arms, and flexible industrial robots have gradually gained popularity. Flexible robots are lower in cost, have a wider working range, faster operating speed, and larger payload capacity, showing great potential in the production process. However, the biggest problem is the vibration caused by low rigidity. For example, the vibration of the robotic arm can interfere with the accuracy of movement, positioning, and operation, affecting the precision and efficiency of processing and production.

[0005] In summary, building a monitoring system for flexible structures without altering their structural properties and analyzing their vibration characteristics has significant practical engineering implications for subsequent research on vibration suppression. It is hoped that this research will provide some reference for the future design of vibration monitoring and control schemes for flexible multibody coupled structures. Summary of the Invention

[0006] In order to overcome the above-mentioned shortcomings and deficiencies of the prior art, the purpose of this invention is to provide a vibration measurement and control device and method for a multi-integrated structurally coupled flexible beam.

[0007] The objective of this invention is achieved through the following technical solution:

[0008] A vibration monitoring and control device for a multi-integrated structurally coupled flexible beam includes:

[0009] The compliant structure includes a first structure, a second structure, and a third structure. The first structure and the second structure are fixed on the same slider, and the guide rail corresponding to the slider is fixed on the experimental platform. The second structure and the third structure are connected by a rigid rod. The slider is connected to an AC servo motor. The first structure is connected to the AC servo motor through a gear and rack, which converts the rotational motion of the AC servo motor into the linear motion of the compliant structure.

[0010] Flexible cantilever beams are symmetrically arranged on both sides of the first, second, and third structures.

[0011] The vibration detection section is used to detect the vibration signals of the flexible cantilever beam;

[0012] The drive control section is used to suppress the vibration of the flexible cantilever beam based on the vibration signal from the vibration detection section.

[0013] Furthermore, the first, second, and third structures are different. The first and third structures are integral compliant structures, while the second structure is composed of two different compliant structures connected together.

[0014] Furthermore, two flexible cantilever beams are symmetrically arranged on both sides of the first, second, and third structures, and the ends of the flexible cantilever beams of the three structures are set differently.

[0015] The end edge of the flexible cantilever beam in the first structure is arc-shaped, and the arc is connected to a rectangular thin plate. The rectangular thin plate is at a 45-degree angle to the main body of the flexible cantilever beam.

[0016] The end edge of the flexible cantilever beam in the second structure is connected to a long strip plate perpendicular to the main body of the flexible cantilever beam, forming a T-shape. The outer surface of the long strip plate is wavy, with each wave being a semicircle. The inner surface of the long strip plate is provided with two rectangular thin plates at a 45-degree angle to the long strip plate. When viewed from above, the two rectangular thin plates are symmetrical about the flexible cantilever beam.

[0017] The end edge of the flexible cantilever beam in the third structure is set as a triangle, one side of which is connected to a rectangular thin plate, which forms a 45-degree angle with the main body of the flexible cantilever beam.

[0018] Furthermore, the first structure is an integrated compliant structure, functionally divided into two compliant units. The first compliant unit consists of a front connecting base, two side plates, and a flexible connecting plate. The second compliant unit consists of two side plates, a rear connecting base, and a flexible connecting plate. The two side plates shared by the two units play an energy transfer role. That is, the energy transmitted from the gear rack is stored in the first compliant unit and then released to the second compliant unit through the side plates, and the vibration is rapidly transmitted between the two components.

[0019] Furthermore, the second structure is an integrated compliant structure, including a central frame, outer side panels, and a flexible connection structure. The flexible connection structure is symmetrically arranged on both sides of the central frame, and the flexible connection mechanism on each side is composed of two compliant mechanisms connected in series.

[0020] Furthermore, the third structure includes an inner square frame, an outer U-shaped structure, and symmetrically arranged compliant connecting structures. The vibration energy brought by the outer plate of the second mechanism is transmitted to the inner square frame of the third mechanism through the connecting rod, and the vibration energy is then transmitted to the outer U-shaped structure through the symmetrically arranged compliant connecting structures.

[0021] Furthermore, the vibration detection part includes a piezoelectric sensor and an acceleration sensor. The piezoelectric sensor is installed on the center line of the width direction of the six flexible cantilever beams and is attached to both sides, with two sensors attached to each flexible cantilever beam.

[0022] The acceleration sensors are installed on the centerline of the width direction of the six flexible cantilever beams and are connected by washers and nuts, with one sensor installed on each flexible cantilever beam.

[0023] Furthermore, the drive control section includes a piezoelectric actuator, a piezoelectric amplifier circuit, and a servo motor driver. The piezoelectric actuator is mounted on the flexible cantilever beam. The computer obtains the control quantities corresponding to the servo AC motor and the piezoelectric actuator based on the obtained vibration signal, and generates corresponding control signals. The control signals are output to the piezoelectric amplifier circuit and the servo motor driver through the motion control card and terminal board, respectively, to further drive the AC servo motor and the piezoelectric actuator to control the vibration of the flexible cantilever beam.

[0024] Furthermore, the piezoelectric actuator is mounted on the centerline of the width direction of the flexible cantilever beam and is attached to both sides, with two pieces attached to each flexible cantilever beam.

[0025] A control method based on the aforementioned vibration monitoring and control device includes:

[0026] Step 1: Start and initialize each part of the device. The computer transmits data to the servo motor driver through the motion control card and terminal board, and finally drives the AC servo motor to produce the corresponding motion, causing the flexible beam to vibrate.

[0027] Step 2: Piezoelectric sensors and accelerometers detect the vibration of the six flexible cantilever beams on the three structures and the acceleration data during vibration;

[0028] Step 3: The piezoelectric sensor and accelerometer convert vibration information into vibration signals. The vibration signals are amplified by the charge amplifier and then input to the terminal board. The terminal board is then input to the motion control card. The A / D module in the motion control card converts the analog signals into digital signals, which are finally input to the computer.

[0029] Step 4: The computer obtains the control quantities corresponding to the AC motor and piezoelectric actuator based on the obtained vibration signal, generates corresponding control signals, and outputs the control signals to the piezoelectric amplifier circuit and servo motor driver through the motion control card and terminal board respectively, further driving the AC motor and piezoelectric actuator to control the vibration of the flexible beam;

[0030] Step 5: By changing the motion and control parameters of the AC servo motor, conduct repeated experiments to obtain multiple experimental results, and compare them to find the optimal control parameters.

[0031] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0032] (1) This invention increases the nonlinearity and uncertainty of the system through a three-level coupling structure. Specifically, the rack achieves reciprocating linear motion under the drive of an AC servo motor, which in turn drives the motion of the first mechanism connected to the rack. The first structure is a compliant mechanism, which consists of a front connecting base, a rear connecting base, a side plate, and a flexible connecting plate. Since the rack is directly connected to the front connecting base of the first structure, and there are multiple flexible connecting plates inside the first structure, the transport states of each part of the first structure are inconsistent under the drive of the rack and pinion, and vibration begins to be transmitted. The second structure consists of a central frame, an outer plate, and a compliant connecting mechanism. The central frame of the second structure is directly connected to the rear connecting base of the first structure, so the vibration is transmitted to the central frame of the second structure, and then transmitted to the outer connecting plate through the compliant connecting mechanism. The outer connecting plate is directly connected to the third structure, so the vibration is rapidly coupled between the three-level mechanisms. The structures at the ends of the outer flexible beams are different to simulate the influence of the resistance brought by different shaped sails on the vibration.

[0033] This invention, through a reasonable mechanical structure design, fixes multiple flexible beams together to form a complete mechanism and couples them, effectively eliminating the influence of other uncontrollable factors on the vibration control effect.

[0034] (2) The present invention uses piezoelectric sensors and accelerometers to measure the strain information of flexible beams, which can quickly reflect the vibration information of multiple low-order modes of the robotic arm and has good measurement sensitivity.

[0035] (3) The present invention detects by measuring multiple positions of multi-mode. Compared with the prior art, its advantages are: simple system structure, easy to operate; multi-point detection, reducing experimental error, and improving measurement accuracy. Attached Figure Description

[0036] Figure 1 This is a structural schematic diagram of the vibration measurement and control device for the multi-integrated structure coupled flexible beam of the present invention.

[0037] Figure 2 yes Figure 1 The front view;

[0038] Figure 3 yes Figure 1 Top view;

[0039] Figure 4 yes Figure 1 The right view;

[0040] Figure 5 yes Figure 1 Schematic diagram of the electric motor and planetary reducer;

[0041] Figure 6 yes Figure 1 A schematic diagram of a gear rack;

[0042] Figure 7 yes Figure 1 A schematic diagram of the first structure in the middle;

[0043] Figure 8 yes Figure 1 A schematic diagram of the second structure in the middle;

[0044] Figure 9 yes Figure 1 A schematic diagram of the third structure in the middle;

[0045] Figure 10 This is the control flowchart of the present invention. Detailed Implementation

[0046] The present invention will be further described in detail below with reference to the embodiments, but the implementation of the present invention is not limited thereto.

[0047] like Figures 1-4 As shown, a vibration monitoring and control device for a multi-integrated structure coupled flexible beam includes the following:

[0048] The compliant structure section includes three compliant structures spaced at intervals: a first structure 6, a second structure 10, and a third structure 12. The first structure is connected to a gear rack 3 via bolts. The gear rack 3 is connected to an AC servo motor 1 via a planetary reducer 2. The ends of the second and first structures are fixed to the same slider, connecting them via this shared slider. The second and third structures are connected by a rigid rod. All three structures are bolted to the internal structure using countersunk screws.

[0049] like Figure 5 and Figure 6As shown, the transmission in this embodiment adopts a gear and rack mechanism. The gear and rack are driven by an AC servo motor and connected to the first structure. The AC servo motor and the slide rail 5 corresponding to the slider are fixedly connected to the experimental platform 4 by bolts. This connection ensures that the main vibration detection area of ​​the cable-connected flexible structure is perpendicular to the experimental platform. The experimental platform is constructed of aluminum profiles and corner pieces, and the experimental platform plate is installed by screws.

[0050] Furthermore, flexible cantilever beams 7, 8, and 9 are symmetrically arranged on both sides of the first structure 6, the second structure 10, and the third structure 12. Each structure has two flexible cantilever beams. The main structure of the six flexible cantilever beams is the same, but the end edge structure is different. The distance between adjacent flexible cantilever beams is equal.

[0051] like Figures 7-9 As shown, the first structure 6, the second structure 10 and the third structure 12 have different structures. The first structure and the third structure are integrated compliant structures, and the second structure is composed of two different compliant structures connected together.

[0052] Specifically:

[0053] The first structure 6 is a compliant structure, functionally divided into two compliant units. The first compliant unit consists of a front connecting base, two side plates, and a flexible connecting plate. The second compliant unit consists of two side plates, a rear connecting base, and a flexible connecting plate. The two side plates shared by the two units serve as energy transfer components. That is, the energy transmitted from the gear rack is stored in the first compliant unit and then released to the second compliant unit through the side plates, thus rapidly transmitting vibration between the first structures.

[0054] The second structure 10 is a compliant mechanism, consisting of a central frame, outer side panels, and a flexible connecting mechanism. Unlike the first structure, its flexible connecting mechanism is symmetrically arranged on both sides of the central frame. Each side's flexible connecting mechanism is composed of two compliant mechanisms connected in series, linked by bolts and nuts. The characteristics of the compliant mechanism are shown in the figure. The vibrational energy generated by the rear-mounted connecting base of the first mechanism is stored in the central frame of the second structure and released to the outer side panels via the symmetrically arranged compliant mechanisms.

[0055] The third structure consists of an inner square frame, an outer U-shaped structure, and symmetrically arranged compliant connecting structures. The vibrational energy from the outer panel of the second structure is transmitted to the inner square frame of the third structure via connecting rods, and then transmitted to the outer U-shaped structure via the symmetrically arranged compliant connecting structures.

[0056] In this embodiment, the introduction of a compliant connection structure leads to enhanced nonlinearity of the mechanism, and vibrations are rapidly coupled between the mechanisms, exhibiting a zero-sum characteristic.

[0057] further,

[0058] The two flexible cantilever beams 7 set on both sides of the first structure have arc-shaped ends. The arcs are connected to a rectangular thin plate, and the rectangular thin plate is at a 45-degree angle to the main body of the flexible cantilever beam.

[0059] Specifically: the arc at the end edge of the first structure is formed by taking the apex of the rectangle formed by the dimensions of the flexible cantilever beam foundation as the center, forming an ellipse with a major axis of 100mm and a minor axis of 50mm. The arc is a quarter-ellipse arc with a thickness of 2mm. The rectangular thin plate has dimensions of 100mm x 50mm and a thickness of 2mm.

[0060] The end edge of the flexible cantilever beam 8 in the second structure is connected to a long strip plate perpendicular to the main body of the flexible cantilever beam, forming a T-shape. The outer surface of the long strip plate is wavy, with each wave being a semicircle. The inner surface of the long strip plate is provided with two rectangular thin plates at a 45-degree angle to the long strip plate. When viewed from above, the two rectangular thin plates are symmetrical about the flexible cantilever beam.

[0061] Specifically: The second structural strip plate has dimensions of 400mm x 30mm (rectangular) and a thickness of 2mm. The outer wavy shape is formed by connecting arcs with a radius of 25mm, with rounded corners of 10mm radius at the junctions. The centers of all the arcs are located on the long side of the rectangle. The rectangular thin plate has dimensions of 100mm x 100mm and a thickness of 2mm.

[0062] The end edge of the flexible cantilever beam 9 in the third structure is set as a triangle, one side of which is connected to a rectangular thin plate, which forms a 45-degree angle with the main body of the flexible cantilever beam.

[0063] Specifically: the two right-angled sides of the third structure triangle are 50mm x 100mm, the thickness is 2mm, and the rectangular thin plate is 100mm x 50mm.

[0064] Vibration detection section:

[0065] The vibration detection section is used to detect the vibration signal of the flexible beams. It includes a piezoelectric sensor, an accelerometer, a charge amplifier 16, a terminal block 18, a motion control card 19, and a computer 20. The computer 20 is connected to the motion control card 19, and the motion control card 19 is connected to the terminal block 18. The piezoelectric sensor and the accelerometer are installed on six flexible cantilever beams of the three structures. The piezoelectric sensor detects the vibration of each flexible cantilever beam, and the accelerometer detects the vibration acceleration of each flexible cantilever beam. The signals from the piezoelectric sensor and the accelerometer are transmitted to the motion control card 19 through the charge amplifier 16 and the terminal block 18. The A / D module in the motion control card 19 converts the analog signal into a digital signal, which is then input to the computer 20.

[0066] further,

[0067] The piezoelectric sensors 13 are respectively installed on the center line of the width direction of the six flexible cantilever beams on the three structures, and are attached to both sides. Two sensors are attached to each flexible cantilever beam, for a total of 10 piezoelectric sensors.

[0068] Accelerometers are installed on the center lines of the width direction of six flexible cantilever beams on three structures, and are connected by washers and nuts. One accelerometer is installed on each flexible cantilever beam, for a total of six accelerometers.

[0069] Drive control section:

[0070] The drive control section is used to suppress the vibration of the flexible beam and frame based on the vibration signal from the detection section. The drive control section includes a piezoelectric actuator 14, a piezoelectric amplifier circuit, and a servo motor driver 17. The piezoelectric actuator 14 is installed on the flexible beam. The computer obtains the control quantities corresponding to the servo AC motor and the piezoelectric actuator based on the obtained vibration signal, and generates corresponding control signals. The control signals are output to the piezoelectric amplifier circuit and the servo motor driver through the motion control card and the terminal board, respectively, to further drive the motor and the piezoelectric actuator to control the vibration of the flexible cantilever beam.

[0071] The piezoelectric actuators 14 are mounted on the center lines of the width direction of the six flexible cantilever beams on the three structures, and are attached to both sides. Two piezoelectric actuators are attached to each flexible cantilever beam, for a total of 10 piezoelectric actuator sensors.

[0072] The servo motor driver 17 controls the movement of the AC motor, thereby driving the movement of the gear rack 3, converting the rotational motion into the linear motion of the entire device. When the servo AC motor 1 changes the direction of rotation, due to inertia, the vibration measurement and control device of the multi-integrated structure coupled flexible beam drives the vibration of the different flexible cantilever beams connected to its three structures, so as to achieve the purpose of vibration measurement and control.

[0073] By controlling different movements of the servo AC motor, the working state of the vibration measurement and control device under different conditions can be simulated and the generated vibration can be controlled.

[0074] Specifically, such as Figure 10 As shown, the method for vibration measurement and control of the multi-structure, multi-flexible beam coupled structure includes the following steps:

[0075] Step 1: Start and initialize each part of the device. The computer transmits data to the servo motor driver through the motion control card and terminal board, and finally drives the AC motor to produce the corresponding motion, causing the flexible beam to vibrate.

[0076] Step 2: Piezoelectric sensors and accelerometers detect the vibration and acceleration data of six flexible cantilever beams with different structures on three separate structures;

[0077] Step 3: The piezoelectric sensor and accelerometer convert vibration information into vibration signals. The vibration signals are amplified by the charge amplifier and then input to the terminal board. The terminal board is then input to the motion control card. The A / D module in the motion control card converts the analog signals into digital signals, which are finally input to the computer.

[0078] Step 4: The computer obtains the control quantities corresponding to the AC motor and piezoelectric actuator based on the obtained vibration signal, generates corresponding control signals, and outputs the control signals to the piezoelectric amplifier circuit and servo motor driver through the motion control card and terminal board respectively, further driving the AC motor and piezoelectric actuator to control the vibration of the flexible beam.

[0079] Step 5: By changing the motion and control parameters of the AC motor, conduct repeated experiments to obtain multiple experimental results, and compare them to find the optimal control parameters.

[0080] Figure 1 The dashed lines indicate the connections between the various devices, and the directional arrows indicate the direction of transmission of detection and control signal flows.

[0081] In this embodiment, the experimental table is assembled from two aluminum profiles with lengths of 540mm and 200mm respectively. The tabletop is a stainless steel plate of 1200mm×500mm×10mm, which is connected to the profiles by screws. Each connection of the profiles is fixed with angle iron.

[0082] Specifically, regarding the selection of the motor, the motor used in this device is a medium-inertia, medium-capacity motor of model HG-SR102(B)J from Mitsubishi Electric Corporation, with a rated power of 1000W and a maximum speed of 3000r / min.

[0083] Specifically, in this planetary gearbox setup, the motor is a NEUGART PLE040 model planetary gearbox with a reduction ratio of 1:50. It boasts high performance and, due to its low-friction-loss bearing design and optimized lubrication, is well-suited for high-standard experiments.

[0084] Specifically, in this embodiment, the material of the six flexible cantilever beams is epoxy resin sheet, with geometric dimensions of 500mm×50mm×2mm, elastic modulus of Ep=26.8Gpa, and density of ρ=1980kg / m3.

[0085] Specifically, in this embodiment, an MFC actuator and sensor are selected. This is a piezoelectric macrofiber composite material, composed of interdigitated electrodes, a polyimide film, structural epoxy resin, and rectangular piezoelectric fibers bonded together. The model used here is MFC2814-P1, with overall geometric dimensions of 38mm × 20mm × 0.6mm and actuation dimensions of 28mm × 14mm × 0.3mm. It is bonded in a sheet-like manner to the flexible cantilever beam, and is symmetrical about the centerline of the flexible cantilever beam's width direction. The elastic modulus of the MFC material is Em = 48.3 GPa, and d33 = 436 pm / V.

[0086] Specifically, in this embodiment, the accelerometer selected is the HBK Bruel & Kjaer vibration sensor model 4370 piezoelectric charge accelerometer, which is used for vibration measurement, has a nominal sensitivity of 10 pc / ms^(-2), and a measurement frequency range of 0.1 to 4800 Hz.

[0087] Specifically, the sliders and guide rails are THK's LM wide guide rails with ball bearing grease rings, model SHW21CA3SS+780L. All three sliders are SHW model, size 21, type CA; they have flanges, a rail length of 780mm, and use AFF (lithium-based) grease for clean environments. The slider bolts are M5, the guide rail bolts are M4, and the total weight is 2.98kg.

[0088] Specifically, the charge amplifier selected is the YE5850 charge amplifier from Jiangsu Lianeng Electronics Co., Ltd.; the piezoelectric amplifier circuit uses the APEX PA241DW piezoelectric amplifier, which has a magnification factor of 52 times and can amplify 5V to +5V to 260V to +260V.

[0089] Specifically, the motion control card selected is the GUC 800TPV M23 L2 F8G model from Googol Technology, which has 8 controllable axes and can provide analog input and output in the range of 10V to +10V; the selected computer CPU is Pentium G620 2.6GHz, with 4G of memory and a PCI interface on the motherboard, which can be used to install the motion control card.

[0090] The above embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the embodiments described above. Any changes, modifications, substitutions, combinations, or simplifications made without departing from the spirit and principle of the present invention shall be considered equivalent substitutions and shall be included within the protection scope of the present invention.

Claims

1. A vibration monitoring and control device for a multi-integrated structurally coupled flexible beam, characterized in that, include: The compliant structure includes a first structure, a second structure, and a third structure. The first structure and the second structure are fixed on the same slider, and the guide rail corresponding to the slider is fixed on the experimental platform. The second structure and the third structure are connected by a rigid rod. The slider is connected to an AC servo motor. The first structure is connected to the AC servo motor through a gear and rack, which converts the rotational motion of the AC servo motor into the linear motion of the compliant structure. Flexible cantilever beams are symmetrically arranged on both sides of the first, second, and third structures. The vibration detection section is used to detect the vibration signals of the flexible cantilever beam; The drive control section is used to suppress the vibration of the flexible cantilever beam based on the vibration signal from the vibration detection section. The first structure, the second structure, and the third structure are different. The first structure and the third structure are an integral compliant structure, while the second structure is composed of two different compliant structures connected together. The first, second, and third structures each have two flexible cantilever beams symmetrically arranged on both sides, and the ends of the flexible cantilever beams in the three structures are different. The end edge of the flexible cantilever beam in the first structure is arc-shaped, and the arc is connected to a rectangular thin plate. The rectangular thin plate is at a 45-degree angle to the main body of the flexible cantilever beam. The end edge of the flexible cantilever beam in the second structure is connected to a long strip plate perpendicular to the main body of the flexible cantilever beam, forming a T-shape. The outer surface of the long strip plate is wavy, with each wave being a semicircle. The inner surface of the long strip plate is provided with two rectangular thin plates at a 45-degree angle to the long strip plate. When viewed from above, the two rectangular thin plates are symmetrical about the flexible cantilever beam. The end edge of the flexible cantilever beam in the third structure is set as a triangle, one side of which is connected to a rectangular thin plate, and the rectangular thin plate forms a 45-degree angle with the main body of the flexible cantilever beam. The first structure is an integrated compliant structure, which is functionally divided into two compliant units. The first compliant unit consists of a front connecting base, two side plates and a flexible connecting plate. The second compliant unit consists of two side plates, a rear connecting base and a flexible connecting plate. The two side plates shared by the two units play the role of energy transmission. The energy transmitted by the gear and rack is stored in the first compliant unit and then released to the second compliant unit through the side plates. Vibration is then rapidly transmitted between the first structures. The second structure includes a central frame, outer side panels, and a flexible connection structure. The flexible connection structure is symmetrically arranged on both sides of the central frame, and the flexible connection structure on each side is composed of two flexible structures connected in series. The third structure includes an inner square frame, an outer U-shaped structure, and symmetrically arranged compliant connecting structures. The vibration energy brought by the outer plate of the second structure is transmitted to the inner square frame of the third structure through the connecting rod, and the vibration energy is then transmitted to the outer U-shaped structure through the symmetrically arranged compliant connecting structures.

2. The vibration measurement and control device according to claim 1, characterized in that, The vibration detection section includes piezoelectric sensors and acceleration sensors. The piezoelectric sensors are installed on the center line of the width direction of the six flexible cantilever beams and are attached to both sides, with two sensors attached to each flexible cantilever beam. The acceleration sensors are installed on the centerline of the width direction of the six flexible cantilever beams and are connected by washers and nuts, with one sensor installed on each flexible cantilever beam.

3. The vibration measurement and control device according to claim 1, characterized in that, The drive control section includes a piezoelectric actuator, a piezoelectric amplifier circuit, and a servo motor driver. The piezoelectric actuator is mounted on the flexible cantilever beam. The computer obtains the control quantities corresponding to the AC servo motor and the piezoelectric actuator based on the obtained vibration signal, and generates corresponding control signals. The control signals are output to the piezoelectric amplifier circuit and the servo motor driver through the motion control card and terminal board, respectively, to further drive the AC servo motor and the piezoelectric actuator and control the vibration of the flexible cantilever beam.

4. The vibration measurement and control device according to claim 3, characterized in that, The piezoelectric actuator is mounted on the centerline of the width direction of the flexible cantilever beam and is attached to both sides, with two pieces attached to each flexible cantilever beam.

5. A control method based on the vibration monitoring and control device according to any one of claims 1-4, characterized in that, include: Step 1: Start and initialize each part of the device. The computer's control signal is transmitted to the servo motor driver through the motion control card and terminal board, and finally drives the AC servo motor to produce the corresponding motion, causing the flexible beam to vibrate. Step 2: Piezoelectric sensors and accelerometers detect the vibration of the six flexible cantilever beams on the three structures and the acceleration data during vibration; Step 3: The piezoelectric sensor and accelerometer convert vibration information into vibration signals. The vibration signals are amplified by the charge amplifier and then input to the terminal board. The terminal board is then input to the motion control card. The A / D module in the motion control card converts the analog signals into digital signals, which are finally input to the computer. Step 4: The computer obtains the control quantities corresponding to the AC servo motor and piezoelectric actuator based on the obtained vibration signal, generates corresponding control signals, and outputs the control signals to the piezoelectric amplifier circuit and servo motor driver through the motion control card and terminal board respectively, further driving the AC servo motor and piezoelectric actuator to control the vibration of the flexible beam; Step 5: By changing the motion and control parameters of the AC servo motor, conduct repeated experiments to obtain multiple experimental results, and compare them to find the optimal control parameters.

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