Optical-ccd-based micro-groove milling-enhanced error compensation apparatus and method

Abstract

The application discloses a kind of based on optical CCD's micro slot milling-strengthening error compensation device and method, including adapter plate, workpiece special fixture, CCD special device, processing control system, dynamometer and online compensation calculation system;CCD special device is used to install CCD camera and make the lens of CCD camera fixed above workpiece;Online compensation calculation system compares the micro slot width on image with scale, obtains the real width when micro slot is not compensated, calculates the deformation of workpiece and micro slot width compensation amount under different cutting force curve working conditions when micro slot is processed, and reserves extrusion deformation for sidewall ultrasonic strengthening.The application simultaneously considers the difficulty of disassembly and size accuracy demand, carries out in-situ measurement and compensation to micro slot ultrasonic milling-strengthening process, effectively improves production efficiency and machining precision.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of microfabrication technology, and particularly relates to a micro-groove milling-strengthening error compensation device and method based on an optical CCD. BACKGROUND

[0002] Microfabrication technology is a frontier and cross-cutting emerging discipline field that has gradually developed since the 1970s. Microfabrication technology reduces the size scale of the entire manufacturing system and parts, can save energy and manufacturing space and resources, conforms to the energy-saving and environment-friendly production mode, is one of the development directions of green manufacturing, and is an important symbol for measuring the manufacturing technology level of a country. The microfabricated micro-sized parts have a size range of 0.1-10 mm and a geometric feature size range of 0.01-1 mm. Ultrasonic strengthening as a new surface modification and life extension technology relies on a certain form of rolling / extrusion tool head to apply specific periodic and frequent pressure to the surface of parts, promote plastic deformation of the metal surface and form a nanocrystalline layer, reduce the micro-unevenness of the workpiece surface, and improve the surface residual stress and performance of the workpiece material.

[0003] In ultrasonic milling-strengthening of titanium alloy micro-grooves, the width of the micro-groove can easily lead to a final size that does not meet the use requirements due to the elastic deformation of the material. Generally, a series of micro-grooves are first machined, then the shape, position and size parameters of the workpiece are measured off-machine, and then the error compensation strategy under the actual machining parameters is determined through analysis and calculation, especially for the milling-strengthening process chain of metal materials. This process has the following problems: for the machining of a workpiece material such as titanium alloy, stainless steel, etc., the required compensation amount cannot be determined in a timely manner, the operation steps are relatively cumbersome, the efficiency is low, and the workpiece position can be offset during the workpiece position resetting process, which is not conducive to the efficient and high-precision machining of the workpiece with multiple structures. Even if someone proposes to use a CCD camera for shooting, the machine tool and the CCD camera do not have a matching clamp, which leads to poor picture clarity and poor accuracy when using the CCD camera for measurement, and the measurement position is difficult to ensure consistency. How to balance the disassembly and assembly difficulty of the structure and the machining and detection accuracy requirement, and establish a micro-groove efficient and precise machining based on in-situ detection error compensation is a technical problem that needs to be solved at present. SUMMARY

[0004] Technical problems solved: The application provides a micro-groove milling-strengthening error compensation device and method based on optical CCD, which defines the positions of the workpiece and the CCD camera by using unique workpiece special fixture and CCD special fixture, and takes into account the difficulty of disassembly, processing efficiency and detection accuracy requirements; in addition, in the ultrasonic milling-strengthening process chain, the CCD camera is used to vertically shoot and detect the micro-groove on the workpiece, the corresponding relationship between the workpiece elastic deformation and the processing force is obtained by combining image rapid analysis, the processing width is efficiently compensated online, and the production efficiency and processing precision are effectively improved.

[0005] Technical scheme

[0006] A micro-groove milling-strengthening error compensation device based on optical CCD, the micro-groove ultrasonic milling-strengthening process chain online compensation device comprises an adapter plate, a workpiece special fixture, a CCD special mounting device, a processing control system, a dynamometer and an online compensation calculation system.

[0007] The workpiece special fixture is fixed on the upper surface of the adapter plate, the workpiece is installed on the workpiece special fixture, the processing control system controls the cutter according to the external control instruction, moves the cutter close to or away from the workpiece, and processes a plurality of micro-grooves on the workpiece when moving close to the workpiece;

[0008] The dynamometer is used to monitor the cutting force and strengthening force in the workpiece processing process in real time and collect data;

[0009] The CCD special mounting device is detachably mounted on the upper surface of the adapter plate, and is used to clamp the CCD camera and fix the lens of the CCD camera directly above the workpiece;

[0010] The online compensation calculation system receives a plurality of micro-groove images shot by the CCD camera and the cutting force and extrusion force collected by the dynamometer, compares the micro-groove width on the image with the scale, obtains the true width of the micro-groove without compensation, simultaneously fits the ultrasonic milling force and extrusion strengthening force curve, calculates the average value of the force, and establishes the corresponding relationship between the force in the processing process and the actual size of the micro-groove; combined with the input micro-groove width standard value, the workpiece deformation amount under different force curve conditions during micro-groove processing is calculated, and the micro-groove width compensation amount under different ultrasonic milling force and side wall strengthening force curve conditions is calculated according to the workpiece deformation amount:

[0011] The processing control system adjusts the workpiece processing program combined with the micro-groove width compensation amount to compensate the error of the micro-groove.

[0012] Further, the workpiece special fixture comprises a base, a first screw, a gasket and a top cover.

[0013] The first through hole is arranged on the to-be-processed area in the middle of the adapter plate, the first screw passes through the base and the first through hole in sequence to fix the base on the adapter plate, the diameter of the base is larger than the diameter of the workpiece, and the workpiece is supported on the upper surface of the base; the gasket and the top cover are sequentially covered above the workpiece, the through hole in the center of the gasket and the top cover has a diameter larger than the diameter of the workpiece processing area and smaller than the maximum diameter of the workpiece, so that the workpiece is uniformly fixed on the base under stress.

[0014] Further, the CCD special fixture includes three bottom columns, a triangular lifting platform, an elastic clamping ring and three hand screws; the three bottom columns are in the shape of a cylinder and are vertically installed on the upper surface of the adapter plate and arranged around the workpiece special fixture; the three top ends of the triangular lifting platform are each fixed with a sleeve, the extension direction of the sleeve is perpendicular to the cross section of the triangular lifting platform, and the inner diameter of the sleeve matches the outer diameter (for example, Φ10 mm) of the bottom column, so that when the three sleeves are respectively sleeved on the three bottom columns, the triangular lifting platform is limited to be parallel to the adapter plate; the three hand screws are respectively installed on the through holes in the side walls of the three sleeves and used for fixing the triangular lifting platform on the bottom column; the elastic clamping ring is fixed in the hollow part inside the triangular lifting platform and used for fixing and installing the CCD camera and ensuring that the lens of the CCD camera is directly above the workpiece.

[0015] Further, the elastic clamping ring includes a fixed part and a clamping part; the fixed part is in the shape of a groove, the groove width is equivalent to the thickness of the triangular lifting platform, so that the fixed part can be clamped on the outside of the triangular lifting platform; the two side walls of the groove are provided with third through holes, the triangular lifting platform is provided with second through holes, and the second screw passes through the third through holes and the second through holes in sequence to horizontally fix the elastic clamping ring on the triangular lifting platform.

[0016] Further, the two ends of the clamping part away from the fixed part are respectively provided with an extension part, and the extension part is provided with a third through hole; the screw is connected with the hand nut through the third through hole, and the hand nut rotates under the action of external force to adjust the clamping force applied by the clamping part on the CCD camera.

[0017] Further, a rubber gasket is installed on the inside of the clamping part.

[0018] Further, the online compensation calculation system includes a workpiece deformation calculation component and a micro groove width compensation calculation component;

[0019] The workpiece deformation calculation component calculates the workpiece deformation rate ε of the micro groove during processing in combination with the input micro groove standard value L and the actual width L1 of the micro groove without compensation:

[0020]

[0021] The micro-groove width compensation amount calculation component calculates the micro-groove width compensation amount AL in combination with the input micro-groove width standard value L and the workpiece deformation rate epsilon during micro-groove processing:

[0022]

[0023] The application further discloses a micro-groove milling-strengthening error compensation method based on an optical CCD, which is executed based on the micro-groove milling-strengthening error compensation device as described above; the micro-groove milling-strengthening error compensation method comprises the following steps:

[0024] S1, fixing the workpiece special fixture on the upper surface of the adapter plate;

[0025] S2, installing the workpiece to be processed on the workpiece special fixture; controlling the cutter to contact the workpiece and process a plurality of micro-grooves on the workpiece; during the processing, the milling force and the strengthening process force are monitored and signal collected;

[0026] S3, moving away from the cutter, installing the CCD special device on the upper surface of the adapter plate, the CCD special device comprising three base columns, a triangular lifting platform, an elastic clamping ring and three hand screws, each of the three top ends of the triangular lifting platform is fixed with a sleeve, and the extension direction of the sleeve is perpendicular to the cross section of the triangular lifting platform; the installation process of the CCD special device comprises the following sub-steps:

[0027] S31, vertically installing the three base columns on the upper surface of the adapter plate and arranging them around the workpiece special fixture;

[0028] S32, fixing the elastic clamping ring in the hollow part of the triangular lifting platform and clamping the selected CCD camera by using the elastic clamping ring, so that the lens of the CCD camera faces downward;

[0029] S33, respectively sleeving the three sleeves on the three base columns, adjusting the height of the triangular lifting platform to the preset position, rotating the hand screws belonging to the three sleeves, adjusting the clamping force and friction force of the sleeves on the base columns, and reducing the clamping force of the sleeves on the base columns based on the fixation of the triangular lifting platform on the base columns;

[0030] S4, adjusting the focal length of the CCD camera, and shooting the micro-groove morphology on the workpiece by using the CCD camera; comparing and measuring the micro-groove width on the CCD camera image with the scale to obtain the real width of the micro-groove without compensation;

[0031] S5, filtering and processing the collected milling force and strengthening force and compensating for the zero point drift, fitting to obtain the cutting force and strengthening force curves, and respectively calculating the average values of the cutting force and the strengthening force;

[0032] S6, the workpiece deformation amount under the different milling force and strengthening force curve working conditions of the micro-groove machining is calculated by combining the input micro-groove width standard value, and the micro-groove width compensation amount under the different milling force and strengthening force curve working conditions is calculated according to the workpiece deformation rate;

[0033] S7, the workpiece machining program is adjusted in combination with the micro-groove width compensation amount, and the workpiece width is re-milled and compensated for processing;

[0034] S8, the CCD special fixture is re-installed, and whether the compensated micro-groove width meets the processing precision and allowance requirements is measured, and steps S6-S8 are repeated until the size precision and allowance meet the requirements;

[0035] S9, the automatic tool changing process of the machine tool is adopted, the corresponding ultrasonic vibration extrusion tool is selected for the processed titanium alloy micro-groove, the micro-groove width compensation amount under the different strengthening force curve working conditions and the CCD measurement result are calculated according to the workpiece deformation rate, the ultrasonic strengthening process parameters are selected, and the micro-groove side wall is extrusion strengthened;

[0036] S10, the CCD special fixture is re-installed, and whether the strengthened micro-groove width meets the processing precision requirement is measured, and steps S9-S10 are repeated until the size precision meets the requirements.

[0037] Advantages:

[0038] Firstly, the micro-groove milling-strengthening error compensation device and method based on the optical CCD can limit the positions of the workpiece and the CCD camera by adopting the unique workpiece special fixture and the CCD special fixture, and the difficulty of disassembly and assembly and the detection precision requirement are considered.

[0039] Secondly, the micro-groove milling-strengthening error compensation device and method based on the optical CCD can quickly analyze the workpiece strain amount, efficiently compensate for the processing width online, and effectively improve the production efficiency and the processing precision. BRIEF DESCRIPTION OF DRAWINGS

[0040] Figure 1 It is a structure diagram of the micro-groove milling-strengthening error compensation device based on the optical CCD of the embodiment of the application;

[0041] Figure 2 It is a structure diagram of the micro-groove milling-strengthening error compensation device based on the optical CCD of the embodiment of the application;

[0042] Figure 3 It is a structure diagram of the micro-groove milling-strengthening error compensation device based on the optical CCD of the embodiment of the application;

[0043] Figure 4 It is a structure diagram of the micro-groove milling-strengthening error compensation device based on the optical CCD of the embodiment of the application;

[0044] Figure 5The schematic diagram of the elastic clamping ring structure of the embodiment of the present application. DETAILED DESCRIPTION

[0045] The following examples can make the professional technical personnel more fully understand the present application, but do not limit the present application in any way.

[0046] Reference Figure 1 The embodiment of the present application discloses a micro-groove milling-strengthening error compensation device based on optical CCD, which comprises an adapter plate, a workpiece special fixture, a CCD special fixture, a machining control system, a dynamometer and an online compensation calculation system.

[0047] The workpiece special fixture is fixed on the upper surface of the adapter plate, the workpiece is installed on the workpiece special fixture, the machining control system controls the tool according to the external control instruction, moves the tool close to or away from the workpiece, and mills a plurality of micro-grooves on the workpiece when moving close to the workpiece;

[0048] The dynamometer is used for monitoring the cutting force in the workpiece machining process in real time and collecting data;

[0049] The CCD special mounting device is detachably mounted on the upper surface of the adapter plate, used for clamping the CCD camera and fixing the lens of the CCD camera directly above the workpiece;

[0050] The online compensation calculation system receives a plurality of micro-groove images shot by the CCD camera and the cutting force and extrusion force of the tool collected by the dynamometer, compares the micro-groove width on the image with the scale, obtains the true width of the micro-groove without compensation, simultaneously fits the ultrasonic milling force and extrusion strengthening force curve, calculates the average value of the force, establishes the corresponding relationship between the force in the machining process and the actual size of the micro-groove, and then combines the input micro-groove width standard value to calculate the workpiece deformation amount under different force curve working conditions of the micro-groove machining, and calculates the micro-groove width compensation amount under different ultrasonic milling force and side wall strengthening force curve working conditions according to the workpiece deformation amount;

[0051] The machining control system adjusts the workpiece machining program in combination with the micro-groove width compensation amount, and performs error compensation machining on the micro-groove.

[0052] (I) Adapter plate

[0053] When the micro-groove and the micro-groove side wall are milled, a dynamometer needs to be used to detect the force of the tool during machining and strengthening, and the dynamometer needs to be connected in advance. Therefore, the embodiment prepares a dynamometer suitable for milling and a workpiece adapter plate for connecting the dynamometer and various structural fixture clamps, especially for the purpose of stably fixing the workpiece and the CCD camera. Figure 2 The structure schematic diagram of the adapter plate used in the embodiment of the present application.

[0054] (ii) Workpiece-specific fixture

[0055] As shown in Figure 3 , the workpiece-specific fixture includes a base, a first screw, a gasket, and a top cover. As shown in Figure 2 , a plurality of first through holes are provided on the middle processing area of the adapter plate. The first screw passes through the base and the first through hole in sequence to fix the base on the adapter plate, and the diameter of the base is larger than the diameter of the workpiece, and the workpiece is supported on the upper surface of the base; the gasket and the top cover are sequentially covered above the workpiece, and the through hole in the center of the gasket and the top cover has a diameter larger than the diameter of the workpiece processing area and smaller than the maximum diameter of the workpiece, so that the workpiece is uniformly and stably fixed on the base. The purpose of the workpiece-specific fixture is to uniformly and stably fix the workpiece on the base, and the center hole diameter of the gasket and the top cover in this embodiment is slightly smaller than the diameter of the workpiece, which can meet the requirements of processing accuracy, and at the same time will not affect the tool path during normal processing.

[0056] (iii) CCD-specific fixture

[0057] As shown in Figure 4 , the CCD-specific fixture includes three base columns, a triangular lifting platform, an elastic clamping ring, and three hand screws; the three base columns are all cylindrical and are vertically installed on the upper surface of the adapter plate and are arranged around the workpiece-specific fixture; the three top ends of the triangular lifting platform are each fixed with a sleeve, the extension direction of the sleeve is perpendicular to the cross section of the triangular lifting platform, and the inner diameter of the sleeve matches the outer diameter of the base column (for example, Φ10mm), so that when the three sleeves are respectively sleeved on the three base columns, the triangular lifting platform is limited to be parallel to the adapter plate; three hand screws are respectively installed on the through holes in the side walls of the three sleeves, which are used to fix the triangular lifting platform on the base column; the elastic clamping ring is fixed in the hollow part inside the triangular lifting platform, which is used to clamp the CCD camera and fix the lens of the CCD camera directly above the workpiece.

[0058] As shown in Figure 5 , the elastic clamping ring includes a fixed part and a clamping part; the fixed part is in the form of a groove, and the groove width is comparable to the thickness of the triangular lifting platform, so that the fixed part can be connected to the outside of the triangular lifting platform; third through holes are provided on the two side walls of the groove, and second through holes are provided on the triangular lifting platform, and a second screw passes through the third through hole and the second through hole in sequence to horizontally fix the elastic clamping ring on the triangular lifting platform.

[0059] The two ends of the clamping part away from the fixed part are respectively provided with an extension part, and a third through hole is arranged on the extension part; a screw passes through the third through hole and is connected with a hand nut, and the hand nut rotates under the action of external force to adjust the clamping force of the clamping part on the CCD camera. Before using the CCD camera to take a picture, first use the internal hexagonal screw to fix the three bottom columns on the upper surface of the adapter plate, then connect the three sleeves of the triangular lifting platform with the bottom columns, and then use the hand screw to fix. Because the sliding of the sleeve on the bottom column is satisfied by gap fit, the flatness accuracy of the lifting platform is high, so it is required that when fixing the lifting platform by using the hand screw, only the lifting platform is tightened to stop sliding, and over-tightening will damage the flatness accuracy of the lifting platform, resulting in that the enlarged image taken by the CCD camera is not in a vertical relationship, thereby causing calculation error in the subsequent process.

[0060] Generally, the elastic clamping ring is fixed on the triangular lifting platform and is a part that is not frequently disassembled. If different CCD cameras are used for shooting, the matching elastic clamping ring can be conveniently and quickly replaced. The elastic clamping ring is provided with a screw and a hand nut on the front side to ensure the clamping degree of the elastic clamping ring. At the same time, it is also considered that when the elastic clamping ring clamps the CCD camera, the CCD camera shell may be damaged due to excessive clamping force. Therefore, a rubber ring is added between the CCD camera and the elastic clamping ring, which not only protects the CCD camera from damage, but also eliminates the gap between the elastic clamping ring and the CCD camera due to the excellent elastic properties of the rubber ring, so that the fixing is more stable.

[0061] After the measurement is completed, first loosen the nut that fixes the CCD camera, take off the CCD camera from the elastic clamping ring, then unscrew the screw that fixes the triangular lifting platform, slowly lift the triangular lifting platform out of the bottom column, and finally use a wrench to sequentially disassemble the screws that fix the triangular lifting platform, so as to complete the disassembly work of the CCD special fixture, which does not affect the position of the workpiece and the processing flow, and effectively ensures the consistency of the measurement environment next time.

[0062] (Four) Online compensation calculation system

[0063] The online compensation calculation system comprises a workpiece deformation amount calculation component and a micro-groove width compensation amount calculation component.

[0064] The workpiece strain amount calculation component calculates the workpiece strain amount ε during micro-groove processing and strengthening in combination with the input micro-groove width standard value L and the true width L1 of the micro-groove without compensation:

[0065]

[0066] The micro-groove width compensation amount calculation component calculates the micro-groove width compensation amount ΔL in combination with the input micro-groove width standard value L and the workpiece strain amount ε during micro-groove processing:

[0067]

[0068] The online compensation calculation system compares the micro groove width on the image with the scale to obtain the true width of the micro groove without compensation, calculates the workpiece deformation and micro groove width compensation under different cutting force curve working conditions during micro groove processing, and reserves the extrusion deformation amount for the side wall ultrasonic strengthening; after the milling is completed, the micro groove special extrusion strengthening tool is automatically replaced by the machine tool tool magazine, accurate tool setting is carried out based on the optical CCD, and the micro groove side wall strengthening is implemented.

[0069] Since the micro machining involved in the application relates to the field of milling-strengthening process precision machining, the precision requirement is relatively strict, and at the same time, since the adapter plate and the special fixture of the workpiece are connected by screws, during pre-tightening, due to the existence of human error, the precision will be inevitably affected, and the error cannot be eliminated. Therefore, only by reducing other mechanical errors can the final requirement be met. Therefore, the application also discloses a micro groove milling-strengthening error compensation method based on an optical CCD, which is executed based on the micro groove milling-strengthening error compensation device as described above; the micro groove milling-strengthening error compensation method based on the optical CCD comprises the following steps:

[0070] S1, fixing the special fixture of the workpiece on the upper surface of the adapter plate;

[0071] S2, installing the workpiece to be processed on the special fixture of the workpiece; controlling the cutter to contact the workpiece, and processing a plurality of micro grooves on the workpiece; during the processing, the milling force and the strengthening process force are monitored and signal collected;

[0072] S3, moving away from the cutter, installing the CCD special device on the upper surface of the adapter plate, the CCD special device comprising three bottom columns, a triangular lifting platform, an elastic clamping ring and three hand screws, the three top ends of the triangular lifting platform are respectively fixed with a sleeve, and the extension direction of the sleeve is perpendicular to the cross section of the triangular lifting platform; the installation process of the CCD special device comprises the following sub-steps:

[0073] S31, vertically installing the three bottom columns on the upper surface of the adapter plate and arranging them around the special fixture of the workpiece;

[0074] S32, fixing the elastic clamping ring in the hollow part of the triangular lifting platform, and clamping the selected CCD camera by the elastic clamping ring, so that the lens of the CCD camera faces downward;

[0075] S33, three sleeves are respectively sleeved on three columns, the height of the triangular lifting platform is adjusted to the preset position, the hand screws to which the three sleeves belong are rotated, the clamping force and friction force of the sleeves on the columns are adjusted, and the triangular lifting platform is fixed on the columns to reduce the clamping force of the sleeves on the columns;

[0076] S4, the focal length of the CCD camera is adjusted, the micro groove morphology on the workpiece is photographed by using the CCD camera, and the micro groove width on the CCD camera image is measured and compared with the scale to obtain the true width of the micro groove without compensation;

[0077] S5, the collected milling force and strengthening force are filtered and zero-point drift compensated, the cutting force and strengthening force curves are fitted, and the average values of the cutting force and the strengthening force are calculated respectively;

[0078] S6, the micro groove width standard value is inputted, the workpiece deformation amount under different milling force and strengthening force curve conditions during micro groove machining is calculated, and the micro groove width compensation amount under different milling force and strengthening force curve conditions is calculated according to the workpiece deformation rate;

[0079] S7, the CCD special fixture is removed, the workpiece machining program is adjusted combined with the micro groove width compensation amount, and the workpiece width is re-milled and compensated for machining;

[0080] S8, the CCD special fixture is re-installed, whether the compensated micro groove width meets the machining precision and allowance requirements is measured, and steps S6-S8 are repeated until the size precision and allowance meet the requirements;

[0081] S9, an automatic tool changing process of the machine tool is adopted, the corresponding ultrasonic vibration extrusion tool is selected for the machined titanium alloy micro groove, the micro groove width compensation amount under different strengthening force curve conditions and the CCD measurement result are calculated according to the workpiece deformation rate, the ultrasonic strengthening process parameters are selected, and the micro groove side wall is extrusion strengthened;

[0082] S10, the CCD special fixture is re-installed, whether the strengthened micro groove width meets the machining precision requirement is measured, and steps S9-S10 are repeated until the size precision meets the requirements.

[0083] The above is only the preferred embodiment of the present application, the protection scope of the present application is not limited to the above-mentioned embodiments, and any technical scheme falling within the concept of the present application belongs to the protection scope of the present application. It should be noted that, for ordinary skilled persons in the art, some improvements and decorations without departing from the principle of the present application should be regarded as the protection scope of the present application.

Claims

1. A microgroove milling-strengthening error compensation device based on optical CCD, characterized in that, The microgroove milling-strengthening error compensation device includes an adapter plate, a workpiece-specific fixture, a CCD-specific mounting device, a machining control system, a force measuring instrument, and an online compensation calculation system. The workpiece-specific fixture is fixed on the upper surface of the adapter plate. The workpiece is mounted on the workpiece-specific fixture. The machining control system controls the cutting tool according to external control commands, causing the cutting tool to move closer to or away from the workpiece, and machining multiple micro-grooves on the workpiece when it moves closer. The force measuring instrument is used to monitor the cutting force during the workpiece machining process and collect data in real time; The dedicated CCD mounting device is detachably mounted on the upper surface of the adapter plate and is used to clamp the CCD camera and fix the lens of the CCD camera directly above the workpiece. The online compensation calculation system receives multiple microgroove images captured by a CCD camera and cutting and extrusion forces collected by a force measuring instrument. It compares the microgroove width in the images with a scale to obtain the true width of the microgroove before compensation. Simultaneously, it fits the ultrasonic milling force and extrusion strengthening force curves, calculates the average force, and establishes the correspondence between the processing force and the actual size of the microgroove. Then, it calculates the workpiece deformation under different force curve conditions during microgroove processing by combining the input microgroove width standard value. Based on the workpiece deformation, it calculates the microgroove width compensation amount under different ultrasonic milling force and sidewall strengthening force curve conditions. The machining control system adjusts the workpiece machining program in conjunction with the microgroove width compensation amount to perform error compensation machining on the microgroove; The workpiece fixture includes a base, a first screw, a washer, and a top cover; The adapter plate has several first through holes in the processing area in the middle. The first screw passes through the base and the first through holes in sequence to fix the base on the adapter plate. The diameter of the base is larger than the diameter of the workpiece, and the workpiece is supported on the upper surface of the base. The gasket and the top cover cover the workpiece in sequence. The diameter of the hole in the center of the gasket and the top cover is larger than the diameter of the workpiece processing area and smaller than the diameter of the workpiece itself, so that the workpiece is evenly fixed on the base. The CCD-specific fixture includes three base columns, a triangular lifting platform, elastic clamps, and three hand-tightening screws. The three base columns are all cylindrical, vertically mounted on the upper surface of the adapter plate, and arranged around the workpiece-specific fixture. Each of the three top ends of the triangular lifting platform is fixed with a sleeve, the extension direction of which is perpendicular to the cross-section of the triangular lifting platform. The inner diameter of the sleeve matches the outer diameter of the base column, ensuring that the triangular lifting platform is parallel to the adapter plate when the three sleeves are respectively fitted onto the three base columns. The three hand-tightening screws are respectively installed in through holes on the side walls of the three sleeves to fix the triangular lifting platform to the base columns. The elastic clamps are fixed in the internal hollow area of ​​the triangular lifting platform to install and fix the CCD camera, ensuring that the CCD camera lens is directly above the workpiece. The elastic clamping ring includes a fixing part and a clamping part; the fixing part is groove-shaped, and the width of the groove is equivalent to the thickness of the triangular lifting platform, so that the fixing part can be snapped onto the outside of the triangular lifting platform; a third through hole is provided on the two side walls of the groove, and a second through hole is provided on the triangular lifting platform; a second screw passes through the third through hole and the second through hole in sequence to fix the elastic clamping ring horizontally on the triangular lifting platform. The online compensation calculation system includes a workpiece deformation calculation component and a microgroove width compensation calculation component; The workpiece deformation calculation component calculates the workpiece deformation rate ε during microgroove processing by combining the input standard value L of the microgroove width and the actual width L1 of the microgroove before compensation: The microgroove width compensation calculation component calculates the microgroove width compensation amount Δl by combining the input standard value L of the microgroove width and the workpiece deformation rate ε during microgroove processing:

2. The microgroove milling-strengthening error compensation device based on optical CCD according to claim 1, characterized in that, The clamping part is provided with an extension at each of its two ends away from the fixing part, and a third through hole is provided on the extension. The screw passes through the third through hole and is connected to the hand-tightening nut. The hand-tightening nut rotates under the action of external force to adjust the clamping force applied by the clamping part to the CCD camera.

3. The microgroove milling-strengthening error compensation device based on optical CCD according to claim 1, characterized in that, A rubber gasket is installed on the inner side of the clamping part.

4. A microgroove milling-strengthening error compensation method based on optical CCD, characterized in that, The microgroove milling-strengthening error compensation method is performed based on the microgroove milling-strengthening error compensation device as described in any one of claims 1-3; the microgroove milling-strengthening error compensation method includes the following steps: S1, Fix the workpiece special fixture on the surface of the adapter plate; S2, the workpiece to be processed is mounted on a special workpiece fixture; the cutting tool is controlled to contact the workpiece and multiple microgrooves are machined on the workpiece; during the processing, the milling force and the strengthening process force are monitored and signals are acquired. S3, Remove the cutting tool and install the CCD-specific device on the upper surface of the adapter plate. The CCD-specific device includes three base posts, a triangular lifting platform, an elastic clamping ring, and three hand-tightening screws. Each of the three top ends of the triangular lifting platform is fixed with a sleeve, and the extension direction of the sleeve is perpendicular to the cross-section of the triangular lifting platform. The installation process of the CCD-specific device includes the following sub-steps: S31, three bottom columns are vertically mounted on the upper surface of the adapter plate and arranged around the workpiece special fixture; S32, fix the elastic clamping ring in the hollow part inside the triangular lifting platform, and use the elastic clamping ring to hold the selected CCD camera so that the lens of the CCD camera faces directly downward. S33, place the three sleeves on the three base columns respectively, adjust the height of the triangular lifting platform to the preset position, rotate the hand screws of the three sleeves to adjust the clamping force and friction of the sleeves on the base columns, so that the triangular lifting platform is fixed on the base columns and the clamping force of the sleeves on the base columns is reduced. S4, adjust the CCD camera focal length, and use the CCD camera to photograph the microgroove morphology on the workpiece; measure and compare the width of the microgroove in the CCD camera image with a scale to obtain the true width of the microgroove without compensation; S5. The collected milling force and strengthening force are filtered and zero-point drift compensated, and the cutting force and strengthening force curves are fitted. The average values ​​of cutting force and strengthening force are calculated respectively. S6, combined with the input standard value of the microgroove width, calculates the workpiece deformation under different milling force and strengthening force curve conditions during microgroove machining, and calculates the microgroove width compensation under different milling force and strengthening force curve conditions based on the workpiece deformation rate. S7, remove the CCD special fixture, adjust the workpiece machining program in combination with the micro-groove width compensation amount, and re-mill the workpiece width to compensate. S8, reinstall the CCD special fixture, measure whether the width of the compensated microgroove meets the processing accuracy and allowance requirements, repeat steps S6-S8 until the dimensional accuracy and allowance meet the requirements; S9 adopts an automatic tool changing process for machine tools. Facing the titanium alloy microgroove being processed, it selects the appropriate ultrasonic vibration extrusion tool. Based on the workpiece deformation rate, it calculates the microgroove width compensation amount and CCD measurement results under different strengthening force curve conditions. It then selects ultrasonic strengthening process parameters and performs microgroove sidewall extrusion strengthening. S10, reinstall the CCD-specific fixture, measure whether the width of the reinforced microgroove meets the machining accuracy requirements, and repeat steps S9-S10 until the dimensional accuracy meets the requirements.

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