Large boom beam precision alignment device

Abstract

A large boom beam precision alignment device includes: a detection platform, two rotary mechanisms, and a alignment platform. The alignment platform achieves dynamic displacement of the X-axis, Y-axis, and θ angle through the driving displacement of X-axis single units, Y-axis single units, and free axis single units. A rotary mechanism is assembled at both ends of the alignment platform, and the two rotary mechanisms are installed between two connecting columns of the detection platform. Each of the two connecting columns is equipped with a Z-axis guide rail, and each is driven by two Z-axis drive motors to move two Z-axis slides up and down. A passive turntable and a Y-axis slide are respectively provided between the two Z-axis slides and the two rotary mechanisms, so that the alignment platform itself includes not only the dynamic displacement of the X-axis, Y-axis, and θ angle, but also the dynamic displacement of the Z-axis up and down and the Y-axis, which greatly improves the accuracy of the alignment platform for adjustment and detection operations.

Description

Technical Field

[0001] This invention relates to a precision alignment device, and more particularly to a precision alignment device for large boom beams suitable for long strip-shaped workpieces and long-side workpieces. Background Technology

[0002] Currently, in various LCD panel manufacturing and inspection equipment, semiconductor manufacturing and inspection setups, screen printing equipment, or printed circuit board manufacturing and inspection equipment, alignment platforms must be used for alignment and movement procedures. In order to improve precision, in addition to the movement of the X and Y axes, the θ angle movement function should also be available to achieve the high precision requirements.

[0003] However, most alignment platforms on the market are square in shape. When applied to long workpieces, part of the workpiece's area is exposed outside the alignment platform. During the alignment process, the workpiece is suspended, causing instability in alignment. This requires multiple adjustments to the alignment program and repeated testing. Furthermore, when the exposed area of ​​the workpiece is larger than the area stacked on the alignment platform, the workpiece often cannot be stacked flat on the platform, thus increasing the error in workpiece alignment and detection. This significantly reduces the efficiency and precision of workpiece alignment, detection, and production processes, and there is indeed a need for improvement.

[0004] In view of this, based on the inventor's many years of experience in designing, developing and manufacturing related products, and after detailed design and careful evaluation to address the above-mentioned problems, the inventor has finally arrived at an invention that is truly practical. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a large arm beam precision alignment device suitable for long strip workpieces and long side workpieces, addressing the above-mentioned deficiencies in the existing technology.

[0006] The aforementioned large boom beam precision alignment device includes: a detection platform, two rotary mechanisms, and a alignment platform. The detection platform is a long plate-shaped platform, with a symmetrical left connecting column and a right connecting column at the two long ends of the platform. Each of the left and right connecting columns is equipped with a Z-axis guide rail, and each of the two Z-axis guide rails is equipped with a Z-axis drive motor. The Z-axis drive motor drives a Z-axis slide to move up and down along the Z-axis guide rail. The two Z-axis slides face each other and each has a transition plate. The Z-axis guide rail of the left connecting column... The transition plate on the Z-axis slide has a driven turntable on its vertical surface. The transition plate on the Z-axis slide connected to the right column has a Y-axis slide and a driven turntable on its vertical surface. Both driven turntables are equipped with a transition seat, and each transition seat is perpendicular to the surface of the driven turntable to form a transition part. Both rotary mechanisms are assembled with a base body comprising a spindle, a driven wheel, and a rotary platform. One end of the spindle is fixed to the base body, and the other end is connected to the driven wheel, which in turn connects to the rotary platform. The base body is equipped with a rotary drive motor. The rotary drive motor drives the driven wheel via a worm gear, thereby synchronously driving the rotary platform to rotate. The rotary mechanism is mounted on the adapter of the adapter body via the base. The alignment platform has a long base, a transfer base, and a connecting arm beam. The long base has two symmetrical short sides and two symmetrical long sides. From one of the short sides along the forming direction of the long side, there are two X-axis units, one Y-axis unit, and two free axis units. The two X-axis units are respectively assembled near the two short sides, and the Y-axis unit is assembled on the long base. At the central position, two free-axis units are respectively assembled between the two X-axis units and the Y-axis unit. The inner surface of the transfer seat connects the two X-axis units, the Y-axis units, and the two free-axis units. The two X-axis units, the Y-axis units, and the two free-axis units drive the transfer seat to generate dynamic displacement in the X-axis, Y-axis, and θ-angle directions. The connecting arm beam is assembled on the upper surface of the long base and then assembled between the two rotary platforms of the rotary mechanism through the two ends of the connecting arm beam, so that the transfer seat faces downward toward the detection platform.

[0007] Preferably, the outer diameter surface of the driven wheel is provided with a toothed section, and the rotary drive motor uses the worm gear to mesh with the toothed section of the driven wheel to achieve the rotational motion of the driven wheel.

[0008] Preferably, the base of the rotary mechanism is provided with a circular slot for accommodating the rotating disk and the driven wheel, and the rotary platform is exposed outside the circular slot. The upper part of the base is further provided with a cover plate.

[0009] Preferably, a scale is provided around the outer diameter surface of the rotary platform.

[0010] Preferably, the X-axis unit comprises, from bottom to top, a base, an X-axis slider, a Y-axis slider, and a rotating top seat. Two symmetrical X-axis slide rails are provided between the base and the X-axis slider, allowing the X-axis slider to slide above the base via the two X-axis slide rails. An X-axis drive motor is used as the sliding displacement power for the X-axis slider. Two symmetrical Y-axis slide rails are provided between the X-axis slider and the Y-axis slider. The rotating top seat is fixed to the top surface of the Y-axis slider and is connected and fixed to the upper surface of the transfer seat.

[0011] Preferably, one of the long sides of the long base has two openings at adjacent to the two short sides, through which the X-axis drive motor passes.

[0012] Preferably, the Y-axis unit comprises, from bottom to top, a base, a Y-axis slider, an X-axis slider, and a rotating top seat. Two symmetrical Y-axis slide rails are provided between the base and the Y-axis slider, allowing the Y-axis slider to slide above the base via the two Y-axis slide rails. A Y-axis drive motor is used as the sliding displacement power for the Y-axis slider. Two symmetrical X-axis slide rails are provided between the Y-axis slider and the X-axis slider. The rotating top seat is fixed to the top surface of the X-axis slider and is connected and fixed to the upper surface of the transfer seat.

[0013] Preferably, the free axis unit comprises, from bottom to top, a base, a Y-axis slider, an X-axis slider, and a rotating top seat. The base and the Y-axis slider are provided with two symmetrical Y-axis slide rail groups, and the Y-axis slider and the X-axis slider are provided with two symmetrical X-axis slide rail groups. The rotating top seat is fixed to the top surface of the X-axis slider and is connected and fixed to the upper surface of the transfer seat.

[0014] Compared with the prior art, the alignment platform of the present invention is a long platform formed by the long base and the corresponding transfer seat, which is convenient to be applied to long workpieces or long-side workpieces. Through the driving displacement of the X-axis unit, Y-axis unit and free axis unit, the dynamic displacement of the X-axis, Y-axis and θ angle is achieved, thereby improving the efficiency and accuracy of long workpiece alignment, detection and production process.

[0015] The alignment platform is equipped with a rotary mechanism at each end, and the two rotary mechanisms are connected between the two connecting columns of the testing platform. Each connecting column is equipped with a Z-axis guide rail, and the two Z-axis slides are driven to move up and down by two Z-axis drive motors. Each Z-axis slide and each rotary mechanism is equipped with a passive turntable on one side and a passive turntable and a Y-axis slide on the other side. This allows the alignment platform to adjust the deviation generated during Z-axis vertical displacement, in addition to the dynamic displacement of the X-axis, Y-axis and θ-angle. The adjustment dynamics of the passive turntable on one side and the passive turntable on the other side, as well as the displacement of the Y-axis slide, can be dynamically adjusted by the rotation of the passive turntable on one side and the displacement of the passive turntable on the other side, greatly improving the accuracy of the alignment platform in adjustment and testing operations. Attached Figure Description

[0016] Figure 1 This is a perspective view of the present invention.

[0017] Figure 2 This is an exploded view of the present invention.

[0018] Figure 3 This is an exploded view of the rotary mechanism in this invention.

[0019] Figure 4 This is a combined cross-sectional view of the rotary mechanism in this invention.

[0020] Figure 5 This is an exploded view of the alignment platform in this invention.

[0021] Figure 6 This is an exploded view of the X-axis unit in this invention.

[0022] Figure 7 This is an exploded view of the Y-axis unit in this invention.

[0023] Figure 8 This is an exploded view of the free-axis unit in this invention.

[0024] Figure 9 This is a top view and a partially enlarged schematic diagram of the present invention.

[0025] Figure 10 This is a front view and a partially enlarged schematic diagram of the present invention.

[0026] Figure 11 This is a schematic diagram of the horizontal displacement of the alignment platform along the Z-axis in this invention.

[0027] Figure 12 This is a schematic diagram of the tilting displacement of the alignment platform along the Z-axis in this invention.

[0028] Figure 13 This is a schematic diagram showing the alignment platform in this invention being controlled by the rotary mechanism to form a horizontal state.

[0029] Figure 14 This is a schematic diagram showing the rotary mechanism of the present invention inactive.

[0030] Figure 15 This is a schematic diagram of the rotary mechanism driving rotation in this invention.

[0031] Figure 16 This is a schematic diagram showing the alignment platform in this invention being controlled by the rotary mechanism to form a non-horizontal state.

[0032] Figure 17 This is a schematic diagram showing the transfer seat in the present invention in its reference position without displacement.

[0033] Figure 18 This is a schematic diagram of the transfer seat in this invention being driven to move along the X-axis.

[0034] Figure 19 This is a schematic diagram of the transfer seat in this invention being driven to move along the Y-axis.

[0035] Figure 20 This is a schematic diagram of the oblique rotational displacement of the transfer seat in this invention.

[0036] Explanation of symbols in the attached diagram:

[0037] 10: Detection platform; 11: Left connecting column; 111: Z-axis guide rail; 112: Z-axis drive motor; 113: Z-axis slide; 114: Adapter plate; 12: Right connecting column; 121: Z-axis guide rail; 122: Z-axis drive motor; 123: Z-axis slide; 124: Adapter plate; 13: Passive turntable; 14: Y-axis slide; 141: Passive turntable; 15: Adapter seat; 151: Adapter part; 16: Object to be detected; 20: Rotary mechanism; 21: Base; 211: Circular slot; 212: Cover plate; 22: Rotary disc; 23: Passive wheel; 231: Toothed section; 24: Rotary platform; 241: Scale graduation; 25: Rotary drive motor; 251: Worm gear; 30: Alignment platform; 31: Long base; 3 11: Short side; 312: Long side; 313: Opening; 32: Transfer seat; 33: Connecting arm beam; 34: X-axis unit; 341: Base; 342: X-axis slider; 343: Y-axis slider; 344: Rotating top seat; 345: X-axis slide rail assembly; 346: X-axis drive motor; 347: Y-axis slide rail assembly; 35: Y-axis unit; 351: Base; 352: Y-axis slider; 353: X-axis slider; 354: Rotating top seat; 355: Y-axis slide rail assembly; 356: Y-axis drive motor; 357: X-axis slide rail assembly; 36: Free axis unit; 361: Base; 362: Y-axis slider; 363: X-axis slider; 364: Rotating top seat; 365: Y-axis slide rail assembly; 366: X-axis slide rail assembly; 37: Detection reference group. Detailed Implementation

[0038] To provide a better understanding of the purpose, features, and effects of this invention, the following detailed description is provided in conjunction with the accompanying drawings:

[0039] First, please let Figures 1 to 5 and Figure 9As shown, a large boom beam precision alignment device includes: a detection platform 10, which is a long plate-shaped platform, with a symmetrical left connecting column 11 and a right connecting column 12 at the two long ends of the detection platform 10. Each of the left connecting column 11 and the right connecting column 12 is equipped with a Z-axis guide rail 111 and 121, respectively. Each of the two Z-axis guide rails 111 and 121 is equipped with a Z-axis drive motor 112 and 122, respectively, which drives the two connecting columns 111 and 122. Two Z-axis slides 113 and 123 move up and down along two Z-axis guide rails 111 and 121. The two Z-axis slides 113 and 123 face each other and each has a transition plate 114 and 124. The transition plate 114 on the left connecting column 11 of the Z-axis slide 113 has a passive turntable 13 on its vertical surface. The transition plate 124 on the right connecting column 12 of the Z-axis slide 123 has a Y-axis slide 14 on its vertical surface, and then a passive turntable 141 is assembled through the Y-axis slide 14, so that the passive turntable 141 is mounted on the slide. In addition to free rotation, the movable turntable 141 also has dynamic displacement along the Y-axis through the Y-axis slide 14. Each of the two passive turntables 13 and 141 is equipped with a transition seat 15, and each transition seat 15 forms a transition portion 151 perpendicular to the surface of the passive turntable 13 and 141. Two rotary mechanisms 20 are each assembled on a base 21, comprising a rotating disk 22, a driven wheel 23, and a rotary platform 24. The base 21 has a circular slot 211 for accommodating the rotating disk 22 and the driven wheel 23. The base 21 has a cover plate 212 on the upper part of the base 21. One end of the turntable 22 is fixed in the circular slot 211 of the base 21, and the other end is connected to the driven wheel 23. The turntable 24 is connected to the driven wheel 23. The base 21 has a rotary drive motor 25. The rotary drive motor 25 drives the driven wheel 23, and then drives the turntable 24 to rotate synchronously. The outer diameter surface of the turntable 24 is further surrounded by a scale 241.A positioning platform 30 is provided, which includes a long base 31, a transfer seat 32, and a connecting arm beam 33. The long base 31 has two symmetrical short sides 311 and two symmetrical long sides 312. Two X-axis units 34, a Y-axis unit 35, and two free axis units 36 are provided along the forming direction of the long side from one of the short sides 311. The two X-axis units 34 are respectively assembled at adjacent to the two short sides 311, and the Y-axis unit 35 is assembled on the long base 312. At the central position of the base 31, two free-axis units 36 are respectively assembled between the two X-axis units 34 and the Y-axis unit 35. The upper surface of the transfer seat 32 connects the two X-axis units 34, the Y-axis units 35, and the two free-axis units 36, and drives the transfer seat 32 to generate dynamic displacement in the X-axis, Y-axis, and θ-angle directions through the two X-axis units 34, the Y-axis units 35, and the two free-axis units 36. The connecting arm beam 33 is assembled on the upper surface of the long base 31.

[0040] The outer diameter surface of the passive wheel 23 is provided with a toothed section 231. The rotary drive motor 25 is provided with a worm 251, and the worm 251 is used to mesh with and drive the toothed section 231 of the passive wheel 23 to achieve the rotational movement of the passive wheel 23.

[0041] Please also by Figure 5 , 6 As shown, the aforementioned X-axis unit 34 comprises, from bottom to top, a base 341, an X-axis slider 342, a Y-axis slider 343, and a rotating top seat 344. Two symmetrical X-axis slide rail assemblies 345 are provided between the base 341 and the X-axis slider 342, allowing the X-axis slider 342 to slide above the base 341 via the two X-axis slide rail assemblies 345. An X-axis drive motor 346 serves as the sliding mechanism for the X-axis slider 342. The X-axis slider 342 and the Y-axis slider 343 are provided with two symmetrical Y-axis slide rails 347. The rotating top seat 344 is fixed to the top surface of the Y-axis slider 343 and is connected and fixed to the upper surface of the transfer seat 32. The long side 312 of the long base 31 has two openings 313 at adjacent to the two short sides 311, and the X-axis drive motor 346 is provided to pass through the openings 313.

[0042] Please also by Figure 5 , 7As shown, the aforementioned Y-axis unit 35 consists of, from bottom to top, a base 351, a Y-axis slider 352, an X-axis slider 353, and a rotating top seat 354. Two symmetrical Y-axis slide rails 355 are provided between the base 351 and the Y-axis slider 352, allowing the Y-axis slider 352 to slide above the base 351 via the two Y-axis slide rails 355. A Y-axis drive motor 356 provides the sliding displacement power for the Y-axis slider 352. Two symmetrical X-axis slide rails 357 are provided between the Y-axis slider 352 and the X-axis slider 353. The rotating top seat 354 is fixed to the top surface of the X-axis slider 353 and is connected and fixed to the upper surface of the transfer seat 32.

[0043] Please also by Figure 5 , 8 As shown, the aforementioned free axis unit 36 ​​consists of, from bottom to top, a base 361, a Y-axis slider 362, an X-axis slider 363, and a rotating top seat 364. The base 361 and the Y-axis slider 362 are provided with two symmetrical Y-axis slide rail groups 365, and the Y-axis slider 362 and the X-axis slider 363 are provided with two symmetrical X-axis slide rail groups 366. The rotating top seat 364 can rotate freely 360 degrees and is disposed on the top surface of the X-axis slider 363, and is connected and fixed to the upper surface of the transfer seat 32.

[0044] Its structural composition, please refer to Figure 1 , 2 4. Cooperation Figure 5 , 9 As shown in Figure 10, the two rotary mechanisms 20 are respectively mounted on the bases 21 at the corresponding transition parts 151 of the left and right connecting columns 11 and 12, and are provided with rotational actuation by the two passive turntables 13 and 141. The Y-axis slide 14 of one of the passive turntables 141 can provide one of the rotary mechanisms 20 with Y-axis displacement. The alignment platform 30 is assembled with the upper surface of the upper base 31 and the connecting arm beam 33. The two ends of the connecting arm beam 33 are assembled between the rotary platforms 24 of the two rotary mechanisms 20, and the transfer seat 32 is facing downwards toward the detection platform 10, thereby completing a large arm beam precision alignment device.

[0045] The operation of its structure will continue to be explained by [the relevant authority / organization]. Figure 10 , 11As shown, the detection platform 10 provides a place for a test object 16, and the bottom surface of the transfer seat 32 of the alignment platform 30 is provided with a detection reference group 37. When the two Z-axis slides 113 and 123 are simultaneously driven by the two Z-axis drive motors 112 and 122, and move up and down synchronously along the Z-axis guide rails 111 and 121 of the left and right connecting columns 11 and 12, the alignment platform 30 can adjust the Z-axis displacement of the detection reference group 37 facing the test object 16 on the detection platform 10.

[0046] Please ask again Figure 12 As shown, when the displacements of the two Z-axis slides 113 and 123 along the left and right connecting columns 11 and 12 are different, the passive turntables 13 and 141 can assist the alignment platform 30 in swinging motion, so that the two ends of the alignment platform 30 are at different heights and form an inclined shape. In addition, the Y-axis slide 14 of one of the passive turntables 141 will also provide displacement in the Y-axis direction, timely compensating for the distance of the inclined side deviation caused by the tilt of the alignment platform 30, so that the alignment platform 30 can still smoothly move up and down along the left and right connecting columns 11 and 12, so that the detection reference group 37 faces the object 16 to be detected on the detection platform 10 in parallel.

[0047] Please continue by Figure 13 , 14 As shown in Figures 15 and 16, the alignment platform 30 is fixed at both ends between the two rotary mechanisms 20. When the two rotary mechanisms 20 drive the passive wheel 23 to rotate via the rotary drive motor 25, the alignment platform 30 can be driven to swing through the two rotary platforms 24, so that the alignment platform 30 can swing around the Y-axis between the left and right connecting columns 11 and 12 via the two rotary platforms 24.

[0048] The operational status of its positioning platform 30 will then be determined by [the relevant authority / organization]. Figure 17 , 18 Cooperate Figure 6 As shown, the original reference position of the transfer seat 32 is aligned with the long base 31, and the X-axis unit 34, Y-axis unit 35 and free axis unit 36 ​​remain at the origin without any movement. When the X-axis slider 342 is driven to move via the X-axis drive motor 346 of the X-axis unit 34, the transfer seat 32 is moved in the X-axis direction, while the X-axis sliders 353 and 363 of the Y-axis unit 35 and free axis unit 36, which are not driven by the drive motor, slide simultaneously with the transfer seat 32, further achieving the purpose of moving the transfer seat 32 in the X-axis direction.

[0049] Please ask again Figure 19 Matching Figure 6As shown, when the Y-axis slider 352 is driven to move by the Y-axis drive motor 356 of the Y-axis unit 35, the transfer seat 32 is moved in the Y-axis direction, while the Y-axis sliders 343 and 362 of the X-axis unit 34 and the free axis unit 36, which are not driven by the drive motor, slide simultaneously with the transfer seat 32, further achieving the purpose of moving the transfer seat 32 in the Y-axis direction.

[0050] Please ask again Figure 20 Matching Figure 5 , 6 As shown in Figure 8, when the X-axis drive motor 346 of the X-axis unit 34 and the Y-axis drive motor 356 of the Y-axis unit 35 operate simultaneously, the X-axis slider 342 of the X-axis unit 34 and the Y-axis slider 352 of the Y-axis unit 35 will drive the transfer seat 32 to move. The transfer seat 32 will generate oblique displacement, rotational displacement and central rotation displacement dynamics other than the X and Y axes through the self-rotating top seats 344, 354 and 364 at the top of the X-axis unit 34, the Y-axis unit 35 and the free axis unit 36. The other sliders of the X-axis unit 34, the Y-axis unit 35 and the free axis unit 36 ​​that are not driven by the drive motor will slide with the traction of the transfer seat 32. In this way, platform displacement movements in various directions and angles can be performed, which helps to improve the range and accuracy of the alignment platform 30 movement.

[0051] By utilizing the structure of the above specific embodiments, the following benefits can be obtained: The alignment platform 30 of the present invention is a long strip platform formed by the long base 31 and the corresponding transfer seat 32, so as to be applied to long strip workpieces or long-side workpieces. Through the driving displacement of the X-axis unit 34, Y-axis unit 35 and free axis unit 36, the dynamic displacement of the X-axis, Y-axis and θ angle can be achieved, thereby improving the efficiency and accuracy of long strip workpiece alignment, detection and production process.

[0052] The alignment platform 30 is equipped with a rotary mechanism 20 at both ends, and the two rotary mechanisms 20 are connected between the left and right connecting columns 11 and 12 of the detection platform 10. The left and right connecting columns 11 and 12 are equipped with Z-axis guide rails 111 and 121, and the two Z-axis slides 113 and 123 are driven to move up and down by the Z-axis drive motors 112 and 122. The passive turntables 13 and 141 are respectively provided between the Z-axis slides 113 and 123 and the rotary mechanism 20. In addition to the dynamic displacement of the alignment platform 30 in the X-axis, Y-axis and θ-angle, the deviation generated by the Z-axis vertical displacement can be adjusted by the rotation of the passive turntables 13 and 141 and the displacement of the Y-axis slide 14, which greatly improves the accuracy of the alignment platform 30 in adjustment and detection operations.

[0053] The above description is merely a preferred embodiment of the present invention and should not be construed as limiting the scope of the present invention; that is, all equivalent changes and modifications made in accordance with the scope of the patent application of the present invention should still fall within the scope of the patent of the present invention.

Claims

1. A large boom beam precision alignment device, characterized in that, include: A testing platform is a long plate-shaped platform with a symmetrical left connecting column and a right connecting column at the two long ends. Each of the left and right connecting columns is equipped with a Z-axis guide rail, and each of the two Z-axis guide rails is equipped with a Z-axis drive motor. The Z-axis drive motor drives a Z-axis slide to move up and down along the Z-axis guide rail. The two Z-axis slides face each other and each is equipped with a transition plate. The transition plate installed on the left connecting column is equipped with a passive turntable on its vertical surface. The transition plate installed on the right connecting column is first equipped with a Y-axis slide on its vertical surface, and then a passive turntable is assembled through the Y-axis slide. This allows the passive turntable installed on the right connecting column to not only rotate freely, but also to have Y-axis displacement dynamics through the Y-axis slide. Each of the two passive turntables is equipped with a transition seat, and each transition seat is perpendicular to the surface of the passive turntable to form a transition part. Two rotary mechanisms are provided, each consisting of a base body with a rotating disk, a driven wheel, and a rotary platform. One end of the rotating disk is fixed to the base body, and the other end is connected to the driven wheel, which in turn connects to the rotary platform. The base body is equipped with a rotary drive motor, which drives the driven wheel via a worm gear, thereby synchronously driving the rotary platform to rotate. The rotary mechanism is mounted on the adapter of the adapter body via the base body. A positioning platform is provided, comprising a long base, a transfer seat, and a connecting arm beam. The long base has two symmetrical short sides and two symmetrical long sides. From one of the short sides, along the forming direction of the long side, are arranged two X-axis units, one Y-axis unit, and two free axis units. The two X-axis units are respectively assembled near the two short sides, the Y-axis unit is assembled at the center of the long base, and the two free axis units are respectively assembled at the center between the two X-axis units and the Y-axis unit. The upper surface of the transfer seat connects the two X-axis units, the Y-axis units, and the two free axis units, and drives the transfer seat to generate dynamic displacement in the X-axis, Y-axis, and θ-angle directions through the two X-axis units, the Y-axis units, and the two free axis units. The connecting arm beam is assembled on the surface of the long base and then assembled between the rotating platforms of the two rotating mechanisms through the two ends of the connecting arm beam, with the transfer seat facing downwards towards the detection platform.

2. The large boom beam precision alignment device according to claim 1, characterized in that, The outer diameter surface of the driven wheel is provided with toothed sections. The rotary drive motor uses the worm gear to mesh with the toothed sections of the driven wheel, thereby achieving the rotational motion of the driven wheel.

3. The large boom beam precision alignment device according to claim 1, characterized in that, The base of the rotary mechanism is provided with a circular slot for accommodating the rotating disk and the driven wheel, and the rotary platform is exposed outside the circular slot. The upper part of the base is also provided with a cover plate.

4. The large boom beam precision alignment device according to claim 1, characterized in that, The outer diameter surface of the rotary platform is provided with a scale.

5. The large boom beam precision alignment device according to claim 1, characterized in that, The X-axis unit consists of a base, an X-axis slider, a Y-axis slider, and a rotating top seat, arranged sequentially from bottom to top. Two symmetrical X-axis slide rails are provided between the base and the X-axis slider, allowing the X-axis slider to slide above the base via the two X-axis slide rails. An X-axis drive motor is used as the sliding displacement power for the X-axis slider. Two symmetrical Y-axis slide rails are provided between the X-axis slider and the Y-axis slider. The rotating top seat is fixed to the top surface of the Y-axis slider and is connected and fixed to the upper surface of the transfer seat.

6. The large boom beam precision alignment device according to claim 5, characterized in that, The long side of the base has two openings at adjacent to the two short sides, through which the X-axis drive motor passes.

7. The large boom beam precision alignment device according to claim 1, characterized in that, The Y-axis unit consists of a base, a Y-axis slider, an X-axis slider, and a rotating top seat, arranged sequentially from bottom to top. Two symmetrical Y-axis slide rails are provided between the base and the Y-axis slider, allowing the Y-axis slider to slide above the base via the two Y-axis slide rails. A Y-axis drive motor is used as the sliding displacement power for the Y-axis slider. Two symmetrical X-axis slide rails are provided between the Y-axis slider and the X-axis slider. The rotating top seat is fixed to the top surface of the X-axis slider and is connected and fixed to the upper surface of the transfer seat.

8. The large boom beam precision alignment device according to claim 1, characterized in that, The free axis unit consists of a base, a Y-axis slider, an X-axis slider, and a rotating top seat, arranged sequentially from bottom to top. Two symmetrical Y-axis slide rails are provided between the base and the Y-axis slider, and two symmetrical X-axis slide rails are provided between the Y-axis slider and the X-axis slider. The rotating top seat is fixed to the top surface of the X-axis slider and is connected and fixed to the upper surface of the transfer seat.

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