Optical simulation system and method of DMD micromirror array

Abstract

The present invention discloses an optical simulation system and method of a DMD micromirror array. By modeling a DMD micromirror array substrate, generating positioning points of a micromirror array, and then modeling a single DMD micromirror, the positioning points of the micromirror array and the modeled single DMD micromirror are set in a one-to-one association, and the pattern to be simulated is mapped to the modeled DMD micromirror array substrate, and the micromirrors to be turned on and off are determined; thus, a real projection pattern can be simulated. The simulation logic is simple and efficient, and there is no need to optimize the projection quality after the optical product is actually completed. There is no need to model a large number of DMD micromirrors, and the real working state of the DMD micromirrors can be simulated, the projection quality is high, and the projection pattern can be truly restored.

Description

Technical Field

[0001] The invention relates to the field of DMD micromirror optical technology, in particular to an optical simulation technology of a DMD micromirror array. Background Art

[0002] DMD (Digital Micromirror Device) is a micro-electromechanical system invented based on semiconductor manufacturing technology. It consists of many (500,000 to 2 million) movable small aluminum reflective mirrors, and each micro-mirror can be independently addressed and controlled.

[0003] Because there are as many as 2 million mirrors on a DMD chip, it is basically impossible to model and simulate the 2 million micromirror arrays one by one using conventional modeling methods.

[0004] The existing simulations of DMD projection chips basically adopt approximate methods for modeling and simulation, such as dividing the DMD chip into several areas and modeling the DMD according to the areas, or only modeling part of the lenses and inferring the working conditions of the entire DMD micromirror array by simulating the switching of some lenses.

[0005] Figure 1 The simulated pattern of the approximately modeled DMD lens is shown. Figure 1 It can be seen that the method of approximate modeling of DMD micromirrors cannot truly simulate the actual working state of DMD. Therefore, the simulation results cannot truly restore the actual situation of the projection pattern, especially some stray light or non-reflected areas caused by the micromirror array itself, which will affect the projection quality. The pattern distortion is relatively serious and can only be solved through subsequent optimization after the product comes out, and cannot be avoided in the design stage. Summary of the invention

[0006] In order to solve the above technical problems, the present invention provides an optical simulation system and method for a DMD micromirror array, which can individually control the switching state of any lens in the design simulation stage to simulate the real pattern effect. The simulation logic is simple and efficient, and there is no need to optimize the projection quality after the optical product is actually completed.

[0007] At the same time, the present invention does not need to model a large number of DMD micromirrors, but can simulate the actual working state of the DMD micromirrors, has high projection quality, and can truly restore the projection pattern.

[0008] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0009] An optical simulation method for a DMD micromirror array, characterized in that it comprises at least the following steps:

[0010] (1) Determine the length and width of the DMD micromirror array substrate according to the DMD chip specification, model the DMD micromirror array substrate, and generate the positioning points of the micromirror array;

[0011] (2) Modeling a single DMD micromirror through 3D software. The three-dimensional size of the DMD micromirror is set according to the specification of the DMD chip. Then, the reflectivity of the single DMD micromirror is set in the optical simulation software.

[0012] (3) Associating the positioning points of the micromirror array with the modeled single DMD micromirror in the optical simulation software;

[0013] (4) Map the pattern to be simulated to the modeled DMD micromirror array substrate and determine the micromirrors that need to be turned on and off;

[0014] (5) Use optical simulation software to simulate the real projection pattern.

[0015] In the above technical solution, step (1) also includes determining the spacing between the positioning points of the micromirror array on the DMD, and determining the arrangement of the positioning points of the micromirror array.

[0016] In the above technical solution, the arrangement form of the positioning points in step (1) is one of a square arrangement and a diamond arrangement.

[0017] In the above technical solution, the shape of a single DMD micromirror in step (2) is a square or a diamond.

[0018] In the above technical solution, the reflectivity of a single DMD micromirror in step (2) is 80%±10%.

[0019] In the above technical solution, in step (3), the positioning points of the micromirror array and the modeled single DMD micromirrors are arranged in a one-to-one correspondence according to one of the square arrangement and the diamond arrangement.

[0020] In the above technical solution, in step (4), the micromirrors under the pattern area to be simulated are turned on, and the remaining micromirrors are turned off.

[0021] Furthermore, the present invention provides an optical simulation system of a DMD micromirror array based on the above method, which is used to complete the above steps.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] The present invention proposes an optical simulation technology of a DMD micromirror array, which can completely restore the micromirror array of a DMD chip and its working state, and can independently control the switching state of any mirror in the simulation to simulate a real pattern effect.

[0024] Compared with the existing method of approximate modeling of DMD micromirrors, the present invention does not need to model a large number of DMD micromirrors. It only needs to establish the relationship between the DMD micromirrors and the micromirror positioning points to simulate the actual working state of the DMD micromirrors. Through the image mapping relationship, any DMD micromirror can be controlled to turn on or off.

[0025] Because any DMD micromirror can be controlled to turn on or off through image mapping, the simulation accuracy is high, no jagged edges will appear on the image edge, and the graphic distortion is almost the same as the restored pattern. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments, in which:

[0027] Figure 1 It is a projection effect diagram of a simulated pattern approximately modeled according to conventional methods in the prior art.

[0028] Figure 2 Flow chart of the optical simulation method of the present invention.

[0029] Figure 3 Diagram of a DMD micromirror array substrate modeled for one embodiment of the present invention.

[0030] Figure 4 A partial view of a DMD micromirror array substrate modeled for one embodiment of the present invention, wherein the micromirror positioning points "x" are arranged in a rectangular shape.

[0031] Figure 5 A partial view of a DMD micromirror array substrate modeled for yet another embodiment of the present invention, wherein the micromirror positioning points are arranged in a diamond shape "x".

[0032] Figure 6 This is a modeling diagram of a single DMD micromirror of the present invention.

[0033] Figure 7 A schematic diagram of associating the positioning points of a micromirror array with a modeled single DMD micromirror according to an embodiment of the present invention (rectangular arrangement association).

[0034] Figure 8 This is a schematic diagram of associating the positioning points of a micromirror array with a modeled single DMD micromirror according to yet another embodiment of the present invention (diamond arrangement association).

[0035] Fig. 9 A schematic diagram of the micromirror regions that need to be turned on and the micromirror regions that need to be turned off in a pattern according to an embodiment of the present invention.

[0036] Fig.10 To simulate the real Fig. 9 DMD micromirror simulation pattern effect diagram of the pattern. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0038] The optical simulation method of the DMD micromirror array of the present invention is described below according to specific embodiments. Figure 2 As shown, the following steps are included:

[0039] (1) According to the DMD chip specification, model the DMD micromirror array substrate and generate the positioning points of the micromirror array.

[0040] (1.1) For example, take the DMD chip: dlp2021-q1 as an example. According to the query specification, the length and width of the DMD micromirror array substrate are: 4.498mm*2.533mm. There are 390,000 micromirrors distributed on the DMD chip. Each micromirror is represented by a dot to indicate its position on the DMD. Figure 3 shown.

[0041] (1.2) The pitch of the micromirror array on the DMD is 7.6 um, and the positioning point "x" marks of the micromirror array are arranged as follows. Figure 4 For rectangular arrangement, Figure 5 Arranged in a diamond shape.

[0042] (2) Use 3D software, such as CATIA and UG, to model a single DMD micromirror. The three-dimensional size of the DMD micromirror is set according to the specification of the DMD chip. Common shapes of DMD micromirrors are square and diamond. Then, set the reflectivity of a single DMD micromirror in the optical simulation software. For example, in this implementation, the reflectivity is selected to be 80%. Figure 6 shown.

[0043] The reflectivity of a single DMD micromirror can also be set within 80% ± 10%.

[0044] (3) In optical simulation software, such as tracePro or lighttools, associate the positioning points of the micromirror array with the modeled single DMD micromirror. In either a square arrangement or a diamond arrangement, associate the positioning points of the micromirror array with the modeled single DMD micromirror one by one, that is, each positioning point is associated with a DMD micromirror.

[0045] like Figure 7 , wherein 1 is a micromirror positioning point, 2 is a DMD micromirror, each DMD micromirror is provided with a micromirror positioning point 1, and a micromirror array with a rectangular arrangement is formed according to the micromirror positioning point 1.

[0046] As well as Figure 8 1 is a micromirror positioning point, 2 is a DMD micromirror, each DMD micromirror is provided with a micromirror positioning point 1, and a micromirror array arranged in a diamond shape is formed according to the micromirror positioning point 1.

[0047] (4) The pattern to be simulated ( Fig. 9 The W figure shown in FIG) is mapped to the DMD micromirror array substrate to determine the micromirror area 3 that needs to be turned on and the micromirror area 4 that needs to be turned off.

[0048] (5) Use optical simulation software to simulate the real projection pattern such as Fig.10 As shown. Figure 1 This is in sharp contrast to the pattern simulated by the conventional method.

[0049] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the appended claims of the present invention.

Claims

1. An efficient DMD micromirror array optical simulation method for avoiding image distortion in the design stage, characterized in that At least the following steps are included: (1) Determine the length and width of the DMD micromirror array substrate according to the DMD chip specification, model the DMD micromirror array substrate, and generate the positioning points of the micromirror array; (2) Modeling a single DMD micromirror. The three-dimensional size of the DMD micromirror is set according to the specification of the DMD chip, and then the reflectivity of the single DMD micromirror is set; (3) Associating the positioning points of the micromirror array with the modeled single DMD micromirror; (4) Map the pattern to be simulated to the modeled DMD micromirror array substrate and determine the micromirrors that need to be turned on and off; (5) Simulate a real projection pattern.

2. The efficient DMD micromirror array optical simulation method for avoiding image distortion in the design stage according to claim 1, characterized in that Step (1) also includes determining the spacing between the positioning points of the micromirror array on the DMD, and determining the arrangement of the positioning points of the micromirror array.

3. The efficient DMD micromirror array optical simulation method for avoiding image distortion in the design stage according to claim 1, characterized in that The arrangement of the positioning points in step (1) is a square arrangement or a diamond arrangement.

4. The efficient DMD micromirror array optical simulation method for avoiding image distortion in the design stage according to claim 1, characterized in that In step (2), the shape of a single DMD micromirror is a square or a diamond.

5. The efficient DMD micromirror array optical simulation method for avoiding image distortion in the design stage according to claim 1, characterized in that The reflectivity of a single DMD micromirror in step (2) is 80%±10%.

6. The efficient DMD micromirror array optical simulation method for avoiding image distortion in the design stage according to claim 1, characterized in that In step (3), the positioning points of the micromirror array and the modeled single DMD micromirrors are arranged in a one-to-one correspondence according to one of the square arrangement and the diamond arrangement, so that each positioning point corresponds to a DMD micromirror.

7. The efficient DMD micromirror array optical simulation method for avoiding image distortion in the design stage according to claim 1, characterized in that In step (4), the micromirrors under the pattern area to be simulated are turned on, and the remaining micromirrors are turned off.

8. An efficient DMD micromirror array optical simulation system for avoiding image distortion in the design phase, used to complete the optical simulation method described in any one of claims 1 to 7.

Images