An electronic grade hydrogen fluoride production preparation device

Abstract

The present application relates to hydrogen fluoride production technical field, and disclose a kind of electronic grade hydrogen fluoride production preparation device, including stripping reaction kettle and crude fine integrated purification tower, the side of stripping reaction kettle is connected with exhaust pipe, exhaust pipe is connected stripping reaction kettle, crude fine integrated purification tower is provided with anti-blocking screening mechanism, anti-blocking screening mechanism includes horizontal screening assembly and longitudinal screening assembly, horizontal screening assembly includes upper rectangle frame and horizontal screen silk, and the top of upper rectangle frame is evenly distributed with several horizontal screen silk along its length direction;Longitudinal screening assembly includes lower rectangle frame and longitudinal screen silk, and upper rectangle frame and lower rectangle frame have the freedom of movement along the height direction of crude fine integrated purification tower, and the top of lower rectangle frame is equally spaced with several longitudinal screen silk along its width direction, and several longitudinal screen silk contact several horizontal screen silk to form mesh format crude filter screen, for solving the problem that existing purification tower is easily blocked in pretreatment process and cannot be dredged.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of hydrogen fluoride production, in particular to an electronic-grade hydrogen fluoride production device. BACKGROUND

[0002] Electronic-grade hydrogen fluoride is mainly used as a cleaning agent and an etching agent in the photovoltaic and integrated circuit industries, and is one of the key auxiliary materials in the industries. At present, hydrogen fluoride is prepared from fluorite, low-grade fluorite is mixed with sulfuric acid, superheated steam is added and reacted in space, the generated gas is pretreated, the fluorite carried in the gas and water mist are removed, and finally the pretreated gas is treated by fluorosilicic acid to obtain anhydrous hydrogen fluoride. In the pretreatment, a purification tower is needed for the preliminary treatment of the gas. The purification tower filters out the fluorite powder carried in the gas through a screen. Since the fluorite powder and water mist are carried in the gas, the screened fluorite powder is easy to adhere to the screen, which easily causes the blockage of the screen. The existing purification tower cannot automatically dredge the blocked screen, which affects the pretreatment efficiency and effect of the gas. SUMMARY

[0003] The purpose of the present application is to overcome the shortcomings of the prior art and provide an electronic-grade hydrogen fluoride production device to solve the problem of easy blockage and dredging of the existing purification tower during pretreatment.

[0004] The purpose of the present application is achieved by the following technical scheme: an electronic-grade hydrogen fluoride production device, comprising a gas stripping reaction kettle and a crude and fine integrated purification tower, a stirring mechanism is arranged in the gas stripping reaction kettle, an exhaust pipe is connected to one side of the gas stripping reaction kettle, the bottom of the gas stripping reaction kettle is connected to the end of the exhaust pipe away from the gas stripping reaction kettle, and the gas stripping reaction kettle is connected with a superheated steam pipe, a sulfuric acid feeding pipe and a fluorite feeding pipe;

[0005] The crude and fine integrated purification tower is sequentially provided with a coarse screening cavity, a cooling cavity and a demisting cavity from top to bottom, a anti-blocking screening mechanism is arranged in the coarse screening cavity, the anti-blocking screening mechanism comprises a horizontal screening assembly and a vertical screening assembly, and the horizontal screening assembly and the vertical screening assembly are arranged in an upper-lower opposite mode;

[0006] The horizontal screening assembly comprises an upper rectangular frame, horizontal screen wires and horizontal dredging strips, the upper rectangular frame is slidingly arranged in the crude and fine integrated purification tower, the upper rectangular frame moves along the height direction of the crude and fine integrated purification tower, a plurality of horizontal screen wires are uniformly distributed on the bottom of the upper rectangular frame along the length direction of the upper rectangular frame, and the horizontal dredging strips are arranged between every two adjacent horizontal screen wires, the horizontal dredging strips are located above the upper rectangular frame and are fixedly connected to the crude and fine integrated purification tower;

[0007] The longitudinal screening assembly comprises a lower rectangular frame, longitudinal screening wires and longitudinal unblocking strips, the lower rectangular frame is located directly below the upper rectangular frame, the lower rectangular frame has a degree of freedom of moving along the height direction of the integrated roughing and refining tower, the top of the lower rectangular frame is provided with a plurality of longitudinal screening wires at equal intervals along the width direction of the lower rectangular frame, the longitudinal screening wires are perpendicular to the transverse screening wires, the longitudinal unblocking strips are arranged between every two adjacent longitudinal screening wires, the longitudinal unblocking strips are located below the lower rectangular frame and are fixedly connected to the integrated roughing and refining tower, and a plurality of longitudinal screening wires contact a plurality of transverse screening wires to form a net-shaped rough filtering net.

[0008] The upper rectangular frame and the lower rectangular frame are provided with a bidirectional spring mechanism, the bidirectional spring mechanism comprises a mounting plate, an upper spring and a lower spring, the mounting plate is fixed to the inner wall of the integrated roughing and refining tower, the mounting plate is located between the upper rectangular frame and the lower rectangular frame, the upper spring and the lower spring are connected to the top and the bottom of the mounting plate respectively, the bottom of the upper rectangular frame is provided with a first slot, the first slot extends to the side of the upper rectangular frame close to the mounting plate, the top of the lower rectangular frame is provided with a second slot, the second slot extends to the side of the lower rectangular frame close to the mounting plate, when the upper rectangular frame contacts the lower rectangular frame, the mounting plate is located in the space formed by the first slot and the second slot, and the upper spring and the lower spring are in a compressed state.

[0009] In some embodiments, the upper rectangular frame is connected with a lower traction mechanism, the lower traction mechanism is located below the lower rectangular frame, the lower traction mechanism comprises a lower winding shaft, a lower winding disc and a lower traction rope, the lower winding shaft is rotatably arranged on the outer side of the integrated roughing and refining tower, two lower winding discs are fixedly sleeved on the lower winding shaft, the lower traction rope is connected to the two sides of the bottom of the upper rectangular frame, the two lower traction ropes pass through the integrated roughing and refining tower and are wound on the two lower winding discs respectively, and the lower rectangular frame is provided with a lower through hole for the lower traction rope to pass through.

[0010] In some embodiments, the lower rectangular frame is connected with an upper traction mechanism, the upper traction mechanism is located above the upper rectangular frame, the upper traction mechanism comprises an upper winding shaft, an upper winding disc and an upper traction rope, the upper winding shaft is rotatably arranged on the outer side of the integrated roughing and refining tower, two upper winding discs are fixedly sleeved on the upper winding shaft, the upper traction rope is connected to the two sides of the top of the lower rectangular frame, the two upper traction ropes pass through the integrated roughing and refining tower and are wound on the two upper winding discs respectively, the upper rectangular frame is provided with an upper through hole for the upper traction rope to pass through, and the upper traction rope and the lower traction rope are arranged alternately.

[0011] In some embodiments, the bottom wall and the top wall of the rough screening cavity are respectively provided with a lower guide roller and an upper guide roller, the lower traction rope passes around the bottom of the lower guide roller, and the upper traction rope passes around the top of the upper guide roller.

[0012] In some embodiments, the outer side of the rough and fine integrated purification tower is provided with a mounting rack, the upper winding shaft and the lower winding shaft are rotationally arranged on the mounting rack, the upper winding shaft and the lower winding shaft are respectively sleeved with an upper gear and a lower gear, the upper gear engages with the lower gear, the mounting rack is provided with a motor, and an output shaft of the motor is in transmission connection with one end of the upper winding shaft.

[0013] In some embodiments, the lower winding shaft is provided with a ratchet pawl mechanism, the ratchet pawl mechanism comprises a ratchet, a pawl shaft and a pawl, the ratchet is fixedly sleeved on the lower winding shaft, the pawl shaft is rotationally arranged on the mounting rack, the side wall of the pawl shaft is fixed with a sliding strip along the axial direction of the pawl shaft, the inner wall of the pawl is provided with a sliding groove, the pawl is slidably sleeved on the pawl shaft, the sliding strip is matched with the sliding groove, the upper side of the pawl is in contact with an elastic sheet, the lower side of the pawl is in contact with a limiting rod, and the elastic sheet and the limiting rod are connected with the mounting rack.

[0014] In some embodiments, the pawl shaft is fixedly sleeved with a spring mounting plate, the pawl shaft is sleeved with a spring, the two ends of the spring are connected with the pawl and the spring mounting plate respectively, the mounting rack is provided with a hydraulic cylinder, the hydraulic cylinder is parallel to the pawl shaft, and the pawl is located on the movement path of the telescopic shaft of the hydraulic cylinder.

[0015] In some embodiments, the top wall of the rough screening cavity is provided with a plurality of air holes communicating with the cooling cavity, the cooling cavity is provided with a cooling pipe, the cooling pipe comprises a tapered pipe and a vertical pipe, the top end of the vertical pipe communicates with the demisting cavity, the top end of the vertical pipe communicates with the small-diameter end of the tapered pipe, a second cooling cavity is formed between the inner wall and the outer wall of the cooling pipe, the bottom of the tapered pipe is connected with a water inlet pipe, the top of the vertical pipe is connected with a water outlet pipe, and the demisting cavity is provided with a wire mesh demisting layer.

[0016] In some embodiments, the stirring mechanism comprises a stirring shaft and a stirring motor, the stirring shaft is rotationally connected to the gas stripping reaction kettle, the stirring shaft is fixedly provided with stirring blades, the stirring motor is installed on the top of the gas stripping reaction kettle, and the output shaft of the stirring motor is in transmission connection with the top end of the stirring shaft.

[0017] The present application has the following advantages:

[0018] When filtering fixed impurities in the gas, the upper rectangular frame and the lower rectangular frame are in contact, the transverse screen wires and the longitudinal screen wires are in contact to form a mesh format rough filter screen to screen fixed impurities in the gas, when the mesh format rough filter screen is blocked, the upper rectangular frame moves upward and the lower rectangular frame moves downward, so that the transverse screen wires and the longitudinal screen wires are separated, thereby breaking part of the blockage and falling off the mesh format rough filter screen, the transverse unblocking strips are inserted into the adjacent transverse screen wires during the upward movement of the upper rectangular frame, and the blockage blocked between the adjacent transverse screen wires is discharged, the longitudinal unblocking strips are inserted into the adjacent longitudinal screen wires during the downward movement of the lower rectangular frame, and the blockage blocked between the adjacent longitudinal screen wires is discharged, thereby completing the rapid unblocking of the mesh format rough filter screen, and the unblocking efficiency is relatively fast, the conduction rate of the mesh format rough filter screen is not affected, and the pretreatment effect and the pretreatment efficiency of the gas are improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is an internal structure schematic view of the electronic grade hydrogen fluoride production preparation device.

[0020] Figure 2 It is an internal structure schematic view of the electronic grade hydrogen fluoride production preparation device. Figure 1 It is an enlarged view of A in the figure.

[0021] Figure 3 It is a bottom view of the transverse screen assembly in the electronic grade hydrogen fluoride production preparation device.

[0022] Figure 4 It is a top view of the longitudinal screen assembly in the electronic grade hydrogen fluoride production preparation device.

[0023] Figure 5 It is an internal structure schematic view of the rough and fine integrated purification tower in the electronic grade hydrogen fluoride production preparation device.

[0024] Figure 6 It is an internal structure schematic view of the rough and fine integrated purification tower in the electronic grade hydrogen fluoride production preparation device. Figure 5 It is an enlarged view of B in the figure.

[0025] Figure 7 It is a perspective view of the rough and fine integrated purification tower in the electronic grade hydrogen fluoride production preparation device.

[0026] Figure 8 It is an internal structure schematic view of the rough and fine integrated purification tower in the electronic grade hydrogen fluoride production preparation device. Figure 7 It is an enlarged view of C in the figure.

[0027] In the diagram, 1-Gas stripping reactor, 2-Integrated coarse and fine purification tower, 3-Exhaust pipe, 4-Superheated steam pipe, 5-Sulfuric acid dosing pipe, 6-Fluorite dosing pipe, 7-Coarse screening chamber, 8-Cooling chamber, 9-Demisting chamber, 10-Transverse screening assembly, 11-Vertical screening assembly, 12-Upper rectangular frame, 13-Transverse screen wire, 14-Transverse unblocking strip, 15-Lower rectangular frame, 16-Vertical screen wire, 17-Vertical unblocking strip, 18-Mounting plate, 19-Upper spring, 20-Lower spring, 21-First slot, 22-Second slot, 23-Lower winding shaft, 24-Lower winding reel, 25-Lower traction rope, 26-Lower... 27-Upper winding shaft, 28-Upper winding reel, 29-Upper traction rope, 30-Upper through hole, 31-Lower guide roller, 32-Upper guide roller, 33-Mounting bracket, 34-Upper gear, 35-Lower gear, 36-Motor, 37-Ratchet, 38-Pawl shaft, 39-Pawl, 40-Slide bar, 41-Spring mounting plate, 42-Spring, 43-Hydraulic cylinder, 44-Elastic sheet, 45-Limit rod, 46-Conical tube, 47-Vertical tube, 48-Second cooling chamber, 49-Water inlet pipe, 50-Water outlet pipe, 51-Agitator shaft, 52-Agitator motor, 53-Agitator blade, 54-Wire mesh demisting layer. Detailed Implementation

[0028] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings, but the scope of protection of the present invention is not limited to the following description.

[0029] Example 1, such as Figures 1 to 8 As shown, an electronic-grade hydrogen fluoride production and preparation apparatus includes a stripping reactor 1 and an integrated crude and refined purification tower 2. The stripping reactor 1 is equipped with a stirring mechanism. An exhaust pipe 3 is connected to one side of the stripping reactor 1, with the end of the exhaust pipe 3 away from the bottom of the stripping reactor 1 connected to the bottom. The stripping reactor 1 is connected to a superheated steam pipe 4, a sulfuric acid inlet pipe 5, and a fluorite inlet pipe 6. Low-grade fluorite is added to the stripping reactor 1 through the fluorite inlet pipe 6, and sulfuric acid is added to the stripping reactor 1 through the sulfuric acid inlet pipe 5. High-temperature steam is introduced into the stripping reactor 1 through the superheated steam pipe 4 to accelerate the chemical reaction. In the reaction process, the gas stripping reactor 1 is also equipped with an air pipe. Air is introduced through the air pipe to act as the gas stripping medium, completing the gas stripping reaction. The resulting gas mixture is discharged into the integrated coarse and fine purification tower 2 through the exhaust pipe 3. The integrated coarse and fine purification tower 2 performs preliminary treatment on the gas mixture, and the treated gas is then subjected to final treatment with fluorosilicic acid to obtain anhydrous hydrogen fluoride. The integrated coarse and fine purification tower 2 is arranged from top to bottom as a coarse screening chamber 7, a cooling chamber 8, and a demisting chamber 9. The coarse screening chamber 7 is equipped with an anti-clogging screening mechanism, which includes a transverse screening component 10 and a longitudinal screening component 11, such as... Figure 1 and Figure 3As shown, the transverse screening assembly 10 is arranged opposite to the longitudinal screening assembly, the gas mixture is screened first and then cooled, the high-temperature gas has high flowability, which can accelerate the gas mixture to pass through the anti-blocking screening mechanism, and then the gas enters the cooling cavity 8 for cooling, and the cooled gas enters the demisting cavity 9 to remove water mist and preliminarily obtain hydrogen fluoride; the transverse screening assembly 10 includes an upper rectangular frame 12, transverse screening wires 13 and transverse unblocking strips 14, the upper rectangular frame 12 is slidingly arranged in the rough and fine integrated purification tower 2, the upper rectangular frame 12 moves along the height direction of the rough and fine integrated purification tower 2, and the bottom of the upper rectangular frame 12 is uniformly provided with a plurality of transverse screening wires 13 along the length direction of the upper rectangular frame 12, and a transverse unblocking strip 14 is arranged between every two adjacent transverse screening wires 13, the transverse unblocking strip 14 is located above the upper rectangular frame 12 and is fixedly connected to the rough and fine integrated purification tower 2; as shown, Figures 1 to 4 As shown, the longitudinal screening assembly includes a lower rectangular frame 15, longitudinal screening wires 16 and longitudinal unblocking strips 17, the lower rectangular frame 15 is located directly below the upper rectangular frame 12, the lower rectangular frame 15 has the freedom to move along the height direction of the rough and fine integrated purification tower 2, the top of the lower rectangular frame 15 is uniformly provided with a plurality of longitudinal screening wires 16 along the width direction of the lower rectangular frame 15, the longitudinal screening wires 16 are perpendicular to the transverse screening wires 13, a longitudinal unblocking strip 17 is arranged between every two adjacent longitudinal screening wires 16, the longitudinal unblocking strip 17 is located below the lower rectangular frame 15 and is fixedly connected to the rough and fine integrated purification tower 2, and the plurality of longitudinal screening wires 16 contact the plurality of transverse screening wires 13 to form a mesh format rough filter screen, when filtering fixed impurities in the gas, the upper rectangular frame 12 contacts the lower rectangular frame 15 to make the transverse screening wires 13 contact the longitudinal screening wires 16 to form the mesh format rough filter screen to screen the fixed impurities in the gas, when the mesh format rough filter screen is blocked, the upper rectangular frame 12 moves upward and the lower rectangular frame 15 moves downward to separate the transverse screening wires 13 from the longitudinal screening wires 16, so that part of the blockage is broken and falls off from the mesh format rough filter screen, the transverse unblocking strip 14 is inserted into the adjacent transverse screening wires 13 in the process that the upper rectangular frame 12 moves upward to discharge the blockage blocked between the adjacent transverse screening wires 13, the longitudinal unblocking strip 17 is inserted into the adjacent longitudinal screening wires 16 in the process that the lower rectangular frame 15 moves downward to discharge the blockage blocked between the adjacent longitudinal screening wires 16, so that the mesh format rough filter screen is quickly unblocked, the unblocking efficiency is high, the conduction rate of the mesh format rough filter screen is not affected, and the pretreatment effect and efficiency of the gas are improved.

[0030] Further, as shown, Figure 1The stirring mechanism includes a stirring shaft 51 and a stirring motor 52. The stirring shaft 51 is rotationally connected to the gas stripping reaction kettle 1. The stirring shaft 51 is fixedly provided with stirring blades 53. The stirring motor 52 is installed on the top of the gas stripping reaction kettle 1. The output shaft of the stirring motor 52 is in transmission connection with the top end of the stirring shaft 51. The stirring motor 52 drives the stirring shaft 51 to rotate. The stirring shaft 51 drives the stirring blades 53 to rotate, so that the low-grade fluorite and sulfuric acid are fully mixed.

[0031] Example two, on the basis of example one, as Figure 1 and Figure 2 A bidirectional spring mechanism is arranged between the upper rectangular frame 12 and the lower rectangular frame 15. The bidirectional spring mechanism includes a mounting plate 18, an upper spring 19 and a lower spring 20. The mounting plate 18 is fixed to the inner wall of the rough and fine integrated purification tower 2. The mounting plate 18 is located between the upper rectangular frame 12 and the lower rectangular frame 15. The upper spring 19 and the lower spring 20 are respectively connected to the top and bottom of the mounting plate 18. The bottom of the upper rectangular frame 12 is provided with a first notch 21. The first notch 21 extends to the side of the upper rectangular frame 12 close to the mounting plate 18. The top of the lower rectangular frame 15 is provided with a second notch 22. The second notch 22 extends to the side of the lower rectangular frame 15 close to the mounting plate 18. When the upper rectangular frame 12 contacts the lower rectangular frame 15, the mounting plate 18 is located in the space formed by the first notch 21 and the second notch 22, and the upper spring 19 and the lower spring 20 are in a compressed state. When the upper rectangular frame 12 and the lower rectangular frame 15 contact to form the mesh format rough filter screen, the upper rectangular frame 12 needs to move downward to compress the upper spring 19, and the lower rectangular frame 12 needs to move upward to compress the lower spring 20, so that the upper spring 19 and the lower spring 20 are compressed at the same time. Under the reaction force of the upper spring 19 and the lower spring 20, the upper rectangular frame 12 and the lower rectangular frame 15 have a trend of moving in opposite directions. When it is necessary to dredge the mesh format rough filter screen, the connection state between the upper rectangular frame 12 and the lower rectangular frame 15 is unlocked. At this time, the upper rectangular frame 12 moves upward under the reaction force of the upper spring 19, so that the transverse dredging strip 14 can be inserted into the adjacent transverse screen wire 13. At the same time, the lower rectangular frame 15 moves downward under the reaction force of the lower spring 20, so that the longitudinal dredging strip 17 can be inserted into the adjacent longitudinal screen wire 16. Thus, the dredging of the mesh format rough filter screen is quickly completed. Since the upper spring 19 and the lower spring 20 will not reset immediately, they will drive the upper rectangular frame 12 and the lower rectangular frame 15 to move up and down repeatedly, so that the upper rectangular frame 12 and the lower rectangular frame 15 vibrate. The clogging material is quickly shaken off through the vibration, which has a good dredging effect. When the dredging is completed, the upper rectangular frame 12 moves downward to compress the upper spring 19, and the lower rectangular frame 15 moves upward to compress the lower spring 20, so that the upper limiting frame 12 contacts the lower limiting frame 15 to form the mesh format rough filter screen.

[0032] Example three, on the basis of example two, as Figure 1 , Figure 5, Figure 6 and Figure 7 As shown, the upper rectangular frame 12 is connected to a lower traction mechanism, which is located below the lower rectangular frame 15. The lower traction mechanism includes a lower winding shaft 23, a lower winding reel 24, and a lower traction rope 25. The lower winding shaft 23 is rotatably mounted on the outside of the integrated coarse and fine purification tower 2. Two lower winding reels 24 are fixedly sleeved on the lower winding shaft 23. The lower traction ropes 25 are connected to both sides of the bottom of the upper rectangular frame 12. The two lower traction ropes 25 pass through the integrated coarse and fine purification tower 2 and are respectively wound around the two lower winding reels 24. The lower rectangular frame 15 has a through hole 26 for the lower traction ropes 25 to pass through. The lower rectangular frame 15 is connected to an upper traction mechanism, which is located above the upper rectangular frame 12. The upper traction mechanism includes an upper winding shaft 27, an upper winding reel 28, and an upper traction rope 29. The upper winding shaft 27 is rotatably mounted on the outside of the integrated coarse and fine purification tower 2. Two upper winding reels 28 are fixedly sleeved on the upper winding shaft 27. The upper traction ropes 29 are connected to both sides of the top of the lower rectangular frame 15. The two upper traction ropes 29 pass through the integrated coarse and fine purification tower 2 and are respectively wound around the two upper winding reels 28. The upper rectangular frame 12 has an upper through hole 30 for the upper traction ropes 29 to pass through. The upper traction rope 29 and the lower traction rope 25 are arranged alternately. A mounting frame 33 is provided on the outside of the coarse and fine integrated purification tower 2. Both the upper winding shaft 27 and the lower winding shaft 23 are rotatably mounted on the mounting frame 33. An upper gear 34 and a lower gear 35 are respectively mounted on the upper winding shaft 27 and the lower winding shaft 23. The upper gear 34 meshes with the lower gear 35. A motor 36 is mounted on the mounting frame 33. The output shaft of the motor 36 is connected to one end of the upper winding shaft 27. The motor 36 drives the upper winding shaft 27 to rotate, which in turn drives the upper gear 34 to rotate. The upper gear 34, through its interaction with the lower gear 35... The meshing drives the lower winding shaft 23 to rotate, thereby causing the upper winding shaft 27 and the lower winding shaft 23 to rotate simultaneously. The upper winding shaft 27 drives the lower rectangular frame 15 to move upward through the upper traction rope 29, and the lower winding shaft 23 drives the upper rectangular frame 12 to move downward through the lower traction rope 25. Thus, the upper rectangular frame 12 moves downward and the lower rectangular frame 15 moves upward at the same time, so that the upper rectangular frame 12 and the lower rectangular frame 15 come into contact to form a mesh-like coarse filter screen. The setting of the upper through hole 30 and the lower through hole 26, as well as the staggered setting of the upper traction rope 29 and the lower traction rope 25, prevents the upper traction rope 29 and the lower traction rope 25 from interfering with each other.

[0033] Furthermore, such as Figure 1 and Figure 5As shown, the bottom wall and the top wall of the coarse screening cavity 7 are respectively provided with a lower guide roller 31 and an upper guide roller 32, the lower traction rope 25 passes around the bottom of the lower guide roller 31, and the upper traction rope 29 passes around the top of the upper guide roller 32, the lower guide roller 31 guides the lower traction rope 25, so that the lower traction rope 25 can stably drive the upper rectangular frame 12 to move, and the upper guide roller 32 guides the upper traction rope 29, so that the upper traction rope 29 can stably drive the lower rectangular frame 15 to move.

[0034] Example four, on the basis of example three, as Figure 1 、 Figure 7 and Figure 8As shown, the lower winding shaft 23 is provided with a ratchet pawl mechanism, the ratchet pawl mechanism includes a ratchet 37, a pawl shaft 38 and a pawl 39, the ratchet 37 is fixedly sleeved on the lower winding shaft 23, the pawl shaft 38 is rotationally arranged on the mounting frame 33, the side wall of the pawl shaft 38 is fixed with a sliding strip 40 along the axial direction of the pawl shaft 38, the inner wall of the pawl 39 is provided with a sliding groove, the pawl 39 is slidably sleeved on the pawl shaft 38, and the sliding strip 40 is matched with the sliding groove, the upper side of the pawl 39 is in contact with a resilient sheet 44, and the lower side of the pawl 39 is in contact with a limiting rod 45, the resilient sheet 44 and the limiting rod 45 are both connected with the mounting frame 33, the pawl shaft 38 is fixedly sleeved with a spring mounting plate 41, the pawl shaft 38 is sleeved with a spring 42, the two ends of the spring 42 are connected with the pawl 39 and the spring mounting plate 41 respectively, the mounting frame 33 is provided with a hydraulic cylinder 43, the hydraulic cylinder 43 is parallel to the pawl shaft 38, and the pawl 39 is located on the movement path of the hydraulic cylinder 43, the matching of the ratchet 37 and the pawl 39 limits the reverse rotation freedom degree of the lower winding shaft 23, so that the lower winding shaft 23 can only rotate forward, when the lower winding shaft 23 rotates forward, the pawl 39 is deflected upward to press the resilient sheet 44 to deform, so that the pawl 39 can smoothly pass through the ratchet tooth groove of the ratchet 37, when the lower winding shaft 23 rotates forward, the lower winding disc winds and rolls the lower traction rope 25 to drive the upper rectangular frame 12 to move downward, at the same time, the reverse rotation of the upper winding shaft 27 drives the upper winding disc 28 to rotate and wind the upper traction rope 29, so that the upper traction rope 29 pulls the lower rectangular frame 15 to move upward, when the upper rectangular frame 12 and the lower rectangular frame 15 are in contact, the motor 36 stops rotating, at this time, due to the matching of the ratchet 37 and the pawl 39, the reverse rotation freedom degree of the lower winding shaft 23 is limited, so that the upper rectangular frame 12 and the lower rectangular frame 15 can continuously maintain the contact state, when it is needed to dredge the mesh format coarse filter screen, the hydraulic cylinder 43 pushes the pawl 39 to move along the axial direction of the pawl shaft 38, so that the pawl 39 compresses the spring 42 and separates from the ratchet 37, so that the reverse rotation of the lower winding shaft 23 is unlocked, under the reaction force of the upper spring 19 and the lower spring 20, the upper rectangular frame 12 moves upward and the lower rectangular frame 15 moves downward to perform the dredging operation, at this time, the lower winding shaft 23 rotates reversely and the upper winding shaft 27 rotates forward, after the dredging operation is completed, the hydraulic cylinder 43 is reset, the pawl 39 is reset under the reaction force of the spring 42, so that the pawl 39 is matched with the ratchet 37 again, the motor 36 starts to wind the upper traction rope 29 and the lower traction rope 25, so that the upper rectangular frame 12 and the lower rectangular frame 15 are in contact again to form the mesh format coarse filter screen.

[0035] Example five, on the basis of example four, as Figure 1 and Figure 5As shown, the top wall of the coarse screening cavity 7 is provided with a plurality of air holes communicated with the cooling cavity 8, the cooling cavity 8 is provided with a cooling pipe, the cooling pipe comprises a tapered pipe 46 and a vertical pipe 47, the top end of the vertical pipe 47 is communicated with the demisting cavity 9, the top end of the vertical pipe 47 is communicated with the small diameter end of the tapered pipe 46, the inner wall and the outer wall of the cooling pipe form a second cooling cavity 48, the bottom of the tapered pipe 46 is connected with a water inlet pipe 49, the top of the vertical pipe 47 is connected with a water outlet pipe 50, cold water is injected into the second cooling cavity 48 through the water inlet pipe 49, the filtered gas flows through the tapered pipe 46 and the vertical pipe 47 into the demisting cavity 9, so as to carry out interval heat exchange with the cold water, and then the gas is cooled, the demisting cavity 9 is provided with a wire mesh demisting layer 54, the cooled gas enters the demisting cavity 9, the cooled gas is treated through the wire mesh demisting layer 54, and water mist in the gas is preliminarily removed, and then the gas enters the next process for treatment.

[0036] In the description of the present application, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inner", "front", "central", "both ends" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application; and it is known to those skilled in the art that the beneficial effects to be achieved by the present application are only better beneficial effects compared with the current embodiments in the prior art in specific cases, and are not intended to directly achieve the best use effect in the industry.

[0037] The above description is only the preferred embodiment of the present application, and it should be understood that the present application is not limited to the form disclosed herein, and should not be considered as excluding other embodiments, but can be used in various other combinations, modifications and environments, and can be modified within the scope of the concepts described herein by the above-mentioned teaching or related art or knowledge. Any modification and change made by those skilled in the art without departing from the spirit and scope of the present application shall be within the protection scope of the claims of the present application.

Claims

1. An apparatus for producing electronic-grade hydrogen fluoride, characterized in that, It includes a stripping reactor and an integrated crude and refined purification tower. The stripping reactor is equipped with a stirring mechanism. An exhaust pipe is connected to one side of the stripping reactor. The end of the exhaust pipe away from the stripping reactor is connected to the bottom of the stripping reactor. The stripping reactor is connected to a superheated steam pipe, a sulfuric acid injection pipe, and a fluorite injection pipe. The integrated coarse and fine purification tower is provided with a coarse screening chamber, a cooling chamber and a demisting chamber arranged sequentially from top to bottom. The coarse screening chamber is provided with an anti-clogging screening mechanism, which includes a transverse screening component and a longitudinal screening component, and the transverse screening component and the longitudinal screening component are arranged opposite each other vertically. The transverse screening component includes an upper rectangular frame, transverse screen wires, and transverse unblocking strips. The upper rectangular frame is slidably disposed inside the integrated coarse and fine purification tower. The upper rectangular frame moves along the height direction of the integrated coarse and fine purification tower. Several transverse screen wires are evenly distributed at the bottom of the upper rectangular frame along its own length direction. A transverse unblocking strip is disposed between each two adjacent transverse screen wires. The transverse unblocking strip is located above the upper rectangular frame and is fixedly connected to the integrated coarse and fine purification tower. The longitudinal screening component includes a lower rectangular frame, longitudinal screen wires, and longitudinal unblocking strips. The lower rectangular frame is located directly below the upper rectangular frame and has the freedom to move along the height direction of the integrated coarse and fine purification tower. Several longitudinal screen wires are evenly spaced at the top of the lower rectangular frame along its width direction. The longitudinal screen wires are perpendicular to the transverse screen wires. A longitudinal unblocking strip is provided between each two adjacent longitudinal screen wires. The longitudinal unblocking strip is located below the lower rectangular frame and is fixedly connected to the integrated coarse and fine purification tower. Several longitudinal screen wires contact several transverse screen wires to form a mesh-like coarse filter screen. A bidirectional spring mechanism is provided between the upper and lower rectangular frames. The bidirectional spring mechanism includes a mounting plate, an upper spring, and a lower spring. The mounting plate is fixed to the inner wall of the integrated coarse and fine purification tower and is located between the upper and lower rectangular frames. The upper spring and the lower spring are respectively connected to the top and bottom of the mounting plate. A first slot is opened at the bottom of the upper rectangular frame, extending to the side of the upper rectangular frame near the mounting plate. A second slot is opened at the top of the lower rectangular frame, extending to the side of the lower rectangular frame near the mounting plate. When the upper rectangular frame contacts the lower rectangular frame, the mounting plate is located in the space formed by the first slot and the second slot, and the upper spring and the lower spring are in a compressed state.

2. The apparatus for producing electronic-grade hydrogen fluoride according to claim 1, characterized in that, The upper rectangular frame is connected to a lower traction mechanism, which is located below the lower rectangular frame. The lower traction mechanism includes a lower winding shaft, a lower winding reel, and a lower traction rope. The lower winding shaft is rotatably mounted on the outside of the integrated coarse and fine purification tower. Two lower winding reels are fixedly sleeved on the lower winding shaft. The lower traction ropes are connected to both sides of the bottom of the upper rectangular frame. The two lower traction ropes pass through the integrated coarse and fine purification tower and are respectively wound around the two lower winding reels. The lower rectangular frame has a through hole for the lower traction ropes to pass through.

3. The apparatus for producing electronic-grade hydrogen fluoride according to claim 2, characterized in that, The lower rectangular frame is connected to an upper traction mechanism, which is located above the upper rectangular frame. The upper traction mechanism includes an upper winding shaft, an upper winding reel, and an upper traction rope. The upper winding shaft is rotatably mounted on the outside of the integrated coarse and fine purification tower. Two upper winding reels are fixedly sleeved on the upper winding shaft. The upper traction ropes are connected to both sides of the top of the lower rectangular frame. The two upper traction ropes pass through the integrated coarse and fine purification tower and are respectively wound around the two upper winding reels. An upper through hole is provided on the upper rectangular frame for the upper traction ropes to pass through. The upper traction ropes and the lower traction ropes are arranged alternately.

4. The apparatus for producing electronic-grade hydrogen fluoride according to claim 3, characterized in that, The bottom and top walls of the coarse screening chamber are respectively provided with a lower guide roller and an upper guide roller. The lower traction rope passes around the bottom of the lower guide roller, and the upper traction rope passes around the top of the upper guide roller.

5. The apparatus for producing electronic-grade hydrogen fluoride according to claim 3, characterized in that, An installation frame is provided on the outside of the integrated coarse and fine purification tower. The upper and lower winding shafts are rotatably mounted on the installation frame. An upper gear and a lower gear are respectively mounted on the upper and lower winding shafts. The upper gear meshes with the lower gear. A motor is provided on the installation frame. The output shaft of the motor is connected to one end of the upper winding shaft.

6. The apparatus for producing electronic-grade hydrogen fluoride according to claim 5, characterized in that, A ratchet and pawl mechanism is provided on the lower winding shaft. The ratchet and pawl mechanism includes a ratchet, a pawl shaft, and a pawl. The ratchet is fixedly sleeved on the lower winding shaft. The pawl shaft is rotatably mounted on the mounting bracket. A slide bar is fixed to the side wall of the pawl shaft along its own axial direction. A groove is formed on the inner wall of the pawl. The pawl is slidably sleeved on the pawl shaft, and the slide bar is adapted to the groove. An elastic piece is contacted above the pawl, and a limit rod is contacted below the pawl. Both the elastic piece and the limit rod are connected to the mounting bracket.

7. The apparatus for producing electronic-grade hydrogen fluoride according to claim 6, characterized in that, A spring mounting plate is fixedly sleeved on the pawl shaft, and a spring is sleeved on the pawl shaft. The two ends of the spring are respectively connected to the pawl and the spring mounting plate. A hydraulic cylinder is provided on the mounting bracket. The hydraulic cylinder is parallel to the pawl shaft, and the pawl is located on the moving path of the hydraulic cylinder's telescopic shaft.

8. The apparatus for producing electronic-grade hydrogen fluoride according to claim 1, characterized in that, The top wall of the coarse screening chamber is provided with several air holes communicating with the cooling chamber. The cooling chamber is provided with a cooling pipe, which includes a conical pipe and a vertical pipe. The top end of the vertical pipe is connected to the demisting chamber, and the top end of the vertical pipe is connected to the small diameter end of the conical pipe. A second cooling chamber is formed between the inner wall and the outer wall of the cooling pipe. The bottom of the conical pipe is connected to a water inlet pipe, and the top of the vertical pipe is connected to a water outlet pipe. The demisting chamber is provided with a wire mesh demisting layer.

9. The apparatus for producing electronic-grade hydrogen fluoride according to claim 1, characterized in that, The stirring mechanism includes a stirring shaft and a stirring motor. The stirring shaft is rotatably connected to the gas stripping reactor, and stirring blades are fixedly installed on the stirring shaft. The stirring motor is installed on the top of the gas stripping reactor, and the output shaft of the stirring motor is drivenly connected to the top end of the stirring shaft.

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